Ultrasonic micropore machining method and device

Abstract

The invention relates to the technical field of micropore machining, in particular to an ultrasonic micropore machining method and device, and the ultrasonic micropore machining method comprises the steps that a first ultrasonic vibration table is arranged between a workbench and a workpiece; the ultrasonic cutter punches the workpiece; the ultrasonic vibration table generates vibration and transmits the vibration to the grinding material flowing above the workpiece; determining the sound stream drag force Fdrag of the first ultrasonic vibration table on the abrasive particles in the abrasive material; determining the acoustic radiation force Frad of the first ultrasonic vibration table on the abrasive particles in the abrasive material; and the impulse I of the abrasive particles in the horizontal direction is determined based on the acoustic streaming drag force Fdrag and the acoustic radiation force Frad, and the impulse I is made to be larger than 0. And abrasive particles are driven to move through ultrasonic waves, so that the technical effect of improving the machining quality is achieved.

Description

Technical Field

[0001] This application relates to the field of micro-hole processing technology, and in particular to an ultrasonic micro-hole processing method and apparatus. Background Technology

[0002] Non-contact ultrasonic micro-hole machining mainly relies on the combined effect of mechanical impact, polishing and cavitation of abrasive particles on the workpiece surface under ultrasonic action. When the effect exceeds the critical value of brittle fracture, the material is removed.

[0003] In existing technologies, the sufficiency and uniformity of abrasive supply during processing directly affect processing efficiency and quality. During abrasive impact processing, workpiece and tool debris inevitably mix with abrasive grains, resulting in uneven particle size and material in the mixture, which is difficult to recover. At the same time, abrasive processing inevitably causes wear, affecting processing quality.

[0004] Therefore, the technical problem with existing technologies is that the processing quality is poor. Summary of the Invention

[0005] This application provides an ultrasonic micro-hole processing method and apparatus, which improves processing quality by driving abrasive particles to move using ultrasound.

[0006] On the one hand, the ultrasonic micro-hole processing method provided in this application adopts the following technical solution:

[0007] An ultrasonic micropore fabrication method, comprising:

[0008] A first ultrasonic vibration table is set between the worktable and the workpiece; an ultrasonic tool drills holes in the workpiece.

[0009] The ultrasonic vibration table generates vibrations that are transmitted to the abrasive material flowing above the workpiece.

[0010] Determine the acoustic drag force F exerted by the abrasive grains on the first ultrasonic vibration table. drag ;

[0011] Determine the acoustic radiation force F exerted by the abrasive grains on the first ultrasonic vibration table. rad ;

[0012] Based on acoustic drag force F drag Sound radiation force F rad Determine the impulse I of the abrasive grain in the horizontal direction, such that the impulse I > 0.

[0013] Preferably, the abrasive grains in the abrasive are subjected to an acoustic flow drag force F from the first ultrasonic vibration table. drag include:

[0014] Based on the liquid viscosity η of the abrasive, the abrasive radius r, the abrasive flow velocity v, and the abrasive particle velocity u, the acoustic drag force F is determined.drag Acoustic drag force F drag for:

[0015] F drag =6πηr(vu).

[0016] Preferably, the determination of the acoustic radiation force F of the abrasive grains in the abrasive by the first ultrasonic vibration table rad include:

[0017] Based on the abrasive radius r, the liquid compressibility coefficient κ0 of the abrasive, the monopole scattering coefficient α of the abrasive, the incident sound pressure p1 at the location of the abrasive, and the sound pressure gradient. Determine the acoustic radiation force components caused by monopole scattering;

[0018] Based on the abrasive radius r, the liquid density ρ0 of the abrasive, the dipole scattering coefficient β of the abrasive, the flow velocity v of the abrasive, and the flow velocity gradient. Determine the acoustic radiation force components caused by dipole scattering;

[0019] Based on the acoustic radiation force components caused by monopole scattering and dipole scattering, the acoustic radiation force F exerted by the abrasive grains on the first ultrasonic vibration table is determined. rad Sound radiation force F rad for:

[0020]

[0021] in, This is the acoustic radiation force component caused by monopole scattering;

[0022] This is the acoustic radiation force component caused by dipole scattering;

[0023] Re is the Reynolds number.

[0024] Preferably, the method based on acoustic flow drag force F drag Sound radiation force F rad Determining the horizontal impulse I of the abrasive grains includes:

[0025] Based on acoustic drag force F drag Determine the horizontal component (F) of the acoustic drag force. drag ) r ;

[0026] Based on acoustic radiation force F rad Determine the horizontal component of the acoustic radiation force (F) rad ) r ;

[0027] Based on the horizontal component of acoustic drag force (F) drag ) r The horizontal component of the acoustic radiation force (F)rad ) r Determine the horizontal resultant force, and then determine the impulse I of the abrasive grain in the horizontal direction based on the horizontal resultant force. The impulse I of the abrasive grain in the horizontal direction is:

[0028]

[0029] Where T is the sound field period of the first ultrasonic vibration table.

[0030] As a preferred option, it also includes:

[0031] A recycling bin is provided and connected to the worktable; the recycling bin is used to receive the processed abrasive.

[0032] A second ultrasonic vibration table is provided at the bottom of the recycling bin, and the second ultrasonic vibration table forms an incident sound field inside the recycling bin to cause the abrasive particles to stratify.

[0033] Abrasive grains that meet the requirements are recovered based on the location of abrasive grain stratification.

[0034] As a preferred option, it also includes:

[0035] The radius r of recyclable abrasive grains is determined based on process requirements. 临界 ;

[0036] Based on the radius r of recyclable abrasive grains 临界 Determine the gravitational force mg of recyclable abrasive particles in the incident sound field. 临界 Acoustic drag force F drag临界 Sound radiation force F rad临界 At the target height Z where the resultant force in the horizontal direction is zero 临界 ;

[0037] Based on target height Z 临界 Determine the height H of the recycling bin and the frequency f of the second ultrasonic vibration table to make the target height Z... 临界 A node or antinode located in the incident sound field.

[0038] As a preferred option, if it is a node, the target height is... or,

[0039] If it is an antinode, the target height

[0040] Where λ is the wavelength of the incident sound field. c is the ultrasonic velocity of the second ultrasonic vibration table, f is the frequency of the second ultrasonic vibration table; n and m are positive integers.

[0041] Preferably, the target height Z on the recycling bin is... 临界 A first drain port is provided at the position of the corresponding node or antinode, and the first drain port is used to recover recyclable abrasive particles that meet the process requirements.

[0042] A second drain outlet is provided at the bottom of the recycling tank or at other nodes or antinodes of the incident sound field. The second drain outlet is used for the remaining abrasive particles.

[0043] On the other hand, the ultrasonic micro-hole processing device provided in this application adopts the following technical solution:

[0044] An ultrasonic micropore processing device, comprising:

[0045] Workbench;

[0046] A first ultrasonic vibration table, wherein the first ultrasonic vibration table is disposed on the worktable; and

[0047] An ultrasonic cutting tool is used to drill holes in a workpiece placed on the first ultrasonic vibration table.

[0048] As a preferred option, it also includes:

[0049] A recycling bin is connected to the workbench and is used to receive processed abrasive materials.

[0050] A second ultrasonic vibration table is disposed at the bottom of the recycling bin, and the second ultrasonic vibration table forms an incident sound field inside the recycling bin to cause the abrasive particles to stratify.

[0051] This allows for the recovery of suitable abrasive grains based on their stratification location.

[0052] In summary, this application includes at least one of the following beneficial technical effects:

[0053] 1. By controlling the horizontal impulse I of the abrasive grains to be greater than 0, the abrasive grains are guaranteed to have continuous horizontal momentum, which can uniformly impact and polish the workpiece. This effectively avoids defects such as low hole diameter accuracy, poor surface roughness, broken needles, and hole wall collapse caused by insufficient or uneven abrasive grain momentum, and significantly improves the quality and stability of micro-hole processing.

[0054] 2. Abrasive grains are stratified by incident sound field, and drainage ports are set at specific locations to recover abrasive grains that meet the requirements, so that a large number of abrasive grains that still have processing capabilities can be recycled, reducing the waste of abrasive. Attached Figure Description

[0055] Figure 1 This is a schematic diagram of the micropore fabrication method steps described in this application;

[0056] Figure 2 This is a schematic diagram of the micro-hole processing apparatus described in this application;

[0057] Figure 3This is a schematic diagram of the recycling structure of the micropore processing device described in this application.

[0058] Explanation of reference numerals in the attached drawings: 100, worktable; 200, first ultrasonic vibration table; 300, workpiece; 400, ultrasonic cutting tool; 500, recovery bucket; 510, first drain port; 520, second drain port; 600, second ultrasonic vibration table. Detailed Implementation

[0059] The serial numbers assigned to components in this document, such as "first" and "second," are used solely to distinguish the described objects and have no sequential or technical meaning. The terms "connection" and "linkage" used in this application, unless otherwise specified, include both direct and indirect connections (linkages). It should be understood that the terms "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," and "counterclockwise," indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are used solely for the convenience of describing this application and simplifying the description. They do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0060] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0061] This application provides an ultrasonic micro-hole processing method and apparatus. By using ultrasound to drive the movement of abrasive particles, the abrasive particles can be recovered, and the quality of the recovered abrasive particles can be improved, thereby achieving the technical effect of improving the processing quality.

[0062] To better understand the above technical solutions, a detailed description of the technical solutions will be provided below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely illustrative of this application and are not intended to limit the scope of this application.

[0063] The core requirement of non-contact ultrasonic micro-hole machining is to achieve high-precision machining through the mechanical impact, polishing, and cavitation effects of abrasive particles. However, existing technologies suffer from two major problems that directly restrict machining efficiency, quality, and cost control:

[0064] First, the uneven abrasive mixture leads to unstable machining quality. Two types of impurities / mutated abrasives are generated during machining: on the one hand, there are workpiece 300 and tool needle debris. During machining, abrasives impact the surface of workpiece 300, and tool needles come into contact with and rub against workpiece 300, inevitably causing debris to mix into the abrasive mixture; on the other hand, there is wear of the abrasives themselves. After repeated impacts, the abrasives will show wear phenomena such as smaller size and irregular shape. The combination of these two problems results in a serious unevenness in the particle size and material purity of the abrasives in the mixture. Large-sized abrasives may excessively impact workpiece 300, causing surface damage, while small-sized abrasives or debris cannot provide sufficient cutting force, ultimately leading to low machining hole accuracy, poor surface roughness, and even defects such as broken needles and collapsed hole walls.

[0065] Secondly, the abrasive is difficult to recycle, resulting in resource waste and high costs. Because the abrasive mixture is uneven and cannot be reused, the existing technology can only maintain the processing quality by frequently replacing it with new abrasive. On the one hand, a large number of large-sized abrasive particles that still have processing capabilities are discarded with the waste liquid, resulting in extremely low abrasive utilization. On the other hand, frequent shutdowns to replace abrasive not only interrupt the processing flow (reducing efficiency) but also increase the abrasive procurement cost, making it uneconomical in long-term production.

[0066] Therefore, this application aims to solve the technical problems of poor processing quality and high processing cost caused by uneven abrasive mixing and difficulty in abrasive recycling in existing ultrasonic micro-hole processing.

[0067] This application provides an ultrasonic micro-hole fabrication method, such as... Figure 1 As shown, it includes:

[0068] A first ultrasonic vibration table 200 is set between the worktable 100 and the workpiece 300; an ultrasonic tool 400 punches holes in the workpiece 300.

[0069] The ultrasonic vibration table generates vibrations that are transmitted to the abrasive material flowing above the workpiece at a depth of 300.

[0070] S1: Determine the acoustic drag force F exerted by the abrasive particles on the first ultrasonic vibration table 200. drag ;

[0071] S2: Determine the acoustic radiation force F exerted by the abrasive grains on the first ultrasonic vibration table 200. rad ;

[0072] S3: Based on acoustic flow drag force F drag Sound radiation force F rad Determine the impulse I of the abrasive grain in the horizontal direction, such that the impulse I > 0.

[0073] Specifically, such as Figure 2As shown, a first ultrasonic vibration table 200 is provided between the worktable 100 and the workpiece 300. The function of the first ultrasonic vibration table 200 is to generate ultrasonic vibrations and transfer the vibration energy to the abrasive flowing above the workpiece 300, providing a power source for the abrasive grains' acoustic drag force and acoustic radiation force. It should be noted that in the prior art, energy is provided only by the vibration of the ultrasonic tool 400, and the movement of the abrasive grains mainly depends on the liquid flow caused by the tool vibration. This method is difficult to guarantee the uniformity of the abrasive grain distribution on the surface of the workpiece 300. However, this application adds a first ultrasonic vibration table 200 between the worktable 100 and the workpiece 300, so that the workpiece 300 is directly in the vibration field of the first ultrasonic vibration table 200. When the abrasive flows above the workpiece 300, the first ultrasonic vibration table 200 can directly transfer the vibration energy to the abrasive grains, providing an additional and controllable power source for the abrasive grains.

[0074] An ultrasonic tool 400 is used to drill holes in the workpiece 300. The vibration of the ultrasonic tool 400 and the vibration of the first ultrasonic vibration table 200 work together to provide energy for the micro-hole machining. The vibration of the ultrasonic tool 400 is the core energy source in traditional machining, mainly providing the abrasive grains with impact energy perpendicular to the surface of the workpiece 300; while the vibration of the first ultrasonic vibration table 200 provides the abrasive grains with motion energy parallel to the surface of the workpiece 300.

[0075] The vibration generated by the first ultrasonic vibration table 200 is transmitted to the abrasive flowing above the workpiece 300, placing the abrasive in an ultrasonic vibration field. The vibration of the first ultrasonic vibration table 200 is transmitted to the abrasive layer above, causing the abrasive as a whole to be in an ultrasonic vibration state. In the vibration field, the abrasive particles are subjected to two key forces: acoustic drag force and acoustic radiation force. These two forces are the core driving forces controlling the horizontal movement of the abrasive particles. A stable flow layer of abrasive is formed above the workpiece 300, and the vibration energy is uniformly transmitted to the abrasive layer. The abrasive particles begin to move irregularly in the vibration field, but overall, they exhibit a tendency to move in the horizontal direction.

[0076] Determine the acoustic drag force F of the abrasive particles drag and the acoustic radiation force F of abrasive particles rad ; Determine the acoustic drag force F exerted by the abrasive grains on the first ultrasonic vibration table 200. drag Acoustic drag force F drag The acoustic drag force F is the dragging force exerted by the liquid on the abrasive particles in the ultrasonic vibration field, which directly affects the horizontal motion state of the abrasive particles. drag The acoustic flow drag force is the force exerted on abrasive particles by the flow of liquid due to vibration in an ultrasonic vibration field. It is one of the main driving forces for the horizontal movement of abrasive particles. Accurate calculation of the acoustic flow drag force enables precise control of the horizontal momentum of abrasive particles. By monitoring the physical parameters of the abrasive (such as viscosity and flow velocity) and the parameters of the abrasive particles (such as radius and movement speed) in real time through sensors, the specific value of the acoustic flow drag force can be calculated.

[0077] Determine the acoustic radiation force F exerted by the abrasive grains on the first ultrasonic vibration table 200. rad Sound radiation force F rad The horizontal momentum of the abrasive grains is determined by the radiative force exerted on them by factors such as sound pressure gradient and flow velocity gradient in the ultrasonic field, together with the acoustic drag force. The acoustic radiative force F rad It is the radiative force generated on abrasive particles in an ultrasonic field due to factors such as sound pressure gradient and flow velocity gradient. Its direction and magnitude are related to the size and material of the abrasive particles and the distribution of the ultrasonic field.

[0078] Based on acoustic drag force F drag Sound radiation force F rad Determine the impulse I of the abrasive grain in the horizontal direction, and ensure that I > 0.

[0079] Impulse is the accumulation of force over time, directly reflecting the change in momentum of the abrasive grains in the horizontal direction. If the impulse I ≤ 0, it indicates that the momentum of the abrasive grains in the horizontal direction is insufficient and they cannot be discharged in time; while ensuring I > 0 allows the abrasive grains to obtain continuous, unidirectional momentum in the horizontal direction, thereby uniformly moving the workpiece 300 surface and discharging it. By calculating the value of the horizontal impulse I, if I ≤ 0, the vibration parameters (such as frequency and amplitude) of the first ultrasonic vibration table 200 or the flow rate of the abrasive are adjusted until I > 0 and stabilizes within the preset range.

[0080] Furthermore, it was determined that the abrasive grains in the abrasive were subjected to the acoustic drag force F from the first ultrasonic vibration table 200. drag include:

[0081] Based on the liquid viscosity η of the abrasive, the abrasive radius r, the abrasive flow velocity v, and the abrasive particle velocity u, the acoustic drag force F is determined. drag Acoustic drag force F drag for:

[0082] F drag =6πηr(vu).

[0083] Where η refers to the dynamic viscosity of the liquid medium in the abrasive, a physical quantity reflecting the magnitude of the liquid's viscosity. The higher the viscosity, the stronger the resistance of the liquid to the abrasive grains, and the greater the acoustic drag force; r refers to the equivalent spherical radius of the abrasive grains. The size of the abrasive grains directly determines the magnitude of the drag force they experience in the fluid; the larger the radius, the greater the drag force. Since abrasive grains have a certain size distribution, a statistical average radius is used here, which can be obtained in advance by equipment such as a laser particle size analyzer; v refers to the macroscopic flow velocity of the abrasive grains above the workpiece at 300°, controlled by the feeding system, and is the main power source for the liquid's drag force on the abrasive grains. The higher the flow velocity, the greater the relative velocity between the liquid and the abrasive grains, and the greater the drag force; u refers to the velocity of the abrasive grains themselves in the liquid, which is affected by both the liquid flow velocity and ultrasonic vibration, and is usually less than the liquid flow velocity v. Therefore, vu is positive, indicating that the direction of the liquid's drag force on the abrasive grains is consistent with the direction of liquid flow.

[0084] The relationship between acoustic flow drag force and abrasive and abrasive grain parameters was quantitatively established. By detecting the values ​​of each parameter in the formula in real time, the acoustic flow drag force on the abrasive grain can be accurately calculated, providing reliable force parameters for subsequent horizontal impulse calculation. At the same time, when the calculated acoustic flow drag force is insufficient, it can be adjusted by adjusting the abrasive flow rate v (increasing the feed rate) or replacing it with an abrasive with a higher viscosity η, so as to achieve controllability of acoustic flow drag force.

[0085] Furthermore, it was determined that the abrasive grains in the abrasive were subjected to acoustic radiation force F from the first ultrasonic vibration table 200. rad include:

[0086] Based on the abrasive radius r, the liquid compressibility coefficient κ0 of the abrasive, the monopole scattering coefficient α of the abrasive, the incident sound pressure p1 at the location of the abrasive, and the sound pressure gradient. Determine the acoustic radiation force components caused by monopole scattering;

[0087] Based on the abrasive radius r, the liquid density ρ0 of the abrasive, the dipole scattering coefficient β of the abrasive, the flow velocity v of the abrasive, and the flow velocity gradient. Determine the acoustic radiation force components caused by dipole scattering;

[0088] Based on the acoustic radiation force components caused by monopole scattering and dipole scattering, the acoustic radiation force F exerted by the abrasive grains on the first ultrasonic vibration table 200 is determined. rad Sound radiation force F rad for:

[0089]

[0090] in, This is the acoustic radiation force component caused by monopole scattering;

[0091] This is the acoustic radiation force component caused by dipole scattering;

[0092] Re is the Reynolds number.

[0093] It should be noted that acoustic radiation force is the net force experienced by abrasive particles in an ultrasonic field due to the scattering of sound waves. Depending on the scattering mode, it can be divided into two main components: monopole scattering and dipole scattering. The total acoustic radiation force is the vector sum of these two components. Monopole scattering occurs because the abrasive particle undergoes a volume change due to periodic pressure in the ultrasonic field, acting as a new acoustic radiation source (monopole), thus generating a radiation force. Dipole scattering occurs because the abrasive particle's acoustic impedance differs from that of the surrounding liquid, causing it to vibrate in the ultrasonic field, acting as a dipole sound source, thus generating a radiation force. Therefore, the calculation of acoustic radiation force requires calculating both scattering components separately and then combining them.

[0094] Specifically, the acoustic radiation force component caused by monopole scattering is calculated. This component is related to the abrasive grain radius r, the fluid compressibility coefficient κ0 of the abrasive, the monopole scattering coefficient α of the abrasive grain, the incident sound pressure p1 at the location of the abrasive grain, and the sound pressure gradient. Related; the monopole scattering coefficient α of the abrasive grain reflects the volume scattering ability of the abrasive grain to sound waves, and is related to the acoustic impedance ratio of the abrasive grain and the liquid; the liquid compressibility coefficient κ0 of the abrasive reflects the volume change ability of the liquid under sound pressure; sound pressure gradient It reflects the rate of change of the spatial distribution of sound pressure in the ultrasonic field.

[0095] Calculate the acoustic radiation force component caused by dipole scattering. The acoustic radiation force component caused by dipole scattering is related to the abrasive particle radius r, the liquid density ρ0 of the abrasive, the dipole scattering coefficient β of the abrasive, the flow velocity v of the abrasive, and the flow velocity gradient. Related; the dipole scattering coefficient β of abrasive particles reflects their ability to scatter sound waves through vibration, and is also related to the acoustic impedance ratio; flow velocity gradient It reflects the rate of change in the spatial distribution of abrasive flow velocity.

[0096] Based on the acoustic radiation force components caused by monopole scattering and dipole scattering, the acoustic radiation force F exerted by the abrasive grains on the first ultrasonic vibration table 200 is determined. rad .

[0097] The scattering effect of abrasive particles in the ultrasonic field was comprehensively considered, and the magnitude and direction of the acoustic radiation force were quantitatively calculated, compensating for the calculation errors when only considering the acoustic flow drag force, thus making the stress analysis of abrasive particles more complete. Furthermore, this formula clarifies the influence of various ultrasonic field parameters on the acoustic radiation force, providing a theoretical basis for subsequent adjustments to the ultrasonic vibration table parameters.

[0098] Furthermore, based on the acoustic drag force F drag Sound radiation force F radDetermining the horizontal impulse I of the abrasive grains includes:

[0099] Based on acoustic drag force F drag Determine the horizontal component (F) of the acoustic drag force. drag ) r ;

[0100] Based on acoustic radiation force F rad Determine the horizontal component of the acoustic radiation force (F) rad ) r ;

[0101] Based on the horizontal component of acoustic drag force (F) drag ) r The horizontal component of the acoustic radiation force (F) rad ) r Determine the horizontal resultant force, and then determine the impulse I of the abrasive grain in the horizontal direction based on the horizontal resultant force. The impulse I of the abrasive grain in the horizontal direction is:

[0102]

[0103] Where T is the sound field period of the first ultrasonic vibration table 200.

[0104] It is understandable that impulse is the accumulation of force over time, and the horizontal movement of abrasive particles depends on the magnitude of their horizontal impulse. Since both acoustic drag force and acoustic radiation force are vectors, they have multiple components, including horizontal and vertical components. The vertical component mainly affects the vertical impact force of the abrasive particles and has a smaller impact on the horizontal polishing effect. Therefore, it is necessary to first extract the horizontal components of the two forces and then calculate their cumulative impulse within the ultrasonic vibration cycle; this prevents abrasive particle deposition and facilitates abrasive particle discharge.

[0105] By quantitatively calculating the horizontal impulse of the abrasive grains, a direct link between processing parameters (such as vibration frequency and abrasive flow rate) and processing results was established, enabling precise control of the abrasive grain motion state. Operators can monitor the impulse value and adjust relevant parameters in real time to ensure that the abrasive grains always move and exit relative to the workpiece with optimal horizontal momentum, thus guaranteeing the stability of processing quality.

[0106] Furthermore, such as Figure 3 As shown, an abrasive particle recycling step is added to the existing abrasive particle discharge process, achieving the recycling of abrasive materials. The core reason why abrasive particles cannot be recycled in existing technologies is that the size and density differences between abrasive particles and debris in the mixture are small, making effective separation difficult. This application utilizes the characteristic that abrasive particles of different sizes experience different forces in the incident sound field to achieve precise stratification.

[0107] The processing method further includes: setting up a recycling bin 500, which is connected to the worktable 100, and the recycling bin 500 is used to receive the processed abrasive; setting up a second ultrasonic vibration table 600 at the bottom of the recycling bin 500, which forms an incident sound field in the recycling bin 500 to cause the abrasive particles to stratify; and recycling the abrasive particles that meet the requirements based on the abrasive particle stratification position.

[0108] Specifically, a recycling bin 500 is set up, which is connected to the worktable 100 to receive the processed abrasive. The processed abrasive mixture (containing qualified abrasive, worn abrasive, and debris) needs to be collected through a special container. The structural design of the recycling bin 500 must ensure that the abrasive can flow in smoothly and that the internal space is sufficient to form a stable incident sound field.

[0109] A second ultrasonic vibration table 600 is installed at the bottom of the recycling bin 500. The second ultrasonic vibration table 600 creates an incident sound field within the recycling bin 500 to cause the abrasive particles to stratify. The incident sound field is formed by the superposition of the incident wave generated by the second ultrasonic vibration table 600 and the reflected wave from the top of the recycling bin 500. The sound field has fixed nodes and antinodes; the sound pressure is lowest and the particle vibration velocity is highest at the nodes, while the sound pressure is highest and the particle vibration velocity is lowest at the antinodes. Abrasive particles of different sizes experience different acoustic radiation forces in the incident sound field. Larger, qualified abrasive particles experience greater acoustic radiation forces and are pushed towards specific nodes or antinodes, while smaller, worn abrasive particles and debris accumulate at other locations, thus achieving stratification. The second ultrasonic vibration table 600 is activated, and the vibration frequency is adjusted to create a stable incident sound field within the recycling bin 500. The processed abrasive slowly flows into the recycling bin 500, and the abrasive particles begin to gradually stratify within the sound field.

[0110] This system recycles abrasive grains by recovering those that meet the required stratification location. The stratification location of qualified abrasive grains in the incident sound field is determined through pre-detection. A recovery mechanism is then installed at this location to separate the qualified abrasive grains and re-feed them to the processing system's feeding device, achieving recycling. The abrasive grains undergo stratification within the recovery bin 500, with different sizes forming distinct particle layers at different heights. The position of the qualified abrasive grain layer stabilizes, initiating the recovery operation. Utilizing the stratification characteristics of the ultrasonic incident sound field, non-contact, precise separation of abrasive grains is achieved, avoiding secondary damage caused by traditional separation methods (such as filtration and centrifugation). Simultaneously, the separation efficiency and purity are high, providing reliable technical support for the recycling of abrasive grains.

[0111] Furthermore, this also includes:

[0112] The radius r of recyclable abrasive grains is determined based on process requirements. 临界 ;

[0113] Based on the radius r of recyclable abrasive grains临界 Determine the gravitational force mg of recyclable abrasive particles in the incident sound field. 临界 Acoustic drag force F drag临界 Sound radiation force F rad临界 At the target height Z where the resultant force in the horizontal direction is zero 临界 ;

[0114] Based on target height Z 临界 Determine the height H of the recycling bin (500mm) and the frequency f of the second ultrasonic vibration table (600mm), so that the target height Z... 临界 A node or antinode located in the incident sound field.

[0115] Specifically, the radius r of recyclable abrasive grains is determined based on process requirements. 临界 Different micro-hole machining processes (such as hole diameter and surface roughness requirements) have specific requirements for abrasive grain size. For example, machining a micro-hole with a diameter of 10 μm requires abrasive grains with a radius ≤ 5 μm. If the abrasive grain radius is too large, it will cause scratches on the hole wall; if it is too small, the cutting force will be insufficient. Therefore, it is necessary to set the critical radius of the recyclable abrasive grain, i.e., the radius r of the recyclable abrasive grain, according to the process requirements. 临界 Radius ≥ radius r of recyclable abrasive grains 临界 The abrasive grains are qualified and can be reused for processing; their radius is smaller than the radius r of the recyclable abrasive grains. 临界 These are substandard abrasive particles and must be discharged.

[0116] Based on the radius r of recyclable abrasive grains 临界 Determine the gravitational force mg of recyclable abrasive particles in the incident sound field. 临界 Acoustic drag force F drag临界 Sound radiation force F rad临界 At the target height Z where the resultant force in the horizontal direction is zero 临界 Qualified abrasive particles will be subjected to three main forces in the incident sound field: gravity mg. 临界 (Downward), acoustic drag force F drag临界 (Upward, the resultant force of buoyancy and traction on the particles by the liquid medium), acoustic radiation force F rad临界 (Up or down, depending on the sound field position); when the resultant force of the three forces in the horizontal direction is zero, the abrasive grain will remain stably at that height (i.e., in a state of force equilibrium), and this stable position is the target height Z. 临界 If the resultant force is not zero, the abrasive particles will move upward or downward, and cannot be stably separated into layers.

[0117] Using the force balance formula F rad临界 +F drag临界 =mg 临界 The r is obtained through the above formulas for calculating acoustic radiation force and acoustic drag force. 临界Based on the corresponding abrasive parameters, the acoustic radiation force and acoustic drag force required for the abrasive particles to reach force equilibrium are calculated. Then, using the force distribution model of the incident sound field, the height position that satisfies this force condition, i.e., the target height Z where the resultant force in the horizontal direction is zero, is determined. 临界 Establishing a one-to-one correspondence between qualified abrasive grains and target heights provides a precise positional basis for subsequent equipment parameter adjustments; simply align the recovery mechanism with the target height Z. 临界 This allows for the recovery of qualified abrasive grains, avoiding recovery errors caused by uncertain stratification positions.

[0118] Based on target height Z 临界 Determine the height H of the recycling bin (500mm) and the frequency f of the second ultrasonic vibration table (600mm), so that the target height Z... 临界 A node or antinode located in the incident sound field.

[0119] Target height Z 临界 It needs to be located at a node or antinode of the incident sound field (the region where abrasive particles are most easily and stably aggregated; the sound pressure is lowest at the node, and particles aggregate due to sound radiation force; the sound pressure is highest at the antinode, and particles aggregate due to sound pressure gradient); if the target height Z 临界 If the abrasive grains are not located at a node or antinode, they cannot remain stably and will drift. Therefore, it is necessary to adjust the height H of the recovery bucket by 500 mm (to ensure the target height Z). 临界 Within the height range inside the barrel) and the second ultrasonic vibration table at a frequency of 600 Hz (adjusting the standing wave wavelength to make the target height Z... 临界 (Located at a node or antinode), satisfying the recovery condition. This is achieved using the standing wave wavelength formula. c is the ultrasonic velocity of the second ultrasonic vibration table 600, and f is the frequency of the second ultrasonic vibration table 600. Adjusting the frequency f of the second ultrasonic vibration table 600 makes the target height Z... 临界 The corresponding position is exactly a node or antinode.

[0120] Furthermore, the positions of the nodes and antinodes of the incident sound field follow a fixed mathematical law, which is related to the wavelength. Directly related, by establishing the target height Z 临界 and The formula for the frequency f of the second ultrasonic vibration table (600) allows for precise adjustment of equipment parameters to ensure the target height Z is achieved. 临界 It falls on a node or antinode.

[0121] Standing waves are formed by the superposition of two sound waves with the same frequency but opposite propagation directions. Their nodes (the distance between two adjacent nodes is...) With the antinodes (the distance between two adjacent antinodes is also ) The positions of the particles are periodically distributed along the direction of sound field propagation (i.e., the 500-meter height direction of the recycling bin); the sound pressure is the lowest and the particle vibration velocity is the highest at the nodes, and the sound pressure is the highest and the particle vibration velocity is the lowest at the antinodes; both positions can make the particles stably aggregate under the action of sound radiation force, but the nodes are more effective at aggregating large-sized particles (qualified abrasive particles) (because large-sized particles have greater inertia and are more likely to be stable at positions with higher vibration velocities).

[0122] Wherein, if it is a node, the target height or,

[0123] If it is an antinode, the target height

[0124] Where λ is the wavelength of the incident sound field. c is the ultrasonic velocity of the second ultrasonic vibration table 600, f is the frequency of the second ultrasonic vibration table 600; n and m are positive integers.

[0125] Furthermore, based on the determined target height Z 临界 (At the node or antinode position), different function drain ports are set to achieve the separation of qualified abrasive particles recovery and unqualified particles discharge, thus completing the abrasive particle cycle.

[0126] Specifically, such as Figure 3 As shown, on the recycling bin 500, the target height Z 临界 A first drain port 510 is provided at the corresponding node or antinode position. The first drain port 510 is used to recover recyclable abrasive particles that meet the process requirements. A second drain port 520 is provided at the bottom of the recovery tank 500 or at other nodes or antinode positions corresponding to the incident sound field. The second drain port 520 is used for the remaining abrasive particles.

[0127] The function of the first drain port 510 is to recover qualified abrasive grains that meet the process requirements. The position of the first drain port 510 must be aligned with the target height Z. 临界 Complete correspondence (i.e., target height Z) 临界 (The location of the node or antinode); at this location, qualified abrasive grains will accumulate stably, and the mixing of debris and worn abrasive grains can be minimized during recycling.

[0128] In the processed abrasive, besides the target height Z 临界 While there are acceptable abrasive particles at the target height Z, a large number of unacceptable particles (debris, abrasive wear particles) remain at other heights. If these particles are not discharged promptly, they will gradually accumulate at the bottom of the recovery tank 500. Therefore, a second drain outlet 520 is required to discharge the unacceptable particles. The location of the second drain outlet 520 is typically chosen at the bottom of the recovery tank 500 (because some unacceptable particles, due to their small size and low density, will settle to the bottom) or at another location different from the target height Z. 临界The corresponding nodes / antinodes (another part will gather at nodes / antinodes at other heights) are used to ensure that no unqualified particles remain.

[0129] This application also provides an ultrasonic micropore processing device, such as... Figure 2 As shown, it includes a worktable 100, a first ultrasonic vibration table 200, and an ultrasonic cutter 400; the first ultrasonic vibration table 200 is disposed on the worktable 100; the workpiece 300 is placed on the first ultrasonic vibration table 200, and the ultrasonic cutter 400 is used to drill holes in the workpiece 300.

[0130] like Figure 3 As shown, it also includes a recycling bin 500 and a second ultrasonic vibration table 600. The recycling bin 500 is connected to the worktable 100 and is used to receive the processed abrasive. The second ultrasonic vibration table 600 is disposed at the bottom of the recycling bin 500 and forms an incident sound field within the recycling bin 500 to cause the abrasive particles to stratify. This allows the abrasive particles that meet the requirements to be recycled based on the stratification position of the abrasive particles.

[0131] Although preferred embodiments of this application have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments as well as all changes and modifications falling within the scope of this application.

[0132] Obviously, those skilled in the art can make various modifications and variations to this application without departing from the spirit and scope of this application. Therefore, if such modifications and variations fall within the scope of the claims of this application and their equivalents, this application also intends to include such modifications and variations.

Claims

1. A method for ultrasonic micro-hole fabrication, characterized in that, include: A first ultrasonic vibration table (200) is set between the worktable (100) and the workpiece (300); an ultrasonic tool (400) punches holes in the workpiece (300); The ultrasonic vibration table generates vibrations that are transmitted to the abrasive material flowing above the workpiece (300); Determine the acoustic drag force F of the abrasive grains in the abrasive material caused by the first ultrasonic vibration table (200). drag ; Determine the acoustic radiation force F exerted by the abrasive grains on the first ultrasonic vibration table (200) in the abrasive. rad ; Based on acoustic drag force F drag Sound radiation force F rad Determine the impulse I of the abrasive grain in the horizontal direction, such that the impulse I > 0.

2. The ultrasonic micro-hole fabrication method according to claim 1, characterized in that, The abrasive particles in the abrasive are subjected to the acoustic drag force F from the first ultrasonic vibration table (200). drag include: Based on the liquid viscosity η of the abrasive, the abrasive radius r, the abrasive flow velocity v, and the abrasive particle velocity u, the acoustic drag force F is determined. drag Acoustic drag force F drag for:

3. The ultrasonic micro-hole fabrication method according to claim 1, characterized in that, The abrasive grains in the abrasive are subjected to acoustic radiation force F from the first ultrasonic vibration table (200). rad include: Based on the abrasive radius r, the liquid compressibility coefficient κ0 of the abrasive, the monopole scattering coefficient α of the abrasive, the incident sound pressure p1 at the location of the abrasive, and the sound pressure gradient. Determine the acoustic radiation force components caused by monopole scattering; Based on the abrasive radius r, the liquid density ρ0 of the abrasive, the dipole scattering coefficient β of the abrasive, the flow velocity v of the abrasive, and the flow velocity gradient. Determine the acoustic radiation force components caused by dipole scattering; Based on the acoustic radiation force components caused by monopole scattering and dipole scattering, the acoustic radiation force F exerted by the abrasive grains on the first ultrasonic vibration table (200) is determined. rad Sound radiation force F rad for: in, This is the acoustic radiation force component caused by monopole scattering; This is the acoustic radiation force component caused by dipole scattering; Re is the Reynolds number.

4. The ultrasonic micro-hole fabrication method according to any one of claims 1-3, characterized in that, The based on acoustic drag force F drag Sound radiation force F rad Determining the horizontal impulse I of the abrasive grains includes: Based on acoustic drag force F drag Determine the horizontal component (F) of the acoustic drag force. drag ) r ; Based on acoustic radiation force F rad Determine the horizontal component of the acoustic radiation force (F) rad ) r ; Based on the horizontal component of acoustic drag force (F) drag ) r The horizontal component of the acoustic radiation force (F) rad ) r Determine the horizontal resultant force, and then determine the impulse I of the abrasive grain in the horizontal direction based on the horizontal resultant force. The impulse I of the abrasive grain in the horizontal direction is: Where T is the sound field period of the first ultrasonic vibration table (200).

5. The ultrasonic micro-hole fabrication method according to claim 1, characterized in that, Also includes: A recycling bin (500) is provided, which is connected to the worktable (100). The recycling bin (500) is used to receive the processed abrasive. A second ultrasonic vibration table (600) is provided at the bottom of the recycling bin (500), and the second ultrasonic vibration table (600) forms an incident sound field in the recycling bin (500) to cause the abrasive particles to stratify. Abrasive grains that meet the requirements are recovered based on the location of abrasive grain stratification.

6. The ultrasonic micro-hole fabrication method according to claim 5, characterized in that, Also includes: The radius r of recyclable abrasive grains is determined based on process requirements. 临界 ; Based on the radius r of recyclable abrasive grains 临界 Determine the gravitational force mg of recyclable abrasive particles in the incident sound field. 临界 Acoustic drag force F drag临界 Sound radiation force F rad临界 At the target height Z where the resultant force in the horizontal direction is zero 临界 ; Based on target height Z 临界 Determine the height H of the recycling bin (500) and the frequency f of the second ultrasonic vibration table (600) to make the target height Z 临界 A node or antinode located in the incident sound field.

7. The ultrasonic micro-hole fabrication method according to claim 6, characterized in that, If it is a node, target height or, If it is an antinode, the target height Where λ is the wavelength of the incident sound field. c is the ultrasonic velocity of the second ultrasonic vibration table (600), f is the frequency of the second ultrasonic vibration table (600); n and m are positive integers.

8. The ultrasonic micro-hole fabrication method according to claim 1, characterized in that, On the recycling bin (500), the target height Z 临界 A first drain port (510) is provided at the position of the corresponding node or antinode. The first drain port (510) is used to recover recyclable abrasive particles that meet the process requirements. A second drain port (520) is provided at the bottom of the recycling tank (500) or at other nodes or antinodes of the incident sound field. The second drain port (520) is used for the remaining abrasive particles.

9. An ultrasonic micro-hole processing device, characterized in that, include: Workbench (100); A first ultrasonic vibration table (200) is disposed on the worktable (100); and An ultrasonic cutter (400) and a workpiece (300) are placed on the first ultrasonic vibration table (200). The ultrasonic cutter (400) is used to drill holes in the workpiece (300).

10. An ultrasonic micro-hole processing device according to claim 9, characterized in that, Also includes: A recycling bin (500) is connected to the worktable (100) and is used to receive processed abrasive. A second ultrasonic vibration table (600) is disposed at the bottom of the recycling bin (500). The second ultrasonic vibration table (600) forms an incident sound field in the recycling bin (500) to cause the abrasive particles to stratify. This allows for the recovery of suitable abrasive grains based on their stratification location.

Images