Heating and cooling integrated octagonal sputtering machine

Abstract

The application relates to the field of sputtering technology, in particular to a heating and cooling integrated eight-edge sputtering machine, which comprises a main cavity and a reaction cavity installed on the outer side of the main cavity, a processing cavity is installed at the middle position of the front side of the main cavity, a camera is fixed above the processing cavity, a pinch conveying mechanism is installed in the main cavity, temperature control cavities connected with the main cavity are arranged on the left and right sides of the processing cavity, a bearing seat is connected in the temperature control cavities, and a lower integrated disc is installed in the bearing seat. The heating and cooling integrated eight-edge sputtering machine has the cooling and heating functions of the lower integrated disc and an upper integrated disc, only one of the two functions can be used at the same time, the temperature control cavities can meet different use requirements, the material does not need to be transferred, the operation is convenient, the heating or cooling efficiency is improved, six reaction cavities can be sequentially installed on six surfaces, and the manufacturing efficiency of the eight-edge sputtering machine for electronic special materials is improved.

Description

TECHNICAL FIELD

[0001] The application relates to the field of sputtering technology, and particularly relates to a heating and cooling integrated eight-edge sputtering machine. BACKGROUND

[0002] When manufacturing electronic special materials, a sputtering machine needs to be used. The sputtering machine uses a magnetic control sputtering technology to perform high-speed sputtering and deposition of target material atoms on a substrate surface in a vacuum environment, so that a uniform thin film layer is formed, and the performance and stability of the electronic special materials are improved.

[0003] For example, a patent application with the title of “A bipolar eight-edge magnetic control sputtering machine” is disclosed in the prior art with the publication number “CN120174321A”. The patent discloses that the material is transported to a first main cavity module through an inlet and outlet cavity module, the material is sequentially transferred to a plurality of processing cavity modules according to a preset path by a clamping and conveying system, and first-stage processing is sequentially performed. After the material completing the first-stage processing is cooled in a transfer buffer cavity module, the material is transferred to a plurality of processing cavity modules on the side of a second main cavity module by a clamping and conveying system of the second main cavity module, and second-stage processing is sequentially performed. Finally, the finished product is cooled in a buffer cavity module, and then is output by the clamping and conveying system through the inlet and outlet cavity module.

[0004] The eight-edge sputtering machine in the prior art is cooled by the transfer buffer cavity module, so that the transfer buffer cavity module in the eight-edge sputtering machine can only perform cooling operation. When heating is needed, the material needs to be transferred to other heating areas for heating. This makes the operation more complicated, and the heating and cooling cannot be integrated into one cavity. In turn, the heating or cooling efficiency is slow, and therefore the manufacturing efficiency of the eight-edge sputtering machine for electronic special materials is slow. Therefore, the present application provides a heating and cooling integrated eight-edge sputtering machine to solve the above problems. SUMMARY

[0005] The application aims to provide a heating and cooling integrated eight-edge sputtering machine to solve the problem that the eight-edge sputtering machine on the market is cooled by a transfer buffer cavity module when in use, so that the transfer buffer cavity module in the eight-edge sputtering machine can only perform cooling operation. When heating is needed, the material needs to be transferred to other heating areas for heating. This makes the operation more complicated, and the heating and cooling cannot be integrated into one cavity. In turn, the heating or cooling efficiency is slow, and therefore the manufacturing efficiency of the eight-edge sputtering machine for electronic special materials is slow.

[0006] In order to achieve the above object, the application provides the following technical scheme: a heating and cooling integrated eight-edge sputtering machine, comprising a main cavity and a reaction cavity installed on the outside of the main cavity, and a processing cavity is installed at the middle of the front side of the main cavity, and a camera is fixed above the processing cavity, a pinch conveying mechanism is installed inside the main cavity, a temperature control cavity connected with the main cavity is arranged on the left and right sides of the processing cavity, a bearing seat is connected inside the temperature control cavity, a lower integrated disc is installed inside the bearing seat, an upper integrated disc is welded and connected above the lower integrated disc, the space between the lower integrated disc and the upper integrated disc is used for temporarily storing cooling liquid, a heating wire assembly is installed on the upper surface of the upper integrated disc through grooving, an expansion assembly is installed inside the upper surface of the upper integrated disc, and a protection assembly is connected to the upper surface of the upper integrated disc.

[0007] Preferably, a gas cylinder is installed inside the temperature control cavity, the output end below the gas cylinder is connected to the upper side of the clamping mechanism inside the temperature control cavity, and a bearing seat is arranged below the clamping mechanism.

[0008] Preferably, a water inlet pipe is installed through the middle of the bottom surface of the bearing seat, a drain pipe is installed through the bearing seat on the left side of the water inlet pipe, and the upper end of the water inlet pipe is connected to the inside of the lower integrated disc.

[0009] Preferably, a plurality of shunt holes are equidistantly arranged on the upper surface of the lower integrated disc, the lower side of the shunt hole is connected to the upper inside of the water inlet pipe, a shunt groove and a confluence groove are arranged on the upper surface of the lower integrated disc on the outer side of the shunt hole, the lowest point of the confluence groove is lower than the lowest point of the shunt groove.

[0010] Preferably, the upper integrated disc is arranged in an inverted "U" shape, the expansion assembly comprises an expansion cloth sealedly installed in the groove arranged inside the upper surface of the upper integrated disc, a regulating rod is installed through the lower surface inside the expansion cloth, the expansion cloth is arranged in a "U" shape, and the regulating rod is arranged in a "T" shape.

[0011] Preferably, the inside of the regulating rod is hollow, the lower ends of the regulating rods in each row are connected through a connecting frame, and the connecting frame is installed on the outer side of the support ring plate.

[0012] Preferably, a fixed pipe is installed through the inside of the confluence groove, a piston assembly is connected to the inside of the fixed pipe, argon gas is injected into the fixed pipe above the piston assembly, a drain disc is installed at the lower end of the piston assembly, a plurality of first through holes are equidistantly arranged on the outer side of the fixed pipe, and the highest point of the first through hole is lower than the highest point of the initial position of the drain disc.

[0013] Preferably, the diameter of the drain pan is the same as the upper end diameter of the piston assembly, the second through holes are equidistantly arranged in the inner part of the drain pan, the height of the second through holes is equal to the height of the drain pan, the diameter of the drain pan is larger than the inner diameter of the lower end of the fixed tube, the bottom surface of the lower integrated disc is provided with a circular ring-shaped water collecting frame, the inner part of the water collecting frame is hollow, the lower end of the fixed tube is communicated with the inner part of the water collecting frame, and the left bottom surface of the water collecting frame is provided with a drain hole, and the bottom surface of the drain hole is communicated with the drain pipe.

[0014] Preferably, the protection assembly comprises a cover plate arranged on the upper surface of the upper integrated disc, the bottom surface of the cover plate is in contact with the upper surface of the upper integrated disc through a sealing gasket, the bottom surface of the cover plate is provided with a rotating rod in the middle part, the lower end of the rotating rod is rotatably connected to the middle part of the upper integrated disc, the outer side of the rotating rod in the inner part of the upper integrated disc is provided with a spiral spring, the lower end of the rotating rod is provided with a protrusion on the left side, and the lower surface of the protrusion is an inclined surface.

[0015] Preferably, the outer side of the lower end of the rotating rod is provided with a supporting ring plate, the inner part of the supporting ring plate is provided with equidistantly arranged inverted T-shaped guide rods, the upper end of the guide rod is connected to the inner wall of the upper integrated disc, the left inner wall of the supporting ring plate is provided with a pushing rod, the upper part of the pushing rod is provided with a protrusion, and the protrusion and the rotating rod constitute a rotating structure through the upward movement of the pushing rod.

[0016] Compared with the prior art, the heating and cooling integrated eight-edge sputtering machine has the following advantages:

[0017] (1) The space between the lower integrated disc and the upper integrated disc can temporarily store cooling water, thereby forming a cooling channel, and the inner part of the upper surface of the upper integrated disc is provided with a heating wire assembly, so that the heating structure and the cooling structure can be integrated into the lower integrated disc and the upper integrated disc, so that the lower integrated disc and the upper integrated disc can realize the functions of cooling and heating, and only one of the two functions can be used at the same time, thereby facilitating the temperature control cavity to meet different use requirements, without the need to transfer the material, convenient operation, improved heating or cooling efficiency, and six reaction cavities can be sequentially arranged on the six surfaces, thereby improving the manufacturing efficiency of the eight-edge sputtering machine for electronic special materials;

[0018] (2) Further, when cooling water is injected into the space between the lower integrated disc and the upper integrated disc, the cooling water pushes the control rod to move upward, the control rod pushes the expansion cloth to expand upward, and the cooling water is present between the expansion cloth and the control rod and in the hollow control rod, thereby increasing the height of the cooling water between the expansion cloth and the control rod and in the control rod, facilitating the increase of the storage capacity of the cooling water, and further improving the cooling efficiency.

[0019] After the cooling water is discharged through the drain pipe, the control rod descends and drives the expansion cloth to reset, preventing the upward-protruding expansion cloth and control rod from blocking the flow of heat during subsequent heating, thus not affecting the subsequent heating operation.

[0020] (3) After the cooling water in the space between the lower integrated plate and the upper integrated plate has been used for a period of time, the temperature rises, causing the argon gas in the fixed tube above the piston assembly to expand when heated. Then the argon gas pushes the piston assembly and the drain plate downward, so that the highest point of the drain plate is lower than the lowest point of the first through hole. Therefore, the cooling water in the space between the lower integrated plate and the upper integrated plate can be discharged into the water collection frame through the second through hole, which is convenient for later discharge and for replacing the cooling water.

[0021] (4) When the control rod rises, it drives the support ring plate and the push rod to rise. The push rod, which is in the shape of an "L", applies an upward thrust to the protrusion on the inclined surface of the lower surface. Then the protrusion drives the rotating rod to rotate. The rotating rod drives the cover plate to rotate, so that the cover plate seals and covers the top of the heating wire assembly, preventing the cold air from the outside from damaging the heating wire assembly and improving the service life of the heating wire assembly. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the overall three-dimensional structure of the present invention;

[0023] Figure 2 This is a schematic diagram of the three-dimensional structure of the main cavity of the present invention;

[0024] Figure 3 This is a schematic diagram of the rear view of the main cavity structure of the present invention;

[0025] Figure 4 This is a schematic diagram of the main cavity structure of the present invention from a bottom view;

[0026] Figure 5 This is a schematic cross-sectional view of the temperature control cavity of the present invention;

[0027] Figure 6 This is a top view of the bearing seat structure of the present invention;

[0028] Figure 7 This is a schematic cross-sectional view of the bearing seat structure of the present invention;

[0029] Figure 8 This is a schematic cross-sectional view of the integrated disk structure of the present invention;

[0030] Figure 9 For the present invention Figure 8 Enlarged structural diagram at point A in the middle;

[0031] Figure 10 This is a schematic diagram of the integrated disk structure from below in this invention;

[0032] Figure 11 Schematic diagram of top view structure after regulating rod rising of the present application;

[0033] Figure 12 Schematic diagram of three-dimensional structure of lower integrated disc of the present application;

[0034] Figure 13 Schematic diagram of sectional structure of lower integrated disc of the present application;

[0035] Figure 14 Schematic diagram of sectional structure of fixed pipe of the present application.

[0036] In the figure: 1, main cavity; 2, reaction cavity; 3, temperature control cavity; 4, air cylinder; 41, clamping mechanism; 5, processing cavity; 51, camera; 6, clamping and conveying mechanism; 7, bearing seat; 71, water inlet pipe; 72, drain pipe; 8, lower integrated disc; 81, shunt hole; 82, shunt groove; 83, flow groove; 9, upper integrated disc; 10, water collecting frame; 101, drain hole; 11, cover plate; 12, rotating rod; 121, protruding block; 122, vortex spring; 13, heating wire assembly; 14, regulating rod; 141, expansion cloth; 15, support ring plate; 151, connecting frame; 152, guide rod; 153, pushing rod; 16, fixed pipe; 161, first through hole; 17, piston assembly; 18, drain pan; 181, second through hole. DETAILED DESCRIPTION

[0037] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0038] Please refer to Figures 1-14 The present application provides the following technical solutions:

[0039] Embodiment one: the heating and cooling integrated eight-edge sputtering machine in the present embodiment can integrate the heating structure and the cooling structure into the lower integrated disc 8 and the upper integrated disc 9, so that the lower integrated disc 8 and the upper integrated disc 9 can realize the cooling and heating functions, and the manufacturing efficiency of the eight-edge sputtering machine for electronic special materials is improved. The specific structure is referred to the attached Figures 1-8 and the attached Figures 10-11As shown, the main cavity 1 and the reaction cavity 2 installed outside, and the front side of the main cavity 1 in the middle of the installation of the processing cavity 5, and the processing cavity 5 is fixed above the camera 51, the main cavity 1 is installed inside the pinch conveying mechanism 6, the left and right sides of the processing cavity 5 are provided with temperature control cavity 3 connected with the main cavity 1, and the inside of the temperature control cavity 3 is connected with the bearing seat 7, and the inside of the bearing seat 7 is installed with the lower integrated disc 8, and the upper surface of the lower integrated disc 8 is welded with the upper integrated disc 9, and the space between the lower integrated disc 8 and the upper integrated disc 9 is used for temporary storage of cooling liquid, and the upper surface of the upper integrated disc 9 is installed with heating wire assembly 13, and the upper surface of the upper integrated disc 9 is installed with expansion assembly, and the upper surface of the upper integrated disc 9 is connected with the protection assembly.

[0040] The upper inside of the temperature control cavity 3 is installed with a cylinder 4, and the upper side of the clamping mechanism 41 located inside the temperature control cavity 3 is connected with the output end below the cylinder 4, and the lower side of the clamping mechanism 41 is provided with a bearing seat 7, and the bottom surface of the bearing seat 7 is installed with a water inlet pipe 71, and the bearing seat 7 located on the left side of the water inlet pipe 71 is installed with a drain pipe 72, and the upper end of the water inlet pipe 71 is connected with the inside of the lower integrated disc 8, and the upper surface of the lower integrated disc 8 is provided with a shunt hole 81 at equal intervals, and the lower side of the shunt hole 81 is connected with the inside of the upper side of the water inlet pipe 71, and the upper surface of the lower integrated disc 8 located outside the shunt hole 81 is provided with a shunt groove 82 and a confluence groove 83 connected with each other, and the lowest point of the confluence groove 83 is lower than the lowest point of the shunt groove 82, and the upper integrated disc 9 is provided in an inverted "U" shape, and the expansion assembly comprises an expansion cloth 141 installed in the groove on the upper surface of the upper integrated disc 9, and the lower surface of the expansion cloth 141 is installed with a control rod 14, and the expansion cloth 141 is provided in a "U" shape, and the control rod 14 is provided in a "T" shape, and the inside of the control rod 14 is provided in a hollow shape, and the lower end of each row of control rods 14 is connected by a connecting frame 151, and the connecting frame 151 is installed on the outside of the support ring plate 15.

[0041] The material is transported into the main cavity 1 through the inlet and outlet chamber module installed on the main cavity 1, and then transported into the plurality of reaction cavities 2 in sequence according to the preset path through the pinch conveying mechanism 6 for first-stage processing, the reaction cavities 2 including at least one of a magnetron sputtering cavity, a plasma cleaning cavity and an ion plating cavity, each cavity being sequentially programmed through a programmable logic controller, the pinch conveying mechanism 6 being a conveying mechanism movable in three-dimensional space for cross-chamber material transfer, the material after first-stage processing being transported into the temperature control cavity 3 through the pinch conveying mechanism 6 for cooling or heating, and the final product being output after cooling or heating in the temperature control cavity 3 through the pinch conveying mechanism 6, the pinch conveying mechanism 6 transporting the material into the processing cavity 5, and the material being edge-finding and positioning through the camera 51, which is fast and high in accuracy, and the above-mentioned parts being all prior art and thus not described in detail, and the inlet and outlet chamber module not being shown in the figure.

[0042] When the material enters the temperature control cavity 3, the material is clamped by the clamping mechanism 41, and the height position of the material is adjusted by driving the clamping mechanism 41 to rise and fall through the air cylinder 4, when heating treatment is needed, the heating wire assembly 13 is powered on at this time to heat the material through the heat generated by the heating wire assembly 13, at this time the highest point of the control rod 14 and the expansion cloth 141 are lower than the highest point of the upper integrated disc 9, so that the control rod 14 and the expansion cloth 141 will not block the flow of heat, and then will not affect the later heating work, when cooling is needed, the heating wire assembly 13 is powered off at this time, and then the cooling liquid outside is introduced into the lower integrated disc 8 through the water inlet pipe 71, and then flows into the shunt groove 82 and the convergence groove 83 through the shunt hole 81, at this time the space between the lower integrated disc 8 and the upper integrated disc 9 is injected with cooling water, thereby forming a cooling channel, and then the cooling water drives the control rod 14 to move upward, the control rod 14 expands the expansion cloth 141 upward, at this time the expansion cloth 141 and the control rod 14 are filled with cooling water, and the hollow control rod 14 is also filled with cooling water, thereby increasing the height of the cooling water between the expansion cloth 141 and the control rod 14 and in the control rod 14, thereby further improving the cooling efficiency, the material of the expansion cloth 141 is the same as that of the air bag, and the upper end of the expansion cloth 141 is sealingly connected to the inner side wall of the upper integrated disc 9 through a sealing ring, thereby preventing the cooling liquid from leaking out, the lower integrated disc 8 and the upper integrated disc 9 are both made of copper, and the upper integrated disc 9 and the upper integrated disc 9 are connected by welding, thereby preventing the cooling liquid from leaking.

[0043] Embodiment two: the heating and cooling integrated eight-edge sputtering machine in the embodiment, on the basis of embodiment one, when the cooling water temperature rises, the cooling water can be discharged in time, the specific structure is referred to the attached Figures 12-14As shown, the inside of the collecting groove 83 is provided with the fixed tube 16, the inside of the fixed tube 16 is connected with the piston assembly 17, the fixed tube 16 above the piston assembly 17 is filled with argon gas, the lower end of the piston assembly 17 is provided with the drain tray 18, the outer side of the fixed tube 16 is provided with a circle of first through holes 161 at equal intervals, the highest point of the first through holes 161 is lower than the highest point of the initial position of the drain tray 18, the diameter of the drain tray 18 is the same as the diameter of the upper end of the piston assembly 17, the inside of the drain tray 18 is provided with second through holes 181 at equal intervals, the height of the second through holes 181 is equal to the height of the drain tray 18, the diameter of the drain tray 18 is greater than the inner diameter of the lower end of the fixed tube 16, the bottom surface of the lower integrated disc 8 is provided with the water collecting frame 10 in the shape of a ring, the inside of the water collecting frame 10 is hollow, the lower end of the fixed tube 16 is connected with the inside of the water collecting frame 10, the left bottom surface of the water collecting frame 10 is provided with the drain hole 101, and the bottom surface of the drain hole 101 is connected with the drain pipe 72.

[0044] After a period of cooling, the temperature of the cooling liquid rises, at this time the cooling liquid will raise the temperature of the periphery of the fixed tube 16, so that the argon gas in the fixed tube 16 above the piston assembly 17 expands when heated, then the argon gas pushes the piston assembly 17 and the drain tray 18 to move downward, so that the highest point of the drain tray 18 is lower than the lowest point of the first through hole 161, then the cooling water in the space between the lower integrated disc 8 and the upper integrated disc 9 enters the collecting groove 83, then the cooling water enters the first through hole 161 and the second through hole 181, then the cooling water enters the water collecting frame 10 through the second through hole 181, the cooling water in the water collecting frame 10 enters the drain pipe 72 through the drain hole 101 and is discharged, which facilitates the replacement of the cooling water.

[0045] In the heating and cooling integrated eight-side sputtering machine in this embodiment, the upper part of the heating wire assembly 13 is sealed and covered by the covering plate 11 when the cooling operation is performed, so that the damage of the heating wire assembly 13 caused by external cold air is avoided, and the service life of the heating wire assembly 13 is improved. For specific structure, refer to the accompanying drawings Figure 6 and the accompanying drawings Figure 8 and Figure 11As shown, the protection assembly includes a cover plate 11 installed on the upper surface of the upper integrated disc 9, and the bottom surface of the cover plate 11 is in close contact with the upper surface of the upper integrated disc 9 through a sealing gasket, the middle part of the bottom surface of the cover plate 11 is installed with a rotating rod 12, and the lower end of the rotating rod 12 is rotatably connected to the middle part of the upper integrated disc 9, and the outer side of the rotating rod 12 inside the upper integrated disc 9 is nested with a spiral spring 122, and the lower end of the rotating rod 12 is fixed with a protrusion 121 on the left side, the lower surface of the protrusion 121 is an inclined surface, the lower outer side of the rotating rod 12 is sleeved with a supporting ring plate 15, and the inside of the supporting ring plate 15 is installed with an inverted "T" shaped guide rod 152 at equal intervals, and the upper end of the guide rod 152 is connected with the inner wall of the upper integrated disc 9, and the left inner side wall of the supporting ring plate 15 is installed with a push rod 153, and the upper side of the push rod 153 is provided with a protrusion 121, and the protrusion 121 and the rotating rod 12 constitute a rotating structure through the upward movement of the push rod 153.

[0046] When the regulating rod 14 rises, the supporting ring plate 15 and the push rod 153 are driven to rise through the connecting frame 151, at this time the "L" shaped push rod 153 exerts an upward thrust on the lower surface inclined protrusion 121, thereby causing the protrusion 121 to drive the rotating rod 12 to rotate by a certain angle, and the rotating rod 12 drives the cover plate 11 to rotate, at this time the spiral spring 122 stores energy, and the lower surface of the cover plate 11 is in close contact with the groove on the upper surface of the upper integrated disc 9 for placing the heating wire assembly 13 through the sealing gasket, thereby sealing the upper part of the heating wire assembly 13 with the cover plate 11, avoiding damage to the heating wire assembly 13 caused by external cold air, and improving the service life of the heating wire assembly 13, thereby completing a series of work.

[0047] Although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art can modify the technical solutions described in the foregoing embodiments, or make equivalent replacements to part of the technical features, and any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present application shall be included in the protection scope of the present application.

Claims

1. A heating and cooling integrated octagonal sputtering machine, comprising a main cavity (1) and a reaction chamber (2) mounted on its outer side, wherein a processing chamber (5) is mounted at the front center of the main cavity (1), and a camera (51) is fixed above the processing chamber (5), and a clamping and conveying mechanism (6) is mounted inside the main cavity (1), characterized in that: Temperature control chambers (3) connected to the main cavity (1) are provided on both the left and right sides of the processing chamber (5). A support seat (7) is connected inside the temperature control chamber (3). A lower integrated plate (8) is installed inside the support seat (7). An upper integrated plate (9) is welded to the upper part of the lower integrated plate (8). The space between the lower integrated plate (8) and the upper integrated plate (9) is used to temporarily store coolant. A heating wire assembly (13) is installed in a groove on the upper surface of the upper integrated plate (9). An expansion assembly is installed inside the upper surface of the upper integrated plate (9). A protective assembly is connected to the upper surface of the upper integrated plate (9). A water inlet pipe (71) is installed through the middle of the bottom surface of the support seat (7). A drain pipe (72) is installed through the support seat (7) on the left side of the water inlet pipe (71). The upper integrated plate (9) is connected to the interior of the lower integrated plate (8). The upper surface of the lower integrated plate (8) is provided with diversion holes (81) at equal intervals in the middle position. The lower part of the diversion holes (81) is connected to the interior of the upper part of the water inlet pipe (71). The upper surface of the lower integrated plate (8) located outside the diversion holes (81) is provided with a diversion groove (82) and a confluence groove (83). The lowest point of the confluence groove (83) is lower than the lowest point of the diversion groove (82). The upper integrated plate (9) is set in an inverted "U" shape. The expansion component includes an expansion support cloth (141) sealed at the upper end and installed in a groove opened inside the upper surface of the upper integrated plate (9). An adjustment rod (14) is installed through the lower surface of the expansion support cloth (141). The expansion support cloth (141) is set in a "U" shape, and the adjustment rod (14) is set in a "T" shape.

2. The integrated heating and cooling octagonal sputtering machine according to claim 1, characterized in that: A cylinder (4) is installed through the upper interior of the temperature control cavity (3), and the upper part of the clamping mechanism (41) located inside the upper interior of the temperature control cavity (3) is connected to the lower output end of the cylinder (4), and a bearing seat (7) is provided below the clamping mechanism (41).

3. The integrated heating and cooling octagonal sputtering machine according to claim 1, characterized in that: The control rod (14) is hollow inside, and the lower ends of each row of control rods (14) are connected by a connecting frame (151), which is installed on the outside of the support ring plate (15).

4. The integrated heating and cooling octagonal sputtering machine according to claim 3, characterized in that: A fixed pipe (16) is installed through the inside of the manifold (83), and a piston assembly (17) is attached to the inside of the fixed pipe (16). Argon gas is injected into the fixed pipe (16) above the piston assembly (17). A drain plate (18) is installed at the lower end of the piston assembly (17). A first through hole (161) is opened at equal intervals on the outer side of the fixed pipe (16). The highest point of the first through hole (161) is lower than the highest point of the drain plate (18) at its initial position.

5. The integrated heating and cooling octagonal sputtering machine according to claim 4, characterized in that: The diameter of the drain plate (18) is the same as the upper diameter of the piston assembly (17), and the drain plate (18) has second through holes (181) evenly spaced inside, and the height of the second through holes (181) is equal to the height of the drain plate (18), and the diameter of the drain plate (18) is greater than the inner diameter of the lower end of the fixed pipe (16). The bottom surface of the lower integrated plate (8) is equipped with a ring-shaped water collection frame (10), and the inside of the water collection frame (10) is hollow. The lower end of the fixed pipe (16) is connected to the inside of the water collection frame (10), and the bottom surface of the left side of the water collection frame (10) is provided with a drain hole (101), and the bottom surface of the drain hole (101) is connected to the drain pipe (72).

6. The integrated heating and cooling octagonal sputtering machine according to claim 1, characterized in that: The protective assembly includes a cover plate (11) installed on the upper surface of the upper integrated disk (9), and the bottom surface of the cover plate (11) is in contact with the upper surface of the upper integrated disk (9) through a sealing gasket. A rotating rod (12) is installed in the middle of the bottom surface of the cover plate (11), and the lower end of the rotating rod (12) is rotatably connected to the middle of the upper integrated disk (9). A spiral spring (122) is nested on the outside of the rotating rod (12) located inside the upper integrated disk (9), and a protrusion (121) is fixed on the left side of the lower end of the rotating rod (12). The lower surface of the protrusion (121) is inclined.

7. The integrated heating and cooling octagonal sputtering machine according to claim 6, characterized in that: A support ring plate (15) is sleeved on the lower outer side of the rotating rod (12), and guide rods (152) in the shape of an inverted "T" are installed through the support ring plate (15) at equal intervals. The upper end of the guide rod (152) is connected to the inner wall of the upper integrated plate (9). A push rod (153) is installed on the left inner side wall of the support ring plate (15), and a protrusion (121) is provided above the push rod (153). The protrusion (121) and the rotating rod (12) form a rotating structure by the rising of the push rod (153).

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