Photomask detection device

Abstract

The invention discloses a photomask detection device. The photomask detection device comprises a rack, a clamping assembly; comprising jigs which are symmetrically arranged, and a clamping driving assembly which drives the jigs to move in the opposite directions or in the opposite directions. A mask overturning assembly; the two jigs are driven to synchronously turn over in the vertical direction in the same direction; a mask rotating assembly; the clamping assembly and the mask overturning assembly are arranged at the movable end of the mask rotating assembly so as to drive the two jigs to synchronously rotate in the horizontal direction; according to the photomask overturning device, through reasonable design of the structures of the clamping assembly and the mask overturning assembly, the equipment size is remarkably reduced, and completeness, flaws and the like of the photomask before and after the photoetching process are effectively detected.

Description

TECHNICAL FIELD

[0001] The present application belongs to the field of semiconductor technology, and particularly relates to a photomask mask sheet detection device. BACKGROUND

[0002] A photomask mask sheet is used to form a pattern on a silicon wafer in a photolithography process. The integrity and flaws of the photomask mask sheet need to be detected before and after the photolithography process, including reflectivity detection, optical density detection, right angle detection, CD precision detection, position precision detection, minimum line width detection, appearance quality detection, surface flatness detection, chromium film thickness detection, and minimum defect detection. Meanwhile, the photomask mask sheet is cleaned after detection or during detection. SUMMARY

[0003] The present application aims to provide a photomask mask sheet detection device which can conveniently and quickly check the double sides and multiple angles of the photomask mask sheet and clean the surface of the photomask mask sheet.

[0004] To solve the above technical problems, the present application is implemented as follows: A photomask mask sheet detection device comprises a rack, a clamping assembly, a mask sheet turnover assembly, a mask sheet rotating assembly, and a blowing assembly. The clamping assembly comprises symmetrically arranged jigs and a clamping driving assembly which drives the jigs to move towards or away from each other. The mask sheet turnover assembly drives the two jigs to synchronously and identically turn over in the vertical direction. The clamping assembly and the mask sheet turnover assembly are arranged on the movable end of the mask sheet rotating assembly to drive the two jigs to synchronously rotate in the horizontal direction. The blowing assembly has a gas outlet which is adjacent to and faces the jigs.

[0005] In the above scheme and as a preferred scheme of the above scheme, the jigs are movably mounted on clamping handles, and the output end of the mask sheet turnover assembly can drive the jigs to rotate. The clamping driving assembly comprises a clamping driving motor, two screw rods, and two screw nuts with opposite rotation directions which are threadedly connected with the screw rods. The two screw nuts are respectively fixedly connected with the two clamping handles.

[0006] In the above scheme and as a preferred scheme of the above scheme, the device further comprises a support plate. The clamping driving motor is fixedly arranged on the support plate, and the screw rod is arranged on the support plate through a screw rod bearing seat. The clamping handles are movably arranged on the support plate through guide rails.

[0007] As a preferred scheme of the above scheme and on the basis of the above scheme: further comprising clamping detection assembly, the clamping detection assembly includes clamping position detection assembly and clamping stress detection assembly;The clamping position detection assembly includes clamping position trigger and clamping position sensor, the screw nut can drive the clamping position trigger moves, the clamping position sensor is triggered by the clamping position trigger when the screw nut reaches the set distance by forward or reverse movement distance to the set distance, and the clamping position sensor is triggered.

[0008] As a preferred scheme of the above scheme and on the basis of the above scheme: the mask plate overturning assembly includes overturning drive motor, first transmission assembly and symmetrically arranged second transmission assembly;The first transmission assembly includes spline shaft, and the overturning drive motor drives the spline shaft to rotate;The input end of the second transmission assembly is in sliding fit with the spline shaft, and the output end of the second transmission assembly drives the jig to rotate.

[0009] As a preferred scheme of the above scheme and on the basis of the above scheme: the first transmission assembly includes spline shaft;Two second transmission assemblies are respectively installed on two clamping handles;The input end of the second transmission assembly has a spline hole matched with the spline shaft, and the spline shaft remains in the spline hole during the movement of the clamping handle.

[0010] As a preferred scheme of the above scheme and on the basis of the above scheme: the mask plate rotating assembly includes rotating motor and speed reduction gear set, and the supporting plate is fixedly connected to the output end of the speed reduction gear set.

[0011] As a preferred scheme of the above scheme and on the basis of the above scheme: the rack further includes bottom plate and adjusting plate, the mask plate rotating assembly is fixedly installed on the adjusting plate, the adjusting plate is installed on the bottom plate, and the relative position of the adjusting plate and the bottom plate can be adjusted.

[0012] As a preferred scheme of the above scheme and on the basis of the above scheme: a plurality of adjusting holes are formed in the adjusting plate, and bolts are screwed into the threaded holes of the bottom plate through the adjusting holes;Further comprising adjusting assembly arranged on one side of the adjusting plate, the adjusting assembly includes adjusting screw and adjusting screw support, the adjusting plate is provided with adjusting threaded hole corresponding to the adjusting screw, and the adjusting screw is screwed into the adjusting threaded hole.

[0013] On the basis of the above scheme and as a preferred scheme of the above scheme: still include the turnover position detection assembly, it includes the turnover position sensor and the turnover trigger piece, the turnover trigger piece is driven synchronous rotation by the spline shaft, reaches the set angle, the turnover trigger piece triggers the turnover position sensor.

[0014] The application has the following prominent and beneficial technical effects compared with the prior art: the mask plate is clamped by the clamping assembly, the mask plate is vertically flipped by the mask plate flipping assembly, which is beneficial to the integrity and flaw detection of the upper and lower surfaces of the mask plate; the mask plate is horizontally rotated by the mask plate rotating assembly, which expands the detection range of the mask plate, reduces the possibility of missed detection, and improves the yield after detection; the clamping assembly and the mask plate flipping assembly are rationally designed, which significantly reduces the size of the equipment, and effectively detects the integrity, flaws and the like of the photomask before and after the photolithography process. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 is a schematic view of the overall structure of the application; Figure 2 is a schematic view of the overall structure of the second transmission assembly of the application; Figure 3 is a schematic view of the overall structure of the clamping driving assembly; Figure 4 is a front view of the overall structure of the application; Figure 5 is a right view of the overall structure of the application. DETAILED DESCRIPTION

[0016] In order to make the purpose, technical scheme and advantages of the present application more clear, the technical scheme in the embodiments will be described clearly and completely in the following with reference to the drawings in the embodiments. Obviously, the described embodiments are only a part of the embodiments of the present application, not all the embodiments. Based on the given embodiments, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0017] In the description of the present application, it should be understood that the terms "upper", "lower" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the purpose of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, therefore cannot be understood as a limitation on the present application.

[0018] In the description of the present application, the terms "first", "second" and the like are only for descriptive purposes, and cannot be understood as indicating or implying relative importance or implying the number of technical features indicated.

[0019] See details Figures 1-5 As shown, this application discloses a photomask inspection device, including a frame 10. The frame 10 includes a base plate 11, an adjusting plate 12, and a support plate 14. A photomask rotation assembly 40 is fixedly mounted on the adjusting plate 12, which is mounted on the base plate 11 and its relative position to the base plate 11 is adjustable. Specifically, an adjusting plate receiving groove 111 is formed on the base plate 11, and the adjusting plate 12 is received within the adjusting plate receiving groove 111. The length of the adjusting plate receiving groove 111 in either the horizontal or vertical direction is greater than the length of the adjusting plate 12 in the same direction, allowing the adjusting plate 12 to slide along that direction within the adjusting plate receiving groove 111. To ensure that the adjusting plate 12 can be adjusted while also being fixed in position after adjustment, this device is designed to be fully fixed in place. Therefore, in this embodiment, the adjusting plate 12 preferably has multiple adjusting holes 121, which are preferably oblong holes. A bolt is passed through the adjusting hole and screwed into the threaded hole of the base plate 11. The adjusting plate 12 is slid while the bolt is loose, and the bolt is tightened after adjustment to fix the position of the adjusting plate 12. Considering that other devices will be installed on the adjusting plate 12, and its weight is relatively heavy, directly applying force to slide the adjusting plate 12 would be difficult. Therefore, see... Figure 2 As shown, this embodiment also includes an adjustment assembly 13 disposed on one side of the adjustment plate 12. The adjustment assembly 13 includes an adjustment screw and an adjustment screw bracket. An adjustment threaded hole is provided on the adjustment plate 12 at a position corresponding to the adjustment screw. The adjustment screw is screwed into the adjustment threaded hole, and the adjustment screw bracket limits the axial position of the adjustment screw. For example, an annular protrusion is provided at the middle and rear end of the adjustment screw, and an annular groove with clearance fit is provided on the adjustment screw bracket. The upper end of the annular groove is open, and the size of the opening is sufficient for the annular protrusion to be embedded into the annular groove through the opening. Since the threaded section of the adjustment screw is screwed into the adjustment plate 12, the adjustment screw will not fall out. Therefore, by rotating the adjustment screw, the adjustment plate 12 can be pulled towards the direction of the adjustment bracket or pushed away from the direction of the adjustment bracket through the cooperation between the adjustment screw and the adjustment threaded hole on the adjustment plate 12, thereby realizing the position adjustment of the adjustment plate 12. The adjustable position of the adjustment plate 12 is more conducive to the adjustment and docking of the device installed on it relative to other upstream or downstream equipment.

[0020] The clamping assembly 20 comprises symmetrically arranged jigs 21, clamping handles 22, and a clamping driving assembly 23 for driving the jigs 21 to move towards or away from each other. The jigs 21 are movably mounted on the clamping handles 22 and can be rotated by the output end of the mask turnover assembly 30. Specifically, the clamping driving assembly 23 comprises a clamping driving motor 231, a screw rod 233, and two first and second screw rod nuts 234 and 235 with opposite rotation directions and threadedly connected with the screw rod 223. The two screw rod nuts are fixedly connected with the two clamping handles 22, respectively. In this embodiment, a support plate 14 is further provided, the clamping driving motor 231 is fixedly arranged on the support plate 14, and the two ends or positions close to the two ends of the screw rod 233 are arranged on the support plate 14 through two screw rod bearing seats 26. The screw rod 233 is flexibly rotated under the driving of the clamping driving motor 231. The clamping handles 22 are movably arranged on the support plate 14 through guide rails. During the rotation of the screw rod 233, the first and second screw rod nuts 234 and 235 are driven to move towards or away from each other, thereby driving the clamping handles 22 to slide along the guide rails towards or away from each other, and then driving the jigs 21 to move towards or away from each other, thereby realizing the clamping and releasing of the mask 60. Further, the clamping handle 22 in this embodiment has an L-shaped structure, the short side of the clamping handle 22 is arranged on the support plate 14 through a guide rail, the long side is provided with a bearing hole at a position close to the upper end, a bearing is arranged in the bearing hole, an installation shaft is outwardly extended from the end of the jig 21 away from the clamping, the installation shaft is matched with the inner ring of the bearing, and the installation shaft is connected with the output end of the mask turnover assembly 30, thereby driving the jig 21 to overturn within a preset rotation angle through the mask turnover assembly 30. It should be noted that the jig 21 can be adaptively selected according to the size and specification of the specific mask, so as to realize stable and reliable clamping and positioning.

[0021] Further, the clamping detection assembly comprises a clamping position detection assembly 25 and a clamping stress detection assembly. The clamping position detection assembly comprises a clamping position trigger 252 and a clamping position sensor 253. The screw rod nut 234 can drive the clamping position trigger 252 to move, and the clamping position sensor 253 is arranged at a set position, so that when the screw rod nut 234 moves forward or reversely by a set distance, the clamping position trigger 252 triggers the clamping position sensor 253. Through the arrangement of the clamping detection assembly, one use mode is to limit the extreme positions of clamping. When the clamping position trigger 252 moves to the maximum and minimum extreme positions, the clamping position sensor 253 is triggered, and then the clamping driving motor 231 is controlled to stop rotating or to retreat, i.e., to reversely rotate by a set number of turns, thereby realizing the protection of the mask. Of course, another use mode is that when the clamping position trigger 252 moves to a set clamping maintaining and releasing position, the clamping position sensor 253 is triggered, and then the clamping driving motor 231 is controlled to stop rotating, thereby realizing the position feedback of clamping and releasing.Figure 3 As shown, two clamping pressure sensors 24 are also arranged, and the two clamping pressure sensors 24 are respectively arranged between the two clamping handles 22 and the first screw nut 234 and the second screw nut 235, that is, the first screw nut 234 and the second screw nut 235 are respectively fixedly connected with the two clamping handles 22 through the two clamping handles 22, and the clamping pressure sensor 24 is preferably a stress sensor. The stress of the clamping pressure sensor 24 will change due to the reaction force in the process of clamping the mask plate, and then the size of the stress change is indirectly obtained to obtain the size of the clamping pressure, so that the control of the clamping pressure is more accurate. On the one hand, the mask plate can be reliably clamped, and on the other hand, the excessive deformation or damage of the mask plate due to excessive clamping pressure can be effectively avoided, and the adverse effects on the detection results can be avoided.

[0022] The mask plate overturning assembly 30 is used to overturn the two jigs 21 in the vertical direction synchronously and in the same direction. Specifically, the mask plate overturning assembly 30 comprises an overturning driving motor 31, a first transmission assembly 32, and a second transmission assembly 33 symmetrically arranged. The first transmission assembly 32 comprises a spline shaft 321 and a first synchronous pulley set 322. The first synchronous pulley set 322 comprises a first driving pulley, a first driven pulley, and a first synchronous belt. The first driving pulley is fixedly installed on the main shaft of the overturning driving motor 31. The first driven pulley is fixedly installed on the spline shaft 321. The first driving pulley drives the first driven pulley through the first synchronous belt, thereby driving the spline shaft 321 to rotate. Preferably, the input end of the second transmission assembly 33 is in sliding fit with the spline shaft 321, and the output end of the second transmission assembly 33 drives the jig 21 to rotate. Specifically, the two second transmission assemblies 33 are respectively installed on the outer end faces of the two clamping handles 22 away from the jig 21. The input end of each second transmission assembly 33 has a spline hole 3311 matched with the spline shaft 321. During the movement of the clamping handle 22, the spline shaft 321 remains inserted into the spline hole 3311. Specifically, the second transmission assembly 33 is located on the side of the clamping handle 22 away from the jig 21. The second transmission assembly 33 comprises a second driving pulley 331, a second driven pulley 332, a second synchronous belt 333, and a tension pulley 334. The second driving pulley 331 has a spline hole 3311 in the middle. The spline shaft 321 is located between the two clamping handles 22 and is supported by two spline shaft bearing seats 35 in the middle. The first driven pulley is fixedly installed on the middle part of the spline shaft 321. After the two ends of the spline shaft 321 pass through the two clamping handles 22, the spline shaft 321 is inserted into the spline hole 3311 of the second driving pulley 331. The second driven pulley 332 is fixedly connected with the mounting shaft of the jig 21. The second synchronous belt 333 transmits the power of the second driving pulley 331 to the second driven pulley 332, thereby driving the jig 21 to rotate through the mounting shaft. During the movement of the clamping handle 22 towards or away from each other, the torque is transmitted through the spline hole 3311 of the second driving pulley 331 and the spline shaft 321, thereby realizing reliable overturning transmission within the designed clamping range.

[0023] The overturning position detection assembly 34 comprises an overturning position sensor 341 and an overturning trigger piece 342. The overturning trigger piece 342 is driven to rotate synchronously by the spline shaft 321. When reaching a set angle, the overturning trigger piece 342 triggers the overturning position sensor 341. Figure 3As shown, the flip trigger piece 342 is sleeved on the spline shaft 321 and fixedly installed thereon, thereby rotating synchronously with the spline shaft 321. By adjusting the installation rotation angle of the flip trigger piece 342, the relative position of the trigger end of the flip trigger piece 342 relative to the flip position sensor 341 can be changed, so as to adjust the limit range of the detection angle of the flip angle. After adjustment, when the rotation angle of the spline shaft 21 reaches the preset angle, the trigger end of the flip trigger piece 342 will trigger the flip position sensor 341, thereby realizing detection of whether the angle of the jig 21 is in place.

[0024] Of course, in addition to the above-mentioned mask clamping by the clamping assembly 20 and the jig 21 and mask flipping by the mask flipping assembly 30, in order to further facilitate detection of the mask, the present embodiment further comprises a mask rotating assembly 40, which comprises a rotating motor 41 and a speed reduction gear set 42, and the support plate 14 is fixedly connected to the output end of the speed reduction gear set 42. For example, the mask rotating assembly 40 can adopt the same structure as the hollow rotating platform. Since the clamping assembly 20 and the mask flipping assembly 30 are arranged on the support plate 14, the two jigs 21 can be driven to rotate synchronously in the horizontal direction by the mask rotating assembly 40; further, without moving the detection equipment or the detection worker, a larger range of masks can be detected, which is more conducive to realizing detection of the mask without dead angle, improving detection accuracy, and further improving the yield of products after detection.

[0025] In addition, since some dust and impurities may adhere to the mask during packaging or detection, in order to avoid its adverse effect on detection, and also to avoid dust or impurities in the air from adhering to the mask after detection. Therefore, the present embodiment preferably comprises a blowing assembly 50, the gas flow outlet of which is adjacent to and faces the jig 21. Preferably, the blowing assembly 50 is an ion air knife device, which is fixedly installed on the bottom plate through an aluminum alloy support, and blows away dust and impurities on the surface and in the gap of the mask through blowing air flow. It should be noted that the ion air knife is not different from the prior art. The ion air knife is a kind of fixed type special equipment for eliminating static electricity. It is a kind of rod type static electricity eliminating product. It has the characteristics of easy installation, stable work and fast static electricity elimination speed. It has the functions of static electricity elimination and dust removal, and can effectively remove dust on the surface of the mask. Of course, by eliminating static electricity of the mask, the adsorption of dust on the mask can also be effectively reduced.

[0026] The above embodiments are only preferred embodiments of the present application, and do not limit the protection scope of the present application. Therefore, any equivalent changes made in the structure, shape and principle of the present application should be covered within the protection scope of the present application.

Claims

1. A reticle mask inspection apparatus, characterized by: It comprises a rack (10); A clamping assembly (20) comprises symmetrically arranged jigs (21) and a clamping drive assembly (23) for driving the jigs (21) to move towards or away from each other; A mask plate overturning assembly (30) drives the two jigs (21) to overturn in the vertical direction synchronously and in the same direction; A mask plate rotating assembly (40) is arranged at the movable end of the mask plate rotating assembly (40), so as to drive the two jigs (21) to rotate in the horizontal direction synchronously; A blowing assembly (50) is arranged near and towards the jigs (21).

2. The reticle mask inspection apparatus of claim 1, wherein: It also comprises clamping handles (22), the jigs (21) are movably mounted on the clamping handles (22), and the output end of the mask plate overturning assembly (30) can drive the jigs (21) to rotate; the clamping drive assembly (23) comprises a clamping drive motor (231), a lead screw (233), and two lead screw nuts (234) with opposite rotation directions which are threadedly connected with the lead screw (223), and the two lead screw nuts are fixedly connected with the two clamping handles (22) respectively.

3. The reticle mask inspection apparatus of claim 2, wherein: It also comprises a support plate (14), the clamping drive motor (231) is fixedly arranged on the support plate (14), and the lead screw (233) is arranged on the support plate (14) through a lead screw bearing seat (26); the clamping handle (22) is movably arranged on the support plate (14) through a guide rail.

4. The reticle mask inspection apparatus of claim 3, wherein: It also comprises a clamping detection assembly, the clamping detection assembly comprises a clamping position detection assembly (25) and a clamping stress detection assembly; the clamping position detection assembly comprises a clamping position trigger (252) and a clamping position sensor (253), the lead screw nut (234) can drive the clamping position trigger (252) to move, and the clamping position sensor (253) is arranged at a set position, so that when the lead screw nut (234) moves forward or reversely by a set distance, the clamping position sensor (253) is triggered through the clamping position trigger (252).

5. The reticle mask inspection apparatus of claim 4, wherein: The mask plate overturning assembly (30) comprises an overturning drive motor (31), a first transmission assembly (32), and symmetrically arranged second transmission assemblies (33); the first transmission assembly (32) comprises a spline shaft (321), and the overturning drive motor (31) drives the spline shaft (321) to rotate; the input end of the second transmission assembly (33) is in sliding fit with the spline shaft (321), and the output end of the second transmission assembly (33) drives the jigs (21) to rotate.

6. The reticle mask inspection apparatus of claim 5, wherein: The first transmission assembly (32) comprises a spline shaft (321); the two second transmission assemblies (33) are arranged on the two clamping handles (22) respectively; the input end of the second transmission assembly (33) has a spline hole (3311) matched with the spline shaft (321), and the spline shaft (321) is arranged in the spline hole (3311) during the movement of the clamping handle (22).

7. The reticle mask inspection apparatus of claim 1, wherein: The mask rotating assembly (40) comprises a rotating motor (41) and a speed reduction gear set (42), and the support plate is fixedly connected to an output end of the speed reduction gear set (42).

8. The reticle mask inspection apparatus of claim 1, wherein: The rack (10) further comprises a bottom plate (11) and an adjusting plate (12), the mask rotating assembly (40) is fixedly installed on the adjusting plate (12), the adjusting plate (12) is installed on the bottom plate (11), and the relative position between the adjusting plate (12) and the bottom plate (11) can be adjusted.

9. The reticle mask inspection apparatus of claim 8, wherein: A plurality of adjusting holes are formed in the adjusting plate (12), bolts are screwed into threaded holes in the bottom plate (11) through the adjusting holes, and an adjusting assembly (13) is arranged on one side of the adjusting plate (12), the adjusting assembly (13) comprises an adjusting screw and an adjusting screw support, and an adjusting threaded hole is formed in the adjusting plate (12) at a position corresponding to the adjusting screw.

10. The reticle mask inspection apparatus of claim 6, wherein: The reversing position detection assembly (34) comprises a reversing position sensor (341) and a reversing trigger piece (342), the reversing trigger piece (342) is driven to rotate synchronously by the spline shaft (321), and after reaching a set angle, the reversing trigger piece (342) triggers the reversing position sensor (341).

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