High-power wavelength dispersion type X-ray fluorescence spectrometer

Abstract

The spectrometer comprises a shell, a power box, a vacuum pump, a main vacuum cavity, an auxiliary vacuum cavity, a light source, a goniometer and a diffraction system, the main vacuum cavity and the auxiliary vacuum cavity are installed in the shell and fixedly installed together, the light source is fixedly installed on the auxiliary vacuum cavity, and the goniometer is fixedly installed on the shell. The goniometer is fixedly installed outside the main vacuum cavity, the diffraction system is arranged inside the main vacuum cavity and connected with the goniometer, the vacuum pump is connected with the main vacuum cavity and the auxiliary vacuum cavity and used for vacuumizing the main vacuum cavity and the auxiliary vacuum cavity, and the power box is used for supplying power. An upper and lower double-side structure is adopted, a sample is placed on the upper portion, and a detection device is installed on the lower portion, so that the overall layout is more reasonable, and installation, debugging and maintenance are convenient.

Description

Technical Field

[0001] This invention discloses a spectrometer, particularly a high-power wavelength dispersive X-ray fluorescence spectrometer, belonging to the field of materials analysis instrument technology. Background Technology

[0002] Wavelength dispersive X-ray fluorescence spectrometer (WDXRF) is an important branch of XRF. It achieves precise separation of characteristic X-rays with high-resolution crystal spectroscopy technology and is the core equipment for high-precision quantitative elemental analysis. It is widely used in industries, geology, metallurgy and other fields with strict requirements for detection accuracy.

[0003] The basic principle of wavelength dispersive X-ray fluorescence spectrometer is the X-ray fluorescence effect. After the sample is excited by primary X-rays, the mixed characteristic X-rays generated first enter the crystal spectrometer. The crystal spectrometer uses Bragg's law of diffraction (2dsinθ=nλ, where d is the interplanar spacing of the crystal, θ is the diffraction angle, λ is the wavelength of the characteristic X-ray, and n is the diffraction order) to change the diffraction angle θ by rotating the crystal, so that the characteristic X-rays of different wavelengths undergo coherent diffraction in sequence, thereby separating the mixed X-rays according to wavelength. The single wavelength characteristic X-rays after spectral separation are received by detectors (proportional counters, scintillation counters, etc.), converted into electrical signals, and then processed by the signal processing system to achieve qualitative (wavelength matching) and quantitative (intensity calculation) analysis of elements.

[0004] Wavelength dispersive X-ray fluorescence spectrometers possess ultra-high resolution, effectively separating characteristic X-rays with similar wavelengths (such as characteristic peaks of adjacent elements Cr, Mn, and Fe), avoiding peak overlap interference, and achieving detection accuracy far exceeding that of EDXRF; a wide dynamic range allows simultaneous detection of major elements (% level), minor elements (ppm to % level), and trace elements (ppm level) in samples, with a wide quantitative linear range; high quantitative accuracy: combined with matrix correction algorithms, the quantitative analysis results for complex matrix samples (such as ores and alloys) have small errors, making it a commonly used instrument for standard material determination and product quality arbitration; good stability: under laboratory conditions, the instrument exhibits low long-term stability (drift rate) and excellent repeatability of detection results.

[0005] Wavelength dispersive X-ray fluorescence spectrometers are widely used in geology, mining, metallurgy, building materials, cement, chemical industry, new materials, and standard material research and development.

[0006] Conventional spectrometers generally suffer from unreasonable structural design, making them inconvenient to install, debug, and maintain. Summary of the Invention

[0007] To address the shortcomings of the existing wavelength dispersive X-ray fluorescence spectrometers mentioned above, which have unreasonable structural designs, this invention provides a high-power wavelength dispersive X-ray fluorescence spectrometer with a double-sided structure. The sample is placed on the top, and the detection device is installed on the bottom, making the overall layout more reasonable and facilitating installation, debugging, and maintenance.

[0008] The technical solution adopted by this invention to solve its technical problem is: a high-power wavelength dispersive X-ray fluorescence spectrometer, the spectrometer including a shell, a power supply box, a vacuum pump, a main vacuum chamber, an auxiliary vacuum chamber, a light source, a goniometer, and a diffraction system. The main vacuum chamber and the auxiliary vacuum chamber are installed inside the shell and are fixedly installed together. The light source is fixedly installed on the auxiliary vacuum chamber. The goniometer is fixedly installed outside the main vacuum chamber. The diffraction system is located inside the main vacuum chamber and connected to the goniometer. The vacuum pump is connected to both the main vacuum chamber and the auxiliary vacuum chamber for evacuating the main vacuum chamber and the auxiliary vacuum chamber. The power supply box is used for power supply.

[0009] The technical solution adopted by the present invention to solve its technical problem further includes: The outer casing includes an upper shell, a lower shell, and a base frame. The lower shell and the base frame are installed together to form a lower space. The power supply box and vacuum pump are fixedly installed in the lower space on the base frame. The main vacuum chamber and the auxiliary vacuum chamber are respectively fixedly installed in the lower space on the base frame through internal brackets. The upper shell is installed above the lower shell.

[0010] The upper shell contains a sample stage for placing the sample tray assembly, and the sample stage is equipped with a sampling device for gripping the sample tray assembly.

[0011] An alarm is fixedly installed on the top of the upper shell.

[0012] A sample chamber sealing assembly is provided between the auxiliary vacuum chamber and the main vacuum chamber. The sample chamber sealing assembly includes a sample chamber sealing seat, a sample chamber sealing cover, and a sample chamber sealing membrane. The sample chamber sealing seat and the sample chamber sealing cover are fixedly installed together. The sample chamber sealing membrane is disposed between the sample chamber sealing seat and the sample chamber sealing cover. The sample chamber sealing membrane is a polyester film. Metal mesh plates are respectively plated on both sides of the sample chamber sealing membrane, namely the first sample chamber sealing mesh plate and the second sample chamber sealing mesh plate. Metal support meshes made of high magnetic permeability material are respectively provided on both sides of the sample chamber sealing membrane.

[0013] The auxiliary vacuum chamber includes an auxiliary vacuum chamber shell, a light tube aperture disk driving assembly, an energy spectrum detector assembly, and a sample transfer assembly. The light tube aperture disk driving assembly and the energy spectrum detector assembly are respectively installed outside the auxiliary vacuum chamber shell and are positioned corresponding to the sample transfer assembly. The sample transfer assembly is installed inside the auxiliary vacuum chamber shell.

[0014] The goniometer includes a goniometer base, a drive device, a crystal disk main drive shaft, a first measurement module, and a second measurement module. The first measurement module and the second measurement module are directly or indirectly mounted on the goniometer base, the drive device is directly or indirectly mounted on the first measurement module, the crystal disk main drive shaft is connected to the drive device, the drive device drives the crystal disk main drive shaft to rotate, and the goniometer base is fixedly mounted on the main vacuum chamber.

[0015] The diffraction system includes a detector assembly, an incident light source assembly, a crystal switcher assembly, and a goniometer. The detector assembly, incident light source assembly, and crystal switcher assembly are respectively installed inside the vacuum cavity, and the goniometer is installed outside the vacuum cavity. The detector assembly and the crystal switcher assembly are respectively connected to one output shaft of the goniometer.

[0016] The detector assembly is equipped with two sets of detectors, namely the SC assembly and the PC assembly. The PC detector is composed of a PC collimator and a gas proportional counter detector, and the SC detector is composed of an SC collimator and a scintillator detector. There is a certain angle between the two sets of detectors.

[0017] The beneficial effects of the present invention are: the present invention adopts a double-sided structure, with the sample placed on the top and the detection device installed on the bottom, making the overall layout more reasonable and facilitating installation, debugging and maintenance.

[0018] The present invention will be further described below with reference to the accompanying drawings and specific embodiments. Attached Figure Description

[0019] Figure 1 This is a three-dimensional structural diagram of the present invention.

[0020] Figure 2 This is a schematic diagram of the decomposed state structure of the present invention.

[0021] Figure 3 This is a schematic diagram of the internal three-dimensional structure of the present invention.

[0022] Figure 4 This is a schematic diagram of the internal second-view three-dimensional structure of the present invention.

[0023] Figure 5 This is a schematic diagram of the vacuum system from a second perspective in this invention.

[0024] Figure 6 This is a schematic diagram of the partial disassembled structure of the auxiliary vacuum cavity in this invention.

[0025] Figure 7 This is a schematic diagram of the partial decomposed state structure of the energy spectrum detector component in this invention.

[0026] Figure 8 This is a schematic diagram of the exploded state structure of the auxiliary vacuum outdoor drive module in this invention.

[0027] Figure 9 This is a schematic diagram of the partial disassembled structure of the auxiliary vacuum chamber in this invention.

[0028] Figure 10 This is a schematic diagram of the exploded state structure of the sealing part in this invention.

[0029] Figure 11 This is a schematic diagram of the exploded structure of the optical tube aperture in this invention.

[0030] Figure 12 This is a schematic diagram of the disassembled state structure of the sample switcher in this invention.

[0031] Figure 13 This is a partial exploded view of the sample disk assembly in this invention.

[0032] Figure 14 This is a schematic diagram of the exploded state structure of the sample chamber cover drive module in this invention.

[0033] Figure 15 This is a schematic diagram of the three-dimensional structure of the goniometer in this invention.

[0034] Figure 16 This is a schematic diagram of the disassembled structure of the goniometer in this invention.

[0035] Figure 17 This is a schematic diagram of the exploded state structure of the goniometer driving device in this invention.

[0036] Figure 18 This is a schematic diagram of the exploded state structure of the first measuring module of the goniometer in this invention.

[0037] Figure 19 This is a schematic diagram of the exploded state structure of the second measuring module of the goniometer in this invention.

[0038] Figure 20 This is a schematic diagram of the exploded state structure of the first braking module of the goniometer in this invention.

[0039] Figure 21 This is a schematic diagram of the exploded state structure of the second braking module of the goniometer in this invention.

[0040] Figure 22 This is a schematic diagram of the second-view three-dimensional structure of the diffraction system in this invention.

[0041] Figure 23 This is a front view schematic diagram of the diffraction system in this invention.

[0042] Figure 24 This is a schematic diagram of the exploded state structure of the SC main amplifier module in this invention.

[0043] Figure 25 This is a schematic diagram of the exploded state structure of the PC component in this invention.

[0044] Figure 26 This is a schematic diagram of the decomposed state structure of the incident light source in this invention.

[0045] Figure 27 This is a three-dimensional structural diagram of the collimation aperture assembly in this invention.

[0046] Figure 28 This is a schematic diagram of the collimation aperture assembly in the decomposed state structure of the present invention.

[0047] Figure 29 This is a partial exploded state structural diagram of the crystal switcher component in this invention. Detailed Implementation

[0048] This embodiment is a preferred embodiment of the present invention. All other embodiments that are the same as or similar to this embodiment in principle and basic structure are within the protection scope of the present invention.

[0049] This invention protects a high-power wavelength dispersive X-ray fluorescence spectrometer, which mainly includes a housing 1, a power supply box 15, a vacuum pump 16, a main vacuum chamber 2, an auxiliary vacuum chamber 3, a light source 4, a goniometer 5, and a diffraction system 6. The main vacuum chamber 2 and the auxiliary vacuum chamber 3 are installed inside the housing 1 and are fixedly installed together. The light source 4 is fixedly installed on the auxiliary vacuum chamber 3. The goniometer 5 is fixedly installed outside the main vacuum chamber 2. The diffraction system 6 is located inside the main vacuum chamber 2 and connected to the goniometer 5. The vacuum pump 16 is connected to both the main vacuum chamber 2 and the auxiliary vacuum chamber 3 and is used to perform vacuuming operations on the main vacuum chamber 2 and the auxiliary vacuum chamber 3. The power supply box 15 is used to provide power to this invention.

[0050] In this embodiment, the outer shell 1 mainly includes an upper shell 11, a lower shell 12, and a base frame 13. The lower shell 12 and the base frame 13 are installed together to form a lower space. The power supply box 15 and the vacuum pump 16 are fixedly installed in the lower space on the base frame 13. The main vacuum chamber 2 and the auxiliary vacuum chamber 3 are respectively fixedly installed in the lower space on the base frame 13 through internal brackets (not shown in the figure). The upper shell 11 is installed above the lower shell 12. A sample stage 18 for placing the sample tray assembly 3263 is installed inside the upper shell 11. A sampling device 14 for gripping the sample tray assembly 3263 is installed on the sample stage 18. The internal space of the upper shell 11 is the upper space. In this embodiment, the cabinet (i.e., the internal space of the outer shell 1) is divided into a lower and upper layer by the sample stage 18. The lower layer is a constant temperature chamber, and the sample stage 18 is above the constant temperature chamber. The six sides of the constant temperature chamber have heat insulation layers. A heater is installed inside the constant temperature chamber, which is used in conjunction with a temperature controller to maintain a constant temperature. The indoor temperature is maintained at a fixed value between 30 and 38°C. The core components are installed in the constant temperature chamber (i.e., the lower space). The part outside the lower constant temperature chamber is equipped with a high-voltage power supply (power supply box 15), a vacuum pump 116, vacuum pipelines, a control system, a power supply system, and a gas flow system. The lower space has an openable door, which is closed when the instrument is working and opened for maintenance, making it convenient to operate. The upper space is the sample chamber. There are several sample positions on the sample stage 18 to place the sample tray assembly 3263. The sample tray assembly 3263 is generally placed in a sample cup. The sample cup is made of conductive metal, usually aluminum alloy or stainless steel. There is a sampling device 14 in the middle of the sample stage 18. The sampling device 14 is a robotic arm or an XYZ module. The sampling device grabs the sample cup in the sample position, puts it into the sample chamber opening, closes the sample door for testing, and opens the sample door after testing. The sampling device 14 takes out the sample cup and puts it back in the sample position.

[0051] In this embodiment, a sample chamber sealing assembly 3266 is provided between the auxiliary vacuum chamber 3 and the main vacuum chamber 2. On the one hand, the sample chamber sealing assembly 3266 can play a magnetic shielding role between the main vacuum chamber 2 and the auxiliary vacuum chamber 3. On the other hand, the sample chamber sealing assembly 3266 can also separate the main vacuum chamber 2 and the auxiliary vacuum chamber 3, so that the two can independently perform evacuation and evacuation operations.

[0052] In this embodiment, the sample chamber sealing assembly 3266 mainly includes a sample chamber sealing seat 32661, a sample chamber sealing cover 32662, and a sample chamber sealing film 32663. The sample chamber sealing seat 32661 and the sample chamber sealing cover 32662 are fixedly installed together. The sample chamber sealing film 32663 is disposed between the sample chamber sealing seat 32661 and the sample chamber sealing cover 32662. The sample chamber sealing film 32663 is a thin film, typically a polyester film. Metal mesh plates are plated on both sides of the sample chamber sealing film 32663, which are defined as the first sealing mesh plates of the sample chamber. Sample chamber 32664 and sample chamber 2nd sealing mesh 32665, sample chamber 1st sealing mesh 32664 and sample chamber 2nd sealing mesh 32665 are usually made of aluminum. Metal support meshes are set on both sides of sample chamber sealing membrane 32663 to provide support and prevent damage during use. The metal support meshes are defined as sample chamber 1st sealing support 32666 and sample chamber 2nd sealing support 32667 respectively. Sample chamber 1st sealing support 32666 and sample chamber 2nd sealing support 32667 are both made of high magnetic permeability material, usually permalloy, to provide magnetic shielding.

[0053] In this embodiment, a diffraction system is installed inside the main vacuum chamber 2, and a goniometer 5 is fixedly installed on the main vacuum chamber 2. A main vacuum chamber vacuum interface 2102 is connected to the main vacuum chamber 2, which can be used to connect a vacuum pump 16 to perform vacuuming operations inside the main vacuum chamber 2. A main vacuum chamber air duct 2103 is connected to the main vacuum chamber 2, which can be used to adjust the vacuum level. In some scenarios, a small amount of air can be introduced to precisely adjust the vacuum level inside the chamber, adapting to different detection needs. A lead glass 2104 is installed on the main vacuum chamber 2, allowing observation of the working conditions inside the main vacuum chamber 2. In this embodiment, the main vacuum chamber 2 is made of metal material, typically stainless steel, preferably S136 stainless steel.

[0054] In this embodiment, the light source 4 is an X-ray tube, which can be a high-power end-window X-ray tube of model DYX-4000 produced by Dandong Shenbo Electronic Instruments Co., Ltd.

[0055] In this embodiment, the outer shell of the auxiliary vacuum chamber 3 is made of metal material, typically stainless steel, preferably S136 stainless steel.

[0056] In this embodiment, the auxiliary vacuum cavity 3 mainly includes an auxiliary vacuum cavity shell, a light tube aperture disk driving assembly, an energy spectrum detector assembly, and a sample transfer assembly. The light tube aperture disk driving assembly and the energy spectrum detector assembly are respectively installed outside the auxiliary vacuum cavity shell and are set corresponding to the sample transfer assembly. The sample transfer assembly is installed inside the auxiliary vacuum cavity shell.

[0057] In this embodiment, the outer shell of the auxiliary vacuum chamber 3 mainly includes an aperture chamber 3207, a sample chamber seat 3210, a sample cover 3211, and a sample chamber lid 3212. The sample chamber seat 3210 is fixedly disposed above the sample cover 3211. The aperture chamber 3207 is fixedly disposed on the sample chamber seat 3210. An aperture chamber sealing ring 3208 is embedded in the aperture chamber 3207. The light source 4 is fixedly disposed on the aperture chamber sealing ring 3208. The main vacuum chamber 2 is fixedly disposed together with the aperture chamber 3207. A sample chamber vacuum interface 3209 is provided on the aperture chamber 3207. The sample chamber vacuum interface 3209 is connected to the vacuum pump 16. The vacuum pumping operation can be performed in the auxiliary vacuum chamber 3 through the sample chamber vacuum interface 3209. The optical tube aperture disk drive assembly and the energy spectrum detector assembly are respectively disposed on the aperture chamber 3207.

[0058] In this embodiment, the optical tube aperture disk drive assembly mainly includes an optical tube aperture stepper motor 3222, an optical tube aperture motor mount 3223, a synchronous pulley 3224, a synchronous belt 3225, a crystal disk dial 3226, an optical tube aperture drive shaft 3227, an optical tube aperture drive seat 3228, a vacuum aviation socket 3229, an optical tube aperture tension wheel seat 3230, a tension wheel frame 3231, a synchronous tension wheel 3232, and a collimation aperture limiting spring plate 3233. The optical tube aperture drive seat 3228 (using screws, or other conventional means in specific implementations) is fixedly installed on the aperture chamber 3207. The optical tube aperture motor mount 3223 is fixedly installed on the optical tube aperture drive seat 3228. The optical tube aperture stepper motor 3222 is fixedly installed on the optical tube aperture motor mount 3223. The synchronous pulley 3224 is fixedly installed on the motor shaft of the optical tube aperture stepper motor 3222. The optical tube aperture stepper motor 3222 drives the synchronous pulley 3224 to rotate. The optical tube aperture drive shaft 3227 is inserted into the optical tube aperture drive seat 3228. The crystal disk dial wheel 3226 is fixedly installed together with the optical tube aperture drive shaft 3227. The synchronous belt 3225 is hooked between the crystal disk dial wheel 3226 and the synchronous pulley 3224. The optical tube aperture tensioner seat 3230 is fixedly installed on the optical tube aperture drive seat 3228. One end of the collimation aperture limiting spring plate 3233 is fixedly installed together with the optical tube aperture tensioning wheel seat 3230. A tensioning wheel frame 3231 is fixedly installed on one end of the collimation aperture limiting spring plate 3233, and a synchronous tensioning wheel 3232 is installed on the tensioning wheel frame 3231. The synchronous tensioning wheel 3232 is attached to the synchronous belt pulley 3224, and the synchronous tensioning wheel 3232 can squeeze the synchronous belt pulley 3224 to make it tensioned. In this embodiment, the vacuum aviation socket 3229 is fixedly installed on the optical tube aperture drive seat 3228.

[0059] In this embodiment, the energy spectrum detector assembly mainly includes an X-ray detector 3201, an ED detector mount 3202, an ED detector ring 3203, a first lip seal 3204, a second lip seal 3205, a detector head cover 3206, a first clean passage sealing cover 3220, and a second clean passage sealing cover 3221. The aperture chamber 3207 has two mounting holes, each with a clean passage sealing cover (the first clean passage sealing cover 3220 and the second clean passage sealing cover 3221). When using a particular mounting hole, the clean passage sealing cover at that hole is opened, and the ED detector mount 3202 is fixedly installed at that mounting hole. The X-ray detector 3201... The X-ray detector 3201 is inserted into the ED detector holder 3202. The X-ray detector 3201 is fitted with an ED detector ring 3203. The ED detector ring 3203 is fixedly installed on the ED detector holder 3202, thereby fixing the X-ray detector 3201 on the ED detector holder 3202 through the ED detector ring 3203. A first lip seal 3204 and a second lip seal 3205 are provided between the ED detector ring 3203 and the ED detector holder 3202 to achieve a seal between the ED detector ring 3203 and the ED detector holder 3202. The front end of the X-ray detector 3201 is fitted with a detector head cover 3206.

[0060] In this embodiment, the sample transfer assembly includes a light tube aperture section and a sample switcher section, which are respectively configured to be the same.

[0061] In this embodiment, the light tube aperture section mainly includes a light tube aperture chassis 3234, a light tube aperture limiter 3235, a light tube aperture plate 3236, a first magnet 3237, a second magnet 3238, a third magnet 3239, a light tube aperture drive gear 3240, a light tube aperture driven gear 3241, a light tube aperture positioning seat 3242, a light tube aperture limit spring plate 3243, a light tube aperture limit bearing shaft 3244, a light tube aperture limit bearing 3245, and a sample tray photoelectric switch 3249. The light tube aperture drive shaft 3236... The bottom of the 27 is fixedly installed with the light tube aperture drive gear 3240, and the light tube aperture driven gear 3241 is fixedly installed with the light tube aperture chassis 3234. The light tube aperture drive gear 3240 and the light tube aperture driven gear 3241 mesh with each other. The light tube aperture chassis 3234 can be driven to rotate by the external light tube aperture disk drive assembly 33. The light tube aperture chassis 3234 has one or more through holes in an annular shape. The light tube aperture plate 3236 is fixedly installed at the through hole. The bottom of the light tube aperture chassis 3234 is fixedly installed with... A light tube aperture limiter 3235 is provided, with notches on the light tube aperture base 3234 having the same number of through holes as the light tube aperture chassis 3234. A light tube aperture positioning seat 3242 is fixedly installed on the sample chamber seat 3210. One end of a light tube aperture limiting spring plate 3243 is fixedly installed together with the light tube aperture positioning seat 3242, and a light tube aperture limiting bearing shaft 3244 is fixedly installed on the other end of the light tube aperture limiting spring plate 3243. A light tube aperture limiting bearing 3245 is installed on the light tube aperture limiting bearing shaft 3244. The aperture limit bearing 3245 is configured corresponding to the aperture limiter 3235 and can limit the rotation of the aperture base 3234. In this embodiment, a flange protrudes upward from the aperture base 3234, and a notch is provided on the flange. A sample plate photoelectric switch 3249 is fixedly installed on the aperture chamber 3207. The sample plate photoelectric switch 3249 is configured corresponding to the flange and can detect the notch on the flange to determine whether the aperture base 3234 has rotated to the correct position. The first magnet 3237 is fixedly installed at the center of the bottom of the aperture base 3234 with screws. The second magnet 3238 and the third magnet 3239 are respectively fixedly installed on the aperture chamber 3207 with screws.

[0062] In this embodiment, the sample switcher mainly includes a sample chamber cover shielding liner 3246, an upper shielding plate inside the sample chamber 3247, a sample tray 3248, a sample tray base 3250, a sample cup drive gear 3251, a sample tray shaft cover 3252, a sample tray drive shaft 3253, a sample tray shaft 3254, an upper baffle plate 3255, a lower baffle plate 3256, an upper synchronous pulley 3257, a lower synchronous pulley 3258, an upper sample cover 3259, an electromagnet 3260, a sample position sealing cover 3261, a sample position shielding plate 3262, a sample tray assembly 3263, and a key 3264. The sample tray 3248 has one or more ring-shaped openings. Sample mounting positions (five in this embodiment) are provided. Each sample mounting position contains a sample tray assembly 3263. A sample tray shaft 3254 is fixedly inserted in the middle of the sample tray 3248. A sample tray drive shaft 3253 is inserted into the sample tray shaft 3254. A sample tray shaft cover 3252 is fixedly installed on the top of the sample tray drive shaft 3253. A sample cup drive gear 3251 is fixedly installed together with the sample tray drive shaft 3253. A sample tray seat 3250 is installed on the top of the sample cup drive gear 3251. Each sample tray assembly 3263 meshes with the sample cup drive gear 3251. A synchronous pulley 3257 for the sample tray is fitted at the bottom of the sample tray shaft 3254. A sample tray upper baffle plate 3255 is mounted above the upper synchronous pulley 3257. A sample tray lower synchronous pulley 3258 is fitted at the bottom of the sample tray drive shaft 3253. A sample tray lower baffle plate 3256 is mounted below the sample tray lower synchronous pulley 3258. Both the upper and lower synchronous pulleys 3257 and 3258 are located outside the auxiliary vacuum chamber 3. An external drive device drives the upper and lower synchronous pulleys 3257 and 3258 to rotate, thereby driving the sample tray 3248 and sample tray assembly 3263 to rotate. An upper shielding plate 3247 is located below the sample tray 3248, which can shield a designated area. A semi-circular sample chamber cover shielding liner 3246 is provided below the plate 3247. The upper shielding plate 3247 and the sample chamber cover shielding liner 3246 are both assembled inside the auxiliary vacuum chamber 3. The upper shielding plate 3247 inside the sample chamber has two through holes. A sample position sealing cover 3261 is provided below one of the through holes. A sample position shielding plate 3262 is installed below the sample position sealing cover 3261. A sample upper cover 3259 is provided below the other through hole. An electromagnet 3260 is fixedly installed below the sample upper cover 3259. The sample upper cover 3259, electromagnet 3260, sample position sealing cover 3261 and sample position shielding plate 3262 are all provided outside the auxiliary vacuum chamber 3.

[0063] In this embodiment, the sample switcher also includes a sample chamber cover drive module. The sample chamber cover drive module mainly includes a sample chamber cover stepper motor 3213, a sample cover drive seat 3214, a sample cover baffle disc 3215, a sample cover bushing 3216, a sample cover support 3217, a sample cover bearing 3218, and a sample cover photoelectric switch 3219. The sample cover drive seat 3214 is fixedly mounted on the sample chamber cover 3212, and the sample chamber cover stepper motor 3213 is fixedly mounted on the sample cover drive seat 3214. The sample cover bushing 3219 is fixedly mounted on the motor shaft of the sample chamber cover stepper motor 3213. 16. A sample cover blocking disc 3215 is installed on the sample cover bushing 3216. A notch is opened on the outer edge of the sample cover blocking disc 3215. A sample cover photoelectric switch 3219 is fixedly installed on the sample cover drive seat 3214. The sample cover photoelectric switch 3219 is set corresponding to the outer edge of the sample cover blocking disc 3215. A sample cover bearing 3218 is installed between the sample cover bushing 3216 and the sample cover drive seat 3214. A sample cover support 3217 is fixedly installed below the sample cover bushing 3216. A sample cover cap 3259 and an electromagnet 3260 are respectively fixedly installed on the sample cover support 3217.

[0064] In this embodiment, the sample tray assembly 3263 mainly includes a sample cup driven gear 32631, a sample holder 32632, a sample inner mold 32633, a sample cup 32634, a sample cup lid 32635, a sample cup cap 32636, a sample cup upper magnet 32637, a sample cup lower magnet 32638, and a sample cup shaft 32639. The sample inner mold 32633 is disposed inside the sample cup 32634, the sample holder 32632 is fitted onto the outside of the sample cup 32634, the sample cup driven gear 32631 is fixedly installed on the outside of the sample holder 32632, and the sample cup driven gear 32637... 31 meshes with the sample cup drive gear 3251. The sample cup cover 32635 and the sample cup pressure cover 32636 are respectively disposed in the sample cup 32634. The sample cup pressure cover 32636 is disposed above the sample cup cover 32635. The upper magnet 32637 of the sample cup is embedded in the sample cup pressure cover 32636. The lower magnet 32638 of the sample cup is embedded in the sample cup cover 32635. The sample cup shaft 32639 is fixedly installed together with the sample cup pressure cover 32636 and the sample cup cover 32635 respectively. Different samples 326310 are loaded into the sample cup 32634 according to actual needs.

[0065] In this embodiment, the goniometer 5 mainly includes a goniometer base 51, a drive device 52, a crystal disk main drive shaft 527, a first measurement module 53, and a second measurement module 54. The first measurement module 53 and the second measurement module 54 are directly or indirectly mounted on the goniometer base 51, and the drive device 52 is directly or indirectly mounted on the first measurement module 53. The crystal disk main drive shaft 527 is connected to the drive device 52, and the drive device 52 drives the crystal disk main drive shaft 527 to rotate. The goniometer base 51 is fixedly mounted on the main vacuum chamber 2, and an O-ring seal 513 is provided between the goniometer base 51 and the main vacuum chamber 2 to seal this end face.

[0066] In this embodiment, the driving device 52 mainly includes a stepper motor 521, a motor base 522, a drive base 523, a collimating aperture blocking disc 524, and a blocking disc photoelectric switch 525. The motor base 522 is fixedly mounted on the drive base 523, and the stepper motor 521 is fixedly mounted on the motor base 522. The collimating aperture blocking disc 524 is fixedly mounted on the motor shaft 5211 of the stepper motor 521. The collimating aperture blocking disc 524 has a blocking disc notch 5241. The blocking disc photoelectric switch 525 is fixedly mounted at the corresponding position on the drive base 523. When the blocking disc notch 5241 on the collimating aperture blocking disc 524 rotates with the motor shaft 5211 to the blocking disc photoelectric switch 525, the blocking disc photoelectric switch 525 outputs a control signal to the control device, which controls the stepper motor 521 to stop rotating.

[0067] In this embodiment, the motor shaft 5211 of the stepper motor 521 is connected to the main drive shaft 527 of the crystal disk via a coupling 526, driving the main drive shaft 527 of the crystal disk to rotate.

[0068] In this embodiment, the first measuring module 53 mainly includes a first torque motor 531, a first stator clamping ring 532, a first stator base 533, a first circular grating 534, a first grating base 535, a first rotor base 537, a first rotor clamping ring 538, an inner shaft of a measuring disc 539, a first grating ruler reading head 5315, and a first reading head mounting base 5316. The first stator clamping ring 532 is fixedly mounted on the first stator base 533 by screws. The first torque motor 531 is mounted between the first stator base 533 and the first stator clamping ring 532 and is fixed by the first stator clamping ring 532. The first circular grating 534 is fixedly mounted on the first grating seat 535. The first rotor seat 537 is disposed inside the first torque motor 531. The first grating seat 535 is fixedly mounted to the first rotor seat 537 with screws. The drive seat 523 is fixedly mounted to the first grating seat 535 with screws. The first rotor seat 537 is fitted with a third bearing 5310 and a fourth bearing 5311, which are disposed between the first rotor seat 537 and the first torque motor 531. The inner shaft 539 of the angle measuring disk is fixedly mounted to the first rotor seat 537 with screws. The first reading head mounting seat 5316 is fixedly mounted on the first stator seat 533. The first grating ruler reading head 5315 is fixedly mounted on the first reading head mounting seat 5316, and the first grating ruler reading head 5315 is disposed corresponding to the first circular grating 534.

[0069] In this embodiment, a first brake pad 536 is fixedly mounted on the first grating seat 535 by screws, and a first brake module 55 is fixedly mounted on the first stator seat 533. The first brake module 55 is set corresponding to the first brake pad 536. The first brake module 55 can act on the first brake pad 536 to quickly stop the rotation of the first grating seat 535 and maintain a fixed posture.

[0070] In this embodiment, the first brake module 55 mainly includes a first brake seat 551, a first brake support 552, a first brake pad support 553, a second brake pad support 554, a first electromagnet sleeve 555, a first electromagnet suction plate 556, a first electromagnet 557, a first brake pad 558, a first permanent magnet 559, and a first brake shaft 5510. The first brake pad support 553 and the second brake pad support 554 are arranged opposite to each other. The first brake shaft 5510 is installed between the first brake pad support 553 and the second brake pad support 554, allowing the first brake pad support 553 and the second brake pad support 554 to rotate freely relative to the first brake shaft 5510. The first brake pad 558 includes upper and lower pieces, which are respectively installed on one end of the first brake pad support 553 and the second brake pad support 554. The first brake pad 536 is positioned in the middle of the two first brake pads 558. A first brake pad 536 is fixedly installed on the first brake pad support 553. An electromagnet sleeve 555 is provided. A first electromagnet 557 is fixedly installed on the first electromagnet sleeve 555. A first electromagnet attracting plate 556 is fixedly installed on the second brake plate holder 554. The first electromagnet attracting plate 556 is set corresponding to the first electromagnet 557. When the first electromagnet 557 is energized, it can attract the first electromagnet attracting plate 556. The first electromagnet attracting plate 556 drives the second brake plate holder 554 to rotate along the first brake shaft 5510. Two first brake plates 558 are respectively installed at one end of the first brake plate holder 553 and the second brake plate holder 554. A first permanent magnet 559 is respectively installed at the other end of the first brake plate holder 553 and the second brake plate holder 554. The first permanent magnet 559 is also provided with upper and lower parts. The upper and lower parts of the first permanent magnet 559 are respectively installed on the first brake plate holder 553 and the second brake plate holder 554. The upper and lower parts of the first permanent magnet 559 are arranged opposite each other, and the magnetic poles on the opposite side are the same.

[0071] In this embodiment, a first bearing seat 5531 is provided on the first brake pad holder 553, and a second bearing seat 5541 is provided on the second brake pad holder 554. A first brake shaft bearing 5511 is fitted on the first brake shaft 5510. The first brake shaft bearing 5511 is disposed within the first bearing seat 5531 and the second bearing seat 5541, making the relative rotation between the first brake pad holder 553 and the second brake pad holder 554 smoother. In this embodiment, the first brake seat 551 is fixedly installed on the first stator seat 533, the first brake support 552 is fixedly installed on the first brake seat 551, and the first brake shaft 5510 is inserted into the first brake support 552. The first brake support 552 is the support structure for the first brake module 55.

[0072] In use, the second brake pad holder 554 rotates along the first brake shaft 5510 under the thrust of the first permanent magnet 559, and the two first brake pads 558 clamp the first brake pad 536, putting it in a braking state. When the first electromagnet 557 is activated, the first electromagnet 557 attracts the first electromagnet attracting plate 556, which overcomes the thrust between the two first permanent magnets 559, thereby releasing the two first brake pads 558 and allowing the first brake pad 536 to rotate freely.

[0073] In this embodiment, the second measuring module 54 mainly includes a second torque motor 541, a second stator clamping ring 542, a second stator base 543, a second circular grating 544, a second rotor base 547, an outer shaft of a measuring disc 549, a second grating ruler reading head 5415, and a second reading head mounting base 5416. The second stator base 543 is fixedly mounted to the first stator base 533 with screws, and the second stator clamping ring 542 is fixedly mounted on the second stator base 543 with screws. The second torque motor 541 is mounted on the second stator base 543. The second circular grating 544 is fixedly mounted on the outer shaft 549 of the angle measuring disk, and the second rotor seat 547 is disposed inside the second torque motor 541. The outer shaft 549 of the angle measuring disk is fixedly mounted to the second rotor seat 547 with screws. A seventh bearing 5410 is fitted on the second rotor seat 547 and is disposed between the second rotor seat 547 and the second torque motor 541. The second reading head mounting seat 5416 is fixedly mounted on the second stator seat 543, and the second grating ruler reading head 5415 is fixedly mounted on the second reading head mounting seat 5416. The second grating ruler reading head 5415 is arranged corresponding to the second circular grating 544.

[0074] In this embodiment, a second brake pad 546 is fixedly installed on the outer shaft 549 of the angle measuring disk by screws, and a second brake module 56 is fixedly installed on the second stator seat 543. The second brake module 56 is set corresponding to the second brake pad 546. The second brake module 56 can act on the second brake pad 546 to quickly stop the rotation of the outer shaft 549 of the angle measuring disk and maintain a fixed posture.

[0075] In this embodiment, the second brake module 56 mainly includes a second brake seat 561, a second brake support 562, a third brake pad support 563, a fourth brake pad support 564, a second electromagnet sleeve 565, a second electromagnet suction plate 566, a second electromagnet 567, a second brake pad 568, a second permanent magnet 569, and a second brake shaft 5610. The third brake pad support 563 and the fourth brake pad support 564 are arranged opposite to each other. The second brake shaft 5610 is installed between the third brake pad support 563 and the fourth brake pad support 564, allowing the third brake pad support 563 and the fourth brake pad support 564 to rotate freely relative to the second brake shaft 5610. The second brake pad 568 includes upper and lower pieces, which are respectively installed on one end of the third brake pad support 563 and the fourth brake pad support 564. The second brake pad 546 is positioned in the middle of the two second brake pads 568. The third brake pad support 563 is fixedly mounted with a second brake shaft 5610. Two electromagnet sleeves 565, a second electromagnet 567 is fixedly installed on the second electromagnet sleeve 565, and a second electromagnet attractor 566 is fixedly installed on the fourth brake plate holder 564. The second electromagnet attractor 566 is set corresponding to the second electromagnet 567. When the second electromagnet 567 is energized, it can attract the second electromagnet attractor 566. The second electromagnet attractor 566 drives the fourth brake plate holder 564 to rotate along the second brake shaft 5610. Two second brake plates 568 are respectively installed at one end of the third brake plate holder 563 and the fourth brake plate holder 564. The other end of the third brake plate holder 563 and the fourth brake plate holder 564 are respectively installed with a second permanent magnet 569. The second permanent magnet 569 is also provided with upper and lower pieces. The upper and lower pieces of the second permanent magnet 569 are respectively installed on the third brake plate holder 563 and the fourth brake plate holder 564. The upper and lower pieces of the second permanent magnet 569 are arranged opposite each other, and the magnetic poles on the opposite side are the same.

[0076] In this embodiment, a third bearing seat 5631 is provided on the third brake pad support 563, and a fourth bearing seat 5641 is provided on the fourth brake pad support 564. A second brake shaft bearing 5611 is fitted on the second brake shaft 5610. The second brake shaft bearing 5611 is disposed within the third bearing seat 5631 and the fourth bearing seat 5641, making the relative rotation between the third brake pad support 563 and the fourth brake pad support 564 smoother. In this embodiment, the second brake seat 561 is fixedly installed on the second stator seat 543, the second brake support 562 is fixedly installed on the second brake seat 561, and the second brake shaft 5610 is inserted into the second brake support 562. The second brake support 562 is the support structure for the second brake module 56.

[0077] In use, the fourth brake pad holder 564 rotates along the second brake shaft 5610 under the thrust of the second permanent magnet 569, and the two second brake pads 568 clamp the second brake pad 546, putting it in a braking state. When the second electromagnet 567 is activated, the second electromagnet 567 attracts the second electromagnet attractor 566, which overcomes the thrust between the two second permanent magnets 569, thereby releasing the two second brake pads 568 and allowing the second brake pad 546 to rotate freely.

[0078] In this embodiment, a first bearing 528 and a second bearing 529 are mounted on the main drive shaft 527 of the crystal disk. The first bearing 528 and the second bearing 529 are respectively disposed between the main drive shaft 527 of the crystal disk and the inner shaft 539 of the measuring disk, which can make the main drive shaft 527 of the crystal disk rotate more smoothly relative to the inner shaft 539 of the measuring disk. A first lip seal 5210 is mounted on the main drive shaft 527 of the crystal disk. The first lip seal 5210 is disposed between the first bearing 528 and the second bearing 529, which can seal the space between the main drive shaft 527 of the crystal disk and the inner shaft 539 of the measuring disk, preventing air from passing through the space between the main drive shaft 527 of the crystal disk and the inner shaft 539 of the measuring disk.

[0079] In this embodiment, the inner shaft 539 of the angle measuring disk is inserted inside the outer shaft 549 of the angle measuring disk. A fifth bearing 5312, a sixth bearing 5313, and a second lip seal 5314 are fitted on the inner shaft 539. The fifth bearing 5312, the sixth bearing 5313, and the second lip seal 5314 are disposed between the inner shaft 539 and the outer shaft 549 of the angle measuring disk. The fifth bearing 5312 and the sixth bearing 5313 ensure smoother relative rotation between the inner shaft 539 and the outer shaft 549 of the angle measuring disk. The second lip seal 5314 is disposed between the inner shaft 539 and the outer shaft 549 of the angle measuring disk to seal between them and prevent air from passing through between them.

[0080] In this embodiment, the bottom of the outer shaft 549 of the angle measuring disk is inserted into the angle measuring seat 51. An eighth bearing 5411, a ninth bearing 5412, and a third lip seal 5413 are fitted on the outer shaft 549. The eighth bearing 5411, the ninth bearing 5412, and the third lip seal 5413 are arranged between the outer shaft 549 of the angle measuring disk and the angle measuring seat 51. The arrangement of the eighth bearing 5411 and the ninth bearing 5412 can ensure smoother relative rotation between the outer shaft 549 of the angle measuring disk and the angle measuring seat 51. The third lip seal 5413 is arranged between the outer shaft 549 of the angle measuring disk and the angle measuring seat 51 to seal between the outer shaft 549 of the angle measuring disk and the angle measuring seat 51, preventing air from passing through between the outer shaft 549 of the angle measuring disk and the angle measuring seat 51.

[0081] In this invention, a first lip seal 5210, a second lip seal 5314, and a third lip seal 5413 are cascaded together to seal the inside of the goniometer 5. Combined with the O-ring seal 513 at the end face, it can ensure absolute sealing.

[0082] In this embodiment, a heat dissipation layer 511 is provided on the outer side of the first stator base 533 and the second stator base 543. The heat dissipation layer 511 is provided corresponding to the second torque motor 541. A heat dissipation channel 512 is fixedly installed on the second stator base 543. A fan can be connected to the heat dissipation channel 512. The cold air blown by the fan passes through the heat dissipation channel 512 and is blown into the space between the heat dissipation layer 511 and the second torque motor 541, providing forced air cooling for the second torque motor 541. This ensures that the first torque motor 531 and the second torque motor 541 do not operate in a high-temperature environment, and also effectively reduces the impact of the heat generated by the first torque motor 531 and the second torque motor 541 on other components. In specific implementations, the cooling medium can also be nitrogen, water, oil, etc., but air is generally the main medium. Other cooling media can be selected in special cases.

[0083] In this embodiment, the sample detection component of the X-ray fluorescence spectrometer is located inside the main vacuum chamber 2, and the goniometer 5 is fixedly installed outside the main vacuum chamber 2. The end face of the goniometer 51 is attached to the main vacuum chamber 2. The crystal disk main drive shaft 527, the inner shaft of the goniometer disk 539, and the outer shaft of the goniometer disk 549 extend into the main vacuum chamber 2 and are connected to the corresponding components. An O-ring 513 is provided between the end face of the goniometer 51 and the main vacuum chamber 2 to prevent air from entering the main vacuum chamber 2 from between the end face of the goniometer 51 and the main vacuum chamber 2. The goniometer 5 is provided with a cascaded first lip seal 5210, a second lip seal 5314, and a third lip seal 5413 to prevent air from entering the main vacuum chamber 2 from inside the goniometer 51. Therefore, placing the goniometer 5 outside the main vacuum chamber 2 will not affect the use of the goniometer 51 or the vacuum level inside the main vacuum chamber 2, and will also avoid the influence of the heat generated by the goniometer 51 on the sample detection.

[0084] In this invention, the crystal disk main drive shaft (A-axis) 527, the inner shaft (B-axis) of the angle measuring disk 539 and the outer shaft (C-axis) of the angle measuring disk 549 are each driven independently and installed in a nested manner to form a system that can accurately rotate a certain angle and measure the angle.

[0085] In this embodiment, the diffraction system is located inside the main vacuum cavity 2 and connected to the goniometer 5. The diffraction system 6 mainly includes a detector assembly 61, an incident light source assembly 62, a crystal switcher assembly 63, and the goniometer 5. The detector assembly 61, the incident light source assembly 62, and the crystal switcher assembly 63 are respectively installed inside the vacuum cavity, and the goniometer 5 is installed outside the vacuum cavity. The detector assembly 61 and the crystal switcher assembly 63 are respectively connected to one output shaft of the goniometer 5. The angle between the detector assembly 61 and the crystal switcher assembly 63 can be adjusted by the goniometer 5 to achieve diffraction conditions for X-rays of different wavelengths, so that the X-ray fluorescence of different elements in the incident beam can be analyzed sequentially.

[0086] In this embodiment, the incident light source assembly 62 can be a single incident light source or a collimation aperture assembly.

[0087] In this embodiment, the incident light source assembly 62 mainly includes an incident light source housing 621, an incident light source tube cap 622, an incident light source tube cover 623, an incident light source scintillator package 624, an incident light source collimating assembly 625, and an incident light source base plate 626. The incident light source tube cap 622 is fixedly installed at the front end of the incident light source housing 621, and a sealing ring is installed between the incident light source tube cap 622 and the incident light source housing 621. The incident light source scintillator package 624 is embedded in the incident light source tube cap 622, and the incident light source scintillator package 624 and the incident light source tube cap 621 are connected. A sealing ring is provided between the two points 22. The incident light source tube cover 623 is fixedly installed at the rear end of the incident light source housing 621. A sealing ring is provided between the incident light source tube cover 623 and the incident light source housing 621. The incident light source collimating assembly 625 is fixedly installed at the front end of the incident light source tube cap 622. The incident light source base plate 626 is fixedly installed on the incident light source housing 621. The incident light source assembly 62 can be installed on the goniometer 5 through the incident light source base plate 626. The goniometer 5 drives the incident light source assembly 62 to rotate so that its incident angle meets the set detection requirements. The incident aperture and the incident light source collimating assembly 625 form the incident light path.

[0088] In this embodiment, the collimation aperture assembly mainly includes an incident light source collimation group 625, an incident light source base plate 6266, a collimation aperture mounting plate 627, a collimation aperture first stepper motor 628, a first stepper motor mounting bracket 629, a collimation aperture second stepper motor 6210, a first collimation aperture limiting plate 6211, a second collimation aperture limiting plate 6212, a collimation aperture limiting seat 6213, a collimation aperture first limiting spring plate 6214, a collimation aperture second limiting spring plate 6215, a collimation aperture first limiting bearing 6216, a collimation aperture second limiting bearing 6217, a collimation aperture first drive shaft 6218, a collimation aperture second drive shaft 6219, a collimation aperture driven shaft 6220, and a collimation aperture first drive... Synchronous pulley 6221, collimation aperture second drive synchronous pulley 6222, collimation aperture first photoelectric switch 6223, collimation aperture second photoelectric switch 6224, collimation aperture first driven synchronous pulley 6225, collimation aperture second driven synchronous pulley 6226, collimation aperture first synchronous belt 6227, collimation aperture second synchronous belt 6228, collimation aperture third driven synchronous pulley 6229, collimation aperture fourth driven synchronous pulley 6230, collimation aperture third synchronous belt 6231, collimation aperture fourth synchronous belt 6232, collimation aperture first rotating synchronous pulley 6233 and collimation aperture second rotating synchronous pulley 6234, collimation aperture mounting plate 627 is fixedly installed on the main vacuum chamber 2, and collimation aperture first stepper motor 628. The first stepper motor 628 is fixedly mounted on the collimation aperture mounting plate 627 via a first stepper motor mounting bracket 629. The second stepper motor 6210 is fixedly mounted on the collimation aperture mounting plate 627. The first stepper motor 628 and the second stepper motor 6210 are located outside the main vacuum chamber 2. The first drive synchronous wheel 6221 of the collimation aperture is fixedly mounted on the motor shaft of the first stepper motor 628. The first drive synchronous wheel 6221 has a notch. The first photoelectric switch 6223 of the collimation aperture is fixedly mounted on the collimation aperture mounting plate 627. The first photoelectric switch 6223 of the collimation aperture is correspondingly arranged with the first drive synchronous wheel 6221 of the collimation aperture. The second stepper motor 621... A second drive synchronous wheel 6222 of the collimation aperture is fixedly mounted on the motor shaft of the 0. The second drive synchronous wheel 6222 has a notch. A second photoelectric switch 6224 of the collimation aperture is fixedly mounted on the collimation aperture mounting plate 627. The second photoelectric switch 6224 corresponds to the second drive synchronous wheel 6222. A first drive shaft 6218 and a second drive shaft 6219 of the collimation aperture are inserted into the collimation aperture mounting plate 627 and are fitted together. A first driven synchronous wheel 6225 and a fourth driven synchronous wheel 6230 of the collimation aperture are fixedly mounted on the first drive shaft 6218.The collimation aperture's second drive shaft 6219 is fixedly mounted with a collimation aperture's second driven synchronous wheel 6226 and a collimation aperture's third driven synchronous wheel 6229. A collimation aperture driven shaft 6220 is inserted into the incident light source collimation assembly 6255. A collimation aperture's first rotating synchronous wheel 6233 and a collimation aperture's second rotating synchronous wheel 6234 are fixedly mounted on the collimation aperture's driven shaft 6220. The collimation aperture's first drive synchronous wheel 6221 and the collimation aperture... A collimation aperture first synchronous belt 6227 is connected between the first driven synchronous pulley 6225 and the collimation aperture second driving synchronous pulley 6222. A collimation aperture second synchronous belt 6228 is connected between the collimation aperture second driven synchronous pulley 6222 and the collimation aperture second driven synchronous pulley 6226. A collimation aperture third synchronous belt 6231 is connected between the collimation aperture third driven synchronous pulley 6229 and the collimation aperture first rotating synchronous pulley 6233. A collimation aperture fourth driven synchronous pulley 6230 and the collimation aperture second driven synchronous pulley 6226 are connected between the collimation aperture first driven synchronous pulley 6227 and the collimation aperture second driven synchronous pulley 6222 and the collimation aperture third driven synchronous belt 6231. A collimation aperture fourth synchronous belt 6232 is connected between the second synchronous wheel 6234 of the collimation aperture and the first synchronous wheel 6233 of the collimation aperture. A first collimation aperture limiting disk 6211 is fixedly installed together with the first synchronous wheel 6233 of the collimation aperture. A second collimation aperture limiting disk 6212 is fixedly installed together with the second synchronous wheel 6234 of the collimation aperture. A collimation aperture limiting seat 6213 is fixedly installed on the inner wall of the main vacuum chamber 2. The collimation aperture limiting seat 6213 has a passage. A first collimation aperture first limit bearing 6216 is installed on the first collimation aperture limit spring plate 6214, corresponding to the first collimation aperture limit disk 6211. A second collimation aperture second limit bearing 6217 is installed on the collimation aperture limit seat 6213 via a second collimation aperture limit spring plate 6215, corresponding to the second collimation aperture limit disk 6212.

[0089] In this embodiment, the collimation aperture assembly is provided with four sets of incident light source assemblies 62, and the collimation aperture assembly can be rotated to switch between the four sets.

[0090] In this embodiment, the detector assembly 61 mainly includes an SC assembly 611, a PC assembly 612, and a goniometer mount 613. The SC assembly 611 and the PC assembly 612 are mounted on the goniometer mount 613 at a certain angle (24° in this embodiment). The goniometer mount 613 is mounted on the outermost axis of the goniometer 5. That is, the SC assembly 611 and the PC assembly 612 are mounted on the outermost axis of the goniometer 5 through the goniometer mount 613, which is defined as axis C (i.e., the outermost axis) in this invention.

[0091] In this embodiment, the SC assembly 611 mainly includes an SC main amplifier module 6111 and an SC module 6112 installed together. An SC sealing ring 6113 is provided between the SC main amplifier module 6111 and the SC module 6112. An SC base plate 6114 is fixedly installed on the SC module 6112. An SC support 6115 is fixedly installed on the SC base plate 6114. The SC assembly 611 is fixedly installed on the angle measuring rotary base 613 through the SC support 6115. The SC main amplifier module 6111 includes an SC front main amplifier box 61111, an SC front main amplifier box cover 61112, an SC front main amplifier control board 61113, an SC air cable socket 61114, an SC quick-connect fitting 61115, an SC silicone hose 61116, and an SC network port plug 61117. The SC front main amplifier control board 61113 is fixedly installed inside the SC front main amplifier box 61111, and the SC front main amplifier box cover 61112 is fixedly installed inside the SC front main amplifier box 61111. At the top, an SC air line socket 61114 is fixedly installed on the SC front main amplifier box 61111. An SC silicone hose 61116 is installed on the SC air line socket 61114 via an SC quick-connect fitting 61115. An SC network port plug 61117 is inserted into the SC front main amplifier control board 61113. The network cable is threaded through the SC silicone hose 61116 and sealed through the SC silicone hose 61116. The network cable is used to input control signals to the SC front main amplifier control board 61113.

[0092] In this embodiment, the SC module 6112 mainly includes an SC shell 61121, an SC tube cover 61122, an SC tube cap 61123, an SC tube body 61124, an SC back plate 61125, an SC scintillator package 61126, and an SC collimation group 61127. The SC tube body 61124 is installed inside the SC shell 61121, and the SC tube cap 61123 is fixedly installed at the front end of the SC shell 61121. The SC tube cap 61123 contains the SC scintillator package 61126. Sealing rings are installed between 61123 and SC shell 61121, and between SC cap 61123 and SC scintillator package 61126. SC cap 61122 is fixedly installed at the rear end of SC shell 61121. SC rear plate 61125 is fixedly installed at the rear end of SC shell 61121 through SC cap 61122. Sealing rings are installed between SC cap 61122 and SC shell 61121. SC collimation assembly 61127 is fixedly installed at the front end of SC cap 61123.

[0093] The side of the SC front main amplifier box 61111 is mounted together with the side of the SC housing 61121, and an SC sealing ring 6113 is installed between the SC front main amplifier box 61111 and the SC housing 61121. An SC base plate 6114 is mounted on the other side of the SC housing 61121, and an SC support 6115 is fixedly mounted on the SC base plate 6114. The SC assembly 611 is fixedly mounted on the angle measuring rotary base 613 through the SC support 6115.

[0094] In this embodiment, the PC assembly 612 mainly includes a PC air hose adapter 6121, a PC air hose socket 6122, a PC quick-connect fitting 6123, a PC silicone hose 6124, a PC network port plug 6125, a PC front amplifier box 6126, a PC front amplifier box cover 6127, a PC front amplifier control board 6128, a high-voltage socket socket 6129, a high-voltage socket 61210, a sealed terminal block 61211, a PC tube body 61212, and an air hose 6121. 3. Airflow tube wire 61214, First PC tube cap 61215, Second PC tube cap 61216, PC end seat 61217, Insulating pad inside the first airflow tube 61218, Insulating pad inside the second airflow tube 61219, First PC wire seat 61220, Second PC wire seat 61221, Needle sleeve 61222, Needle tip 61223, Screw set screw 61224, PC collimation assembly 61225, PC base plate 61226, First PC support 61 227 and the second PC support 61228, the PC front main amplifier control board 6128 is installed inside the PC front main amplifier box 6126, the PC front main amplifier box cover 6127 is fixedly installed on top of the PC front main amplifier box 6126, a sealing ring is provided between the PC front main amplifier box cover 6127 and the PC front main amplifier box 6126, and a PC air cable adapter 6121 is fixedly installed on the side of the PC front main amplifier box 6126. The PC front main amplifier box 6126 and the PC air cable adapter 6121 A sealing ring is provided between them. A PC air pipe socket 6122 is installed on the PC air pipe adapter 6121. A PC silicone hose 6124 is installed on the PC air pipe socket 6122 through a PC quick-connect 6123. A PC network port plug 6125 is inserted into the PC front main amplifier control board 6128. The network cable is inserted into the PC silicone hose 6124 and sealed through the PC silicone hose 6124. The network cable is used to input control signals to the PC front main amplifier control board 6128.A PC tube body 61212 is fixedly installed on the other side of the PC front main amplifier box 6126. A high-voltage socket 6129 is installed between the PC front main amplifier box 6126 and the PC tube body 61212. A high-voltage socket 61210 is embedded in the high-voltage socket 6129, and a sealing terminal 61211 is embedded in the high-voltage socket 61210. A first PC tube cover 61215 is fixedly installed on one end of the PC tube body 61212, and a second PC tube cover 61216 is fixedly installed on the other end. Sealing rings are respectively installed between the first PC tube cover 61215 and the second PC tube cover 61216 and the PC tube body 61212. An insulating gasket 61218 for the first air flow tube is embedded in the first PC tube cover 61215, and an insulating gasket 61219 for the second air flow tube is embedded in the second PC tube cover 61216. The PC end seat 61217 passes through the second P C-tube cap 61216 is fixedly installed inside PC tube body 61212. A first PC thread holder 61220 is fixedly installed inside PC tube body 61212. The first PC thread holder 61220 is fixedly installed inside PC tube body 61212 via first PC tube cap 61215. A second PC thread holder 61221 is embedded in PC end seat 61217. A needle sleeve 61222 is embedded in the first PC thread holder 61220. A needle tip 61223 is embedded in the needle sleeve 61222. A screw set screw 61224 is embedded in the second PC thread holder 61221. The needle tip 61223 is connected to one end of the air flow tube wire 61214. The screw set screw 61224 is connected to the other end of the air flow tube wire 61214. PC collimator 61225 is fixedly installed on PC tube body 61212. An air tube 61213 is also installed on PC tube body 61212. A PC base plate 61226 is fixedly installed on the PC front main amplifier box 6126. A first PC support 61227 and a second PC support 61228 are fixedly installed on the PC base plate 61226. The PC assembly 612 is fixedly installed on the angle measuring rotatable base 613 through the first PC support 61227 and the second PC support 61228.

[0095] In this embodiment, the detector assembly 61 is provided with two sets of detectors, namely the SC assembly 611 and the PC assembly 612. The PC detector is composed of the PC collimator 61225 and the gas proportional counter detector (PC), and the SC detector is composed of the SC collimator 61127 and the scintillator detector (SC). There is a certain angle between the two sets of detectors (24° in this embodiment).

[0096] The detector assembly 61 is mounted on one axis of the goniometer 5, which is defined as axis B in this invention. The goniometer axis B can drive the detector assembly to rotate, so that the angle between the PC detector or the SC detector and the crystal surface is θ, respectively, to achieve the Bragg diffraction condition. Then, the PC or SC detector can be used to receive and analyze the fluorescent X-rays of a specific element.

[0097] In this embodiment, the crystal switcher assembly 63 mainly includes a main drive mechanism, a transmission mechanism, a rotation mechanism, a crystal frame 6341, a commutator frame 6342, and a crystal assembly. The crystal frame 6341 is mounted on a shaft of a goniometer, defined in this invention as shaft B (intermediate layer shaft). The goniometer shaft B can drive the crystal switcher assembly 63 to rotate as a whole, so that it reaches a set tilt angle. The commutator frame 6342 is fixedly mounted on the crystal frame 6341. The main drive mechanism is mounted on the commutator frame 6342. The transmission mechanism, the rotation mechanism, and the crystal assembly are mounted on the crystal frame 6341. The crystal assembly is fixedly mounted together with the rotation mechanism. The transmission mechanism is connected to the rotation mechanism. The main drive mechanism is connected to the transmission mechanism. The main drive mechanism drives the rotation mechanism to rotate through the transmission mechanism. The rotation mechanism drives the crystal assembly to rotate, thereby switching between different crystals.

[0098] In this embodiment, the main drive mechanism includes a crystal disk drive shaft 6311, a first bevel gear 6312, a second bevel gear 6313, and a crystal turntable drive gear 6314. The first bevel gear 6312 is fixedly mounted on the crystal disk drive shaft 6311, and the second bevel gear 6313 meshes with the first bevel gear 6312. The second bevel gear 6313 is fixedly mounted on a shaft on the goniometer 5, which is defined as shaft A (intermediate shaft) in this invention. Through the cooperation between the second bevel gear 6313 and the first bevel gear 6312, the purpose of changing the rotation direction can be achieved. The crystal turntable drive gear 6314 is fixedly mounted at the end of the crystal disk drive shaft 6311. The crystal disk drive shaft 6311 is inserted into the commutator frame 6342, and the crystal turntable drive gear 6314 is located on the outside of the commutator frame 6342.

[0099] In this embodiment, the transmission mechanism mainly includes a crystal turntable transmission gear 6321 and a crystal turntable transmission gear shaft 6322. The crystal turntable transmission gear shaft 6322 is fixedly installed on the crystal frame 6341, and the crystal turntable transmission gear 6321 is installed on the crystal turntable transmission gear shaft 6322. The crystal turntable transmission gear 6321 meshes with the crystal turntable drive gear 6314.

[0100] In this embodiment, the rotating mechanism mainly includes a crystal disk spindle 6331, a crystal disk bushing 6332, and a crystal disk driven gear 6333. The crystal disk bushing 6332 is fitted onto the crystal disk spindle 6331, and the crystal disk driven gear 6333 is fixedly installed together with the crystal disk spindle 6331. The crystal disk driven gear 6333 meshes with the crystal turntable drive gear 6321. In specific implementation, the crystal turntable drive gear 6321 may be omitted, and the crystal disk driven gear 6333 may be directly meshed with the crystal turntable drive gear 6314.

[0101] The crystal assembly can be set in one or more groups according to actual needs. In this embodiment, eight groups are used as an example. In specific implementation, it can also be determined according to actual needs. The crystal disk sleeve 6332 is provided with several groups of mounting positions (eight groups are provided in this embodiment). Crystal assemblies can be selectively installed or not installed in each group of mounting positions. The crystal assemblies are divided into two types according to different structures and functions. The first type of crystal assembly includes a first crystal 6351, a first crystal support plate 6352, a first crystal first magnet 6353, a first crystal second magnet 6354, and a first crystal support rail 6355. The first crystal support rail 6355 is fixedly installed on the crystal disk sleeve 6332. The first crystal first magnet 6353 and the first crystal second magnet 6354 are fixedly installed on the first crystal support rail 6355 by screws. The first crystal support plate 6352 is installed on the first crystal support rail 6355 by pins. The first crystal 6351 is installed on the first crystal support rail 6355. The first crystal assembly is mounted on a crystal support plate 6352. The second crystal assembly includes a second crystal 6361, a second crystal support plate 6362, a first magnet 6363, a second magnet 6364, and a second crystal support rail 6365. The second crystal support rail 6365 is fixedly mounted on the crystal disk bushing 6332. The first magnet 6363 and the second magnet 6364 are fixedly mounted on the second crystal support rail 6365 with screws. The second crystal support plate 6362 is mounted on the second crystal support rail 6365 with pins. The second crystal 6361 is mounted on the second crystal support plate 6362. The first crystal 6351 is made of DCC7030, and the second crystal 6361 is made of Ge3030. The two structures have different dimensions and use different crystal support plates. Both the first crystal 6351 and the second crystal 6361 are diffractive crystals.

[0102] The crystal switcher assembly 63 is mounted on one axis of the goniometer 5, defined in this invention as axis B. The goniometer axis B can drive the crystal switcher assembly 63 to rotate, so that the angle between the crystal surface and the incident light path is θ. The crystal switcher assembly 63 can rotate to form a diffraction light path with each crystal, the incident light path, and the PC collimator (or SC collimator).

[0103] In this invention, the goniometer 5 is installed outside the main vacuum cavity 2, and the diffraction system is installed inside the main vacuum cavity 2. In this way, all driving components are installed outside the vacuum cavity rather than inside it, so that heat dissipation will not be affected by working in a vacuum.

[0104] The core optical path system of the spectrometer consists of X-rays emitted from the X-ray tube window, passing through the X-ray tube mask, and irradiating the sample, exciting the fluorescent X-rays of the elements in the sample. These fluorescent X-rays are then monochromated by passing through a vacuum barrier, an incident aperture, and an incident collimator onto a diffraction crystal. The monochromated fluorescent X-rays then pass through a PC collimator to enter a gas proportional counter detector, or through an SC collimator to enter a scintillator detector. This invention eliminates the need for a motor heating element located within a sealed cavity and requires no additional sealed through-plate wiring, simplifying the structure and avoiding heat dissipation problems in a vacuum.

[0105] This invention adopts a double-sided structure, with the sample placed on top and the detection device installed on the bottom, making the overall layout more reasonable and facilitating installation, debugging, and maintenance.

[0106] In this invention, the goniometer is mounted on the outer wall of the spectrometer, and the crystal switching motor is mounted on the goniometer. All driving components are installed outside the vacuum chamber, not inside, thus avoiding impact on heat dissipation due to operation in a vacuum. This invention achieves different wavelength X-ray diffraction conditions between the incident light source, the emplacement object, and the detector assembly by rotating the angles of the goniometer separately, allowing for sequential analysis of the X-ray fluorescence of different elements in the incident light beam. This invention combines magnetic shielding and high vacuum functionality, significantly increasing detection accuracy. Furthermore, the main vacuum chamber and auxiliary vacuum chamber are independently configured, allowing for separate vacuuming operations, greatly enhancing ease of use.

Claims

1. A high-power wavelength dispersive X-ray fluorescence spectrometer, characterized in that: The spectrometer includes a housing (1), a power supply box (15), a vacuum pump (16), a main vacuum chamber (2), an auxiliary vacuum chamber (3), a light source (4), a goniometer (5), and a diffraction system (6). The main vacuum chamber (2) and the auxiliary vacuum chamber (3) are installed inside the housing (1) and are fixedly installed together. The light source (4) is fixedly installed on the auxiliary vacuum chamber (3). The goniometer (5) is fixedly installed outside the main vacuum chamber (2). The diffraction system (6) is located inside the main vacuum chamber (2) and is connected to the goniometer (5). The vacuum pump (16) is connected to the main vacuum chamber (2) and the auxiliary vacuum chamber (3) respectively and is used to perform vacuuming operations on the main vacuum chamber (2) and the auxiliary vacuum chamber (3). The power supply box (15) is used to supply power.

2. The high-power wavelength dispersive X-ray fluorescence spectrometer according to claim 1, characterized in that: The outer shell (1) includes an upper shell (11), a lower shell (12) and a base frame (13). The lower shell (12) and the base frame (13) are installed together to form a lower space. The power supply box (15) and the vacuum pump (16) are fixedly installed in the lower space on the base frame (13). The main vacuum chamber (2) and the auxiliary vacuum chamber (3) are respectively fixedly installed in the lower space on the base frame (13) through internal brackets. The upper shell (11) is installed above the lower shell (12).

3. The high-power wavelength dispersive X-ray fluorescence spectrometer according to claim 2, characterized in that: The upper shell (11) is equipped with a sample stage (18) for placing the sample tray assembly (3263), and a sampling device (14) for gripping the sample tray assembly (3263) is installed on the sample stage (18).

4. The high-power wavelength dispersive X-ray fluorescence spectrometer according to claim 2, characterized in that: An alarm (17) is fixedly installed on the top of the upper shell (11).

5. The high-power wavelength dispersive X-ray fluorescence spectrometer according to claim 1, characterized in that: A sample chamber sealing assembly (3266) is provided between the auxiliary vacuum chamber (3) and the main vacuum chamber (2). The sample chamber sealing assembly (3266) includes a sample chamber sealing seat (32661), a sample chamber sealing cover (32662), and a sample chamber sealing membrane (32663). The sample chamber sealing seat (32661) and the sample chamber sealing cover (32662) are fixedly installed together. The sample chamber sealing membrane (32663) is located between the sample chamber sealing seat (32661) and the sample chamber sealing cover (32662). The sample chamber sealing membrane (32663) is a polyester film. Metal mesh plates are plated on both sides of the sample chamber sealing membrane (32663), namely the first sample chamber sealing mesh plate (32664) and the second sample chamber sealing mesh plate (32665). Metal support mesh made of high magnetic permeability material is provided on both sides of the sample chamber sealing membrane (32663).

6. The high-power wavelength dispersive X-ray fluorescence spectrometer according to claim 1, characterized in that: The auxiliary vacuum cavity (3) includes an auxiliary vacuum cavity shell, a light tube aperture disk driving assembly, an energy spectrum detector assembly, and a sample transfer assembly. The light tube aperture disk driving assembly and the energy spectrum detector assembly are respectively installed outside the auxiliary vacuum cavity shell and are set corresponding to the sample transfer assembly. The sample transfer assembly is installed inside the auxiliary vacuum cavity shell.

7. The high-power wavelength dispersive X-ray fluorescence spectrometer according to claim 1, characterized in that: The goniometer (5) includes a goniometer base (51), a drive device (52), a crystal disk main drive shaft (527), a first measurement module (53), and a second measurement module (54). The first measurement module (53) and the second measurement module (54) are directly or indirectly mounted on the goniometer base (51), the drive device (52) is directly or indirectly mounted on the first measurement module (53), the crystal disk main drive shaft (527) is connected to the drive device (52), the drive device (52) drives the crystal disk main drive shaft (527) to rotate, and the goniometer base (51) is fixedly mounted on the main vacuum chamber (2).

8. The high-power wavelength dispersive X-ray fluorescence spectrometer according to claim 1, characterized in that: The diffraction system (6) includes a detector assembly (61), an incident light source assembly (62), a crystal switcher assembly (63), and a goniometer (5). The detector assembly (61), the incident light source assembly (62), and the crystal switcher assembly (63) are respectively installed inside the vacuum chamber, and the goniometer (5) is installed outside the vacuum chamber. The detector assembly (61) and the crystal switcher assembly (63) are respectively connected to one output shaft of the goniometer (5).

9. The high-power wavelength dispersive X-ray fluorescence spectrometer according to claim 8, characterized in that: The detector assembly (61) is provided with two sets of detectors, namely the SC assembly (611) and the PC assembly (612), wherein the PC collimator (61225) and the gas proportional counter detector form the PC detector, and the SC collimator (61127) and the scintillator detector form the SC detector, and there is a certain angle between the two sets of detectors.

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