Online detection system for chemical pollutants in clean room

Abstract

The invention relates to an online detection system for chemical pollutants in a clean room, belongs to the technical field of clean room detection, and solves the problem of low detection efficiency of the chemical pollutants in the clean room in the prior art. The on-line detection system comprises a fixed point location acquisition platform and a movable detection platform. The working modes of the online detection system comprise a fixed mode and a movable mode; the fixed point position acquisition platform is placed in the clean room and is used for acquiring to-be-detected gas at a plurality of fixed point positions in the clean room; and the movable detection platform is used for receiving the to-be-detected gas of the fixed point position acquisition platform in a fixed mode or moving to any point position in a moving mode to acquire the to-be-detected gas and carrying out pollutant detection on the to-be-detected gas. The efficient detection on the pollutant gas in the clean room is realized.

Description

Technical Field

[0001] This invention relates to the field of cleanroom testing technology, and in particular to an online detection system for chemical contaminants in cleanrooms. Background Technology

[0002] Chemical contaminants are one of the main contaminants in cleanrooms, including various substances such as acids, alkalis, and organic matter. The IRDS (International Roadmap for Devices and Systems) provides the control requirements for chemical contaminants at different technology nodes and processes, which are generally at the ppb to ppt level, belonging to ultra-low concentration contaminants.

[0003] Chemical pollutant detection methods are divided into offline and online methods. Offline methods typically involve on-site sampling followed by laboratory analysis, with results usually available after one or several days. This lengthy analysis cycle prevents timely feedback on pollutant concentrations and anomalies. Online methods generally employ fixed-point sampling and online analysis, primarily for routine monitoring of chemical pollutant concentrations in key areas. However, due to the higher cost of instruments and systems (which is directly proportional to the number of monitoring points), online methods are often used to save on investment. A drawback is the inability to obtain pollutant concentration information outside these fixed points, hindering the timely acquisition of multi-point data to aid in pollutant identification when concentration anomalies occur.

[0004] Currently, when abnormal pollution incidents occur, a large amount of manpower and time are required to conduct investigations and tests based on their own experience. This is not only costly but also time-consuming, and cannot meet the normal production needs of high-end electronics factories.

[0005] Therefore, there is an urgent need to develop an online detection system suitable for cleanrooms that can meet routine testing requirements and quickly obtain multi-point detection signal analysis when concentration anomalies occur. Summary of the Invention

[0006] Based on the above analysis, the present invention aims to provide an online detection system for chemical contaminants in cleanrooms, in order to solve the problem of low detection efficiency of chemical contaminants in cleanrooms in the prior art.

[0007] This invention provides an online detection system for chemical contaminants in cleanrooms. The online detection system includes a fixed-point acquisition platform and a mobile detection platform. The online detection system operates in two modes: a fixed mode and a mobile mode.

[0008] A fixed-point data collection platform is placed in a clean room to collect the gas to be tested at multiple fixed points within the clean room.

[0009] A mobile detection platform is used to receive the gas to be detected from a fixed-point collection platform in fixed mode or to move to any point in mobile mode to collect the gas to be detected and to perform pollutant detection on the gas to be detected.

[0010] Based on further improvements to the above-mentioned online detection system, the fixed-point acquisition platform includes a multi-channel sampler, a first buffer tank, and a main controller.

[0011] The multi-channel sampler includes a switchable valve and multiple channel lines. The end of each channel line is placed at a fixed point in the clean room, and the beginning of each channel line is connected to the switchable valve.

[0012] The main controller collects the gas to be tested from any fixed point in the clean room by controlling the switchable valve, and stores the gas to be tested in the first buffer tank.

[0013] Based on further improvements to the above-mentioned online detection system, the mobile detection platform includes detachable pipelines, a jacketed perforated plate air supply structure, and an AGV trolley, with the jacketed perforated plate air supply structure fixedly placed on the upper part of the AGV trolley.

[0014] The jacketed perforated plate air supply structure includes a second buffer tank, a controller, and a pollutant analyzer.

[0015] One end of the detachable pipeline is connected to the first buffer tank in the fixed mode and placed at any point in the mobile mode; the other end of the detachable pipeline is connected to the second buffer tank.

[0016] A pollutant analyzer is used to analyze the air to be tested stored in a second buffer tank under the control of a controller.

[0017] Based on further improvements to the above-mentioned online detection system, the jacketed perforated plate air supply structure also includes a accommodating cavity and a multi-layer inner lining perforated plate;

[0018] A multi-layer perforated plate is placed inside the accommodating cavity, and the second buffer tank and the pollutant analyzer are placed inside the multi-layer perforated plate.

[0019] A sampling port and a controller are provided on the upper cover of the accommodating cavity. The other end of the detachable pipeline is connected to the sampling port, and the sampling port is connected to the second buffer tank through the pipeline.

[0020] Based on the further improvement of the above online detection system, an air supply module is set on the lower cover plate of the accommodating cavity to provide cooling airflow to the jacketed perforated plate air supply structure; multiple exhaust fans are set on the rear cover plate of the accommodating cavity to exhaust the hot airflow inside the jacketed perforated plate air supply structure.

[0021] The front cover of the accommodating cavity is fixedly connected to the left and right side covers, the upper cover, and the lower cover.

[0022] An inner perforated plate is provided on the inner side of the cover plates on both the left and right sides, and a multi-layer inner lining perforated plate is arranged between the inner perforated plates.

[0023] Based on the further improvement of the above online detection system, a resistance adjustment plate is set on the perforated plate inside the jacket;

[0024] The resistance adjustment plate is used to adjust the number of openings in the corresponding jacket inner opening plate of each inner lining plate, so as to adjust the air flow of each layer of inner lining plate.

[0025] Based on further improvements to the above-mentioned online detection system, the fixed-point acquisition platform also includes a circulation purification system and a zero-gas generator;

[0026] The circulating purification system is used to receive ambient air, circulate and purify the ambient air, and then transmit the purified air to the zero air generator.

[0027] A zero-gas generator is used, under the control of a main controller and / or a slave controller, to further purify the air after it has undergone a circulating purification process, so as to provide gas free of the components to be detected or interfering substances for fixed-point acquisition platforms and / or mobile detection platforms.

[0028] Based on further improvements to the above-mentioned online detection system, the circulating purification system includes a circulating pipeline and pressure sensor, a make-up air valve and a sampling pump;

[0029] The circulation pipeline is sequentially equipped with a temperature and humidity control module, a circulating fan, a high-efficiency filter, a chemical filter, and a buffer chamber;

[0030] A pressure sensor and a make-up air valve are located at the inlet of the circulation pipeline. The pressure sensor is used to detect the ambient air pressure, and the make-up air valve is used to regulate the ambient air pressure so that the ambient air with stable pressure enters the buffer chamber. The buffer chamber is connected to the zero air generator through a sampling pump, which serves as the outlet of the circulation pipeline.

[0031] The zero-gas generator includes a copper tube condenser, a water removal filter, a regenerative scrubbing module, an HC / CO scrubber, a CO scrubber, a NO scrubber, an activated carbon scrubber, and a particulate filter connected in sequence.

[0032] Based on further improvements to the above-mentioned online detection system, the jacketed perforated plate air supply structure also includes a positioning radar, which is installed on the upper cover plate.

[0033] The positioning radar is connected to the slave controller and is used to locate the position of the jacketed perforated plate air supply structure under the control of the slave controller.

[0034] Based on further improvements to the above-mentioned online detection system, shock-absorbing and damping devices are installed on the upper part of the AGV trolley.

[0035] The jacketed perforated plate air supply structure is fixedly placed on top of the shock-absorbing and damping device.

[0036] Compared with the prior art, the present invention can achieve at least one of the following beneficial effects:

[0037] 1. By adopting a mobile detection platform, it is possible not only to detect pollutants in the gas at multiple fixed points in the clean room under fixed mode, but also to detect pollutants in the gas at any point, thereby improving the detection efficiency of gases in the clean room.

[0038] 2. By setting an air supply module on the lower cover of the accommodating cavity to provide cooling airflow to the jacketed perforated plate air supply structure, and by setting multiple exhaust fans on the rear cover of the accommodating cavity to exhaust the hot airflow inside the jacketed perforated plate air supply structure, the impact of high temperature on pollutant analysis is reduced and the detection accuracy is improved.

[0039] In this invention, the above-described technical solutions can be combined with each other to achieve more preferred combinations. Other features and advantages of this invention will be set forth in the following description, and some advantages may become apparent from the description or be learned by practicing the invention. The objects and other advantages of this invention can be realized and obtained from what is particularly pointed out in the description and drawings. Attached Figure Description

[0040] The accompanying drawings are for illustrative purposes only and are not intended to limit the invention. Throughout the drawings, the same reference numerals denote the same parts.

[0041] Figure 1 This is a schematic diagram of the structure of an online detection system for chemical contaminants in a cleanroom, provided in an embodiment of the present invention.

[0042] Figure 2 This is one of the structural schematic diagrams of the mobile detection platform provided in an embodiment of the present invention;

[0043] Figure 3 This is a second schematic diagram of the structure of the mobile detection platform provided in an embodiment of the present invention;

[0044] Figure 4 This is a schematic diagram of the structure of the circulating purification system provided in an embodiment of the present invention;

[0045] Figure 5 This is a schematic diagram of the structure of a zero-gas generator provided in an embodiment of the present invention;

[0046] 1. Controller; 2. Sampling port; 3. Positioning radar; 4. Rear cover;

[0047] 5. Left and right side cover plates; 6. Multi-layer inner lining perforated plate; 7. AGV pusher; 8. Jacket inner perforated plate;

[0048] 9. Front cover; 10. Air supply module; 11. Resistance adjustment plate. Detailed Implementation

[0049] Preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings, which form part of this application and are used together with the embodiments of the present invention to illustrate the principles of the present invention, but are not intended to limit the scope of the present invention.

[0050] One specific embodiment of the present invention discloses an online detection system for chemical contaminants in cleanrooms, such as... Figure 1 As shown, the online detection system includes a fixed-point acquisition platform and a mobile detection platform; the online detection system has two operating modes: a fixed mode and a mobile mode.

[0051] A fixed-point data collection platform is placed in a clean room to collect the gas to be tested at multiple fixed points within the clean room.

[0052] A mobile detection platform is used to receive the gas to be detected from a fixed-point collection platform in fixed mode or to move to any point in mobile mode to collect the gas to be detected and to perform pollutant detection on the gas to be detected.

[0053] Specifically, such as Figure 1 As shown, the online detection system consists of two parts: a fixed-point acquisition platform and a mobile detection platform. The fixed-point acquisition platform is used to set up multiple fixed points in the clean room. The fixed points are mainly selected according to the needs of daily monitoring of chemical pollutant concentrations in key areas, and can be set up specifically for each clean room.

[0054] Specifically, the online detection system has two working modes: fixed mode and mobile mode. In fixed mode, a fixed-point acquisition platform and a mobile detection platform are connected, and the mobile detection platform receives and stores the gas to be detected from the fixed-point acquisition platform.

[0055] Specifically, the mobile mode allows the mobile detection platform to directly collect the gas to be tested from any location. It is understandable that existing detection technologies only detect the gas at fixed locations and cannot detect pollutant concentrations outside of these fixed locations. Furthermore, when abnormal concentrations occur within a cleanroom, it cannot promptly obtain gas data from multiple related locations to assist in pollutant identification.

[0056] The online detection system provided in this invention combines a fixed-point acquisition platform and a mobile detection platform. This allows for the detection of gases not only at fixed points but also at any other point within the fixed location, enabling better monitoring of cleanrooms. Existing technologies, when handling abnormal contamination events, require significant manpower and time spent on investigation and testing based on experience. This is not only costly but also time-consuming, failing to meet the normal production needs of high-end electronics factories. The online detection system provided in this invention can quickly detect pollutants at multiple points, thereby enabling the tracing of contamination sources.

[0057] It is worth noting that all the devices for detecting and analyzing pollutants in the gas to be tested are installed inside the mobile detection platform.

[0058] Preferably, such as Figure 1 As shown, the fixed-point acquisition platform includes a multi-channel sampler, a first buffer tank, and a main controller.

[0059] The multi-channel sampler includes a switchable valve and multiple channel lines. The end of each channel line is placed at a fixed point in the clean room, and the beginning of each channel line is connected to the switchable valve.

[0060] The main controller collects the gas to be tested from any fixed point in the clean room by controlling the switchable valve, and stores the gas to be tested in the first buffer tank.

[0061] Specifically, such as Figure 1 As shown, when the online detection system is in fixed mode, the end of each channel pipeline of the multi-channel sampler is set at a fixed point to collect air from the fixed point as the gas to be detected; the beginning of all channel pipelines is connected to a switchable valve, and the main controller controls the switchable valve to transmit the gas to be detected from different fixed points to the first buffer tank.

[0062] Specifically, the channel pipeline can be made of soluble polytetrafluoroethylene (PTFE), leading out from the multi-channel sampler and extending to the critical areas of the cleanroom for air sampling. It is worth noting that the maximum length of the channel pipeline is limited by pipeline resistance and the performance of the sampling pump on the fixed-point sampling platform. The effective length of a single channel pipeline is generally 50–200m. To ensure sampling efficiency and stability, the air flow rate within the channel pipeline should always be greater than the minimum operating flow rate required by the online monitoring system.

[0063] Preferably, such as Figure 1 , Figure 2 , Figure 3As shown, the mobile detection platform includes detachable pipelines, a controller, a jacketed perforated plate air supply structure, and an AGV trolley, with the jacketed perforated plate air supply structure fixedly placed on the upper part of the AGV trolley.

[0064] The jacketed perforated plate air supply structure includes a second buffer tank and a pollutant analyzer;

[0065] One end of the detachable pipeline is connected to the first buffer tank in the fixed mode and placed at any point in the mobile mode; the other end of the detachable pipeline is connected to the second buffer tank.

[0066] A pollutant analyzer is used to analyze the air to be tested stored in a second buffer tank under the control of a controller.

[0067] Specifically, such as Figure 1 As shown, when the online detection system operates in fixed mode, the gas to be detected at a fixed location stored in the first buffer tank is transferred to the mobile detection platform through a detachable pipeline. The mobile detection platform then uses pollutant analysis to perform pollutant analysis on the gas to be detected at the fixed location.

[0068] Specifically, such as Figure 2 As shown, the jacketed perforated plate air supply structure is fixedly placed on the upper part of the AGV trolley, and the movement of the detection platform is realized by the movement of the AGV trolley.

[0069] Specifically, the jacketed perforated plate air supply structure includes a second buffer tank and a pollutant analyzer. The second buffer tank is used to store the gas to be tested, and the pollutant analyzer performs pollutant analysis on the gas to be tested under the control of the controller.

[0070] Specifically, such as Figure 1 As shown, when the online detection system is in mobile mode, the gas to be detected at any point is transmitted to the mobile detection platform through a detachable pipeline. The mobile detection platform uses a pollutant analyzer to analyze the pollutants in the gas to be detected at the fixed point.

[0071] Preferably, such as Figure 2 , Figure 3 As shown, the jacketed perforated plate air supply structure also includes a receiving cavity and a multi-layer inner lining perforated plate;

[0072] A multi-layer perforated plate is placed inside the accommodating cavity, and the second buffer tank and the pollutant analyzer are placed inside the multi-layer perforated plate.

[0073] A sampling port and a controller are provided on the upper cover of the accommodating cavity. The other end of the detachable pipeline is connected to the sampling port, and the sampling port is connected to the second buffer tank through the pipeline.

[0074] Specifically, such as Figure 2As shown, the accommodating cavity includes an upper cover plate, a lower cover plate, a left cover plate, a right cover plate, a front cover plate, and a rear cover plate. The left and right cover plates together form the left and right side cover plates.

[0075] Specifically, such as Figure 2 As shown, a multi-layer inner liner perforated plate 6 is placed inside the accommodating cavity, and a pollutant analyzer is set on each layer of the inner liner perforated plate 6. The pollutant analyzer is suitable for analyzers such as ion mobility spectrometry, photoionization detector, chemiluminescence method, ultraviolet fluorescence method, optical cavity ring-down spectroscopy, gas chromatography-mass spectrometry, and proton transfer time-of-flight spectroscopy.

[0076] The specific pollutant analyzer is the core component of the online detection system. It has a built-in high-sensitivity sensor that can detect pollutants at ultra-low concentrations (sub-ppb level).

[0077] Each pollutant analyzer is connected to the slave controller, and the communication methods include analog signal (4-20mA), bus protocol (Modbus ASCII, Modbus RTU, Modbus TCP) and industrial Ethernet (Ethernet TCP / IP).

[0078] Specifically, such as Figure 2 As shown, a sampling port 2 and a controller 1 are provided on the upper cover plate of the accommodating cavity.

[0079] Specifically, such as Figure 1 As shown, one end of the detachable pipeline is connected to the first buffer tank or placed directly at any point, and the other end of the detachable pipeline is connected to sampling port 2. Sampling port 2 transmits the received gas to be detected to the second buffer tank through the pipeline. The gas to be detected is stored in the second buffer tank. The pollutant analyzer performs pollutant detection on the gas to be detected sequentially from the controller.

[0080] It is worth noting that the fixed-point acquisition platform and the mobile detection platform communicate with each other through a local area network, enabling information exchange between the master controller and slave controller on both platforms. In addition, the fixed-point acquisition platform and the mobile detection platform can achieve fixed-mode detection and mobile-mode detection through detachable conduits or communication connections.

[0081] Preferably, such as Figure 3 As shown, an air supply module is provided on the lower cover plate of the accommodating cavity to provide cooling airflow to the jacketed perforated plate air supply structure; multiple exhaust fans are provided on the rear cover plate of the accommodating cavity to exhaust the hot airflow inside the jacketed perforated plate air supply structure.

[0082] The front cover of the accommodating cavity is fixedly connected to the left and right side covers, the upper cover, and the lower cover.

[0083] An inner perforated plate is provided on the inner side of the cover plates on both the left and right sides, and a multi-layer inner lining perforated plate is arranged between the inner perforated plates.

[0084] Specifically, the air supply module 10 is installed on the lower cover plate of the accommodating cavity to provide cooling airflow to the jacketed perforated plate air supply structure. At the same time, multiple exhaust fans are installed on the rear cover plate 4 of the accommodating cavity to exhaust the hot airflow inside the jacketed perforated plate air supply structure, thereby reducing the temperature inside the accommodating cavity, thus reducing the temperature of the pollutant analyzer and improving the detection accuracy.

[0085] Specifically, such as Figure 2 As shown, the front cover plate 9 of the accommodating cavity is fixedly connected to the left and right side cover plates 5, the upper cover plate and the lower cover plate, and is used to seal the accommodating cavity.

[0086] Specifically, such as Figure 2 and Figure 3 As shown, inner opening plates for the jacket are respectively provided on the inner side of the left cover plate and the inner side of the right cover plate, and the multi-layer inner lining plate 6 is in the middle of the inner opening plate for the jacket.

[0087] Preferably, such as Figure 3 As shown, the inner opening plate of the jacket also includes a resistance adjustment plate;

[0088] The resistance adjustment plate is used to adjust the number of openings in the inner perforated plate of the jacket, so as to adjust the air flow rate of the inner lining perforated plate of each layer.

[0089] Specifically, the position and number of resistance adjustment plates can be reasonably set according to the instruments placed on each layer of the inner lining perforated plate. By adjusting the number of openings in the inner lining perforated plate of the jacket, the air flow rate of each layer of the inner lining perforated plate can be further adjusted, thereby achieving the adjustment of the resistance of each layer of the inner lining perforated plate.

[0090] Specifically, the inner lining perforated plate delivers air at a uniform low wind speed, and micro-perforated plate structures are set on both sides. A micro fan is installed in the perforated plate inside the jacket. The relatively stable airflow in the clean room is introduced through the guide channel and evenly delivered to the instrument placement position in a laminar flow manner by the micro-perforated plate. After carrying away the heat of the instrument, the airflow with increased temperature flows out from the guide air outlets at the bottom and rear. In order to prevent airflow short circuit, the resistance between the inner lining perforated plates of each layer is adjusted to achieve uniform airflow to the area around the analytical instruments of each layer.

[0091] Preferably, such as Figure 1 As shown, the fixed-point data acquisition platform also includes a circulating purification system and a zero-gas generator;

[0092] The circulating purification system is used to receive ambient air, circulate and purify the ambient air, and then transmit the purified air to the zero air generator.

[0093] A zero-gas generator is used, under the control of a main controller and / or a slave controller, to further purify the air after it has undergone a circulating purification process, so as to provide gas free of the components to be detected or interfering substances for fixed-point acquisition platforms and / or mobile detection platforms.

[0094] Specifically, such as Figure 1 As shown, the circulating purification system receives ambient air, performs circulating purification on the ambient air, and then transmits the purified air to the zero air generator.

[0095] Specifically, such as Figure 1 As shown, the air after the circulating purification process is further purified in the zero gas generator. After the second purification, it becomes a gas free of the components to be detected or interfering substances, so as to provide the fixed-point acquisition platform and / or the mobile detection platform with gas free of the components to be detected or interfering substances.

[0096] Preferably, such as Figure 4 and Figure 5 As shown, the circulating purification system includes circulating pipelines, pressure sensors, make-up air valves, and sampling pumps;

[0097] The circulation pipeline is sequentially equipped with a temperature and humidity control module, a circulating fan, a high-efficiency filter, a chemical filter, and a buffer chamber;

[0098] A pressure sensor and a make-up air valve are located at the inlet of the circulation pipeline. The pressure sensor is used to detect the ambient air pressure, and the make-up air valve is used to regulate the ambient air pressure so that the ambient air with stable pressure enters the buffer chamber. The buffer chamber is connected to the zero air generator through a sampling pump, which serves as the outlet of the circulation pipeline.

[0099] The zero-gas generator includes a copper tube condenser, a water removal filter, a regenerative scrubbing module, an HC / CO scrubber, a CO scrubber, a NO scrubber, an activated carbon scrubber, and a particulate filter connected in sequence.

[0100] Specifically, such as Figure 4 As shown, before the CDA (Clean Dry Air, ambient air or compressed air) is transmitted to the circulation line, a pressure sensor detects the pressure of the CDA, and a make-up air valve is used to regulate the pressure of the CDA, ensuring that the CDA entering the buffer chamber has a stable pressure. After entering the circulation line, if the sampling pump is in the off state, the gas in the circulation line circulates through the temperature and humidity control module, the circulating fan, the HEPA filter, the chemical filter, and the buffer chamber; when the sampling pump is turned on, the gas is transmitted to the zero-air generator.

[0101] Specifically, the pressure sensor detects the air pressure of the CDA; the pressure sensor is connected to the buffer chamber, mainly controlling the chamber pressure to be stable and greater than the external ambient pressure, and controlling the opening and closing of the make-up air valve.

[0102] Specifically, the air supply valve regulates the air pressure to ensure that the air pressure entering the buffer chamber is stable or uniform.

[0103] Specifically, the temperature and humidity control module is a constant temperature and humidity control system with circulating purification function. It mainly consists of a compressor, evaporator coil, humidifier, reheat pipe, fan, temperature and humidity sensors, and control unit. Among them, the compressor mainly provides refrigerant circulation, supplying refrigerant to the evaporator coil, and works together with the evaporator coil. Its core functions are cooling and dehumidification. The reheat pipe is used to heat the airflow. The humidifier humidifies the air through water evaporation.

[0104] Specifically, high-efficiency filters filter particulate matter from the gas to ensure zero particulate matter content. Finished PTFE or glass fiber H14 or equivalent or higher efficiency high-efficiency filters can be selected, with the main purpose of removing tiny particulate matter (>0.1μm) from the gas source.

[0105] Specifically, chemical filters filter out the analyte or interfering substances from the zero gas, making it a clean background gas source. Chemical filters are generally composed of one or more of activated carbon, activated alumina, zeolite molecular sieves, silica gel, metal-organic frameworks, ion exchange resins and their modified materials. The type selected is mainly determined by the analytical instrument, as it does not contain the analyte or interfering substances.

[0106] Preferably, such as Figure 5 As shown, the zero gas generator includes a copper tube condenser, a water removal filter, a regenerative scrubbing module, an HC / CO scrubber, a CO scrubber, a NO scrubber, an activated carbon scrubber, and a particulate filter connected in sequence.

[0107] Specifically, the main function of the zero gas generator is to provide the online detection system with gas that does not contain the components to be tested or interfering substances. In the prior art, the zero gas source is usually ambient air or compressed air. In the embodiments of the present invention, the gas source comes from the output of the circulating purification system designed in the embodiments of the present invention.

[0108] like Figure 5As shown, the copper tube condenser cools the air source, bringing it to a supersaturated state. After passing through a desiccant filter, water vapor is separated, and excess condensate is periodically discharged. Subsequently, high-pressure air enters the regenerable scrubbing module, where molecular sieve adsorption further lowers the dew point temperature. This module is equipped with an alternating regeneration device, allowing for long-term use without filter media replacement. The airflow then sequentially enters various chemical scrubbing units: in the HC / CO scrubber, an internal catalyst oxidizes organic matter to CO2 and H2O at approximately 360°C; in the CO scrubber, residual CO is further oxidized to CO2; and in the NO scrubber, a catalyst at room temperature oxidizes NO to NO2. The airflow then passes through an activated carbon scrubber, where activated carbon removes impurities other than N2 and O2 through physical adsorption, including common pollutants such as NO2, O3, SO2, H2S, and NH3. Finally, a particulate filter further removes residual solid particles, resulting in clean gas that meets zero-gas standards.

[0109] Preferably, such as Figure 2 As shown, the jacketed perforated plate air supply structure also includes a positioning radar, which is installed on the upper cover plate.

[0110] The positioning radar is connected to the slave controller and is used to locate the position of the jacketed perforated plate air supply structure under the control of the slave controller.

[0111] Specifically, such as Figure 2 As shown, the positioning radar 3 is installed on the upper cover plate and connected to the slave controller. Under the control of the slave controller, the position of the jacketed perforated plate air supply structure is located.

[0112] Preferably, such as Figure 2 As shown, a shock-absorbing damping device is installed on the upper part of the AGV trolley;

[0113] The jacketed perforated plate air supply structure is fixedly placed on top of the shock-absorbing and damping device.

[0114] Specifically, in order to reduce the impact of external vibrations on the instrument, the jacketed perforated plate air supply structure is fixedly placed on the upper part of the vibration damping device.

[0115] Compared with existing technologies, the cleanroom chemical contaminant online detection system provided in this embodiment of the invention, by employing a mobile detection platform, can not only perform contaminant detection on the gas to be tested at multiple fixed points in a fixed mode, but also perform contaminant detection on the gas to be tested at any point, thereby improving the detection efficiency of gases in the cleanroom; and by setting an air supply module on the lower cover plate of the accommodating cavity to provide cooling airflow to the jacketed perforated plate air supply structure, while setting multiple exhaust fans on the rear cover plate of the accommodating cavity to exhaust the hot airflow in the jacketed perforated plate air supply structure, the impact of high temperature on contaminant analysis is reduced, thereby improving detection accuracy.

[0116] Those skilled in the art will understand that all or part of the processes for implementing the above-described methods for the master controller and slave controller can be accomplished by a computer program instructing related hardware, and the program can be stored in a computer-readable storage medium. The computer-readable storage medium may be a disk, optical disk, read-only memory, or random access memory, etc.

[0117] The above description is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any changes or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in the present invention should be included within the scope of protection of the present invention.

Claims

1. An online detection system for chemical contaminants in cleanrooms, characterized in that, The online detection system includes a fixed-point data acquisition platform and a mobile detection platform; the online detection system has two operating modes: a fixed mode and a mobile mode. A fixed-point data collection platform is placed in a clean room to collect the gas to be tested at multiple fixed points within the clean room. A mobile detection platform is used to receive the gas to be detected from a fixed-point collection platform in fixed mode or to move to any point in mobile mode to collect the gas to be detected and to perform pollutant detection on the gas to be detected.

2. The online detection system according to claim 1, characterized in that, The fixed-point data acquisition platform includes a multi-channel sampler, a first buffer tank, and a main controller. The multi-channel sampler includes a switchable valve and multiple channel lines. The end of each channel line is placed at a fixed point in the clean room, and the beginning of each channel line is connected to the switchable valve. The main controller collects the gas to be tested from any fixed point in the clean room by controlling the switchable valve, and stores the gas to be tested in the first buffer tank.

3. The online detection system according to claim 2, characterized in that, The mobile detection platform includes detachable pipelines, a controller, a jacketed perforated plate air supply structure, and an AGV trolley, with the jacketed perforated plate air supply structure fixedly placed on the upper part of the AGV trolley. The jacketed perforated plate air supply structure includes a second buffer tank and a pollutant analyzer; One end of the detachable pipeline is connected to the first buffer tank in the fixed mode and placed at any point in the mobile mode; the other end of the detachable pipeline is connected to the second buffer tank. A pollutant analyzer is used to analyze the air to be tested stored in a second buffer tank under the control of a controller.

4. The online detection system according to claim 3, characterized in that, The jacketed perforated plate air supply structure also includes a accommodating cavity and a multi-layer inner lining perforated plate. A multi-layer perforated plate is placed inside the accommodating cavity, and the second buffer tank and the pollutant analyzer are placed inside the multi-layer perforated plate. A sampling port and a controller are provided on the upper cover of the accommodating cavity. The other end of the detachable pipeline is connected to the sampling port, and the sampling port is connected to the second buffer tank through the pipeline.

5. The online detection system according to claim 4, characterized in that, An air supply module is installed on the lower cover plate of the accommodating cavity to provide cooling airflow to the jacketed perforated plate air supply structure; multiple exhaust fans are installed on the rear cover plate of the accommodating cavity to exhaust the hot airflow inside the jacketed perforated plate air supply structure. The front cover of the accommodating cavity is fixedly connected to the left and right side covers, the upper cover, and the lower cover. An inner perforated plate is provided on the inner side of the cover plates on both the left and right sides, and a multi-layer inner lining perforated plate is arranged between the inner perforated plates.

6. The online detection system according to claim 5, characterized in that, The inner perforated plate of the jacket also includes a resistance adjustment plate; The resistance adjustment plate is used to adjust the number of openings in the inner perforated plate of the jacket, so as to adjust the air flow rate of the inner lining perforated plate of each layer.

7. The online detection system according to claim 1 or 2, characterized in that, The fixed-point data acquisition platform also includes a circulating purification system and a zero-gas generator; The circulating purification system is used to receive ambient air, circulate and purify the ambient air, and then transmit the purified air to the zero air generator. A zero-gas generator is used, under the control of a main controller and / or a slave controller, to further purify the air after it has undergone a circulating purification process, so as to provide gas free of the components to be detected or interfering substances for fixed-point acquisition platforms and / or mobile detection platforms.

8. The online detection system according to claim 7, characterized in that, The circulating purification system includes circulating pipelines, pressure sensors, make-up air valves, and sampling pumps; The circulation pipeline is sequentially equipped with a temperature and humidity control module, a circulating fan, a high-efficiency filter, a chemical filter, and a buffer chamber; The pressure sensor and the make-up air valve are located at the inlet of the circulation pipeline. The pressure sensor is used to detect the ambient air pressure, and the make-up air valve is used to regulate the ambient air pressure so that the ambient air with stable pressure enters the buffer chamber. The buffer chamber is connected to the zero gas generator via a sampling pump, serving as the outlet of the circulation pipeline; The zero-gas generator includes a copper tube condenser, a water removal filter, a regenerative scrubbing module, an HC / CO scrubber, a CO scrubber, a NO scrubber, an activated carbon scrubber, and a particulate filter connected in sequence.

9. The online detection system according to claim 3, characterized in that, The jacketed perforated plate air supply structure also includes a positioning radar, which is installed on the upper cover plate. The positioning radar is connected to the slave controller and is used to locate the position of the jacketed perforated plate air supply structure under the control of the slave controller.

10. The online detection system according to claim 3, characterized in that, A shock-absorbing and damping device is installed on the upper part of the AGV trolley; The jacketed perforated plate air supply structure is fixedly placed on top of the shock-absorbing and damping device.

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