Gas supply system

Abstract

A gas supply system of the present invention is equipped with a gas tank device having a pneumatic valve that supplies a process gas to a process chamber, and a solenoid valve that opens or closes the pneumatic valve by supplying or stopping a flow of a valve actuation gas to the pneumatic valve; and a gas supply control device for controlling the actuation of the solenoid valve. In addition, the gas supply control device includes a main controller that controls actuation of the solenoid valve during normal operation; and a sub-controller sensing an abnormal state of the main controller, and controlling actuation of the solenoid valve in place of the main controller if an abnormality is sensed.

Description

[0001] This is a divisional application of patent application number 201880039077.6 filed on June 15, 2018, entitled “Gas supply system” by the present applicant, the contents of the parent application are incorporated herein by reference in their entirety. Cross Reference to Related Applications

[0002] This application claims priority to KR application number: 10-2017-0075558 filed on June 15, 2017, which is incorporated herein by reference. TECHNICAL FIELD

[0003] The present invention relates to a gas supply system and method for supplying process gas to a semiconductor facility. BACKGROUND

[0004] Generally, a semiconductor is manufactured by repeatedly performing a plurality of processes including photolithography, etching, and thin film formation. Most of such manufacturing processes are performed by a process gas within a closed process chamber. For this purpose, a gas supply device is used in various industrial facilities, such as a semiconductor manufacturing apparatus.

[0005] The gas supply system includes: a storage tank in which a high-pressure gas is stored, which can be a gas cylinder; a gas supply control device connected to the storage tank through a connection pipe; and the gas supply control device controls a flow of the gas flowing from the storage tank so as to supply the gas through a process line.

[0006] The gas supply control device can control a process gas flowing into a process chamber by opening and closing a pneumatic valve. In this case, the pneumatic valve can be turned on (opened) / turned off (closed) by a solenoid valve.

[0007] In a semiconductor manufacturing process, continuous supply of gas is essential. If a problem (i.e., a failure of the control device) occurs, such as an abnormal state of the gas supply control device, for example, a main power interruption resulting in a solenoid valve failure, a process defect can occur due to a sudden interruption of the process gas supply when the pneumatic valve is closed.

[0008] KR Patent No. 10-0347227 filed by the present applicant proposes a method that maintains a valve in an open state by sensing a failure in the control device and generating a separate process signal, thereby avoiding a sudden stop of the gas supply as described above.

[0009] However, in the said patent, although the pneumatic valve can be maintained open when a failure in the control device is sensed, it is not possible to activate a heater capable of preventing liquefaction of the process gas. In addition, the said patent has a disadvantage in that, since an analog signal cannot be received, it is not possible to know the pressure of the process gas and the weight of the gas cylinder, etc.

[0010] In addition, in the patent, when a failure occurs in the control device, communication between the gas supply control device and the central control room becomes impossible. As a result, gas monitoring by the central control room becomes impossible, and the central control room cannot know the accurate state of the gas supply system. SUMMARY

[0011] Therefore, since the present invention is designed to solve the above problems in the prior art, the object of the present invention is to provide a gas supply system which controls gas supply so that gas supply is not interrupted even when there is a failure in the control device; senses process gas pressure and gas tank weight, etc.; and enables activation and control of a heater.

[0012] Another object of the present invention is to provide a gas supply system so that when a failure is sensed in the control device, pressure, weight, and heater information are transmitted to a gas monitoring system so that the state of the gas supply device can be accurately known.

[0013] To achieve the above object, the gas supply system of the present invention is equipped with a gas tank device having one or more pneumatic valves which control supply of process gas to a process chamber or one or more process chambers, the pneumatic valve(s) being located in a supply line which fluidly connects a storage tank or gas tank to the process chamber(s), and a solenoid valve (or one or more solenoid valves) which opens or closes the pneumatic valve (or the pneumatic valve(s), respectively) by supplying or stopping flow of valve actuating gas to the respective pneumatic valve (or the pneumatic valve(s)), and a gas supply control device which controls actuation of the solenoid valve (or the solenoid valve(s)). In addition, the gas supply control device includes a main controller which controls actuation of the solenoid valve (or the solenoid valve(s)) during normal operation, and a sub-controller which senses abnormal state of the main controller, and, when an abnormality is sensed, controls actuation of the solenoid valve (or the solenoid valve(s)) in place of the main controller. Here, the main controller and the sub-controller share digital sensing information through a digital interface, and / or the main controller and the sub-controller share analog sensing information through an analog interface.

[0014] In the gas supply system of the present invention, the digital sensing information can include one or more of: flame sensing information input from a flame sensing optical sensor, high temperature sensing information input from a high temperature sensor, and gas leakage sensing information input from a gas leakage sensor; the flame sensing optical sensor, the high temperature sensor, and the gas leakage sensor being installed in the gas tank device. (The term "high temperature sensor" is used to distinguish from another type or types of temperature sensor(s) which measure temperature of process gas or a heater which can be used in the gas tank device, although the types of sensor can be the same or different.) In the gas supply system of the present invention, the main controller controls the activation of the heater (or one or more heaters) based on heating temperature sensing information from the other one or more temperature sensors (referred to as "process gas temperature sensors") during normal operation to prevent liquefaction of the process gas, while when the abnormal sensing occurs, the sub-controller controls the activation of the heater (or one or more heaters) based on heating temperature sensing information from the one or more process gas temperature sensors to prevent liquefaction of the process gas.

[0015] In one embodiment of the gas supply system of the present invention, the analog sensing information can include one or more or two or more of: gas supply pressure sensing information input from a pressure sensor (or one or more pressure sensors), gas tank weight sensing information input from a weight sensor (or one or more weight sensors), and process gas temperature sensing information input from one or more process gas temperature sensors; the pressure sensor (or one or more pressure sensors) and the weight sensor (or one or more weight sensors) are installed in the gas tank device.

[0016] In alternative embodiments, all or some of the above listed sensors can be analog, or all or some of the above listed sensors can be digital, in any combination. For example, in alternative embodiments, the one or more weight sensors, the one or more process gas temperature sensors, and the one or more pressure sensors can be digital, and / or the one or more flame sensing optical sensors, the one or more high temperature sensors, and the one or more gas leak sensors can be analog. Or, if desired, a mix of analog and digital pressure sensors, a mix of analog and digital weight sensors, and a mix of analog and digital temperature sensors can be used, as well as for other types of sensors, etc.

[0017] In the gas supply system of the present invention, the gas supply control device further includes: a monitoring system that selectively communicates with the main controller and the sub-controller to continuously monitor the process gas supply state; and a changeover switch that interconnects the main controller and the monitoring system through a communication line in normal operation, and interconnects the sub-controller and the monitoring system through the communication line when an abnormality is detected.

[0018] The present invention also provides a method for performing the following steps using the gas supply system of the present invention: sharing digital or analog or digital and analog sensing information via a digital or analog or digital and analog interface between the main controller and the sub-controller; and switching control of the gas supply system to the sub-controller (which senses an abnormal state of the main controller); wherein the sub-controller controls the actuation of the one or more solenoid valves in place of the main controller. The method may further include the step of maintaining the valve position of the one or more solenoid valves when switching control to the sub-controller.

[0019] The advantages of this invention are that it controls the gas supply so that the gas supply is not interrupted even when the control device is in a faulty state; it senses the processing gas pressure and the weight of the gas tank, etc.; and it can operate and control the heater (or one or more heaters).

[0020] The advantage of this invention is that when a fault is detected in the control device, pressure, weight, and heater information and / or temperature information are transmitted to the gas monitoring system, enabling accurate understanding of the condition of the gas supply device, control and continued supply of the processing gas, or, if sensing information indicates an unsafe level of any sensing information transmitted to the sub-controller, the system can be shut down under the control of the sub-controller.

[0021] This invention also includes the following items: 1. A gas supply system equipped with a gas cylinder device, the gas cylinder device having one or more pneumatic valves for controlling the supply of process gas to a processing chamber, and one or more solenoid valves, the solenoid valves opening or closing the pneumatic valves by supplying or stopping the flow of actuated gas to the pneumatic valves; and A gas supply control device that controls the operation of the one or more solenoid valves; wherein the gas supply control device includes: The main controller, which controls the actuation of the one or more solenoid valves during normal operation, and A sub-controller that senses an abnormal state of the main controller and, upon sensing an abnormality, controls the actuation of one or more solenoid valves in place of the main controller; The main controller and the sub-controller share digital or analog or digital and analog sensing information through a digital or analog or digital and analog interface.

[0022] 2. The gas supply system according to Project 1, wherein the main controller and the sub-controller share analog sensing information through an analog interface.

[0023] 3. The gas supply system according to Project 1, wherein the main controller and the sub-controller share digital sensing information through a digital interface.

[0024] 4. The gas supply system according to Project 3, further wherein the main controller and the sub-controller share analog sensing information through an analog interface.

[0025] 5. The gas supply system according to any one of the foregoing items, The digital sensing information includes at least one selected from the following: Flame sensing information input from the flame sensing optical sensor, High temperature sensing information input from the high temperature sensor, and Gas leak sensing information input from the gas leak sensor; The flame sensing optical sensor, the high temperature sensor, and the gas leak sensor are installed in the gas tank device.

[0026] 6. The gas supply system according to any one of items 1-4, wherein the analog sensing information includes at least one selected from: Gas supply pressure sensing information input from one or more pressure sensors, Gas cylinder weight sensing information input from one or more weight sensors, and Process gas temperature information input from one or more process gas temperature sensors; And if present, the one or more pressure sensors, one or more temperature sensors, and one or more weight sensors are installed in the gas tank device.

[0027] 7. A gas supply system according to any one of items 1-4, wherein the gas tank device further comprises one or more heaters and one or more process gas temperature sensors, and the main controller controls the activation of the one or more heaters based on heating temperature sensing information from the one or more process gas temperature sensors to prevent liquefaction of the process gas. Furthermore, when the abnormality is detected, the sub-controller controls the activation of one or more heaters based on the heating temperature sensing information to prevent the liquefaction of the processed gas.

[0028] 8. A gas supply system according to any one of items 1-4, wherein the digital sensing information comprises at least two selected from: Flame sensing information input from the flame sensing optical sensor, High temperature sensing information input from the high temperature sensor, and Gas leak sensing information input from the gas leak sensor.

[0029] 9. A gas supply system according to any one of items 1-4, wherein the analog sensing information comprises at least two selected from: Gas supply pressure sensing information input from one or more pressure sensors, Gas cylinder weight sensing information input from one or more weight sensors, and Processing gas temperature information input from one or more processing gas temperature sensors.

[0030] 10. The gas supply system according to any one of items 1-4, wherein the gas supply control device further comprises: A monitoring system, which selectively communicates with the main controller and sub-controllers to continuously monitor the status of the processed gas supply, and A transfer switch interconnects the main controller and the monitoring system via the communication line during normal operation, and interconnects the sub-controller and the monitoring system via the communication line when an anomaly is detected.

[0031] 11. The gas supply system according to Project 10, wherein the gas supply control device further includes a monitoring system that communicates with a central control room via electrical communication between the monitoring system and the control room.

[0032] 12. A method for controlling a gas supply system, the gas supply system comprising: one or more pneumatic valves for controlling the supply of process gas to a processing chamber, and one or more solenoid valves, the solenoid valves opening or closing each of the pneumatic valves by supplying or stopping the flow of actuated gas to the respective pneumatic valve; and A gas supply control device that controls the operation of the one or more solenoid valves; wherein the gas supply control device further includes: A main controller, which controls the actuation of the one or more solenoid valves during normal operation, and a sub-controller, the method comprising the following steps: Digital or analog or digital and analog sensing information is shared through a digital or analog or digital and analog interface between the main controller and the sub-controller; and Control of the gas supply system is switched to a sub-controller that senses an abnormal state of the main controller; wherein the sub-controller controls the actuation of the one or more solenoid valves in place of the main controller.

[0033] 13. The method according to item 12, the method further comprising the following steps: When switching control to the sub-controller, maintain the valve position of the one or more solenoid valves.

[0034] 14. The method according to item 12 or 13, further comprising the following steps: In response to processing gas temperature information, one or more heaters are activated via the sub-controller.

[0035] 15. The method according to item 12 or 13, further comprising the following steps: The status of the gas supply is reported to the central control room.

[0036] 16. The method according to item 12 or 13, further comprising the following steps: When sensor information indicates that an unsafe level of any sensor information has been detected, an emergency notification is sent to the central control room.

[0037] 17. The method according to item 12 or 13, further comprising the following steps: When any sensing information indicates that an unsafe level has been detected, the gas supply device is shut off. Attached Figure Description

[0038] Figure 1 A schematic construction of a gas supply system according to the present invention is shown.

[0039] Figure 2 schematically shown Figure 1 The internal structure of the gas supply control device.

[0040] Figure 3 The interconnection between the master controller and the sub-controllers via a digital interface is illustrated schematically.

[0041] Figure 4 The interconnection between the master controller and the sub-controllers via an analog interface is schematically shown.

[0042] Figure 5 The schematic diagram illustrates the configuration of the connection between the main controller and sub-controllers of the gas supply control device and the gas monitoring system.

[0043] Figure 6 An embodiment of the gas cylinder device of the present invention is illustrated schematically.

[0044] Figure 7 The schematic diagram illustrates the configuration of the connection between the main controller and sub-controllers of the gas supply control device and the solenoid valves and heaters. Detailed Implementation

[0045] Preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings.

[0046] Figure 1A schematic construction of a gas supply system according to the present invention is shown.

[0047] Reference Figure 1 The gas supply system according to the present invention includes a gas supply control device 100 and a gas tank device 200. Figure 2 An illustration shows one embodiment of the gas control device 100. Figure 6 A diagram of a gas cylinder assembly 200 is shown. Note that some aspects of the gas cylinder assembly are not shown and are not described herein.

[0048] The gas cylinder device 200 supplies process gas to one or more processing chambers 300. The gas cylinder device 200 has one or more gas cylinders for storing the process gas. In one embodiment, as... Figure 6 As shown, the gas cylinder unit 200 alternately operates two gas cylinders 602A and 602B to supply process gas to the processing chamber 300 via conduit 675. Alternatingly, side A operates with process gas supplied by cylinder 602A, while side B's cylinder 602B is not operating. Once side A's cylinder 602A is empty, side B of the gas cylinder unit 200 operates, while side A is not. If sub-controller 120 takes over control, it knows which cylinder 602A or 602B, as well as the solenoid valves and pneumatic valves, are operating at the time of its takeover, and sub-controller 120 continues to operate the gas cylinder unit 200 on that side A or B. It should be understood in the following description that process gas flows through side A or side B of the gas cylinder unit 200. When gas flows on side A, elements marked with "A" are used. Alternatively, when gas flows on side B, elements marked with "B" are used. Both side A and side B include conduit 675 and other elements not marked with "A" or "B". Processing chamber 300 uses processing gases to process semiconductor substrates through semiconductor manufacturing processes.

[0049] The gas tank unit 200 regulates the process gas stored in the gas tanks to a specified pressure and flow rate corresponding to the process formulation (via optional regulators 605A, 605B) and supplies the process gas to the processing chamber 300. For this purpose, the gas tank unit 200 may be equipped with one or more pneumatic valves 604A1, 604A2, 604A3, 604B1, 604B2, and 604B3, each pneumatic valve being controlled by a solenoid valve (not shown) connected to a pressurized gas source (not shown). The pneumatic valves 604A1, 604A2, 604A3, 604B1, 604B2, and 604B3 control the supply of process gas to the processing chamber 300 via pipes 622A or 622B respectively connected to the respective gas tanks 602A and 602B, and pipe 675 connected to pipes 622A and 622B. As shown, pipe 675 exits the gas tank unit and delivers the process gas to the processing chamber 300. Each solenoid valve, in fluid communication with a pressurized gas source, is used to open or close the corresponding pneumatic valve by supplying or blocking the supply of valve actuating gas to the pneumatic valve. The actuating gas is typically pressurized air (clean, dry air) supplied through pipes (not shown) connected to a pressurized air source (not shown) in the manufacturing facility (machine room); however, alternative gases, such as pressurized nitrogen, may be used.

[0050] The gas tank unit 200 may be equipped with a power supply unit located in the main controller 100 that provides main power; and multiple sensors located in the gas tank unit 200. The sensors include multiple (one or more) pressure sensors 306A1 and 306B1, which measure the pressure of the processed gas in pipelines 622A and 622B downstream of regulators 605A and 605B, respectively, and / or pressure sensors 306A2 and 306B2, which measure the pressure of the processed gas at gas tanks 602A and 602B, respectively; and multiple (one or more) weight sensors 307A and 307B, which measure the weight of gas tanks 602A and 602B, respectively. Additionally, the sensors include a flame-sensing optical sensor (UVIR) 301 for sensing flames, a gas leak sensor 303 for sensing gas leaks, and a high-temperature sensor 302. The high-temperature sensor senses abnormal temperatures inside the system; if a specified temperature is reached, it provides an alarm signal to the gas supply control unit 100. If a specific preset temperature (e.g., 85 degrees Celsius) is reached or exceeded, the high-temperature sensor can be actuated in the event of a fire. The flame sensor, gas leak sensor, and temperature sensor (if activated) also issue an alarm and / or cause the gas supply to shut down. Additionally, the sensors may include an EMO sensor (not shown) that senses the pressing of an emergency button to notify of an emergency from the outside; and a power sensor (not shown) that senses the main power status. In one embodiment, the power sensor is located at the interface between the sub-controller and the main controller. If the main controller experiences a power loss, the sub-controller will detect the power loss when the main controller experiences a power loss (and shuts down). When the main controller experiences a power loss, the sub-controller will take over control of the gas cylinder unit, even if only limited control.

[0051] The gas supply control device 100, in conjunction with the sensors, monitors the operational status of the gas tank unit 200 in real time. If the main power supply is interrupted, it controls the operation of the gas tank unit 200 to ensure a continuous supply of process gas until the current processing in the processing chamber 300 is completed. For example, the gas supply control device 100 uses a sub-controller to power the sensors of the gas tank unit 200 until the current processing in the processing chamber 300 continues to be completed by controlling the operation of one or more solenoid valves to continue supplying process gas to the processing chamber 300 via one or more pneumatic valves. When open, the solenoid valves supply pressurized air to open the corresponding pneumatic valves. The pressurized air (during supply) opens the pneumatic valves. Preferably, the process conditions and the amount of process gas supplied to the processing chamber in the event of a main power interruption are programmed into the gas control device before processing begins. The process continues under the control of the sub-controller until the pre-programmed amount of process gas is supplied to the processing chamber. If the main controller is still not functioning when the processing is completed, the sub-controller can issue an alarm and shut down the gas tank unit.

[0052] Figure 2 It shows Figure 1 The internal structure of the gas supply control device.

[0053] Reference Figure 2 The gas supply control device 100 includes a main controller 110 that operates under normal conditions and a sub-controller 120 that operates under abnormal conditions, as well as a digital and / or analog interface 402.

[0054] The main controller 110 controls one or more solenoid valves S604A1, S604A2, S604A3, S604B1, S604B2, and S604B3. Figure 6 Not shown in the image. Figure 7 Independent actuation (shown in the diagram), the solenoid valve is controlled at [value] during normal operation. Figure 6 Each of one or more corresponding pneumatic valves, namely 604A1, 604A2, 604A3, 604B1, 604B2, and 604B3, is shown in the figure.

[0055] Sub-controller 120 senses an abnormal state of the main controller, and when an abnormality is sensed, it takes over from the main controller 110 to control the actuation of one or more solenoid valves, which control the flow of... Figure 6 The actuating gas flow of one or more pneumatic valves shown as 604A1, 604A2, 604A3, 604B1, 604B2, 604B3.

[0056] The main controller 110 and the sub-controller 120 are as follows Figure 3 As shown, they share digital sensing information with each other through digital interface 403, and as... Figure 4 The analog sensing information is shared via analog interface 404.

[0057] For example, the PLC (Programmable Logic Controller) digital output of the main controller 110 and the digital input of the sub-controller 120 can be shared via digital interface 403. In this case, when an anomaly is detected in the main controller 110, the sub-controller 120 can control the actuation of one or more solenoid valves, which control the actuation gas flow to the corresponding pneumatic valves 604A1, 604A2, 604A3, 604B1, 604B2, and 604B3, thereby preventing interruption of the supply of process gas to the processing chamber 300. When an anomaly is sensed by the device controlled by the main controller 110, each solenoid valve remains in that position (open or closed) under the control of the sub-controller, regardless of its current position (open or closed), until the ongoing process is completed.

[0058] As another example, the digital inputs of the PLC (Programmable Logic Controller) and the digital outputs of the sub-controller 120 can be shared via digital interface 403. In this case, when an anomaly is detected in the main controller 110, the sub-controller 120 takes over from the main controller 110 to control the actuation of one or more solenoid valves (not shown), which in turn control pneumatic valves 604A1, 604A2, 604A3, 604B1, 604B2, 604B3 (e.g., Figure 6 As shown), the processed gas can continue to be supplied normally to the processing chamber 300. Additionally, when an anomaly is sensed in the main controller 110, the sub-controller 120 monitors the heating temperature measured by the temperature sensor 304 in place of the main controller 110. It controls the activation of one or more heaters 633A, 633B, 633C that are in contact with the respective gas tanks 602A, 602B and / or with the pipeline downstream of one or more gas tanks (preferably near the supply pipeline 675 leading from the gas tank assembly 200 to the processing chamber 300), thereby preventing liquefaction of the processed gas. If necessary, the heater 633C in contact with the pipeline 675 and / or the heater 633A or 633B in contact with the gas tank currently being supplied with gas are activated.

[0059] The main controller 110 and the sub-controller 120 share analog sensing information with each other through an analog interface. For example, when an anomaly is sensed in the main controller 110, the sub-controller 120 can continuously monitor one or more of the following in place of the main controller 110: the temperature from the processing gas temperature sensor 304, and / or the temperature from one or more pressure sensors 306A1, 306A2, 306B1, 306B2 (in... Figure 4 The gas supply pressure is shown as 306 in the diagram, and / or from 307A or 307B (in the diagram). Figure 4 The text only displays the weight of the gas cylinder (as shown in 307). It should be noted that although... Figure 6 Only one processing gas temperature sensor 304 is shown, but additional temperature sensors may be optionally installed in the gas tank assembly 200, communicating with the main controller and sub-controllers like temperature sensor 304. These additional temperature sensors may be located on lines 622A or 622B and / or gas tanks 602A, 602B.

[0060] Figure 3 The interconnection between the main controller and the sub-controller is shown via digital interface 403.

[0061] Reference Figure 3 Since the main controller 110 and the sub-controller 120 are interconnected via digital interface 403, they can share digital sensing information.

[0062] The digital sensing information may include flame sensing information input from the flame sensing optical sensor 301, high-temperature sensing information input from the high-temperature sensor 302, and gas leak sensing information input from the gas leak sensor 303. The flame sensing optical sensor 301, high-temperature sensor 302, and gas leak sensor 303 can be installed... Figure 6 The embodiment is schematically shown in the gas cylinder device 200. Each sensor can detect a pre-programmed level of unsafety, which causes the gas cylinder device to issue an alarm and / or shut down.

[0063] During normal operation, the main controller 110 can control the activation of one or more heaters 633A, 633B, 633C based on temperature sensing information from one or more temperature sensors (e.g., 304) to prevent liquefaction of the processed gas. Additionally, when an anomaly is detected, the sub-controller 120 can control the activation of one or more heaters 633A, 633B, 633C based on heating temperature sensing information from one or more temperature sensors (e.g., 304) to prevent liquefaction of the processed gas.

[0064] Figure 4 The interconnection between the main controller and the sub-controllers via an analog interface is shown.

[0065] Reference Figure 4 Since the main controller 110 and the sub-controller 120 are interconnected via an analog interface, they can share analog sensing information.

[0066] The analog sensing information may include gas supply pressure sensing information input from one or more temperature sensors 304, one or more pressure sensors 306A1, 306A2, 306B1, 306B2, and gas cylinder weight sensing information input from one or more weight sensors 307A, 307B. In this case, the pressure sensors and weight sensors may be installed as follows: Figure 6 The gas cylinder device shown.

[0067] Figure 5 The configuration of the connection between the main controller 110 and the sub-controller 120 of the gas supply control device and the gas monitoring system 130 is shown.

[0068] refer to Figure 5The gas supply control device 100 according to the invention may further include a monitoring system 130 and a changeover switch 140. Therefore, in the gas supply control device 100 according to the invention, when an abnormal state occurs in the main controller 110, the sub-controller 120 connected to the communication line 502 operates alternatively to ensure that the gas tank device continues to supply processing gas. The monitoring system 130 can continuously monitor the gas supply status and, through the sub-controller or the main controller, control one or more heaters 633A, 633B, 633C in the gas tank device 200 based on pressure (measured by one or more pressure sensors 306A1, 306A2 or 306B1, 306B2) and the weight of the gas tank (measured by one or more weight sensors 307A or 307B), and maintain the valve position (open or closed) of the solenoid valve, which in turn maintains the position of the corresponding pneumatic valve. "Gas supply status" or "processing gas supply status" refers to the actual temperature and pressure measured by sensors in the gas tank unit 200, and optionally the amount of processing gas flowing into and supplied to the processing chamber (this amount can be determined by time, flow rate, and / or changes in the weight of the gas tank). The processing gas supply status can be compared with pre-programmed temperature and / or pressure and / or flow rate, and the amount supplied can be determined thereby and / or for a particular process by changes in weight and / or the time it takes for the processing gas to flow into the processing chamber 300, and the gas supply unit can be controlled based on this information. In an alternative embodiment, the unit continues the process until it is manually shut down by a technician or the main controller resumes control.

[0069] Specifically, the monitoring system 130 selectively communicates with the main controller 110 and the sub-controller 120 to continuously monitor the processing gas supply status. In other words, during normal operation, the monitoring system 130 communicates with the main controller 110 via electrical communication line 501 to continuously monitor the processing gas supply status; however, during abnormal operation, it communicates with the sub-controller 120 via electrical communication line 502 to continuously monitor the processing gas supply status.

[0070] During normal operation, the transfer switch 140 interconnects the main controller 110 and the monitoring system 130 via communication line 501. Conversely, during abnormal operation, the transfer switch 140 interconnects the sub-controller 120 and the monitoring system 130 via communication line 502.

[0071] Figure 7In one embodiment, the main controller 110 and sub-controller 120 are interconnected via an electrical connection 701 with solenoid valves S604A1, S604A2, S604A3 or S604B1, S604B2, S604B3 and heaters 633C and 633A or 633C and 633B, and maintain a processed gas supply state until the pre-programmed process is completed or closed, or the main controller resumes control. Each solenoid valve controls a corresponding pneumatic valve 604A1, 604A2, 604A3, 604B1, 604B2, 604B3.

[0072] The present invention has the following effects.

[0073] First, process failures due to interruptions in the processing gas flow can be avoided from the outset, because even if the main controller fails, the processing gas supply can be continuously controlled by the sub-controller.

[0074] Secondly, the advantages of the present invention are that it can monitor gas pressure and / or the temperature of the processed gas and / or the weight of the gas tank, and can operate and control one or more heaters, even when the main controller fails.

[0075] Third, according to the present invention, even when there is a main controller failure, by switching to a gas monitoring system monitored from the central control room via electrical communication between the monitoring system and the control room (not shown), it is possible to continuously monitor one or more of the following: pressure, temperature of the processed gas, weight, heater information, etc., without communication failure; therefore, the present invention has the advantage of being able to accurately understand the status of the gas supply system.

[0076] From the above description, those skilled in the art will understand that the present invention can be modified and altered in various ways without changing its technical concept or essential characteristics. Therefore, the scope of the present invention should not be limited to the content described in the detailed description of the specification, but should be defined by the claims.

Claims

1. A gas supply system comprising: A gas cylinder device having one or more pneumatic valves for controlling the supply of processing gas to a processing chamber, and one or more solenoid valves that open or close the pneumatic valves by supplying or stopping the flow of valve-actuated gas to the pneumatic valves. and A gas supply control device that controls the operation of the one or more solenoid valves; The gas supply control device includes: A main controller that controls the actuation of the one or more solenoid valves during normal operation; A sub-controller senses an abnormal state of the main controller and, upon sensing an abnormality, takes over the actuation of the one or more solenoid valves from the main controller. The main controller and the sub-controller directly share digital sensing information with each other through a digital interface, and the main controller and the sub-controller also directly share analog sensing information with each other through an analog interface; Monitoring systems and communication lines; The monitoring system selectively communicates with the main controller and sub-controllers to continuously monitor the processing gas supply status; and A switching switch is used to interconnect the main controller with the monitoring system via the communication line under normal conditions, and to interconnect the sub-controller with the monitoring system via the communication line when an anomaly is detected, independent of the digital and analog interfaces between the main controller and the sub-controller.

2. The gas supply system according to claim 1, The digital sensing information includes at least one selected from the following: Flame sensing information input from the flame sensing optical sensor, High temperature sensing information input from the high temperature sensor, and Gas leak sensing information input from the gas leak sensor; The flame sensing optical sensor, the high temperature sensor, and the gas leak sensor are installed in the gas tank device.

3. The gas supply system according to claim 1, wherein the analog sensing information includes at least one selected from: Gas supply pressure sensing information input from one or more pressure sensors, Gas cylinder weight sensing information input from one or more weight sensors, and Process gas temperature information input from one or more process gas temperature sensors; And if present, the one or more pressure sensors, one or more temperature sensors, and one or more weight sensors are installed in the gas tank device.

4. The gas supply system of claim 1, wherein the gas tank device further comprises one or more heaters and one or more process gas temperature sensors, and the main controller controls the activation of the one or more heaters based on heating temperature sensing information from the one or more process gas temperature sensors to prevent liquefaction of the process gas, and wherein when the abnormal sensing occurs, the sub-controller controls the activation of the one or more heaters based on the heating temperature sensing information to prevent liquefaction of the process gas.

5. The gas supply system of claim 1, wherein the digital sensing information comprises at least two of the following: Flame sensing information input from the flame sensing optical sensor, High temperature sensing information input from the high temperature sensor, and Gas leak sensing information input from the gas leak sensor.

6. The gas supply system of claim 1, wherein the analog sensing information comprises at least two of the following: Gas supply pressure sensing information input from one or more pressure sensors, Gas cylinder weight sensing information input from one or more weight sensors, and Processing gas temperature information input from one or more processing gas temperature sensors.

7. The gas supply system according to claim 1, wherein the monitoring system communicates with the central control room via electrical communication between the monitoring system and the control room.

8. A method for controlling a gas supply system, the gas supply system comprising one or more pneumatic valves for controlling the supply of processing gas to a processing chamber, and one or more solenoid valves, the solenoid valves opening or closing the respective pneumatic valves by supplying or stopping the flow of valve-actuated gas to the respective pneumatic valves. And a gas supply control device, which controls the operation of the one or more solenoid valves; The gas supply control device further includes: A main controller that controls the actuation of the one or more solenoid valves during normal operation; A sub-controller senses an abnormal state of the main controller and, upon sensing an abnormality, takes over the actuation of the one or more solenoid valves from the main controller. The main controller and the sub-controller directly share digital sensing information with each other through a digital interface, and the main controller and the sub-controller also directly share analog sensing information with each other through an analog interface; Monitoring systems and communication lines; The monitoring system selectively communicates with the main controller and sub-controllers to continuously monitor the processing gas supply status; and A switching device is used to interconnect the main controller with the monitoring system via the communication line under normal conditions, and to interconnect the sub-controller with the monitoring system via the communication line when an anomaly is detected, independent of the digital and analog interfaces between the main controller and the sub-controller; The method includes the following steps: Digital, analog, or digital and analog sensing information is shared through digital, analog, or digital and analog interfaces between the main controller and the sub-controllers; and Control of the gas supply system is switched to a sub-controller that senses an abnormal state of the main controller; wherein the sub-controller controls the actuation of the one or more solenoid valves in place of the main controller.

9. The method according to claim 8, further comprising the following step: When switching control to the sub-controller, maintain the valve position of the one or more solenoid valves.

10. The method according to claim 8, further comprising the step of: In response to processing gas temperature information, one or more heaters are activated via the sub-controller.

11. The method according to claim 8, further comprising the step of: The status of the gas supply is reported to the central control room.

12. The method according to claim 8, further comprising the following step: When sensor information indicates that an unsafe level of any sensor information has been detected, an emergency notification is sent to the central control room.

13. The method according to claim 8, further comprising the following step: When any sensing information indicates that an unsafe level has been detected, the gas supply device is shut off.

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