Auxiliary alignment device

Abstract

The invention relates to an optical detection device, in particular to an auxiliary alignment device. The auxiliary alignment device comprises a camera, a light source and a light beam redirection assembly, the camera is provided with a target surface, and the light source is used for generating a first light beam and a second light beam; the first light beam is reflected by a first object surface in sequence, is redirected by the light beam redirection assembly, enters the camera, and forms a first object image on the target surface; and the second light beam is reflected by a second object surface in sequence, is redirected by the light beam redirection assembly, enters the camera in a manner of being coaxial with the first light beam, and forms a second object image on the target surface. The auxiliary alignment device is easy to simplify in structure and miniaturize in size, can be used for monitoring the alignment condition of two object surfaces in real time, is not limited by the sizes of the object surfaces, and is good in flexibility.

Description

Technical Field

[0001] This invention relates to an optical inspection device, and more particularly to an auxiliary alignment device. Background Technology

[0002] In the electronics industry, semiconductor packaging and chip mounting processes typically require the alignment of chips and substrates with micrometer-level precision. Chinese patent document CN216511304U describes a mounting machine that uses an optical device to capture images of two components that need alignment, determining whether the two components are aligned based on these images. However, the light beams used to capture images of the first and second components are not coaxial when entering the camera; that is, their centerlines do not coincide. This results in the two components appearing separate in the camera's image. Before determining whether the two components are aligned, the computer needs to perform image fusion processing to obtain an overlapping image of the two components, consuming computational resources. Summary of the Invention

[0003] The technical problem to be solved by this invention is: how to save computing resources.

[0004] To solve the above-mentioned technical problems, the technical solution adopted by the present invention is as follows: An auxiliary alignment device includes a camera, a light source, and a beam redirection assembly. The camera has a target surface, and the light source generates a first beam and a second beam. The first beam is reflected sequentially by a first object surface, redirected by the beam redirection assembly, and enters the camera to form a first image on the target surface. The second beam is reflected sequentially by a second object surface, redirected by the beam redirection assembly, and enters the camera in a coaxial manner with the first beam to form a second image on the target surface.

[0005] The beneficial effects of this invention are as follows: The first beam for capturing the image of the first object surface and the second beam for capturing the image of the second object surface enter the camera in a coaxial manner, so that the two object surfaces are already overlapping in the image acquired by the camera, and the computer does not need to perform image fusion processing, thus saving computing resources. Attached Figure Description

[0006] Figure 1 This is a schematic diagram illustrating the principle of one embodiment of the present invention; Figure 2 This is a schematic diagram of the structure of the alignment aid in this embodiment. Figure 1 ; Figure 3 This is a schematic diagram of the structure of the alignment aid in this embodiment. Figure 2 ; Figure 4 This is a front view of the alignment aid in this embodiment; Figure 5 This is a cross-sectional view of the alignment aid in this embodiment; Figure 6 This is a schematic diagram of the structure of the mirror mount, the first adjustment component, and the beam redirection component in this embodiment. Figure 1 ; Figure 7 This is a schematic diagram of the structure of the mirror mount, the first adjustment component, and the beam redirection component in this embodiment. Figure 2 .

[0007] Label Explanation: I, optical axis; G1, first beam; G2, second beam; X1, first object plane; X2, second object plane; 1. Camera; 3a. First coaxial light source; 3b. Second coaxial light source; 4a. First ring light source; 4b. Second ring light source; 5a. First beam splitter; 5b. Second beam splitter; 6a. First control socket; 6b. Second control socket; 7. Base; 8a. First beam splitter base; 8b. Second beam splitter base; 9. Lens mount; 11. Target surface; 12. Lens; 21. Total reflection mirror; 22. Beam splitter prism; 71. Mounting hole; 91. Adjusting screw; 92. Elastic pressure plate; 93. Flexible gasket. Detailed Implementation

[0008] To explain in detail the technical content, objectives, and effects of the present invention, the following description is provided in conjunction with the embodiments and accompanying drawings.

[0009] Optical inspection already has a wide range of applications, such as for detecting defects in minute products. A beam redirection component redirects the light beam that strikes the product and reflects back, directing the redirected beam into a camera lens. The image is then formed on a camera target surface, which converts the light signal into an electrical signal. A computer processes this electrical signal and displays the image of the product on a screen. Inspectors can then use this image to check for defects. This invention applies optical inspection technology to confirm the alignment of two products positioned opposite each other, providing an auxiliary alignment device.

[0010] Please refer to Figure 1 The auxiliary alignment device provided by the present invention includes a camera 1, a light source, and a beam redirection assembly. The camera 1 has a target surface 11, and the light source is used to generate a first beam G1 and a second beam G2. The first beam G1 is reflected sequentially by a first object surface X1, redirected by the beam redirection assembly, and enters the camera 1 to form a first image on the target surface 11. The second beam G2 is reflected sequentially by a second object surface X2, redirected by the beam redirection assembly, and enters the camera 1 in a coaxial manner with the first beam G1 to form a second image on the target surface 11.

[0011] As can be seen from the above description, the beneficial effects of the present invention are as follows: The first beam for capturing the image of the first object surface and the second beam for capturing the image of the second object surface enter the camera in a coaxial manner, so that the two object surfaces are already overlapping in the image acquired by the camera, and the computer does not need to perform image fusion processing, thus saving computing resources.

[0012] In some embodiments, the beam redirection assembly includes a beam splitter 22 and a total reflection mirror 21. The camera 1 includes a lens 12. A first object plane X1 and a second object plane X2 are parallel to the optical axis I of the lens 12. The distance between the first object plane X1 and the optical axis I is D1, the distance between the second object plane X2 and the optical axis I is D2, the distance between the center of the total reflection mirror 21 and the center of the lens 12 is L1, the distance between the center of the beam splitter surface of the beam splitter 22 and the center of the lens 12 is L2, and the working distance of the lens 12 is WD. D1+L1=D2+L2=WD; The first beam G1 is reflected and bent by 180° by the first object surface X1, reflected and bent by 90° by the total reflection mirror 21, transmitted through the beam splitter 22, and enters the camera 1 through the lens 12; The second beam G2 is reflected and bent by 180° by the second object surface X2, reflected and bent by 90° by the beam splitter 22, and enters the camera 1 through the lens 12; When entering the camera 1, the center line of the first beam G1 and the center line of the second beam G2 are both coincident with the optical axis I.

[0013] As described above, the first beam G1 and the second beam G2 are redirected by sequentially arranged beam-splitting prism 22 and total reflection mirror 21, resulting in a simple structure. By making the first object plane X1 and the second object plane X2 different distances from the optical axis I, the problem of different distances between the center of the beam-splitting surface of beam-splitting prism 22 and the center of the total reflection mirror 21 and the center of the lens 12 is overcome. When D1+L1=D2+L2=WD, both object planes are accurately focused, resulting in high image quality and the same magnification.

[0014] In some embodiments, the light source includes two ring light sources, namely a first ring light source 4a and a second ring light source 4b. The first ring light source 4a is located between the first object surface X1 and the first beam splitter 5a. The first beam G1 includes a first ring beam. The first ring light source 4a has a first light-passing aperture. The first ring beam is emitted from the first ring light source 4a and reaches the first object surface X1. The second ring light source 4b is located between the second object surface X2 and the second beam splitter 5b. The second beam G2 includes a second ring beam. The second ring light source 4b has a second light-passing aperture. The second ring beam is emitted from the second ring light source 4b and reaches the second object surface X2.

[0015] As can be seen from the above description, the ring light source has a light-passing aperture, and the light beam can pass through the light-passing aperture after being reflected by the object surface and successfully reach the beam redirection component.

[0016] In some embodiments, the auxiliary alignment device includes two beam splitters, and the light source includes two coaxial light sources, namely a first coaxial light source 3a and a second coaxial light source 3b. The two beam splitters are respectively a first beam splitter 5a and a second beam splitter 5b. The first beam G1 includes a first coaxial beam, which is emitted from the first coaxial light source 3a parallel to the optical axis I, reflected and deflected by the first beam splitter 5a at a 90° angle, and reaches the first object surface X1. The second beam G2 includes a second coaxial beam, which is emitted from the second coaxial light source 3b parallel to the optical axis I, reflected and deflected by the second beam splitter 5b at a 90° angle, and reaches the second object surface X2.

[0017] As described above, by using a beam splitter to redirect the beam parallel to the optical axis I emitted by the coaxial light source, a coaxial beam perpendicular to the object surface can be introduced. The coaxial beam and the ring beam illuminate the object surface at different angles, allowing different details on the object surface to be clearly revealed.

[0018] In some embodiments, please refer to Figure 5 Both the coaxial light source and the ring light source have diffusers.

[0019] As can be seen from the above description, a diffuser plate can make the light beam illuminating the object surface more uniform.

[0020] In some embodiments, please refer to Figure 2 , Figure 3 and Figure 5 The auxiliary alignment device includes a base 7 and two beam splitters, namely a first beam splitter 8a and a second beam splitter 8b. The base 7 is located between the two beam splitters and has a mounting hole 71 for mounting the auxiliary alignment device. The beam redirection assembly and camera 1 are mounted on the base 7. The first beam splitter 5a, the first ring light source 4a and the first coaxial light source 3a are mounted on the first beam splitter 8a, and the second beam splitter 5b, the second ring light source 4b and the second coaxial light source 3b are mounted on the second beam splitter 8b.

[0021] As can be seen from the above description, the base 7 is provided with mounting holes 71, which facilitates fixing the auxiliary alignment device to the production equipment.

[0022] In some embodiments, please refer to Figure 2 The auxiliary alignment device includes two control sockets, namely a first control socket 6a and a second control socket 6b. A first ring light source 4a and a first coaxial light source 3a are respectively connected to the first control socket 6a, and a second ring light source 4b and a second coaxial light source 3b are respectively connected to the second control socket 6b.

[0023] As can be seen from the above description, the brightness of the ring light source and the coaxial light source can be controlled separately through the control socket, which makes it easy to adjust the lighting scheme according to the reflection characteristics of the object surface and improve the imaging effect.

[0024] In some embodiments, please refer to Figure 6 and Figure 7 The auxiliary alignment device includes a mirror base 9, a first adjustment component, and a second adjustment component. The mirror base 9 is located inside the base 7, and the beam redirection component is located inside the mirror base 9. The first adjustment component is located on the mirror base 9 and is used to adjust the position of the beam splitter 22 relative to the total reflection mirror 21. The second adjustment component is located on the base 7 and is used to adjust the position of the mirror base 9 relative to the base 7. The beam splitter and the base 7 are fixedly connected in a detachable manner.

[0025] As described above, considering potential machining and assembly errors in the auxiliary alignment device, which could lead to offset and deflection between the beam splitter prism 22 and the total reflection mirror 21, the beam splitter prism 22 is designed to be position-adjustable. By adjusting the position of the beam splitter prism 22 relative to the total reflection mirror 21, the deviation between the beam splitter prism 22 and the total reflection mirror 21 can be eliminated. Afterward, the angle of the mirror mount 9 also needs to be adjusted, which is achieved through the second adjustment component. Removing the beam splitter mount provides more operating space and facilitates adjustments to the beam splitter prism 22 and the mirror mount 9.

[0026] In some embodiments, the first adjustment assembly includes an elastic pressure plate 92, a flexible pad 93, and a plurality of adjusting screws 91. The elastic pressure plate 92 is fixed on the mirror base 9, and the adjusting screws 91 are screwed onto the mirror base 9. The adjusting screws 91, the beam splitter 22, the flexible pad 93, and the elastic pressure plate 92 are arranged in sequence. The adjusting screws 91 abut against the beam splitter 22, so that the flexible pad 93 is clamped between the beam splitter 22 and the elastic pressure plate 92.

[0027] As described above, the angle of the beam splitter 22 relative to the total reflection mirror 21 can be changed by adjusting the screw depth of each adjusting screw 91. The elastic pressure plate 92 and the flexible shim 93 ensure that the beam splitter 22 has a certain adjustable range while being in close contact with the adjusting screw 91.

[0028] In some embodiments, the ring light source includes a high-angle ring light source and a low-angle ring light source, with the low-angle ring light source positioned around the high-angle ring light source.

[0029] As can be seen from the above description, the illumination angle of a low-angle ring light source is smaller than that of a high-angle ring light source, which allows the light beam emitted from the outer region of the ring light source to also illuminate the object surface.

[0030] Please refer to Figures 1 to 7 One embodiment of the present invention is as follows: Please refer to Figure 1An auxiliary alignment device includes a camera 1, a light source, two beam splitters, and a beam redirection assembly. The camera 1 has a target surface 11 and a lens 12. The beam redirection assembly includes a beam splitter prism 22 and a total reflection mirror 21. The light source includes two coaxial light sources and two ring light sources, both of which have diffusers. The ring light sources include a high-angle ring light source and a low-angle ring light source, with the low-angle ring light source surrounding the high-angle ring light source. The camera 1 is an industrial camera.

[0031] The two coaxial light sources are designated as first coaxial light source 3a and second coaxial light source 3b, the two ring light sources are designated as first ring light source 4a and second ring light source 4b, and the two beam splitters are designated as first beam splitter 5a and second beam splitter 5b. The first ring light source 4a is located between the first object plane X1 and the first beam splitter 5a and has a first light-transmitting aperture; the second ring light source 4b is located between the second object plane X2 and the second beam splitter 5b and has a second light-transmitting aperture.

[0032] The light source is used to generate a first beam G1 and a second beam G2. The first beam G1 includes a first coaxial beam generated by a first coaxial light source 3a and a first ring beam generated by a first ring light source 4a. The second beam G2 includes a second coaxial beam generated by a second coaxial light source 3b and a second ring beam generated by a second ring light source 4b.

[0033] The first coaxial beam is emitted from the first coaxial light source 3a parallel to the optical axis I, and is successively reflected and deflected by the first beam splitter 5a at a 90° angle, passes through the first light-transmitting aperture, is reflected and deflected by the first object surface X1 at a 180° angle, passes through the first light-transmitting aperture, is transmitted through the first beam splitter 5a, is reflected and deflected by the total reflection mirror 21 at a 90° angle, is transmitted through the beam splitter prism 22, and enters the camera 1 through the lens 12. The first ring beam is emitted from the first ring light source 4a, and is successively reflected and deflected by the first object surface X1 at a 180° angle, passes through the first light-transmitting aperture, is transmitted through the first beam splitter 5a, is reflected and deflected by the total reflection mirror 21 at a 90° angle, is transmitted through the beam splitter prism 22, and enters the camera 1 through the lens 12.

[0034] The second coaxial beam is emitted from the second coaxial light source 3b parallel to the optical axis I, and is successively reflected and deflected by the second beam splitter 5b at a 90° angle, passes through the second light aperture, is reflected and deflected by the second object surface X2 at a 180° angle, passes through the second light aperture, is transmitted through the second beam splitter 5b, is reflected and deflected by the beam splitter prism 22 at a 90° angle, and enters the camera 1 through the lens 12. The second ring beam is emitted from the second ring light source 4b, and is successively reflected and deflected by the second object surface X2 at a 180° angle, passes through the second light aperture, is transmitted through the second beam splitter 5b, is reflected and deflected by the beam splitter prism 22 at a 90° angle, and enters the camera 1 through the lens 12.

[0035] The first beam G1 is reflected and deflected 180° by the first object surface X1, passes through the first light-transmitting aperture, is transmitted through the first beam splitter 5a, is reflected and deflected 90° by the total reflection mirror 21, is transmitted through the beam splitter prism 22, and enters the camera 1 through the lens 12, forming the first image on the target surface 11. The second beam G2 is reflected and deflected 180° by the second object surface X2, passes through the second light-transmitting aperture, is transmitted through the second beam splitter 5b, is reflected and deflected 90° by the beam splitter prism 22, and enters the camera 1 through the lens 12, forming the second image on the target surface 11. The first and second images overlap.

[0036] When determining the positions of the beam redirection assembly and the camera 1 along the optical axis I, the beam offset caused by the beam splitter must be taken into account, so as to prevent the first beam G1 from not hitting the center of the total reflection mirror 21 after passing through the first beam splitter 5a, and the second beam G2 from not hitting the center of the beam splitting surface of the beam splitter 22 after passing through the second beam splitter 5b.

[0037] The first object plane X1 and the second object plane X2 are parallel to each other and are both parallel to the optical axis I of the lens 12. The distance between the first object plane X1 and the optical axis I is D1, the distance between the second object plane X2 and the optical axis I is D2, the distance between the center of the total reflection mirror 21 and the center of the lens 12 is L1, the distance between the center of the beam splitting surface of the beam splitter 22 and the center of the lens 12 is L2, the working distance of the lens 12 is WD, and D1+L1=D2+L2=WD.

[0038] Please refer to Figures 2 to 5 The auxiliary alignment device includes a base 7, a lens mount 9, a first adjustment assembly, a second adjustment assembly, two beam splitters, and two control sockets. The two beam splitters are a first beam splitter 8a and a second beam splitter 8b. A beam redirection assembly is located within the lens mount 9, which is located within the base 7, which is situated between the two beam splitters. The second adjustment assembly includes multiple screws screwed onto the base 7 for adjusting the position of the lens mount 9 relative to the base 7. A camera 1 is mounted on the base 7. A first beam splitter 5a, a first ring light source 4a, and a first coaxial light source 3a are mounted on the first beam splitter 8a, and a second beam splitter 5b, a second ring light source 4b, and a second coaxial light source 3b are mounted on the second beam splitter 8b. The base 7 has mounting holes 71 for mounting the auxiliary alignment device.

[0039] The two control sockets are designated as first control socket 6a and second control socket 6b. A first ring light source 4a and a first coaxial light source 3a are connected to the first control socket 6a, and a second ring light source 4b and a second coaxial light source 3b are connected to the second control socket 6b. The first control socket 6a and the second control socket 6b are connected to a control device via wires. The control device adjusts the brightness of the first ring light source 4a, the first coaxial light source 3a, the second ring light source 4b, and the second coaxial light source 3b individually or in groups.

[0040] Please refer to Figure 6 and Figure 7 The first adjustment component is located on the mirror base 9 and is used to adjust the position of the beam splitter 22 relative to the total reflection mirror 21. The first adjustment component includes an elastic pressure plate 92, a flexible shim 93 and a plurality of adjusting screws 91. The elastic pressure plate 92 is fixed on the mirror base 9 and the adjusting screws 91 are screwed on the mirror base 9. The adjusting screws 91, the beam splitter 22, the flexible shim 93 and the elastic pressure plate 92 are arranged sequentially from bottom to top. The adjusting screws 91 abut against the beam splitter 22, so that the flexible shim 93 is clamped between the beam splitter 22 and the elastic pressure plate 92.

[0041] The beam splitter prism 22 and the total reflection mirror 21 are arranged sequentially from front to back. Locking screws for preventing displacement of the beam splitter prism 22 and the total reflection mirror 21 are installed on the left and right sides of the mirror mount 9. These locking screws are arranged in a left-right direction. Before adjusting the position of the beam splitter prism 22 relative to the total reflection mirror 21, the locking screws on the left or right side used to prevent displacement of the beam splitter prism 22 must be loosened.

[0042] The method of using this auxiliary alignment device is as follows: Before use: Without installing the beam splitter, illuminate the two test surfaces with two test light sources respectively. Based on the image captured by camera 1, check whether the two test surfaces are in focus. If they are not in focus, it means that the actual working distance of lens 12 deviates from the theoretical value. The back focal length of lens 12 needs to be adjusted to make the two test surfaces in focus. Check if the central cross of the target surface 11 is horizontal and vertical. If the central cross of the target surface 11 is deflected, the phase of the camera 1 needs to be adjusted to make the central cross of the target surface 11 horizontal and vertical. Check whether the central crosses of the two test surfaces are aligned with each other. If there is a misalignment and / or deflection between them, adjust the position of the beam splitter 22 relative to the total reflection mirror 21 through the first adjustment component to align the central crosses of the two test surfaces. Check whether the central cross on the test object surface is horizontal and vertical. If the central cross on the test object surface is deflected, adjust the position of the mirror base 9 relative to the base 7 through the second adjustment component to make the central cross on the test object surface horizontal and vertical. Install the two beam splitters onto base 7.

[0043] When using: The auxiliary alignment device is fixed to the production equipment by fasteners passing through the mounting hole 71. The auxiliary alignment device is located between product one and product two that need to be aligned. Product one has a first surface X1 with a mark one, and product two has a second surface X2 with a mark two. By aligning the mark one and the mark two, the alignment of product one and product two is achieved. Product 1 and Product 2 are fixed on different tooling. By controlling the movement of the tooling, the positions of Product 1 and Product 2 are changed so that D1+L1=D2+L2=WD. The brightness of the two coaxial light sources and the two ring light sources is adjusted according to the reflection characteristics of the first object surface X1 and the second object surface X2. The first object surface X1 and the second object surface X2 form the first object image and the second object image on the target surface 11, respectively. The target surface 11 converts the light signal into an electrical signal. The camera 1 is connected to the computer, which processes the electrical signal and displays the superimposed image of the first object surface X1 and the second object surface X2 on the screen. The inspector adjusts the position of product one or product two according to the image so that mark one is aligned with mark two.

[0044] If it is necessary to align the centers of Product 1 and Product 2, then if Mark 2 is placed at the center of Product 2, Mark 1 is placed at a distance L1-L2 from the center of Product 1.

[0045] The above description is merely an embodiment of the present invention and does not limit the patent scope of the present invention. Any equivalent modifications made based on the content of the present invention specification and drawings, or direct or indirect applications in related technical fields, are similarly included within the patent protection scope of the present invention.

Claims

1. An auxiliary alignment device, characterized in that: comprising a camera, a light source and a light beam redirecting assembly, the camera has a target surface, the light source is used to generate a first light beam and a second light beam; the first light beam is reflected by a first object surface in turn, is redirected by the light beam redirecting assembly, enters the camera, and forms a first object image on the target surface; the second light beam is reflected by a second object surface in turn, is redirected by the light beam redirecting assembly, enters the camera in a coaxial manner with the first light beam, and forms a second object image on the target surface.

2. The auxiliary alignment device according to claim 1, characterized in that: the light beam redirecting assembly comprises a beam splitter prism and a total reflection mirror, the camera comprises a lens, the first object surface and the second object surface are parallel to the optical axis of the lens, the distance between the first object surface and the optical axis is D1, the distance between the second object surface and the optical axis is D2, the distance between the center of the total reflection mirror and the center of the lens is L1, the distance between the center of the beam splitting surface of the beam splitter prism and the center of the lens is L2, and the working distance of the lens is WD, D1+L1=D2+L2=WD; the first light beam is reflected by the first object surface in turn to turn 180°, is reflected by the total reflection mirror to turn 90°, is transmitted through the beam splitter prism, and enters the camera through the lens; the second light beam is reflected by the second object surface in turn to turn 180°, is reflected by the beam splitter prism to turn 90°, and enters the camera through the lens; when entering the camera, the center line of the first light beam and the center line of the second light beam are both coincident with the optical axis.

3. The auxiliary alignment device according to claim 2, characterized in that: the light source comprises two annular light sources, which are a first annular light source and a second annular light source, the first annular light source is located between the first object surface and the first beam splitter, the first light beam comprises a first annular light beam, the first annular light source has a first light transmission hole, and the first annular light beam is emitted from the first annular light source to the first object surface; the second annular light source is located between the second object surface and the second beam splitter, the second light beam comprises a second annular light beam, the second annular light source has a second light transmission hole, and the second annular light beam is emitted from the second annular light source to the second object surface.

4. The auxiliary alignment device according to claim 3, characterized in that: comprising two beam splitters, the light source comprises two coaxial light sources, which are a first coaxial light source and a second coaxial light source, and the two beam splitters are a first beam splitter and a second beam splitter, the first light beam comprises a first coaxial light beam, the first coaxial light beam is emitted from the first coaxial light source in parallel to the optical axis, is reflected by the first beam splitter to turn 90°, and reaches the first object surface; the second light beam comprises a second coaxial light beam, the second coaxial light beam is emitted from the second coaxial light source in parallel to the optical axis, is reflected by the second beam splitter to turn 90°, and reaches the second object surface.

5. The auxiliary alignment device according to claim 4, characterized in that: ​ ​ ​ ​ ​ The coaxial light source and the annular light source each have a diffusion plate.

6. The auxiliary alignment device of claim 4, wherein: The auxiliary alignment device comprises a base and two light splitting seats, the two light splitting seats are a first light splitting seat and a second light splitting seat respectively, the base is located between the two light splitting seats, the base has a mounting hole for mounting the auxiliary alignment device; The light beam redirecting assembly and the camera are mounted on the base, the first light splitting plate, the first annular light source and the first coaxial light source are mounted on the first light splitting seat, and the second light splitting plate, the second annular light source and the second coaxial light source are mounted on the second light splitting seat.

7. The auxiliary alignment device of claim 6, wherein: The auxiliary alignment device comprises two control sockets, the two control sockets are a first control socket and a second control socket respectively, the first annular light source and the first coaxial light source are connected to the first control socket respectively, and the second annular light source and the second coaxial light source are connected to the second control socket respectively.

8. The auxiliary alignment device of claim 6, wherein: The auxiliary alignment device comprises a mirror seat, a first adjusting assembly and a second adjusting assembly, the mirror seat is arranged in the base, the light beam redirecting assembly is arranged in the mirror seat, the first adjusting assembly is arranged on the mirror seat and used for adjusting the position of the light splitting prism relative to the total reflection mirror, and the second adjusting assembly is arranged on the base and used for adjusting the position of the mirror seat relative to the base; The light splitting seats are fixedly connected to the base in a detachable manner.

9. The auxiliary alignment device of claim 8, wherein: The first adjusting assembly comprises an elastic pressing plate, a flexible gasket and a plurality of adjusting screws, the elastic pressing plate is fixed on the mirror seat, the adjusting screws are screwed on the mirror seat, the adjusting screws, the light splitting prism, the flexible gasket and the elastic pressing plate are arranged in sequence, and the adjusting screws abut against the light splitting prism so that the flexible gasket is clamped between the light splitting prism and the elastic pressing plate.

10. The auxiliary alignment device of claim 3, wherein: The annular light source comprises a high-angle annular light source and a low-angle annular light source, and the low-angle annular light source is arranged around the high-angle annular light source.

Images