Runway-type faraday shield structure for radio frequency ion source

Abstract

The application belongs to the technical field of neutral beam injection in the controllable nuclear fusion auxiliary heating method, and discloses a racetrack type Faraday shielding structure for a radio frequency ion source. In the structure, the Faraday shielding cylinder comprises a racetrack type shielding cylinder, a first water inlet pipe and a first water outlet pipe, the shielding cylinder comprises a cylinder side wall, a cylinder top wall and a first buried pipe water cooling structure, the cylinder side wall is provided with a gap, and the first water inlet pipe and the first water outlet pipe are connected with a first inlet and a first outlet of the first buried pipe water cooling structure respectively; the Faraday shielding back plate comprises a racetrack type back plate, a second water inlet pipe and a second water outlet pipe, a second buried pipe water cooling structure is arranged in the back plate, and the second water inlet pipe and the second water outlet pipe are connected with a second inlet and a second outlet of the second buried pipe water cooling structure respectively. The application can improve the power of the radio frequency coil, is suitable for a high-power and long-pulse operation system, and can maintain the long-term stable operation of the high-power radio frequency electron source.

Description

Technical Field

[0001] This invention relates to the field of neutral beam injection technology in controlled nuclear fusion assisted heating methods, and particularly to a racetrack-shaped Faraday shielding structure for use on radio frequency ion sources. Background Technology

[0002] Neutral beam injection (NBI) is a crucial auxiliary device in tokamak physics experiments. Based on the neutral beam injection system, experiments such as plasma heating, non-inductive current driving, and fuel addition can be conducted. Heating high-current plasma has become one of the most important methods for fusion-assisted heating, with the core internal component, the radio frequency (RF) ion source, used to generate a high-energy ion beam. The RF ion source adopts a three-section structure, consisting of an exciter, an extension region, and an extraction region. The exciter includes RF coils, a dielectric cylinder, and a Faraday shield (FS). The RF coils surround the dielectric cylinder, while the Faraday shield is located inside. The RF electromagnetic field generated by the RF coils passes through the slits of the Faraday shield, driving the gas discharge within the Faraday shield to generate plasma. Inside the exciter, the Faraday shield is in direct contact with the plasma, bearing most of the plasma heat flux, and also suppresses capacitive coupling between the RF coils, preventing a decrease in power coupling efficiency and preventing plasma sputtering and contamination of the dielectric cylinder.

[0003] However, most existing Faraday shields are cylindrical. Cylindrical Faraday shields generally produce plasma with poor uniformity and cannot effectively suppress capacitive coupling generated by the RF coil. They also have low power transmission efficiency and are not suitable for high-power, long-pulse RF ion source operating systems, thus failing to guarantee the long-term stable operation of high-power RF ion sources. Summary of the Invention

[0004] This invention aims to at least partially solve one of the technical problems in related technologies. Therefore, one objective of this invention is to propose a racetrack-shaped Faraday shielding structure for radio frequency ion sources, which has higher power transmission efficiency, is suitable for high-power, long-pulse operating systems, and can maintain the long-term stable operation of high-power radio frequency electronic sources.

[0005] According to a first aspect of the present invention, a racetrack-shaped Faraday shielding structure for a radio frequency ion source includes:

[0006] A Faraday shielding cylinder includes a racetrack-shaped shielding cylinder, a first inlet pipe, and a first outlet pipe. The shielding cylinder includes a side wall, a top wall, and a first embedded pipe water-cooling structure. The side wall has vertically extending and circumferentially spaced slits. The top wall is located at the top of the side wall. The first embedded pipe water-cooling structure is embedded in the top wall and the side wall. The first embedded pipe water-cooling structure has a first inlet and a first outlet located on the top wall. The first inlet pipe and the first outlet pipe are located outside the shielding cylinder and are respectively connected to the first inlet and the first outlet.

[0007] The Faraday shielding backplate includes a racetrack-shaped backplate, a second inlet pipe, and a second outlet pipe. The backplate is fixed to the inner side of the top wall of the cylinder. A second embedded pipe water-cooling structure is provided inside the backplate. The second embedded pipe water-cooling structure has a second inlet and a second outlet. The second inlet pipe and the second outlet pipe are located outside the shielding cylinder and pass through the top wall of the cylinder, respectively, and are connected to the second inlet and the second outlet.

[0008] The racetrack-shaped Faraday shielding structure for radio frequency ion sources in this invention has the following advantages: First, the shielding cylinder and backplate are racetrack-shaped, making the overall structure of the racetrack-shaped Faraday shielding structure for radio frequency ion sources in this invention racetrack-shaped. Compared with cylindrical shielding cylinders, the racetrack-shaped Faraday shielding structure has better plasma uniformity, thereby enhancing plasma stability, effectively reducing the direct etching and thermal load of the plasma on the shielding cylinder and backplate, effectively reducing component corrosion rate, and achieving higher power transmission efficiency. Its geometric structure can more effectively "short-circuit" harmful radial electric fields, forcing energy to be transmitted mainly through inductive coupling. For high-power, long-pulse operating systems, the racetrack-shaped Faraday shielding structure has more significant advantages. Second, the Faraday shielding cylinder can couple the radio frequency electromagnetic field generated by the radio frequency coil into the inner cavity of the Faraday shielding cylinder through its own gaps to drive the gas to generate plasma. At the same time, it can suppress capacitive coupling generated by the radio frequency coil, reduce the power loss of the radio frequency coil, and increase the power of the radio frequency coil. Third, the gaps can suppress the sputtering of secondary and stray electrons, reducing the bombardment and sputtering erosion of high-energy ions, effectively protecting the dielectric cylinder, and contributing to the long-term stable operation of the power RF electronic source. Fourth, the first and second buried tube water-cooling structures can directly remove heat from the shielding cylinder and backplate, effectively protecting them and contributing to the long-term stable operation of the RF electronic source. Fifth, the structure is robust and easy to maintain. The Faraday shielding cylinder and Faraday shielding backplate adopt a modular design, ensuring both the mechanical strength and sealing of the overall structure, and making the processing, testing, replacement, and maintenance of components more convenient.

[0009] In summary, the racetrack-shaped Faraday shielding structure for radio frequency ion sources in this embodiment of the invention can improve the power of the radio frequency coil, is suitable for high-power, long-pulse operation systems, and can maintain the long-term stable operation of high-power radio frequency electronic sources.

[0010] In some embodiments, the gap on the cylinder sidewall is a Z-shaped gap.

[0011] In some embodiments, there are two first buried pipe water cooling structures, which are respectively arranged on the two halves of the shielding cylinder. Correspondingly, there are two first water inlet pipes and two first water outlet pipes, which are respectively connected to the first inlet and the first outlet of the two first buried pipe water cooling structures.

[0012] In some embodiments, the first buried pipe water-cooling structure includes a plurality of first water-cooling branches, and the plurality of first water-cooling branches share a first inlet and a first outlet.

[0013] In some embodiments, the plurality of first water-cooled branches are serpentine within the cylinder sidewall, and the gaps on the cylinder sidewall and the vertical segments of the plurality of first water-cooled branches are alternately distributed in the circumferential direction.

[0014] In some embodiments, the back panel is composed of two half-track back panels joined together.

[0015] In some embodiments, the joint between the two half-track back panels is a Z-shaped joint.

[0016] In some embodiments, there are four second buried pipe water cooling structures, two of which and two others are respectively arranged on the two half-runway back plates. Correspondingly, there are four second inlet pipes and four second outlet pipes, which are respectively connected to the second inlet and the second outlet of the four second buried pipe water cooling structures.

[0017] In some embodiments, a first diagnostic hole is provided on the top wall of the cylinder, and a second diagnostic hole is provided on the back plate, with the first diagnostic hole and the second diagnostic hole facing each other.

[0018] In some embodiments, the shielding cylinder and the backplate are made of molybdenum or oxygen-free copper.

[0019] Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of a racetrack-shaped Faraday shielding structure for a radio frequency ion source according to an embodiment of the present invention;

[0021] Figure 2 yes Figure 1 An explosion diagram;

[0022] Figure 3 yes Figure 1 A schematic diagram of a longitudinal section;

[0023] Figure 4 This is a top view of the shielding cylinder of the racetrack-shaped Faraday shielding structure for a radio frequency ion source according to an embodiment of the present invention;

[0024] Figure 5 This is a partial longitudinal sectional view of the side wall of the shielding cylinder of the racetrack-shaped Faraday shielding structure for a radio frequency ion source according to an embodiment of the present invention.

[0025] Figure 6 This is a partial transverse cross-sectional view of the side wall of the shielding cylinder of the racetrack-shaped Faraday shielding structure for a radio frequency ion source according to an embodiment of the present invention;

[0026] Figure 7 This is a perspective view of a Faraday shielding backplate for a racetrack-shaped Faraday shielding structure on a radio frequency ion source, according to an embodiment of the present invention.

[0027] Figure 8 This is a top view of the backplate of the racetrack-shaped Faraday shielding structure used on a radio frequency ion source according to an embodiment of the present invention.

[0028] Figure Labels

[0029] Raceway-type Faraday shielding structure 1000 for radio frequency ion sources; Faraday shielding cylinder 10; shielding cylinder 101; cylinder side wall 1011; gap 10111; cylinder top wall 1012; first diagnostic hole 10121; first air inlet 10122; first filament mounting hole 10123; first buried tube water cooling structure 1013; first inlet 10131; first outlet 10132; first water cooling branch 10133; first water inlet pipe 102; first water outlet pipe 103; Faraday shielding backplate 20; backplate 201; second buried tube water cooling structure 2011; second inlet 20111; second outlet 20112; second diagnostic hole 2012; second air inlet 2013; second filament mounting hole 2014; half-raceway backplate 2015; splicing seam 2016; second water inlet pipe 202; second water outlet pipe 203. Detailed Implementation

[0030] Embodiments of the present invention are described in detail below, examples of which are illustrated in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain the present invention, and should not be construed as limiting the present invention.

[0031] The following is combined Figures 1 to 8 This invention describes a racetrack-shaped Faraday shielding structure 1000 for use on a radio frequency ion source, according to an embodiment of the present invention.

[0032] like Figures 1 to 8 As shown, the racetrack-shaped Faraday shielding structure 1000 for a radio frequency ion source according to an embodiment of the present invention includes a Faraday shielding cylinder 10 and a Faraday shielding backplate 20.

[0033] The Faraday shield 10 includes a racetrack-shaped shield 101, a first inlet pipe 102, and a first outlet pipe 103. The racetrack-shaped design of the shield 101 results in better plasma uniformity within its inner cavity compared to existing cylindrical shields. This is demonstrated by comparative simulation experiments with existing cylindrical shields. In other words, the racetrack-shaped design of the shield 101 improves plasma uniformity, thereby enhancing plasma stability and reducing direct etching and thermal load on the shield 101. The shielding cylinder 101 includes a cylinder side wall 1011, a cylinder top wall 1012, and a first buried pipe water cooling structure 1013. The cylinder side wall 1011 has vertically extending and circumferentially spaced slits 10111, which are used to couple the radio frequency electromagnetic field generated by the radio frequency coil into the inner cavity of the Faraday shielding cylinder 10 to drive the gas to generate plasma. At the same time, the slits can also suppress the capacitive coupling generated by the radio frequency coil to improve the power of the radio frequency coil. The cylinder top wall 1012 is located at the top of the cylinder side wall 1011, so that the top of the shielding cylinder 101 is closed and the bottom is open. The first embedded pipe water-cooling structure 1013 is embedded in the top wall 1012 and the side wall 1011 of the cylinder. The first embedded pipe water-cooling structure 1013 has a first inlet 10131 and a first outlet 10132 located on the top wall 1012 of the cylinder. The first water inlet pipe 102 and the first water outlet pipe 103 are located outside the shielding cylinder 101 and are connected to the first inlet 10131 and the first outlet 10132 respectively. The first embedded pipe water-cooling structure 1013 of the shielding cylinder 101 is connected to an external circulating cooling system. In this way, the water-cooling medium can enter the first embedded pipe water-cooling structure 1013 through the first water inlet pipe 102 and be discharged from the first water outlet pipe 103. The water-cooling medium carries away the heat on the shielding cylinder 101, which is beneficial to the long-term stable operation of the shielding cylinder 101.

[0034] The Faraday shield 10 primarily withstands most of the direct plasma bombardment and carries away the high-energy heat flux generated by the plasma. The Faraday shield 10 is racetrack-shaped, determined by the high-power radio frequency ion source structure (such as the BEST-NBI high-power radio frequency ion source structure). Its internal plasma uniformity is better, thus enhancing plasma stability and reducing direct etching and thermal load on the shield 101. Simultaneously, the Faraday shield 10, through its own gaps, couples the radio frequency electromagnetic field generated by the radio frequency coil into its internal cavity to drive the gas to generate plasma. This also suppresses capacitive coupling generated by the radio frequency coil, reducing power loss and increasing power. By incorporating a first buried tube water-cooling structure 1013, the water-cooling medium flowing through it directly carries away heat from the shield 101, which is beneficial for the long-term stable operation of the shield 101.

[0035] The Faraday shielding backplate 20 includes a racetrack-shaped backplate 201, a second water inlet pipe 202, and a second water outlet pipe 203. The backplate 201 is adapted to be fixed to the inner side of the top wall 1012 of the cylinder. A second embedded water cooling structure 2011 is provided inside the backplate 201. The second embedded water cooling structure 2011 has a second inlet 20111 and a second outlet 20112. The second water inlet pipe 202 and the second water outlet pipe 203 are located outside the shielding cylinder 101 and pass through the top wall 1012 of the cylinder, respectively, and are connected to the second inlet 20111 and the second outlet 20112. The second embedded water cooling structure 2011 of the backplate 201 is connected to an external circulating cooling system. In this way, the cooling medium can enter the second embedded water cooling structure 2011 through the second water inlet pipe 202 and be discharged through the second water outlet pipe 203. The cooling medium carries away the heat on the backplate 201, which is beneficial to the long-term stable operation of the backplate 201.

[0036] The Faraday shielding backplate 20 is racetrack-shaped and is designed to fit the shielding cylinder 101. The Faraday shielding backplate 20 also withstands some of the direct plasma bombardment and carries away the high-energy heat flux generated by the plasma. Because the shielding cylinder is racetrack-shaped, the plasma uniformity within its cavity is good. Therefore, it can reduce the direct etching and heat load of the plasma on the shielding cylinder 101 and the backplate 201, which is beneficial to the long-term stable operation of the radio frequency ion source. By setting a second buried tube water-cooling structure 2011, the water-cooling medium flowing through the second buried tube water-cooling structure 2011 can directly carry away the heat on the backplate 201, which is beneficial to the long-term stable operation of the backplate 201.

[0037] When the radio frequency ion source is working, the radio frequency electromagnetic field generated by the radio frequency coil passes through the gap 10111 of the shielding cylinder 101, driving gas discharge to generate plasma. At the same time, the water cooling medium passes sequentially through the first water inlet pipe 102, the first buried pipe water cooling structure 1013 and the first water outlet pipe 103, and sequentially through the second water inlet pipe 202, the second buried pipe water cooling structure 2011 and the second water outlet pipe 203.

[0038] The racetrack-shaped Faraday shielding structure 1000 for radio frequency ion sources in this embodiment of the invention has the following advantages: First, the shielding cylinder 101 and the back plate 201 are racetrack-shaped, making the overall racetrack-shaped Faraday shielding structure 1000 for radio frequency ion sources in this embodiment of the invention racetrack-shaped. Compared with cylindrical shielding cylinders, the racetrack-shaped Faraday shielding structure 1000 for radio frequency ion sources has better plasma uniformity, thereby enhancing plasma stability, effectively reducing the direct etching and thermal load of plasma on the shielding cylinder 101 and the back plate 201, effectively reducing the corrosion rate of components, and having higher power transmission efficiency. Its geometric structure can more effectively "short-circuit" harmful radial electric fields, forcing energy to be transmitted mainly through inductive coupling. For high-power, long-pulse operating systems, the racetrack-shaped Faraday shielding structure 1000 has more significant advantages. Secondly, the Faraday shielding cylinder 10, through its own gap 10111, can couple the radio frequency electromagnetic field generated by the radio frequency coil into the inner cavity of the Faraday shielding cylinder 10 to drive the gas to generate plasma. Simultaneously, it can suppress capacitive coupling generated by the radio frequency coil, reduce power loss of the radio frequency coil, and increase the power of the radio frequency coil. Thirdly, the gap 10111 can suppress the sputtering of secondary electrons and stray electrons, reduce the bombardment and sputtering erosion of high-energy ions, effectively protect the dielectric cylinder, and facilitate the long-term stable operation of the power radio frequency electronic source. Fourthly, the first buried tube water-cooling structure 1013 and the second buried tube water-cooling structure 2011 can directly remove heat from the shielding cylinder 101 and the back plate 201, effectively protecting the shielding cylinder and the back plate 201, and facilitating the long-term stable operation of the radio frequency electronic source. Fifthly, the structure is robust and easy to maintain. The Faraday shielding cylinder 10 and the Faraday shielding back plate 20 adopt a modular design, ensuring both the mechanical strength and sealing of the overall structure, and making the processing, testing, replacement, and maintenance of components more convenient.

[0039] In summary, the racetrack-shaped Faraday shielding structure 1000 for radio frequency ion sources according to embodiments of the present invention can improve the power of radio frequency coils, is suitable for high-power, long-pulse operation systems, and can maintain the long-term stable operation of high-power radio frequency electronic sources.

[0040] In some embodiments, such as Figure 6As shown, the slots 10111 on the cylinder sidewall 1011 are Z-shaped slots. Studies have shown that Z-shaped slots provide the best shielding effect against particle sputtering and have lower power loss compared to other general slot types such as inclined slots. Specifically, the Z-shaped slots on the cylinder sidewall 1011 are evenly distributed circumferentially, and the number can be set as needed, for example, 80 to 180, preferably 124.

[0041] In some embodiments, such as Figure 4 As shown, there are two first buried pipe water-cooling structures 1013, which are respectively arranged on the two halves of the shielding cylinder 101. Correspondingly, there are two first water inlet pipes 102 and two first water outlet pipes 103, which are respectively connected to the first inlet 10131 and the first outlet 10132 of the two first buried pipe water-cooling structures 1013. In this way, the water-cooling efficiency of the shielding cylinder 101 can be improved, the water-cooling effect is good, and the assembly is convenient.

[0042] In some embodiments, such as Figure 4 As shown, the first buried pipe water-cooling structure 1013 includes multiple first water-cooling branches 10133, which share a first inlet 10131 and a first outlet 10132. This further improves the water-cooling efficiency of the shielding cylinder 101, resulting in better water-cooling performance, and also facilitates assembly. Specifically, there can be six first water-cooling branches 10133, forming a six-way water-cooling design. This ensures more uniform flow of the cooling medium on the cylinder sidewall 1011 and top wall 1012, avoiding localized hot spots and achieving uniform control of the overall temperature field.

[0043] In some embodiments, such as Figure 5 As shown, multiple first water-cooling branches 10133 are arranged in a serpentine shape within the cylinder sidewall 1011, and the gaps 10111 on the cylinder sidewall 1011 and the vertical sections of the multiple first water-cooling branches 10133 are alternately distributed in the circumferential direction. In this way, the space utilization rate is high.

[0044] In some embodiments, such as Figure 7 and Figure 8 As shown, the back panel 201 is composed of two half-runway back panels 2015 spliced ​​together. The splicing seam 2016 between the two half-runway back panels 2015 serves the same function as the gap on the cylinder side wall 1011.

[0045] In some embodiments, such as Figure 7 As shown, the splicing seam 2016 between the two half-runway back panels 2015 is a Z-shaped seam. The Z-shaped seam can suppress the sputtering of secondary electrons and stray electrons, thereby reducing power loss.

[0046] In some embodiments, the two half-runway backplates 2015 are fixed to the top wall 1012 of the cylinder by bolts.

[0047] In some embodiments, such as Figure 8 As shown, there are four second buried-pipe water-cooling structures 2011. Two of these structures and two others are arranged on the two half-racetrack backplates 2015. Correspondingly, there are four second inlet pipes 202 and four second outlet pipes 203, which are connected to the second inlet 20111 and the second outlet 20112 of the four second buried-pipe water-cooling structures 2011. The second buried-pipe water-cooling structures 2011 are water-cooling branches designed with buried pipes, evenly distributed across the entire backplate 201. This improves the water-cooling efficiency of the backplate 201, resulting in good water-cooling performance. The Faraday shielding cylinder 10 uses dual-channel water cooling, and the Faraday shielding backplate 20 uses quadruple-channel water cooling. Thus, the racetrack-type Faraday shielding structure 1000 used in the radio frequency ion source achieves a total of six independent cooling channels, resulting in good overall cooling performance. Meanwhile, the Faraday shielding backplate 20 adopts a four-way water cooling system, which provides the backplate 201 with refined and highly redundant heat dissipation capabilities.

[0048] In some embodiments, such as Figure 1 As shown, a first diagnostic hole 10121 is provided on the top wall 1012 of the cylinder, and a second diagnostic hole 2012 is provided on the back plate 201. The first diagnostic hole 10121 and the second diagnostic hole 2012 are directly opposite each other. There are a total of four diagnostic holes 10121 and 2012, which are used to diagnose plasma parameters. The first diagnostic hole 10121 and the second diagnostic hole 2012 can provide external diagnostic equipment with a direct observation channel to the core region of the plasma, and can measure plasma parameters in real time.

[0049] In some embodiments, such as Figure 2 and Figure 6 As shown, a first air inlet 10122 is provided on the top wall 1012 of the cylinder, and a second air inlet 2013 is provided on the back plate 201. The first air inlet 10122 and the second air inlet 2013 are directly opposite each other. The first air inlet 10122 and the second air inlet 2013 are used to introduce the gas required to generate plasma, ensuring that the working gas can be directly injected into the radio frequency discharge area from the top, thereby improving the plasma generation efficiency and the uniformity of the plasma density distribution.

[0050] In some embodiments, such as Figure 2 As shown, the top wall 1012 of the cylinder is also provided with two first filament mounting holes 10123, and the back plate 201 is also provided with two second filament mounting holes 2014, with the two first filament mounting holes 10123 and the two second filament mounting holes 2014 facing each other. This facilitates the installation of two filaments.

[0051] In some embodiments, the shielding cylinder 101 and the back plate 201 are made of molybdenum or oxygen-free copper, which can ensure the thermo-mechanical properties of the shielding cylinder 101 and the back plate 201. In terms of thermo-mechanical properties, molybdenum is superior to oxygen-free copper, but oxygen-free copper is less expensive.

[0052] Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of the present invention.

Claims

1. A racetrack-shaped Faraday shield structure for use on a radio frequency ion source, characterized in that, The application relates to a Faraday shielded water-cooled structure. The Faraday shielded water-cooled structure comprises a runway-shaped shielded cylinder, a first water inlet pipe and a first water outlet pipe; the shielded cylinder comprises a cylinder side wall, a cylinder top wall and a first buried pipe water cooling structure, the cylinder side wall is provided with vertically-elongated and circumferentially-spaced slits, the cylinder top wall is arranged at the top end of the cylinder side wall, and the first buried pipe water cooling structure is embedded in the cylinder top wall and the cylinder side wall and has a first inlet and a first outlet on the cylinder top wall; the first water inlet pipe and the first water outlet pipe are located outside the shielded cylinder and are connected with the first inlet and the first outlet respectively. The Faraday shielded water-cooled structure further comprises a runway-shaped back plate, a second water inlet pipe and a second water outlet pipe; the back plate is attached to the inner side of the cylinder top wall, and a second buried pipe water cooling structure is arranged in the back plate and has a second inlet and a second outlet; the second water inlet pipe and the second water outlet pipe are located outside the shielded cylinder and pass through the cylinder top wall and are connected with the second inlet and the second outlet respectively.

2. The racetrack-shaped Faraday shield structure for a radio frequency ion source according to claim 1, wherein, The slits on the cylinder side wall are Z-shaped slits.

3. The racetrack-shaped Faraday shield structure for use on a radio frequency ion source of claim 2, wherein, The first buried pipe water cooling structure has two first buried pipe water cooling structures arranged on two halves of the shielded cylinder respectively, and the first water inlet pipe and the first water outlet pipe each have two pipes connected with the first inlets and the first outlets of the two first buried pipe water cooling structures respectively.

4. The racetrack-shaped Faraday shield structure for a radio frequency ion source according to claim 3, characterized in that, The first buried pipe water cooling structure comprises a plurality of first water cooling branches, and the plurality of first water cooling branches share one first inlet and one first outlet.

5. The racetrack-shaped Faraday shield structure for use on a radio frequency ion source of claim 4, wherein, The plurality of first water cooling branches are in a serpentine shape in the cylinder side wall, and the slits on the cylinder side wall and the vertical sections of the plurality of first water cooling branches are alternately distributed in the circumferential direction.

6. The racetrack-shaped Faraday shield structure for a radio frequency ion source according to claim 1, wherein, The back plate is composed of two half runway back plates.

7. The racetrack-shaped Faraday shield structure for a radio frequency ion source according to claim 6, characterized in that, The joint between the two half runway back plates is a Z-shaped joint.

8. The racetrack-shaped Faraday shield structure for use on a radio frequency ion source of claim 7, wherein, The second buried pipe water cooling structure has four second buried pipe water cooling structures, two of which are arranged on one half runway back plate and the other two of which are arranged on the other half runway back plate; the second water inlet pipe and the second water outlet pipe each have four pipes connected with the second inlets and the second outlets of the four second buried pipe water cooling structures respectively.

9. The racetrack-shaped Faraday shield structure for use on a radio frequency ion source of claim 1, wherein, The cylinder top wall is provided with a first diagnostic hole, and the back plate is provided with a second diagnostic hole; the first diagnostic hole and the second diagnostic hole are opposite to each other.

10. The racetrack-shaped Faraday shield structure for use on a radio frequency ion source of claim 1, wherein, The shielded cylinder and the back plate are made of molybdenum or oxygen-free copper.

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