Gripping device and exposure machine

Abstract

The invention discloses a gripping device and an exposure machine, and belongs to the technical field of exposure. The grabbing device comprises a support, a grabbing mechanism, a driving mechanism and a control mechanism. The grabbing mechanism comprises a guide rail, a plurality of suction cup frames, a plurality of suction cup assemblies, a telescopic assembly and an adjusting assembly. The guide rail is connected with the support, the sucker frames are slidably arranged on the guide rail, each sucker frame is provided with a sucker assembly connected with the control mechanism, the telescopic assembly is connected with the sucker frames, and the adjusting assembly is connected with one sucker frame. During grabbing, the suction cup frames connected with the adjusting assemblies are driven to move through the adjusting assemblies, and the distance between the adjacent suction cup frames can be synchronously adjusted through the telescopic assemblies. After the adjustment is in place, the driving mechanism drives the suction cup assembly to move towards the to-be-exposed object through the driving support, and the suction cup assembly makes contact with the to-be-exposed object and grabs the to-be-exposed object under the control of the control mechanism. The grabbing device not only can be suitable for grabbing objects with different sizes, but also can ensure that only one object is grabbed at a time.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of exposure technology, and in particular to a grabbing device capable of being applied to different sizes of objects and an exposure machine with the grabbing device. BACKGROUND

[0002] In the field of exposure technology, a grabbing device is a core device for realizing plate material transportation. At present, a conventional grabbing device mainly adopts the following structure: taking an aluminum profile or a machined part as a frame main body, integrating a vacuum generator, an air pipe, a suction cup and a fixing seat and the like components. However, the currently adopted grabbing device usually has the following defects:

[0003] (1) In actual production, the specifications and sizes of exposure plates are diversified, and the suction cup assembly with fixed spacing cannot be flexibly adapted to plates of different sizes, resulting in limited application range of the equipment and difficulty in meeting the diversified use requirements of customers;

[0004] (2) The surface precision of the exposure plate is strict, and it is required to avoid scratching and uniform stress, and the fixed structure is easy to cause damage to the plate due to uneven stress distribution;

[0005] (3) Electrostatic adsorption phenomenon is easy to occur between plates, and the situation of grabbing multiple plates at one time often occurs, which directly interferes with the normal operation of the exposure equipment, destroys the production rhythm, and affects the production efficiency and product quality.

[0006] Therefore, there is an urgent need for a grabbing device that can avoid the above defects.

[0007] The information disclosed in this BACKGROUND section is only for the purpose of increasing the understanding of the background of the present application and should not be regarded as an acknowledgment or any form of suggestion that this information forms prior art that is publicly known. SUMMARY

[0008] The purpose of the present application is to provide a grabbing device which not only can be applied to grabbing objects of different sizes, but also can ensure grabbing only one object at a time.

[0009] To achieve the above purpose, the embodiments of the present application provide a grabbing device, comprising:

[0010] a support;

[0011] At least one grabbing mechanism, comprising a guide rail, a plurality of suction cup racks, a plurality of suction cup assemblies, an extension assembly and an adjusting assembly, the guide rail is connected with the support, a plurality of the suction cup racks are slidingly arranged on the guide rail and are movable along the length direction of the guide rail, at least one suction cup assembly is arranged on each of the suction cup racks, the extension assembly comprises a plurality of linkage groups connected in series along the extension direction, each linkage group comprises two pivotally connected linkages, adjacent linkage groups form a variable rhombus structure, the pivot points of the plurality of linkage groups are connected with a suction cup rack, the adjusting assembly is connected with a suction cup rack, the adjusting assembly can drive the connected suction cup rack to move, so as to adjust the distance between adjacent suction cup racks through the extension assembly and keep the suction cup rack fixed relative to the guide rail after moving to the position.

[0012] A driving mechanism connected with the support and configured to drive the support to drive the grabbing mechanism to grab or release the object to be exposed.

[0013] In one or more embodiments of the present application, the adjusting assembly comprises

[0014] A stroke member connected with the guide rail and arranged along the length direction of the guide rail;

[0015] An adjusting member comprising a holding portion and a screw rod connected with the holding portion;

[0016] A pressing member provided with a through hole for the screw rod to pass through;

[0017] Wherein, the stroke member is located between the pressing member and the suction cup rack, the screw rod passes through the through hole of the pressing member and is threadedly connected with the suction cup rack, the holding portion can drive the screw rod to rotate, the holding portion moves to the direction of the stroke member along with the rotation of the screw rod and presses the stroke member through the pressing member, so that the stroke member is clamped and fixed between the pressing member and the suction cup rack.

[0018] In one or more embodiments of the present application, the grabbing device further comprises a position detection assembly arranged on the suction cup rack, the position detection assembly comprises

[0019] A mounting seat connected with the suction cup rack;

[0020] A detection rod movably arranged in the mounting seat and partially extending out of the mounting seat, the detection rod contacts the object to be exposed behind the suction cup assembly;

[0021] A resilient member arranged in the mounting seat and cooperating with the detection rod, configured to drive the detection rod to reset;

[0022] A sensor arranged in the mounting seat and configured to be triggered and output a control signal after the detection rod moves to the position.

[0023] In one or more embodiments of the present application, the mounting seat is provided with a limiting piece for limiting the elastic piece, the limiting piece is provided with a through hole for the detection rod to pass through, one end of the elastic piece abuts against the limiting piece, and the opposite end abuts against the detection rod.

[0024] In one or more embodiments of the present application, at least part of the suction cup assembly comprises a gas cylinder and a suction cup connected to the gas cylinder, wherein,

[0025] The gas cylinder is configured to control the suction cup to quickly go back and forth at a preset time interval to form a jitter after the suction cup grasps an object to be exposed.

[0026] In one or more embodiments of the present application, the grabbing device further comprises an ion generating mechanism arranged close to the grabbing mechanism, and the ion generating mechanism is configured to deliver ion wind to the direction of the suction cup assembly.

[0027] In one or more embodiments of the present application, the plurality of link sets comprise a first link set and a last link set at both ends, and at least one intermediate link set between the first link set and the last link set, the end portions of two links in the first link set and the last link set are pivotally connected to form a V-shaped structure, the middle portions of two links in the intermediate link set are pivotally connected to form an X-shaped structure, and the pivot points of the first link set, the last link set and each intermediate link set are connected with a suction cup holder respectively.

[0028] In one or more embodiments of the present application, the suction cup holder is arranged in a direction perpendicular to the length direction of the guide rail, and at least one position-adjustable suction cup assembly is arranged on the suction cup holder located on both sides of the guide rail.

[0029] In one or more embodiments of the present application, a long strip-shaped waist-shaped hole is arranged on the suction cup holder, and the position of the suction cup assembly is adjustable through the long strip-shaped waist-shaped hole.

[0030] In one or more embodiments of the present application, the suction cup holder comprises a main support and a secondary support for mounting the suction cup assembly, the main support is slidingly arranged on the guide rail, one secondary support is arranged on each main support located on both sides of the guide rail, and the long strip-shaped waist-shaped hole is arranged on the secondary support.

[0031] In one or more embodiments of the present application, the grabbing device comprises two grabbing mechanisms, the two grabbing mechanisms are arranged side by side, and the guide rails in the two grabbing mechanisms are arranged in parallel and spaced apart from each other.

[0032] Embodiments of the present application also provide an exposure machine comprising the grabbing device described above.

[0033] Compared with the prior art, the grabbing device according to the embodiment of the application can adapt to grabbing of different sizes of the to-be-exposed objects (especially the flexible substrates) by flexibly adjusting the spacing between the suction cups, and has a wider application range. Moreover, the ion blowing and cylinder shaking double measures are adopted when grabbing the to-be-exposed objects, so that the electrostatic adsorption problem between the to-be-exposed objects is completely solved, and the production interruption and rhythm disorder caused by manual intervention are avoided. BRIEF DESCRIPTION OF DRAWINGS

[0034] Figure 1 is a perspective view of a grabbing device according to an embodiment of the application;

[0035] Figure 2 is a top view of the grabbing device in FIG. 1; Figure 1

[0036] Figure 3 is a bottom view of the grabbing device in FIG. 1; Figure 1

[0037] Figure 4 is a sectional view along M-M of the grabbing device in FIG. 1; Figure 2

[0038] Figure 5 is an enlarged schematic view of the adjusting assembly part of the grabbing device in FIG. 1; Figure 1

[0039] Figure 6 is an enlarged schematic view of part A of the grabbing device in FIG. 1. Figure 4

[0040] MAIN REFERENCE NUMERALS EXPLANATION:

[0041] 10 - support, 20 - grabbing mechanism, 21 - guide rail, 22 - suction cup holder, 22a - waist-shaped hole, 221 - main support, 222 - auxiliary support, 23 - suction cup assembly, 231 - suction cup, 232 - air cylinder, 24 - telescopic assembly, 25 - adjusting assembly, 251 - stroke piece, 252 - adjusting piece, 252a - holding part, 252b - screw rod, 253 - pressing piece, 30 - driving mechanism, 40 - vacuum generator, 50 - electromagnetic valve, 60 - vacuum filter, 70 - pressure gauge, 80 - ion generating mechanism, 90 - in-place detection assembly, 91 - mounting seat, 92 - detection rod, 93 - elastic piece, 94 - sensor, 95 - limiting piece, L - link set, L1 - link, La - first link set, Lb - last link set, Lc - intermediate link set, P - fixed plate. DETAILED DESCRIPTION

[0042] The specific embodiments of the application are described in detail below with reference to the accompanying drawings, but it should be understood that the protection scope of the application is not limited by the specific embodiments.

[0043] ​​​​​Unless otherwise clearly indicated, throughout the specification and claims, the term "including" or variations such as "contain" or "comprise" will be understood to be inclusive in a manner similar to the term "comprising" as "including" and "comprising" are not intended to be limiting.

[0044] As Figures 1 to 4 shown, a grabbing device applied to a laser direct imaging exposure machine according to a preferred embodiment of the present application is mounted on a frame (not shown) of the exposure machine. The grabbing device provided by the present application can adapt to different sizes of the to-be-exposed objects, that is, at least the spacing between adjacent suction disc racks 22 can be adjusted according to actual needs, and then the spacing between the suction discs 231 can be accurately adjusted, effectively solving the problem that the conventional grabbing device is difficult to adapt to different sizes of the to-be-exposed objects, and expanding the application range. In the embodiment, the to-be-exposed object is preferably a substrate of a flexible printed circuit board, which is flexible and in the form of a sheet.

[0045] At the same time, the grabbing device disclosed by the present application also integrates the function of eliminating electrostatic adsorption between the substrates, which can ensure that only one substrate is grabbed at a time when the substrate is grabbed, avoid equipment downtime and manual intervention caused by electrostatic adsorption, effectively guarantee the continuity of the production rhythm, and ensure the stable production.

[0046] Specifically, as Figure 1 shown, the grabbing device provided by the present application includes a support 10, at least one grabbing mechanism 20, a driving mechanism 30, and a control mechanism. Among them,

[0047] The support 10 is a supporting structural member, which can be used to mount components such as the grabbing mechanism 20. The support 10 can be mounted on the above-mentioned exposure machine frame (not shown). The grabbing mechanism 20 is configured to grab the to-be-exposed object, such as the substrate applied to the flexible printed circuit board, which includes a guide rail 21, a plurality of suction disc racks 22, a plurality of suction disc assemblies 23, a telescopic assembly 24, and an adjusting assembly 25.

[0048] The guide rail 21 is a long strip-shaped structure, which is fixedly connected with the support 10 and extends along a predetermined direction, as Figure 1 shown, the guide rail 21 extends along the X-axis direction.

[0049] The plurality of suction disc racks 22 are all mounted on the guide rail 21 and can move along the length direction of the guide rail 21 relative to the guide rail 21, and the suction disc rack 22 is configured to mount the suction disc assembly 23. At least one suction disc assembly 23 is mounted on each suction disc rack 22, and the suction disc assembly 23 is configured to grab or release the to-be-exposed object under the control of the control mechanism. The suction disc assembly 23 is adopted to realize the grabbing of the to-be-exposed object, and the surface of the to-be-exposed object can be avoided to be damaged.

[0050] As Figure 2 and 3As shown, the telescopic assembly 24 is configured to adjust the distance between two adjacent chuck holders 22, so as to adjust the distance between the chuck assemblies 23. Specifically, the telescopic assembly 24 comprises a plurality of linkage sets L connected in series along the telescopic direction, where the telescopic direction is the length direction of the guide rail 21. Each linkage set L comprises two pivotally connected linkages L1. After the adjacent linkage sets L are connected, a variable shape diamond structure is formed. Among the plurality of linkage sets L, the pivotally connected points formed by the two linkages L1 are fixedly connected with a chuck holder 22. In this way, the telescopic assembly 24 can adjust the distance between two adjacent chuck holders 22 through telescopic action, and after adjustment, the distance between two adjacent chuck holders 22 is the same. Since the distance between adjacent chuck holders 22 is uniform, the stress point distribution of the workpiece during grabbing is more balanced, thereby avoiding problems such as workpiece deformation or falling caused by local overload.

[0051] The adjustment assembly 25 is connected with a chuck holder 22. The adjustment assembly 25 can move the chuck holder 22 connected therewith, so as to adjust the distance between adjacent chuck holders 22 through the telescopic assembly 24 and keep the chuck holder 22 fixed relative to the guide rail 21 after moving into position.

[0052] The driving mechanism 30 is connected with the bracket 10 and is configured to drive the bracket 10 to move, so as to drive the grabbing mechanism 20 to move along a preset direction. Figure 1 As shown, the driving mechanism 30 drives the bracket 10 to move along the Z-axis direction, so as to drive the grabbing mechanism 20 to move along the Z-axis direction. Here, the driving mechanism 30 is preferably a pneumatic cylinder.

[0053] The control mechanism is connected with the chuck assembly 23 and is configured to control the chuck assembly 23, so as to control the grabbing mechanism 20 to grab or release the workpiece to be exposed. Figure 1 As shown, the driving mechanism 30 can drive the bracket 10 to move along the Z-axis direction, and after the grabbing mechanism 20 moves into position, the control mechanism further controls the grabbing mechanism 20 to grab or release the workpiece to be exposed. Figure 1 As shown, the control mechanism here includes but is not limited to a vacuum generator 40 and a solenoid valve 50. The vacuum generator 40 is configured to control the chuck assembly 23 to generate negative pressure, so that the chuck assembly 23 can suck the workpiece to be exposed. The solenoid valve 50 is electrically connected with the vacuum generator 40, so as to control whether the vacuum generator 40 works. The vacuum generator 40 and the solenoid valve 50 are preferably integrated with the bracket 10.

[0054] In actual implementation, according to actual working condition requirements, the distance between two adjacent suction disc racks 22 can be adjusted by driving the suction disc rack 22 connected with the adjusting assembly 25 to move, and then adjusting the distance between two adjacent suction disc racks 22 through the telescopic assembly 24. When the suction disc rack 22 is adjusted to the position, the driving mechanism 30 drives the support 10 to move towards the direction of the object to be exposed, and the support 10 further drives the suction disc assembly 23 in the grabbing mechanism 20 to move towards the direction of the object to be exposed. The suction disc assembly 23 contacts the object to be exposed, and the object to be exposed is grabbed under the control of the control mechanism.

[0055] In the embodiment, as shown in Figure 1 , the grabbing device includes two grabbing mechanisms 20, and the two grabbing mechanisms 20 are arranged side by side, and the two guide rails 21 in the two grabbing mechanisms 20 are arranged in parallel and spaced apart from each other. By arranging two grabbing mechanisms 20, each grabbing mechanism 20 is used to grab one piece of object to be exposed, so that two pieces of objects can be exposed at the same time, thereby improving the production efficiency of small pieces of objects.

[0056] As shown in Figures 1 to 4 , the suction disc rack 22 is preferably in a long strip shape, and the extension direction of the suction disc rack 22 is preferably perpendicular to the direction of the guide rail 21. By designing the suction disc rack 22 in a long strip shape, a plurality of suction disc assemblies 23 can be mounted on the suction disc rack 22, which is beneficial to the stability of grabbing the object to be exposed. As shown in Figure 1 , in the embodiment, one suction disc assembly 23 is arranged on each side of the guide rail 21 on the suction disc rack 22.

[0057] Further, the positions of the suction disc assemblies 23 on the suction disc rack 22 can be adjusted according to actual requirements to adapt to objects to be exposed of different sizes. Specifically, the suction disc rack 22 is provided with a long strip-shaped waist-shaped hole 22a, and the suction disc assemblies 23 are adjusted in position through the long strip-shaped waist-shaped hole 22a. In the embodiment, one suction disc assembly 23 is arranged on each side of the guide rail 21 on the suction disc rack 22, and the two suction disc assemblies 23 can be adjusted in position on the suction disc rack 22 through the corresponding long strip-shaped waist-shaped holes 22a, as shown in Figure 1 , the distance between the two suction disc assemblies 23 in the Y-axis direction can be increased or decreased through the long strip-shaped waist-shaped hole 22a to adapt to objects to be exposed of different sizes.

[0058] As shown in Figure 1 and Figure 5As shown, the chuck frame 22 comprises a main frame 221 and at least one sub-frame 222. The main frame 221 is slidingly arranged on the guide rail 21, such as a sliding block part is arranged on the main frame 221 to cooperate with the guide rail 21, so that the main frame 221 can slide relative to the guide rail 21. The sub-frame 222 is mounted on the main frame 221, and the sub-frame 222 is used to mount the chuck assembly 23. In the embodiment, the long strip waist-shaped hole 22a is arranged on the sub-frame 222, so that the position of the chuck assembly 23 on the chuck frame 22 can be adjusted. Of course, in other embodiments, the position of the sub-frame 222 relative to the main frame 221 can also be adjusted to achieve the adjustable position of the chuck assembly 23 on the chuck frame 22.

[0059] In the embodiment, one sub-frame 222 is assembled on each side of the main frame 221 of the guide rail 21, and one chuck assembly 23 is mounted on each sub-frame 222. The distance between the two chuck assemblies 23 can be accurately adjusted by the long strip waist-shaped hole 22a on the corresponding sub-frame 222.

[0060] As shown in Figure 1 and Figure 5 Among the chuck assemblies 23 arranged on the chuck frame 22, at least part of the chuck assemblies 23 comprise a chuck 231, which can be in communication with the vacuum generator 40 in the control mechanism. The vacuum generator 40 can perform vacuumizing operation to make the chuck 231 generate negative pressure to suck the object to be exposed.

[0061] Further, a vacuum filter 60 can also be arranged on the gas path between the vacuum generator 40 and the chuck 231, that is, the vacuum generator 40 communicates with the chuck 231 in the chuck assembly 23 through the vacuum filter 60. The vacuum filter 60 can be used to filter impurities to avoid damage to the vacuum generator 40. Of course, a pressure gauge 70 can also be arranged on the gas path between the vacuum generator 40 and the chuck 231 to monitor the pressure in the gas path. The vacuum filter 60 and the pressure gauge 70 are also preferably arranged on the frame 10.

[0062] Further, since the flexible substrate is easy to be electrostatically adsorbed, when a plurality of flexible substrates are stacked together, the chuck assembly 23 may Figure 1 and Figure 4As shown, at least some of the plurality of suction cup assemblies 23 comprise a cylinder 232 and a suction cup 231 connected to the cylinder 232, and the cylinder 232 can control the suction cup 231 to move back and forth at a preset time interval after the suction cup 231 grasps the object to be exposed to form a jitter. The two flexible substrates can be separated by jitter. At the same time, the gripping device can also include an ion generating mechanism 80 provided on the fixed plate P, which is arranged close to the gripping mechanism 20, and is used to generate ion wind to blow to the flexible substrate, so that the ion wind quickly covers the flexible substrate, achieves the purpose of neutralizing static electricity and eliminating static adsorption, so that the two flexible substrates are finally separated in the jitter process. The ion generating mechanism 80 here is preferably an ion blower.

[0063] Further, as Figure 3 As shown, the plurality of link assemblies L include a first link assembly La and a last link assembly Lb at both ends, and at least one intermediate link assembly Lc between the first link assembly La and the last link assembly Lb. Among them, in the first link assembly La, the ends of two links L1 are pivotally connected to form a V-shaped structure. In the last link assembly Lb, the ends of two links L1 are pivotally connected to also form a V-shaped structure. In the intermediate link assembly Lc, the middle parts of two links L1 are pivotally connected to form an X-shaped structure. Adjacent link assemblies L are enclosed to form a variable diamond-shaped structure. The pivot points of the first link assembly La, the last link assembly Lb and each intermediate link assembly Lc are respectively connected with a corresponding suction cup frame 22. The telescopic assembly 24 adopts the above structure, which can expand to connect more suction cup frames 22, and significantly enhance the stability of the object to be exposed.

[0064] As Figure 5As shown, the adjusting assembly 25 comprises a stroke piece 251, an adjusting piece 252 and a pressing piece 253. The stroke piece 251 is fixedly connected with the guide rail 21 and extends along the length direction of the guide rail 21. The adjusting piece 252 comprises a holding part 252a and a screw rod 252b. The holding part 252a is connected with the screw rod 252b and can drive the screw rod 252b to rotate. The holding part 252a is preferably a handle. The stroke piece 251 is between the pressing piece 253 and the suction disc holder 22. The screw rod 252b passes through the pressing piece 253 and is threadedly connected with the suction disc holder 22. In the specific implementation, the holding part 252a drives the screw rod 252b to rotate, and the screw rod 252b drives the pressing piece 253 to move towards the stroke piece 251 along with the rotation of the screw rod 252b. After the rotation is completed, the pressing piece 253 presses the stroke piece 251, so that the stroke piece 251 clamps the suction disc holder 22, that is, the stroke piece 251 is fixed between the pressing piece 253 and the suction disc holder 22. In this way, the suction disc holder 22 is positioned with the guide rail 21. When it is necessary to adjust the distance between two adjacent suction disc holders 22, the holding part 252a is reversely rotated to drive the screw rod 252b to reversely rotate. The pressing piece 253 no longer presses the stroke piece 251. At this time, the corresponding suction disc holder 22 can be dragged to move relative to the guide rail 21 by dragging the adjusting piece 252. The distance between the adjacent suction disc holders 22 is adjusted by the telescopic assembly 24 during the movement of the suction disc holder 22.

[0065] As shown in the figure, Figure 6 The grabbing device further comprises a position detection assembly 90 to assist the suction disc assembly 23 to better suck the object to be exposed. Specifically, the position detection assembly 90 comprises a mounting seat 91, a detection rod 92, an elastic piece 93 and a sensor 94. The mounting seat 91 is mounted on the suction disc holder 22 and can be mounted on the auxiliary support 222. The detection rod 92 is mounted on the mounting seat 91 and partially extends out of the mounting seat 91. The detection rod 92 can move relative to the mounting seat 91 along the axis direction of the mounting seat 91. The elastic piece 93 is mounted on the mounting seat 91 and cooperates with the detection rod 92, such as being sleeved outside the detection rod 92 and abutting against the detection rod 92. The elastic piece 93 can drive the detection rod 92 to reset. The sensor 94 is mounted on the mounting seat 91 and can cooperate with the detection rod 92. After being triggered, the sensor 94 outputs a control signal to the outside. That is, when the detection rod 92 moves to the position, the sensor 94 is triggered, and the sensor 94 further outputs a control signal to the outside, such as conveying the control signal to the electromagnetic valve 50 to control the vacuum generator 40 to work.

[0066] In this embodiment, the detection rod 92 contacts the object to be exposed later than the suction cup 231, that is, the suction cup 231 contacts the object to be exposed first, and the detection rod 92 contacts the object to be exposed later. Taking the object to be exposed as a flexible substrate as an example, when the suction cup 231 continuously acts after contacting the flexible substrate, the detection rod 92 touches the surface of the flexible substrate, and the reaction force pushes the detection rod 92 to displace upward. When the top end of the detection rod 92 moves to the detection area of the sensor 94, the sensor 94 determines that the contact position is appropriate and feeds back a control signal to the external electromagnetic valve 50; the electromagnetic valve 50 immediately drives the vacuum generator 40 to start vacuumizing, so that the suction cup 231 generates negative pressure to suck the flexible substrate. The whole process takes the displacement feedback of the detection rod 92 as the core trigger point, and forms a closed-loop control through the signal linkage of the sensor 94, the electromagnetic valve 50 and the vacuum generator 40, to ensure the reliability and position accuracy of grabbing.

[0067] Further, as shown in Figure 6 The mounting seat 91 is further provided with a limiting piece 95 for limiting the elastic piece 93. The limiting piece 95 is provided with a through hole for the detection rod 92 to pass through, one end of the elastic piece 93 abuts against the limiting piece 95, and the opposite end abuts against the detection rod 92. When the in-place detection is performed, the detection rod 92 moves along the axial direction under the reaction force of the object to be exposed and passes through the limiting piece 95 to the detection area of the sensor 94 through the through hole, so as to trigger the sensor 94. The elastic piece 93 is preferably a spring, and in specific implementation, the spring is sleeved outside the detection rod 92, one end of the spring abuts against the limiting piece 95, and the opposite end abuts against the detection rod 92, such as a limiting convex ring or a limiting convex block provided on the outer peripheral surface of the detection rod 92, so as to realize the abutment between the spring and the detection rod 92.

[0068] The grabbing device provided by the application can flexibly adjust the distance between the suction cups, can adapt to the grabbing of objects to be exposed of different sizes, and has a wider application range. Moreover, the double measures of cylinder shaking and ion blowing completely solve the problem of electrostatic adsorption between the objects to be exposed, and avoid production interruption and rhythm disorder caused by manual intervention. Overall, the grabbing device not only expands the application range, but also ensures production continuity and stability, and significantly improves production efficiency.

[0069] The embodiment of the application further provides an exposure machine comprising the grabbing device. Since the exposure machine integrates the grabbing device, different sizes of objects can be flexibly adapted and grabbed by the device when the object to be exposed is exposed, so that the application scene and range of the exposure machine are effectively widened. At the same time, the grabbing device has the ability of single-object grabbing at a time, can avoid the problem of multiple-object overlapping grabbing, so as to ensure the continuity and stability of the production process, and further significantly improve the overall production efficiency.

[0070] The foregoing description of specific exemplary embodiments of the application has been presented for the purposes of illustration and description. It is not intended to be exhaustive or to limit the application to the precise forms disclosed, and obviously many modifications and variations are possible in light of the above teaching. It is intended that the scope of the application be limited not with this detailed description, but rather by the claims appended hereto.

Claims

1. A gripping device, characterized in that The application relates to a grabbing device for exposing objects, comprising: a support; at least one grabbing mechanism, comprising a guide rail connected with the support, a plurality of suction disc racks slidingly arranged on the guide rail and movable along the length direction of the guide rail, a plurality of suction disc assemblies arranged on each of the suction disc racks, an extension assembly comprising a plurality of serially connected link groups, each of the link groups comprising two pivotally connected links, and a plurality of adjacent link groups forming a variable rhombus structure, and an adjusting assembly connected with one of the suction disc racks and capable of moving the suction disc rack to adjust the distance between adjacent suction disc racks through the extension assembly and fixing the suction disc rack relative to the guide rail after the suction disc rack is moved to a position. a driving mechanism connected with the support and configured to drive the support to drive the grabbing mechanism to move along a preset direction; a control mechanism connected with the suction disc assemblies and configured to control the suction disc assemblies to control the grabbing mechanism to grab or release objects to be exposed.

2. The gripping device of claim 1, wherein The adjusting assembly comprises a stroke member connected with the guide rail and arranged along the length direction of the guide rail; an adjusting member comprising a holding portion and a screw rod connected with the holding portion; a pressing member provided with a through hole through which the screw rod passes; wherein the stroke member is located between the pressing member and the suction disc rack, the screw rod passes through the through hole of the pressing member and is threadedly connected with the suction disc rack, the holding portion can drive the screw rod to rotate, the holding portion moves to the stroke member direction along with the rotation of the screw rod and presses the stroke member through the pressing member, and the stroke member is clamped and fixed between the pressing member and the suction disc rack.

3. The gripping device of claim 1, wherein The grabbing device further comprises a position detection assembly arranged on the suction disc rack, the position detection assembly comprising a mounting seat connected with the suction disc rack; a detection rod movably arranged on the mounting seat and partially extending out of the mounting seat, the detection rod contacts the objects to be exposed later than the suction disc assemblies; a resilient member arranged on the mounting seat and matched with the detection rod and configured to drive the detection rod to reset; a sensor arranged on the mounting seat and configured to be triggered and output a control signal after the detection rod is moved to a position.

4. The gripping device of claim 3, wherein The mounting seat is provided with a limiting member limiting the resilient member, the limiting member is provided with a through hole through which the detection rod passes, one end of the resilient member abuts against the limiting member, and the opposite end abuts against the detection rod.

5. The gripping device of claim 1, wherein At least part of the suction disc assemblies comprises a cylinder and a suction disc connected with the cylinder, wherein the cylinder is configured to control the suction disc to rapidly reciprocate at a preset time interval to form a shaking motion after the suction disc grabs the objects to be exposed.

6. The gripping device of claim 5, wherein The grabbing device further comprises an ion generating mechanism arranged close to the grabbing mechanism, the ion generating mechanism is configured to deliver ion wind to the direction of the suction disc assemblies.

7. The gripping device of claim 1, wherein The plurality of linkage groups comprise a first linkage group and a last linkage group at two ends, and at least one intermediate linkage group between the first linkage group and the last linkage group, the two ends of two linkages in the first linkage group and the last linkage group are pivotally connected to form a V-shaped structure, the middle parts of two linkages in the intermediate linkage group are pivotally connected to form an X-shaped structure, and the pivot points of the first linkage group, the last linkage group and each intermediate linkage group are respectively connected with a suction disc holder.

8. The gripping device of claim 1, wherein The suction disc holder extends along a direction perpendicular to the length direction of the guide rail, and at least one position-adjustable suction disc assembly is arranged on the suction disc holder on both sides of the guide rail.

9. The gripping device of claim 8, wherein The suction disc holder is provided with an elongated waist-shaped hole, and the suction disc assembly is position-adjustable through the elongated waist-shaped hole.

10. The gripping device of claim 9, wherein The suction disc holder comprises a main support and a secondary support for mounting the suction disc assembly, the main support is slidingly arranged on the guide rail, one secondary support is arranged on each main support on both sides of the guide rail, and the elongated waist-shaped hole is arranged on the secondary support.

11. The gripping device of claim 1, wherein The grabbing device comprises two grabbing mechanisms, the two grabbing mechanisms are arranged side by side, and the guide rails in the two grabbing mechanisms are arranged in parallel and spaced apart from each other.

12. An exposure machine characterized by comprising: The grabbing device comprises the grabbing device according to any one of claims 1-11. The grabbing device comprises the grabbing device according to any one of claims 1-11.

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