Electrode structure and coating equipment

Abstract

The invention discloses an electrode structure and coating equipment. The electrode structure comprises a rotatable base, an electrode holder and an electrode stem, a plurality of electrode holders are arranged in the circumferential direction of the base at intervals, a containing groove is formed in each electrode holder, a pair of electrode connecting pieces is arranged in each containing groove, the starting side of each electrode connecting piece is electrically connected with a set of corresponding electrode rods, and the terminating side of each electrode connecting piece is provided with an electrode contact part protruding out of the top face of the corresponding electrode holder; the pair of electrode contact parts are correspondingly and electrically connected with a carrier which is vertically placed on the electrode holder; and one end, far away from the termination side of the electrode connecting piece, of each group of electrode rods is electrically connected with the outside. In this way, the electrode connecting piece is electrically connected with the carrier in the vertical direction, even if the electrode connecting piece deforms, the influence on the height of the electrode contact part is small, and therefore the electric connection alignment of the carrier is not influenced.

Description

Technical Field

[0001] This invention relates to the field of photovoltaic or semiconductor device technology, and in particular to an electrode structure and coating equipment. Background Technology

[0002] In related technologies, the reaction chamber of the coating equipment is equipped with an electrode holder electrically connected to a boat. The electrode holder contains an insulating ceramic tube, and a horizontally positioned rod-shaped electrode is mechanically fixed within the insulating ceramic tube. The rod-shaped electrode is electrically connected to the electrode holder using an elastic conductive sheet (such as a beryllium bronze spring) or a spring-pressing structure. However, when a current flows through the rod-shaped electrode for a long time, it is prone to deformation and damage to the insulating ceramic tube containing the rod-shaped electrode. This causes the horizontally positioned rod-shaped electrode to change, resulting in misalignment with the corresponding carrier and affecting the electrical contact between the rod-shaped electrode and the carrier. Summary of the Invention

[0003] This invention provides an electrode structure and coating equipment to solve the problem in the prior art that rod-shaped electrodes are prone to deformation when a current is applied for a long time, which can easily damage the electrode holder that houses the electrode rod, causing the horizontal rod-shaped electrode to change and become misaligned.

[0004] The technical solution of the present invention is an electrode structure, including a rotatable base, an electrode seat, and an electrode rod;

[0005] Multiple electrode seats are arranged circumferentially and spaced apart from each other along the base. Each electrode seat has a receiving groove, and a pair of electrode connectors are provided in the receiving groove. The starting side of the electrode connector is electrically connected to a set of corresponding electrode rods, and the ending side has an electrode contact portion protruding from the top surface of the electrode seat. The pair of electrode contact portions are electrically connected to a carrier placed vertically on the electrode seat.

[0006] Multiple sets of electrode rods are arranged radially along the base, with one end of each set of electrode rods, away from the termination side of the electrode connector, electrically connected to the outside.

[0007] Furthermore, the cross-section of the electrode holder parallel to the top surface of the base is any one of trapezoidal, fan-shaped or irregular shape, and is symmetrically distributed with a corresponding set of electrode rods as the center line. The receiving groove extends along the side wall edge of the electrode holder with the electrode rod as the center on both sides. The electrode contact parts of a pair of electrode connectors in the receiving groove are respectively set close to the two inclined sides of the cross-section of the electrode holder.

[0008] Furthermore, the electrode connector is sheet-like or irregularly shaped, and it bends along the extension direction of the receiving groove in the thickness direction. There is a gap between the sidewall of the receiving groove and the surface of the electrode connector, and the vertical distance between the sidewall of the receiving groove and the bend of the electrode connector is greater than the preset spacing, forming a deformation space for the electrode connector to expand under heat.

[0009] Furthermore, multiple limiting members are provided on the side of the electrode holder where the electrode contact portion is located, and the limiting members are used to restrict the movement of the carrier.

[0010] Furthermore, the electrode structure also includes a rotating assembly and an electric slip ring;

[0011] The first end of the rotating part of the rotating assembly is connected to the base, and the second end of the rotating part of the rotating assembly is connected to the rotor of the electric slip ring; the rotor is electrically connected to the end of each set of electrode rods away from the starting side of the electrode connector.

[0012] The rotating assembly is used to drive the base and rotor to rotate synchronously.

[0013] Furthermore, each set of electrode components is provided in the base corresponding to each set of electrode rods. One end of each set of electrode components extends into the rotor and forms an electrical contact with the rotor conductive ring. The other end of each set of electrode components forms an electrode transition part, which is electrically connected to the corresponding electrode rod.

[0014] Furthermore, the base is provided with a first insulating cover plate, a second insulating cover plate, and a third insulating cover plate in sequence along the vertical direction; each group of electrode components consists of a first electrode component and a second electrode component;

[0015] The insulating space formed between the first insulating cover plate and the second insulating cover plate is used to accommodate the electrode transfer part of the second electrode.

[0016] The insulating space formed between the second and third insulating covers is used to accommodate the electrode adapter of the first electrode.

[0017] Furthermore, the electrode holder includes a first supporting insulating plate and a second supporting insulating plate that are sealed and covered with each other, and a foot support plate is also provided on the side of the second supporting insulating plate facing away from the first supporting insulating plate.

[0018] The base has multiple cantilever arms along its circumferential edge. At the end of each cantilever arm, a support column is vertically installed upwards. The top of the support column is connected to the foot support plate, and the foot support plate is also connected to the support column by inclined reinforcing ribs.

[0019] Furthermore, the rotating assembly includes a motor, a first gear, and a second gear;

[0020] The output end of the motor is connected to the first gear, which meshes with the second gear. The end of the second gear facing away from the slip ring is connected to a base, and the rotor of the slip ring is connected to the middle of the second gear.

[0021] The present invention also proposes a coating device, comprising a reaction chamber composed of an inner furnace body and an outer furnace body, wherein the electrode structure described above is provided at the bottom of the outer furnace body;

[0022] The inner furnace body is located above the electrode structure, and the electrode holders of the electrode structure are arranged around the inner furnace body.

[0023] Compared with the prior art, the present invention has at least one of the following beneficial effects:

[0024] 1. The electrode connector proposed in this invention is electrically connected to the carrier in the vertical direction. Even if the electrode connector is deformed, it has little impact on the height of the electrode contact part, thus having no impact on the electrical connection alignment of the carrier.

[0025] 2. The electrode connector proposed in this invention is prone to thermal expansion and deformation due to long-term current flow. This deformation will be concentrated in the deformation space corresponding to the bend, thereby reducing the deformation on the starting and ending sides of the electrode connector. This avoids the problem of the electrode connector damaging the electrode base after thermal expansion, thus extending the service life of the electrode base or electrode structure.

[0026] 3. The rotating component proposed in this invention can drive multiple carriers to rotate synchronously through the electrode seat on the base, so that the battery cells in the carrier can be heated evenly, thereby achieving uniform coating of the battery cells, and can achieve coating of more battery cells at one time, thus improving coating efficiency. Attached Figure Description

[0027] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains; the terminology used herein in the specification is for the purpose of describing particular embodiments only and is not intended to limit the invention; the terms "comprising" and "having," and any variations thereof, in the specification, claims, and foregoing drawings are intended to cover non-exclusive inclusion. The terms "first," "second," etc., in the specification, claims, or foregoing drawings are used to distinguish different objects and not to describe a particular order.

[0028] To more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0029] Figure 1 This is a schematic diagram of the electrode structure proposed in this invention;

[0030] Figure 2 for Figure 1 An enlarged schematic diagram of reference numeral A in the attached figure;

[0031] Figure 3This is a partial internal schematic diagram of the electrode structure proposed in this invention;

[0032] Figure 4 This is a partial internal schematic diagram of another part of the electrode structure proposed in this invention;

[0033] Figure 5 This is an internal schematic diagram of the reaction chamber proposed in this invention, in which a carrier is placed.

[0034] Figure 6 for Figure 5 An enlarged schematic diagram of reference numeral B in the attached figure.

[0035] Figure label:

[0036] 10. Base; 101. First electrode component; 102. Second electrode component; 103. Electrode adapter; 104. First insulating cover plate; 105. Second insulating cover plate; 106. Third insulating cover plate; 107. Cantilever; 108. Support column; 109. Reinforcing rib; 110. Insulating block;

[0037] 20. Electrode holder; 201. First supporting insulating plate; 202. Second supporting insulating plate; 203. Receiving groove; 204. Deformation space; 205. Limiting component; 206. Foot support plate;

[0038] 30. Electrode connector; 301. Electrode contact portion; 302. First electrode connector; 303. Second electrode connector; 304. Insulating block;

[0039] 40. Rotating assembly; 401. Motor; 402. First gear; 403. Second gear;

[0040] 50. Electric slip ring; 501. Rotor; 502. Insulating disc; 503. Stator;

[0041] 60. Vehicles;

[0042] 70. Reaction chamber; 701. Inner furnace body; 702. Outer furnace body; 703. End cap; 704. Sealing baffle; 705. Cooling water channel;

[0043] 80. Electrode rod. Detailed Implementation

[0044] To make the technical problems, technical solutions, and beneficial effects of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention. Therefore, a feature pointed out in this specification is used to illustrate one feature of one embodiment of the invention, and does not imply that every embodiment of the invention must have the described feature. Furthermore, it should be noted that this specification describes many features. Although certain features may be combined to illustrate possible system designs, these features may also be used in other combinations not explicitly stated. Therefore, unless otherwise stated, the described combinations are not intended to be limiting.

[0045] The principles and structure of the present invention will be described in detail below with reference to the accompanying drawings and embodiments.

[0046] With the continuous development of the photovoltaic industry, current photovoltaic processes such as diffusion, oxidation, annealing, doping, PECVD, and LPCVD all require reactions to take place in a furnace. Specifically, solar cells (silicon wafers or crystals) are placed in a specific boat (carrier) and fed into the reaction chamber of the furnace for processing. By heating the reaction chamber and introducing specific reaction gases, specific processes such as coating, diffusion, oxidation, and thin film deposition are achieved on the silicon wafers or crystals. As the photovoltaic industry continues to develop, the requirements for equipment are constantly increasing, and the process routes are also constantly being updated.

[0047] In existing coating equipment, the reaction chamber contains an electrode holder electrically connected to a carrier. The electrode holder houses an insulating ceramic tube, within which a horizontally positioned rod-shaped electrode is mechanically fixed. The rod-shaped electrode is electrically connected to the electrode holder using an elastic conductive sheet (such as a beryllium bronze spring) or a spring-pressing structure. However, the rod-shaped electrode is prone to deformation when subjected to prolonged current flow, and the insulating ceramic tube housing the electrode rod is easily damaged. This causes the horizontally positioned rod-shaped electrode to change, resulting in misalignment with the corresponding carrier and affecting the electrical contact between the rod-shaped electrode and the carrier.

[0048] Therefore, in some embodiments, such as Figure 1 and Figure 3 As shown, the present invention proposes an electrode structure, including a base 10, an electrode seat 20, and an electrode rod 80;

[0049] Multiple electrode seats 20 are arranged circumferentially and spaced apart along the base 10. Each electrode seat 20 has a receiving groove 203. A pair of electrode connectors 30 are provided in the receiving groove 203. The starting side of the electrode connector 30 is electrically connected to a set of corresponding electrode rods 80, and the ending side has an electrode contact portion 301 protruding from the top surface of the electrode seat 20. The pair of electrode contact portions 301 are electrically connected to a carrier 60 that is vertically placed on the electrode seat 20.

[0050] Multiple sets of electrode rods 80 are arranged radially along the base 10, and one end of each set of electrode rods 80 away from the termination side of the electrode connector 30 is electrically connected to the outside.

[0051] In this way, the electrode connector 30 is electrically connected to the carrier 60 in the vertical direction for subsequent steps. At this time, current needs to be passed through the electrode connector 30 to power the carrier 60. As a result, the electrode connector 30 is prone to thermal expansion and deformation due to long-term current transmission. However, it has little impact on the height of the electrode contact portion 301, and therefore has no impact on the electrical connection alignment of the carrier 60.

[0052] It should be noted that the electrode holder 20 proposed in this embodiment includes a first supporting insulating plate 201 and a second supporting insulating plate 202 that are mutually sealed and covered; both ends of the second supporting insulating plate 202 facing the first supporting insulating plate 201 are recessed inward to form receiving grooves 203, and each pair of electrode connectors 30 in each receiving groove 203 has positive and negative poles, and each group of electrode rods 80 also has positive and negative poles; the terminating side of the electrode connector 30 extends out of the first supporting insulating plate 201 and forms an electrode contact portion 301; and one end of each group of electrode rods 80 near the electrode holder 20 passes through the side wall of the receiving groove 203 and is electrically connected to the pair of electrode connectors 30 in the receiving groove 203.

[0053] It is understood that the base 10 can be a rotatable structure or a non-rotatable structure. When the base 10 is a rotatable structure, it can drive the carrier 60 on the electrode holder 20 to rotate, thereby improving the uniformity of heating of the battery cells in the carrier. When the base 10 is a non-rotatable structure, it can support the stability of the upper carrier 60. The base 10 can be electrically connected to the electrode holder 20 through the electrode rod 80, and there is no limitation on this. Therefore, in this embodiment, multiple carriers 60 can be placed simultaneously by multiple electrode holders 20, that is, the base 10 can drive multiple carriers 60 to rotate simultaneously.

[0054] In this embodiment, six electrode holders 20 distributed circumferentially on the base 10 are used as an example. Of course, the number of electrode holders 20 can also be one, two, or other numbers, which is not limited here. In this embodiment, the outer surface of all electrode rods 80 is also covered with an insulating sleeve to achieve electrical isolation between adjacent electrode rods 80.

[0055] In some embodiments, such as Figure 3As shown, the cross-section of the electrode holder 20 parallel to the top surface of the base 10 is any one of trapezoidal, fan-shaped or irregular shape, and is symmetrically distributed with a corresponding set of electrode rods 80 as the center line. The receiving groove 203 extends along the side wall edge of the electrode holder 20 with the electrode rods 80 as the center. The electrode contact portions 301 of a pair of electrode connectors 30 in the receiving groove 203 are respectively set close to the two inclined sides of the cross-section of the electrode holder 20.

[0056] It should be noted that the electrode holder 20 proposed in this embodiment is preferably trapezoidal, fan-shaped, or irregularly shaped. Similarly, the first supporting insulating plate 201 and the second supporting insulating plate 202 are preferably trapezoidal, fan-shaped, or irregularly shaped. It is understood that the irregular shape can be approximately trapezoidal or fan-shaped; for example, any base or apex of the trapezoid can be rounded, approximately fan-shaped, or the base of the trapezoid can be designed as an arc. The receiving groove 203 of the electrode holder 20 is sufficient to accommodate the electrode connector 30, and the upper end of the electrode holder 20 can achieve electrical connection with the carrier 60; there are no limitations on this.

[0057] Among them, such as Figure 3 As shown, the electrode connector 30 is sheet-like or irregular in shape, and it bends along the extension direction of the receiving groove 203 in the thickness direction. There is a gap between the side wall of the receiving groove 203 and the surface of the electrode connector 30, and the vertical distance between the side wall of the receiving groove 203 and the bend of the electrode connector 30 is greater than the preset spacing, forming a deformation space 204 for the electrode connector 30 to expand under heat.

[0058] It should be noted that the thickness of the electrode connector 30 proposed in this embodiment is preferably in the range of 2.5mm-3.5mm. Of course, the thickness of the electrode connector 30 can also be other values, which are not limited here. Similarly, the preset spacing is equal to the thickness of the electrode connector 30. Of course, the preset spacing can also be other values, which are not limited here.

[0059] Compared to the rod-shaped electrodes in the prior art, which, after being fixed at both ends, can only extend and deform in the middle, thus damaging the insulating ceramic tube and electrode base, the electrode connector 30 proposed in this embodiment can be shaped as a sheet (with a larger surface area and a flexible substrate to disperse stress) or other irregular shapes that can extend within the receiving groove 203. This allows the electrode connector 30 to have a certain curvature and / or bend. When the starting and ending sides of the electrode connector 30 are restricted, the electrode connector 30 will expand due to heat and then extend and deform at its curvature and / or bend, thus giving the electrode connector 30 more deformation margin. The corresponding deformation space 204 can accommodate more deformation of the electrode connector 30, so that the electrode connector 30 does not damage the electrode base 20 after deformation.

[0060] It should be noted that the shape of the electrode connector 30 can be sheet-like or irregular. The irregular shape can be flat, curved, serrated, etc., as long as the electrode connector 30 has sufficient deformation allowance and / or the deformation space 204 can accommodate the deformation of the electrode connector 30. There are no restrictions on this.

[0061] When the carrier 60 containing the battery cells makes electrical contact with the corresponding electrode contact 301 for subsequent steps, current needs to be passed through the electrode connector 30 to power the carrier 60. This causes the electrode connector 30 to easily deform due to thermal expansion caused by long-term current transmission. The deformation of the electrode connector 30 due to thermal expansion will be concentrated at the bend, that is, after the electrode connector 30 is heated and expanded, it will extend towards the deformation space 204 corresponding to the bend, thereby reducing the deformation on the starting and ending sides of the electrode connector 30. This avoids the problem of the electrode connector 30 damaging the electrode holder 20 after thermal expansion, thus extending the service life of the electrode holder 20 or the electrode structure.

[0062] Of course, if the electrode connector 30 in the electrode holder 20 is provided with at least one bend, and the deformation space 204 of the bend is larger than the deformation space 204 of the rest, because the bend of the electrode connector 30 is more likely to be deformed by thermal expansion, the problem of the electrode connector 30 being damaged by thermal expansion is further avoided, thereby further extending the service life of the electrode holder 20 or the electrode structure.

[0063] In some embodiments, the pair of electrode connectors 30 within each receiving slot 203 are physically isolated to prevent short circuits, such as... Figure 3 As shown, the electrode connector 30 is composed of a first electrode connector 302 and a second electrode connector 303, and the first electrode connector 302 and the second electrode connector 303 are respectively located on both sides of the receiving groove 203, and an insulating spacer 304 is provided between the first electrode connector 302 and the second electrode connector 303.

[0064] In some embodiments, to further ensure the stability of the carrier 60 on the electrode holder 20, such as Figure 1 and Figure 6 As shown, the electrode holder 20 is provided with a plurality of limiting members 205 on the side where the electrode contact portion 301 is located. The limiting members 205 are used to restrict the movement of the carrier 60.

[0065] It should be noted that the limiting member 205 is located on the side of the first supporting insulating plate 201 that faces away from the second supporting insulating plate 202.

[0066] In this way, when the electrode contact portion 301 makes electrical contact with the corresponding electrode portion on the carrier 60, and the limiting member 205 engages with the corresponding limiting groove on the carrier 60, the stable electrical contact between the electrode contact portion 301 and the carrier 60 can be ensured, while also restricting the movement of the carrier 60 in the axial or circumferential direction.

[0067] In some embodiments, such as Figure 1 As shown, the electrode structure also includes a rotating assembly 40 and an electric slip ring 50;

[0068] The first end of the rotating part of the rotating assembly 40 is connected to the base 10, and the second end of the rotating part of the rotating assembly 40 is connected to the rotor 501 of the electric slip ring 50; the rotor 501 is electrically connected to the end of each set of electrode rods 80 away from the starting side of the electrode connector 30.

[0069] The rotating component 40 is used to drive the base 10 and the rotor 501 to rotate synchronously.

[0070] The electrode holder 20 and the carrier 60 can be placed in the following two ways:

[0071] Firstly, any two adjacent electrode seats 20, and the electrode contact portions 301 and limiting members 205 located on opposite sides are all connected to the carrier 60, so that each electrode seat 20 can simultaneously carry two adjacent carriers 60.

[0072] Secondly, each electrode holder 20 carries only one carrier 60.

[0073] In this way, the rotating component 40 can drive multiple carriers 60 to rotate synchronously through the electrode seat 20 on the base 10, so that the battery cells in the carriers 60 can be heated evenly, thereby achieving uniform coating of the battery cells, and can achieve coating of more battery cells at one time, thus improving coating efficiency.

[0074] In some embodiments, such as Figure 2 As shown, the base 10 is preferably cylindrical or prismatic in shape. The electrode base 20 includes a first supporting insulating plate 201 and a second supporting insulating plate 202 that are sealed and covered with each other. A foot support plate 206 is also provided on the side of the second supporting insulating plate 202 facing away from the first supporting insulating plate 201 to improve the stability of the electrode base 20.

[0075] The base 10 has multiple cantilever arms 107 arranged circumferentially along its edge. Each cantilever arm 107 has a vertically extending support column 108 at its end. The top of the support column 108 is fixedly connected to the bottom of the foot support plate 206, and the bottom of the foot support plate 206 is also connected to the support column 108 via an inclined reinforcing rib 109. When the electrode rod 80 penetrates the support column 108 and makes electrical contact with a pair of electrode connectors 30 in the corresponding receiving groove 203, an insulating stop 110 is provided at the portion of the electrode rod 80 that penetrates the support column 108 to prevent short circuits. The insulating stop 110 is fixedly connected to the corresponding support column 108 via a positioning pin.

[0076] Of course, the cantilever 107, support column 108 and foot support plate 206 can be made of the same non-insulating but harder material, which makes the electrode holder 20 more load-bearing and can support the carrier 60 that loads more battery cells, thereby improving the coating efficiency of the coating equipment.

[0077] In some embodiments, to ensure that the electrode connector 30 within the electrode holder 20 can achieve stable electrical contact with the rotor 501 of the slip ring 50, such as... Figure 4 As shown, a set of electrode components is provided in the base 10 corresponding to each set of electrode rods 80. One end of each set of electrode components extends into the rotor 501 and forms an electrical contact with the rotor conductive ring. The other end of each set of electrode components forms an electrode transition part 103, and the electrode transition part 103 is electrically connected to the corresponding electrode rod 80.

[0078] The slip ring 50 also includes a stator 503, and the bottom end of the rotor 501 is sealed to the stator 503 through a connecting flange.

[0079] In some embodiments, to prevent electrical conductivity between the electrode transition portions 103, such as Figure 1 and Figure 3 As shown, the base 10 is provided with a first insulating cover plate 104, a second insulating cover plate 105 and a third insulating cover plate 106 in sequence along the vertical direction; each group of electrode components consists of a first electrode component 101 and a second electrode component 102.

[0080] The insulating space formed between the first insulating cover plate 104 and the second insulating cover plate 105 is used to accommodate the electrode transfer portion 103 of the second electrode component 102.

[0081] The insulating space formed between the second insulating cover plate 105 and the third insulating cover plate 106 is used to accommodate the electrode adapter portion 103 of the first electrode component 101.

[0082] It should be noted that the base 10 is provided with a first insulating cover plate 104, a second insulating cover plate 105, and a third insulating cover plate 106 from top to bottom. The insulating space provides room for thermal expansion of the electrode adapter portion 103 of the electrode component, preventing damage to the base 10. Furthermore, the first electrode component 101 and the second electrode component 102 have positive and negative poles.

[0083] The first electrode 101 and the second electrode 102 can extend downward in the vertical direction and make electrical contact with the rotor conductive ring of the slip ring 50.

[0084] In other embodiments (not shown in the figures), the electrode rod 80 in the insulating space may extend horizontally to the lower end of the electrode base 20 and then extend vertically upward into the electrode base 20; or the electrode rod 80 in the insulating space may extend directly at an angle into the electrode base 20, which is not limited here.

[0085] In some embodiments, the insulation of different electrode components extending into the rotor 501 is further enhanced, and the different electrode components can also be limited and fixed, such as... Figure 4 As shown, an insulating disk 502 is provided between the electrode components extending into the rotor 501.

[0086] Specifically, an insulating disk 502 is provided at the connection between the rotor conductive ring and the electrode extending into the rotor 501. That is, the insulating disk 502 is only provided between the electrode and between the electrode and the rotor metal shell, and does not directly cover the contact area between the electrode and the rotor conductive ring, thereby ensuring that the rotor conductive ring can make electrical contact with different electrode and also achieve insulation isolation.

[0087] Thus, in this embodiment, the insulating disk 502 further enhances the insulation and isolation between different electrode components extending into the rotor 501, and can also limit the movement of different electrode components, so that the current in the slip ring 50 can be stably conducted to the electrode connector corresponding to each individual electrode component, and a stable insulation and isolation effect can be achieved between different electrode components.

[0088] In some embodiments, to ensure that the electrode holder 20 and its supporting carrier 60 rotate, such as Figures 3-4 As shown, this embodiment proposes a structure for one type of rotating assembly 40, which includes:

[0089] Motor 401, first gear 402, and second gear 403;

[0090] The output end of the motor 401 is connected to the first gear 402, the first gear 402 meshes with the second gear 403, the end of the second gear 403 facing away from the electric slip ring 50 is connected to the base 10, and the rotor 501 of the electric slip ring 50 is connected to the middle of the second gear 403.

[0091] The second gear 403, facing away from the slip ring 50, is sealed to the base 10 via a flange. A baffle is also provided between the third insulating cover 106 and the flange to protect the internal electrode components from external influences. The baffle can be made of insulating material or non-insulating material with better hardness, which is not limited here. When the baffle is made of non-insulating material with better hardness, the load-bearing capacity of the electrode structure is stronger, and the electrode base 20 can support a carrier 60 with more battery cells, thereby improving the coating efficiency of the coating equipment.

[0092] In some embodiments, such as Figures 5-6 As shown, the present invention also proposes a coating device, including a reaction chamber 70 composed of an inner furnace body 701 and an outer furnace body 702, wherein the bottom of the outer furnace body 702 is provided with the aforementioned electrode structure.

[0093] The inner furnace body 701 is located above the electrode structure, and the electrode seat 20 of the electrode structure is arranged around the inner furnace body 701.

[0094] It should be noted that when a carrier 60 is placed on the electrode holder, the inner furnace body 701 is surrounded by multiple carriers 60. The inner furnace body 701 can provide auxiliary heating temperature for the processing of the carrier 60. The inner wall of the outer furnace body 702 is also provided with a heating structure to provide heating temperature for the carrier 60. The rotating component 40 drives the electrode holder 20 and the carrier 60 it carries to rotate, so that the battery cells in the carrier 60 can be heated evenly, thereby achieving uniform coating of the battery cells and improving the coating quality of the battery cells.

[0095] An end cover 703 is provided at one end of the outer furnace body 702. The end cover 703 is sealed to the corresponding opening of the outer furnace body 702 via a flange. The first gear 402 and the second gear 403 are both located inside the end cover 703, meaning they are inside the outer furnace body 702. The rotor 501 passes through the end cover 703 and connects to the middle of the second gear 403. A sealing baffle 704 is circumferentially provided on the rotor 501 located outside the end cover 703. Cooling water channels 705 are provided on the outer wall of the sealing baffle 704 to reduce the heat generated by the rotation of the rotor 501. The motor 401 is also located outside the end cover 703 or the outer furnace body 702. The output end of the motor 401 passes through the end cover 703 and connects to the first gear 402. Naturally, all penetration points of the end cover 703 are sealed.

[0096] The limiting member 205 on the opposite side of two adjacent electrode seats 20 can support a carrier 60, so that each electrode seat 20 can support two adjacent carriers 60 at the same time. Thus, the carriers 60 supported by the electrode structure are an integral structure. The rotating component 40 drives the rotation of the electrode seat 20 and the carriers 60 it supports to be more stable. At the same time, the carriers 60 are placed vertically on the electrode seats 20 in the reaction chamber 70 for coating process, which can increase the number of battery cells that the coating equipment can coat at one time, thereby improving the coating efficiency of the coating equipment.

[0097] It should be noted that the first supporting insulating plate 201, the second supporting insulating plate 202, the first insulating cover plate 104, the second insulating cover plate 105, the third insulating cover plate 106, the insulating block 110, the insulating spacer 304, and the insulating disc 502 can all be made of insulating materials, such as insulating ceramics or insulating tiles, as long as they can achieve insulation isolation between different electrode components or electrode connectors. There are no restrictions on this. This avoids the problem of arcing caused by electrical conductivity between different electrode components or electrode connectors.

[0098] Obviously, the embodiments described above are merely some embodiments of the present invention, not all embodiments. The accompanying drawings show preferred embodiments of the present invention, but do not limit the patent scope of the present invention. The present invention can be implemented in many different forms; rather, these embodiments are provided to provide a more thorough and complete understanding of the disclosure of the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing specific embodiments, or make equivalent substitutions for some of the technical features. Any equivalent structures made using the content of this specification and drawings, directly or indirectly applied to other related technical fields, are similarly within the patent protection scope of this invention.

Claims

1. An electrode structure, characterized in that, It includes a base (10), an electrode holder (20), and an electrode rod (80); Multiple electrode seats (20) are arranged circumferentially and spaced apart from the base (10). Each electrode seat (20) has a receiving groove (203) and a pair of electrode connectors (30) are provided in the receiving groove (203). The starting side of each electrode connector (30) is electrically connected to a set of corresponding electrode rods (80), and the ending side has an electrode contact portion (301) protruding from the top surface of the electrode seat (20). The pair of electrode contact portions (301) are electrically connected to a carrier (60) placed vertically on the electrode seat (20). Multiple sets of electrode rods (80) are arranged radially along the base (10), and one end of each set of electrode rods (80) away from the termination side of the electrode connector (30) is electrically connected to the outside.

2. The electrode structure according to claim 1, characterized in that, The cross-section of the electrode seat (20) parallel to the top surface of the base (10) is any one of trapezoidal, fan-shaped or irregular shape, and is symmetrically distributed with the corresponding set of electrode rods (80) as the center line. The receiving groove (203) extends along the side wall edge of the electrode seat (20) with the electrode rod (80) as the center on both sides. The electrode contact parts (301) of a pair of electrode connectors (30) in the receiving groove (203) are respectively set close to the two inclined sides of the cross-section of the electrode seat (20).

3. The electrode structure according to claim 1 or 2, characterized in that, The electrode connector (30) is sheet-like or irregularly shaped, and it bends along the extension direction of the receiving groove (203) in the thickness direction. There is a gap between the sidewall of the receiving groove (203) and the surface of the electrode connector (30), and the vertical distance between the sidewall of the receiving groove (203) and the bend of the electrode connector (30) is greater than a preset distance, forming a deformation space (204) for the electrode connector (30) to expand under heat.

4. The electrode structure according to claim 1 or 2, characterized in that, The electrode holder (20) is provided with a plurality of limiting members (205) on the side where the electrode contact part (301) is located. The limiting members (205) are used to restrict the movement of the carrier (60).

5. The electrode structure according to claim 1 or 2, characterized in that, The electrode structure also includes a rotating assembly (40) and an electric slip ring (50). The first end of the rotating part of the rotating assembly (40) is connected to the base (10), and the second end of the rotating part of the rotating assembly (40) is connected to the rotor (501) of the electric slip ring (50); the rotor (501) is electrically connected to one end of each set of electrode rods (80) away from the starting side of the electrode connector (30). The rotating assembly (40) is used to drive the base (10) and the rotor (501) to rotate synchronously.

6. The electrode structure according to claim 5, characterized in that, The base (10) is provided with a set of electrode components corresponding to each set of electrode rods (80). One end of each set of electrode components extends into the rotor (501) and forms an electrical contact with the rotor conductive ring. The other end of each set of electrode components forms an electrode adapter (103), and the electrode adapter (103) is electrically connected to the corresponding electrode rod (80).

7. The electrode structure according to claim 6, characterized in that, The base (10) is provided with a first insulating cover plate (104), a second insulating cover plate (105) and a third insulating cover plate (106) in sequence along the vertical direction; each group of electrode components consists of a first electrode component (101) and a second electrode component (102); The insulating space formed between the first insulating cover plate (104) and the second insulating cover plate (105) is used to accommodate the electrode adapter (103) of the second electrode (102). The insulating space formed between the second insulating cover plate (105) and the third insulating cover plate (106) is used to accommodate the electrode adapter (103) of the first electrode (101).

8. The electrode structure according to claim 6, characterized in that, The electrode holder (20) includes a first supporting insulating plate (201) and a second supporting insulating plate (202) that are sealed together with each other, and a foot support plate (206) is also provided on the side of the second supporting insulating plate (202) facing away from the first supporting insulating plate (201). The base (10) has multiple cantilever arms (107) arranged circumferentially along its edge. The end of each cantilever arm (107) is vertically supported by a support column (108). The top of the support column (108) is connected to the foot support plate (206), and the foot support plate (206) is also connected to the support column (108) by an inclined reinforcing rib (109).

9. The electrode structure according to claim 5, characterized in that, The rotating assembly (40) includes a motor (401), a first gear (402), and a second gear (403); The output end of the motor (401) is connected to the first gear (402), the first gear (402) meshes with the second gear (403), the end of the second gear (403) facing away from the electric slip ring (50) is connected to the base (10), and the rotor (501) of the electric slip ring (50) is connected to the middle of the second gear (403).

10. A coating apparatus, characterized in that, The reaction chamber (70) comprises an inner furnace body (701) and an outer furnace body (702), wherein the bottom of the outer furnace body (702) is provided with an electrode structure as described in any one of claims 1 to 9; The inner furnace body (701) is located above the electrode structure, and the electrode seat (20) of the electrode structure is arranged around the inner furnace body (701).

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