PTFE (Polytetrafluoroethylene) lined metal hose for conveying high-purity medium

Abstract

The invention provides a PTFE (Polytetrafluoroethylene) lined metal hose for conveying a high-purity medium, and relates to the field of semiconductors. The PTFE lining metal hose for high-purity medium conveying comprises a corrugated pipe body, a smooth PTFE lining sleeve, a first end connector and a second end connector, the PTFE lining sleeve is coaxially inserted into the corrugated pipe body, the first end connector is fixedly arranged at one end of the corrugated pipe body in a sleeving mode and welded to the corrugated pipe body, and the second end connector is fixedly connected with the corrugated pipe body in a sleeving mode. The first end connector is fixedly arranged at one end of the corrugated pipe body in a sleeving mode and welded to the corrugated pipe body, the second end connector is fixedly arranged at the other end of the corrugated pipe body in a sleeving mode and welded to the corrugated pipe body, the end of the PTFE neck bush pipe is provided with an annular turned-over edge which is turned over outwards, the opposite attaching faces of the first end connector and the second end connector are each provided with an annular groove matched with the annular turned-over edge, and the annular turned-over edge is pressed in the annular grooves to form double sealing. According to the sealing device, the double-sealing effect of mechanical pressing and structural fitting is achieved, external impurities are effectively prevented from invading, and the cleanliness of high-purity medium conveying is guaranteed.

Description

TECHNICAL FIELD

[0001] The application relates to the field of semiconductors, and particularly relates to a PTFE inner lining metal hose for high-purity medium conveying. BACKGROUND

[0002] The mixed metal bellows is a special metal pipe with high flexibility, high temperature resistance and pressure resistance, and therefore has important application prospects in the semiconductor industry. In the semiconductor manufacturing process, a large amount of gas conveying and fluid control are required, and the metal bellows as a high-quality gas conveying pipe can effectively meet the demand of the semiconductor manufacturing equipment for high-purity gas conveying, and guarantee the stability and reliability of the semiconductor manufacturing process. The metal bellows can also be used in the vacuum system of the semiconductor equipment, and can effectively seal and discharge gas, and guarantee the normal operation of the semiconductor equipment.

[0003] The mixed metal bellows is composed of a 316L metal formed bellows and a smooth PTFE inner lining sleeve pipe, is suitable for external vacuum environment, and is used for conveying ultrapure water / ultrahigh-purity gas (H2 / N2 / XCDA) pipeline, and requires ultraclean, ultralow flexibility and pressure resistance. In the manufacturing process of the mixed metal bellows, butt welding connection is usually adopted, the welding point is relatively close to the PTFE pipe, the PTFE pipe is prone to deformation, the welded part is relatively thin, and the welded part is prone to be welded through, which leads to difficult production. SUMMARY

[0004] In view of the defects of the prior art, the application provides a PTFE inner lining metal hose for high-purity medium conveying, which solves the problems of PTFE pipe deformation and bellows welding through.

[0005] To achieve the above object, the application is implemented by the following technical scheme: A PTFE inner lining metal hose for high-purity medium conveying, comprising a bellows body, a smooth PTFE inner lining sleeve pipe, a terminal one and a terminal two, the PTFE inner lining sleeve pipe is coaxially inserted into the inside of the bellows body, the terminal one is fixedly sleeved on one end of the bellows body and is welded with the bellows body, the terminal two is fixedly sleeved on the other end of the bellows body and is welded with the bellows body, the end of the PTFE inner lining sleeve pipe is provided with an annular flange folded outward, the opposite abutting surfaces of the terminal one and the terminal two are provided with annular grooves matched with the annular flange, and the annular flange is pressed into the annular grooves to form double sealing. Through the above technical scheme, the double sealing effect of mechanical pressing and structure abutting is realized, external impurities are effectively blocked, and the cleanliness of high-purity medium conveying is guaranteed.

[0006] Further, the bellows body is made of 316L stainless steel material; Through the technical scheme, the overall structural strength and corrosion resistance of the hose are improved, harsh working conditions in the fields of semiconductors, chemical industry and the like are adapted, and the service life is prolonged.

[0007] Further, the welding areas of the terminal one and the terminal two are away from the PTFE inner lining sleeve pipe, and form a compression sealing structure for the PTFE inner lining sleeve pipe after assembly, and the terminal one and the terminal two form a thickened welding base after connection to avoid welding through; Through the technical scheme, the conduction of welding high temperature to the PTFE pipe is blocked, the PTFE pipe is prevented from deforming due to high temperature, the thickened base is used to avoid welding through, and the production difficulty is reduced and the yield is improved.

[0008] Further, the terminal one and the terminal two are made of 316L stainless steel material, the inner wall surface roughness is small, and the sealing property of the PTFE inner lining sleeve pipe is ensured; Through the technical scheme, the sealing reliability is enhanced, and the corrosion resistance of the 316L material can prevent the metal parts from polluting the medium.

[0009] Further, the axial length of the PTFE inner lining sleeve pipe is greater than the axial length of the corrugated pipe body, and both ends of the PTFE inner lining sleeve pipe extend into the sealing area of the terminal one and the terminal two. Through the technical scheme, it is ensured that the high-purity medium is in contact with the chemically inert PTFE material throughout the conveying process, metal ion pollution is avoided, and the core requirement of high-purity conveying is perfectly met.

[0010] The application provides a PTFE inner lining metal hose for high-purity medium conveying. The application provides a PTFE inner lining metal hose for high-purity medium conveying, which is designed by flanging the end of the PTFE pipe, and the reliable sealing is realized by the compression of the flange by the terminal structure, and the welding point is kept at a safe distance from the PTFE pipe, so that the deformation of the PTFE pipe caused by welding high temperature is fundamentally avoided, and the sealing performance and structural stability are considered. BRIEF DESCRIPTION OF DRAWINGS

[0011] Fig. 1 It is a structural schematic view of the application; Fig. 2 It is a structural sectional view of the application; Fig. 3 It is a structural schematic view of the application.

[0012] In the figure: 1, corrugated pipe body; 2, PTFE inner lining sleeve pipe; 3, terminal one; 4, terminal two. Detailed Implementation

[0013] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0014] like Figs. 1-3 As shown in the embodiment of the present invention, a PTFE-lined metal hose for conveying high-purity media is provided, comprising a corrugated pipe body 1, a smooth PTFE inner liner 2, an end connector 3, and an end connector 4. The PTFE inner liner 2 is coaxially inserted into the corrugated pipe body 1. The end connector 3 is fixedly sleeved on one end of the corrugated pipe body 1 and welded to the corrugated pipe body 1. The end connector 4 is fixedly sleeved on the other end of the corrugated pipe body 1 and welded to the corrugated pipe body 1. The end of the PTFE inner liner 2 is provided with an outwardly folded annular flange. The relative contact surfaces of the end connector 3 and the end connector 4 are provided with annular grooves adapted to the annular flange. The annular flange is pressed into the annular groove to form a double seal, achieving a double sealing effect of mechanical pressing and structural fit, effectively blocking the intrusion of external impurities, ensuring the cleanliness of high-purity media conveying. The corrugated pipe body 1 is made of 316L stainless steel, which improves the overall structural strength and corrosion resistance of the hose, making it suitable for harsh working conditions in semiconductor, chemical and other fields, and extending its service life.

[0015] The welding areas of end connector 3 and end connector 4 are far away from the PTFE inner liner 2, and after assembly, they form a compression and sealing structure for the PTFE inner liner 2. After end connector 3 and end connector 4 are connected, they form a thickened welding substrate to avoid weld burn-through, block the conduction of high welding temperature to the PTFE pipe, and prevent the PTFE pipe from deforming due to high temperature. At the same time, the thickened substrate eliminates the problem of weld burn-through, reduces production difficulty, and improves the yield.

[0016] Both end connector 3 and end connector 4 are made of 316L stainless steel, which has a small inner wall surface roughness to ensure a tight fit and seal with the PTFE inner sleeve 2, reduce the gap between the end connector and the PTFE sleeve, and enhance the reliability of the seal. At the same time, the corrosion resistance of 316L material can prevent metal parts from contaminating the medium.

[0017] The axial length of the PTFE inner sleeve 2 is greater than the axial length of the bellows body 1, and both ends of the PTFE inner sleeve 2 extend into the sealing area of ​​end connection 3 and end connection 4, ensuring that the high-purity medium is only in contact with the chemically inert PTFE material throughout the transportation process, avoiding metal ion contamination, and perfectly meeting the core requirements of high-purity transportation.

[0018] Working principle: This PTFE-lined metal hose for high-purity media transportation is made by coaxially inserting the PTFE inner sleeve 2 with annular flange into the 316L stainless steel corrugated pipe body 1. The two ends extend to the sealing areas of end connector 1 3 and end connector 2 4. The end connectors are respectively sleeved and welded to the welding areas of the two ends of the corrugated pipe, away from the PTFE pipe to avoid high-temperature deformation. The annular groove of the end connector mating surface is pressed and matched with the PTFE flange to form a double seal. At the same time, the thickened welding base avoids weld penetration, ensuring that the medium only contacts the PTFE and the purity of the transportation is not affected.

[0019] The following points should be noted in this article: 1. The accompanying drawings of the embodiments disclosed herein only relate to the structures involved in the embodiments disclosed herein; other structures can be referred to in a general design.

[0020] 2. Where there is no conflict, the embodiments of this disclosure and the features in the embodiments can be combined with each other to obtain new embodiments.

[0021] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

Claims

1. A PTFE-lined metal hose for conveying high-purity media, comprising a corrugated pipe body (1), a smooth PTFE-lined sleeve (2), an end connector one (3), and an end connector two (4), characterized in that: The PTFE inner liner (2) is coaxially inserted into the corrugated pipe body (1). The first end connector (3) is fixedly sleeved on one end of the corrugated pipe body (1) and welded to the corrugated pipe body (1). The second end connector (4) is fixedly sleeved on the other end of the corrugated pipe body (1) and welded to the corrugated pipe body (1). The end of the PTFE inner liner (2) is provided with an outwardly folded annular flange. The relative mating surfaces of the first end connector (3) and the second end connector (4) are provided with annular grooves that are adapted to the annular flanges. The annular flanges are pressed into the annular grooves to form a double seal.

2. The PTFE-lined metal hose for conveying high-purity media according to claim 1, characterized in that: The corrugated pipe body (1) is made of 316L stainless steel.

3. The PTFE-lined metal hose for conveying high-purity media according to claim 1, characterized in that: The welding areas of the first end connector (3) and the second end connector (4) are far away from the PTFE inner liner sleeve (2), and after the two are assembled, they form a compression and sealing structure for the PTFE inner liner sleeve (2). After the first end connector (3) and the second end connector (4) are connected, they form a thickened welding substrate to avoid weld burn-through.

4. The PTFE-lined metal hose for conveying high-purity media according to claim 1, characterized in that: Both the first end connector (3) and the second end connector (4) are made of 316L stainless steel, with a small surface roughness on their inner walls, ensuring a tight fit and seal with the PTFE inner liner sleeve (2).

5. The PTFE-lined metal hose for conveying high-purity media according to claim 1, characterized in that: The axial length of the PTFE inner sleeve (2) is greater than the axial length of the bellows body (1), and both ends of the PTFE inner sleeve (2) extend into the sealing area of ​​end connection one (3) and end connection two (4).

Images