Compact clean type light trap structure for deep ultraviolet optical system

Abstract

The invention discloses a compact and clean type light trap structure for a deep ultraviolet optical system, and relates to the technical field of light trap structures, the compact and clean type light trap structure comprises an assembly component, the assembly component is arranged in a vertically through manner, and one side of the bottom of the assembly component is provided with an opening; the sealing device is detachably assembled in the opening; and the groove plate assembly is assembled at the bottom of the assembling assembly, and the groove plate assembly is formed by arranging and splicing a plurality of extinction pieces. According to the invention, a black light absorption coating or a blackening treatment process which a traditional light trap depends on is abandoned, and the extinction function is realized through an extinction sheet splicing structure made of a metal or rigid material, so that the problems of volatilization, falling or degradation of the coating under the irradiation of deep ultraviolet light are fundamentally avoided; the risk that coating particles pollute an optical path and an optical element is avoided, the system is suitable for high-precision optical systems with extremely strict requirements for cleanliness such as semiconductor detection and space observation, the stability of the system is improved, and the service life of the system is prolonged.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of optical trap structure, and particularly relates to a compact and clean optical trap structure for a deep ultraviolet optical system. BACKGROUND

[0002] In the field of optical imaging and precision instruments, especially in high-precision optical systems such as semiconductor detection and space observation, stray light is a key factor restricting the imaging quality and measurement accuracy. Stray light refers to light deviating from the intended propagation path, which can reduce image contrast, produce artifacts and halos, interfere with the normal transmission of the core optical signal, and even cause measurement data distortion, affecting the operation reliability of the entire system.

[0003] To suppress stray light, the existing technology generally uses an optical trap (also known as an extinction structure) as the core solution. The core design idea of the traditional optical trap is to build an extinction chamber, introduce stray light into the cavity by setting a mirror, and then use the internal single-layer or multi-layer extinction plate to realize light energy attenuation. The extinction plate usually needs to be roughened on the surface to cause diffuse reflection, and a black or dark light-absorbing coating is applied, so that the stray light energy is gradually reduced through multiple reflections and coating absorption in the extinction chamber. This scheme can achieve certain extinction effect in the visible and infrared bands, but in the application of deep ultraviolet bands (commonly used in the semiconductor field), it exposes technical bottlenecks that are difficult to overcome.

[0004] The cleanliness requirement of the optical system in the semiconductor field is extremely strict, and the black extinction paint or blackening treatment coating material relied on by the traditional optical trap is prone to volatilization, shedding or degradation under the continuous irradiation of deep ultraviolet light. The shed coating particles can contaminate the optical path and the surface of the optical element, not only directly damaging the system cleanliness, but also exacerbating the wear of the optical element, seriously affecting the long-term stability and service life of the system. Therefore, the semiconductor industry explicitly prohibits the use of such optical trap scheme with black coating in deep ultraviolet optical systems, and urgently needs an alternative structure that can achieve efficient extinction without relying on light-absorbing coating.

[0005] Since the traditional extinction chamber needs to accommodate the mirror, multi-layer extinction plate and gully-shaped surface structure at the same time, the overall volume is large and the layout flexibility is poor. High-precision optical systems often have strict compactness requirements for internal space, and the bulky structure of the traditional optical trap is difficult to adapt to the integration needs of such systems, limiting its application in miniaturized and high-density layout devices. Moreover, the extinction mechanism of the traditional optical trap relies on the diffuse reflection of the surface of the extinction plate, and this mechanism cannot achieve complete attenuation of stray light. Part of the light may still escape from the extinction chamber after multiple reflections, returning to the main light path to form secondary stray light pollution, which is difficult to meet the stringent requirements of high-precision systems for stray light suppression.

[0006] And the performance of the black light-absorbing coating is restricted by the characteristics of the material itself. Different wave bands of light can cause different aging phenomena of the coating. In addition to the problems of volatilization and shedding in the deep ultraviolet band, in the multi-wave band compatible optical system, the absorption efficiency of the coating for different wavelengths of light is quite different, and it is difficult to achieve high-efficiency extinction in the full wave band, which further limits the application scenarios of traditional light traps.

[0007] In summary, the existing traditional light trap has multiple problems such as bloated spatial layout, insufficient extinction efficiency, coating pollution risk, and limited applicable wave band, and cannot meet the comprehensive needs of compactness, ultra-high cleanliness and efficient stray light suppression of deep ultraviolet optical systems. Therefore, there is an urgent need in the field to develop a new type of light trap structure that is compact, does not require light-absorbing coating, is easy to process, and has excellent extinction efficiency. SUMMARY

[0008] The purpose of the present application is to provide a compact and clean light trap structure for deep ultraviolet optical systems to solve the problems raised in the background art.

[0009] To achieve the above-mentioned purpose, the present application provides the following technical solution: a compact and clean light trap structure for deep ultraviolet optical systems, comprising: An assembly component is provided through the up-down direction, and an opening is formed on one side of the bottom of the assembly component; A sealing device is detachably assembled in the interior of the opening; A groove plate assembly is assembled at the bottom of the assembly component, and the groove plate assembly is composed of a plurality of extinction sheets arranged and spliced.

[0010] Preferably, the adjacent extinction sheets are symmetrically arranged, and the plurality of extinction sheets are uniformly arranged along the straight line direction.

[0011] Preferably, the extinction sheet comprises: A sheet-like member is a long and thin sheet, and the sheet-like member is made of metal or rigid material; An inclined surface is formed on one side of the sheet-like member; A fitting surface is provided on the other side of the sheet-like member, and the inclined surfaces of the adjacent two extinction sheets are oppositely arranged by oppositely splicing the two fitting surfaces, and a reversed triangular groove is formed by the two fitting surfaces. The depth of the reversed triangular groove is determined by the height of the sheet-like member, and can be adaptively adjusted according to the intensity of stray light and spatial restriction.

[0012] Preferably, the top of the sheet-like member forms a blade shape through the formation of the inclined surface, and the blade angle of the blade is ≤1°.

[0013] Preferably, the assembly component comprises: An assembly frame, wherein the assembly frame has a square frame structure and the opening is formed on one side of the bottom of the assembly frame; The inner stop protrusion is symmetrically arranged on the top of the inner cavity of the assembly frame, and the inner stop protrusion is integrally formed with the assembly frame. An external connecting frame is disposed outside the assembly frame.

[0014] Preferably, the sealing device includes: The sealing plate is fitted inside the opening; The elastic extrusion mechanism has a groove on the inner side of the sealing plate, and the elastic extrusion mechanism is assembled inside the groove.

[0015] Preferably, the elastic compression mechanism includes: An extrusion block, which is slidably fitted inside a groove, and a gasket is connected to the surface of the extrusion block; A spring is disposed inside the groove and is used to provide elastic support for the extrusion block.

[0016] Preferably, the elastic compression mechanism further includes: The guide post is slidably inserted and connected to the extrusion block, and one end of the guide post is threadedly inserted and connected to the sealing plate. The guide post is movably sleeved with a spring.

[0017] Preferably, the bottom of the assembly is fitted with a heat dissipation shell, and the heat dissipation shell covers the outside of the slot plate assembly. The heat dissipation shell is made of a material with high thermal conductivity, and heat dissipation grooves are formed on the side wall or bottom of the heat dissipation shell to dissipate the heat generated when the optical system is working.

[0018] Preferably, the sealing device further includes: The positioning hole and the assembly hole are provided, wherein the positioning hole is horizontally opened and the assembly hole is vertically opened, and the positioning hole and the assembly hole are staggered.

[0019] The technical effects and advantages of this invention are as follows: This invention abandons the black light-absorbing coating or blackening process that traditional light traps rely on. The extinction function of this invention is achieved through the splicing structure of extinction sheets made of metal or rigid materials, which fundamentally eliminates the problem of coating volatilization, peeling or degradation under deep ultraviolet light irradiation, avoids the risk of coating particles contaminating the optical path and optical components, and is suitable for high-precision optical systems with extremely strict cleanliness requirements such as semiconductor detection and space observation, thus improving the long-term stability and service life of the system. This invention eliminates the bulky structures of traditional optical traps, such as extinction chambers, mirrors, and multi-layer extinction plates. It uses a slotted plate assembly with a tightly arrayed inverted triangular slot at the top as the core extinction unit, which can achieve efficient extinction simply by being directly installed in the area where stray light is concentrated in the optical path. The overall structure is modular and compact, saving internal space in the optical system and effectively solving the problem of incompatibility between traditional optical traps and the compact layout of high-precision systems. It can be flexibly adapted to miniaturized, high-density optical devices. This invention achieves an extremely small slot angle design through the sharpening and splicing process of an extinction blade with an edge angle ≤1°. Stray light, upon incident, undergoes high-frequency reciprocating reflections between the inverted triangular slot walls. Each reflection is accompanied by light energy absorption and scattering, resulting in an energy attenuation rate far exceeding that of traditional diffuse reflection mechanisms. This extinction mode ensures that stray light is sufficiently attenuated before escaping, with a very low proportion of energy reflected back to the main optical path. This not only significantly improves stray light suppression efficiency but also avoids secondary stray light contamination. This invention employs a multi-extinction plate assembly process, which not only avoids the complex micro-machining challenges of traditional integral engraving of extremely small-angle deep grooves, but also utilizes readily available and common metals or rigid materials, simplifying the process steps and effectively reducing processing difficulty and production costs, thus facilitating large-scale production and assembly. Furthermore, the overall modular design allows for flexible adjustment of groove depth, groove array density, and structural dimensions based on stray light intensity and space constraints. It can be easily installed in different areas such as the inner wall of the lens barrel, near the image plane, or around the optical window, improving compatibility with various optical systems and simplifying maintenance and operation. Attached Figure Description

[0020] The accompanying drawings are provided to further illustrate the invention and form part of the specification. They are used together with the embodiments of the invention to explain the invention, but do not constitute a limitation thereof. In the drawings: Figure 1 This is a schematic diagram of the exploded structure of the present invention; Figure 2 This is a three-dimensional structural diagram of the assembly component of the present invention; Figure 3 This is a schematic diagram of the internal structure of the assembly component of the present invention; Figure 4 This is a schematic diagram of the assembled structure of the slot plate assembly of the present invention; Figure 5 This is a schematic diagram of the internal structure of the elastic extrusion mechanism of the present invention; In the attached diagram: 100, assembly component; 101, assembly frame; 102, inner stop protrusion; 103, outer connecting frame; 200, sealing device; 201, sealing plate; 202, elastic extrusion mechanism; 221, extrusion block; 222, spring; 223, guide post; 203, positioning hole; 204, assembly hole; 300, matting sheet; 301, sheet-like component; 302, beveled surface; 303, matting surface; 400, heat dissipation shell. Detailed Implementation

[0021] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0022] This invention provides, for example Figures 1-5 The compact, clean light trap structure for a deep ultraviolet optical system shown includes: an assembly 100, which is disposed vertically and has an opening on one side of its bottom; a sealing device 200, which is detachably assembled inside the opening; and a slotted plate assembly, which is assembled at the bottom of the assembly 100 and is composed of multiple extinction plates 300 arranged and assembled. The light trap structure composed of the assembly 100, the sealing device 200, and the slotted plate assembly is mechanically fixed to areas of strong stray light in the optical system, such as the inner wall of the lens barrel, near the image plane, or around the optical window. Once light enters the inverted triangular groove, it will reflect back and forth between the acute-angled groove walls, causing a sharp decrease in light intensity. It cannot be reflected back to the main light path with significant energy, thus achieving efficient suppression of stray light. This invention abandons the black light-absorbing coating or blackening process relied upon by traditional light traps. The extinction function of this invention is achieved through a 300-piece assembly structure of extinction sheets made of metal or rigid materials. This fundamentally eliminates the problems of coating volatilization, peeling, or degradation under deep ultraviolet light irradiation, avoiding the risk of coating particles contaminating the light path and optical components. It is suitable for high-precision optical systems with extremely stringent cleanliness requirements, such as semiconductor detection and space observation, improving the long-term stability and service life of the system. The assembly process using multiple 300-piece extinction sheets not only avoids the complex micro-machining difficulties of traditional integral engraving of extremely small-angle deep grooves, but also utilizes readily available and common metal or rigid materials, simplifying the process steps and effectively reducing processing difficulty and production costs, facilitating large-scale production and assembly. Meanwhile, the overall modular design allows for flexible adjustment of the slot depth, slot array density, and structural dimensions based on stray light intensity and space constraints. It can be easily installed in different areas such as the inner wall of the lens barrel, near the image plane, or around the optical window, improving its adaptability to various optical systems and simplifying maintenance and operation.

[0023] Specifically, adjacent extinction plates 300 are symmetrically arranged, and multiple extinction plates 300 are evenly distributed along a straight line. The symmetrical arrangement of the extinction plates 300 can precisely enclose and form inverted triangular grooves with consistent groove angles and uniform groove widths, avoiding groove angle deviations or uneven groove widths caused by groove asymmetry. The uniform arrangement along a straight line ensures that the spacing, groove depth, and other parameters of all inverted triangular grooves are uniform, so that stray light, regardless of any area of ​​the groove array, undergoes the same number of reflection attenuation processes, eliminating extinction blind zones caused by local groove structure abnormalities, achieving a uniform and stable stray light suppression effect, and preventing some light from escaping prematurely due to groove structure deviations and causing secondary pollution. Furthermore, the symmetrical arrangement of the extinction plates 300 makes the two sides of the inverted triangular grooves mirror-distributed, so that stray light can form a regular reciprocating reflection path between the groove walls after incident, ensuring that the light cannot escape by deflection and avoid multiple reflections. The uniform arrangement along a straight line makes the groove array continuous. The extinction channel forces stray light into adjacent slots after it is incident, preventing light leakage due to disordered arrangement. This further ensures that each stray light beam undergoes sufficient reflections to achieve adequate light attenuation. The straight and uniform arrangement design makes the positioning and fixing of the extinction plates 300 easier. The array arrangement can be quickly completed using standardized fixtures, avoiding assembly deviations caused by irregular arrangement. The straight and uniform arrangement maximizes the use of the effective space in the installation area, allowing for more inverted triangular slots to be arranged within a limited volume, increasing the extinction capacity per unit space and meeting the compact design requirements of the light trap. The symmetrical structure ensures that the extinction plate 300 array is subjected to balanced forces. When pressed and fixed by the pressure plates or frames on both sides, each extinction plate 300 bears the same pressure, avoiding structural deformation caused by localized stress concentration. This ensures the long-term stability of the geometry of the inverted triangular slots and guarantees the reliability of the light trap's extinction performance during long-term operation of the optical system.The matting filter 300 includes: a sheet-like component 301, which is a long, thin sheet made of metal or rigid material and employs a sheet assembly process, avoiding complex micro-machining. The materials used are common, the process is simple, and it facilitates large-scale production and assembly. A beveled surface 302 is located on one side of the sheet-like component 301. A bonding surface 303 is located on the other side of the sheet-like component 301. Through the relative assembly of the two bonding surfaces 303, the beveled surfaces 302 of adjacent matting filters 300 are positioned opposite each other and together form an inverted triangular groove. The depth of the inverted triangular groove is determined by the height of the sheet-like component 301 and can be adjusted according to the stray light intensity and... To adapt to spatial constraints, the oblique surface 302 provides the wall structure for the inverted triangular groove, while the mating surface 303 serves as the other mating surface. By relatively splicing the mating surfaces 303 of adjacent extinction sheets 300, the relative positions of the two oblique surfaces 302 can be controlled, ensuring that the inverted triangular groove formed by the enclosure has consistent groove angles, symmetrical groove walls, and a tight fit. This avoids light leakage due to groove wall misalignment or gaps. To achieve efficient stray light suppression, the groove angle (i.e., the groove wall angle) should be as small as possible, so that the light undergoes more reflections before escaping. The groove depth is determined by the height of the sheet and can be flexibly designed according to the stray light intensity and spatial constraints. By utilizing the multiple reflection mechanism caused by the extremely small groove angle, the light energy decays rapidly, and the proportion reflected back to the optical system is significantly reduced.

[0024] Preferably, the top of the thin sheet member 301 is formed into a cutting edge shape by opening a beveled surface 302, and the cutting edge angle is ≤1°. The design of the cutting edge angle ≤1° allows the beveled surfaces 302 of adjacent extinction plates 300 to enclose and form an inverted triangular groove with an ultra-small angle. According to the principle of geometric optics, the smaller the groove angle, the more times stray light is reflected between the groove walls after it is incident. Compared with the larger groove angle of traditional light traps (or diffuse reflection structures), in this invention, light needs to undergo dozens or even hundreds of repeated reflections before it can try to escape. Each reflection is accompanied by the absorption and scattering of light energy, and the energy attenuation rate increases exponentially. In the end, the stray light energy reflected back to the main light path accounts for a very low proportion. Moreover, the sharp cutting edge of ≤1° makes the two sides of the inverted triangular groove form a nearly parallel steep structure. After the stray light is incident, it is forcibly constrained in the narrow space inside the groove and cannot escape through large-angle deflection or the gap between the groove walls. Even stray light with tricky angles will continuously reflect and attenuate under the guidance of the sharp groove angle, avoiding the problem of some light rays leaving the groove after only a few reflections and forming secondary stray light pollution due to excessively large groove angles. Existing technology directly processes deep grooves with groove angles ≤1° on a whole sheet material, which faces technical challenges such as insufficient tool strength, difficulty in controlling machining accuracy, and high cost. However, the cutting edge of this design transforms the machining of complex deep grooves into the machining of the cutting edge of a single thin sheet component 301. The machining difficulty is far lower than that of engraving a whole deep groove. The accuracy requirement of a cutting edge angle ≤1° can be stably achieved with conventional precision machining equipment, which not only breaks through the limitations of traditional machining, but also ensures the consistency of the cutting edge angles during mass production.

[0025] The assembly component 100 includes: an assembly frame 101, which has a square frame structure and an opening on one side of its bottom; and an inner stop protrusion 102, which is symmetrically arranged on the top of the inner cavity of the assembly frame 101 and is integrated with the assembly frame 101. The inner stop protrusion 102 protrudes from the bottom inner wall of the sealing plate 201, thus partially blocking the matting sheet 300 at the rear, preventing light from directly shining through the gap between the matting sheet 300 and the assembly frame 101. On the other hand, under the elastic support of the elastic compression mechanism 202 on the matting sheet 300, multiple matting sheets 300 will be concentrated and pressed together under elastic compression, which will increase the gap between the assembly frame 101 and the tail matting sheet 300. Through the shielding of the inner stop protrusion 102, light is further prevented from being directly emitted from the gap between the end matting sheet 300 and the assembly frame 101, avoiding the resulting local light leakage blind spot; the outer connecting frame 103 is set outside the assembly frame 101, and the heat dissipation shell 400 is connected and installed to the assembly frame 101 through the outer connecting frame 103.

[0026] The sealing device 200 includes: a sealing plate 201, which is assembled inside the opening; and an elastic extrusion mechanism 202, wherein a groove is provided on the inner side of the sealing plate 201 and the elastic extrusion mechanism 202 is assembled inside the groove.

[0027] The elastic extrusion mechanism 202 includes: an extrusion block 221, which is slidably fitted inside a groove, and a gasket is attached to the surface of the extrusion block 221; a spring 222, which is disposed inside the groove and provides elastic support for the extrusion block 221; and guide posts 223, which are slidably inserted into the extrusion block 221, with one end of each guide post 223 threadedly inserted into the sealing plate 201. The guide posts 223 are movably sleeved with the springs 222. The mechanism first extrudes the extrusion block 221... 1. The guide post 223 is inserted between the guide post 223 and the sealing plate 201, and then the guide post 223 is rotated by thread to realize the threaded assembly between the guide post 223 and the sealing plate 201. The guide post 223 facilitates the limiting of the sliding of the extrusion block 221, preventing the extrusion block 221 from sliding excessively relative to the sealing plate 201 and dislodging from the inner cavity of the groove. The spring 222 facilitates the elastic support of the extrusion block 221, so that the extrusion block 221 can squeeze the matting sheet 300, so that the matting sheets 300 can be tightly attached to each other to prevent light leakage.

[0028] The assembly assembly 100 is fitted with a heat dissipation shell 400 at its bottom, and the heat dissipation shell 400 covers the outside of the slot plate assembly. The heat dissipation shell 400 is made of a material with high thermal conductivity. Heat dissipation grooves are provided on the side wall or bottom of the heat dissipation shell 400 to dissipate the heat generated when the optical system is working. The heat dissipation shell 400 is used to accommodate and protect the slot plate assembly.

[0029] The sealing device 200 also includes a positioning hole 203 and an assembly hole 204. The positioning hole 203 is horizontally opened, and the assembly hole 204 is vertically opened. The positioning hole 203 and the assembly hole 204 are staggered. External positioning rods pass through each matting sheet 300, and their two ends are respectively inserted and engaged with the assembly frame 101 and the positioning hole 203, so that the position of each matting sheet 300 can be positioned, making the splicing accuracy of the matting sheet 300 higher. External bolts pass through the assembly hole 204 and are threadedly engaged with the external connecting frame 103, which facilitates the installation of the sealing plate 201.

[0030] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A compact, clean light trap structure for deep ultraviolet optical systems, characterized in that, include: An assembly component (100) is provided through the vertical direction, and an opening is provided on one side of the bottom of the assembly component (100). A sealing device (200) is detachably mounted inside the opening; The slot plate assembly is mounted on the bottom of the assembly assembly (100) and is composed of a plurality of matting sheets (300) arranged and assembled.

2. The compact, clean light trap structure for deep ultraviolet optical systems according to claim 1, characterized in that, The adjacent matting sheets (300) are arranged symmetrically, and the plurality of matting sheets (300) are evenly arranged along a straight line.

3. The compact, clean light trap structure for a deep ultraviolet optical system according to claim 1, characterized in that, The matting filter (300) includes: A sheet-like component (301), wherein the sheet-like component (301) is a long strip of sheet, and the sheet-like component (301) is made of metal or rigid material; A beveled surface (302) is formed on one side of the sheet-like member (301); The bonding surface (303) is disposed on the other side of the sheet-like component (301). By the relative splicing of the two bonding surfaces (303), the oblique cut surfaces (302) of the two adjacent matting sheets (300) are arranged opposite each other and together form an inverted triangular groove. The depth of the inverted triangular groove is determined by the height of the sheet-like component (301) and can be adjusted according to the stray light intensity and space constraints.

4. The compact, clean light trap structure for a deep ultraviolet optical system according to claim 3, characterized in that, The top of the sheet-like member (301) is formed into a cutting edge shape by the opening of the oblique surface (302), and the cutting edge angle is ≤1°.

5. The compact, clean light trap structure for a deep ultraviolet optical system according to claim 1, characterized in that, The assembly component (100) includes: Assembly frame (101), the assembly frame (101) is a square frame structure, and the opening is opened on one side of the bottom of the assembly frame (101); An inner stop protrusion (102) is symmetrically arranged on the top of the inner cavity of the assembly frame (101), and the inner stop protrusion (102) and the assembly frame (101) are integrally formed. An external connecting frame (103) is disposed outside the assembly frame (101).

6. The compact, clean light trap structure for a deep ultraviolet optical system according to claim 1, characterized in that, The sealing device (200) includes: Sealing plate (201), which is fitted inside the opening; The elastic extrusion mechanism (202) is provided with a groove on the inner side of the sealing plate (201), and the elastic extrusion mechanism (202) is assembled inside the groove.

7. A compact, clean light trap structure for a deep ultraviolet optical system according to claim 6, characterized in that, The elastic compression mechanism (202) includes: An extrusion block (221) is slidably fitted inside a groove, and a gasket is connected to the surface of the extrusion block (221). A spring (222) is disposed inside the groove and is used to provide elastic support for the pressing block (221).

8. A compact, clean light trap structure for a deep ultraviolet optical system according to claim 7, characterized in that, The elastic compression mechanism (202) further includes: Guide post (223), multiple guide posts (223) are slidably inserted into the extrusion block (221), and one end of the guide post (223) is threadedly inserted into the sealing plate (201). The guide post (223) is movably sleeved with the spring (222).

9. A compact, clean light trap structure for a deep ultraviolet optical system according to claim 1, characterized in that, The bottom of the assembly assembly (100) is fitted with a heat dissipation shell (400), and the heat dissipation shell (400) covers the outside of the slot plate assembly. The heat dissipation shell (400) is made of a material with high thermal conductivity. The side wall or bottom of the heat dissipation shell (400) is provided with heat dissipation grooves to dissipate the heat generated when the optical system is working.

10. A compact, clean light trap structure for a deep ultraviolet optical system according to claim 6, characterized in that, The sealing device (200) further includes: The positioning hole (203) and the assembly hole (204) are provided. The positioning hole (203) is horizontally opened and the assembly hole (204) is vertically opened. The positioning hole (203) and the assembly hole (204) are staggered.

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