Measuring system and method for plasma-driven hydrogen isotope permeation

Abstract

The invention discloses a measuring system and method for plasma-driven hydrogen isotope permeation, and relates to the technical field of plasma experimental devices.The measuring system comprises a sample changing chamber cavity connected with a plasma generating device, and a vacuum valve is installed at the end, close to the plasma generating device, of the sample changing chamber cavity; the other end is connected with a sample carrying table through a linear driving mechanism, and a heating device and a temperature signal acquisition device are integrated on the sample carrying table; the bottom of the sample changing chamber cavity is connected with a first vacuum pump. Through the design of the vacuum structure and the vacuum valve which can be isolated, the vacuum of the main plasma cavity does not need to be damaged in the sample changing process, the impurity pollution risk is greatly reduced, the plasma purity is improved, meanwhile, the vacuumizing waiting time is shortened, and the testing efficiency is improved. Geometric limitation of a traditional fixed target is overcome, in-situ, real-time and high-temperature monitoring of the permeation process is achieved through an integrated temperature control and mass spectrum measurement system, and the functions are comprehensive.

Description

Technical Field

[0001] This invention relates to the field of plasma experimental apparatus technology, and specifically to a measurement system and method for plasma-driven hydrogen isotope permeation. Background Technology

[0002] In the conceptual design of magnetic confinement fusion reactors, tungsten and low-activation alloys have been proposed as the first wall structural materials. However, when facing the core, these materials are directly exposed to the DT plasma environment, leading to hydrogen isotope retention in the shallow surface layer of the structural material. This results in deuterium fuel permeation loss and external contamination. Currently, to assess the deuterium permeation behavior of the cladding structural materials in the service environment, experimental data on hydrogen plasma permeation and retention must be obtained from plasma experimental facilities.

[0003] Currently, plasma generation devices are commonly used to simulate the plasma environment of fusion reactors. However, obtaining plasma permeation data through a fixed target makes it difficult to obtain high-precision and highly repeatable experimental results, mainly due to the following technical shortcomings:

[0004] (1) The sample stage is difficult to position. Due to the geometric limitations of the plasma generation device cavity, the position of the sample stage is difficult to determine accurately and adjust flexibly.

[0005] (2) The risk of contamination by impurities is high. Frequent disassembly and installation of the target sample leads to contamination of the cavity, affecting the purity of the plasma and the stability of the experimental environment.

[0006] (3) The beam range is limited. The beam diameter of small plasma generating devices is usually small (2mm~10mm), which leads to uneven plasma irradiation received by the solid sample surface and affects the reliability of experimental data.

[0007] (4) The influence of changes in the distance and position of the internal cavity of the plasma device, as well as the operating power and conditions (such as magnetic field and air pressure) on the beam was not fully considered. The fixed target sample could not cope with these changes and the problem of uneven irradiation still existed. Summary of the Invention

[0008] Given the problems of current plasma devices, such as difficulty in sample stage positioning, high risk of impurity contamination, limited beam range, and uneven irradiation, the purpose of this invention is to provide a measurement system and method for plasma-driven hydrogen isotope permeation. This measurement system can achieve precise target positioning, avoid impurity contamination, ensure irradiation uniformity, and adapt to different experimental conditions.

[0009] This invention is achieved through the following technical solution:

[0010] In a first aspect, the present invention provides a measurement system for plasma-driven hydrogen isotope permeation, comprising a sample exchange chamber connected to a plasma generating device, wherein a vacuum valve is installed at one end of the sample exchange chamber near the plasma generating device, and a sample stage is connected to the other end via a linear drive mechanism, wherein a heating device and a temperature signal acquisition device are integrated on the sample stage; a door is connected to the top of the sample exchange chamber, and a vacuum pump is connected to the bottom.

[0011] The plasma-driven hydrogen isotope permeation measurement system of the present invention, through the design of an isolable vacuum structure and vacuum valves, eliminates the need to disrupt the vacuum of the main plasma cavity during sample changing, greatly reducing the risk of impurity contamination and improving plasma purity. At the same time, it reduces the vacuuming waiting time, significantly improving experimental purity and efficiency.

[0012] In addition, the present invention, through a precise linear drive mechanism, can quickly and accurately position the sample in a uniform region of the plasma beam, fundamentally solving the experimental errors caused by inaccurate positioning and uneven beam of the fixed target sample, and greatly improving the accuracy and repeatability of hydrogen isotope permeation experimental data.

[0013] In addition, the movable design of the sample stage in this invention allows the sample to penetrate deep into the center of plasma devices of different sizes and configurations, overcoming the geometric limitations of traditional fixed targets. The integrated temperature control and mass spectrometry measurement system enables in-situ, real-time, and high-temperature monitoring of the permeation process, providing comprehensive functionality and enhancing the system's adaptability and functionality.

[0014] The sample exchange chamber is a cylindrical stainless steel (such as 304 stainless steel) cavity with an inner diameter of 100mm and a length of 300mm. The specific dimensions are determined according to actual needs, with the aim of accommodating the sample stage and linear drive mechanism.

[0015] The hatch is connected by a flange, which adopts the CF flange standard and is equipped with a copper gasket for sealing.

[0016] The plasma generating device includes a linear plasma device.

[0017] In one specific embodiment, the sample exchange chamber is sealed to the side window of the plasma generating device via a flange.

[0018] The flanges adopt the CF flange standard and are equipped with copper gaskets for sealing.

[0019] In a particular embodiment, the vacuum valve includes any one of a slide gate valve, a gate valve, and an angle valve.

[0020] Vacuum valves are core components in vacuum systems used to change the direction of airflow, regulate the flow rate, and cut off or connect pipelines. They are sealed with rubber or metal sealing rings and classified into low, high, and ultra-high vacuum types according to the vacuum level. A slide gate valve is a valve in which the gate and valve seat are always in close contact for a seal. It mainly consists of a valve body, a slide gate, and a sealing mechanism. The valve body has a guide rail in which the slide gate can slide up and down. The slide gate has a circular opening the same size as the flow path; the opening and closing of the gate allows the circular opening on the gate to completely disengage from and align with the flow path. The working principle of a slide gate valve is to control the flow of fluid by the movement of the valve core. When the slide gate rises, the medium can flow freely through the valve; when the slide gate falls, it fits tightly against the valve seat, cutting off the medium's passage. Simultaneously, due to the pressure difference, a good seal is formed between the slide gate and the valve seat, preventing medium leakage. In practical applications, slide gate valves can be divided into manual slide gate valves, electric slide gate valves, and pneumatic slide gate valves, depending on the driving method. Manual slide gate valves are operated by manually turning a handwheel to move the slide gate; electric slide gate valves utilize the raising and lowering of the slide gate; pneumatic slide gate valves use compressed dry air as power, with a solenoid directional valve driving a pneumatic transmission device to reciprocate the valve, achieving opening and closing and sealing. The structural features of slide gate valves include a groove-free valve body, preventing media from getting stuck or blocked, and full-bore flow characteristics, making them suitable for pipelines carrying powder or particulate media. The sealing seat has a movable structure design with wear resistance and automatic compensation functions, resulting in a longer service life. During closing and opening, the valve seat and gate remain in close contact, ensuring stable valve opening and closing force and providing media shut-off capabilities.

[0021] In a particular embodiment, the heating device includes any one of a resistance heater, an electron beam heater, and a laser heater mounted on the sample stage.

[0022] A resistance heater is a device that uses the heat generated when an electric current passes through a conductor (resistive material) to heat it. Its working principle is based on Joule's law, which states that when an electric current passes through a conductor, it converts electrical energy into heat energy. A resistance heater consists of a heating element, insulating material, a housing to protect the internal components and adapt to different installation and usage environments, and a mounting bracket. The heating element is the core component of the resistance heater, made of materials with high resistivity (such as resistance wire or ceramics), which generates heat when an electric current passes through it. The insulating material isolates the heating element from the external environment, prevents leakage, and ensures safe operation.

[0023] The working principle of an electron beam heater is based on electrons bombarding the surface of an object. Through the collision of high-speed electrons with the object's surface, the kinetic energy of the electrons is converted into heat energy, thus heating the object. Specifically, the cathode in the electron gun emits electrons under the influence of an electric field. These electrons are accelerated by the anode to form a high-speed electron beam. When the electron beam bombards the surface of the object being heated, the electrons collide with atoms or molecules on the surface, transferring energy to the object and raising its temperature. The electron beam heater is the core device for generating and emitting a high-speed electron beam. Its structure typically includes a cathode (the component that emits electrons), an anode (the component that accelerates the electrons), and a focusing system (which controls the direction and focus of the electron beam).

[0024] The core of a laser heater consists of a laser, an optical system, a temperature control system, and auxiliary components. It achieves precise heating by interacting with matter through a directional laser beam, and has advantages such as high efficiency, non-contact operation, and strong controllability.

[0025] In a specific embodiment, the temperature signal acquisition device includes either a thermocouple or an infrared thermometer mounted on the sample stage.

[0026] A thermocouple is a temperature sensing element based on the thermoelectric effect. Its structure mainly includes thermoelectrodes, an insulating sheath, a protective tube, and a junction box. Its working principle is based on the Seebeck effect, which states that when two conductors of different materials are connected to form a closed circuit, the temperature difference generates a thermoelectric electromotive force. By measuring and converting this electromotive force, the measured temperature can be obtained.

[0027] Infrared thermometers focus the infrared radiation from an object through an optical system, which is then converted into an electrical signal by a detector. After processing, the signal is displayed. The core structure includes optical, detection, and signal processing modules, and the principle is based on the blackbody radiation law.

[0028] In one specific embodiment, the sample stage is made of a thermally conductive material. This thermally conductive material includes oxygen-free copper. An armored K-type thermocouple is embedded within the sample stage for temperature measurement, along with a resistance heater (such as a tantalum wire heater). Precise temperature control from room temperature to 800°C (with an accuracy of ±1°C) can be achieved through PID closed-loop control using an external temperature controller (which can be integrated into a computer system).

[0029] In one specific embodiment, the linear drive mechanism includes a balanced sliding track, one end of which is connected to the sample stage, and the other end is connected to an insulating flange electrode assembly.

[0030] In a specific embodiment, the balanced sliding track consists of two linear guide rails and a ball screw transmission mechanism, which are installed in the sample changing chamber. The ball screw is driven by a stepper motor outside the sample changing chamber through a magnetohydrodynamic sealed rotary feeder.

[0031] The driving method of the balanced sliding track is not limited to ball screws, but can also be belt drive, linear motor drive, etc.

[0032] The computer controls the number of steps of the stepper motor, thereby precisely controlling the stroke of the sample stage so that it can stay at any desired position in the plasma beam region, ensuring the uniformity of irradiation on the sample surface.

[0033] In a specific embodiment, a permeation signal port is provided on the balance sliding track connected to one end of the insulating flange electrode assembly, and a hydrogen isotope detection device and a vacuum pump are connected to the permeation signal port.

[0034] The hydrogen isotope detection device includes a mass spectrometer. At the end of the sample exchange chamber, a fourth-stage mass spectrometer (QMS) is connected via a three-way connector. Its mass number range covers 1 amu to 100 amu, and it is specifically calibrated for hydrogen (H2, m / z=2) and deuterium (D2, m / z=4), enabling real-time monitoring of changes in the partial pressure of the permeated gas.

[0035] This invention integrates a mass spectrometry system capable of real-time monitoring of plasma permeation data. Utilizing a balanced sliding track, it allows for dynamic sample insertion / removal from the sample stage, enabling time-resolved permeation measurements. This provides a unique approach for studying the diffusion dynamics of hydrogen isotopes, allowing for more precise separation and calculation of key parameters during the permeation process (such as the diffusion coefficient), while avoiding interference from plasma instability in steady-state measurements. The sample stage features temperature control, and the connection between the temperature acquisition system and a laboratory computer enables high-temperature plasma permeation testing through sample heating.

[0036] Secondly, this application provides a method for measuring plasma-driven hydrogen isotope permeation, using the aforementioned measurement system. The measurement method includes the following steps:

[0037] (1) Expose the sample to a plasma beam in a vacuum environment;

[0038] (2) Remove the exposed sample from the beam into the sample exchange chamber;

[0039] (3) Measure the hydrogen isotope signal released by the sample during removal using a hydrogen isotope detection device;

[0040] (4) Calculate the diffusion coefficient and permeability based on the hydrogen isotope signal change curve over time.

[0041] Compared with the prior art, the present invention has the following advantages and beneficial effects:

[0042] (1) The present invention significantly improves experimental purity and efficiency: through the design of an isolable vacuum structure and vacuum valve, the sample changing process does not need to destroy the vacuum of the main plasma cavity, which greatly reduces the risk of impurity contamination, improves plasma purity, and at the same time reduces the vacuum waiting time and improves testing efficiency.

[0043] (2) The present invention can ensure data accuracy and repeatability: Through a precise balanced sliding track system, the sample can be quickly and accurately positioned in the uniform area of ​​the plasma beam, which fundamentally solves the experimental error caused by inaccurate positioning and uneven beam of the fixed target sample, and greatly improves the accuracy and repeatability of hydrogen isotope permeation experimental data.

[0044] (3) The present invention can enhance the adaptability and functionality of the system: the movable design of the sample stage allows the sample to penetrate into the center of plasma devices of different sizes and configurations, overcoming the geometric limitations of traditional fixed targets. The integrated temperature control and mass spectrometry measurement system realizes in-situ, real-time, high-temperature monitoring of the permeation process, with comprehensive functions.

[0045] (4) This invention achieves kinetic measurement: combined with a mass spectrometry system, it can monitor plasma permeation data in real time. The function of dynamically inserting / removing samples from the sample stage using a balanced sliding track allows for time-resolved permeation measurements, providing a unique means for studying the diffusion kinetics of hydrogen isotopes. It can more accurately separate and calculate key parameters (such as the diffusion coefficient) during the permeation process, avoiding interference from plasma instability in steady-state measurements. The sample stage has a temperature control function, and the connection between the temperature acquisition system and the laboratory computer enables high-temperature plasma permeation testing through sample heating. Attached Figure Description

[0046] To more clearly illustrate the technical solutions in this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0047] Figure 1 This is a schematic diagram of the structure of a plasma-driven hydrogen isotope permeation measurement system according to the present invention.

[0048] Figure label:

[0049] 01-Plasma generating device, 02-Vacuum valve, 03-Sample stage, 04-Flange, 05-Door, 06-Vacuum pump one, 07-Sample changing chamber, 08-Linear drive mechanism, 09-Computer, 10-Hydrogen isotope detection device, 11-Vacuum pump two. Detailed Implementation

[0050] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the embodiments. The illustrative embodiments and descriptions of this invention are only used to explain this invention and are not intended to limit this invention.

[0051] In the following description, numerous specific details are set forth in order to provide a thorough understanding of the invention. However, it will be apparent to those skilled in the art that these specific details are not necessary to practice the invention. In other embodiments, well-known materials or methods have not been specifically described in order to avoid obscuring the invention.

[0052] Throughout this specification, references to "an embodiment," "an example," or "an example" mean that a particular feature, structure, or characteristic described in connection with that embodiment or example is included in at least one embodiment of the invention. Therefore, the phrases "an embodiment," "an example," "an example," or "an example" appearing in various places throughout the specification do not necessarily refer to the same embodiment or example. Furthermore, specific features, structures, or characteristics can be combined in one or more embodiments or examples in any suitable combination and / or sub-combination. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described herein, as well as the features of those different embodiments or examples.

[0053] In this application, unless otherwise stated, the terms "upper," "lower," "left," "right," "front," "rear," "top," "bottom," "middle," "vertical," "horizontal," "lateral," and "longitudinal," etc., generally refer to the directions shown in the drawings or describe the relative positional relationships of the components in a vertical, perpendicular, or gravitational direction. They are used only to describe the relative positional relationships between the components or constituent parts and do not specifically limit the specific installation orientation of each component or constituent part. "Inner" and "outer" generally refer to the interior or exterior of the cavity relative to the chamber or the radial interior or exterior relative to the center of a circle. The above directional terms are defined for ease of understanding of the present invention and therefore do not constitute a limitation on the scope of protection of the present invention.

[0054] Furthermore, in addition to indicating location or positional relationship, some of the aforementioned terms may also have other meanings. For example, the term "above" may also be used in some cases to indicate a certain dependency or connection relationship. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.

[0055] Furthermore, the terms "installation," "setup," "equipped with," "connection," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral structure; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium, or an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.

[0056] Furthermore, the structures, proportions, sizes, etc., drawn in the accompanying drawings of this application are only used to complement the content disclosed in the specification for those skilled in the art to understand and read, and are not intended to limit the conditions under which this application can be implemented. Therefore, they have no substantial technical significance. Any modification to the structure, change in the proportional relationship, or adjustment of the size, without affecting the effects and purposes that this application can produce, should still fall within the scope of the technical content disclosed in this application.

[0057] Example 1

[0058] like Figure 1 As shown, this embodiment provides a plasma-driven hydrogen isotope permeation measurement system, including a sample exchange chamber 07 connected to a plasma generating device 01. The sample exchange chamber 07 is sealed on the side window of the plasma generating device 01 via a flange 04. A gate valve is installed at one end of the sample exchange chamber 07 near the plasma generating device 01, and a sample stage 03 is connected to the other end via a linear drive mechanism 08. A resistance heater and a thermocouple are integrated on the sample stage 03. A door 05 is connected to the top of the sample exchange chamber 07, and a vacuum pump 06 is connected to the bottom.

[0059] Specifically, the sample exchange chamber 07 is a cylindrical stainless steel (such as 304 stainless steel) cavity with an inner diameter of 100mm and a length of 300mm. In other embodiments, the specific dimensions of the sample exchange chamber 07 are determined according to actual needs, ensuring sufficient space to accommodate the sample stage 03 and the linear drive mechanism 08. The hatch 05 is connected via a flange 04, which adopts the CF flange 04 standard and is equipped with a copper gasket for sealing.

[0060] In other embodiments, the slide gate valve can be replaced by other vacuum valves such as gate valves or angle valves; the resistance heater can be replaced by heating devices such as electron beam heaters or laser heaters; and the thermocouple can be replaced by other temperature signal acquisition devices such as infrared thermometers.

[0061] Specifically, the sample stage 03 is made of a thermally conductive material, specifically oxygen-free copper. Oxygen-free copper is pure copper that does not contain oxygen or deoxidizer residues, and it has the advantages of low resistance, stable signal transmission, and long lifespan.

[0062] The sample stage 03 is internally equipped with a sheathed K-type thermocouple for temperature measurement, as well as a resistance heater (such as a tantalum wire heater). Through PID closed-loop control using an external temperature controller (which can be integrated into the computer system 09), precise temperature control from room temperature to 800℃ (temperature control accuracy ±1℃) can be achieved.

[0063] Specifically, the linear drive mechanism 08 includes a balanced sliding track, one end of which is connected to the sample stage 03, and the other end is connected to the insulating flange 04 electrode assembly.

[0064] The balancing sliding track consists of two linear guide rails and a ball screw transmission mechanism, installed inside the sample exchange chamber 07. The ball screw is driven by a stepper motor outside the sample exchange chamber 07 via a magnetohydrodynamic sealed rotary feeder. The number of steps of the stepper motor is controlled by computer 09, thereby precisely controlling the stroke of the sample stage 03, allowing it to stop at any desired position in the plasma beam region, ensuring the uniformity of irradiation on the sample surface.

[0065] A permeation signal port is provided on the balance sliding track connecting one end of the electrode assembly of the insulating flange 04. The permeation signal port is connected to the hydrogen isotope detection device 10 and the vacuum pump 11.

[0066] The measurement system in this embodiment mainly includes an isolable vacuum structure, an accurate positioning and transfer structure, and an integrated multi-functional measurement system.

[0067] The isolable vacuum structure is sealed on the side window of the plasma generating device 01 via flange 04. A key component, the slide gate valve, is located between the plasma generating device 01 and the sample changing chamber 07. When the slide gate valve is closed, samples can be safely changed on the sample stage 03 within the sample changing chamber, while the main chamber of the plasma generating device 01 maintains an independent vacuum. This closed protective structure effectively prevents external impurities from entering the main plasma chamber due to sample changing, ensuring the purity of the plasma and the stability of the experimental environment.

[0068] After the sample replacement is completed, the door 05 of the sample replacement chamber 07 is closed, and the vacuum pump group is used to evacuate the sample replacement chamber 07 to the same vacuum level as the main plasma device. Then, the insert valve is opened, and the sample stage 03 can be smoothly sent into the interior of the plasma generating device 01 along a set of balanced sliding tracks. By precisely controlling the balanced sliding tracks, the three-dimensional position of the sample stage 03 in the plasma beam can be finely adjusted to ensure that the sample surface can be accurately aligned with the beam center and obtain uniform irradiation.

[0069] The sample stage 03 integrates a heating device and a temperature signal acquisition device. The sample is loaded onto the stage through the flange 04. Thermocouples and temperature probes are placed in the base on the back of the sample. Data information is transmitted to the computer 09 through the signal line and power line led out from the base. It can achieve precise temperature control from room temperature to high temperature, simulating the actual working temperature of the first wall of fusion. The temperature data is transmitted to the laboratory computer 09 in real time through the temperature acquisition system.

[0070] A hydrogen isotope detection device 10 and a vacuum pump 11 are connected to the permeation signal port at the end of the balance sliding track. The permeation signal is transmitted to the computer 09 to detect and collect hydrogen isotope gas permeating from the back of the sample in real time, thereby directly obtaining permeation flux data.

[0071] Among them, the hydrogen isotope detection device 10 is a mass spectrometer. At the end of the sample exchange chamber 07, a fourth-stage mass spectrometer (QMS) is connected via a three-way connector. Its mass number range covers 1 amu to 100 amu, and it is specifically calibrated for hydrogen (H2, m / z=2) and deuterium (D2, m / z=4). It can monitor the partial pressure changes of the permeate gas in real time.

[0072] The core workflow of this plasma-driven hydrogen isotope permeation measurement system is as follows:

[0073] 1. Preparation stage: With the slide gate valve closed, the system is isolated from the main vacuum of the plasma device. At this time, the sample exchange chamber door 05 can be opened, and the sample to be tested (such as a tungsten sheet with a diameter of 20 mm and a thickness of 1 mm) can be installed on the fixture of the sample stage 03. Then, the door 05 can be closed.

[0074] 2. Vacuuming and Preheating: Start vacuum pump 06 (which is a unit consisting of a molecular pump and a mechanical pump) to evacuate the sample exchange chamber until its vacuum level (e.g., 1×10⁻⁵ Pa) matches that of the main chamber of the plasma device. At the same time, the sample can be preheated to the set temperature (e.g., 300℃) through the heater of the sample stage 03.

[0075] 3. Sample delivery and irradiation: Open the gate valve and drive the sample stage 03 smoothly along the balance sliding track using an external motor (which can be integrated into one end of the balance sliding track) until the sample surface is precisely centered on the plasma beam (approximately 8 mm in diameter). Activate the linear plasma device to generate hydrogen / deuterium plasma to irradiate the sample.

[0076] 4. Real-time measurement: The gaseous hydrogen isotopes that permeate through the sample enter the sample exchange chamber and are detected in real time by the end mass spectrometry system (such as a quadrupole mass spectrometer). The data is then transmitted to the laboratory computer for recording and analysis.

[0077] 5. Dynamic measurement and sample replacement: After irradiation for a certain period of time, the sample stage 03 can be driven to return to the sample replacement chamber along the track to measure its desorption signal, thereby realizing dynamic permeation measurement. After closing the plate valve, the sample replacement chamber can be vented for the next sample replacement, while the main cavity of the plasma device is always kept under vacuum.

[0078] The plasma-driven hydrogen isotope permeation measurement system in this embodiment effectively solves the problems existing in current linear plasma devices. Firstly, the isolable vacuum structure and gate valve design allow for sample changing without disrupting the vacuum of the main plasma chamber, significantly reducing the risk of contamination and improving plasma purity. It also reduces vacuuming time and increases testing efficiency. Secondly, the precise balanced sliding track system enables rapid and accurate positioning of the sample within the uniform region of the plasma beam, fundamentally solving experimental errors caused by inaccurate target positioning and beam inhomogeneity, thus greatly improving the accuracy and repeatability of hydrogen isotope permeation experimental data. Thirdly, the movable design allows the sample to penetrate deep into the center of plasma devices of different sizes and configurations, overcoming the geometric limitations of traditional fixed targets. The integrated temperature control and mass spectrometry measurement system enables in-situ, real-time, and high-temperature monitoring of the permeation process, providing comprehensive functionality. Finally, combined with a mass spectrometry system, the plasma permeation data can be monitored in real time. The ability to dynamically insert / extract the sample stage 03 using a balanced sliding track allows for time-resolved permeation measurements, providing a unique means to study the diffusion dynamics of hydrogen isotopes. This enables more precise separation and calculation of key parameters in the permeation process (such as the diffusion coefficient), avoiding interference from plasma instability in steady-state measurements. The sample stage 03 is equipped with temperature control; the connection between the temperature acquisition system and the experimental computer 09 allows for high-temperature plasma permeation testing through sample heating.

[0079] Example 2

[0080] Based on Example 1, this example provides a method for measuring plasma-driven hydrogen isotope permeation, using the measurement system described in Example 1. The specific steps are as follows:

[0081] S1. Expose the sample to a plasma beam in a vacuum environment for a period of time;

[0082] S2. Remove the exposed sample from the beam into the sample exchange chamber 07;

[0083] S3. Measure the hydrogen isotope signal released by the sample during removal using the hydrogen isotope detection device 10;

[0084] S4. Calculate the diffusion coefficient and permeability based on the hydrogen isotope signal variation curve over time.

[0085] The online insertion and extraction of samples on the sample stage 03 within the sample exchange chamber 07 can be achieved using a balanced sliding track. By controlling the exposure time and interval of the sample in the plasma and combining it with mass spectrometry data, the diffusion coefficient and permeability of hydrogen isotopes in the material can be calculated, as follows:

[0086] The steady-state hydrogen flux J (mol / m²·s) can be described by Fick's first law:

[0087] (1)

[0088] Where D is the diffusion coefficient (m² / s), l is the film thickness (m), and dc / dx is the concentration gradient. At steady state (t→∞), the flux becomes:

[0089] (2)

[0090] According to Sievert's law under ideal conditions:

[0091] (3)

[0092] Substituting equation (3) into equation (2), we get:

[0093] (4)

[0094] In this experiment, P out ≈0. Here, n is the pressure exponent. The value of n depends on the mechanism: n=0.5 for diffusion-confined processes, and n=1 for complex-confined processes. Permeability Φ follows the Arrhenius relation:

[0095] (5)

[0096] Where R is the ideal gas constant, T is the absolute temperature (K), Φ0 is the pre-exponential factor (mol / (m·s·Pa¹ / 2)), and E Q It is the osmotic activation energy (eV).

[0097] Diffusion coefficient D: D= ;

[0098] L is the sample thickness, and hysteresis time t is the time delay. l It is the intercept of the integral of the permeation data on the x-axis (diffusion time).

[0099] Finally, it should be noted that the specific embodiments described above further illustrate the purpose, technical solution, and beneficial effects of the present invention. It should be understood that the above descriptions are merely specific embodiments of the present invention and are not intended to limit the scope of protection of the present invention. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present invention should be included within the scope of protection of the present invention. For those skilled in the art, it is obvious that this application is not limited to the details of the above exemplary embodiments, and that the present application can be implemented in other specific forms without departing from the spirit or basic characteristics of the present application. Furthermore, it should be noted that the various specific technical features described in the above specific embodiments can be combined in any suitable manner without contradiction. To avoid unnecessary repetition, the present invention will not describe various possible combinations separately. Therefore, the embodiments should be considered exemplary and non-limiting in all respects. The scope of this application is defined by the appended claims rather than the foregoing description, and therefore, all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included within this application.

Claims

1. A measurement system for plasma-driven hydrogen isotope permeation, characterized in that, The sample exchange chamber (07) is connected to the plasma generating device (01). A vacuum valve (02) is installed at one end of the sample exchange chamber (07) near the plasma generating device (01), and a sample stage (03) is connected to the other end through a linear drive mechanism (08). A heating device and a temperature signal acquisition device are integrated on the sample stage (03). A door (05) is connected to the top of the sample exchange chamber (07), and a vacuum pump (06) is connected to the bottom.

2. The measurement system for plasma-driven hydrogen isotope permeation according to claim 1, characterized in that, The sample exchange chamber (07) is sealed and installed on the side window of the plasma generating device (01) via a flange (04).

3. The measurement system for plasma-driven hydrogen isotope permeation according to claim 1, characterized in that, The vacuum valve (02) includes any one of a slide gate valve, a gate valve, and an angle valve.

4. The measurement system for plasma-driven hydrogen isotope permeation according to claim 1, characterized in that, The heating device includes any one of a resistance heater, an electron beam heater, and a laser heater installed on the sample stage (03).

5. The measurement system for plasma-driven hydrogen isotope permeation according to claim 1, characterized in that, The temperature signal acquisition device includes either a thermocouple or an infrared thermometer installed on the sample stage (03).

6. The measurement system for plasma-driven hydrogen isotope permeation according to claim 1, characterized in that, The sample stage (03) is made of thermally conductive material.

7. The measurement system for plasma-driven hydrogen isotope permeation according to claim 1, characterized in that, The linear drive mechanism (08) includes a balance sliding track, one end of which is connected to the sample stage (03), and the other end is connected to the insulating flange (04) electrode assembly.

8. The measurement system for plasma-driven hydrogen isotope permeation according to claim 7, characterized in that, The balanced sliding track consists of two linear guide rails and a ball screw transmission mechanism, which is installed inside the sample changing chamber (07). The ball screw is driven by a stepper motor outside the sample changing chamber (07) through a magnetic fluid sealed rotary feeder.

9. The measurement system for plasma-driven hydrogen isotope permeation according to claim 7, characterized in that, A permeation signal port is provided on the balance sliding track connected to one end of the electrode assembly of the insulating flange (04), and a hydrogen isotope detection device (10) and a vacuum pump (11) are connected to the permeation signal port.

10. A method for measuring plasma-driven hydrogen isotope permeation, characterized in that, The measurement is performed using the measurement system according to any one of claims 1 to 9, and the measurement method includes the following steps: (1) Expose the sample to a plasma beam in a vacuum environment; (2) Remove the exposed sample from the beam into the sample exchange chamber (07); (3) Measure the hydrogen isotope signal released by the sample during removal using a hydrogen isotope detection device (10); (4) Calculate the diffusion coefficient and permeability based on the hydrogen isotope signal change curve over time.

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