Machine control method, machine control device and machine
By optimizing the loading mode of the warm-up plates and the plates to be processed, the problems of low utilization rate of the machine chamber and long waiting time were solved, resulting in a more efficient production process and a reduced product defect rate.
Patent Information
- Application Number
- CN202410966348.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-17
- Publication Date
- 2026-01-30
AI Technical Summary
In existing machine control methods, the waiting time for handling warm-up plates and plates to be processed is too long, which reduces the utilization rate of the machine chamber and prevents automatic loading when the number of loading ports is insufficient, thus affecting production efficiency.
By comprehensively considering the warm-up status, the number of available loading ports, and the handling time, an appropriate loading mode is determined, including a first loading mode and a second loading mode. The loading sequence of the warm-up plates and the plates to be processed, as well as the allocation of loading ports, are optimized to ensure that the plates to be processed enter the chamber in a timely manner and avoid repeated warm-up.
This improved machine utilization and work efficiency, reduced waiting time for workpieces, and lowered product defect rate.
Smart Images
Figure CN121442979A_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present disclosure relates to the technical field of semiconductor manufacturing, and in particular, to a machine control method, a machine control device and a machine. BACKGROUND
[0002] In the manufacturing process of semiconductor chips, the wafer as a carrier needs to undergo various process treatments such as cleaning, oxidation, film coating, photolithography, etching, ion implantation, film formation, etc. Generally, the wafer is executed with the above process treatments in different processing chambers on the machine. When the processing chamber is idle for a period of time or different process treatments are to be performed on different product wafers, in order to ensure the consistency of the chamber environment when performing the processing process, a warm-up (Season) operation is required to restore the chamber environment. The commonly used warm-up operation is to use a certain number of warm-up wafers, such as wafers that have undergone glue coating and baking but have not undergone photolithography, to replace the etching pattern wafers after photolithography, and perform a certain warm-up process.
[0003] Since a certain amount of time is required to transport the warm-up wafers and the wafers to be processed to the corresponding chamber, and the chamber is warmed up for a predetermined time without performing the process, the chamber needs to be warmed up again. The existing machine control method usually needs to wait until the number of available load ports of the machine is equal to the total number of transfer boxes required to transfer the warm-up wafers and the wafers to be processed, and then load the warm-up wafers and the wafers to be processed into the machine through different load ports, which may result in a long waiting time for the wafers to be processed, a low overall utilization rate of the chambers of the machine, and the machine cannot be automatically loaded when the number of available load ports of the machine is less than the number of chambers. SUMMARY
[0004] The present disclosure is proposed in view of the above problems. The present disclosure provides a machine control method, device, machine, electronic device and computer program product.
[0005] According to one aspect of the present disclosure, a machine control method is provided, comprising: determining a warm-up state of at least one chamber in a machine; determining a number of available load ports of the machine; determining a predetermined loading mode based at least on the warm-up state, the number of available load ports and a transport time of wafers to be processed to the machine; and corresponding the warm-up wafers and / or the wafers to be processed to the available load ports according to the predetermined loading mode to be loaded into the corresponding chambers.
[0006] In addition, the machine control method according to one aspect of the present disclosure, the predetermined loading mode includes at least a first loading mode and a second loading mode; in the first loading mode, the first warm-up sheet and the first sheet to be processed corresponding to the same first chamber are corresponded to different first available loading ports and second available loading ports to sequentially load the first warm-up sheet and the first sheet to be processed into the first chamber; in the second loading mode, the second warm-up sheet and the second sheet to be processed corresponding to the same second chamber are corresponded to the same third available loading port to sequentially load the second warm-up sheet and the second sheet to be processed into the second chamber.
[0007] In addition, the machine control method according to one aspect of the present disclosure, the first loading mode further includes a first double-loading port loading mode and a first multi-loading port loading mode, the first double-loading port loading mode is used to correspond the first warm-up sheet and the first sheet to be processed corresponding to the same first chamber to different first available loading ports and second available loading ports in the case of performing warm-up on the same first chamber; the first multi-loading port loading mode is used to allocate different available loading ports for different first chambers and correspond the first warm-up sheet and the first sheet to be processed corresponding to the same first chamber to different available loading ports in the case of performing warm-up on different first chambers.
[0008] In addition, the machine control method according to one aspect of the present disclosure, the second loading mode further includes a second single-loading port loading mode and a second double-loading port loading mode, the second single-loading port loading mode is used to correspond the second warm-up sheet and the second sheet to be processed corresponding to the same second chamber to the same third available loading port in the case of performing warm-up on the same second chamber; the second double-loading port loading mode is used to allocate different available loading ports for different second chambers and correspond the second warm-up sheet and the second sheet to be processed corresponding to the same second chamber to the same third available loading port in the case of performing warm-up on different second chambers.
[0009] Further, according to the machine control method of one aspect of the present disclosure, the predetermined loading mode is determined based on at least the warm-up state, the number of available loading ports, and the handling time of the machine, including: in the case that the warm-up state indicates that only a single chamber to be warmed up needs to perform the warm-up, judging the size of the available idle time of the chamber to be warmed up and the handling time; in the case that the available idle time is greater than the handling time, further judging whether the number of available loading ports is greater than or equal to 1, and in the case that the number of available loading ports is greater than 1, determining the first double-loading port loading mode as the predetermined loading mode, in the case that the number of available loading ports is equal to 1, determining the second single-loading port loading mode as the predetermined loading mode, and in the case that the number of available loading ports is equal to 0, determining not to perform the loading; in the case that the available idle time is less than the handling time, further judging whether the number of available loading ports is greater than or equal to 2, and in the case that the number of available loading ports is greater than or equal to 2, determining the first double-loading port loading mode as the predetermined loading mode, and in the case that the number of available loading ports is less than 2, determining not to perform the loading.
[0010] Furthermore, according to one aspect of the machine control method of this disclosure, a predetermined loading mode is determined based at least on the warm-up state, the number of available loading ports, and the machine's transport time, including: when the warm-up state indicates that the first and second warm-up chambers need to perform warm-up, determining the magnitude of the first available idle time of the first warm-up chamber and the second available idle time of the second warm-up chamber relative to the transport time; if the first or second available idle time is less than or equal to the transport time, further determining whether the number of available loading ports is greater than or equal to 3; if the number of available loading ports is greater than or equal to 3, determining that the first multi-loading port loading mode is the predetermined loading mode, and if the number of available loading ports is less than 3, determining that loading is not performed; if twice the transport time is greater than the first and second available idle times, and the first and second available idle times are greater than the transport time, further determining the available loading ports... If the number of available loading ports is greater than or equal to 2, the first multi-loading port loading mode is determined as the pre-determined loading mode; if the number of available loading ports is equal to 2, the second dual-loading port loading mode is determined as the pre-determined loading mode; and if the number of available loading ports is less than 2, loading is not performed. If the first idle time is greater than three times the transport time, and the second idle time is greater than the transport time, the number of available loading ports is further determined as greater than or equal to 1. If the number of available loading ports is greater than 2, the first multi-loading port loading mode is determined as the pre-determined loading mode; if the number of available loading ports is equal to 2, the second dual-loading port loading mode is determined as the pre-determined loading mode; if the number of available loading ports is equal to 1, the second single-loading port loading mode is determined as the pre-determined loading mode; and if the number of available loading ports is 0, loading is not performed.
[0011] According to another aspect of this disclosure, a machine tool control device is provided, comprising: a warm-up state determination unit configured to determine the warm-up state of at least one chamber within the machine tool; an available loading port number determination unit configured to determine the number of available loading ports of the machine tool; a loading mode determination unit configured to determine a predetermined loading mode based at least on the warm-up state, the number of available loading ports, and the transport time of the workpiece being transported to the machine tool; and a loading control unit configured to map the warm-up workpiece and / or the workpiece being transported to the available loading port according to the predetermined loading mode, so as to load the corresponding chamber.
[0012] Further, according to another aspect of the present disclosure, the machine control device, the loading mode determination unit is configured to determine the first loading mode or the second loading mode according to the warm-up state, the number of available loading ports, and the handling time; in the first loading mode, the first warm-up wafer and the first wafer to be processed corresponding to the same first chamber are corresponded to different first available loading port and second available loading port, so as to sequentially load the first warm-up wafer and the first wafer to be processed into the first chamber; in the second loading mode, the second warm-up wafer and the second wafer to be processed corresponding to the same second chamber are corresponded to the same third available loading port, so as to sequentially load the second warm-up wafer and the second wafer to be processed into the second chamber.
[0013] Further, according to another aspect of the present disclosure, the machine control device, the first loading mode includes a first double-loading port loading mode and a first multi-loading port loading mode; wherein, in the first double-loading port loading mode, the first warm-up wafer and the first wafer to be processed corresponding to the same first chamber are corresponded to different first available loading port and second available loading port in the case of performing warm-up on the same first chamber; in the first multi-loading port loading mode, different available loading ports are allocated to different first chambers in the case of performing warm-up on different first chambers, and the first warm-up wafer and the first wafer to be processed corresponding to the same first chamber are corresponded to different available loading ports; and / or, the second loading mode includes a second single-loading port loading mode and a second double-loading port loading mode; wherein, in the second single-loading port loading mode, the second warm-up wafer and the second wafer to be processed corresponding to the same second chamber are corresponded to the same third available loading port in the case of performing warm-up on the same second chamber; in the second double-loading port loading mode, different available loading ports are allocated to different second chambers in the case of performing warm-up on different second chambers, and the second warm-up wafer and the second wafer to be processed corresponding to the same second chamber are corresponded to the same third available loading port.
[0014] According to yet another aspect of the present disclosure, a machine is provided, comprising: at least one chamber configured to perform at least one process on a wafer to be processed; at least one loading port configured to load a warm-up wafer and / or a wafer to be processed into a corresponding chamber; and a machine control device as described above, configured to determine a warm-up state of the at least one chamber and a number of available loading ports, determine a predetermined loading mode based at least on the warm-up state, the number of available loading ports, and a handling time of the wafer to be processed to be handled to the machine, and correspond the warm-up wafer and / or the wafer to be processed to the available loading ports according to the predetermined loading mode to be loaded into the corresponding chamber.
[0015] According to still another aspect of the present disclosure, an electronic device is provided, comprising: a memory configured to store computer readable instructions; and a processor configured to execute the computer readable instructions, so that the electronic device performs the machine control method as described above.
[0016] According to another aspect of this disclosure, a computer program product is provided, including a computer program that, when executed by a processor, implements the machine control method described above.
[0017] As will be described in detail below, the machine control method, apparatus, machine, electronic device and computer program product according to the embodiments of this disclosure determine an appropriate loading mode by comprehensively considering the warm-up state, handling time and the number of available loading ports, thereby ensuring that the workpiece to be processed is loaded into the corresponding chamber in a timely manner after warm-up, avoiding unnecessary repeated warm-up, reducing the queuing waiting time of the workpiece to be processed, improving the utilization rate and working efficiency of the machine, and reducing the product defect rate.
[0018] It should be understood that both the foregoing general description and the following detailed description are exemplary and intended to provide further illustration of the claimed technology. Attached Figure Description
[0019] The above and other objects, features, and advantages of this disclosure will become more apparent from the more detailed description of the embodiments thereof in conjunction with the accompanying drawings. The drawings are provided to further illustrate the embodiments of this disclosure and form part of the specification. They are used together with the embodiments of this disclosure to explain the disclosure and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same components or steps.
[0020] Figure 1 This is a schematic diagram of a machine tool using a machine tool control method according to an embodiment of the present disclosure.
[0021] Figure 2 This is a flowchart illustrating a machine control method according to an embodiment of the present disclosure.
[0022] Figure 3A and Figure 3B This is a schematic diagram illustrating a first loading mode of a machine control method according to an embodiment of the present disclosure.
[0023] Figure 4A and Figure 4B This is a schematic diagram illustrating a second loading mode of a machine control method according to an embodiment of the present disclosure.
[0024] Figure 5 This is a flowchart illustrating the machine control method according to an embodiment of the present disclosure during a single-chamber warm-up process.
[0025] Figures 6 to 8 This is a flowchart illustrating the machine control method according to an embodiment of the present disclosure during the warm-up of two chambers.
[0026] Figure 9 This is a block diagram illustrating a machine tool control device according to an embodiment of the present disclosure.
[0027] Figure 10 is a hardware block diagram illustrating an electronic device according to an embodiment of the present disclosure.
[0028] Figure 11 is a schematic diagram illustrating a computer program product according to an embodiment of the present disclosure. DETAILED DESCRIPTION
[0029] In order to make the objectives, technical solutions, and advantages of the present disclosure more apparent, the following will describe example embodiments according to the present disclosure in detail with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present disclosure, rather than all the embodiments of the present disclosure, and it should be understood that the present disclosure is not limited to the example embodiments described herein.
[0030] First, refer to Figure 1 A machine table to which a machine table control method according to an embodiment of the present disclosure is applied will be described. The machine table control method according to an embodiment of the present disclosure can be applied to a machine table device that performs various process treatments such as etching (ETCH), chemical mechanical polishing (CMP), chemical vapor deposition (CVD), physical vapor deposition (PVD), rapid thermal processing (RTP), etc. on a wafer in a manufacturing process of a semiconductor chip.
[0031] Figure 1 It is schematically shown that the machine table 10 includes a machine table control device 100, chambers 201, 202, and 203, and load ports 301, 302, and 303. It is easily understood that, Figure 1 is schematic, and the positions and the number of the machine table control device, the chambers, and the load ports are non-limiting.
[0032] As shown in Figure 1 The chambers 201, 202, and 203 are used to perform one or more process treatments on a piece to be processed. In an embodiment of the present disclosure, the piece to be processed is, for example, a product piece that undergoes an ETCH, CMP, CVD, PVD, RTP, etc. process in the chamber, and the warm-up piece is, for example, a non-product piece that undergoes a warm-up operation in the chamber to restore the chamber environment.
[0033] The load ports 301, 302, and 303 are used to load the warm-up pieces and / or the pieces to be processed into the corresponding chambers 201, 202, and 203. In an embodiment of the present disclosure, the load ports 301, 302, and 303 are connected to a front opening unified pod (FOUP), thereby loading the warm-up pieces and / or the pieces to be processed in the FOUP into the corresponding chambers 201, 202, and 203.
[0034] The machine control device 100 is configured to determine the warm-up status of the chambers 201, 202 and 203 and the number of available loading ports, determine a predetermined loading mode based on at least the warm-up status, the number of available loading ports and the handling time of the machine, and handle the warm-up wafers and / or the wafers to be processed to the corresponding available loading ports according to the predetermined loading mode for loading into the corresponding chambers.
[0035] In embodiments of the present disclosure, the warm-up status of the chambers 201, 202 and 203 indicates that some or all of the chambers in the plurality of chambers 201, 202 and 203 need to perform warm-up processing, for example. The number of available loading ports can dynamically change over the course of the process. The handling time of the machine represents the time required to handle the wafers to be processed from the previous process into the corresponding chambers of the current machine, for example.
[0036] The machine control method performed by the machine control device 100 of the machine, for example, according to embodiments of the present disclosure, will be described further below with reference to the accompanying drawings. Figure 2 is a flowchart illustrating a machine control method according to embodiments of the present disclosure.
[0037] In step S201, the warm-up status of at least one chamber in the machine is determined.
[0038] In embodiments of the present disclosure, the warm-up status of the chambers indicates that some or all of the chambers in the plurality of chambers need to perform warm-up processing, for example. More specifically, the warm-up status can also indicate the corresponding idle time allowed after the at least one chamber is warmed up. After the chamber is warmed up, the relevant process can be directly performed within the corresponding idle time, and if the relevant process is not performed within the corresponding idle time after the chamber is warmed up, the warm-up status indicates that the chamber needs to perform warm-up processing again.
[0039] In step S202, the number of available loading ports of the machine is determined.
[0040] In embodiments of the present disclosure, the number of available loading ports can dynamically change over the course of the process.
[0041] In step S203, a predetermined loading mode is determined based on at least the warm-up status, the number of available loading ports and the handling time of the wafers to be processed to the machine.
[0042] In embodiments of the present disclosure, the predetermined loading mode includes at least a first loading mode and a second loading mode. Specifically, in the first loading mode, the first warm-up sheet and the first sheet to be processed corresponding to the same first chamber are corresponded to different first available loading ports and second available loading ports, so as to sequentially load the first warm-up sheet and the first sheet to be processed into the first chamber. In the second loading mode, the second warm-up sheet and the second sheet to be processed corresponding to the same second chamber are corresponded to the same third available loading port, so as to sequentially load the second warm-up sheet and the second sheet to be processed into the second chamber.
[0043] In step S204, the warm-up sheet and / or the sheet to be processed are corresponded to the available loading port according to the predetermined loading mode, so as to be loaded into the corresponding chamber.
[0044] In embodiments of the present disclosure, the predetermined loading mode is determined based at least on the warm-up state, the number of available loading ports, and the carrying time of the sheet to be processed carried to the machine, so that the sheet to be processed can be loaded into the corresponding chamber within the idle time after the chamber is warmed up, thereby avoiding causing invalid repeated warm-up. In addition, the reasonably determined predetermined loading mode will reduce the queuing waiting time of the sheet to be processed, improve the utilization rate and working efficiency of the machine, and reduce the product failure rate.
[0045] Hereinafter, the predetermined loading mode will be further described with reference to the following figures. Figures 3A to 4B The predetermined loading mode will be further described with reference to the following figures. Figure 3A FIG. 1 is a schematic diagram illustrating a first loading mode of a machine control method according to an embodiment of the present disclosure. Figure 3B FIG. 2 is a schematic diagram illustrating a second loading mode of a machine control method according to an embodiment of the present disclosure. Figure 4A FIG. 3 is a schematic diagram illustrating a third loading mode of a machine control method according to an embodiment of the present disclosure. Figure 4B FIG. 4 is a schematic diagram illustrating a fourth loading mode of a machine control method according to an embodiment of the present disclosure.
[0046] In embodiments of the present disclosure, the first loading mode further includes a first double-loading port loading mode and a first multi-loading port loading mode. Figure 3A FIG. 1 shows the first double-loading port loading mode, only the first chamber A is warmed up, and the first warm-up sheet A1 and the first sheet to be processed A2 corresponding to the same first chamber A are corresponded to different first available loading ports LP1 and second available loading ports LP2, so as to be loaded into the corresponding first chamber A. Figure 3B FIG. 2 shows the first multi-loading port loading mode, the different first chambers (including: the first chamber A and the first chamber B) are warmed up, different available loading ports are allocated for different first chambers, and the first warm-up sheet A1 and the first sheet to be processed A2 corresponding to the same first chamber A are corresponded to different first available loading ports LP1 and second available loading ports LP2, so as to be loaded into the corresponding first chamber A, while at least one warm-up sheet B1 corresponding to the other first chamber B is corresponded to the other available loading port LP3, so as to be loaded into the corresponding other chamber B.
[0047] In embodiments of this disclosure, the second loading mode further includes a second single loading port loading mode and a second dual loading port loading mode. Figure 4A The second single-loading port loading mode is shown. For the same first chamber A, a warm-up process is required. The first warm-up plate A1 and the first piece to be processed A2, corresponding to the same second chamber A, are mapped to the same third available loading port (e.g., ...). Figure 4A The available loading port LP1 is shown for loading into the corresponding second chamber A. Figure 4B The second dual-loading port loading mode is shown. When warming up different second chambers (including second chamber A and second chamber B), different available loading ports are assigned to different second chambers, and the second warming plate A3 and the second piece to be processed A4 corresponding to the same second chamber A are mapped to the same third available loading port (e.g., Figure 4A The available loading port LP1 is shown, and at least one warming plate B1 corresponding to the other second chamber B is mapped to the other available loading port LP2.
[0048] It is important to understand that the first dual-loading port loading mode, the first multi-loading port loading mode, the second single-loading port loading mode, and the second dual-loading port loading mode are not intended to limit the number of loading ports on the current machine, but rather to indicate the number of loading ports participating in that mode. Furthermore, it is important to understand that, depending on the number and status of loading ports and chambers on the machine, the entire machine may have one or more sets of loading ports and chambers operating simultaneously in different loading modes.
[0049] In the first loading mode described above, the warm-up plates and the plates to be processed corresponding to the same chamber are assigned to different available loading ports, ensuring that the plates to be processed are loaded into the warmed-up chamber in a timely manner. In other words, the first loading mode is more suitable for scenarios where there are a sufficient number of available loading ports and the chamber idle time is relatively short. In the second loading mode described above, the warm-up plates and the plates to be processed corresponding to the same chamber are assigned to the same available loading port, thereby improving the overall working efficiency of the machine chamber. In other words, the second loading mode is more suitable for scenarios where there are fewer available loading ports and the chamber idle time is relatively long.
[0050] The following will refer to Figures 5 to 8 The machine control method according to embodiments of the present disclosure will be described in further detail. Figure 5 This is a flowchart illustrating the machine control method according to an embodiment of the present disclosure during a single-chamber warm-up process. Figures 6 to 8 This is a flowchart illustrating the machine control method according to an embodiment of the present disclosure during the warm-up of two chambers.
[0051] like Figure 5 As shown, in the case of warming up a single chamber, step S501 determines the magnitude of the available vacancy time and the transportation time of the chamber to be warmed up.
[0052] If a positive result is obtained in step S501, i.e. the available emptying time of the chamber to be warmed up is greater than the handling time, the process proceeds to step S502.
[0053] In step S502, it is further determined whether the number of available loading ports is greater than or equal to 1.
[0054] If a positive result is obtained in step S502, in step S503, i.e. in the case where the number of available loading ports is greater than 1, the first double loading port loading mode is determined as the predetermined loading mode; in step S504, i.e. in the case where the number of available loading ports is equal to 1, the second single loading port loading mode is determined as the predetermined loading mode. It is easily understood that in the case where the number of available loading ports is greater than 1, the second single loading port loading mode can also be determined as the predetermined loading mode. Because the available emptying time of the chamber to be warmed up is greater than the handling time, the second single loading port loading mode in which the warming-up pieces and the pieces to be processed of the same chamber are corresponded to the same available loading port can also ensure that the pieces to be processed after warming up are timely loaded into the chamber.
[0055] If a negative result is obtained in step S502, i.e. there is no available loading port, the process proceeds to step S505, and it is determined that loading is not performed.
[0056] If a negative result is obtained in step S501, i.e. the available emptying time of the chamber to be warmed up is not greater than the handling time, the process proceeds to step S506.
[0057] In step S506, it is further determined whether the number of available loading ports is greater than or equal to 2.
[0058] If a positive result is obtained in step S506, the process proceeds to step S507. In step S507, the first double loading port loading mode is determined as the predetermined loading mode. Because the available emptying time of the chamber to be warmed up is less than the handling time, the first double loading port loading mode in which the warming-up pieces and the pieces to be processed of the same chamber are corresponded to different available loading ports can ensure that the pieces to be processed after warming up are timely loaded into the chamber.
[0059] If a negative result is obtained in step S506, i.e. the number of available loading ports is less than 2, the process proceeds to step S505, and it is determined that loading is not performed.
[0060] The process of selecting the corresponding loading mode in the case where two chambers need to be warmed up will be described below in combination with Figure 6 , and Figure 6 the first available emptying time of the first chamber or the second available emptying time of the second chamber is less than the handling time of the pieces to be processed as an example.
[0061] As Figure 6As shown, in step S601, the first idle time or the second idle time is less than the handling time.
[0062] In step S602, it is further determined whether the number of available loading ports is greater than or equal to 3.
[0063] If a positive result is obtained in step S602, that is, the number of available loading ports is greater than or equal to 3, then the process proceeds to step S603, and the first multi-loading port loading mode is determined as the predetermined loading mode.
[0064] If a negative result is obtained in step S602, meaning the number of available loading ports is less than 3, the process proceeds to step S604, where it is determined that loading will not be performed. This is because when the number of loading ports is less than 3, the first multi-loading port loading mode, which maps the warm-up plates and the plates to be processed in the same chamber to different available loading ports, cannot be used.
[0065] exist Figure 7 In the example, considering the scenario where two chambers require warm-up, the explanation is based on the condition that twice the transport time is greater than the sum of the first and second available idle times, and both the first and second available idle times are greater than the transport time. Figure 7 As shown in step S701, twice the transport time is greater than the first idle time and the second idle time, and the first idle time and the second idle time are greater than the transport time.
[0066] In step S702, it is further determined whether the number of available loading ports is greater than or equal to 2.
[0067] If a positive result is obtained in step S702, then in step S703, if the number of available loading ports is greater than 2, the first multi-loading port loading mode is determined as the predetermined loading mode; in step S704, if the number of available loading ports is equal to 2, the second dual-loading port loading mode is determined as the predetermined loading mode.
[0068] If a negative result is obtained in step S702, that is, the number of available loading ports is less than 2, then the process proceeds to step S705, where it is determined that loading will not be performed.
[0069] exist Figure 8 In the example, considering the scenario where two chambers require warm-up, and assuming the first available idle time is greater than three times the transport time, and the second available idle time is greater than the transport time, this will be explained as an example. Figure 8 As shown, in the case of warming up both chambers, in step S801, the first idle time is greater than twice the transport time, and the second idle time is greater than the transport time.
[0070] In step S802, it is further determined whether the number of available loading ports is greater than or equal to 1.
[0071] If a positive result is obtained in step S802, in step S803, if the number of available loading ports is greater than 2, the first multi-loading port loading mode is determined as the predetermined loading mode; in step S804, if the number of available loading ports is equal to 2, the second double-loading port loading mode is determined as the predetermined loading mode; in step S805, if the number of available loading ports is equal to 1, the second single-loading port loading mode is determined as the predetermined loading mode. In this case, the first warm-up sheet of the first chamber with the first available emptying time is loaded through the single loading port first, then the second warm-up sheet and the second work-in-process sheet of the second chamber with the second available emptying time are sequentially loaded through the single loading port, and finally the first work-in-process sheet of the first chamber is loaded through the single loading port, which realizes the loading operation when the number of available loading ports is less than the number of chambers, and still ensures that the work-in-process sheet after warm-up can be timely loaded into the corresponding chamber, avoiding unnecessary repeated warm-up.
[0072] If a negative result is obtained in step S802, i.e., the number of available loading ports is less than 1, the process proceeds to step S806, and it is determined that loading is not performed.
[0073] In the following, a machine control device implementing the above-mentioned machine control method will be further described. Figure 9 is a block diagram illustrating a machine control device according to an embodiment of the present disclosure. The machine control device 900 can be implemented in various ways by hardware alone, by software alone, or by a combination thereof, and the present disclosure is not limited to any one of them.
[0074] As shown in Figure 9 , the machine control device 900 includes a warm-up state determination unit 901, an available loading port number determination unit 902, a loading mode determination unit 903, and a loading control unit 904. The warm-up state determination unit 901 is configured to determine the warm-up state corresponding to at least one chamber in the machine; the available loading port number determination unit 902 is configured to determine the number of available loading ports of the machine; the loading mode determination unit 903 is configured to determine the predetermined loading mode based on at least the warm-up state, the number of available loading ports, and the handling time of the work-in-process sheet handled to the machine; and the loading control unit 904 is configured to correspond the warm-up sheet and / or the work-in-process sheet to the available loading port according to the predetermined loading mode to load into the corresponding chamber.
[0075] Further, the loading mode determination unit 903 is configured to determine to select the first loading mode or the second loading mode according to the warm-up state, the number of available loading ports, and the handling time; in the first loading mode, the first warm-up sheet and the first sheet to be processed corresponding to the same first chamber are corresponded to different first available loading port and second available loading port, so as to sequentially load the first warm-up sheet and the first sheet to be processed into the first chamber; in the second loading mode, the second warm-up sheet and the second sheet to be processed corresponding to the same second chamber are corresponded to the same third available loading port, so as to sequentially load the second warm-up sheet and the second sheet to be processed into the second chamber.
[0076] Further, the first loading mode includes a first double-loading port loading mode and a first multi-loading port loading mode; wherein, in the first double-loading port loading mode, the first warm-up sheet and the first sheet to be processed corresponding to the same first chamber are corresponded to different first available loading port and second available loading port in the case that warm-up is only performed on the first chamber; in the first multi-loading port loading mode, the first warm-up sheet and the first sheet to be processed corresponding to the same first chamber are corresponded to different available loading ports, and at least one warm-up sheet corresponding to at least one other chamber is corresponded to other available loading ports in the case that warm-up is performed on the first chamber and at least one other chamber; and / or, the second loading mode includes a second single-loading port loading mode and a second double-loading port loading mode; wherein, in the second single-loading port loading mode, the second warm-up sheet and the second sheet to be processed corresponding to the same second chamber are corresponded to the same third available loading port in the case that warm-up is only performed on the second chamber; in the second double-loading port loading mode, the second warm-up sheet and the second sheet to be processed corresponding to the same second chamber are corresponded to the same third available loading port, and at least one warm-up sheet corresponding to at least one other chamber is corresponded to other available loading ports in the case that warm-up is performed on the second chamber and at least one other chamber.
[0077] Figure 10 is a hardware block diagram illustrating an electronic device according to an embodiment of the present disclosure. The electronic device 1000 includes a processor 1001 and a memory 1002. The processor 1001 and the memory 1002 are connected to each other through a bus 1003.
[0078] The memory 1002 is configured to store computer readable instructions. The memory 1002 can be implemented by any type of volatile or non-volatile storage devices or a combination thereof. The volatile memory may, for example, include a random access memory (RAM), a cache, or the like. The non-volatile memory may, for example, include a read-only memory (ROM), a hard disk, a flash memory, an optical disk, a magnetic disk, or the like.
[0079] The processor 1001 is configured to execute the computer readable instructions, so that the electronic device 1000 performs the machine control method as above.
[0080] Figure 11 This is a schematic diagram illustrating a computer program product according to an embodiment of the present disclosure. Figure 11 As shown, the computer program product 1100 according to an embodiment of this disclosure includes a computer program 1101. When the computer program 1101 is run by a processor, it executes the machine control method described with reference to the above figures. The computer program product 1100 includes, but is not limited to, volatile memory and / or non-volatile memory. Volatile memory may include, for example, random access memory (RAM) and / or cache memory. Non-volatile memory may include, for example, read-only memory (ROM), hard disk, flash memory, optical disk, magnetic disk, etc. Furthermore, the computer program product 1100 also includes the computer program itself.
[0081] The above description, with reference to the accompanying drawings, outlines a machine control method, apparatus, machine, electronic device, and computer program product according to embodiments of the present disclosure. By comprehensively considering the warm-up state, transport time, and the number of available loading ports, an appropriate loading mode is determined, thereby ensuring that the workpiece to be processed is promptly loaded into the corresponding chamber after warm-up. Furthermore, even when the number of available loading ports is less than the number of chambers, the loading operation is still performed, ensuring that the workpiece to be processed after warm-up can still be promptly loaded into the corresponding chamber. This avoids unnecessary repeated warm-up, reduces queuing time for workpieces, improves machine utilization and work efficiency, and reduces product defect rates.
[0082] Those skilled in the art will recognize that the units and algorithm steps of the various examples described in conjunction with the embodiments disclosed herein can be implemented in electronic hardware, or a combination of computer software and electronic hardware. Whether these functions are implemented in hardware or software depends on the specific application and design constraints of the technical solution. Those skilled in the art can use different methods to implement the described functions for each specific application, but such implementation should not be considered beyond the scope of this disclosure.
[0083] The basic principles of this disclosure have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this disclosure are merely examples and not limitations, and should not be considered as essential features of each embodiment of this disclosure. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not limit the scope of this disclosure to the necessity of employing the aforementioned specific details for implementation.
[0084] The block diagrams of devices, apparatuses, devices, and systems disclosed herein are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.
[0085] Additionally, as used herein, the “or” used in a list of items beginning with “at least one” indicates a separate list, such that a list of, for example, “at least one of A, B, or C” means A or B or C, or AB or AC or BC, or ABC (i.e., A and B and C). Furthermore, the word “exemplary” does not imply that the described example is preferred or better than other examples.
[0086] It should also be noted that in the systems and methods of this disclosure, the components or steps can be decomposed and / or recombined. These decompositions and / or recombinations should be considered as equivalent solutions to this disclosure.
[0087] Various changes, substitutions, and modifications can be made to the technology herein without departing from the teachings defined by the appended claims. Furthermore, the scope of the claims of this disclosure is not limited to the specific aspects of the processes, machines, manufactures, events, means, methods, and actions described above. Currently existing or later-developed processes, machines, manufactures, events, means, methods, or actions that perform substantially the same function or achieve substantially the same result as the corresponding aspects herein can be utilized. Therefore, the appended claims include such processes, machines, manufactures, events, means, methods, or actions within their scope.
[0088] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this disclosure. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of this disclosure. Therefore, this disclosure is not intended to be limited to the aspects shown herein, but rather to be carried out within the widest scope consistent with the principles and novel features disclosed herein.
[0089] The above description has been given for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of this disclosure to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations therein.
Claims
1. A machine control method, characterized by, The method comprises: determining a warm-up state of at least one chamber in the machine; determining a number of available loading ports of the machine; determining a predetermined loading mode based at least on the warm-up state, the number of available loading ports, and a handling time of a to-be-processed wafer to be handled to the machine; and corresponding the warm-up wafer and / or the to-be-processed wafer to the available loading ports according to the predetermined loading mode to load the corresponding chamber.
2. The machine control method of claim 1, wherein, The predetermined loading mode comprises at least a first loading mode and a second loading mode; in the first loading mode, corresponding a first warm-up wafer and a first to-be-processed wafer corresponding to a same first chamber to different first available loading port and second available loading port to sequentially load the first warm-up wafer and the first to-be-processed wafer to the first chamber; in the second loading mode, corresponding a second warm-up wafer and a second to-be-processed wafer corresponding to a same second chamber to a same third available loading port to sequentially load the second warm-up wafer and the second to-be-processed wafer to the second chamber.
3. The stage control method according to claim 2, wherein The first loading mode further comprises a first double-loading-port loading mode and a first multi-loading-port loading mode, the first double-loading-port loading mode is used for corresponding the first warm-up wafer and the first to-be-processed wafer corresponding to the same first chamber to the different first available loading port and the second available loading port in case of performing warm-up on the same first chamber; the first multi-loading-port loading mode is used for allocating different available loading ports for different first chambers and corresponding the first warm-up wafer and the first to-be-processed wafer corresponding to the same first chamber to the different available loading ports in case of performing warm-up on different first chambers.
4. The stage control method according to claim 3, wherein The second loading mode further comprises a second single-loading-port loading mode and a second double-loading-port loading mode, the second single-loading-port loading mode is used for corresponding the second warm-up wafer and the second to-be-processed wafer corresponding to the same second chamber to the same third available loading port in case of performing warm-up on the same second chamber; the second double-loading-port loading mode is used for allocating different available loading ports for different second chambers and corresponding the second warm-up wafer and the second to-be-processed wafer corresponding to the same second chamber to the same third available loading port in case of performing warm-up on different second chambers.
5. The machine control method of claim 4, wherein, The determining the predetermined loading mode based at least on the warm-up state, the number of available loading ports, and the handling time of the machine comprises: in case that the warm-up state indicates that only a single to-be-warmed-up chamber needs to perform warm-up, judging a size of an idle time of the to-be-warmed-up chamber and the handling time. in a case that the idleable time is greater than the carrying time, further determining whether the number of available loading ports is greater than or equal to 1, and in a case that the number of available loading ports is greater than 1, determining the first double-loading-port loading mode as the predetermined loading mode, in a case that the number of available loading ports is equal to 1, determining the second single-loading-port loading mode as the predetermined loading mode, and in a case that the number of available loading ports is equal to 0, determining not to perform loading; in a case that the idleable time is less than the carrying time, further determining whether the number of available loading ports is greater than or equal to 2, and in a case that the number of available loading ports is greater than or equal to 2, determining the first double-loading-port loading mode as the predetermined loading mode, and in a case that the number of available loading ports is less than 2, determining not to perform loading.
6. The machine control method of claim 4, wherein, The determination of the predetermined loading mode based on at least the warm-up state, the number of available loading ports, and the carrying time of the machine includes: in a case that the warm-up state indicates that the first chamber to be warmed up and the second chamber to be warmed up need to perform warm-up, determining a first idleable time of the first chamber to be warmed up and a second idleable time of the second chamber to be warmed up relative to the carrying time; in a case that the first idleable time or the second idleable time is less than or equal to the carrying time, further determining whether the number of available loading ports is greater than or equal to 3, in a case that the number of available loading ports is greater than or equal to 3, determining the first multi-loading-port loading mode as the predetermined loading mode, and in a case that the number of available loading ports is less than 3, determining not to perform loading; in a case that twice the carrying time is greater than the first idleable time and the second idleable time, and the first idleable time and the second idleable time are greater than the carrying time, further determining whether the number of available loading ports is greater than or equal to 2, in a case that the number of available loading ports is greater than 2, determining the first multi-loading-port loading mode as the predetermined loading mode, in a case that the number of available loading ports is equal to 2, determining the second double-loading-port loading mode as the predetermined loading mode, and in a case that the number of available loading ports is less than 2, determining not to perform loading; in a case that the first idleable time is greater than three times the carrying time, and the second idleable time is greater than the carrying time, further determining whether the number of available loading ports is greater than or equal to 1, in a case that the number of available loading ports is greater than 2, determining the first multi-loading-port loading mode as the predetermined loading mode, in a case that the number of available loading ports is equal to 2, determining the second double-loading-port loading mode as the predetermined loading mode, in a case that the number of available loading ports is equal to 1, determining the second single-loading-port loading mode as the predetermined loading mode, and in a case that the number of available loading ports is equal to 0, determining not to perform loading.
7. A machine control device, characterized by comprising: The machine control device includes: The warm-up status determination unit is configured to determine the warm-up status of at least one chamber within the machine tool; A unit for determining the number of available loading ports is configured to determine the number of available loading ports of the machine tool; The loading mode determination unit is configured to determine a predetermined loading mode based at least on the warm-up state, the number of available loading ports, and the transport time for the workpiece to be processed to be transported to the machine; and, The loading control unit is configured to map the warm-up sheet and / or the sheet to be processed to the available loading port according to the predetermined loading mode, so as to load the corresponding chamber.
8. The stage control device according to claim 7, wherein The loading mode determination unit is used to determine whether to select a first loading mode or a second loading mode based on the warm-up status, the number of available loading ports, and the transport time. In the first loading mode, the first warming element and the first piece to be processed, which correspond to the same first chamber, are assigned to different first available loading ports and second available loading ports, so as to load the first warming element and the first piece to be processed into the first chamber in sequence; In the second loading mode, the second warming plate and the second piece to be processed, which correspond to the same second chamber, are mapped to the same third available loading port so that the second warming plate and the second piece to be processed are loaded into the second chamber in sequence.
9. The stage control device according to claim 8, wherein The first loading mode includes a first dual-loading-port loading mode and a first multi-loading-port loading mode; wherein, the first dual-loading-port loading mode is used to assign the first warming element and the first piece to be processed corresponding to the same first chamber to different first available loading ports and second available loading ports when warming up the same first chamber; the first multi-loading-port loading mode is used to assign different available loading ports to different first chambers when warming up different first chambers, and to assign the first warming element and the first piece to be processed corresponding to the same first chamber to different available loading ports; And / or, The second loading mode includes a second single loading port loading mode and a second dual loading port loading mode; wherein, the second single loading port loading mode is used to assign the second warming plate and the second piece to be processed corresponding to the same second chamber to the same third available loading port when warming up the same second chamber; the second dual loading port loading mode is used to assign different available loading ports to different second chambers when warming up different second chambers, and assign the second warming plate and the second piece to be processed corresponding to the same second chamber to the same third available loading port.
10. A machine, characterized in that, The machine includes: At least one chamber for performing at least one process on the wafer to be processed; At least one loading port for loading the warming element and / or the element to be processed into the corresponding chamber; and The machine control device of any one of claims 7-9, wherein the machine control device is configured to determine a warm-up state of the at least one chamber and a number of available load ports, determine a predetermined load pattern based on at least the warm-up state, the number of available load ports, and a handling time for the pieces to be processed to be handled to the machine, and map the warm pieces and / or the pieces to be processed to the available load ports according to the predetermined load pattern for loading into the corresponding chambers.