Pipe joint

By introducing an insulating thin-walled section and a conductive section into the pipe fitting, and utilizing a charge discharge mechanism and detection device, the problem of insulation damage to fluid equipment caused by current-carrying fluids is solved, enabling rapid maintenance and cost savings for fluid equipment.

CN121399409APending Publication Date: 2026-01-23GONYU CO LTD
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Patent Information

Application Number
CN202480042257.5
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Priority Date
2023-06-23
Filing Date
2024-05-31
Publication Date
2026-01-23

AI Technical Summary

Technical Problem

When fluid is transported under power through pipe joints in fluid equipment, insulation damage can easily occur in the thin-walled sections of the equipment, requiring the replacement of the entire equipment, which is time-consuming and costly.

Method used

A pipe joint is designed, comprising a second thin-walled part with relatively thin insulation and a conductive part. The charge of the current-carrying fluid is discharged to the conductive part through the second thin-walled part. The thickness of the second thin-walled part is smaller than that of the thin-walled part of the fluid equipment. A detection device is set to detect insulation failure and replace internal components in a timely manner.

Benefits of technology

It effectively suppresses insulation damage in the thin-walled sections of fluid equipment, reduces the time and cost of replacing fluid equipment, and improves equipment maintenance efficiency.

✦ Generated by Eureka AI based on patent content.

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Abstract

This pipe joint is provided with: a cylindrical inner member, the inner peripheral surface of which is a contact surface that comes into contact with a fluid to be conveyed; a cylindrical joint member fitted into the outer periphery of the inner member and having a male screw portion on the outer periphery; and a union nut having a female threaded portion screwed into the male threaded portion on the inner periphery, the internal member being connected to a fluid device having a first thin portion in contact with the conveyed fluid, the internal member having an insulating ring-shaped second thin portion, and the second thin portion having a second thin portion in contact with the second thin portion. And a second thin portion having a thickness smaller than the thickness of the first thin portion from the contact surface toward the radially outer side, the pipe joint having a conductive portion that is provided on the joint member and that is in contact with the outer peripheral surface of the second thin portion.
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Description

Technical Field

[0001] This invention relates to a pipe fitting. Background Technology

[0002] As a connection structure used in manufacturing apparatuses in various technical fields such as semiconductor manufacturing and medical / pharmaceutical manufacturing to connect pipes or flow paths formed by various fluid devices such as diaphragm pumps, the pipe fitting described in Patent Document 1 is known. The pipe fitting of Patent Document 1 has an inner ring installed on the inner circumference of one end of the pipe, a fitting body installed on the outer circumference of one end of the pipe, and a connecting nut installed on the outer circumference of the fitting body.

[0003] Patent Document 1: Japanese Patent Application Publication No. 2018-168947 Summary of the Invention

[0004] In fluid equipment connected via the aforementioned pipe fittings, if a charged transport fluid flows through it, the charge can sometimes cause insulation damage, such as pinholes, in thin-walled sections of the fluid equipment (e.g., the peripheral wall of a pipe or the diaphragm of a diaphragm pump). If such insulation damage occurs, the entire fluid equipment needs to be replaced, which can be time-consuming.

[0005] The purpose of this invention is to suppress insulation failure in the thin-walled portion of the fluid device even when a charged transport fluid flows through the fluid device connected to the pipe fitting.

[0006] (1) The pipe fitting of the present invention comprises: a cylindrical internal component whose inner circumferential surface is a contact surface that contacts the conveyed fluid; a cylindrical connector component embedded in the outer circumference of the internal component and having an external thread on the outer circumference; and a pipe nut having an internal thread on its inner circumference that is screwed into the external thread, the internal component being connected to a fluid device having a first thin-walled portion that contacts the conveyed fluid, wherein the internal component has an insulating annular second thin-walled portion having a thickness from the contact surface toward the radially outward side, and the thickness being less than the thickness of the first thin-walled portion, and the pipe fitting has a conductive portion that is conductive and disposed in the connector component, contacting the outer circumferential surface of the second thin-walled portion.

[0007] According to the pipe fitting of the present invention, if a charged transport fluid flows through the internal components, the charge carried by the transport fluid discharges radially through the second thin-walled portion to the conductive portion, thereby easily causing insulation failure at the second thin-walled portion. Furthermore, the thickness of the second thin-walled portion is less than the thickness of the first thin-walled portion, thus insulation failure is easily caused at the second thin-walled portion of the internal components before insulation failure occurs at the first thin-walled portion due to the charged transport fluid flowing through the fluid device. Therefore, insulation failure at the first thin-walled portion of the fluid device can be suppressed.

[0008] (2) Based on the pipe joint of (1), it is preferable that the conductive part has an annular protrusion with a pointed front end facing the inner side of the diameter, and the outer peripheral surface of the second thin-walled part is recessed towards the inner side of the diameter along the pointed front end of the annular protrusion.

[0009] In this case, the radial thickness of the second thin-walled portion is locally minimal at the location corresponding to the protruding end of the annular protrusion, i.e., at the most concave point on the radially inner side of the outer circumferential surface of the second thin-walled portion. Consequently, insulation failure is more likely to occur earlier at this location in the second thin-walled portion. As a result, insulation failure in the first thin-walled portion of the fluid device can be further suppressed.

[0010] (3) Based on the pipe joint of (1) or (2), preferably one of the conductive part and the internal component has an axially recessed engagement groove, and the other of the conductive part and the internal component has an engagement part that engages with the engagement groove.

[0011] In this case, the engaging part engages with the engaging groove, thereby maintaining the conductive part in contact with the outer peripheral surface of the second thin-walled part.

[0012] (4) In addition to the pipe joint of any of (1) to (3), it is preferable to also have a detection device that detects the insulation failure that has occurred in the second thin-walled portion.

[0013] In this situation, the pipe fitting manager can quickly detect insulation failure in the second thin-walled section of the internal component using the detection device, allowing for timely replacement of the internal component. As a result, leakage of the transported fluid from the point of insulation failure in the second thin-walled section can be reduced. Furthermore, there is no need to replace fluid handling equipment, thus shortening the time required for this replacement operation.

[0014] (5) Based on the pipe joint in (4), it is preferable that the detection device has a measuring instrument for measuring the charge of the conductive part.

[0015] In this situation, the detection device can directly detect insulation failure in the second thin-walled section based on the charge measured by the measuring instrument. Therefore, the pipe fitting manager can accurately and quickly determine if insulation failure has occurred in the second thin-walled section.

[0016] The effects of the invention

[0017] According to the present invention, even if an electrified transport fluid flows through a fluid device connected to a pipe fitting, insulation failure in the thin-walled portion of the fluid device can be suppressed. Attached Figure Description

[0018] Figure 1 This is a cross-sectional view showing the pipe fitting according to the first embodiment.

[0019] Figure 2 This is an enlarged cross-sectional view showing the main part of the aforementioned pipe fitting.

[0020] Figure 3 This is an enlarged cross-sectional view showing the main parts of the pipe fitting according to the second embodiment.

[0021] Figure 4 This is a cross-sectional view showing the pipe fitting according to the third embodiment.

[0022] Figure 5 This is a cross-sectional view showing the pipe fitting according to the fourth embodiment. Detailed Implementation

[0023] Next, preferred embodiments of the present invention will be described with reference to the accompanying drawings.

[0024] [First Implementation]

[0025] <Overall Structure of Pipe Fittings>

[0026] Figure 1 This is a cross-sectional view showing the pipe fitting 1 according to the first embodiment. The pipe fitting 1 is used, for example, in the piping path of a liquid used in a semiconductor manufacturing apparatus for conveying fluid, to connect the flow paths of two fluid devices to each other. In this embodiment, the two fluid devices are, for example, pipes 50 made of synthetic resin.

[0027] The pipe 50 has a thin-walled portion (first thin-walled portion) 51 formed in an annular cross-section. In this embodiment, the thin-walled portion 51 is formed along the entire length of the pipe 50. A flow path 52 for the transported fluid is formed on the inner side of the pipe 50, closer to the thin-walled portion 51. The inner circumferential surface of the thin-walled portion 51 is provided as a contact surface 53 that contacts the transported fluid. The pipe connector 1 in this embodiment is used to connect the flow paths 52 of two pipes 50 to each other.

[0028] The pipe fitting 1 has a fitting component 2, an internal component 4, and a pair of pipe nuts 3. Hereinafter, in this embodiment, the direction from the axial center of the pipe fitting 1 toward both axial sides will be referred to as the axial outer side, and the direction from both axial sides of the pipe fitting 1 toward the axial center will be referred to as the axial inner side.

[0029] The internal component 4 has a first ring 5 and a pair of second rings 6. The first ring 5 is located at the axial center of the pipe connector 1. The second rings 6 are located on the two outer sides of the first ring 5 in the axial direction. Both the first ring 5 and the second rings 6 are cylindrical. The inner diameter of the first ring 5 is the same as the inner diameter of the second ring 6.

[0030] The first ring 5 is made of an insulating synthetic resin material. Examples of insulating synthetic resin materials include polyvinyl chloride (PVC), polypropylene (PP), polyethylene (PE), and fluoropolymers (perfluoroalkane (PFA), polytetrafluoroethylene (PTFE), or polyvinylidene fluoride (PVDF), etc.). Since the transport fluid (chemical solution) used in semiconductor manufacturing apparatus requires high purity, the first ring 5 in this embodiment is made of a fluoropolymer. The second ring 6 is, for example, made of the same synthetic resin material as the first ring 5.

[0031] The internal space of the first ring 5 is a flow path 5a through which the conveying fluid flows. The inner circumferential surface of the first ring 5 is configured as a contact surface 5b that contacts the conveying fluid. Similarly, the internal space of the second ring 6 is a flow path 6a through which the conveying fluid flows. The inner circumferential surface of the second ring 6 is configured as a contact surface 6b that contacts the conveying fluid. The flow path 5a of the first ring 5 and the flow path 6a of the pair of second rings 6 are interconnected.

[0032] A primary sealing groove 5c is formed on the inner side of the diameter of each of the two outer ends of the first ring 5 along its axial direction. The primary sealing groove 5c is a tapered groove cut out by gradually expanding its diameter from its inner axial end, i.e., the contact surface 6b, toward the outer axial end. A secondary sealing groove 5d is formed on the outer side of the diameter of each of the two outer ends of the first ring 5 along its axial direction. The secondary sealing groove 5d is a stepped groove formed on the outer periphery of the two outer ends of the first ring 5 along its axial direction.

[0033] The second ring 6 has a bulge 7 and a sealing portion 8. The bulge 7 is located axially outside the second ring 6 and protrudes radially outward, forming a mountain shape. The bulge 7 is pressed into one end of the tube 50, expanding the diameter of that end. Thus, the second ring 6 is connected to one end of the tube 50. The sealing portion 8 is formed axially inside the second ring 6. The sealing portion 8 has a primary sealing portion 8a and a secondary sealing portion 8b.

[0034] The primary sealing part 8a is formed in an annular shape inside the diameter of the sealing part 8. The outer circumferential surface of the primary sealing part 8a gradually expands in diameter from the inner axial end to the outer axial end. The primary sealing part 8a is pressed into the primary sealing groove 5c of the first ring 5. The secondary sealing part 8b is formed in a cylindrical shape further outward than the primary sealing part 8a. The secondary sealing part 8b is pressed into the secondary sealing groove 5d of the first ring 5.

[0035] The connector component 2 is formed into a cylindrical shape from a conductive material. Examples of conductive materials include metals or conductive resins. In this embodiment, the connector component 2 is made of a carbon resin incorporating a filler with both conductive and chemical-resistant properties. Furthermore, from the viewpoint of reducing environmental impact, it is preferable to use a recyclable conductive resin (such as fluoropolymer). Additionally, from the viewpoint of achieving lightweight design, it is preferable to use a lightweight conductive resin (such as polypropylene or polyethylene).

[0036] Regarding the connector component 2, its inner circumferential surface is set as a circular surface and is embedded in the outer circumference of the inner component 4 (first ring 5 and second ring 6). The connector component 2 has a connector body portion 21 and a pair of socket portions 22. The connector body portion 21 is formed at the axial center of the connector component 2. The socket portions 22 are respectively formed on the two outer sides of the connector component 2 in the axial direction.

[0037] The second ring 6 of the bulge 7 is pressed into one end of the tube 50 and embedded in the inner circumference of the socket 22 of the connector component 2. Thus, one end of the tube 50 is held between the bulge 7 of the second ring 6 and the socket 22 of the connector component 2. External threads 23 are formed on the outer circumference of each socket 22.

[0038] The connecting nut 3 is formed into a cylindrical shape from a synthetic resin material such as PVC, PP, PE, or fluoropolymer (PFA or PTFE, etc.). The connecting nut 3 has a pressing portion 31 and an internal thread portion 32. The pressing portion 31 is formed protruding radially inward from the axially outer side of the connecting nut 3. The internal thread portion 32 is formed on the inner circumference of the axially inner side of the connecting nut 3. The internal thread portion 32 is screwed into the external thread portion 23 of the connector component 2. Through this screwing, the axially inner end of the pressing portion 31 presses against the outer circumferential surface of the pipe 50, which bulges radially outward through the bulge portion 7.

[0039] With the above structure, if the internal thread 32 of the connecting nut 3 is screwed into the external thread 23 of the connector component 2, the primary sealing portion 8a and the secondary sealing portion 8b of the second ring 6 are pressed into the primary sealing groove 5c and the secondary sealing groove 5d of the first ring 5, respectively. This ensures the sealing performance of the connection between the first ring 5 and the second ring 6, as well as the sealing performance between the outer circumferential surface of the second ring 6 and the inner circumferential surface of the connector component 2. Furthermore, the pressing portion 31 of the connecting nut 3 can prevent one end of the tube 50 from being pulled out of the connector 1.

[0040] Furthermore, regarding the shape of the connector component 2, as long as the socket portion 22 forming the external thread portion 23 is formed into a cylindrical shape, the connector body portion 21 can be formed into a cylindrical shape or a polygonal cylindrical shape.

[0041] <Discharge Structure>

[0042] Figure 2 This is an enlarged cross-sectional view showing the main part of the pipe connector 1. The pipe connector 1 has a discharge structure 10 that induces the discharge of the charge carried by the transported fluid when the transported fluid is charged. The discharge structure 10 is composed of a thin-walled portion (second thin-walled portion) 12 and a conductive portion 13. The details of the discharge structure 10 will be described below.

[0043] The first ring 5 has a fitting recess 11 and the aforementioned thin-walled portion 12. The fitting recess 11 is formed at the axial central portion of the first ring 5, and an opening is formed on the outer peripheral surface of the axial central portion. The fitting recess 11 extends all around the circumference of the first ring 5 and is formed in a circular shape.

[0044] A thin-walled portion 12 is formed at the axial center of the first ring 5, between the bottom surface 11a of the fitting recess 11 and the contact surface 5b of the first ring 5. The thin-walled portion 12 is formed in a ring shape covering the entire circumference of the first ring 5. Hereinafter, the bottom surface 11a and the contact surface 5b will also be referred to as the outer peripheral surface 11a and the inner peripheral surface 5b of the thin-walled portion 12, respectively.

[0045] The thin-walled portion 12 is part of the first ring 5, and therefore has insulation properties as described above. The thin-walled portion 12 has a thickness t2 extending radially outward from the inner circumferential surface 5b of the first ring 5. The thickness t2 of the thin-walled portion 12 is less than the radial thickness t1 of the thin-walled portion 51 of the tube 50 (see reference). Figure 1 ).

[0046] The aforementioned conductive portion 13 is provided in the connector component 2. In this embodiment, the conductive portion 13 is integrally provided with the connector body 21. Specifically, the conductive portion 13 protrudes radially inward from the inner circumferential surface of the axial center portion of the connector body 21. The conductive portion 13 is formed in a ring shape covering the entire circumference of the connector body 21 and is embedded in the fitting recess 11 of the first ring 5. The inner circumferential surface 13a of the conductive portion 13 contacts the outer circumferential surface 11a of the thin-walled portion 12. The conductive portion 13 is made of the same material as the connector component 2 and has conductivity. The conductive portion 13 may also be separately provided from the connector body 21.

[0047] The conductive part 13 has a pair of engaging grooves 13b. The engaging grooves 13b are formed recessed inward on both sides of the conductive part 13 along the axial direction. Each engaging groove 13b is formed in a ring shape covering the entire circumference of the connector body part 21.

[0048] The first ring 5 has a pair of engaging portions 5e. The engaging portions 5e protrude axially inward from both sides of the engaging recess 11. Each engaging portion 5e is formed in a ring shape covering the entire circumference of the connector body 21 and engages with each engaging groove 13b of the conductive portion 13. Thus, the conductive portion 13 is held in the state of being inserted into the engaging recess 11.

[0049] With the above structure, when the transported fluid is charged, the charge carried by the transported fluid can easily discharge radially through the thin-walled portion 12 to the conductive portion 13 when passing through the flow path 5a of the first ring 5. Because the aforementioned charge is discharged to the conductive portion 13, insulation damage such as pinholes can easily occur in the thin-walled portion 12.

[0050] <Detection Device>

[0051] exist Figure 1In this embodiment, the pipe connector 1 also includes a detection device 15 for detecting insulation failure in the thin-walled portion 12 of the internal component 4. The detection device 15 in this embodiment includes a measuring instrument 15a and a lead wire 15b. The measuring instrument 15a measures the charge discharged from the conveying fluid to the conductive portion 13. For example, an oscilloscope or a ohmmeter can be used as the measuring instrument 15a.

[0052] One end of the lead wire 15b is electrically connected to the measuring device 15a. The other end of the lead wire 15b is embedded in the connector body 21 and electrically connected to the connector body 21. The measuring device 15a detects the charge on the conductive portion 13 via the lead wire 15b and the connector body 21. The detection device 15 detects the insulation failure that has occurred in the thin-walled portion 12 based on the charge measured by the measuring device 15a. Therefore, the detection device 15 of this embodiment measures the charge on the conductive portion 13, which is directly related to the insulation failure of the thin-walled portion 12, and thus can directly detect the insulation failure that has occurred in the thin-walled portion 12.

[0053] If the detection device 15 detects insulation failure in the thin-walled portion 12, it notifies the manager of the pipe joint 1 of this insulation failure via a notification unit (not shown). Upon receiving the notification, the manager disassembles the pipe joint 1 and replaces at least the first ring 5, which has the thin-walled portion 12 with insulation failure, with a new component.

[0054] The detection device 15 is not limited to this embodiment and can also indirectly detect insulation failure in the thin-walled portion 12 of the internal component 4. For example, the detection device 15 may also include a pressure sensor, a flow sensor, or a weight sensor. These sensors measure changes in the pressure, flow rate, or weight of the conveying fluid flowing through the flow paths 5a and 6a of the internal component 4 when the conveying fluid leaks from the portion of the thin-walled portion 12 where insulation failure has occurred. Therefore, the detection device 15 can indirectly detect insulation failure in the thin-walled portion 12 by measuring the state changes of the conveying fluid accompanying the insulation failure in the thin-walled portion 12.

[0055] Alternatively, the detection device 15 may also include a leak sensor or a capacitive sensor to detect leakage of the fluid being transported from the thin-walled portion 12 where insulation failure has occurred. In this case, the detection device 15 can also indirectly detect the insulation failure that has occurred in the thin-walled portion 12 by detecting leakage of the fluid being transported along with the insulation failure of the thin-walled portion 12.

[0056] <Effects>

[0057] According to the pipe connector 1 of the first embodiment, if a charged transport fluid flows through the flow paths 5a and 6a of the internal component 4, the charge carried by the transport fluid discharges radially through the thin-walled portion 12 of the first ring 5 to the conductive portion 13, thereby easily causing insulation failure at the thin-walled portion 12. Furthermore, the thickness t2 of the thin-walled portion 12 of the first ring 5 is less than the thickness t1 of the thin-walled portion 51 of the pipe 50. Therefore, insulation failure is easily caused at the thin-walled portion 12 of the first ring 5 before insulation failure occurs in the thin-walled portion 51 due to the charged transport fluid flowing through the flow path 52 of the pipe 50. Thus, insulation failure in the thin-walled portion 51 of the pipe 50 can be suppressed.

[0058] The conductive portion 13 is held in a state where it is embedded in the fitting recess 11 by engaging with each engaging portion 5e of the first ring 5 and engaging with each engaging groove 13b of the conductive portion 13. As a result, the conductive portion 13 can be held in a state where it is in contact with the outer peripheral surface 11a of the thin-walled portion 12 of the first ring 5.

[0059] The detection device 15 detects insulation failure in the thin-walled portion 12 of the internal component 4. This allows the operator of the pipe joint 1 to quickly identify the insulation failure in the thin-walled portion 12 and thus replace the internal component 4 as soon as possible. Consequently, leakage of the transported fluid from the area of ​​insulation failure in the thin-walled portion 12 is reduced. Furthermore, there is no need to replace the fluid equipment, i.e., the pipe 50, thus correspondingly shortening the replacement operation time.

[0060] The detection device 15 directly detects insulation failure in the thin-walled portion 12 based on the charge on the conductive portion 13 measured by the measuring instrument 15a. Therefore, the operator of the pipe joint 1 can accurately and quickly determine if insulation failure has occurred in the thin-walled portion 12.

[0061] [Second Implementation]

[0062] Figure 3 This is an enlarged cross-sectional view showing the main parts of the connector 1 according to the second embodiment. In this embodiment, the shapes of the thin-walled portion 12 and the conductive portion 13 of the discharge structure 10 are different from those in the first embodiment. The conductive portion 13 of this embodiment has an annular protrusion 13c that tapers towards the inner diameter from the inner peripheral surface 13a. The annular protrusion 13c of this embodiment is formed in a mountain-shaped cross-section at the axial center of the inner peripheral surface 13a. The annular protrusion 13c is formed in a circular shape around the entire circumference of the conductive portion 13.

[0063] The outer peripheral surface 11a of the thin-walled portion 12 is recessed radially inward along the tapering shape of the front end of the annular protrusion 13c. In this embodiment, the outer peripheral surface 11a of the thin-walled portion 12 is recessed in a V-shape along its entire circumference at its axial center. As a result, the annular protrusion 13c of the conductive portion 13 comes into contact with the outer peripheral surface 11a of the thin-walled portion 12.

[0064] The thickness t2 of the thin-walled portion 12 is locally minimized at the portion 12a where the outer peripheral surface 11a of the thin-walled portion 12 is most concave radially inward, corresponding to the protruding end of the annular protrusion 13c. Other structures in this embodiment are the same as in the first embodiment; therefore, the same reference numerals are used, and their descriptions are omitted.

[0065] The pipe connector 1 in this embodiment achieves the same effect as in the first embodiment. Furthermore, in this embodiment, the thickness t2 of the thin-walled portion 12 is locally minimized at the portion 12a where the outer peripheral surface 11a of the thin-walled portion 12 is most concave radially inward. Therefore, insulation failure is more likely to occur earlier at the portion 12a of the thin-walled portion 12. As a result, insulation failure in the thin-walled portion 51 of the pipe 50 can be further suppressed.

[0066] [Third Implementation]

[0067] Figure 4 This is a cross-sectional view showing the pipe fitting 1 according to the third embodiment. In this embodiment, the connection structure between the first ring 5 and the second ring 6 of the internal component 4 is different from that in the first embodiment. At the two outer ends of the first ring 5 in this embodiment, a primary sealing groove 5f is integrally formed radially. The primary sealing groove 5f is a tapered groove cut from its inner axial end toward its outer axial end, i.e., the contact surface 6b, with the diameter gradually decreasing.

[0068] The sealing portion 8 of the second ring 6 consists only of a primary sealing portion 8c. The primary sealing portion 8c is formed in an annular shape on the axially inner side of the sealing portion 8. The inner circumferential surface of the primary sealing portion 8c gradually narrows from the axially inner end towards the axially outer end. The primary sealing portion 8c is pressed into the primary sealing groove 5f of the first ring 5. This ensures the sealing performance of the connection between the first ring 5 and the second ring 6.

[0069] The other structures in this embodiment are the same as in the first embodiment; therefore, the same reference numerals are used, and their descriptions are omitted. The pipe connector 1 in this embodiment also achieves the same functional effect as in the first embodiment.

[0070] [Fourth Implementation]

[0071] Figure 5This is a cross-sectional view showing the pipe fitting 1 according to the fourth embodiment. In this embodiment, the structure of the internal component 4 differs from that of the first embodiment. The internal component 4 in this embodiment consists only of the first ring 5. Compared with the first embodiment, the first ring 5 in this embodiment is formed to be longer on the axially outer side. The two axially outer ends of the first ring 5 are each pressed into one end of the pipe 50, thereby expanding the diameter of that end. Thus, the first ring 5 is connected to one end of the pipe 50.

[0072] The other structures in this embodiment are the same as in the first embodiment; therefore, the same reference numerals are used, and their descriptions are omitted. The pipe connector 1 in this embodiment also achieves the same functional effect as in the first embodiment.

[0073] [other]

[0074] The embodiments disclosed above are illustrative in all respects and are not limiting. For example, in the embodiments described above, the fluid device connecting the internal component 4 is not limited to pipe 50, as long as it has a thin-walled portion that contacts the fluid being transported. For example, the fluid device could also be a diaphragm pump with a thin-walled portion, i.e., a diaphragm. In this case, the internal component 4 is connected to a tubular inlet or outlet pipe in the diaphragm pump. Furthermore, insulation failure occurs at the thin-walled portion 12 of the pipe joint 1 before insulation failure occurs in the diaphragm, thus eliminating the need to replace the expensive diaphragm pump. Therefore, replacement operations can be performed quickly and at low cost.

[0075] In the first to third embodiments described above, the thin-walled portion 12 of the discharge structure 10 is formed in the first ring 5, but it may also be formed in the second ring 6. In each of the above embodiments, an engaging portion 5e is provided in the internal component 4, and an engaging groove 13b is provided in the conductive portion 13, but it is also possible to provide an engaging portion in the conductive portion 13 and an engaging groove in the internal component 4. The connector 1 of the present invention can be used not only in semiconductor manufacturing apparatuses, but also in the fields of liquid crystal / organic EL, medical / pharmaceutical, and automotive-related fields.

[0076] Explanation of the label

[0077] 1. Pipe fitting

[0078] 2 Connector components

[0079] 3. Connecting nut

[0080] 4. Internal components

[0081] 5b Contact surface

[0082] 5e Card Connection

[0083] 11a Outer peripheral surface

[0084] 12 Thin-walled section (2nd thin-walled section)

[0085] 13 Conductive parts

[0086] 13b engagement slot

[0087] 13c Annular protrusion

[0088] 15. Detection device

[0089] 15a measuring instrument

[0090] 23 External thread section

[0091] 32 Internal thread section

[0092] 50 tubes (fluid equipment)

[0093] 51 Thin-walled section (first thin-walled section)

[0094] t1 Thickness of the first thin-walled section

[0095] t2 Thickness of the second thin-walled section

Claims

1. A pipe fitting, comprising: The cylindrical internal component has an inner circumferential surface that is in contact with the fluid being transported. A cylindrical connector component, which is embedded in the outer periphery of the internal component, has an external thread on the outer periphery; and A pipe nut having an internal thread portion on its inner circumference that is screwed into the external thread portion. The internal components are connected to a fluid device having a first thin-walled portion in contact with the conveyed fluid. In this pipe fitting, The internal component has an insulating annular second thin-walled portion, which has a thickness extending radially outward from the contact surface, and this thickness is less than the thickness of the first thin-walled portion. The pipe joint has a conductive part that is conductive and is disposed on the joint component, and is in contact with the outer peripheral surface of the second thin-walled part.

2. The pipe fitting according to claim 1, wherein, The conductive part has an annular protrusion that tapers towards the inner diameter. The outer peripheral surface of the second thin-walled portion is recessed radially inward along the tapered shape of the front end of the annular protrusion.

3. The pipe fitting according to claim 1 or 2, wherein, One of the conductive part and the internal component has an axially recessed engagement groove. The conductive part and the other of the internal components have an engaging part that engages with the engaging groove.

4. The pipe fitting according to claim 1 or 2, wherein, It also has a detection device that detects insulation failure in the second thin-walled portion.

5. The pipe fitting according to claim 4, wherein, The detection device includes a measuring instrument for measuring the charge on the conductive part.

Citation Information

Patent Citations

  • Resin pipe joint

    JP2018168947A