An ion separation device and ion separation method

Abstract

This application discloses an ion separation device and method, belonging to the field of mass spectrometry analysis technology. The device includes: a mass analyzer comprising three parallel layers: an upper electrode, a lower electrode, and an intermediate support layer; rectangular electrodes are disposed on opposite surfaces of the upper and lower electrodes, all arranged parallel to the length of the upper and lower electrodes, with uniform spacing between adjacent rectangular electrodes; the intermediate support layer serves as a support structure between the upper and lower electrodes, and contains an ion movement space; an ion source and a detector are disposed within the intermediate support layer, the detector receiving ions emitted from the ion source into the ion movement space, enabling the detection of ions with different mass-to-charge ratios; and a voltage module generating a vertical electric field between the upper and lower electrodes, forming a linear potential gradient along the longitudinal direction. This device can efficiently and accurately separate and detect ions with different mass-to-charge ratios.

Description

Technical Field

[0001] This application belongs to the field of mass spectrometry analysis technology, and specifically relates to an ion separation device and ion separation method. Background Technology

[0002] Mass spectrometry is a general analytical technique that uses differences in mass-to-charge ratios to achieve qualitative and quantitative detection of ions. With its advantages of high detection accuracy, strong anti-interference capabilities, and simultaneous analysis of multiple components, it has become an irreplaceable analytical tool in fields such as physics, chemistry, biology, medicine, astronomy, and geology. With the rapid development of microelectromechanical systems (MEMS) technology, researchers are attempting to miniaturize traditional mass analyzers to achieve highly integrated, low-power, and portable micro-mass spectrometry systems. This aims to meet the needs of environmental monitoring, food safety, industrial testing, and in-situ analysis and miniaturization applications in extreme environments such as the deep sea and deep space. Currently, the main miniaturization technologies include time-of-flight and radio-frequency driven MEMS mass analyzer structures.

[0003] However, existing MEMS quality analyzers all face insurmountable technical bottlenecks during miniaturization.

[0004] First, time-of-flight mass spectrometry relies on the difference in ion flight distances for mass separation. As the analyzer size shrinks, the ion flight path shortens significantly, leading to a marked decrease in mass resolution. Simultaneously, initial energy diffusion and spatial divergence of ions become more pronounced at the microscale, further weakening resolving power.

[0005] Secondly, radio frequency (RF) driven mass spectrometry (such as quadrupole mass spectrometry and ion trap mass spectrometry) relies on high-frequency RF fields to confine ion movement. Miniaturization places extremely high demands on the frequency, amplitude, and phase control precision of the RF power supply. High-voltage RF drive not only increases circuit complexity and system power consumption but also leads to difficulties in heat dissipation and insulation, thus offsetting the system benefits brought by miniaturization. In some cases, it can even cause a reverse increase in the overall size and weight of the device.

[0006] Overall, although time-of-flight and radio frequency driven MEMS mass spectrometry have been explored in the initial stages, it is still difficult to overcome the inherent contradiction between miniaturization and separation principle, and it is difficult to meet the requirements of high resolution, low power consumption and high integration. Summary of the Invention

[0007] To address the aforementioned issues, this application provides an ion separation device and method that utilizes the separation principle of ions undergoing cycloidal motion driven by the cross-field of electric and magnetic fields. This approach can overcome traditional technical bottlenecks in microscale structures, achieving a balance between high resolution, low power consumption, and high integration, thus meeting the needs of miniaturized mass spectrometry applications.

[0008] The following is the technical content of this disclosure:

[0009] An ion separation device, comprising:

[0010] The quality analyzer 3 includes three parallel layers: an upper electrode plate, a lower electrode plate, and an intermediate support layer 3d. The upper and lower electrode plates are both vertically placed rectangular flat plates with the same structure and are symmetrical about the intermediate support layer 3d.

[0011] Rectangular electrodes 3c are provided on the opposite surfaces of the upper electrode plate and the lower electrode plate 3a. All rectangular electrodes 3c are arranged parallel to the length direction of the upper electrode plate and the lower electrode plate, and the spacing between adjacent rectangular electrodes 3c is uniform.

[0012] The intermediate support layer 3d serves as a support structure between the upper and lower electrode plates, and the intermediate support layer 3d has an ion movement space.

[0013] The intermediate support layer 3d is provided with an ion source 3f and a detector 3h. The detector 3h is used to receive ions emitted by the ion source 3f into the ion movement space, so as to realize the detection of ions with different mass-to-charge ratios.

[0014] A voltage module is used to generate a vertical electric field between the upper and lower plates, the electric field forming a linear potential gradient along the longitudinal direction, from the highest potential to the lowest potential.

[0015] Furthermore,

[0016] The intermediate support layer 3d is a hollow rectangular frame structure, and its thickness in the direction perpendicular to the plane of the upper and lower electrode plates is greater than the ion thermal diffusion distance.

[0017] A conductive metal cantilever beam 3g is provided on one side of the intermediate support layer 3d, and the conductive metal cantilever beam 3g extends horizontally.

[0018] The ion source 3f and detector 3h are mounted on the conductive metal cantilever beam 3g.

[0019] Furthermore,

[0020] The voltage module includes:

[0021] Positive DC voltage source 1, negative DC voltage source 4, and voltage divider resistor array 2;

[0022] The positive DC voltage source 1 is used to apply positive DC voltage to the array electrode pairs corresponding to the upper and lower plates located in the region above the cantilever beam, respectively.

[0023] The negative DC voltage source 4 is used to apply negative DC voltage to the array electrode pairs corresponding to the upper and lower plates located in the region below the cantilever beam, respectively.

[0024] The potential of the conductive metal cantilever beam 3g is 0V;

[0025] The voltage divider resistor array 2 is used to distribute the potential of the plate to which a positive DC voltage is applied in an increasing manner along the longitudinal direction, gradually increasing from the zero potential at the conductive metal cantilever beam 3g to the maximum positive potential near the top of the plate; it is also used to distribute the potential of the plate to which a negative DC voltage is applied in a decreasing manner along the longitudinal direction, gradually decreasing from the zero potential at the conductive metal cantilever beam 3g to the maximum negative potential near the bottom of the plate; thereby forming a longitudinal linear potential gradient, and thus establishing a downward-pointing linear vertical electric field between the upper and lower plates.

[0026] Furthermore,

[0027] The rectangular electrodes 3c of the upper and lower plates are interconnected through TGV / TSV through holes 3b that penetrate the corresponding plates, and the rectangular electrodes 3c are connected to the voltage module through the TGV / TSV through holes 3b.

[0028] Furthermore,

[0029] Both the upper and lower electrode plates are made of silicon or glass.

[0030] Furthermore,

[0031] The ion source 3f is a hot electron ionization source, a field emission ion source, or a MEMS micro-discharge ion source, used to ionize the sample to be tested into charged ions and emit them into the ion flight channel defined by the intermediate support layer 3d.

[0032] Furthermore,

[0033] The detector 3h is a microchannel plate or MEMS photodetector structure used to convert the received ion signal into an electrical signal, providing data support for ion mass-to-charge ratio analysis and mass spectrum generation.

[0034] Furthermore,

[0035] Also includes:

[0036] A magnetic field generation module is used to generate a uniform magnetic field outside the ion separation device.

[0037] The magnetic field direction is perpendicular to the electric field direction formed between the upper and lower electrodes, and is used to form an E×B cross field together with the electric field, so that ions can move in the cross field to achieve the separation of ions with different mass-to-charge ratios.

[0038] Furthermore,

[0039] The ion flight channel defined by the intermediate support layer 3d is a closed cavity space.

[0040] An ion separation method based on the aforementioned ion separation device includes:

[0041] The mass analyzer 3 is placed in a uniform magnetic field, the direction of which is perpendicular to the direction of the electric field to be generated between the upper and lower plates.

[0042] Evacuate the environment where the quality analyzer 3 is located to the preset vacuum level;

[0043] A vertical electric field is generated between the upper and lower plates by a voltage module. The electric field forms a linear potential gradient along the longitudinal direction, pointing from the highest potential to the lowest potential.

[0044] The sample to be tested is ionized into charged ions using an ion source 3f, and the charged ions enter the ion movement space with a preset initial velocity. The charged ions entering the ion flight channel are simultaneously subjected to the combined action of electric field force and Lorentz force, and move along the cycloidal trajectory. Different ions form different cycloidal spacings, thus achieving preliminary separation.

[0045] By adjusting the potential bias voltage output by the voltage module, the electrostatic field strength between the upper and lower plates is changed, causing ions with different mass-to-charge ratios to be focused sequentially onto the detector 3h. The detector 3h then converts the received ion signals into electrical signals, completing the separation and detection of ions with different mass-to-charge ratios.

[0046] Compared with the prior art, this application has the following advantages:

[0047] This disclosure adopts a three-layer parallel symmetrical structure, with the upper electrode plate, the lower electrode plate and the middle support layer as the core. The upper and lower electrode plates are both rectangular flat plates placed vertically on the ground, with the same structure and symmetrical about the middle support layer. This design can ensure that the spacing between the upper and lower electrode plates is uniform and strictly parallel, avoiding structural deviations caused by electrode plate tilting or uneven spacing. At the same time, the symmetrical characteristics make the electric field distribution of the upper and lower electrode plates mirror consistent, eliminating the interference of unilateral structural offset on ion movement, and providing basic structural support for the subsequent formation of a stable electric field.

[0048] Based on this, rectangular electrodes with uniform spacing and parallel arrangement along the length direction are set on the inner surface of both the upper and lower plates. This uniform electrode array forms a carrier for the coordinated distribution of multiple electrodes, rather than a traditional single point or single line electrode. This allows the potential to be smoothly transmitted through the array. In conjunction with the voltage module, a linear potential gradient can be achieved instead of a discrete potential, thereby creating a uniform electrostatic field between the upper and lower plates.

[0049] In this process, the uniform spacing design avoids abrupt changes in field strength between electrodes, ensuring that the electric field is uniformly distributed in the ion movement space, making the magnitude and direction of the force on the ions stable. Even if there is initial energy diffusion, ions with different energies can maintain approximately consistent trajectory deviations, offsetting some of the resolution performance loss caused by energy differences. At the same time, the rectangular electrode array is more suitable for MEMS micromachining technology than the curved electrodes of the RF-driven type, reducing the difficulty of miniaturization manufacturing and alleviating the field control problem caused by the complex electrode processing of the RF-driven type.

[0050] Other features and advantages of this application will be set forth in the description which follows, and will be apparent in part from the description, or may be learned by practicing the application. The objectives and other advantages of this application may be realized and obtained by means of the structures pointed out in the description, claims and drawings. Attached Figure Description

[0051] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0052] Figure 1 A schematic diagram of the overall structure of the ion separation device of this disclosure is shown;

[0053] Figure 2 A schematic diagram of the structure of the lower electrode 3a of this disclosure is shown;

[0054] Figure 3 A schematic diagram showing the distribution of the rectangular electrode 3c and the TGV / TSV through hole 3b on the electrode plate of this disclosure is shown;

[0055] Figure 4 A schematic diagram of the structure of the intermediate support layer 3d, ion source 3f, detector 3h and conductive metal cantilever beam 3g of this disclosure is shown.

[0056] Figure 5 A flowchart of the operation of the ion separation apparatus of this disclosure is shown. Detailed Implementation

[0057] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0058] The following is the technical solution disclosed herein:

[0059] This application discloses a MEMS micro mass analyzer (ion separation device) based on the cycloidal mass spectrometry double focusing principle, the structural features of which are as follows: Figure 1 As shown, it includes:

[0060] Quality analyzer 3, which is the core structure of the entire system, is composed of three layers of parallel plates, including:

[0061] Upper electrode and lower electrode 3a (e.g.) Figure 2 As shown): These are rectangular plates with identical and symmetrical structures, and their inner surfaces are provided with longitudinally parallel rectangular electrodes 3c (e.g. Figure 3 (As shown in the diagram). Each electrode is interconnected through vias and connected to the voltage divider resistor array 2. The electrodes are thin-film electrode structures, which can be realized using MEMS microfabrication techniques such as photolithography, sputtering, and metal deposition.

[0062] TGV / TSV through-hole 3b (e.g.) Figure 3 (As shown): This is used to achieve vertical conduction and potential transfer between the upper and lower electrode layers and the external circuit.

[0063] 3D intermediate support layer (e.g.) Figure 4 As shown): Located between the upper and lower electrodes, it is a hollow rectangular frame structure with a thickness greater than the ion thermal diffusion distance, used to define the ion flight channel and provide mechanical support.

[0064] Conductive metal cantilever beam 3g: Embedded in the lower part of the intermediate support layer, its potential is maintained at 0V. It is used to support the ion source 3f and detector 3h, and forms a stable zero potential surface inside the analyzer, thereby improving the symmetry and uniformity of the electric field distribution.

[0065] Ion source 3f and detector 3h: located at opposite ends of the flight channel, used for ion generation and detection signal collection, respectively.

[0066] A uniform magnetic field is set outside the analyzer, perpendicular to the direction of the electric field, to interact with the electrostatic field to form an E×B cross field, thereby enabling the cycloidal motion of ions.

[0067] Through the above structural configuration, the mass analyzer 3 forms a uniform electrostatic field region defined by the upper and lower parallel electrode plates, the middle support layer 3d defines the ion flight path, and the conductive cantilever beam 3g provides zero potential reference and mechanical support, thereby realizing the cycloidal mass spectrometry dual focusing principle at the microscale.

[0068] Positive DC voltage source 1, negative DC voltage source 4, and voltage divider resistor array 2;

[0069] The positive DC voltage source 1 is used to apply positive DC voltage to the array electrode pairs corresponding to the upper and lower plates located in the region above the cantilever beam, respectively.

[0070] The negative DC voltage source 4 is used to apply negative DC voltage to the array electrode pairs corresponding to the upper and lower plates located in the region below the cantilever beam, respectively.

[0071] The potential of the conductive metal cantilever beam 3g is 0V;

[0072] The voltage divider resistor array 2 is used to distribute the potential of the plate to which a positive DC voltage is applied in an increasing manner along the longitudinal direction, gradually increasing from the zero potential at the conductive metal cantilever beam 3g to the maximum positive potential near the top of the plate; it is also used to distribute the potential of the plate to which a negative DC voltage is applied in a decreasing manner along the longitudinal direction, gradually decreasing from the zero potential at the conductive metal cantilever beam 3g to the maximum negative potential near the bottom of the plate; thereby forming a longitudinal linear potential gradient, and thus establishing a downward-pointing linear vertical electric field between the upper and lower plates.

[0073] The design of the intermediate support layer enhances the electric field and ion motion control performance of the disclosed structure at the MEMS scale. This support layer not only serves as a mechanical support framework for the upper and lower electrodes but also defines an ion flight channel with fixed geometric dimensions, ensuring that ions always move within a controlled two-dimensional space and avoiding trajectory deviations caused by divergence in non-working directions. With this structure, the constant field region required by the cycloidal analyzer can be stably reproduced at the MEMS microscale, allowing ions to maintain an ideal cycloidal motion trajectory under the combined action of electric and magnetic fields.

[0074] Unlike time-of-flight mass spectrometry (TOFMS), cycloidal mass spectrometry's resolution does not depend on a long flight path, but rather on its inherent dual-focusing principle of kinetic and spatial focusing. Therefore, even with significantly reduced analyzer sizes in MEMS systems, it can maintain high resolution without exhibiting the structural contradiction of "shortened path -> decreased resolution." This disclosure precisely defines the electrode spacing through a planar stacked structure, enabling the electrostatic field to be linearly distributed according to the design, thus ensuring the realization of dual-focusing conditions at the device level.

[0075] Meanwhile, this disclosure employs an E×B separation mechanism between a pure DC electric field and an external static magnetic field, avoiding the circuit, insulation, and heat dissipation challenges associated with increasing the RF frequency and amplitude after miniaturization, as is necessary for RF-driven mass spectrometers (such as quadrupoles and ion traps). Since this structure requires no high-voltage RF power supply, and its electrodes are all at fixed DC voltages, forming a linear gradient through a voltage divider network, it significantly simplifies the design of the driving circuit and the difficulty of system integration, and substantially reduces power consumption. This makes it particularly suitable for the miniaturization and low-power application requirements of MEMS platforms.

[0076] The following are embodiments of this disclosure:

[0077] 1. Example 1: Overall Structure of MEMS Micro Mass Analyzer (Ion Separation Device)

[0078] like Figures 1 to 4 As shown, the ion separation device in this embodiment includes: a positive DC voltage source 1, a voltage divider resistor array 2, a mass analyzer 3, and a negative DC voltage source 4.

[0079] The quality analyzer 3 is composed of an upper electrode plate, a lower electrode plate, and an intermediate support layer stacked together.

[0080] Upper and lower electrode plates 3a: These are rectangular flat plate structures, with longitudinally parallel rectangular electrodes 3c arranged on their inner surfaces. Adjacent electrodes are evenly spaced and connected to an external voltage divider network through TGV / TSV through-holes 3b. The electrodes are made of thin-film metallic materials (such as Au, Al, Ti / Pt multilayer structures) with a thickness ranging from 0.1 to 2 μm.

[0081] The intermediate support layer 3d is a hollow rectangular frame made of silicon or glass, with a thickness of 5 mm, used to define the ion flight channel.

[0082] Conductive metal cantilever beam 3g: Located below the support layer, with a potential maintained at 0 V, it can be formed by sputtering or electroplating and is used to support the ion source 3f and the detector 3h.

[0083] Ion source 3f: can be a thermionic ionization source, field emission ion source or MEMS micro-discharge ion source to generate charged particle beams;

[0084] Detector 3h: Can employ a microchannel plate (MCP) or MEMS photodetector structure to detect arriving ion signals.

[0085] The upper and lower plates are kept strictly parallel during encapsulation, and the spacing is determined by the middle support layer. The ion flight space is a cuboid channel with typical dimensions of (27.0×17.0×3.5 mm).

[0086] 2. Example 2: Electrode Electric Field Formation and Control

[0087] The potential of the plate to which a positive DC voltage is applied is distributed in an increasing manner along the longitudinal direction, gradually increasing from the zero potential at the conductive metal cantilever beam 3g to the maximum positive potential near the top of the plate; it is also used to distribute the potential of the plate to which a negative DC voltage is applied in a decreasing manner along the longitudinal direction, gradually decreasing from the zero potential at the conductive metal cantilever beam 3g to the maximum negative potential near the bottom of the plate; thereby forming a longitudinal linear potential gradient, and thus establishing a downward-pointing linear vertical electric field between the upper and lower plates.

[0088] The magnetic field is provided by an external permanent magnet, and its direction is perpendicular to the electric field direction (e.g., Figure 1As shown), an E×B cross field is formed.

[0089] Ions in the cross field are simultaneously subjected to electric force and Lorentz force, moving along a circular trajectory with translation (cycloidal trajectory). Ions with different mass-to-charge ratios m / z have different curvatures, resulting in different voltages required to focus at the detector position.

[0090] By scanning the electrode voltage, the response curve of the ion signal as a function of the scanning voltage can be obtained on the detector, i.e., the mass spectrum.

[0091] 3. Example 3: Manufacturing process of this device

[0092] The quality analyzer disclosed herein can be implemented using the following typical processes:

[0093] Metal thin films (such as Au, Al, or Ti / Pt multilayer structures) are deposited on silicon or glass substrates, and electrode patterns for upper and lower plates are formed through photolithography and metal etching processes. Interconnection between the electrodes and external circuitry is achieved via TGV / TSV vias.

[0094] Hollow rectangular channel structures are formed on the support layer material (silicon or glass) using deep reactive ion etching (DRIE), laser etching, or glass etching processes to confine the ion flight space;

[0095] A conductive metal film is deposited under the support layer, and a conductive metal cantilever beam is formed by photolithography and etching processes. The cantilever beam maintains a 0 V potential when the device is working.

[0096] After the upper electrode, intermediate support layer and lower electrode are aligned at the high precision wafer level, the three-layer structure is encapsulated by vacuum bonding process (such as glass-silicon anode bonding, metal diffusion bonding or wafer-level direct bonding) to obtain a sealed internal vacuum cavity.

[0097] An inlet and an outlet are provided at the edge of the chip package and connected to the ion flight region via a microchannel. The outlet connects to an external high-vacuum pumping system, which can evacuate the chip to a working vacuum level (typically better than 1×10⁻⁶). -3 Pa), ensuring that ions fly in a low-collision environment;

[0098] After vacuum bonding, the chip is electrically connected to an external voltage divider resistor array, DC power supply, and ion detection module through TGV / TSV vias, thus forming a complete MEMS cycloidal mass spectrometry analysis system.

[0099] 4. Example 4: Working principle and usage of this technology

[0100] Before the system operates, the cavity containing the chip needs to be evacuated to a set vacuum level by a vacuum pump in order to reduce collision losses during ion flight.

[0101] (1) Vacuum preparation and sample injection

[0102] Once the vacuum chamber containing the chip is evacuated to the target vacuum level, the gas sample to be tested is introduced through an external microfluidic inlet (not shown in the figure). The sample gas enters the 3f region of the ion source and is ionized into charged ions under the influence of the ionization electric field.

[0103] Note: This injection port can be located at the edge of the chip package or on the wall of the vacuum chamber, and is connected to the ion source through a microchannel. Its size and structure can be adjusted according to the specific application without affecting the main structure of the chip.

[0104] (2) Ion generation and acceleration

[0105] Ion source 3f generates charged particles under a low-power ionization voltage. After gaining kinetic energy in the initial accelerating electric field, the ions enter the flight region. The conductive metal cantilever beam 3g maintains zero potential, providing a potential reference and mechanical support for the ion flight region.

[0106] (3) Ion flight and separation

[0107] A positive DC voltage source is used to apply positive DC voltage to the array electrode pairs corresponding to the upper and lower plates located above the cantilever beam; a negative DC voltage source is used to apply negative DC voltage to the array electrode pairs corresponding to the upper and lower plates located below the cantilever beam. A voltage divider array causes the potential of the plates to be positively voltaged to increase longitudinally, gradually increasing from zero potential at the conductive metal cantilever beam 3g to a maximum positive potential near the top of the plate; conversely, the potential of the plates to be negatively voltaged to decrease longitudinally, gradually decreasing from zero potential at the conductive metal cantilever beam 3g to a maximum negative potential near the bottom of the plate. This creates a linear potential gradient in the longitudinal direction, establishing a downward-pointing linear vertical electric field between the upper and lower plates. Simultaneously, an external permanent magnet provides a uniform magnetic field in the vertical direction, causing ions to move along cycloidal trajectories in the E×B cross field. Ions with different mass-to-charge ratios (m / z) achieve spatial and kinetic dual focusing under different scanning voltages. Ions with different mass-to-charge ratios (m / z) are focused onto the detector at different voltages for 3 hours due to their different trajectory radii.

[0108] (4) Signal acquisition and scanning

[0109] By adjusting the scanning voltage system consisting of positive and negative DC voltage sources 1 and 4 and voltage divider resistor array 2, ions with different m / z values ​​can be sequentially focused onto the detector 3h, thereby obtaining a mass spectrum of ion signals as a function of scanning voltage.

[0110] (5) Results output and control

[0111] After the detector signal is amplified and processed by the data acquisition circuit, the corresponding spectrum and performance parameters are output. The data can be further used for performance analysis such as sensitivity and resolution.

[0112] The workflow of this disclosure is as follows: Figure 5 As shown, the device covers the entire process from vacuum pumping, gas sampling, ion generation and separation to signal detection and data analysis. With its compact structure and low power consumption, this device enables high-resolution, high-sensitivity ion detection and is suitable for applications such as gas composition analysis, environmental monitoring, and in-situ analysis.

[0113] The following are the technical improvements of this disclosure:

[0114] 1) Breaking through the miniaturization limits of traditional structures

[0115] Traditional cycloidal ion separation devices typically have a volume ranging from hundreds of milliliters to liters. This disclosure employs a MEMS planar stacked structure to reproduce the traditional three-dimensional electrode field region in a planar manner at a microscale, reducing the overall volume to the milliliter level and the mass from the kilogram level to the ten-gram level, thus achieving true miniaturization of cycloidal mass spectrometry.

[0116] 2) High uniformity control of electric and magnetic fields was achieved.

[0117] The voltage divider resistor array 2 creates a vertical electric field between the upper and lower electrodes, forming a linear potential gradient along the longitudinal direction, pointing from the highest potential to the lowest potential. This structure overcomes the problems of large adjustment errors and difficulty in controlling field uniformity in traditional machined layer-by-layer stacked electrode structures, greatly improving the focusing quality and resolution of ion trajectories.

[0118] 3) A zero-potential cantilever beam electric field stability design was proposed.

[0119] This disclosure embeds a conductive metal cantilever beam within the intermediate support layer as an equipotential plane with a potential of 0 V, which can effectively suppress electric field edge distortion and ion flight path deviation, ensuring the symmetry and stability of the field region, thereby significantly improving ion detection efficiency and signal stability.

[0120] 4) Possesses excellent MEMS process compatibility and scalability.

[0121] The chip structure adopts a planar stacked structure, with the upper and lower electrodes and the middle support layer all having a standard planar configuration. It does not require complex three-dimensional curved surface electrodes and is naturally suitable for MEMS process flow. The upper and lower electrodes are electrically interconnected through TGV / TSV vias, which facilitates wafer-level parallel processing and batch interconnection packaging. By adjusting the electrode area, the number of electrodes and the distribution of voltage divider resistors, the quality analysis range (m / z detection upper limit) can be flexibly adjusted to suit different analysis needs.

[0122] 5) Achieving a balance between low power consumption and high analytical performance

[0123] By employing MEMS technology, a planar stacked structure, and photolithographically defined electrode arrays, the size of the ion flight region in this disclosure is significantly reduced, and the electric field strength required for the cycloidal trajectory is correspondingly reduced. Thanks to the reduced electrode spacing, improved field uniformity, and the suppression of edge fields by the zero-potential cantilever beam, this disclosure can achieve effective ion separation under voltage conditions far lower than those of conventional cycloidal mass spectrometry.

[0124] Compared to traditional cycloidal mass spectrometry which requires thousands of volts, this disclosure can complete mass scanning in the range of 10 to 100 volts at the millimeter scale, thereby significantly reducing power consumption, power supply complexity, and system size.

[0125] In summary, this disclosure, while maintaining the integrity of the dual-focusing separation principle, achieves MEMS-like structure, controllable field distribution, and system miniaturization, providing a new path for the future development of MEMS mass spectrometry technology. Furthermore, through designs such as planar stacked structures, gradient electrode arrays, and zero-potential cantilever beams, this disclosure enables the stable reproduction of the dual-focusing principle of cycloidal mass spectrometry at the MEMS scale, achieving a combination of advantages including structural miniaturization, high field uniformity, and low system power consumption. This provides a manufacturable and scalable novel structural solution for high-performance MEMS mass spectrometry systems.

[0126] Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this application.

Claims

1. An ion separation device, characterized in that, include: The quality analyzer (3) includes three parallel upper and lower plates and an intermediate support layer (3d); the upper and lower plates are both vertically placed rectangular plates with the same structure and symmetrical about the intermediate support layer (3d); Rectangular electrodes (3c) are provided on the opposite surfaces of the upper and lower electrodes (3a). All rectangular electrodes (3c) are arranged parallel to each other along the length of the upper and lower electrodes, and the spacing between adjacent rectangular electrodes (3c) is uniform. The intermediate support layer (3d) serves as a support structure between the upper and lower electrode plates, and the intermediate support layer (3d) contains an ion movement space. The intermediate support layer (3d) is provided with an ion source (3f) and a detector (3h). The detector (3h) is used to receive ions emitted by the ion source (3f) into the ion movement space, so as to realize the detection of ions with different mass-to-charge ratios. A voltage module is used to generate a vertical electric field between the upper and lower plates, the electric field forming a linear potential gradient along the longitudinal direction, from the highest potential to the lowest potential.

2. The ion separation device according to claim 1, characterized in that, The intermediate support layer (3d) is a hollow rectangular frame structure, and its thickness in the direction perpendicular to the plane of the upper and lower plates is greater than the ion thermal diffusion distance. A conductive metal cantilever beam (3g) is provided on one side of the intermediate support layer (3d), and the conductive metal cantilever beam (3g) extends horizontally. The ion source (3f) and detector (3h) are mounted on the conductive metal cantilever beam (3g).

3. The ion separation device according to claim 2, characterized in that, The voltage module includes: Positive DC voltage source (1), negative DC voltage source (4) and voltage divider resistor array (2); The positive DC voltage source (1) is used to apply positive DC voltage to the array electrode pairs corresponding to the upper and lower plates located in the region above the cantilever beam, respectively; The negative DC voltage source (4) is used to apply negative DC voltage to the array electrode pairs corresponding to the upper and lower plates located in the region below the cantilever beam, respectively; The potential of the conductive metal cantilever beam (3g) is 0V; The voltage divider resistor array (2) is used to distribute the potential of the plate to which a positive DC voltage is applied in an increasing manner along the longitudinal direction, gradually increasing from the zero potential at the conductive metal cantilever beam (3g) to the maximum positive potential near the top of the plate; it is also used to distribute the potential of the plate to which a negative DC voltage is applied in a decreasing manner along the longitudinal direction, gradually decreasing from the zero potential at the conductive metal cantilever beam (3g) to the maximum negative potential near the bottom of the plate; thereby forming a longitudinal linear potential gradient, and thus establishing a downward-pointing linear vertical electric field between the upper and lower plates.

4. The ion separation device according to claim 1, characterized in that, The rectangular electrodes (3c) of the upper and lower plates are interconnected through TGV / TSV through holes (3b) that penetrate the corresponding plates, and the rectangular electrodes (3c) are connected to the voltage module through the TGV / TSV through holes (3b).

5. The ion separation device according to claim 1, characterized in that, Both the upper and lower electrode plates are made of silicon or glass.

6. The ion separation device according to claim 1, characterized in that, The ion source (3f) is a hot electron ionization source, a field emission ion source, or a MEMS micro-discharge ion source, used to ionize the sample to be tested into charged ions and emit them into the ion flight channel defined by the intermediate support layer (3d).

7. The ion separation device according to claim 1, characterized in that, The detector (3h) is a microchannel plate or MEMS photodetector structure used to convert the received ion signal into an electrical signal, providing data support for ion mass-to-charge ratio analysis and mass spectrum generation.

8. The ion separation device according to claim 1, characterized in that, Also includes: A magnetic field generation module is used to generate a uniform magnetic field outside the ion separation device. The magnetic field direction is perpendicular to the electric field direction formed between the upper and lower electrodes, and is used to form an E×B cross field together with the electric field, so that ions can move in the cross field to achieve the separation of ions with different mass-to-charge ratios.

9. The ion separation device according to claim 1, characterized in that, The ion flight channel defined by the intermediate support layer (3d) is a closed cavity space.

10. An ion separation method based on the ion separation device according to claim 1, characterized in that, include: The mass analyzer (3) is placed in a uniform magnetic field, the direction of which is perpendicular to the direction of the electric field to be generated between the upper and lower plates. The environment where the quality analyzer (3) is located is evacuated to a preset vacuum level; A vertical electric field is generated between the upper and lower plates by a voltage module. The electric field forms a linear potential gradient along the longitudinal direction, pointing from the highest potential to the lowest potential. The sample to be tested is ionized into charged ions using an ion source (3f), and the charged ions enter the ion movement space with a preset initial velocity. Charged ions entering the ion flight channel are simultaneously subjected to the combined effects of electric field force and Lorentz force, moving along a cycloidal trajectory. Different ions form different cycloidal spacings, achieving initial separation. By adjusting the potential bias voltage output by the voltage module, the electrostatic field strength between the upper and lower plates is changed, so that ions with different mass-to-charge ratios are focused onto the detector (3h) in sequence; the detector (3h) converts the received ion signal into an electrical signal, thus completing the separation and detection of ions with different mass-to-charge ratios.

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