Vacuum pump direct drive device

Abstract

The invention relates to the technical field of vacuum pump driving, in particular to a vacuum pump direct drive device which comprises a base, a permanent magnet synchronous motor, an electromagnetic coupler, a support and a vacuum pump. The electromagnetic coupler is composed of an electromagnetic base and an electromagnetic ring slidably arranged on the electromagnetic base in a sleeving mode, the electromagnetic base is provided with a power connection end, and power supply is achieved through a sliding conductive structure. The magnetic shaft is assembled at the end of the vacuum pump transmission shaft, arc neodymium iron boron permanent magnets are evenly distributed on the periphery of the magnetic shaft, the polarities of the arc neodymium iron boron permanent magnets are arranged alternately, the magnetic shaft is sleeved with the electromagnetic ring, and non-contact magnetic driving is achieved. The beryllium copper alloy elastic contact on the inner wall of the electromagnetic ring ensures stable electrification in rotation, and is suitable for a vacuum system with high-cleanliness and high-reliability requirements.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of vacuum pump driving, in particular to a direct driving device for vacuum pump. BACKGROUND

[0002] Traditional vacuum pumps are mostly indirectly driven by asynchronous motors through mechanical transmission mechanisms such as shaft couplings, belts or gears, which have problems such as complex structure, low transmission efficiency, large vibration and noise, easy wear and tear, and the need for regular maintenance. Especially in high-cleanliness or high-vacuum environments, mechanical transmission components are prone to produce particulate pollution, and lubricating grease may volatilize to cause vacuum degree to drop.

[0003] Some equipment starts to use permanent magnet synchronous motor direct driving scheme, canceling the intermediate transmission link, although the efficiency and response speed are improved, but still faces two technical bottlenecks: one is that the motor and the pump body are rigidly connected, lacking overload protection mechanism, once the pump cavity is stuck or the load is suddenly changed, it is easy to cause the motor to burn out or the pump body to be damaged; the second is that the existing direct driving structure is difficult to realize the decoupling control of electricity and machinery, and the expansibility is limited in the intelligent scene that needs remote start-stop, speed regulation or state monitoring.

[0004] The magnetic coupling transmission technology is introduced into the vacuum system, which uses the non-contact magnetic force between permanent magnets to transmit torque, and can realize completely sealed and wear-free operation. However, the existing magnetic coupler is mostly used for isolation transmission, cannot actively control torque transmission, and does not have the ability of electric energy transmission, which is difficult to meet the intelligent driving demand, if the rotating parts need to be powered, such as integrated sensors or heating elements, usually rely on brush slip ring structure, but the traditional brush is easy to wear, spark, carbon deposition, and has low reliability, which is not suitable for high-speed or long-life occasions. SUMMARY

[0005] (I) Technical problems solved In view of the deficiencies of the prior art, the present application provides a direct driving device for vacuum pump.

[0006] (II) Technical solutions In order to achieve the above object, the present application provides the following technical scheme: a vacuum pump direct drive device, comprising a base, a permanent magnet synchronous motor, an electromagnetic coupler, a support and a vacuum pump, the permanent magnet synchronous motor, the vacuum pump and the support are fixedly installed on the base by screws, and the permanent magnet synchronous motor, the vacuum pump and the support are coaxially arranged, the support is arranged between the permanent magnet synchronous motor and the vacuum pump, the electromagnetic coupler is fixedly installed on the support, the electromagnetic coupler comprises an electromagnetic seat and an electromagnetic ring, one side of the electromagnetic seat is provided with an electricity connection end, the electromagnetic ring is sleeved on the electromagnetic seat, and the electromagnetic ring is in sliding connection with the electromagnetic seat, a sliding conductive structure is arranged between the electromagnetic seat and the electromagnetic ring, the input end of the vacuum pump is provided with a transmission shaft, the end of the transmission shaft is sleeved with a magnetic shaft, the electromagnetic ring is sleeved on the outside of the magnetic shaft, the output end of the permanent magnet synchronous motor penetrates through the support through a bearing, the rear end of the electromagnetic ring is a closed surface structure, the closed surface of the electromagnetic ring penetrates a connecting screw, and the connecting screw is fixedly connected with the output end of the permanent magnet synchronous motor.

[0007] Preferably, the outside of the magnetic shaft is surrounded by a plurality of permanent magnets, the permanent magnets are in arc structure, and the arc radian is matched with the outer periphery of the magnetic shaft.

[0008] Further preferably, the permanent magnets are made of neodymium iron boron material, the number is 4-8, and are uniformly distributed along the circumference of the magnetic shaft, and the polarity of adjacent permanent magnets is alternately arranged.

[0009] Again preferably, a plurality of mounting holes are arranged on the base and the support, and expansion bolts are assembled in the mounting holes.

[0010] Preferably, the sliding conductive structure comprises a ring-shaped conductive groove arranged on the outer peripheral wall of the electromagnetic seat and an elastic conductive contact arranged on the inner side wall of the electromagnetic ring, the ring-shaped conductive groove is embedded with a conductive copper ring, and the elastic conductive contact is closely attached to the conductive copper ring.

[0011] Further preferably, the number of ring-shaped conductive grooves is 2-4, and an insulating isolation layer is arranged between adjacent ring-shaped conductive grooves, and the conductive copper ring is insulated and fixed with the electromagnetic seat.

[0012] Again preferably, the elastic conductive contact is an elastic contact piece made of beryllium copper alloy, and is uniformly distributed along the circumference of the electromagnetic ring, and the end portion is in elastic contact with the conductive copper ring.

[0013] (Three) beneficial effects Compared with the prior art, the present application provides a vacuum pump direct drive device, which has the following beneficial effects: The technical scheme integrates the permanent magnet synchronous motor, the electromagnetic coupler and the vacuum pump coaxially on the base, cancels the traditional shaft coupling or belt transmission, greatly reduces mechanical loss and vibration noise, and improves the transmission efficiency to more than 95%. The electromagnetic coupler adopts a sliding fit structure of an electromagnetic seat and an electromagnetic ring, cooperates with 4-8 blocks of neodymium-iron-boron permanent magnets uniformly distributed on the outer periphery of a magnetic shaft, realizes non-contact magnetic drive, guarantees high torque transmission, and has an overload protection function. When the load is abnormal, the electromagnetic ring automatically slips to avoid damage to the motor or the pump body. The sliding conductive structure is composed of multiple annular conductive grooves, embedded conductive copper rings and beryllium copper alloy elastic contacts, ensures stable power supply of the electromagnetic ring during rotation, has low contact resistance, good wear resistance and long service life, the insulation isolation layer effectively prevents signal crosstalk, improves system reliability, the base and the support are rigidly fixed by expansion bolts, the overall structure is stable, installation is convenient, and it is suitable for high-frequency start-stop or high-cleanliness working conditions such as semiconductors and medical equipment. The device has no mechanical wear parts, is free of lubrication and low maintenance, has energy-saving and intelligent control potential, and significantly improves the response speed, running stability and comprehensive energy efficiency of the vacuum system. BRIEF DESCRIPTION OF DRAWINGS

[0014] Figure 1 It is a schematic view of the structure of the permanent magnet synchronous motor end side of the whole device of the application. Figure 2 It is a schematic view of the structure of the vacuum pump end side of the whole device of the application. Figure 3 It is a schematic view of the split structure of the electromagnetic seat and the electromagnetic ring of the application. Figure 4 It is a schematic view of the inner side structure of the electromagnetic ring of the application. In the figure: 1, base; 2, permanent magnet synchronous motor; 3, support; 4, vacuum pump; 5, electromagnetic coupler; 6, electromagnetic seat; 7, electromagnetic ring; 8, power connection end; 9, transmission shaft; 10, magnetic shaft; 11, permanent magnet; 12, mounting hole; 13, conductive copper ring; 14, elastic conductive contact; 15, connecting screw; 16, annular conductive groove. DETAILED DESCRIPTION

[0015] The technical solutions in the embodiments of the application will be described clearly and completely below with reference to the drawings in the embodiments of the application. Obviously, the described embodiments are only part of the embodiments of the application, rather than all the embodiments. Based on the embodiments in the application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the application.

[0016] Please refer to Figures 1-4The application discloses a vacuum pump direct driving device, which comprises a base 1, a permanent magnet synchronous motor 2, an electromagnetic coupler 5, a support 3 and a vacuum pump 4, wherein the permanent magnet synchronous motor 2, the vacuum pump 4 and the support 3 are fixedly installed on the base 1 by screws, and are coaxially arranged, the support 3 is arranged between the permanent magnet synchronous motor 2 and the vacuum pump 4, the electromagnetic coupler 5 is fixedly installed on the support 3, the electromagnetic coupler 5 comprises an electromagnetic base 6 and an electromagnetic ring 7, one side of the electromagnetic base 6 is provided with an electricity connection end 8, the electromagnetic ring 7 is sleeved on the electromagnetic base 6 and is in sliding connection with the electromagnetic base 6, a sliding conductive structure is arranged between the electromagnetic base 6 and the electromagnetic ring 7, an input end of the vacuum pump 4 is provided with a transmission shaft 9, an end of the transmission shaft 9 is sleeved with a magnetic force shaft 10, the electromagnetic ring 7 is sleeved on the outer side of the magnetic force shaft 10, an output end of the permanent magnet synchronous motor 2 penetrates through the support 3 through a bearing, a rear end of the electromagnetic ring 7 is in a closed surface structure, the closed surface of the electromagnetic ring 7 penetrates through a connecting screw 15, and the connecting screw 15 is fixedly connected with the output end of the permanent magnet synchronous motor 2.

[0017] The application takes the permanent magnet synchronous motor 2 and the electromagnetic coupling non-contact transmission as the core logic, outputs power through the permanent magnet synchronous motor 2, interacts through the magnetic field of the electromagnetic coupler 5, drives the transmission shaft 9 of the vacuum pump 4 to rotate, realizes the efficient direct driving of the vacuum pump 4, eliminates the mechanical wear through the non-contact transmission of the electromagnetic coupling compared with the traditional mechanical transmission, and can dynamically control the transmission torque and the rotating speed through the adjustment of the electromagnetic force, has the high efficiency and the flexibility, and solves the pain points of the traditional direct driving device, such as the strong transmission rigidity, the great wear and the speed regulation difficulty.

[0018] The magnetic force transmission assembly of the electromagnetic coupler 5 comprises the magnetic force shaft 10 and permanent magnets 11 The outer side of the magnetic force shaft 10 is surrounded by 4-8 arc-shaped neodymium-iron-boron permanent magnets 11 which are uniformly distributed in the circumferential direction and have the polarities alternately arranged; the electromagnetic ring 7 is sleeved on the outer side of the magnetic force shaft 10 and is in sliding connection with the electromagnetic base 6.

[0019] The output end of the permanent magnet synchronous motor 2 is fixedly connected with the connecting screw 15 penetrating through the closed surface of the electromagnetic ring 7, the electricity connection end 8 of the electromagnetic base 6 is externally connected with the commercial power through a conventional circuit mechanism, the permanent magnet synchronous motor 2 is externally connected with the commercial power through a conventional circuit and a conventional PLC programmable control system, after the permanent magnet synchronous motor 2 is started, the electromagnetic base 6 supplies power to the electromagnetic ring 7 through the sliding conductive structure, the electromagnetic ring 7 generates an electromagnetic field, the electromagnetic field interacts with the strong magnetic field of the permanent magnets 11 on the magnetic force shaft 10, the magnetic force principle that the opposite poles attract and the same poles repel is utilized to drive the magnetic force shaft 10 to rotate, and then the power is transmitted to the transmission shaft 9 of the vacuum pump 4. The permanent magnets 11 have the polarities alternately arranged, so that the magnetic field is uniform, the transmission torque is stable, and the rotating speed is stable; the number of 4-8 pieces is optimally balanced between the magnetic field strength and the lightweight structure, and is suitable for the power demand of the vacuum pump 4.

[0020] The sliding conductive structure includes annular conductive grooves 16, elastic conductive contacts 14 The electromagnetic seat 6 is provided with 2-4 annular conductive grooves 16 on the outer periphery, the conductive copper rings 13 are embedded in the grooves, and the insulating isolation layers are arranged between the grooves; the beryllium copper alloy elastic conductive contacts 14 are arranged on the inner side of the electromagnetic ring 7 and tightly contact the conductive copper rings 13.

[0021] When the electromagnetic ring 7 slides on the electromagnetic seat 6, the elastic conductive contacts 14 are always in close contact with the conductive copper rings 13, realizing stable transmission of electric energy from the electromagnetic seat 6 to the electromagnetic ring 7. The multiple annular conductive grooves 16 can respectively transmit different loops of control current, excitation current and the like, and the insulating isolation layers prevent short circuit caused by electric current, thereby guaranteeing the electrical reliability of the electromagnetic coupler 5. The structure not only meets the axial sliding requirement of the electromagnetic ring 7, but also ensures the continuity of power transmission, which is the key electrical support for electromagnetic coupling non-contact transmission.

[0022] The mounting and positioning structure includes a base 1, a support 3, and expansion bolts The base 1 and the support 3 are provided with a plurality of mounting holes 12, and the expansion bolts are assembled in the holes; the permanent magnet synchronous motor 2, the vacuum pump 4, and the support 3 are coaxially arranged, and the mounting reference surface is positioned by the positioning pin.

[0023] The expansion bolts fasten and connect the base 1, the support 3, and the mounting surface through the mounting holes 12, thereby ensuring the stability of the overall structure; the positioning pin precisely controls the coaxiality of the permanent magnet synchronous motor 2, the electromagnetic coupler 5, and the vacuum pump 4, thereby avoiding the electromagnetic coupling magnetic field deviation, transmission efficiency reduction, and even component damage caused by the coaxiality deviation. The structure provides a mechanical reference for precise transmission of electromagnetic coupling, thereby guaranteeing long-term stable operation of the device.

[0024] Detailed working process Step 1: Equipment installation and coaxial positioning The base 1 is fixed to the mounting area by the expansion bolts, and the permanent magnet synchronous motor 2, the support 3, and the vacuum pump 4 are sequentially installed, and the coaxiality of the three is ensured by the positioning pin. Installation of the electromagnetic coupler 5: the electromagnetic seat 6 is fixed to the support 3, the magnetic shaft 10 is connected with the transmission shaft 9 of the vacuum pump 4, the electromagnetic ring 7 is sleeved on the magnetic shaft 10 and is in sliding cooperation with the electromagnetic seat 6, and the elastic conductive contacts 14 are ensured to be in close contact with the conductive copper rings 13 in the annular conductive grooves 16.

[0025] Step 2: System power-on and initialization The power supply of the permanent magnet synchronous motor 2 and the electromagnetic coupler 5 is turned on, the control system is initialized, and the matching state of the magnetic field of the electromagnetic ring 7 and the magnetic shaft 10 and the on-off state of the sliding conductive structure are detected. The initial transmission parameters such as the target speed and the torque threshold are set, so that the electromagnetic coupler 5 is in a standby state.

[0026] Step 3: Power transmission and working condition adaptation Start the permanent magnet synchronous motor 2, the electromagnetic seat 6 supplies power to the electromagnetic ring 7, and the electromagnetic ring 7 generates an electromagnetic field; The electromagnetic field interacts with the magnetic field of the permanent magnet 11 on the magnetic force shaft 10, driving the magnetic force shaft 10 to rotate, and then driving the transmission shaft 9 of the vacuum pump 4, realizing the operation of the vacuum pump 4; When the load of the vacuum pump 4 changes, the control system, such as the PLC programmable controller, adjusts the excitation current of the electromagnetic coupler 5, changes the electromagnetic field strength, dynamically adjusts the transmission torque and speed, and ensures that the vacuum pump 4 operates in the high-efficiency range.

[0027] Step 4: Maintenance and iteration Regularly check the magnetic attenuation of the permanent magnet 11 and the wear of the elastic conductive contact 14, and if the magnetic attenuation of the permanent magnet 11 is greater than 10% or the wear of the contact is greater than 0.5mm, replace it; According to the long-term operation data of the vacuum pump 4, optimize the transmission parameters of the electromagnetic coupler 5, such as the magnetic field strength adjustment curve, to improve the energy efficiency and adaptability of the system.

[0028] Although embodiments of the present application have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of the present application, and the scope of the present application is defined by the appended claims and their equivalents.

Claims

1. A vacuum pump direct drive apparatus, characterized by, The utility model relates to a kind of permanent magnet synchronous motor drive vacuum pump, including base (1), permanent magnet synchronous motor (2), electromagnetic coupler (5), support (3) and vacuum pump (4), the permanent magnet synchronous motor (2), vacuum pump (4) and support (3) are fixedly installed on base (1) by screw, and the permanent magnet synchronous motor (2), vacuum pump (4) and support (3) are coaxially arranged, the support (3) is located between permanent magnet synchronous motor (2) and vacuum pump (4), the electromagnetic coupler (5) is fixedly installed on support (3), the electromagnetic coupler (5) includes electromagnetic seat (6) and electromagnetic ring (7), one side of the electromagnetic seat (6) is equipped with electricity end (8), the electromagnetic ring (7) is sleeved on electromagnetic seat (6), and the electromagnetic ring (7) is slidably connected with electromagnetic seat (6), sliding conductive structure is equipped between the electromagnetic seat (6) and electromagnetic ring (7), the input end of the vacuum pump (4) is equipped with transmission shaft (9), the end of transmission shaft (9) is sleeved with magnetic force shaft (10), the electromagnetic ring (7) is sleeved on the outside of magnetic force shaft (10), the output end of the permanent magnet synchronous motor (2) passes through support (3) by bearing, the rear end of the electromagnetic ring (7) is closed face structure, the closed face of the electromagnetic ring (7) is penetrated by connecting screw (15), and the connecting screw (15) is fixedly connected with the output end of permanent magnet synchronous motor (2).

2. The vacuum pump direct drive apparatus according to claim 1, characterized by The outside of the magnetic force shaft (10) is surrounded by a plurality of permanent magnets (11), the permanent magnets (11) are arc-shaped structures, and the arc radii are adapted to the outer periphery of the magnetic force shaft (10).

3. The vacuum pump direct drive apparatus according to claim 1, wherein The permanent magnets (11) are made of neodymium-iron-boron material, the number is 4-8, and they are evenly distributed along the circumference of the magnetic force shaft (10), and the polarities of adjacent permanent magnets (11) are alternately arranged.

4. The vacuum pump direct drive apparatus according to claim 1, characterized by, The base (1) and the support (3) are provided with a plurality of mounting holes (12), and the mounting holes (12) are fitted with expansion bolts.

5. The vacuum pump direct drive apparatus according to claim 1, wherein The sliding conductive structure includes a ring-shaped conductive groove (16) provided on the outer peripheral wall of the electromagnetic seat (6) and an elastic conductive contact (14) provided on the inner side wall of the electromagnetic ring (7), the ring-shaped conductive groove (16) is embedded with a conductive copper ring (13), and the elastic conductive contact (14) is tightly attached to the conductive copper ring (13).

6. A vacuum pump direct drive apparatus according to claim 5, wherein The number of the ring-shaped conductive grooves (16) is 2-4, and an insulating isolation layer is provided between adjacent ring-shaped conductive grooves (16), and the conductive copper ring (13) is insulated and fixed with the electromagnetic seat (6).

7. A vacuum pump direct drive apparatus according to claim 6, characterized in that The elastic conductive contact (14) is an elastic contact piece made of beryllium copper alloy, and is evenly distributed along the circumference of the electromagnetic ring (7), and the end portion is in elastic contact with the conductive copper ring (13).

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