Double-brace thick wire boron diffusion furnace

Abstract

A double-brace thick-wire boron diffusion furnace comprises a furnace body and further comprises furnace wires spirally extending in the length direction of the furnace body, an insulating assembly provided with a plurality of insulating parts, heat preservation cotton wrapping the surfaces of the furnace wires, and a double-brace fixing assembly arranged between the insulating assembly and the heat preservation cotton, the double-brace fixing assembly comprises a transverse brace penetrating through the multiple insulation assemblies and a vertical brace welded to the transverse brace and capable of penetrating into the heat preservation cotton. A double-brace fixing assembly is arranged, a transverse brace penetrates through a plurality of insulating assemblies to achieve overall positioning of an insulating part, a vertical brace is welded to the transverse brace and penetrates into heat preservation cotton, the insulating assemblies and the heat preservation cotton can be synchronously fixed, the problems of displacement of the insulating assemblies and falling of the heat preservation cotton caused by high temperature and vibration are effectively avoided, the spiral arrangement precision of furnace wires is guaranteed, and the service life of the furnace wires is prolonged. Temperature field uniformity in the furnace is maintained, and the risk of furnace wire short circuit is avoided.

Description

Technical Field

[0001] This invention relates to a double-strand coarse wire boron diffusion furnace. Background Technology

[0002] The boron diffusion furnace is a core piece of equipment for realizing the boron diffusion process in the semiconductor manufacturing field. The stability of the furnace wire layout, the reliability of the insulation components, and the fixing effect of the insulation cotton directly affect the uniformity of the process and the safety of equipment operation.

[0003] In existing boron diffusion furnaces, the furnace wires are mostly spirally arranged along the length of the furnace body. Insulation is achieved by separating adjacent furnace wires through insulating components, and the surface of the furnace wires is covered with insulating cotton to reduce heat loss.

[0004] However, the existing structure lacks a reliable connection and fixing structure between the insulation components and the insulation cotton. Long-term high-temperature operation of the equipment and the vibration of the furnace wire can easily cause the insulation components to shift or loosen, which can damage the accuracy of the furnace wire spiral layout, cause uneven temperature field inside the furnace, and even cause short circuit of the furnace wire. The insulation cotton is also prone to falling off and wrinkling due to lack of effective fixing, which reduces the insulation effect and increases energy consumption.

[0005] Meanwhile, the existing fixing method cannot meet the requirement of simultaneous fixing of insulation components and thermal insulation cotton, and the installation and maintenance are cumbersome, making it difficult to meet the requirements of efficient and stable production. There is an urgent need for a structural design that can simultaneously fix insulation components and thermal insulation cotton and ensure the stability of furnace wire layout. Summary of the Invention

[0006] The technical problem to be solved by the present invention is to provide a double-strand coarse wire boron diffusion furnace.

[0007] To solve the above-mentioned technical problems, the technical solution adopted by the present invention is: a double-stretcher coarse wire boron diffusion furnace, comprising a furnace body, and further comprising furnace wires spirally extending along the length direction of the furnace body, an insulating assembly having multiple insulating elements, and heat insulation cotton covering the surface of the furnace wires, wherein each of the insulating elements is respectively sandwiched between adjacent furnace wires, and further comprising a double-stretcher fixing assembly disposed between the insulating assembly and the heat insulation cotton, wherein the double-stretcher fixing assembly comprises a horizontal stretcher passing through the multiple insulating assemblies, and a vertical stretcher welded to the horizontal stretcher and capable of passing through the heat insulation cotton. By setting up a double-strut fixing assembly, the horizontal struts pass through multiple insulating components to achieve overall positioning of the insulating parts, while the vertical struts are welded to the horizontal struts and inserted into the insulation cotton, which can simultaneously fix the insulating components and insulation cotton, effectively avoiding the problems of insulation component displacement and insulation cotton detachment caused by high temperature and vibration, ensuring the accuracy of the furnace wire spiral layout, maintaining the uniformity of the temperature field inside the furnace, and eliminating the risk of furnace wire short circuit. The double-strut structure design takes into account the fixing needs of both, and is easy to install and disassemble, reducing the difficulty of equipment maintenance. The insulation cotton is reliably fixed, reducing heat loss, reducing energy consumption, and improving insulation stability. The overall structure enhances the reliability and stability of equipment operation, ensures the consistency of the boron diffusion process, and meets the needs of high-efficiency production.

[0008] In some embodiments, the insulation assembly includes a single horizontal tie bar insulator located in the middle and double horizontal tie bar insulators located on both sides of the single horizontal tie bar insulator. The single and double horizontal tie bar insulators are rationally arranged to adapt to different fixing requirements, taking into account both insulation separation and tie bar installation stability, making the overall structural layout more reasonable and improving the reliability of component connection.

[0009] In some embodiments, the single horizontal tie bar insulator includes an insulator body with two outwardly opening semicircular grooves on both sides. The insulator body also has horizontal tie bar through-holes penetrating both sides, with the length direction of the through-holes perpendicular to the center lines of the two semicircular grooves. The heating element can be secured within the two opposite semicircular grooves of adjacent insulator bodies. The semicircular grooves precisely engage the heating element, and the horizontal tie bar through-holes ensure smooth passage of the tie bar, achieving a stable assembly of the insulator, heating element, and tie bar, ensuring uniform spacing between adjacent heating elements, and improving insulation and fixation.

[0010] In some embodiments, the edge of the hole at one end of the horizontal tie bar protrudes outward to form a boss, while the edge of the hole at the other end is recessed inward to form a groove. The boss and the groove can be engaged. This engagement design enhances the tightness of the connection between adjacent insulating components, prevents displacement of insulating components at high temperatures, ensures the overall structural stability, and further maintains the accuracy of the furnace wire arrangement.

[0011] In some embodiments, a heat dissipation hole is further provided at the upper end of the insulating component body. The center line of the heat dissipation hole is perpendicular to the length direction of the through hole of the horizontal tie bar and the center lines of the two semicircular grooves. The upper heat dissipation hole accelerates the heat dissipation of the insulating component, reduces the impact of high temperature on the performance of the insulating component, extends the service life of the insulating component, and ensures the stability of the temperature field inside the furnace.

[0012] In some embodiments, the double horizontal tie bar insulation component also includes the insulation component body and a tie bar retainer welded to the upper part of the insulation component body. The tie bar retainer has an outwardly opening C-shaped groove, the opening of which faces laterally outward, and the length direction of the C-shaped groove is parallel to the length direction of the horizontal tie bar through hole. The C-shaped groove of the tie bar retainer provides a stable mounting position for the second horizontal tie bar, and the outward-facing opening facilitates assembly, improves the connection reliability between the double horizontal tie bar insulation component and the horizontal tie bar, and enhances structural strength.

[0013] In some embodiments, the insulation assembly includes two single horizontal tie bar insulators located in the middle and four double horizontal tie bar insulators located on either side of the single horizontal tie bar insulators. The horizontal tie bar perforations of the single and double horizontal tie bar insulators are aligned to form a first horizontal tie bar path for installing a complete first horizontal tie bar. The C-slot openings of the tie bar clips of adjacent double horizontal tie bar insulators are opposite, and the middle portions of all the C-slots are aligned to form a second horizontal tie bar path for installing a complete second horizontal tie bar. Two independent horizontal tie bar paths, with double fixing, enhance the overall structural stability and adapt to the stress requirements of different positions on the furnace body.

[0014] In some embodiments, the vertical tie bar is located above the two middle single horizontal tie bar insulators, and the vertical tie bar is vertically welded to the second horizontal tie bar. The vertical tie bar, vertically welded to the second horizontal tie bar and located above the middle single horizontal tie bar insulator, provides precise positioning and enhances the fixing effect, effectively distributing stress and reducing the risk of furnace wire sinking.

[0015] In some embodiments, vertical support bars are welded parallel to both sides of the vertical tie bar. An auxiliary tie bar is welded parallel to the top of the two single horizontal tie bar insulators above the second horizontal tie bar. The two ends of the auxiliary tie bar pass through the C-grooves of the tie bar clips of the two double horizontal tie bar insulators on both sides of the two single horizontal tie bar insulators. A blocking tie bar is welded parallel to both ends of the second horizontal tie bar, with its inner end abutting against the tie bar clip of the outermost double horizontal tie bar insulator. The design of the vertical support bars, auxiliary tie bars, and blocking tie bars significantly enhances the structural strength of the vertical and horizontal tie bars, preventing deformation or breakage of the tie bars during high-temperature and cooling processes, and improving the durability of the component.

[0016] In some embodiments, the insulation cotton is alumina insulation cotton, and the furnace wire, the vertical tie rod, and the horizontal tie rod are all made of powder metallurgy. Alumina insulation cotton has low shrinkage and high temperature resistance, reducing the gap between the furnace wire and the insulation cotton; the furnace wire and tie rod made of powder metallurgy material have high strength, good temperature resistance, and are not easily deformed, extending the service life of the equipment.

[0017] The scope of this invention is not limited to technical solutions formed by specific combinations of the above-described technical features, but also includes other technical solutions formed by arbitrary combinations of the above-described technical features or their equivalents. For example, technical solutions formed by substituting the above-described features with (but not limited to) technical features with similar functions disclosed in this application.

[0018] Due to the application of the above technical solutions, the present invention has the following advantages compared with the prior art: The present invention provides a double-strut coarse wire boron diffusion furnace, which, by setting a double-strut fixing component, achieves the overall positioning of the insulating components by having the horizontal strut pass through multiple insulating components, and the vertical strut is welded to the horizontal strut and inserted with insulation cotton, can simultaneously fix the insulating components and insulation cotton, effectively avoiding the problems of insulation component displacement and insulation cotton detachment caused by high temperature and vibration, ensuring the accuracy of the furnace wire spiral layout, maintaining the uniformity of the temperature field inside the furnace, and eliminating the risk of furnace wire short circuit; the double-strut structure design takes into account the fixing requirements of both, is convenient to install and disassemble, and reduces the difficulty of equipment maintenance; the insulation cotton is reliably fixed, reducing heat loss, reducing energy consumption, and improving insulation stability; the overall structure enhances the reliability and stability of equipment operation, ensures the consistency of the boron diffusion process, and meets the needs of high-efficiency production. Attached Figure Description

[0019] Appendix Figure 1 Schematic diagram of a double-strand coarse wire boron diffusion furnace; Appendix Figure 2 Side view of a double-strand coarse wire boron diffusion furnace; Appendix Figure 3 This is a schematic diagram of the furnace wire tie rod structure; Appendix Figure 4 This is a schematic diagram of an insulating component; Appendix Figure 5 This is a schematic diagram of a single horizontal tie bar insulation component; Appendix Figure 6 Schematic diagram of a double horizontal tie bar insulation component; The components include: 1. Furnace body; 2. Furnace wire; 3. Insulation components; 31. Single horizontal tie bar insulation component; 32. Double horizontal tie bar insulation component; 321. Tie bar clip; 322. C-shaped groove; 33. Insulation component body; 331. Semi-circular groove; 332. Horizontal tie bar perforation; 333. Boss; 334. Groove; 335. Heat dissipation hole; 4. Insulation cotton; 6. Horizontal tie bar; 61. First horizontal tie bar; 62. Second horizontal tie bar; 63. Auxiliary tie bar; 64. Blocking tie bar; 7. Vertical tie bar; 71. Vertical support bar. Detailed Implementation

[0020] like Figure 1-3 The illustrated double-strut coarse-wire boron diffusion furnace includes a furnace body 1, which serves as the supporting foundation for the entire equipment, providing stable installation space for all internal components and ensuring that the boron diffusion process is carried out in a closed and controlled environment. The diffusion furnace also includes heating wires 2 extending spirally along the length of the furnace body 1, an insulating assembly 3 with multiple insulating elements, and insulation cotton 4 covering the surface of the heating wires 2. Each insulating element is sandwiched between adjacent heating wires 2. Through the separation effect of the insulating elements, short-circuit problems caused by direct contact between adjacent heating wires 2 can be effectively avoided. Simultaneously, it provides precise positioning for the spiral arrangement of the heating wires 2, ensuring uniform spacing between the heating wires 2 and laying the foundation for a uniform temperature distribution within the furnace.

[0021] like Figure 3-4 As shown, the diffusion furnace also includes a double-strut fixing assembly disposed between the insulating components 3 and the insulation cotton 4. This fixing assembly is the core structure that ensures the long-term stable operation of the equipment. The double-strut fixing assembly includes a horizontal strut 6 that passes through multiple insulating components 3 and a vertical strut 7 welded to the horizontal strut 6 and able to penetrate into the insulation cotton 4. The horizontal strut 6 passes through multiple insulating components 3 laterally along the furnace body 1, realizing the overall series positioning of the insulating components and preventing the displacement of individual insulating components in the high-temperature environment. The vertical strut 7 is fixed to the horizontal strut 6 by welding, with high connection strength. Its outer end penetrates into the interior of the insulation cotton 4, forming an embedded fixation of the insulation cotton 4, preventing the insulation cotton 4 from falling off or wrinkling when the furnace wire 2 vibrates or the temperature changes. It can simultaneously realize the reliable fixation of the insulating components 3 and the insulation cotton 4, effectively solving the problems of insulation component displacement and insulation cotton falling off caused by the lack of effective connection in traditional structures. This ensures that the accuracy of the spiral layout of the furnace wire 2 is not affected, maintains the uniformity of the temperature field inside the furnace, and eliminates the risk of short circuit of the furnace wire 2 from the root.

[0022] Meanwhile, the double-strut structure design takes into account the fixing requirements of the insulation components and the insulation cotton. During installation, it is only necessary to pass the horizontal strut through the insulation components and the vertical strut through the insulation cotton and then weld them. The disassembly process also does not require complicated operations, which greatly reduces the maintenance difficulty of the equipment. The insulation cotton 4 is fixed by the embedded vertical strut 7, which keeps it in close contact with the furnace wire 2, reduces the heat loss path, reduces the energy consumption of the equipment, and improves the insulation stability. The overall structural design is reasonable, which significantly enhances the reliability and stability of the equipment operation, ensures the consistency of boron diffusion process parameters, and meets the needs of high-efficiency production in fields such as semiconductor manufacturing.

[0023] like Figure 4 As shown, the insulation assembly 3 includes a single horizontal tie bar insulator 31 located in the middle and double horizontal tie bar insulators 32 located on both sides of the single horizontal tie bar insulator 31. The single horizontal tie bar insulator 31 mainly undertakes the functions of insulation separation and basic fixation of the central furnace wire 2, while the double horizontal tie bar insulators 32, through additional tie bar installation structures, strengthen the fixation strength of the two side areas and adapt to the stress requirements of different positions of the furnace body. Figure 3 As shown, in this embodiment, multiple single horizontal tie bar insulating elements 31 are spaced apart between insulating components 3. Adjacent single horizontal tie bar insulating elements 31 are connected in series through horizontal tie bars 6 to form a continuous insulating positioning system, ensuring that the furnace wires 2 maintain a uniform spacing throughout the process, and further improving the consistency of the temperature field distribution.

[0024] like Figure 5As shown, the single horizontal tie bar insulation component 31 includes an insulation component body 33, which is made of high-temperature resistant insulating material and can maintain stable insulation performance and structural strength in the high-temperature environment of the boron diffusion process. Two outward-facing semi-circular grooves 331 are respectively opened on both sides of the insulation component body 33. The two semi-circular grooves 331 are symmetrically distributed, and their diameter is adapted to the diameter of the heating wire 2, ensuring that the heating wire 2 can be tightly engaged in the two opposite semi-circular grooves 331 of the two adjacent insulation component bodies 33, achieving precise positioning of the heating wire 2.

[0025] The insulating body 33 is also provided with horizontal tie rod through holes 332 that pass through both sides of the insulating body 33. The diameter of the horizontal tie rod through holes 332 matches the diameter of the horizontal tie rod 6. The length direction of the horizontal tie rod through holes 332 is perpendicular to the center line of the two semi-circular grooves 331, so that when the horizontal tie rod 6 passes through, it can form a fixed structure that intersects perpendicularly with the furnace wire 2, thereby improving the fixing stability.

[0026] The edges of the holes at one end of the horizontal tie bar perforation 332 protrude outward to form a boss 333, while the edges at the other end are recessed inward to form a groove 334. The dimensions of the boss 333 and the groove 334 are matched, allowing for precise engagement between the boss 333 and the groove 334 when two adjacent single horizontal tie bar insulating components 31 are joined. This engagement structure effectively reduces the gap between adjacent insulating components, preventing relative displacement of the insulating components at high temperatures, further ensuring the straightness and uniformity of the furnace wire 2 arrangement, while also enhancing the overall structural strength of the insulating assembly 3 and improving its vibration resistance.

[0027] The upper end of the insulating component body 33 is also provided with heat dissipation holes 335, which penetrate the upper and lower end faces of the insulating component body 33. The center line of the heat dissipation holes 335 is perpendicular to the length direction of the crossbar through hole 332 and the center lines of the two semicircular grooves 331. During equipment operation, the heat generated by the furnace wire 2 will be partially transferred to the insulating component body 33. The heat dissipation holes 335 can accelerate the heat dissipation of the insulating component body 33, reduce the working temperature of the insulating component, avoid the aging and performance degradation of the insulating material caused by prolonged high temperature, thereby extending the service life of the insulating component. At the same time, it reduces the impact of excessively high insulating component temperature on the local temperature field inside the furnace, ensuring process stability.

[0028] like Figure 6As shown, the double horizontal tie bar insulator 32 also includes an insulator body 33 with the same structure as the single horizontal tie bar insulator 31, ensuring that it has the same furnace wire positioning and basic insulation functions. In addition, the double horizontal tie bar insulator 32 also includes a tie bar clip 321 welded to the upper part of the insulator body 33. The tie bar clip 321 is made of a high-temperature resistant material compatible with the insulator body 33 and forms a stable connection with the insulator body 33 through welding, making it less likely to fall off in high-temperature or vibration environments. The tie bar clip 321 has an outwardly opening C-shaped groove 322. The opening of the C-shaped groove 322 faces laterally outward, and its groove width matches the diameter of the second horizontal tie bar 62, facilitating the insertion and installation of the second horizontal tie bar 62 from the opening. The length direction of the C-shaped groove 322 is parallel to the length direction of the horizontal tie bar through hole 332, ensuring that the second horizontal tie bar 62 remains parallel to the first horizontal tie bar 61 after installation, forming a symmetrical fixing structure of the double horizontal tie bars and improving the overall fixing strength.

[0029] like Figure 3 As shown, the insulation assembly 3 includes two single horizontal tie rod insulators 31 located in the middle and four double horizontal tie rod insulators 32 located on both sides of the single horizontal tie rod insulators 31. This layout allows for precise positioning of the central furnace wire area using single horizontal tie rods, while the side areas are reinforced and fixed using double horizontal tie rods, balancing positioning accuracy and structural strength. The horizontal tie rod through holes 332 of the single horizontal tie rod insulators 31 and double horizontal tie rod insulators 32 are coaxially aligned, forming a first horizontal tie rod path for installing a complete first horizontal tie rod 61. After the first horizontal tie rod 61 passes through this path, all insulators are connected in series to form a whole, ensuring the integrity and stability of the insulation assembly 3. The C-grooves 322 of the pull bar clips 321 of two adjacent double horizontal pull bar insulation components 32 have opposite openings, and the middle parts of all C-grooves 322 are coaxially aligned to form a second horizontal pull bar path for installing a whole second horizontal pull bar 62. After the second horizontal pull bar 62 is inserted into this path, it forms a double lateral fixation with the first horizontal pull bar 61, further improving the deformation resistance of the insulation component 3.

[0030] The vertical tie bar 7 is located directly above the two single horizontal tie bar insulation components 31 in the middle. The vertical tie bar 7 is vertically welded to the second horizontal tie bar 62, and the welding joint adopts a full welding process to ensure connection strength and avoid detachment at high temperatures. The length of the vertical tie bar 7 is adapted to the thickness of the insulation cotton 4, and its lower end can penetrate into the interior of the insulation cotton 4 and fit tightly against the insulation cotton 4, forming a vertical fixation for the insulation cotton 4 and preventing the insulation cotton 4 from shifting axially or radially. Vertical support bars 71 are welded parallel to both sides of the vertical tie bar 7. The vertical support bars 71 and the vertical tie bar 7 form a "mountain" shaped structure, which greatly improves the bending strength of the vertical tie bar 7 and prevents the vertical tie bar 7 from deforming due to stress or thermal expansion and contraction at high temperatures. Auxiliary pull strips 63 are welded parallel to the top of the second horizontal pull strip 62, directly above the two single horizontal pull strip insulators 31. The two ends of the auxiliary pull strips 63 pass through the C-shaped grooves 322 of the pull strip catches 321 of the two double horizontal pull strip insulators 32 on both sides of the two single horizontal pull strip insulators 31. The auxiliary pull strips 63 and the second horizontal pull strip 62 form a parallel support structure, enhancing the load-bearing capacity of the second horizontal pull strip 62 and reducing its deformation risk. Parallel blocking pull strips 64 are welded parallel to both ends of the second horizontal pull strip 62. The inner end of the blocking pull strip 64 abuts against the pull strip catches 321 of the outermost double horizontal pull strip insulator 32. Through the limiting effect of the blocking pull strips 64, the double horizontal pull strip insulator 32 can be prevented from shifting axially along the second horizontal pull strip 62, ensuring the overall positioning accuracy of the insulation assembly 3.

[0031] The insulation cotton 4 uses alumina insulation cotton. Compared with traditional zirconium-containing cotton, alumina insulation cotton can withstand high temperatures of 1600℃, has a lower thermal conductivity, and has a better insulation effect. Moreover, its shrinkage rate is only 0.5% (far lower than the 2% of zirconium-containing cotton), which can effectively reduce radial and axial shrinkage at high temperatures, avoid gaps between furnace wire 2 and insulation cotton 4, and ensure insulation stability.

[0032] Furnace wire 2, vertical tie bar 7 and horizontal tie bar 6 are all made of powder metallurgy material (specifically Shougang HT series powder metallurgy material). This material has excellent high temperature resistance, with a temperature resistance of up to 1420℃, and higher strength at high temperatures. It is not easy to deform or break, and can adapt to the high temperature working environment of boron diffusion process, extend the service life of equipment, and reduce the fluctuation of process parameters caused by component deformation.

[0033] The above embodiments are only for illustrating the technical concept and features of the present invention, and are intended to enable those skilled in the art to understand the content of the present invention and implement it accordingly. They should not be construed as limiting the scope of protection of the present invention. All equivalent changes or modifications made in accordance with the spirit and essence of the present invention should be covered within the scope of protection of the present invention.

Claims

1. A double-strand coarse wire boron diffusion furnace, comprising a furnace body (1), characterized in that: It also includes a heating wire (2) that extends spirally along the length of the furnace body (1), an insulation assembly (3) having multiple insulation components, and insulation cotton (4) covering the surface of the heating wire (2). Each insulation component is respectively sandwiched between adjacent heating wires (2). It also includes a double-strut fixing assembly disposed between the insulation assembly (3) and the insulation cotton (4). The double-strut fixing assembly includes a horizontal strut (6) that passes through multiple insulation components (3) and a vertical strut (7) that is welded to the horizontal strut (6) and can pass into the insulation cotton (4).

2. The double-strand coarse wire boron diffusion furnace according to claim 1, characterized in that: The insulation component (3) includes a single horizontal tie bar insulation member (31) located in the middle and double horizontal tie bar insulation members (32) located on both sides of the single horizontal tie bar insulation member (31).

3. The double-strand coarse wire boron diffusion furnace according to claim 2, characterized in that: The single horizontal tie bar insulator (31) includes an insulator body (33), and two semi-circular grooves (331) with outward openings are respectively provided on both sides of the insulator body (33). The insulator body (33) is also provided with horizontal tie bar through holes (332) that penetrate through both sides of the insulator body (33). The length direction of the horizontal tie bar through holes (332) is perpendicular to the center line of the two semi-circular grooves (331). The furnace wire (2) can be locked in the two opposite semi-circular grooves (331) of the two adjacent insulator bodies (33).

4. The double-strand coarse wire boron diffusion furnace according to claim 3, characterized in that: The edge of the hole (332) at one end of the horizontal tie bar protrudes outward to form a boss (333), and the edge of the hole at the other end is recessed inward to form a groove (334). The boss (333) and the groove (334) can be engaged.

5. The double-strand coarse wire boron diffusion furnace according to claim 3, characterized in that: The upper end of the insulating body (33) is also provided with a heat dissipation hole (335), the center line of the heat dissipation hole (335) is perpendicular to the length direction of the horizontal tie rod through hole (332) and the center lines of the two semi-circular grooves (331).

6. The double-strand coarse wire boron diffusion furnace according to claim 3, characterized in that: The double horizontal tie bar insulation component (32) also includes the insulation component body (33) and a tie bar clip (321) welded to the upper part of the insulation component body (33). The tie bar clip (321) has a C-shaped groove (322) opened outward. The opening of the C-shaped groove (322) faces the horizontal outer side, and the length direction of the C-shaped groove (322) is parallel to the length direction of the horizontal tie bar through hole (332).

7. The double-strand coarse wire boron diffusion furnace according to claim 6, characterized in that: The insulating assembly (3) includes two single horizontal tie bar insulating members (31) located in the middle and four double horizontal tie bar insulating members (32) located on both sides of the single horizontal tie bar insulating members (31). The horizontal tie bar perforations (332) of the single horizontal tie bar insulating members (31) and the double horizontal tie bar insulating members (32) are aligned to form a first horizontal tie bar path for installing a whole first horizontal tie bar (61). The C-shaped grooves (322) of the tie bar clips (321) of two adjacent double horizontal tie bar insulating members (32) have opposite openings. The middle parts of all the C-shaped grooves (322) are aligned to form a second horizontal tie bar path for installing a whole second horizontal tie bar (62).

8. The double-strand coarse wire boron diffusion furnace according to claim 7, characterized in that: The vertical tie bar (7) is located above the two single horizontal tie bar insulating members (31) in the middle, and the vertical tie bar (7) is vertically welded to the second horizontal tie bar (62).

9. The double-strand coarse wire boron diffusion furnace according to claim 8, characterized in that: Vertical tie bars (71) are welded parallel to each other on both sides of the vertical tie bar (7). The second horizontal tie bar (62) is welded parallel to the top of the two single horizontal tie bar insulators (31) with auxiliary tie bars (63). The two ends of the auxiliary tie bars (63) pass through the C-shaped grooves (322) of the tie bar clips (321) of the two double horizontal tie bar insulators (32) on both sides of the two single horizontal tie bar insulators (31). The two ends of the second horizontal tie bar (62) are welded parallel to each other with blocking tie bars (64). The inner end of the blocking tie bars (64) abuts against the tie bar clips (321) of the outermost double horizontal tie bar insulator (32).

10. The double-strand coarse wire boron diffusion furnace according to claim 1, characterized in that: The insulation cotton (4) is alumina insulation cotton (4), and the furnace wire (2), the vertical tie bar (7) and the horizontal tie bar (6) are all made of powder metallurgy.

Images