Single-capillary X-ray lens for soft X-ray regulation and control and manufacturing method of single-capillary X-ray lens

Abstract

The invention discloses a single-capillary X-ray lens for soft X-ray regulation and control and a manufacturing method thereof, and the lens specifically comprises an inner reflection layer which is a thin film arranged on the inner wall of the lens and is used for total reflection transmission of soft X-rays; the supporting layer is a metal shell layer arranged on the outer wall of the inner reflecting layer and is used for providing structural support for the lens; wherein the inner reflecting layer and the supporting layer jointly form an ellipsoid-shaped hollow inner cavity channel, one end of the ellipsoid-shaped hollow inner cavity channel is an inlet end, and the other end of the ellipsoid-shaped hollow inner cavity channel is an outlet end. The problems that in the prior art, a hollow blank is deformed due to uneven heat transfer, and single thermal separation is low in efficiency and prone to deformation are solved, the supporting layer and the inner reflection layer are designed to be of a composite structure, the supporting layer and the inner reflection layer are firmly combined and cooperatively matched, the soft X-ray tube has the advantages of being compact in structure, excellent in optical performance and good in mechanical stability, and meanwhile efficient regulation and control over soft X-rays are achieved.

Description

Technical Field

[0001] This invention relates to a single capillary X-ray lens, specifically to a single capillary X-ray lens for soft X-ray modulation and its manufacturing method. Background Technology

[0002] Parabolic or ellipsoidal single-capillary X-ray lenses are ideal soft X-ray focusing devices, theoretically capable of focusing soft X-rays to their theoretical limit, and possessing advantages such as high transmission efficiency and no dispersion. Currently, high-precision soft X-ray single-capillary X-ray lenses are generally manufactured using a "replication method." This involves first machining a parabolic or ellipsoidal "core" using a high-precision machine tool, then performing a series of inspections, corrections, and polishing processes on the core, followed by coating the core using electroplating to thicken it, and finally removing the core using thermal expansion and contraction to obtain the single-capillary X-ray lens.

[0003] The roughness of the core during processing determines the roughness of the inner surface of the resulting lens, which in turn determines the lens's transmission efficiency. Therefore, it is necessary to minimize the roughness of the core surface during processing, but this places high demands on inspection and processing techniques and is quite challenging. Existing literature 1 (Bilderback, DH, Huang, R., Kazimirov, A. and others, 2006. Single-bounce monocapillaries for focusing synchrotron radiation: modeling, measurements and theoretical limits. Journal of Synchrotron Radiation, 62(1), pp.16-24. Available at: https: / / journals.iucr.org / s / issues / 2006 / 01 / 00 / fd5006 / fd5006.pdf) discloses the manufacturing process of a single capillary X-ray lens. A hollow glass tube is used as the blank. An ellipsoidal core (3000mm major semi-axis, 20mm minor semi-axis) is drawn by heating and speed control, with infrared temperature measurement and control. A 50-100nm platinum thin film is deposited by electron beam evaporation as a reflective layer and an electroplated cathode. A constant current (2-5A / dm³) is maintained in a nickel sulfamate electrolyte. 2 Electroplating a 0.5~0.8mm nickel support layer; thermal expansion separation of the core using 80℃ deionized water (heating 2℃ / min), resulting in a finished product with 12~23μm scorch marks and a strength gain of 450 times.

[0004] However, this document 1 has shortcomings in terms of the structural logic of the structural design and manufacturing process: First, the core blank structure is limited. Hollow glass tubes are used as blanks. The hollow cavity leads to uneven radial heat conduction. Fluctuations in tube wall thickness can easily cause core contour distortion, increasing the difficulty of correction and limiting the upper limit of core accuracy from the root. Second, the core-lens separation mechanism is simple, relying only on the difference in thermal expansion coefficients to achieve separation. There is no auxiliary mechanical structure, and it requires a long time to slowly heat up. The separation logic is passive and inefficient, and it is also easy to cause deformation of the support layer due to uneven stress. Summary of the Invention

[0005] The purpose of this invention is to provide a single capillary X-ray lens for soft X-ray control and its manufacturing method. It solves the problems of uneven heat transfer and distortion caused by hollow blanks in the prior art, and the inefficiency and easy deformation of single thermal separation. It adopts a composite structure design of support layer and inner reflection layer. The inner reflection layer and support layer are firmly combined and work together, which has the characteristics of compact structure, excellent optical performance and good mechanical stability. At the same time, it realizes efficient control of soft X-rays.

[0006] To achieve the above objectives, the present invention provides a single capillary X-ray lens for soft X-ray modulation. The lens specifically includes: an inner reflective layer, which is a thin film disposed on the inner wall of the lens for total internal reflection transmission of soft X-rays; and a support layer, which is a metal shell disposed on the outer wall of the inner reflective layer for providing structural support for the lens; wherein the inner reflective layer and the support layer together form an ellipsoidal hollow inner cavity channel with one end as the inlet and the other end as the outlet.

[0007] Preferably, the ellipsoidal hollow inner cavity channel has a major semi-axis of 3000 mm, a minor semi-axis of 20 mm, an inlet inner diameter of 8 mm, and an outlet inner diameter of 5 mm.

[0008] Preferably, the inner reflective layer is a platinum thin film with a thickness of 80~120 nm and a surface roughness better than 0.5 nm RMS.

[0009] Preferably, the support layer is a nickel layer with a thickness of 0.6 mm, and is a uniformly thick shell structure distributed along the outer wall contour of the inner reflective layer.

[0010] This invention provides a method for manufacturing a single capillary X-ray lens as described above, comprising the following steps: (1) Core drawing steps: The solid glass tube is drawn at 820℃~880℃ in four stages of variable speed to form the main core of the ellipsoidal single capillary X-ray lens; wherein, the four stages of variable speed drawing refers to the initial speed of 0.05 mm / min~0.3 mm / min, the main acceleration stage of 0.5 m / min~3.0 m / min, the stable stage of 0.5 m / min~2.0 m / min, and the final stage of 0.1 mm / min; (2) Reflective layer preparation steps: deposit a metal thin film on the outer surface of the main core of the ellipsoidal single capillary X-ray lens to form an inner reflective layer; (3) Electroplating support layer step: Electroplating is performed using the inner reflective layer as the cathode to form a support layer that wraps around the inner reflective layer; (4) Separation step: The ellipsoidal single capillary X-ray lens core is separated from the lens body composed of the inner reflection layer and the support layer by means of thermal expansion.

[0011] Preferably, in the core drawing step, the solid borosilicate glass tube is heated to a softened state at 820℃~880℃. When the glass sag rate is 0.1~0.5 mm / min, the surface has a smooth liquid luster, and it exhibits no elastic plastic deformation when touched, it is stretched in four stages at varying speeds to obtain the core.

[0012] Preferably, in the inner reflective layer fabrication step, electron beam evaporation deposition technology is used, with a vacuum degree of not less than 5 × 10⁻⁶. -4 The metal thin film was deposited at Pa, with an electron beam current of 100 mA to 300 mA, an electron beam power of 6 kW to 10 kW, a deposition rate of 0.2 nm / s to 0.5 nm / s, and a substrate temperature of 150 to 250 °C.

[0013] Preferably, in the electroplating support layer step, a nickel sulfamate solution is used as the electroplating bath, and the current density is controlled to be 1~3 A / dm³. 2 The temperature is 50~55℃, accompanied by stirring of the solution (10~20 times / minute) until the thickness of the support layer reaches 0.6 mm; the nickel aminosulfonate solution includes nickel aminosulfonate, nickel chloride, boric acid, sodium dodecyl sulfate, sodium o-sulfonylbenzeneimide and brightener butynediol derivative, and the pH value is 3.8~4.2.

[0014] More preferably, the nickel aminosulfonate solution comprises nickel aminosulfonate at a concentration of 350-400 g / L, nickel chloride at a concentration of 5-10 g / L, boric acid at a concentration of 35-40 g / L, sodium dodecyl sulfate at a concentration of 0.05-0.15 g / L, sodium o-sulfonylbenzeneimide at a concentration of 1-3 g / L, and a brightener butynediol derivative at a concentration of 0.1-0.5 mL / L.

[0015] Preferably, the separation step specifically involves: vertically fixing the single capillary X-ray lens containing the support layer and immersing it in deionized water with the outlet end facing downwards, and heating it to 80-95°C at a rate of 0.5-2°C / min, using the difference in thermal expansion and gravity to separate the main core of the ellipsoidal single capillary X-ray lens from the lens body composed of the inner reflective layer and the support layer.

[0016] This invention provides the use of the single capillary X-ray lens as described above for focusing and modulating soft X-rays in a synchrotron radiation beamline or laboratory X-ray source.

[0017] The present invention provides a single capillary X-ray lens for soft X-ray modulation and its manufacturing method, which solves the problems of uneven heat transfer and distortion caused by hollow blanks in the prior art, and the inefficiency and easy deformation of single thermal separation, and has the following advantages: 1. This invention employs a solid glass tube to form an ellipsoidal core using variable-speed stretching, achieving a surface roughness better than 0.5 nm without machining or polishing. An 80-120 nm platinum thin film is deposited via electron beam evaporation as an inner reflective layer, with precise control over its adhesion to the glass. A 0.6 mm uniform nickel support layer is electroplated onto the platinum film. Finally, a water bath heating to 80-95°C is used to achieve non-destructive separation by utilizing the difference in thermal expansion coefficients and the product's own weight. This method features a short process flow, low cost, and high yield.

[0018] 2. The lens of this invention is a platinum-nickel composite structure with an axially narrowing ellipsoidal hollow inner cavity channel, a major semi-axis of 3000 mm, a minor semi-axis of 20 mm, an inlet inner diameter of 8 mm, and an outlet inner diameter of 5 mm. The inner reflective layer is an 80-120 nm platinum thin film with a surface roughness better than 0.5 nm RMS, forming an X-ray transmission channel; the support layer is a 0.6 mm thick nickel shell layer, tightly attached to the outer wall of the inner reflective layer, with flat ends forming flat ports. The lens of this invention adopts a composite structure design of a support layer and an inner reflective layer, in which the inner reflective layer is responsible for optical functions, and the support layer ensures structural stability. The two are firmly bonded at the interface, together forming a complete functional device. Through the synergistic cooperation of the above-mentioned support layer and inner reflective layer structure, it has the characteristics of compact structure, excellent optical performance, and good mechanical stability, while achieving efficient control of soft X-rays. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the cross-sectional structure of the single capillary X-ray lens of the present invention.

[0020] Figure 2 This is a schematic diagram illustrating the fabrication process of the ellipsoidal single-capillary X-ray lens master core of the present invention. Figure 3 This is a schematic diagram of the preparation process of the inner reflective layer of the present invention.

[0021] Figure 4 This is a schematic diagram of the electroplating process of the ellipsoidal single capillary X-ray lens of the present invention.

[0022] Figure 5 This is a schematic diagram illustrating the separation process between the core of the ellipsoidal single capillary X-ray lens and the ellipsoidal single capillary X-ray lens of the present invention.

[0023] Notes: 1. Inner reflective layer; 2. Support layer; 3. Ellipsoidal single capillary X-ray lens master core; 4. Solid borosilicate glass tube; 5. Heating furnace; 6. Platinum metal; 7. Nickel sulfamate solution; 8. Beaker; 9. Nickel anode plate. Detailed Implementation

[0024] The technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0025] Example 1 A single capillary X-ray lens for soft X-ray modulation, such as Figure 1 The diagram shows a cross-sectional view of the single capillary X-ray lens of the present invention. This X-ray lens employs a composite structure design of a support layer 2 and an inner reflective layer 1, forming an ellipsoidal hollow inner cavity channel that narrows along the axial direction. The major semi-axis of the inner cavity channel is 3000 mm, the minor semi-axis is 20 mm, the inner diameter at the inlet end is 8 mm, and the inner diameter at the outlet end is 5 mm. This geometry provides an ideal total internal reflection transmission path for soft X-rays.

[0026] The inner reflective layer 1 is an ellipsoidal hollow cavity channel inner wall (preferably a platinum thin film), forming a continuous ellipsoidal reflective cavity with uniform thickness between 80 and 120 nm. The inner surface of the inner reflective layer 1 constitutes an X-ray transmission channel with a surface roughness better than 0.5 nm RMS. The support layer 2 is tightly attached to the outer wall of the inner reflective layer 1 and is a continuous metal shell (preferably made of nickel) with a thickness of 0.6 mm. It has a uniform thickness distribution following the contour of the inner reflective layer 1, without local protrusions or depressions, and forms flat ports at both the lens inlet and outlet ends, providing the necessary mechanical strength and rigidity for the lens as a whole.

[0027] The X-ray lens adopts a composite structure design of support layer 2 and inner reflection layer 1. The inner reflection layer 1 is responsible for optical functions, while the support layer 2 ensures structural stability. The two are firmly bonded at the interface to form a complete functional device. Through the synergistic cooperation of the support layer 2 and inner reflection layer 1, efficient control of soft X-rays is achieved. It has the characteristics of compact structure, excellent optical performance and good mechanical stability.

[0028] The above-mentioned method for manufacturing a single capillary X-ray lens for soft X-ray modulation includes: (1) Drawing an ellipsoidal single capillary X-ray lens master core 3 like Figure 2The diagram shows the fabrication process of the ellipsoidal single-capillary X-ray lens master core of the present invention. A solid borosilicate glass tube 4 with a uniform diameter (10~20mm) (purity ≥99.99%, coefficient of thermal expansion approximately 3.5×10⁻⁶) is used. -6 The glass rod ( / K) is placed in heating furnace 5 and heated to 820℃~880℃ for 30min~90min, with temperature control accuracy within ±1°C, until it softens (i.e., the glass rod begins to droop evenly and slowly in the center of the heating zone at a rate of 0.1~0.5 mm / min, the surface becomes highly smooth and reflective with a liquid luster, the original frosted feel disappears, and when a thin refractory rod (such as alumina) is lightly touched to the edge of the heating zone, the glass should exhibit viscous plastic deformation without elastic rebound; after reaching this state and holding it at this temperature, the programmed stretching is started). Once the glass droops at a rate of 0.1~0.5 mm / min, the surface is smooth with a liquid luster, and it exhibits non-elastic plastic deformation when touched, the glass is stretched in four stages with varying speeds: initial speed of 0.05~0.3 mm / min, stretching time of 30~90min; main acceleration stage of 0.5~3.0 m / min, stretching time of 5~15min; and stabilization stage of 0.5~2.0 m / min. The drawing speed is 3-8 min, and the drawing time is reduced to 0.1 mm / min at the end to prevent breakage, with a drawing time of 10-20 min. After four stages of variable speed drawing, it is formed into an ellipsoidal single-capillary X-ray lens main core 3 with a specific ellipsoidal surface. The major semi-axis of the ellipsoidal single-capillary X-ray lens main core 3 is 3000 mm, the minor semi-axis is 20 mm, the inlet diameter (Din) is 8 mm, and the outlet diameter (Dout) is 5 mm. After drawing, it is cooled to room temperature in the furnace to avoid cracking of the core due to sudden cooling.

[0029] (2) Preparation of inner reflective layer 1 like Figure 3 The diagram shown illustrates the fabrication process of the inner reflective layer of this invention, with a minimum thickness of 5 × 10⁻⁶. -4 Under a vacuum of Pa, an electron beam power of 6~10kW, an electron beam current of 100~300 mA, a deposition rate of 0.2~0.5 nm / s, and a substrate temperature of 150~250℃, a layer of metallic platinum 6 (purity ≥99.999%, deposition thickness 80~120 nm) is uniformly coated on the outer surface of the ellipsoidal single capillary X-ray lens master core 3 obtained in step (1) using electron beam evaporation deposition technology, forming a continuous and uniform inner reflection layer 1. This inner reflection layer 1 plays two key roles: firstly, it serves as the inner surface in the final lens to cause total internal reflection of soft X-rays; secondly, it serves as the cathode in the subsequent electroplating step.

[0030] (3) Electroplating to form a support layer 2 like Figure 4The diagram illustrates the electroplating process of the ellipsoidal single-capillary X-ray lens of the present invention. The ellipsoidal single-capillary X-ray lens core 3, covered with an inner reflective layer 1, is vertically placed in the center of a beaker 8 containing a nickel sulfamate solution 7. The nickel sulfamate solution 7 comprises 350-400 g / L nickel sulfamate (main salt, providing nickel ions), 5-10 g / L nickel chloride (anodic activator, improving conductivity), 35-40 g / L boric acid (pH buffer), 0.05-0.15 g / L sodium dodecyl sulfate as a wetting agent, 1-3 g / L sodium o-sulfonylbenzeneimide as a stress reliever, and 0.1-0.5 mL / L butynediol derivative as a brightener. The nickel sulfamate solution 7 is maintained at a pH of 3.8-4.2, a temperature of 50-55°C, and a current density of 1-3 A / dm³. 2 For the inner wall of the capillary, the nickel plating time for 0.6 mm is approximately 21 days. During placement, ensure the lens's outlet end is immersed in the solution, while the inlet end can be flush with or slightly above the liquid surface. Arrange nickel anode plates 9 (purity ≥99.999%) around the ellipsoidal single-capillary X-ray lens core 3. Connect the power supply for electroplating, depositing metallic nickel on the cathode of the inner reflective layer 1 on the outer surface of the ellipsoidal single-capillary X-ray lens core 3, ultimately forming a 0.6 mm thick nickel support layer 2, which provides the necessary mechanical rigidity for the lens. During electroplating, the solution must be stirred in real-time to ensure coating uniformity, and the coating thickness is monitored in real-time using an eddy current thickness gauge. After electroplating, remove the core, rinse the surface with deionized water to remove residual electrolyte, and dry it.

[0031] (4) Separation of core and lens like Figure 5 The diagram illustrates the separation process of the ellipsoidal single-capillary X-ray lens core and the ellipsoidal single-capillary X-ray lens of this invention. The ellipsoidal single-capillary X-ray lens core 3, containing a support layer 2 and covered with an inner reflective layer 1, is vertically fixed in a container, and deionized water is injected, with the outlet of the ellipsoidal single-capillary X-ray lens core 3 facing downwards. The support layer 2 and the inner reflective layer 1 are completely immersed in the deionized water. The lens is heated from room temperature (approximately 20-25°C) to 90°C at a rate of 1°C / min for approximately 65-70 minutes, and then held at 90°C for 60 minutes. A borosilicate glass core (with a thermal expansion coefficient of approximately 3.5 × 10⁻⁶) is used. -6 The coefficient of thermal expansion between the platinum layer and the metal layer (platinum's thermal expansion coefficient is approximately 9 × 10⁻⁶ K) -6 / K, the coefficient of thermal expansion of nickel is 13.4×10 -6 The difference in K / 2 (or K / 2) and the lens's own gravity cause the two to separate cleanly at the interface. After separation, the lens is removed, and any remaining impurities on the inner wall are wiped with anhydrous ethanol. This yields the final ellipsoidal single capillary X-ray lens, the structure of which is shown in the appendix. Figure 1 .

[0032] Key points of quality control: Step (1) requires the use of a Taylor profilometer to detect the core surface shape error <1 μm; Step (2) requires the use of X-ray photoelectron spectroscopy to verify the continuity and density of the platinum film. Using Al Kα (1486.6 eV) or Mg Kα (1253.6 eV) excitation sources, the film continuity is confirmed if no silicon (Si) or boron (B) peaks are detected; Step (3) requires the use of an eddy current thickness gauge (measurement accuracy ±0.01 mm) to monitor the nickel layer thickness; Step (4) after separation, requires the use of an optical microscope (magnification 50×-1000× continuously adjustable) to check the inner wall of the lens for scratches, cracks and other defects.

[0033] Addressing the inherent defects in the hollow glass tube blank replication method for drawing ellipsoidal single capillary X-ray lenses described in Reference 1, such as uneven radial heat conduction, amplified tube wall fluctuations, and core contour distortion caused by the hollow cavity, this invention proposes a precision drawing method based on solid glass blanks. The core advantage lies in using solid blanks, fundamentally eliminating the physical basis of thermal asymmetry and hollow structure instability. This ensures the uniformity and predictability of material flow during the drawing process, directly achieving nanometer-level or higher core contour accuracy and dimensional consistency. This breaks through the precision limits of traditional methods, and the resulting product's surface quality and dimensions meet usage requirements in a single forming process, eliminating subsequent polishing and other correction steps, simplifying the process, and reducing costs.

[0034] Although the present invention has been described in detail through the preferred embodiments above, it should be understood that the above description should not be considered as a limitation of the present invention. Various modifications and substitutions to the present invention will be apparent to those skilled in the art after reading the above description. Therefore, the scope of protection of the present invention should be defined by the appended claims.

Claims

1. A single capillary X-ray lens for soft X-ray modulation, characterized in that, The lens specifically includes: The inner reflective layer is a thin film disposed on the inner wall of the lens for total internal reflection transmission of soft X-rays; The support layer, which is a metal shell layer disposed on the outer wall of the inner reflective layer, is used to provide structural support for the lens; The inner reflective layer and the support layer together form an ellipsoidal hollow inner cavity channel with one end as the inlet and the other end as the outlet.

2. The single capillary X-ray lens according to claim 1, characterized in that, The ellipsoidal hollow inner cavity channel has a major semi-axis of 3000 mm, a minor semi-axis of 20 mm, an inlet inner diameter of 8 mm, and an outlet inner diameter of 5 mm.

3. The single capillary X-ray lens according to claim 1 or 2, characterized in that, The inner reflective layer is a platinum thin film with a thickness of 80~120 nm and a surface roughness better than 0.5 nm RMS.

4. The single capillary X-ray lens according to any one of claims 1 to 3, characterized in that, The support layer has a thickness of 0.6 mm and is a uniformly thick shell structure distributed along the outer wall contour of the inner reflective layer.

5. A method for manufacturing a single capillary X-ray lens as described in any one of claims 1 to 4, characterized in that, Includes the following steps: (1) Core drawing steps: stretch a solid glass tube at 820℃~880℃ in four stages of variable speed to form an ellipsoidal single capillary X-ray lens main core; The four-stage variable speed stretching refers to the stretching being performed at an initial speed of 0.05 mm / min to 0.3 mm / min, a main acceleration stage of 0.5 m / min to 3.0 m / min, a stabilization stage of 0.5 m / min to 2.0 m / min, and a final stage of 0.1 mm / min. (2) Inner reflective layer preparation steps: deposit a metal thin film on the outer surface of the main core of the ellipsoidal single capillary X-ray lens to form an inner reflective layer; (3) Electroplating support layer step: Electroplating is performed using the inner reflective layer as the cathode to form a support layer that wraps around the inner reflective layer; (4) Separation step: The ellipsoidal single capillary X-ray lens core is separated from the lens body composed of the inner reflection layer and the support layer by means of thermal expansion.

6. The manufacturing method according to claim 5, characterized in that, In the core drawing step, the solid borosilicate glass tube is heated to a softened state at 820℃~880℃. When the glass drooping rate is 0.1~0.5 mm / min, the surface has a smooth liquid luster, and it exhibits no elastic plastic deformation when touched, it is stretched in four stages of variable speed to obtain the core.

7. The manufacturing method according to claim 5, characterized in that, In the preparation step of the inner reflective layer, electron beam evaporation deposition technology is used, with a vacuum degree of not less than 5×10⁻⁶. -4 The metal thin film was deposited at Pa, with an electron beam current of 100 mA to 300 mA, an electron beam power of 6 kW to 10 kW, a deposition rate of 0.2 nm / s to 0.5 nm / s, and a substrate temperature of 150 to 250 °C.

8. The manufacturing method according to claim 5, characterized in that, In the electroplating support layer step, nickel sulfamate solution is used as the electroplating solution, and the current density is controlled at 1~3 A / dm³. 2 The temperature is 50~55℃, and the solution is stirred until the thickness of the support layer reaches 0.6 mm; the nickel aminosulfonate solution includes nickel aminosulfonate, nickel chloride, boric acid, sodium dodecyl sulfate, sodium o-sulfonylbenzeneimide and brightener butynediol derivative, and the pH value is 3.8~4.

2.

9. The manufacturing method according to claim 5, characterized in that, The separation step is as follows: the single capillary X-ray lens containing the support layer is vertically fixed and the outlet end is immersed in deionized water with the outlet end facing down. The temperature is raised to 80-95°C at a rate of 0.5-2°C / min. By utilizing the difference in thermal expansion and gravity, the main core of the ellipsoidal single capillary X-ray lens is separated from the lens body composed of the inner reflection layer and the support layer.

10. The use of a single capillary X-ray lens according to any one of claims 1 to 4 for focusing and modulating soft X-rays in a synchrotron radiation beamline or a laboratory X-ray source.

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