Exposure equipment for display screen production

Abstract

The invention discloses exposure equipment for display screen production, and relates to the technical field of display screen production exposure, the exposure equipment comprises a detection platform, a sliding bearing plate is assembled on the detection platform, and an initial position and an exposure position are arranged on the detection platform; the flattening plate is assembled on the detection platform and located on a moving path between the initial position and the exposure position, and the flattening plate makes contact with the substrate and is used for flattening the substrate; the bearing panel is provided with a plurality of negative pressure through holes, the negative pressure through holes are communicated with the main air pipe, physical flattening of the flattening plate is combined with negative pressure adsorption, warping of the substrate is forcibly eliminated, the quality problems of pattern dislocation, out-of-focus and the like caused by unevenness of the substrate during exposure are fundamentally avoided, and the working efficiency is greatly improved from placement of the substrate to completion of exposure and taking of the substrate. The whole process is completely and automatically completed by mechanical linkage of equipment. And the flattening action is used as a power source to trigger the subsequent adsorption and positioning actions, so that the accurate and consistent position of the substrate at the exposure position is ensured, and the consistency and the yield of products are improved.

Description

TECHNICAL FIELD

[0001] The present application relates to display screen exposure technical field, especially relates to a kind of display screen production exposure equipment. BACKGROUND

[0002] Substrate will produce tiny deformation or warping in transmission and process, exposure machine is accurately " overprint " on the existing circuit layer by identifying the " alignment mark " distributed on substrate, with mask plate pattern.This process is called " overprint ".Once substrate warps or deforms, the spatial position of these alignment marks will have tiny three-dimensional changes, and the deformation of substrate means that its surface is no longer a perfect focal plane.Only the highest point or the lowest point of deformation can be accurately focused during exposure, while other areas are in defocus state.The newly exposed pattern layer and the old pattern layer cannot be accurately aligned, which causes the connection error, short circuit or open circuit of upper and lower circuit, and the yield of batch and batch fluctuates sharply, which cannot be stably produced. SUMMARY

[0003] The present application aims to provide a kind of display screen production exposure equipment, with flat plate physical flattening and negative pressure adsorption combination, forcedly eliminate substrate warping, fundamentally avoid the quality problems such as pattern misplacement and defocus caused by substrate uneven during exposure, and the whole process is automatically completed by equipment mechanical linkage from putting into substrate to completing exposure and taking plate.The flattening action itself is used as power source to trigger subsequent adsorption and positioning action, to ensure the position accuracy of substrate in exposure position, improve the consistency and yield of product.

[0004] To achieve the above object, the present application provides the following technical scheme: a kind of display screen production exposure equipment, comprising: Detection platform, which is equipped with sliding support plate, initial position and exposure position are arranged on the detection platform, and the support plate is used to reciprocate the substrate of display screen between initial position and exposure position; Flat plate, which is assembled on the detection platform and located on the moving path between initial position and exposure position, the flat plate can be lifted and lowered, and the flat plate is in contact with the substrate for flattening the substrate; Support panel, which is provided with a plurality of negative pressure through holes, a plurality of negative pressure through holes are communicated with main gas pipe, main gas pipe is connected to negative pressure pump, and support panel is connected to support plate by elastic expansion link; Valve is installed in the main gas pipe, the valve rotation for control main gas pipe open or close, control the switch and the rotating shaft interface, rotating shaft assembly in the support panel, flat plate lifting driving support panel synchronous lifting, support panel is provided with ratchet member and rotating shaft interface, in the process of a lifting drive rotating shaft, support panel in the process of a lifting drive rotating shaft and switch synchronous rotation, for opening main gas pipe, support panel in the next process of lifting, through the rotating shaft and switch synchronous rotation, for closing main gas pipe, to realize the flat plate in the process of moving to the exposure position of support plate, open main gas pipe in the process of descending and display screen substrate flat, using negative pressure to hold display screen substrate to keep flat.

[0005] As an optional implementation, the flat plate is connected with the air cylinder / hydraulic cylinder on the detection platform, and the area of the flat plate is greater than the upper part of the support panel.

[0006] As an optional implementation, the ratchet member includes an upper plate, a lower plate, an upper ratchet seat and a lower ratchet seat, the upper ratchet seat is fixed on the upper plate, the lower ratchet seat is fixed on the lower plate, the upper plate and the lower plate are connected with the support rod on the support panel, and the tooth grooves between the upper ratchet seat and the lower ratchet seat are staggered and form a control channel.

[0007] As an optional implementation, the rotating shaft includes a rotating upper shaft and a rotating lower shaft, the rotating upper shaft and the rotating lower shaft are connected through a ratchet assembly, the rotating upper shaft passes through the lower plate and the lower ratchet seat, and the side rod fixed at the top of the rotating upper shaft is located in the control channel.

[0008] As an optional implementation, the ratchet assembly includes a convex ring, an upper tooth and a lower tooth, the cross section of the convex ring is T-shaped, the convex ring is fixed on the top end of the rotating lower shaft, the convex ring is clamped in the ring groove of the rotating upper shaft, and the rotating upper shaft and the rotating lower shaft are coaxially arranged; the upper tooth is inserted into the sliding groove at the bottom end of the rotating upper shaft through a spring, the lower tooth is fixed on the top end of the rotating lower shaft, and the upper tooth and the lower tooth are staggered and engaged to form a ring shape.

[0009] As an optional implementation, the rotating lower shaft is further connected with a positioning assembly on the support plate and a ratchet assembly two on the detection platform.

[0010] As an optional implementation, the positioning assembly includes a rotating disc, a clamping rod and an inner rod, the inner rod is fixed on the rotating lower shaft, the top end of the inner rod passes through the rotating upper shaft and is connected with a spring, the rotating disc is sleeved on the inner rod and rotates synchronously, the rotating disc can slide on the inner rod, a plurality of arc grooves are formed in the rotating disc, and one end of the clamping rod passes through the arc grooves. A strip-shaped groove is formed in the support panel, the clamping rod penetrates into the strip-shaped groove and is clamped in the strip-shaped groove, and the rotating disc rotates to drive the clamping rod to reciprocate along the strip-shaped groove.

[0011] As an optional implementation, the top end groove of the clamping rod is connected with the clamping head through a spring, and the clamping head is moved for positioning the substrate position.

[0012] As an optional implementation, the ratchet assembly II includes a rack, a ratchet, a baffle and a ring body, the ring body is installed on the rotating lower shaft, the rack is arranged on the detection platform, the ratchet is hinged on the ring body, the ratchet is further connected with the ring body through a spring, and the baffle is fixed on the ring body and used for limiting the rotating direction of the ratchet.

[0013] As an optional implementation, when the ratchet moves from the initial position to the exposure position, the rotating upper shaft drives the rotating lower shaft to rotate, the rotating lower shaft opens the valve and the clamping head clamps the substrate, and when the ratchet moves from the exposure position to the initial position, the rotating lower shaft reversely rotates for closing the valve and releasing the substrate clamped by the clamping head.

[0014] Technical effects and advantages of the present application: 1. The flat plate is physically flattened and combined with negative pressure adsorption, so that the substrate warping is forcibly eliminated and locked in a flat state, and quality problems such as pattern misplacement and defocus caused by the non-flat substrate during exposure are fundamentally avoided.

[0015] 2. The whole process from putting in the substrate to completing the exposure and taking out the substrate is automatically completed by the mechanical linkage of the equipment. The flattening action itself serves as a power source to trigger the subsequent adsorption and positioning actions. The downward pressure of the flattening plate, a single action, is converted into two functions of controlling the opening and closing of the valve and driving the positioning mechanism, without the need for additional sensors or complex electrical control programs.

[0016] 3. The clamping rod is driven by mechanical transmission to synchronously center and position the substrate while flattening, so that the position of the substrate in the exposure position is accurately consistent, and the consistency and yield of the product are improved. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1 It is an overall axonometric view of the present application; Figure 2 It is a structure view of the supporting plate and the supporting panel of the present application; Figure 3 It is a partial bottom view of the present application; Figure 4 It is a separated structure view of the positioning assembly and the supporting panel of the present application; Figure 5 It is a structure view of the ratchet wheel and the ratchet assembly I of the present application; Figure 6 It is a separated structure view of the ratchet assembly I of the present application; Figure 7 It is a sectional view of the upper tooth and the rotating upper shaft of the present application; Figure 8 It is a structure view of the ratchet assembly II of the present application.

[0018] In the picture: 1. Testing platform; 2. Support plate; 3. Pressure plate; 4. Support panel; 41. Negative pressure through hole; 42. Main air pipe; 5. Valve; 51. Switch; 52. Rotating shaft; 521. Upper rotating shaft; 522. Lower rotating shaft; 6. Ratchet assembly; 61. Upper plate; 62. Lower plate; 63. Upper ratchet seat; 64. Lower ratchet seat; 7. Ratchet assembly one; 71. Convex ring; 72. Upper tooth; 73. Lower tooth; 8. Ratchet assembly two; 81. Rack; 82. Ratchet; 83. Baffle; 84. Ring body; 9. Positioning assembly; 91. Turntable; 92. Clamping rod; 921. Chuck; 93. Inner rod; 10. Side rod. Detailed Implementation

[0019] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0020] participate Figures 1-8 An exposure apparatus for display screen production, comprising: The testing platform 1 is equipped with a sliding support plate 2. The testing platform 1 is set with an initial position and an exposure position. The support plate 2 is used to transport the substrate of the display screen to move back and forth between the initial position and the exposure position. The support plate 2 is driven to move back and forth by a linear motor. The pressure plate 3 is mounted on the detection platform 1 and is located on the moving path between the initial position and the exposure position. The pressure plate 3 can be raised and lowered. The pressure plate 3 contacts the substrate to flatten the substrate. The pressure plate 3 is connected to the cylinder / hydraulic cylinder on the detection platform 1, and the area of ​​the pressure plate 3 is larger than the upper part of the support panel 4.

[0021] The support panel 4 is provided with several negative pressure through holes 41, which are connected to the main air pipe 42. The main air pipe 42 is connected to the negative pressure pump. The support panel 4 is connected to the support plate 2 through an elastic telescopic rod. The support panel 4 moves synchronously with the support plate 2. When the support panel 4 moves to the initial position, the display substrate is placed on the support panel 4. When the support panel 4 moves to the bottom of the pressure plate 3, the pressure plate 3 is lowered or raised under the action of the cylinder / hydraulic cylinder. The pressure plate 3 descends and contacts the substrate, thereby flattening the warped part of the substrate. The substrate then adheres to the surface of the support panel 4. The negative pressure generated at the negative pressure through hole 41 is used to hold the substrate, keeping the substrate flat and avoiding the problem of substrate springback and warping.

[0022] The negative pressure through holes 41 are set to be large and sparse in the middle, while the negative pressure through holes 41 closer to the edge are small and dense. Since the warped part of the substrate is mostly near the edge, the adsorption force of the edge area is enhanced, making the flattening transition more natural and the adsorption effect more uniform and reliable. Valve 5 is installed inside the main air pipe 42. The rotation of valve 5 controls the opening or closing of the main air pipe 42. Switch 51, which controls the rotation of valve 5, is connected to shaft 52. Shaft 52 is mounted on support panel 4. The lifting and lowering of pressure plate 3 drives support panel 4 to lift and lower synchronously. Ratchet 6 on support panel 4 is connected to shaft 52. During one lifting and lowering process, shaft 52 is driven. During one lifting and lowering process, support panel 4 drives shaft 52 and switch 51 to rotate synchronously to open main air pipe 42. During the next lifting and lowering process, support panel 4 rotates synchronously through shaft 52 and switch 51 to close main air pipe 42. This allows pressure plate 3 to open main air pipe 42 while lowering and pressing the substrate of display screen flat during the process of support plate 2 moving to exposure position. Negative pressure is used to hold the substrate of display screen to keep it flat.

[0023] The downward force of the pressure plate 3 drives the rotating shaft 52 to rotate, thereby opening the switch 51. At this time, the negative pressure pump can generate negative pressure at the negative pressure through hole 41, allowing the flat substrate to move to the exposure position for exposure treatment, thus avoiding inaccurate positioning of the warped substrate during the exposure process, which would affect the quality of subsequent products.

[0024] The ratchet assembly 6 includes an upper plate 61, a lower plate 62, an upper ratchet seat 63, and a lower ratchet seat 64. The upper ratchet seat 63 is fixed on the upper plate 61, and the lower ratchet seat 64 is fixed on the lower plate 62. The upper plate 61 and the lower plate 62 are connected to the support rod on the support panel 4. The tooth grooves between the upper ratchet seat 63 and the lower ratchet seat 64 are staggered and form a control channel.

[0025] The rotating shaft 52 includes an upper rotating shaft 521 and a lower rotating shaft 522, which are connected by a ratchet assembly 7. The upper rotating shaft 521 passes through the lower plate 62 and the lower ratchet seat 64, and the side rod 10 fixed at the top of the upper rotating shaft 521 is located in the control channel.

[0026] The specific working process of the ratchet component 6 is as follows: During the process of the support panel 4 being pressed down and descending, the upper plate 61, lower plate 62, upper ratchet seat 63, and lower ratchet seat 64 descend synchronously. At this time, the side rod 10 on the rotating upper shaft 521 will contact the tooth groove surface of the upper ratchet seat 63. Since the position of the upper ratchet seat 63 will not rotate, the rotating upper shaft 521 and rotating lower shaft 522 connected to the side rod 10 will rotate. The rotating upper shaft 521 and rotating lower shaft 522 drive the switch 51 to rotate. At this time, the main air pipe 42 is in the open state, and the support panel 4 descends to the lowest position. The substrate pressed by the pressure plate 3 on the support panel 4 is flattened. The negative pressure generated by the negative pressure pump will suck the substrate and keep it flat.

[0027] Furthermore, as the support panel 4 rises, the side rod 10 contacts the lower ratchet seat 64, thereby causing the switch 51 to rotate, which plays a corrective role.

[0028] Since the substrate cannot be squeezed after exposure, ratchet assembly 7 and ratchet assembly 8 are provided to close the main air pipe 42 after exposure.

[0029] The ratchet assembly 7 includes a convex ring 71, an upper tooth 72, and a lower tooth 73. The convex ring 71 has a "T" shaped cross section and is fixed on the top of the rotating lower shaft 522. The convex ring 71 is engaged in the annular groove of the rotating upper shaft 521 to keep the rotating upper shaft 521 and the rotating lower shaft 522 coaxial. The upper tooth 72 is inserted into the groove at the bottom of the rotating upper shaft 521 by a spring, and the lower tooth 73 is fixed on the top of the rotating lower shaft 522. The upper tooth 72 and the lower tooth 73 are staggered and meshed to form a ring.

[0030] The structure of the convex ring 71 ensures that the upper rotating shaft 521 and the lower rotating shaft 522 will not separate, and the two will always remain coaxial. Furthermore, with the upper tooth 72 and the lower tooth 73 in place, the rotation of the upper rotating shaft 521 will drive the lower rotating shaft 522, while the rotation of the lower rotating shaft 522 will not drive the upper rotating shaft 521 to rotate in a unidirectional manner. Specifically, during the rotation of the upper rotating shaft 521 driven by the side rod 10, the upper tooth 72 of the upper rotating shaft 521 pushes the lower tooth 73 to rotate. At this time, the upper rotating shaft 521 and the lower rotating shaft 522 rotate synchronously, thereby driving the switch 51 to rotate in one direction to open the main air pipe 42. During the reverse rotation of the lower rotating shaft 522, the lower tooth 73 rotates towards the inclined surface of the upper tooth 72. At this time, the upper tooth 72 will retract into the groove of the upper rotating shaft 521 and compress the spring, thereby achieving the purpose of rotating the lower rotating shaft 522 while the upper rotating shaft 521 does not rotate. To ensure accurate positioning during subsequent exposures, a positioning component 9 is provided to move the substrate to the designated position. Additionally, a ratchet component 8 is provided to move from the exposure position to the initial position and close the control switch 51 after the substrate exposure is completed.

[0031] The lower rotating shaft 522 is also connected to the positioning component 9 on the support plate 2 and the ratchet component 8 on the detection platform 1. The positioning component 9 includes a turntable 91, a clamping rod 92 and an inner rod 93. The inner rod 93 is fixed on the lower rotating shaft 522. The top end of the inner rod 93 passes through the upper rotating shaft 521 and is connected to a spring. The turntable 91 is sleeved on the inner rod 93 and the two rotate synchronously. The turntable 91 can slide on the inner rod 93. Several arc grooves are opened on the turntable 91. One end of the clamping rod 92 passes through the arc groove. The support panel 4 has a strip groove. The clamping rod 92 passes through the strip groove and is locked in the strip groove. The turntable 91 rotates to drive the clamping rod 92 to move back and forth along the strip groove.

[0032] The top groove of the clamping rod 92 is connected to the chuck 921 by a spring, and the chuck 921 moves to position the substrate.

[0033] The lower rotating shaft 522 and the inner rod 93 rotate synchronously. When the substrate moves from the initial position to the exposure position, the lower rotating shaft 522 drives the turntable 91 to rotate during the rotation. The rotation of the turntable 91 pushes several clamping rods 92 to move simultaneously along the strip groove and the moving distance is the same, thereby pushing the substrate toward the center position to ensure that the substrate moves to the designated position. After the substrate moves to the designated position, the substrate is also flattened.

[0034] The second ratchet assembly 8 includes a rack 81, a ratchet 82, a baffle 83, and a ring 84. The ring 84 is mounted on the rotating lower shaft 522, the rack 81 is set on the detection platform 1, the ratchet 82 is hinged to the ring 84, and the ratchet 82 is also connected to the ring 84 by a spring. The baffle 83 is fixed to the ring 84 to limit the rotation direction of the ratchet 82. When the ratchet 82 moves from the initial position to the exposure position, the upper rotating shaft 521 drives the lower rotating shaft 522 to rotate. The lower rotating shaft 522 opens the valve 5 and the chuck 921 clamps the substrate. When the ratchet 82 moves back from the exposure position to the initial position, the lower rotating shaft 522 rotates in the opposite direction to close the valve 5 and the chuck 921 releases the substrate.

[0035] Since the ratchet 82 can rotate around the ring body 84 in one direction, when the substrate moves from the initial position to the exposure position, the ratchet 82 will pass through the rack 81. At the same time, the ratchet 82 rotates synchronously with the rotating lower shaft 522. During the rotation, the ratchet 82 can rotate around the ring body 84 and compress the spring. After exposure, when the ratchet 82 moves from the exposure position to the initial position, the ratchet 82 contacts the rack 81. At this time, the rack 81 pushes the ratchet 82 to rotate in the opposite direction. Due to the restriction of the baffle 83, the ratchet 82 drives the lower rotating shaft 522 to rotate in the opposite direction. The reverse rotation of the lower rotating shaft 522 pushes the clamping rod 92 to move in the opposite direction. It can also turn off the switch 51, which makes it convenient to remove the substrate later. The clamp 92 releases the base plate and rotates the lower shaft 522 in the direction of rotation. This rotation also pushes the upper tooth 72 to retract into the groove of the upper shaft 521 and compress the spring, thereby achieving the purpose of rotating the upper shaft 521 without rotating it, and keeping the position of the upper shaft 521 unchanged.

[0036] Finally, it should be noted that the above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. An exposure device for display screen production, characterized in that, include: The testing platform (1) is equipped with a sliding support plate (2). The testing platform (1) is set with an initial position and an exposure position. The support plate (2) is used to transport the substrate of the display screen back and forth between the initial position and the exposure position. The pressure plate (3) is mounted on the detection platform (1) and located on the moving path between the initial position and the exposure position. The pressure plate (3) can be raised and lowered. The pressure plate (3) contacts the substrate to flatten the substrate warping. The support panel (4) is provided with a number of negative pressure through holes (41), and the number of negative pressure through holes (41) are connected to the main air pipe (42). The main air pipe (42) is connected to the negative pressure pump. The negative pressure through holes (41) are used to adsorb the flattened substrate. The support panel (4) is connected to the support plate (2) through an elastic telescopic rod. A valve (5) is installed inside the main air pipe (42). The valve (5) is rotated to control the opening or closing of the main air pipe (42). A switch (51) that controls the rotation of the valve (5) is connected to a rotating shaft (52). The rotating shaft (52) is mounted on a support panel (4). The pressure plate (3) is raised and lowered, which drives the support panel (4) to rise and fall synchronously. A ratchet (6) provided on the support panel (4) is connected to the rotating shaft (52). During one rise and fall, the rotating shaft (52) is driven. During one rise and fall, the support panel (4) drives the rotating shaft (52) and the switch (51) to rotate synchronously to open the main air pipe (42). During the next rise and fall, the support panel (4) rotates synchronously through the rotating shaft (52) and the switch (51) to close the main air pipe (42). This allows the pressure plate (3) to open the main air pipe (42) during the process of the support plate (2) moving to the exposure position and lowering to flatten the substrate of the display screen. The substrate of the display screen is held in place by negative pressure to keep it flat.

2. The exposure equipment for display screen production according to claim 1, characterized in that, The pressure plate (3) is connected to the cylinder / hydraulic cylinder on the testing platform (1), and the area of ​​the pressure plate (3) is larger than the area above the support panel (4).

3. The exposure equipment for display screen production according to claim 1, characterized in that, The ratchet component (6) includes an upper plate (61), a lower plate (62), an upper ratchet seat (63), and a lower ratchet seat (64). The upper ratchet seat (63) is fixed on the upper plate (61), and the lower ratchet seat (64) is fixed on the lower plate (62). The upper plate (61) and the lower plate (62) are connected to the support rod on the support panel (4). The tooth grooves between the upper ratchet seat (63) and the lower ratchet seat (64) are staggered and form a control channel.

4. The exposure equipment for display screen production according to claim 3, characterized in that, The rotating shaft (52) includes an upper rotating shaft (521) and a lower rotating shaft (522), which are connected by a ratchet assembly (7). The upper rotating shaft (521) passes through the lower plate (62) and the lower ratchet seat (64). The side rod (10) fixed at the top of the upper rotating shaft (521) is located in the control channel.

5. The exposure equipment for display screen production according to claim 4, characterized in that, The ratchet assembly 1 (7) includes a convex ring (71), an upper tooth (72) and a lower tooth (73). The convex ring (71) has a "T" shaped cross section. The convex ring (71) is fixed on the top of the rotating lower shaft (522). The convex ring (71) is inserted into the annular groove of the rotating upper shaft (521) to keep the rotating upper shaft (521) and the rotating lower shaft (522) coaxial. The upper tooth (72) is inserted into the groove at the bottom of the rotating upper shaft (521) by a spring, and the lower tooth (73) is fixed on the top of the rotating lower shaft (522). The upper tooth (72) and the lower tooth (73) are interlocked and arranged in a ring shape.

6. The exposure equipment for display screen production according to claim 4, characterized in that, The rotating lower shaft (522) is also connected to the positioning component (9) on the support plate (2) and the ratchet component two (8) on the detection platform (1).

7. The exposure equipment for display screen production according to claim 6, characterized in that, The positioning component (9) includes a turntable (91), a clamping rod (92), and an inner rod (93). The inner rod (93) is fixed on the lower rotating shaft (522). The top end of the inner rod (93) passes through the upper rotating shaft (521) and is connected to a spring. The turntable (91) is sleeved on the inner rod (93) and the two rotate synchronously. The turntable (91) can slide on the inner rod (93). Several arc grooves are opened on the turntable (91). One end of the clamping rod (92) passes through the arc groove. The support panel (4) has a strip groove. The clamping rod (92) passes through the strip groove and is locked in the strip groove. The turntable (91) rotates to drive the clamping rod (92) to move back and forth along the strip groove.

8. The exposure equipment for display screen production according to claim 7, characterized in that, The top groove of the clamp (92) is connected to the clamp (921) by a spring, and the clamp (921) moves to position the substrate.

9. The exposure equipment for display screen production according to claim 8, characterized in that, The second ratchet assembly (8) includes a rack (81), a ratchet (82), a baffle (83), and a ring (84). The ring (84) is mounted on the rotating lower shaft (522), the rack (81) is set on the detection platform (1), the ratchet (82) is hinged to the ring (84), and the ratchet (82) is also connected to the ring (84) by a spring. The baffle (83) is fixed on the ring (84) to limit the rotation direction of the ratchet (82).

10. An exposure apparatus for display screen production according to claim 9, characterized in that, When the ratchet (82) moves from the initial position to the exposure position, the upper rotating shaft (521) drives the lower rotating shaft (522) to rotate. The lower rotating shaft (522) opens the valve (5) and the chuck (921) clamps the substrate. When the ratchet (82) moves back from the exposure position to the initial position, the lower rotating shaft (522) rotates in the opposite direction to close the valve (5) and the chuck (921) releases the substrate.

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