An automatic developer detection device and its detection method

Abstract

This invention belongs to the field of developer testing technology, specifically relating to an automatic developer testing device and method. The automatic developer testing device includes a test developer tank, a rinsing tank, and a standard developer tank, all mounted on a worktable. The worktable is also equipped with a mechanical gripper and a moving mechanism. The test piece has a testing section and a standard section. The mechanical gripper holds the test piece and, with the aid of the moving mechanism, has the freedom to move back and forth between the test developer tank, the rinsing tank, and the standard developer tank. This invention integrates the testing section and the standard section on the test piece, allowing the same test piece to undergo sequential treatment with two different developers within a short time. This ensures that the environmental parameters, such as temperature, are essentially the same during the immersion process of the standard test piece and the test piece. Furthermore, comparison can be completed without replacing the test piece, reducing testing errors caused by individual differences in test pieces and facilitating subsequent comparative observation by staff.

Description

Technical Field

[0001] This invention belongs to the field of developer detection technology, specifically relating to an automatic developer detection device and its detection method. Background Technology

[0002] Developers are indispensable key chemicals in semiconductor manufacturing, printing plate making, and photolithography. Their concentration, activity, and other quality parameters directly determine the quality of the developing effect, thus affecting the precision and performance of the final product. Therefore, it is crucial to conduct rapid and accurate quality testing of developers before use and during mass production.

[0003] Traditional developer quality testing often relies on manual methods. Workers hold the test piece, immersing it in the developer for a certain time before removing it. Then, another standard test piece is immersed in the standard developer. Finally, the quality of the developer is determined by visually comparing the clarity of lines and other indicators on the two sets of test pieces. However, developers are often highly corrosive and irritating; direct contact can easily cause damage to the skin and respiratory tract, posing serious safety hazards. Furthermore, in manual operation, parameters such as immersion time, removal speed, and rinsing degree are difficult to maintain consistently, leading to subjective errors in the test results and affecting the accuracy of the assessment.

[0004] Therefore, semi-automated developer testing equipment has gradually emerged in existing technologies. This equipment uses mechanical structures to simulate manual operation processes, eliminating the need for workers to directly contact the developer and thus avoiding the risk of corrosive damage. However, the processing of the test piece and the standard sample requires two independent operations, or direct comparison with the existing standard sample. But the developing effect of the developer is easily affected by environmental changes, or differences in operating parameters can lead to inconsistent comparison benchmarks, affecting the reliability of the test results. Furthermore, existing test pieces and standard samples use different carriers, requiring frequent switching during comparison, further increasing operational complexity and the probability of error. Summary of the Invention

[0005] To address the problems existing in the prior art, the present invention provides an automatic developer detection device and method. By integrating a detection unit and a standard unit on the test piece, the same test piece undergoes two consecutive treatments with different developers within a short period of time. This ensures that the environmental parameters, such as temperature, are basically the same during the immersion process of the standard test piece and the test piece. Furthermore, the comparison can be completed without replacing the test piece, reducing detection errors caused by individual differences in the test pieces and facilitating subsequent comparative observation by staff.

[0006] The specific technical solution adopted in this invention is as follows:

[0007] An automatic developer testing device includes a test developer tank, a rinsing tank, and a standard developer tank, all mounted on a worktable. The worktable is also equipped with a mechanical gripper and a moving mechanism. The test piece has a testing section and a standard section. The mechanical gripper holds the test piece and has the freedom to move back and forth between the test developer tank, the rinsing tank, and the standard developer tank via the moving mechanism. The testing section of the test piece is moved by the mechanical gripper to the test developer tank for immersion, and the standard section of the test piece is moved by the mechanical gripper to the standard developer tank for immersion.

[0008] The test piece also includes a main body, and the detection part and the standard part are respectively located on the adjacent side of the main body and together form an L-shaped structure. A sample tube is also provided on the main body, and the sample tube is filled with the developing solution to be tested. The sample tube is inserted into the main body through the mounting hole on the main body.

[0009] The sample tube includes a tube body and a tube cap, with a sealing gasket between the tube body and the tube cap, and a liquid dispensing hole on the tube cap.

[0010] The workbench is also equipped with a liquid collection syringe and a push-pull assembly. The liquid collection syringe is connected to the moving mechanism via the push-pull assembly. The tip of the liquid collection syringe is moved to the liquid collection hole of the sample tube by the moving mechanism and extends into the tube body through the sealing gasket. The liquid collection syringe draws out the test developing solution from the tube body by the pull of the push-pull assembly.

[0011] The push-pull assembly includes a support base and a lead screw, a guide rod, a pull block, and a drive motor mounted on the support base. The lead screw passes through one end of the pull block and is threaded into the pull block. The guide rod passes through the other end of the pull block and is slidably engaged with the pull block. The drive motor drives the lead screw to rotate and drives the pull block to reciprocate along the guide rod. The syringe of the liquid collection syringe is fixedly connected to the support base, and the piston of the liquid collection syringe is fixedly connected to the pull block and reciprocates with the aid of the pull block.

[0012] The mechanical gripper is rotatably connected to the moving mechanism via a turntable, and the detection part and the standard part of the test piece have vertically downward degrees of freedom by means of the rotation of the mechanical gripper.

[0013] The moving mechanism includes a longitudinal guide rail, a transverse guide rail, and a vertical guide rail. The longitudinal guide rail is symmetrically arranged on both sides of the worktable by means of a bracket. The transverse guide rail is mounted on the longitudinal guide rail on both sides. The two ends of the transverse guide rail are slidably engaged with the longitudinal guide rail by means of a first slide block and have a degree of freedom of movement along the X-axis. The vertical guide rail is slidably engaged with the transverse guide rail by means of a second slide block and has a degree of freedom of movement along the Y-axis. The mechanical gripper is slidably engaged with the vertical guide rail by means of a third slide block and has a degree of freedom of movement along the Z-axis. The mechanical gripper has a degree of freedom of reciprocating along the X, Y, and Z axes by means of the moving mechanism.

[0014] A wastewater tank is also provided below the workbench. The test developer storage tank, rinsing tank and standard developer storage tank are respectively connected to the wastewater tank via drain pipes.

[0015] An automatic detection method for developer includes the following steps:

[0016] S1. Attach the label with the information of the developer to be tested to the sample tube containing the corresponding developer to be tested, and then insert the sample tube into the test piece.

[0017] S2. Pour the standard developer into the standard developer storage tank;

[0018] S3. The mechanical gripper holds the test piece and moves it above the test developer tank. The syringe draws the test developer from the sample tube with the help of the moving mechanism and the push-pull assembly. Then the test developer is transferred to the test developer tank. The mechanical gripper rotates and makes the detection part of the test piece face downward. The detection part of the test piece is lowered by the mechanical gripper and immersed in the test developer.

[0019] S4. After the test piece is soaked in the test developer solution, the liquid collection syringe and the mechanical gripper holding the test piece are moved to the rinsing tank respectively. The liquid collection syringe draws out the clean water in the rinsing tank and discharges it. The residual test developer solution in the liquid collection syringe is cleaned. Then the mechanical gripper holds the test piece in the rinsing tank to rinse and dry the detection part.

[0020] S5. The mechanical gripper holds the cleaned test piece and moves it above the standard developer tank. The mechanical gripper rotates and makes the standard part of the test piece face downward. The standard part of the test piece descends with the help of the mechanical gripper and is immersed in the standard developer.

[0021] S6. After the test piece is soaked in the standard developer, the mechanical gripper holds the test piece away from the standard developer tank and moves it to the rinsing tank to rinse and dry the standard part of the test piece. Then the test piece is placed in the unloading area for later use.

[0022] S7. Drain the test developer from the previous test developer tank, clean the test developer tank, and repeat steps S3-S6.

[0023] S8. After all the developing solutions to be tested have been tested, the staff will observe the test pieces corresponding to each group of developing solutions. By comparing the clarity of the lines in the testing section and the standard section on the test pieces, the quality of the developing solutions to be tested will be determined.

[0024] The immersion time of the detection section of the test piece in the test developing solution is the same as the immersion time of the standard section in the standard developing solution.

[0025] The beneficial effects of this invention are:

[0026] 1. In this invention, a detection unit and a standard unit are integrated on the test piece. The detection unit is moved separately to the test developer tank for immersion, and the standard unit is moved separately to the standard developer tank for immersion. This allows the same test piece to undergo two types of developer treatment in a short period of time, ensuring that the environmental parameters such as temperature are basically the same during the immersion process of the standard test piece and the test piece. Furthermore, the comparison can be completed without replacing the test piece, reducing detection errors caused by individual differences in the test pieces and facilitating subsequent comparative observation by staff.

[0027] Meanwhile, because mechanical operation is performed by a mechanical gripper, the standard 90° rotation can standardize the operating parameters such as the immersion angle of the detection section and the standard section in their respective developing solutions. Furthermore, the mechanized detection process requires no manual intervention and is suitable for batch testing needs.

[0028] 2. In this invention, the space on the main body is used to directly insert and fix the sample tube containing the developer to be tested onto the test piece. Since the sample tube has the information of the corresponding developer to be tested pasted on it, it is convenient for the staff to check and record the test information, which further improves the test efficiency and makes it less likely to cause confusion of the information of different batches of developer to be tested, thus meeting the needs of batch testing.

[0029] During liquid collection, the moving mechanism first works with the mechanical gripper to grasp the preset gripping point of the test piece. Then, through a series of operations such as rotation, swinging, and movement, the liquid collection hole of the sample tube is aligned with the needle tip of the liquid collection syringe. At this point, the push-pull assembly pulls the piston of the liquid collection syringe outward, causing the syringe to draw the test developer from the sample tube. The syringe is then withdrawn from the sample tube and moved above the test developer reservoir. The push-pull assembly then pushes the piston of the syringe inward, discharging the drawn test developer into the reservoir. Finally, the mechanical gripper, through a series of operations such as rotation, swinging, and movement, immerses the test piece's detection section in the test developer reservoir. This method ensures the consistency between the label information and the test developer, avoiding confusion in test results, and eliminates the need for manual intervention in the addition of the test developer. Attached Figure Description

[0030] Figure 1 This is a side view schematic diagram of the automatic developer detection device.

[0031] Figure 2 This is a schematic diagram of the mechanical gripper.

[0032] Figure 3 This is a schematic diagram of the push-pull assembly.

[0033] Figure 4 This is a schematic diagram of the structure of the test piece;

[0034] Figure 5 This is a schematic diagram showing the test piece being immersed in the test developer and the standard developer;

[0035] In the attached diagram, 1 is the workbench, 2 is the developer tank, 3 is the rinsing tank, 4 is the standard developer tank, 5 is the mechanical gripper, 6 is the moving mechanism, 601 is the longitudinal guide rail, 602 is the transverse guide rail, 603 is the vertical guide rail, 604 is the first slide, 605 is the second slide, 606 is the third slide, 7 is the test piece, 701 is the main body, 702 is the detection section, 703 is the standard section, 8 is the sample tube, 9 is the liquid collection syringe, 10 is the push-pull assembly, 1001 is the support base, 1002 is the lead screw, 1003 is the guide rod, 1004 is the pull block, 1005 is the drive motor, 11 is the turntable, and 12 is the wastewater tank. Detailed Implementation

[0036] The present invention will be further described below with reference to the accompanying drawings and specific embodiments:

[0037] Specific embodiments, such as Figure 1-5 As shown, the present invention provides an automatic developer detection device, including a developer storage tank 2, a rinsing tank 3, and a standard developer storage tank 4 disposed on a workbench 1. The workbench 1 is also provided with a mechanical gripper 5 and a moving mechanism 6. The test piece 7 is provided with a detection part 702 and a standard part 703. The mechanical gripper 5 clamps the test piece 7 and has the freedom to reciprocate between the developer storage tank 2, the rinsing tank 3, and the standard developer storage tank 4 by means of the moving mechanism 6. The detection part 702 of the test piece 7 is moved to the developer storage tank 2 for immersion by means of the mechanical gripper 5, and the standard part 703 of the test piece 7 is moved to the standard developer storage tank 4 for immersion by means of the mechanical gripper 5.

[0038] Existing semi-automated developer testing equipment uses mechanical structures to simulate manual operation processes, eliminating the need for workers to directly contact the developer and thus avoiding the risk of corrosion damage. However, the processing of the test piece 7 and the standard test piece requires two independent operations, or the existing standard test piece can be directly compared with the test piece 7. However, the developing effect of the developer is easily affected by environmental changes (such as temperature and humidity), or the difference in operating parameters may lead to inconsistencies in the comparison benchmark, affecting the reliability of the test results. In addition, the existing test piece 7 and the standard test piece are on different carriers, requiring frequent switching during comparison, further increasing the operational complexity and the probability of error.

[0039] Therefore, in this invention, a detection unit 702 and a standard unit 703 are integrated on the test piece 7. The detection unit 702 is moved separately to the test developer tank 2 for immersion, and the standard unit 703 is moved separately to the standard developer tank 4 for immersion. This allows the same test piece to undergo two types of developer treatment in a short period of time, ensuring that the environmental parameters such as temperature are basically the same during the immersion process of the standard test piece and the test piece 7. Furthermore, the comparison can be completed without replacing the test piece, reducing detection errors caused by individual differences in the test pieces and facilitating subsequent comparative observation by staff.

[0040] Meanwhile, since mechanical operation is performed by the mechanical gripper 5, the standard 90° rotation can standardize the operating parameters such as the immersion angle of the detection unit 702 and the standard unit 703 in their respective developing solutions. Furthermore, the mechanized detection process does not require manual intervention and is suitable for batch detection needs.

[0041] The test piece 7 also includes a main body 701. The detection part 702 and the standard part 703 are respectively located on the adjacent side of the main body 701 and together form an L-shaped structure. A sample tube 8 is also provided on the main body 701. The sample tube 8 contains the developing solution to be tested. The sample tube 8 is inserted into the main body 701 through the mounting hole on the main body 701.

[0042] The L-shaped structure of the test piece 7 makes the detection section 702 and the standard section 703 independent of each other. They do not interfere with each other when they are immersed in the corresponding developing solution. Furthermore, the mechanical gripper 5 has a simple movement trajectory when switching the position of the detection section 702 and the standard section 703. It only requires the mechanical gripper 5 to rotate 90°, without the need for complicated operations.

[0043] In addition, the present invention also utilizes the space area on the main body 701 to directly insert and fix the sample tube 8 containing the developer to be tested onto the test piece 7. Since the sample tube 8 has the information of the corresponding developer to be tested pasted on it, it is convenient for the staff to check and record the test information, which further improves the testing efficiency and makes it less likely to cause confusion of the information of different batches of developer to be tested, thus meeting the needs of batch testing.

[0044] The sample tube 8 includes a tube body and a tube cap, with a sealing gasket between the tube body and the tube cap, and a liquid extraction hole on the tube cap.

[0045] The sealing gasket seals the developer solution inside the tube, preventing it from dripping down the tube opening during transfer and contaminating the experimental environment. It also prevents the developer solution from being oxidized by air, which could lead to changes in its performance.

[0046] The workbench 1 is also equipped with a liquid collection syringe 9 and a push-pull assembly 10. The liquid collection syringe 9 is connected to the moving mechanism 6 via the push-pull assembly 10. The needle tip of the liquid collection syringe 9 is moved to the liquid collection hole of the sample tube 8 via the moving mechanism 6 and extends into the tube body through the sealing gasket. The liquid collection syringe 9 draws out the test developing solution from the tube body by pulling the push-pull assembly 10.

[0047] During liquid collection, the moving mechanism 6 first works in conjunction with the mechanical gripper 5 to grasp the preset grasping point of the test piece 7. Then, through a series of operations such as rotation, swinging, and movement, the liquid collection hole of the sample tube 8 is aligned with the needle tip of the liquid collection syringe 9. At this time, the push-pull assembly 10 pulls the piston of the liquid collection syringe 9 outward, causing the liquid collection syringe 9 to draw the test developer solution from the sample tube 8. Then, the liquid collection syringe 9 is withdrawn from the sample tube 8 and moved above the test developer solution storage tank 2. At this time, the push-pull assembly 10 pushes the piston of the liquid collection syringe 9 inward, discharging the drawn test developer solution into the test developer solution storage tank 2. Then, the mechanical gripper 5, through a series of operations such as rotation, swinging, and movement, immerses the detection part 702 of the test piece 7 in the test developer solution storage tank 2. This method ensures the consistency between the label information and the test developer solution, avoids confusion in test results, and eliminates the need for manual intervention in the process of adding the test developer solution.

[0048] The push-pull assembly 10 includes a support base 1001 and a lead screw 1002, a guide rod 1003, a pull block 1004, and a drive motor 1005 disposed on the support base 1001. The lead screw 1002 passes through one end of the pull block 1004 and is threadedly engaged with the pull block 1004. The guide rod 1003 passes through the other end of the pull block 1004 and is slidably engaged with the pull block 1004. The drive motor 1005 drives the lead screw 1002 to rotate and drives the pull block 1004 to reciprocate along the guide rod 1003. The syringe of the liquid collection syringe 9 is fixedly connected to the support base 1001. The piston of the liquid collection syringe 9 is fixedly connected to the pull block 1004 and reciprocates with the help of the pull block 1004.

[0049] This invention utilizes a lead screw 1002 to precisely control the piston movement distance of the liquid-taking syringe 9, ensuring that the amount of developing solution to be tested is consistent in each liquid-taking syringe 9, making the developing solution usage parameters controllable during the testing process; the guide rod 1003 and the pull block 1004 slide together to limit the radial sway of the pull block 1004, ensuring that the piston moves smoothly.

[0050] The mechanical gripper 5 is rotatably connected to the moving mechanism 6 via the turntable 11. The detection part 702 and the standard part 703 of the test piece 7 have vertically downward degrees of freedom by means of the rotation of the mechanical gripper 5.

[0051] When it is necessary to soak the detection section 702, the turntable 11 rotates to make the detection section 702 vertically downward; when it is necessary to soak the standard section 703, the turntable 11 rotates 90° to make the standard section 703 vertically downward. This rotation switching method can realize the soaking switching of the two functional sections without the need for the moving mechanism 6 to adjust the position, thus shortening the operation time.

[0052] Meanwhile, the gripping point of the mechanical claw 5 is set at the right angle of the test piece 7, ensuring that the distance between the rotation center and the detection part 702 and the standard part 703 is consistent. When the test piece 7 is rotated 90°, the vertical height of the standard part 703 is consistent with the vertical height of the detection part 702 before rotation.

[0053] The moving mechanism 6 includes a longitudinal guide rail 601, a transverse guide rail 602, and a vertical guide rail 603. The longitudinal guide rail 601 is symmetrically arranged on both sides of the worktable 1 with the aid of a bracket. The transverse guide rail 602 is mounted on the longitudinal guide rail 601 on both sides. The two ends of the transverse guide rail 602 are slidably engaged with the longitudinal guide rail 601 by means of a first slide block 604 and have a degree of freedom to move along the X-axis. The vertical guide rail 603 is slidably engaged with the transverse guide rail 602 by means of a second slide block 605 and has a degree of freedom to move along the Y-axis. The mechanical gripper 5 is slidably engaged with the vertical guide rail 603 by means of a third slide block 606 and has a degree of freedom to move along the Z-axis. The mechanical gripper 5 has a degree of freedom to reciprocate along the X, Y, and Z axes with the aid of the moving mechanism 6.

[0054] The moving mechanism 6 consists of a three-dimensional guide rail system composed of a longitudinal guide rail 601, a transverse guide rail 602 and a vertical guide rail 603, which enables the mechanical claw 5 to move precisely in three-dimensional space. It can accurately reach the position above any storage tank on the workbench 1, ensuring that the test piece 7 can be accurately inserted into the storage tank for immersion or moved to the rinsing tank 3 for processing.

[0055] A wastewater tank 12 is also provided below the workbench 1. The test developer storage tank 2, the rinsing tank 3 and the standard developer storage tank 4 are respectively connected to the wastewater tank 12 via drain pipes.

[0056] When changing the developer or cleaning the storage tank, open the drain valve of each storage tank. The waste liquid flows directly into the sewage tank 12 through the drain pipe for centralized storage, realizing the centralized collection and treatment of developer waste liquid, which meets environmental protection requirements.

[0057] An automatic detection method for developer includes the following steps:

[0058] S1. Attach the label with the information of the developer to be tested to the sample tube 8 containing the corresponding developer to be tested, and then insert the sample tube 8 into the test piece 7.

[0059] S2. Pour the standard developer into the standard developer storage tank 4;

[0060] S3. The mechanical gripper 5 holds the test piece 7 and moves it above the test developer tank 2. The liquid extraction syringe 9 draws the test developer from the sample tube 8 with the help of the moving mechanism 6 and the push-pull assembly 10. Then the test developer is transferred to the test developer tank 2. The mechanical gripper 5 rotates and makes the detection part 702 of the test piece 7 face downward. The detection part 702 of the test piece 7 descends with the help of the mechanical gripper 5 and is immersed in the test developer.

[0061] S4. After the test piece 7 is soaked in the test developing solution, the liquid collection syringe 9 and the mechanical claw 5 holding the test piece 7 are moved to the rinsing tank 3 respectively. The liquid collection syringe 9 draws out the clean water in the rinsing tank 3 and discharges it. The residual test developing solution in the liquid collection syringe 9 is cleaned. Then the mechanical claw 5 holds the test piece 7 in the rinsing tank 3 to rinse and dry the detection part 702.

[0062] S5. The mechanical gripper 5 holds the cleaned test piece 7 and moves it above the standard developer tank 4. The mechanical gripper 5 rotates and makes the standard part 703 of the test piece 7 face downward. The standard part 703 of the test piece 7 descends with the help of the mechanical gripper 5 and is immersed in the standard developer.

[0063] S6. After the test piece 7 is soaked in the standard developer solution, the mechanical claw 5 holds the test piece 7 away from the standard developer solution storage tank 4 and moves it to the rinsing tank 3 to rinse and dry the standard part 703 of the test piece 7. Then the test piece 7 is placed in the unloading area for later use.

[0064] S7. Drain the test developer from the previous test developer tank 2, clean the test developer tank 2, and repeat steps S3-S6.

[0065] S8. After all the developing solutions to be tested have been tested, the staff will observe the test pieces 7 corresponding to each group of developing solutions. By comparing the clarity of the lines on the detection section 702 and the standard section 703 on the test piece 7, the quality of the developing solution to be tested will be determined.

[0066] The detection method in this invention is based on the detection device described above. By moving and rotating the mechanical gripper 5 in conjunction with the structure of the test piece 7, a standardized developer detection process is formed, reducing the impact of human operation differences on the detection results, realizing continuous detection of multiple sets of developers, improving batch detection efficiency, and ensuring accurate and reliable detection results by comparing the same test piece.

[0067] In step S1, by affixing labels, information traceability of the developing solution to be tested (such as batch, testing date, etc.) can be achieved, avoiding confusion when testing multiple sets of samples;

[0068] The rinsing step in step S4 can remove the residual developer from the surface of the test piece and the liquid collection syringe 9, avoiding cross-contamination with the standard developer or the next set of test developers. The rinsing tank 3 is equipped with a rinsing nozzle, which sprays water onto the test piece 7 to form a cleaning process.

[0069] The bottom of the test developer tank 2 is equipped with a drain valve. When the test developer is added, the drain valve is closed in advance. When the test developer needs to be replaced, the drain valve is opened first to drain the previous set of test developer, then the drain valve is closed, cleaning solution is added to the test developer tank 2 to rinse, and then the drain valve is opened and closed again to drain the cleaning solution.

[0070] In addition, the unified comparison in step S8 of this invention improves the efficiency of batch testing, and the unified comparison within a short time range can reduce the subjective judgment error of the staff.

[0071] The immersion time of the detection section 702 of the test piece 7 in the test developing solution is the same as the immersion time of the standard section 703 in the standard developing solution.

[0072] The soaking time is 60 seconds for both, ensuring that the development conditions of the detection section 702 and the standard section 703 are consistent, eliminating the influence of soaking time differences on the development effect, and further improving the accuracy and comparability of the test results.

Claims

1. An automatic developer detection device, comprising a developer storage tank (2), a rinsing tank (3), and a standard developer storage tank (4) disposed on a workbench (1), characterized in that, The workbench (1) is also provided with a mechanical claw (5) and a moving mechanism (6). The test piece (7) is provided with a detection part (702) and a standard part (703). The mechanical claw (5) holds the test piece (7) and has the freedom to move back and forth between the test developer tank (2), the rinsing tank (3) and the standard developer tank (4) with the help of the moving mechanism (6). The detection part (702) of the test piece (7) is moved to the test developer tank (2) for immersion with the help of the mechanical claw (5). The standard part (703) of the test piece (7) is moved to the standard developer tank (4) for immersion with the help of the mechanical claw (5). The test piece (7) also includes a main body (701), the detection part (702) and the standard part (703) are respectively located on the adjacent side of the main body (701) and together form an L-shaped structure. The main body (701) is also provided with a sample tube (8), which contains the developing solution to be tested. The sample tube (8) is inserted into the main body (701) through the mounting hole on the main body (701). The workbench (1) is also provided with a liquid collection syringe (9) and a push-pull assembly (10). The liquid collection syringe (9) is connected to the moving mechanism (6) by means of the push-pull assembly (10). The needle tip of the liquid collection syringe (9) is moved to the liquid collection hole of the sample tube (8) by means of the moving mechanism (6) and extends into the tube body through the sealing gasket. The liquid collection syringe (9) extracts the test developing solution in the tube body by means of the pull of the push-pull assembly (10). The push-pull assembly (10) includes a support base (1001) and a lead screw (1002), a guide rod (1003), a pull block (1004), and a drive motor (1005) disposed on the support base (1001). The lead screw (1002) passes through one end of the pull block (1004) and is threadedly engaged with the pull block (1004). The guide rod (1003) passes through the other end of the pull block (1004) and is slidably engaged with the pull block (1004). The drive motor (1005) drives the lead screw (1002) to rotate and drives the pull block (1004) to reciprocate along the guide rod (1003). The syringe of the liquid collection syringe (9) is fixedly connected to the support base (1001). The piston of the liquid collection syringe (9) is fixedly connected to the pull block (1004) and reciprocates with the help of the pull block (1004). The moving mechanism (6) includes a longitudinal guide rail (601), a transverse guide rail (602), and a vertical guide rail (603). The longitudinal guide rail (601) is symmetrically arranged on both sides of the worktable (1) by means of a bracket. The transverse guide rail (602) is mounted on the longitudinal guide rail (601) on both sides. The two ends of the transverse guide rail (602) are respectively slidably engaged with the longitudinal guide rail (601) by means of a first slide block (604) and have a degree of freedom to move along the X-axis. The vertical guide rail (603) is slidably engaged with the transverse guide rail (602) by means of a second slide block (605) and has a degree of freedom to move along the Y-axis. The mechanical claw (5) is slidably engaged with the vertical guide rail (603) by means of a third slide block (606) and has a degree of freedom to move along the Z-axis. The mechanical claw (5) has a degree of freedom to reciprocate along the X, Y, and Z axes by means of the moving mechanism (6).

2. The automatic developer detection device according to claim 1, characterized in that, The sample tube (8) includes a tube body and a tube cap, with a sealing gasket between the tube body and the tube cap, and a liquid extraction hole provided on the tube cap.

3. The automatic developer detection device according to claim 1, characterized in that, The mechanical gripper (5) is rotatably connected to the moving mechanism (6) via a turntable (11), and the detection part (702) and standard part (703) of the test piece (7) have vertically downward degrees of freedom by means of the rotation of the mechanical gripper (5).

4. The automatic developer detection device according to claim 1, characterized in that, A sewage tank (12) is also provided below the workbench (1). The test developer storage tank (2), rinsing tank (3) and standard developer storage tank (4) are respectively connected to the sewage tank (12) via a drain pipe.

5. An automatic developer detection method, implemented based on the automatic developer detection device described in claim 1, characterized in that, Includes the following steps: S1. Paste the label with the information of the developer to be tested onto the sample tube (8) containing the corresponding developer to be tested, and then insert the sample tube (8) into the test piece (7). S2. Pour the standard developer into the standard developer storage tank (4); S3. The mechanical gripper (5) holds the test piece (7) and moves it above the test developer tank (2). The liquid extraction syringe (9) draws the test developer from the sample tube (8) with the help of the moving mechanism (6) and the push-pull assembly (10). Then the test developer is transferred to the test developer tank (2). The mechanical gripper (5) rotates and makes the detection part (702) of the test piece (7) face downward. The detection part (702) of the test piece (7) is lowered with the help of the mechanical gripper (5) and immersed in the test developer. S4. After the test piece (7) is soaked in the test developing solution, the liquid taking syringe (9) and the mechanical claw (5) holding the test piece (7) are moved to the rinsing tank (3) respectively. The liquid taking syringe (9) draws out the clean water in the rinsing tank (3) and discharges it. The residual test developing solution in the liquid taking syringe (9) is cleaned. Then the mechanical claw (5) holds the test piece (7) in the rinsing tank (3) to rinse and dry the detection part (702). S5. The mechanical gripper (5) holds the cleaned test piece (7) and moves it above the standard developer tank (4). The mechanical gripper (5) rotates and makes the standard part (703) of the test piece (7) face downward. The standard part (703) of the test piece (7) is lowered by the mechanical gripper (5) and immersed in the standard developer. S6. After the test piece (7) is soaked in the standard developer solution, the mechanical claw (5) holds the test piece (7) and removes it from the standard developer solution storage tank (4), and moves it to the rinsing tank (3) to rinse and dry the standard part (703) of the test piece (7). Then the test piece (7) is placed in the unloading area for later use. S7. Drain the developer solution in the previous test developer solution storage tank (2), clean the test developer solution storage tank (2), and repeat steps S3-S6. S8. After all the developing solutions to be tested have been tested, the staff will observe the test pieces (7) corresponding to each group of developing solutions to be tested. By comparing the clarity of the lines on the testing section (702) and the standard section (703) on the test piece (7), the quality of the developing solution to be tested will be determined.

6. The automatic detection method for developer according to claim 5, characterized in that, The immersion time of the detection section (702) of the test piece (7) in the test developer solution is the same as the immersion time of the standard section (703) in the standard developer solution.

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