High-precision miniature X-axis and Y-axis positioning platform

Abstract

The invention discloses a high-precision miniature XY-axis positioning platform applied to the technical field of mobile platforms, an X-axis crossed roller guide rail and a Y-axis crossed roller guide rail are both arranged by adopting crossed roller guide rails, and an X-axis voice coil motor and a Y-axis voice coil motor are mounted in bilateral symmetry corresponding to the X-axis crossed roller guide rail and the Y-axis crossed roller guide rail respectively; the X-axis voice coil motor and the Y-axis voice coil motor generate force perpendicular to the magnetic field direction, the objective table and the middle plate are directly pushed to do linear motion in the X-axis direction, the objective table and the middle plate are directly pushed to do linear motion in the Y-axis direction, the load stability of the positioning platform is effectively improved, and then the positioning accuracy of the positioning platform is effectively improved; the X-axis voice coil motor and the Y-axis voice coil motor have the advantages of non-contact driving, no reverse gap and extremely high response speed, and the response speed can reach millisecond magnitude, so that the response speed and the positioning precision control capability of the positioning platform are effectively improved.

Description

Technical Field

[0001] This invention relates to the field of mobile platform technology, and in particular to a high-precision miniature XY-axis positioning platform. Background Technology

[0002] With the development of micro-nano manufacturing, precision optics, biomedicine and other fields, the demand for high-precision and compact positioning platforms is increasing. For example, Chinese patent CN114770437B discloses a small high-precision mobile platform. Although the XY-axis positioning platform can achieve a certain positioning accuracy, its structure is large and lacks compactness, so it cannot be integrated into space-constrained systems. In mobile platforms with even smaller structure, such as the ultra-high precision XY plane displacement stage disclosed in Chinese patent CN209632955U, the in-situ stability and repeatability of positioning are often difficult to meet the requirements under high-frequency micro-motion and high load conditions, which in turn affects the response speed and positioning precision of the mobile platform. Summary of the Invention

[0003] The core of this invention lies in solving the problems of stability and accuracy of positioning platforms under high-frequency micro-motion and high-load conditions in the prior art by using a symmetrical combination of a voice coil motor and a cross roller guide.

[0004] To solve the above problems, the present invention adopts the following technical solution.

[0005] A high-precision miniature XY-axis positioning platform includes a stage, a middle plate, and a base plate stacked sequentially from top to bottom. An X-axis cross roller guide and a Y-axis cross roller guide are fixedly connected to the middle of the top and bottom of the middle plate, respectively. The movable end of the X-axis cross roller guide is fixedly connected to the stage, and the movable end of the Y-axis cross roller guide is fixedly connected to the base plate. The Y-axis cross roller guide and the X-axis cross roller guide are arranged perpendicularly to each other. The bottom of the stage is equipped with X-axis voice coil motors at both ends. The two X-axis voice coil motors are symmetrically arranged about the X-axis cross roller guide rails, and the output ends of the X-axis voice coil motors are fixedly connected to the middle plate. The top of the base plate is equipped with Y-axis voice coil motors at both ends. The two Y-axis voice coil motors are symmetrically arranged about the Y-axis cross roller guide rails, and the output ends of the Y-axis voice coil motors are fixedly connected to the middle plate. A grating ruler is fixedly connected to one bottom end and one top end of the middle plate. A reading head is slidably connected to the outside of the grating ruler. The two reading heads are fixedly connected to the stage and the base plate, respectively.

[0006] Furthermore, the base plate is externally fixed with wire clamps, through which the cables of the X-axis voice coil motor, Y-axis voice coil motor, and reading head all pass.

[0007] Optionally, motor mounting slots are provided at both the top and bottom ends of the middle plate, and the X-axis voice coil motor and the Y-axis voice coil motor are slidably connected to the motor mounting slots.

[0008] Furthermore, the motor mounting slot has a connecting port at one end near the X-axis voice coil motor and the Y-axis voice coil motor body. A sealing seat is fitted inside the connecting port, and the two sets of sealing seats are fixedly connected to the stage and the base plate, respectively.

[0009] Furthermore, the center of the sealed seat is threaded with a threaded shaft, one end of which extends into the motor mounting slot and is rotatably connected to the bodies of the X-axis voice coil motor and the Y-axis voice coil motor, respectively.

[0010] Optionally, the stage and the base plate are provided with a cutout window at one end near the X-axis voice coil motor and the Y-axis voice coil motor body. The cutout window is connected to the motor mounting slot. The threaded shaft is transferred and installed in the middle of the cutout window, and both the front and rear ends of the threaded shaft are rotatably connected to the inner wall of the cutout window.

[0011] Furthermore, the external threaded connection of the threaded shaft is a synchronous push plate, and the two ends of the synchronous push plate are fixedly connected to the bodies of the two X-axis voice coil motors and the two Y-axis voice coil motors, respectively.

[0012] Compared with the prior art, the advantages of this invention are: (1) In this scheme, both the X-axis cross roller guide and the Y-axis cross roller guide are set with cross roller guides. The X-axis voice coil motor and the Y-axis voice coil motor are installed symmetrically on the left and right sides of the X-axis cross roller guide and the Y-axis cross roller guide respectively. The X-axis voice coil motor and the Y-axis voice coil motor generate a force perpendicular to the magnetic field direction, which directly pushes the stage and the middle plate to move linearly along the X-axis direction, and moves linearly along the Y-axis direction between the middle plate and the bottom plate. This effectively improves the load stability of the positioning platform, and thus effectively improves the positioning accuracy of the positioning platform. The advantages of the X-axis voice coil motor and the Y-axis voice coil motor are that they are non-contact drive, have no backlash, and have extremely fast response speed, which can reach the millisecond level, thereby effectively improving the response speed and positioning precision control capability of the positioning platform.

[0013] (2) This solution places the X-axis voice coil motor and the Y-axis voice coil motor in the motor mounting slot, which facilitates the integration of the X-axis voice coil motor and the Y-axis voice coil motor with the middle plate, thereby effectively improving the compactness between the stage, the middle plate and the base plate. The compact design allows the positioning platform to be easily integrated and installed in systems with limited space.

[0014] (3) This solution uses the threaded connection between the threaded shaft and the closed seat to adjust the length of the threaded shaft extending into the motor mounting slot, thereby pushing the X-axis voice coil motor and the Y-axis voice coil motor to adjust their positions within the motor mounting slot, adjusting the initial state of the positioning platform, effectively compensating for the problem of short extension and retraction distance of the X-axis voice coil motor and the Y-axis voice coil motor, and effectively improving the working range of the positioning platform.

[0015] (4) This solution connects the motor mounting slot through the hollow window, thereby enabling the synchronous push plate to adjust the synchronous position of the two X-axis voice coil motors and the two Y-axis voice coil motors. This effectively reduces the number of threaded shafts and the number of times the threaded shafts are adjusted, and effectively reduces the positional error between the two X-axis voice coil motors and the positional error between the two Y-axis voice coil motors, thereby effectively improving the positioning accuracy of the positioning platform. Attached Figure Description

[0016] Figure 1 This is a three-dimensional structural diagram of the first embodiment of the present invention; Figure 2 This is a top-view perspective view of the plate in the first embodiment of the present invention; Figure 3 This is a bottom-view perspective view of the plate in the first embodiment of the present invention; Figure 4 This is an overall three-dimensional structural diagram of the second embodiment of the present invention; Figure 5 This is a top-view perspective view of the plate in the second embodiment of the present invention; Figure 6 This is a three-dimensional structural diagram of the third embodiment of the present invention; Figure 7 This is a top-view perspective view of the base plate according to the third embodiment of the present invention; Figure 8 This is a top-view perspective view of the plate in the third embodiment of the present invention.

[0017] Explanation of the labels in the diagram: 101 Stage, 102 Middle Plate, 103 Base Plate, 104 X-axis Cross Roller Guide, 105 Y-axis Cross Roller Guide, 106 X-axis Voice Coil Motor, 107 Y-axis Voice Coil Motor, 108 Grating Ruler, 109 Reading Head, 110 Wire Clamp, 2 Motor Mounting Slot, 201 Connecting Port, 202 Enclosed Seat, 203 Threaded Shaft, 204 Hollow Window, 205 Synchronous Push Plate. Detailed Implementation

[0018] The technical solutions will now be clearly and completely described with reference to the accompanying drawings in the embodiments of the present invention.

[0019] First implementation method: Please see Figures 1 to 3 A high-precision miniature XY-axis positioning platform includes a stage 101, a middle plate 102, and a bottom plate 103 stacked sequentially from top to bottom. An X-axis cross roller guide 104 is fixedly connected to the top center of the middle plate 102. The movable end of the X-axis cross roller guide 104 is fixedly connected to the stage 101. X-axis voice coil motors 106 are provided at both ends of the bottom of the stage 101. The two X-axis voice coil motors 106 are symmetrically arranged about the X-axis cross roller guide 104, and the output end of the X-axis voice coil motors 106 is fixedly connected to the middle plate 102. An X-axis cross roller guide 104 and an X-axis voice coil motor 106 are arranged between the stage 101 and the middle plate 102. The X-axis cross roller guide 104 is powered by the X-axis voice coil motor 106, which directly drives the stage 101 and the middle plate 102 to move relative to each other along the X-axis. The X-axis cross roller guide 104 is used to guide the movement direction between the stage 101 and the middle plate 102, and to ensure rigidity and accuracy during the movement.

[0020] Please see Figures 1 to 3 A Y-axis cross roller guide 105 is fixedly connected to the bottom center of the middle plate 102. The movable end of the Y-axis cross roller guide 105 is fixedly connected to the bottom plate 103. The Y-axis cross roller guide 105 and the X-axis cross roller guide 104 are arranged perpendicularly. Y-axis voice coil motors 107 are provided at both ends of the top of the bottom plate 103. The two Y-axis voice coil motors 107 are symmetrically arranged about the Y-axis cross roller guide 105. The output end of the Y-axis voice coil motor 107 is fixedly connected to the middle plate 102. A Y-axis cross roller guide 105 and a Y-axis voice coil motor 107 are arranged between the middle plate 102 and the bottom plate 103. The Y-axis cross roller guide 105 is powered by the Y-axis voice coil motor 107 to directly drive the middle plate 102 and the bottom plate 103 to move relative to each other along the Y-axis. The Y-axis cross roller guide 105 is used to support the movement between the middle plate 102 and the bottom plate 103, and to guide the movement direction between the middle plate 102 and the bottom plate 103, ensuring rigidity and accuracy during the movement.

[0021] Both the X-axis crossed roller guide 104 and the Y-axis crossed roller guide 105 are set with crossed roller guides. This type of guide can simultaneously withstand radial, anti-radial, and overturning moments, providing the entire motion system with extremely high rigidity and load-bearing capacity. The X-axis voice coil motor 106 and the Y-axis voice coil motor 107 are symmetrically installed on the left and right sides, respectively, corresponding to the X-axis crossed roller guide 104 and the Y-axis crossed roller guide 105. The X-axis voice coil motor 106 and the Y-axis voice coil motor 107 generate a force perpendicular to the magnetic field direction, directly pushing the stage 101 and the middle plate 102 to move linearly in the X-axis direction, and the middle plate 102 and the base plate 103 to move linearly in the Y-axis direction. This effectively improves the load stability of the positioning platform, and thus effectively improves the positioning accuracy of the positioning platform. The advantages of the X-axis voice coil motor 106 and the Y-axis voice coil motor 107 are non-contact drive, no backlash, and extremely fast response speed, reaching the millisecond level, thereby effectively improving the response speed and positioning precision control capability of the positioning platform.

[0022] Please see Figure 2 and Figure 3 A grating ruler 108 is fixedly connected to one bottom end and one top end of the middle plate 102. A reading head 109 is slidably connected to the outside of the grating ruler 108. The two reading heads 109 are fixedly connected to the stage 101 and the base plate 103 respectively. A wire clamp 110 is fixedly connected to the outside of the base plate 103. The cables of the X-axis voice coil motor 106, the Y-axis voice coil motor 107 and the reading head 109 all pass through the wire clamp 110. When the X-axis and Y-axis movements occur between the stage 101 and the middle plate 102 and between the middle plate 102 and the base plate 103, the reading head 109 is synchronously driven to move on the grating ruler 108, thereby obtaining motion data, which facilitates the precise control of the positioning platform. The cables for the X-axis voice coil motor 106 and the Y-axis voice coil motor 107 are all uniformly led out through the cable clamp 110, making the positioning platform look neater and avoiding cable entanglement, swinging or friction with moving parts during high-speed movement. This eliminates micron-level errors caused by cable stress changes and ensures measurement accuracy and long-term reliability of movement.

[0023] Second implementation method: Compared to the first embodiment, the main additions are a connecting port 201, a sealing seat 202, and a threaded shaft 203. The specific additions are as follows, while the remaining structures are the same as in the first embodiment.

[0024] Please see Figure 4 and Figure 5The top and bottom ends of the middle plate 102 are provided with motor mounting slots 2. The X-axis voice coil motor 106 and the Y-axis voice coil motor 107 are slidably connected to the motor mounting slots 2. The motor mounting slots 2 are provided with a connecting port 201 at the end near the body of the X-axis voice coil motor 106 and the Y-axis voice coil motor 107. The connecting port 201 is fitted with a closed seat 202. The two sets of closed seats 202 are fixedly connected to the stage 101 and the bottom plate 103 respectively. The middle part of the closed seat 202 is threaded with a threaded shaft 203. The end of the threaded shaft 203 that extends into the motor mounting slot 2 is rotatably connected to the body of the X-axis voice coil motor 106 and the Y-axis voice coil motor 107 respectively. The X-axis voice coil motor 106 and the Y-axis voice coil motor 107 are installed in the motor mounting slot 2, which facilitates the integration of the X-axis voice coil motor 106 and the Y-axis voice coil motor 107 with the middle plate 102, thereby effectively improving the compactness between the stage 101, the middle plate 102 and the base plate 103. The compact design allows the positioning platform to be easily integrated and installed in space-constrained systems. Compared to the first implementation method, when preparing the positioning platform, by rotating the threaded shaft 203 and utilizing the threaded connection between the threaded shaft 203 and the closed seat 202, the length of the threaded shaft 203 extending into the motor mounting slot 2 is adjusted, thereby driving the X-axis voice coil motor 106 and the Y-axis voice coil motor 107 to adjust their positions within the motor mounting slot 2. This adjusts the initial state of the positioning platform, namely the initial relative state between the stage 101, the middle plate 102, and the base plate 103, effectively compensating for the short extension and retraction range of the X-axis voice coil motor 106 and the Y-axis voice coil motor 107, and effectively improving the working range of the positioning platform.

[0025] The third implementation method: Compared to the second embodiment, the main addition is a perforated window 204, and the threaded shaft 203, which was originally installed on the closed seat 202, is moved to the middle of the perforated window 204. The rest of the structure is the same as the second embodiment. The specific additions are as follows.

[0026] Please see Figures 6 to 8 The stage 101 and the base plate 103 are both provided with a hollow window 204 at one end near the X-axis voice coil motor 106 and the Y-axis voice coil motor 107. The hollow window 204 is connected to the motor mounting slot 2. The threaded shaft 203 is transferred and installed in the middle of the hollow window 204, and both the front and rear ends of the threaded shaft 203 are rotatably connected to the inner wall of the hollow window 204. The threaded shaft 203 is connected to a synchronous push plate 205 by a thread on its outer side. The two ends of the synchronous push plate 205 are fixedly connected to the bodies of the two X-axis voice coil motors 106 and the two Y-axis voice coil motors 107, respectively. Compared to the second implementation method, the two motor mounting slots 2 for arranging the X-axis voice coil motor 106 and the two motor mounting slots 2 for arranging the Y-axis voice coil motor 107 are connected through the hollow window 204. This allows the synchronous push plate 205 to connect the two X-axis voice coil motors 106 and the two Y-axis voice coil motors 107 into one unit. Furthermore, by rotating the threaded shaft 203 and utilizing the threaded connection between the threaded shaft 203 and the synchronous push plate 205, the synchronous position adjustment of the two X-axis voice coil motors 106 and the two Y-axis voice coil motors 107 is achieved. Compared to the second implementation method, this method effectively reduces the number of threaded shafts 203 and the number of times the threaded shafts 203 are adjusted, and effectively reduces the positional error between the two X-axis voice coil motors 106 and the two Y-axis voice coil motors 107, thereby effectively improving the positioning accuracy of the positioning platform.

[0027] The above are merely preferred embodiments of the present invention; they encompass all the protection scope of the present invention. Any equivalent substitutions or modifications made by those skilled in the art within the technical scope disclosed in the present invention, based on the technical solutions and improved concepts of the present invention, should be covered within the protection scope of the present invention.

Claims

1. A high-precision miniature XY-axis positioning platform, comprising a stage (101), a middle plate (102), and a base plate (103) stacked sequentially from top to bottom, characterized in that: The middle part of the top and bottom of the middle plate (102) are respectively fixedly connected to an X-axis cross roller guide (104) and a Y-axis cross roller guide (105). The movable end of the X-axis cross roller guide (104) is fixedly connected to the stage (101), and the movable end of the Y-axis cross roller guide (105) is fixedly connected to the bottom plate (103). The Y-axis cross roller guide (105) and the X-axis cross roller guide (104) are arranged perpendicularly to each other. The bottom ends of the stage (101) are provided with X-axis voice coil motors (106). The two X-axis voice coil motors (106) are symmetrically arranged about the X-axis cross roller guide (104), and the output ends of the X-axis voice coil motors (106) are fixedly connected to the middle plate (102). The top ends of the bottom plate (103) are provided with Y-axis voice coil motors (107). The two Y-axis voice coil motors (107) are symmetrically arranged about the Y-axis cross roller guide (105), and the output ends of the Y-axis voice coil motors (107) are fixedly connected to the middle plate (102). A grating ruler (108) is fixedly connected to one bottom end and one top end of the middle plate (102). A reading head (109) is slidably connected to the outside of the grating ruler (108). The two reading heads (109) are fixedly connected to the stage (101) and the base plate (103) respectively.

2. A high-precision miniature XY-axis positioning platform according to claim 1, characterized in that: The base plate (103) is externally fixedly connected to a wire clamp (110), and the cables of the X-axis voice coil motor (106), Y-axis voice coil motor (107) and reading head (109) all pass through the wire clamp (110).

3. A high-precision miniature XY-axis positioning platform according to claim 1, characterized in that: The middle plate (102) has motor mounting slots (2) at both the top and bottom ends, and the X-axis voice coil motor (106) and Y-axis voice coil motor (107) are slidably connected to the motor mounting slots (2).

4. A high-precision miniature XY-axis positioning platform according to claim 3, characterized in that: The motor mounting slot (2) has a communication port (201) at one end near the X-axis voice coil motor (106) and Y-axis voice coil motor (107). The communication port (201) is fitted with a sealing seat (202). The two sets of sealing seats (202) are fixedly connected to the stage (101) and the base plate (103) respectively.

5. A high-precision miniature XY-axis positioning platform according to claim 4, characterized in that: The closed seat (202) has a threaded shaft (203) threadedly connected to the middle part. One end of the threaded shaft (203) extends into the motor mounting groove (2) and is rotatably connected to the body of the X-axis voice coil motor (106) and the Y-axis voice coil motor (107).

6. A high-precision miniature XY-axis positioning platform according to claim 5, characterized in that: The stage (101) and the base plate (103) are each provided with a hollow window (204) at one end near the X-axis voice coil motor (106) and the Y-axis voice coil motor (107). The hollow window (204) is connected to the motor mounting slot (2). The threaded shaft (203) is transferred and installed in the middle of the hollow window (204), and both the front and rear ends of the threaded shaft (203) are rotatably connected to the inner wall of the hollow window (204).

7. A high-precision miniature XY-axis positioning platform according to claim 6, characterized in that: The threaded shaft (203) is externally threaded with a synchronous push plate (205), and the two ends of the synchronous push plate (205) are fixedly connected to the bodies of two X-axis voice coil motors (106) and two Y-axis voice coil motors (107), respectively.

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