Reflection type hydraulic zoom lens and working method thereof

Abstract

The invention discloses a reflection-type hydraulic zoom lens and a working method thereof. The reflection-type hydraulic zoom lens comprises a fixed flat plate, the top surface of which is provided with a small air flotation vibration isolation table; the reflecting mirror unit comprises a packaging shell and a reflecting mirror body, a groove structure is arranged on the back face of the reflecting mirror body, and the packaging shell is installed at the top of the small air floating vibration isolation table; the pressure control mechanism is mounted on the side surface of the packaging shell; the heat dissipation system is mounted on the fixed flat plate; the monitoring unit is installed in the packaging shell, and the monitoring unit is connected with the control terminal; wherein sealing elements are respectively arranged between the reflector main body and the packaging shell and between the pressure control mechanism and the packaging shell. The invention is suitable for high-precision optical imaging, laser processing, adaptive optical systems and other scenes with high requirements on zoom performance and stability, and has a wide application range.

Description

Technical Field

[0001] This invention relates to the field of high-power laser technology, and in particular to a reflective hydraulic zoom mirror and its working method. Background Technology

[0002] With the widespread use of lasers in long-distance and high-power applications (such as laser processing, ranging, and photoelectric detection), laser systems are placing higher demands on the focusing accuracy, response speed, and stability of zoom devices. However, as laser power and working distance continue to increase, traditional focusing methods are gradually showing their limitations and are unable to meet the needs of high-end laser systems for fast, precise, and stable focusing.

[0003] Current mainstream solutions mostly employ mechanical focusing, which changes the focal length by shifting the overall position of the lens or mirror. While simple to implement, this method has significant drawbacks: firstly, it relies on a long-stroke transmission structure, resulting in a bulky system with numerous components, hindering miniaturization and weight reduction; secondly, mechanical transmissions have inertia, leading to slow focusing response times, typically requiring hundreds of milliseconds, making it unsuitable for applications requiring rapid zooming. Furthermore, during long-term operation, transmission components are prone to wear and tear, causing a decrease in focusing accuracy over time. Under high-power laser light, the mechanical structure is also susceptible to thermal deformation, further exacerbating focal length drift and affecting system stability.

[0004] To address the aforementioned technical issues, this invention provides a reflective hydraulic zoom lens and its operating method. Summary of the Invention

[0005] The purpose of this invention is to provide a reflective hydraulic zoom lens and its working method to solve the problems existing in the prior art.

[0006] To achieve the above objectives, the present invention provides the following solution: The present invention provides a reflective hydraulic zoom lens, comprising: A fixed plate, wherein a small air-floating vibration isolation table is installed on the top surface of the fixed plate; A reflector unit, comprising a housing and a reflector body, wherein the reflector body is detachably mounted on the top of the housing, and a closed hydraulic cavity is formed between the reflector body and the housing, the hydraulic cavity being filled with a fluid medium, and a groove structure is provided on the back of the reflector body, and the housing is mounted on the top of the small air-bearing vibration isolation table. A pressure control mechanism is mounted on the side of the encapsulation housing, and the working end of the pressure control mechanism extends into the encapsulation housing; A heat dissipation system, which is mounted on the fixed plate; A monitoring unit is installed inside the encapsulation housing to monitor the temperature and pressure values ​​of the fluid medium, and the monitoring unit is connected to a control terminal; Sealing elements are provided between the reflector body and the encapsulation housing, and between the pressure control mechanism and the encapsulation housing.

[0007] According to the reflective hydraulic zoom lens provided by the present invention, the pressure control mechanism includes an electric cylinder and a plunger. The electric cylinder is fixed on the top surface of the fixed plate, and the plunger is fixed at the output end of the electric cylinder. A sleeve is vertically fixed to the outer wall of the encapsulation housing. The plunger is inserted into the sleeve, and one end of the plunger extends through the outer wall of the encapsulation housing into the hydraulic cavity. A sealing element is provided between the sleeve and the plunger.

[0008] According to the reflective hydraulic zoom lens provided by the present invention, the heat dissipation system includes a fan and heat dissipation fins. The heat dissipation fins are installed on the outer wall of the encapsulation housing. Two sets of fans are provided, and the two sets of fans are symmetrically installed on the top surface of the fixed plate and arranged corresponding to the heat dissipation fins.

[0009] According to the reflective hydraulic zoom lens provided by the present invention, the monitoring unit includes a pressure sensor and a temperature sensor. The pressure sensor is installed at the end of the plunger, and several sets of temperature sensors are installed on the inner wall of the encapsulation housing.

[0010] According to the reflective hydraulic zoom mirror provided by the present invention, the substrate of the reflector body is made of high-purity metal material, and its upper surface is processed into a parametric curved surface with a surface shape accuracy of less than λ / 10 at the working wavelength. A multilayer dielectric high-reflectivity film is deposited on its upper surface. The high-reflectivity film is a multilayer dielectric stack structure formed by alternating deposition of high-refractive-index material layers and low-refractive-index material layers. The high-refractive-index material is preferably hafnium dioxide, tantalum oxide, or titanium oxide, and the low-refractive-index material is preferably silicon dioxide or aluminum oxide, so as to achieve high reflectivity and high laser damage threshold.

[0011] According to the reflective hydraulic zoom lens provided by the present invention, the fluid medium is a fluid material having a low coefficient of thermal expansion and high thermal conductivity, including liquid or gas.

[0012] According to the reflective hydraulic zoom lens provided by the present invention, the groove structure includes a radial groove, a concentric ring groove and an elliptical groove. The radial groove and the concentric ring groove are coaxially arranged on the back of the reflective mirror body. Several sets of elliptical grooves are provided, and several sets of elliptical grooves are respectively provided on the radial groove and the concentric ring groove.

[0013] According to the reflective hydraulic zoom lens provided by the present invention, the sealing element adopts a combination structure of a metal sealing ring and a polymer elastomer O-ring.

[0014] According to the reflective hydraulic zoom lens provided by the present invention, the bottom array of the fixed plate is equipped with several sets of high-damping foot pads.

[0015] A method for operating a reflective hydraulic zoom lens includes the following steps: S1. The reflector body is detachably installed on the top of the encapsulation housing, ensuring that the seal between the reflector body and the encapsulation housing is installed in place to form a closed hydraulic cavity; the hydraulic cavity is filled with a fluid medium of a preset specification, and the reliability of the seal assembly at the connection between the pressure control mechanism and the encapsulation housing is checked to ensure no leakage under high pressure; the encapsulation housing is fixedly installed on a small air-bearing vibration isolation platform on the top surface of the fixed plate to complete the overall structure assembly. S2, start the control terminal to synchronously power on and initialize the monitoring unit, pressure control mechanism, and heat dissipation system; the monitoring unit immediately collects the initial temperature and initial pressure values ​​of the fluid medium in the hydraulic cavity and transmits the data to the control terminal in real time. The control terminal records the initial parameters as the reference value for subsequent adjustments. S3, the control terminal sends a start command to the heat dissipation system, the heat dissipation system starts to run, dissipates heat on the reflector unit and surrounding area, so that the temperature of the fluid medium quickly stabilizes, provides a constant temperature environment for focus adjustment, and avoids temperature fluctuations from affecting the focus accuracy. S4. The target focusing distance is input through the control terminal. The control terminal calculates the hydraulic cavity target pressure parameters required to achieve the target focal length based on the pre-stored target focusing distance, temperature and pressure mapping relationship and the temperature data currently collected by the monitoring unit. S5, the control terminal sends a drive command to the pressure control mechanism. The working end of the pressure control mechanism extends into the encapsulation housing. By precisely adjusting the volume of the hydraulic cavity, the pressure of the fluid medium in the cavity is changed. This pressure is applied evenly to the back of the reflector body. Under the pressure drive, the reflector body generates controlled elastic deformation through the groove structure on the back, thereby changing its own radius of curvature and ultimately achieving precise adjustment of the target focal length. S6, the monitoring unit continuously collects the real-time temperature and pressure values ​​of the fluid medium in the hydraulic cavity and feeds them back to the control terminal in real time; the control terminal compares the real-time parameters with the target parameters, and if there is a deviation, it immediately sends a fine-tuning command to the pressure control mechanism to correct the pressure deviation in the hydraulic cavity, ensuring that the deformation of the reflector body is stable and the focal length is maintained at the target value; during this period, the seals continuously ensure the sealing performance of the connection between the hydraulic cavity and the pressure control mechanism to avoid pressure loss leading to focusing failure; S7. After the focusing task is completed, a stop command is issued through the control terminal. The pressure control mechanism drives the hydraulic chamber pressure to return to the initial reference value recorded in S2, and the elastic deformation of the reflector body is reset. The heat dissipation system continues to run for a preset time and automatically shuts down after the reflector unit temperature drops to the ambient temperature. The monitoring unit stops data acquisition, and the system as a whole returns to its initial state.

[0016] The present invention discloses the following technical effects: The reflector body and the encapsulation shell form a closed hydraulic cavity, which, together with the pressure control mechanism, acts directly on the fluid medium. By precisely adjusting the pressure inside the cavity, the reflector body can be driven to produce controllable deformation based on the groove structure on the back, thus achieving continuous and stable zoom adjustment. The monitoring unit collects the temperature and pressure data of the fluid medium in real time and feeds it back to the control terminal, forming a closed-loop control. This effectively compensates for the impact of temperature drift and pressure fluctuations on zoom accuracy, ensuring the consistency and accuracy of the zoom process.

[0017] The small air-floating vibration isolation table with a fixed plate top surface can effectively isolate external vibration interference, avoid vibration causing the reflector body to shift or the hydraulic cavity pressure to fluctuate, and ensure the stable operation of the zoom lens under complex working conditions; the heat dissipation system can timely regulate the device's operating temperature, prevent the fluid medium from becoming abnormally viscous due to temperature changes, and at the same time prevent the reflector body from deforming due to thermal expansion and contraction, further improving the device's adaptability to different temperature environments.

[0018] The sealing design between the reflector body and the encapsulation housing, and between the pressure control mechanism and the encapsulation housing, ensures the sealing performance of the hydraulic cavity, prevents fluid leakage, and extends the service life of the hydraulic system. The reflector body adopts a detachable installation method, which facilitates the cleaning, calibration, or replacement of the reflector body in the future, reducing maintenance costs. The pressure control mechanism is installed on the side of the encapsulation housing and its working end extends directly into the cavity, shortening the pressure transmission path, improving the response speed of pressure regulation, and simplifying the structural layout to reduce assembly errors.

[0019] The device integrates multiple modules such as zoom adjustment, vibration isolation, temperature / pressure monitoring, and heat dissipation, requiring no additional auxiliary equipment. It has a compact structure and high integration. Compared with traditional mechanical zoom structures, the hydraulic drive method has the characteristics of no mechanical friction and less wear, which can reduce the failure rate of the device and extend its overall service life. It is suitable for high-precision optical imaging, laser processing, adaptive optics systems and other scenarios with high requirements for zoom performance and stability, and has a wide range of applications. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 This is a schematic diagram of the main structure of the reflective hydraulic zoom lens of the present invention; Figure 2 This is a schematic diagram of the groove structure on the back of the reflector unit of the reflective hydraulic zoom mirror of the present invention; Figure 3 This is a cross-sectional structural schematic diagram of the reflective hydraulic zoom mirror of the present invention; Figure 4 This is a schematic diagram of the overall structure of the reflective hydraulic zoom mirror of the present invention; Figure 5 This is a schematic diagram of the optical path of the reflective hydraulic zoom lens of the present invention.

[0022] The components include: 1. Reflector unit; 2. Encapsulation housing; 3. Control mechanism; 4. Plunger; 5. Groove structure; 6. Seal; 7. Monitoring unit; 8. Hydraulic cavity; 9. High-damping foot pad; 10. Fixed plate; 11. Electric cylinder; 12. Small air-float vibration isolation table; 13. Reflector body; 14. Fan; 15. Heat dissipation fins. Detailed Implementation

[0023] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0024] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0025] Reference Figures 1-5 The present invention provides a reflective hydraulic zoom lens, comprising: A fixed plate 10 is provided, and a small air-bearing vibration isolation table 12 is installed on the top surface of the fixed plate 10. The reflector unit 1 includes a housing 2 and a reflector body 13. The reflector body 13 is detachably installed on the top of the housing 2, and a closed hydraulic cavity 8 is formed between the reflector body 13 and the housing 2. The hydraulic cavity 8 is filled with a fluid medium. A groove structure 5 is provided on the back of the reflector body 13. The housing 2 is installed on the top of the small air-bearing vibration isolation table 12. Pressure control mechanism 3 is installed on the side of the packaging housing 2, and the working end of pressure control mechanism 3 extends into the packaging housing 2. The heat dissipation system is installed on the fixed plate 10; Monitoring unit 7 is installed inside the encapsulation housing 2 and is used to monitor the temperature and pressure values ​​of the fluid medium. Monitoring unit 7 is connected to the control terminal. Among them, a sealing element 6 is provided between the reflector body 13 and the encapsulation shell 2, and between the pressure control mechanism 3 and the encapsulation shell 2.

[0026] The scheme is further optimized. The pressure control mechanism 3 includes an electric cylinder and a plunger 4. The electric cylinder is fixed on the top surface of the fixed plate 10, and the plunger 4 is fixed on the output end of the electric cylinder. A sleeve is vertically fixed to the outer wall of the encapsulation housing 2. The plunger 4 is inserted into the sleeve. One end of the plunger 4 passes through the outer wall of the encapsulation housing 2 and extends into the hydraulic cavity 8. A seal 6 is provided between the sleeve and the plunger 4.

[0027] The electric cylinder is connected to an 8mm diameter zirconia ceramic plunger 4 via a flexible coupling to further reduce vibration coupling. The minimum displacement resolution of the electric cylinder is approximately 0.1μm, corresponding to a volume adjustment accuracy of approximately 0.005mm for the hydraulic chamber 8. 3 It can form a stable and controllable hydraulic field within the range of 0 to 5 MPa, meeting the needs of precise focus adjustment.

[0028] Further optimization of the solution: the heat dissipation system includes a fan 14 and heat dissipation fins 15. The heat dissipation fins 15 are installed on the outer wall of the encapsulation housing 2. Two sets of fans 14 are provided, and the two sets of fans 14 are symmetrically installed on the top surface of the fixed plate 10 and arranged corresponding to the heat dissipation fins 15.

[0029] The two side fans 14 symmetrically press the outside cold air into the heat exchange channel formed by the fins. The airflow flows directionally along the fins and carries away the heat of the reflector unit 1 and the hydraulic cavity 8. Then it is discharged through the air outlet of the outer shell, forming a forced convection heat dissipation path with symmetrical air supply on both sides, thereby reducing the lateral temperature difference and improving the temperature field uniformity.

[0030] Further optimization of the scheme: the monitoring unit 7 includes a pressure sensor and a temperature sensor. The pressure sensor is installed at the end of the plunger 4, and several sets of temperature sensors are installed on the inner wall of the encapsulation housing 2.

[0031] Further optimizing the scheme, the substrate of the reflector body 13 is made of high-purity metal material, and its upper surface is processed into a parametric curved surface with a surface shape accuracy of less than λ / 10 at the working wavelength. A multilayer dielectric high-reflectivity film is deposited on its upper surface. The high-reflectivity film is a multilayer dielectric stack structure formed by alternating deposition of high-refractive-index material layers and low-refractive-index material layers. The high-refractive-index material is preferably hafnium dioxide, tantalum oxide or titanium oxide, and the low-refractive-index material is preferably silicon dioxide or aluminum oxide, so as to achieve high reflectivity and high laser damage threshold.

[0032] The reflector substrate is made of high-purity oxygen-free copper (purity ≥99.99%) with a thickness of 3mm and a diameter of 70mm. It is machined using single-point diamond turning or other ultra-precision machining methods to form a target parametric surface, with the surface roughness Ra controlled within 5nm. The surface shape accuracy is measured by interferometer as PV < λ / 10 (λ = 1064nm). A 20-layer high-reflectivity dielectric film composed of alternating SiO2 and HfO2 is deposited on the mirror surface using ion beam-assisted magnetron sputtering, with each layer thickness controlled within ±2nm. The total reflectivity of the film is ≥99.5%, and the laser damage threshold is >10kW / cm². 2 It can maintain optical stability under high-power laser irradiation conditions.

[0033] Figure 1 In the diagram, F0 is the initial focus; F1 is the focus after zooming; and F2 is the focus after zooming again.

[0034] The further optimized scheme uses a fluid medium that has a low coefficient of thermal expansion and high thermal conductivity, including liquids or gases.

[0035] The hydraulic chamber 8 is filled with high-stability silicone oil of type DC-200, with a dynamic viscosity of approximately 100 cSt and a thermal conductivity of approximately 0.16 W / m·K. This provides both pressure transmission and helps reduce the temperature gradient on the back of the mirror. A sealing groove with a width of 0.6 mm and a depth of 0.4 mm is provided at the edge of the chamber. A composite seal is formed by a perfluoroether rubber O-ring (Φ3.5 mm) and a metal C-ring embedded in the sealing groove. Helium mass spectrometry leak detection showed a leakage rate of less than 1 × 10⁻⁶ after 100 cycles under pressure of 0–5 MPa. -9 Pa·m 3 / s, with reliable sealing performance.

[0036] Further optimization of the scheme: the groove structure 5 includes a radial groove, a concentric ring groove and an elliptical groove. The radial groove and the concentric ring groove are arranged coaxially on the back of the reflector body 13. Several sets of elliptical grooves are provided, and the several sets of elliptical grooves are respectively provided on the radial groove and the concentric ring groove.

[0037] Twelve radial grooves (0.8 mm wide, 0.2 mm deep) are machined on the back of the mirror, and four concentric annular grooves (0.5 mm wide, 0.15 mm deep) are superimposed on them, with a groove spacing of approximately 5 mm. The grooves are machined using ultrasonic milling.

[0038] The groove structure 5 was simulated using ABAQUS finite element software, with the boundary conditions being a fixed perimeter and a loading pressure of 0–5 MPa. The results show that the RMS deviation of the mirror deformation is less than 0.3 μm, and the focal length position deviation does not exceed ±15 μm, representing an improvement of approximately 40% compared to the grooveless structure 5.

[0039] After fabricating the prototype, the wavefront error was detected using a ZYGO interferometer. The results showed λ / 13 and λ / 12 at focal lengths of 200m and 300m, respectively, which is superior to the λ / 8 level of the ungrooved mirror. Laser focusing experiments demonstrated that the spot diameter was controlled within 3cm, and the energy concentration was higher than 90%.

[0040] This embodiment demonstrates the effectiveness of the groove structure 5 in improving the linearity of mirror deformation, enhancing focusing accuracy, and reducing drive energy consumption.

[0041] The design was further optimized by adopting a combination structure of a metal sealing ring and a polymer elastomer O-ring for the sealing component 6.

[0042] To further optimize the design, several sets of high-damping foot pads 9 are installed in the bottom array of the fixed plate.

[0043] A method for operating a reflective hydraulic zoom lens includes the following steps: S1, the reflector body 13 is detachably installed on the top of the encapsulation housing 2, ensuring that the seal 6 between the reflector body 13 and the encapsulation housing 2 is installed in place, forming a closed hydraulic cavity 8; the hydraulic cavity 8 is filled with a fluid medium of a preset specification, and the assembly reliability of the seal 6 at the connection between the pressure control mechanism 3 and the encapsulation housing 2 is checked to ensure no leakage under high pressure; the encapsulation housing 2 is fixedly installed on the small air-floating vibration isolation table 12 on the top surface of the fixed plate 10 to complete the overall structure assembly; S2, start the control terminal to synchronously power on and initialize the monitoring unit 7, pressure control mechanism 3, and heat dissipation system; the monitoring unit 7 immediately collects the initial temperature and initial pressure values ​​of the fluid medium in the hydraulic cavity 8 and transmits the data to the control terminal in real time. The control terminal records the initial parameters as the reference value for subsequent adjustment. S3, the control terminal sends a start command to the heat dissipation system, the heat dissipation system starts to run, dissipates heat on the reflector unit 1 and the surrounding area, so that the temperature of the fluid medium quickly stabilizes, provides a constant temperature environment for focus adjustment, and avoids temperature fluctuations from affecting the focus accuracy. S4, by inputting the target focusing distance through the control terminal, the control terminal calculates the target pressure parameters of the hydraulic cavity 8 required to achieve the target focal length based on the pre-stored target focusing distance, temperature and pressure mapping relationship and the temperature data currently collected by the monitoring unit 7. S5, the control terminal sends a drive command to the pressure control mechanism 3. The working end of the pressure control mechanism 3 extends into the encapsulation housing 2. By precisely adjusting the volume of the hydraulic cavity 8, the pressure of the fluid medium in the cavity is changed. This pressure is uniformly applied to the back of the reflector body 13. Under the pressure drive, the reflector body 13 is guided by the back groove structure 5 to generate controlled elastic deformation, thereby changing its own radius of curvature and finally achieving precise adjustment of the target focal length. S6, the monitoring unit 7 continuously collects the real-time temperature and pressure values ​​of the fluid medium in the hydraulic cavity 8 and feeds them back to the control terminal in real time; the control terminal compares the real-time parameters with the target parameters, and if there is a deviation, it immediately sends a fine-tuning command to the pressure control mechanism 3 to correct the pressure compensation deviation in the hydraulic cavity 8, ensuring that the deformation of the reflector body 13 is stable and the focal length is maintained at the target value; during this period, the sealing component 6 continuously ensures the sealing performance of the connection between the hydraulic cavity 8 and the pressure control mechanism 3 to avoid pressure loss leading to focusing failure; S7. After the focusing task is completed, a stop command is issued through the control terminal. The pressure control mechanism 3 drives the hydraulic chamber 8 to restore the pressure to the initial reference value recorded in S2, and the reflector body 13 elastically deforms and resets. The heat dissipation system continues to run for a preset time and automatically shuts down after the temperature of the reflector unit 1 drops to the ambient temperature. The monitoring unit 7 stops data acquisition, and the system as a whole returns to the initial state.

[0044] An STM32F4 series microcontroller is used as the control unit, and its ADC module samples the sensor signals. The system is equipped with a pressure sensor (range 0~5MPa, accuracy ±0.01MPa) and a PT1000 temperature sensor (accuracy ±0.1℃). The temperature sensor is used to collect the initial power-on temperature T0 to correct the initial pressure reference. The device has an attitude mode selection button for manually switching between three preset attitude modes: horizontal, +45°, and -45°. A laser tracker is used to measure the focusing position for calibration and verification.

[0045] Optical-mechanical coupling calculations were performed using COMSOL multiphysics simulation to obtain the data relationships between plunger 4 displacement, pressure, mirror curvature, and focusing distance. A mapping database incorporating temperature and attitude dimensions was established based on typical operating condition experiments and calibration. The database records static pressure reference values ​​under different temperatures and attitudes to compensate for the influence of external environmental changes on the initial pressure data. After system power-on, initialization is performed first: the ambient temperature T0 and the selected attitude mode are read, static pressure P0 is acquired, and zero-point calibration is completed. Then, the database is called in real-time to interpolate and calculate the target driving quantity, and sensor feedback is used to correct the target displacement of plunger 4 to compensate for thermal expansion and contraction, attitude changes, and mechanical errors. The control system employs a PID+feedforward compensation algorithm. Upon power-up, the system first performs initialization: reading ambient temperature T0 and attitude information, acquiring static pressure P0, and completing zero-point calibration. After entering the focusing stage, the control unit queries the database based on the target focusing distance to obtain the target displacement or target pressure, and drives the electric cylinder for fine-tuning under closed-loop feedback. After experimental tuning, the displacement control accuracy of piston 4 is better than ±0.5μm, and the focusing position adjustment accuracy is better than ±20μm. Combined with temperature and attitude mode compensation, the focusing error can be controlled within ±15μm under typical operating conditions, and the response time does not exceed 100ms under typical operating conditions.

[0046] Within an ambient temperature range of 25–45℃, and under horizontal and +45° and -45° tilted orientations, the focusing error can be controlled within ±15μm after 4 hours of continuous operation. This effectively offsets non-command pressure fluctuations caused by liquid thermal expansion, differences in tilted orientation conditions, and mechanical transmission deviations.

[0047] In the description of this invention, it should be understood that the terms "longitudinal", "lateral", "up", "down", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this invention, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention.

[0048] The embodiments described above are merely preferred embodiments of the present invention and are not intended to limit the scope of the present invention. Various modifications and improvements made by those skilled in the art to the technical solutions of the present invention without departing from the spirit of the present invention should fall within the protection scope defined by the claims of the present invention.

Claims

1. A reflective hydraulic zoom lens, characterized in that, include: A fixed plate (10) is provided, and a small air-floating vibration isolation table (12) is installed on the top surface of the fixed plate (10). The reflector unit (1) includes a housing (2) and a reflector body (13). The reflector body (13) is detachably installed on the top of the housing (2), and a closed hydraulic cavity (8) is formed between the reflector body (13) and the housing (2). The hydraulic cavity (8) is filled with a fluid medium. A groove structure (5) is provided on the back of the reflector body (13). The housing (2) is installed on the top of the small air-bearing vibration isolation table (12). Pressure control mechanism (3), the pressure control mechanism (3) is installed on the side of the encapsulation housing (2), and the working end of the pressure control mechanism (3) extends into the encapsulation housing (2); A heat dissipation system is installed on the fixed plate (10); The monitoring unit (7) is installed inside the encapsulation housing (2) and is used to monitor the temperature and pressure values ​​of the fluid medium. The monitoring unit (7) is connected to the control terminal. Among them, a sealing element (6) is provided between the reflector body (13) and the encapsulation shell (2), and between the pressure control mechanism (3) and the encapsulation shell (2).

2. The reflective hydraulic zoom lens according to claim 1, characterized in that, The pressure control mechanism (3) includes an electric cylinder and a plunger (4). The electric cylinder is fixed on the top surface of the fixed plate (10), and the plunger (4) is fixed at the output end of the electric cylinder. A sleeve is vertically fixed to the outer wall of the encapsulation housing (2). The plunger (4) is inserted into the sleeve. One end of the plunger (4) passes through the outer wall of the encapsulation housing (2) and extends into the hydraulic cavity (8). The sealing element (6) is provided between the sleeve and the plunger (4).

3. A reflective hydraulic zoom lens according to claim 1, characterized in that, The heat dissipation system includes a fan (14) and heat dissipation fins (15). The heat dissipation fins (15) are installed on the outer wall of the encapsulation housing (2). There are two sets of fans (14). The two sets of fans (14) are symmetrically installed on the top surface of the fixed plate (10) and are arranged corresponding to the heat dissipation fins (15).

4. A reflective hydraulic zoom lens according to claim 2, characterized in that, The monitoring unit (7) includes a pressure sensor and a temperature sensor. The pressure sensor is installed at the end of the plunger (4), and several sets of temperature sensors are installed on the inner wall of the encapsulation housing (2).

5. A reflective hydraulic zoom lens according to claim 1, characterized in that, The substrate of the reflector body (13) is made of high-purity metal material, and its upper surface is processed into a parametric curved surface with a surface shape accuracy of less than λ / 10 at the working wavelength. A multilayer dielectric high-reflectivity film is deposited on its upper surface. The high-reflectivity film is a multilayer dielectric stack structure formed by alternating deposition of high-refractive-index material layers and low-refractive-index material layers. The high-refractive-index material is preferably hafnium dioxide, tantalum oxide or titanium oxide, and the low-refractive-index material is preferably silicon dioxide or aluminum oxide, so as to achieve high reflectivity and high laser damage threshold.

6. A reflective hydraulic zoom lens according to claim 1, characterized in that, The fluid medium is a fluid material with a low coefficient of thermal expansion and high thermal conductivity, including liquids or gases.

7. A reflective hydraulic zoom lens according to claim 1, characterized in that, The groove structure (5) includes a radial groove, a concentric ring groove and an elliptical groove. The radial groove and the concentric ring groove are arranged coaxially on the back of the reflector body (13). The elliptical groove is provided in several groups, and the several groups of elliptical grooves are respectively provided on the radial groove and the concentric ring groove.

8. A reflective hydraulic zoom lens according to claim 1, characterized in that, The sealing element (6) adopts a combination structure of a metal sealing ring and a polymer elastomer O-ring.

9. A reflective hydraulic zoom lens according to claim 1, characterized in that, The bottom array of the fixed plate is equipped with several sets of high-damping foot pads (9).

10. A method for operating a reflective hydraulic zoom lens, based on the reflective hydraulic zoom lens according to any one of claims 1-9, characterized in that, Includes the following steps: S1, the reflector body (13) is detachably installed on the top of the encapsulation housing (2), ensuring that the seal (6) between the reflector body (13) and the encapsulation housing (2) is installed in place, forming a closed hydraulic cavity (8); the hydraulic cavity (8) is filled with a fluid medium of a preset specification, and the assembly reliability of the seal (6) at the connection between the pressure control mechanism (3) and the encapsulation housing (2) is checked to ensure that there is no leakage under high pressure; the encapsulation housing (2) is fixedly installed on the small air-floating vibration isolation table (12) on the top surface of the fixed plate (10) to complete the overall structure assembly; S2, start the control terminal to power on and initialize the monitoring unit (7), pressure control mechanism (3) and heat dissipation system simultaneously; the monitoring unit (7) immediately collects the initial temperature and initial pressure values ​​of the fluid medium in the hydraulic cavity (8) and transmits the data to the control terminal in real time. The control terminal records the initial parameters as the reference value for subsequent adjustment. S3, the control terminal sends a start command to the heat dissipation system, the heat dissipation system starts to run, and dissipates heat on the reflector unit (1) and the surrounding area, so that the temperature of the fluid medium quickly stabilizes, providing a constant temperature environment for focus adjustment, and avoiding temperature fluctuations from affecting the focus accuracy; S4, by inputting the target focusing distance through the control terminal, the control terminal calculates the target pressure parameters of the hydraulic cavity (8) required to achieve the target focal length based on the pre-stored target focusing distance, temperature and pressure mapping relationship and the temperature data currently collected by the monitoring unit (7); S5, the control terminal sends a drive command to the pressure control mechanism (3), the working end of the pressure control mechanism (3) extends into the encapsulation housing (2), and changes the pressure of the fluid medium in the cavity by precisely adjusting the volume of the hydraulic cavity (8); the pressure is uniformly applied to the back of the reflector body (13), and the reflector body (13) under pressure drive generates controlled elastic deformation through the back groove structure (5), thereby changing its own radius of curvature, and finally achieving precise adjustment of the target focal length; S6, the monitoring unit (7) continuously collects the real-time temperature and pressure values ​​of the fluid medium in the hydraulic cavity (8) and feeds them back to the control terminal in real time; the control terminal compares the real-time parameters with the target parameters, and if there is a deviation, it immediately sends a fine-tuning command to the pressure control mechanism (3) to correct the pressure compensation deviation of the hydraulic cavity (8) to ensure that the deformation of the reflector body (13) is stable and the focal length is maintained at the target value; during this period, the sealing component (6) continuously ensures the sealing performance of the connection between the hydraulic cavity (8) and the pressure control mechanism (3) to avoid pressure loss leading to focusing failure; S7. After the focusing task is completed, a stop command is issued through the control terminal. The pressure control mechanism (3) drives the hydraulic chamber (8) to restore the pressure to the initial reference value recorded in S2. The reflector body (13) elastically deforms and resets. The heat dissipation system continues to run for a preset time and automatically shuts down after the temperature of the reflector unit (1) drops to the ambient temperature. The monitoring unit (7) stops data acquisition and the system as a whole returns to the initial state.

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