A method for calibrating and debugging an optical path of a five-axis galvanometer laser processing system

Abstract

The application relates to the field of laser processing, and provides a light path calibration and debugging method of a five-axis galvanometer laser processing system, which realizes accurate collimation of the five-axis galvanometer light path; the five-axis galvanometer laser processing system comprises a laser generator, a reflecting mirror, a beam expander, a dynamic deflection scanning module and a motion platform; the dynamic deflection scanning module comprises a focusing module, a galvanometer module and a focusing field mirror module; the galvanometer module comprises a galvanometer one, a galvanometer two, a galvanometer three and a galvanometer four; the focusing field mirror module comprises a focusing field mirror; the light path calibration and debugging method comprises the following steps: S1, setting a light beam limiting structure; S2, electrically controlled fine adjustment of the angles of the four galvanometers; S3, verification of the light axis collinearity; S4, calibration of the deflection coefficients of the galvanometer three and the galvanometer four; and S5, galvanometer cooperative deflection coefficient calibration; the method can systematically solve key problems such as light path transmission, focusing and collimation, and has important significance for effectively improving the overall performance such as the processing precision and stability of the five-axis galvanometer laser processing equipment.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of laser processing, in particular to a method for calibrating and debugging the optical path of a five-axis galvanometer laser processing system. BACKGROUND

[0002] Laser processing technology is one of the most widely used fields of laser applications, from computer chips to large aircraft structures. Compared with traditional mechanical processing technology, laser processing technology has many advantages such as non-contact, good energy concentration, simple operation, high efficiency, energy saving and environmental protection.

[0003] The commonly used two-axis or three-axis galvanometer laser processing can only control the position of the laser focal point, and cannot control the attitude of the laser beam, and the freedom of movement is small. At the same time, due to the Gaussian distribution of the energy of the laser beam, the micro-holes or the processed surface are in a positive conical shape, and it is difficult to control and eliminate the conical surface, and it is also impossible to process complex microstructures such as straight-wall holes or negative conical microstructures. Five-axis galvanometer laser can control the angle between the laser beam and the processing surface, and can adjust the beam inclination angle in real time according to the structure characteristics and processing depth to regulate the shape and topography of the processed object, so as to realize high-quality processing of various complex microstructures, such as high-depth-to-diameter ratio straight-wall holes, negative conical holes, special-shaped holes and grooves, and positive and negative conical surface microstructures.

[0004] In the five-axis galvanometer laser processing system, the calibration and debugging of the optical path are the prerequisite for ensuring that the laser focal point and the beam attitude move along the preset path. If the beam focal point and the attitude deviate from the ideal trajectory, it will not only cause the processing quality to decline, but also cause the substrate to be damaged. At present, there is a lack of systematic method for calibrating and debugging the optical path of the five-axis galvanometer laser processing system in the public patent. Therefore, it is of great significance to develop a complete method for calibrating and debugging the optical path of the five-axis galvanometer laser processing system to effectively improve the overall performance of the five-axis galvanometer laser processing system. SUMMARY

[0005] In view of the above practical problems and the deficiencies of the prior art, the main technical problem to be solved by the present application is to provide a method for calibrating and debugging the optical path of a five-axis galvanometer laser processing system to realize precise regulation and control of the five-axis galvanometer laser processing system.

[0006] In order to solve the above technical problems, the present application provides a method for calibrating and debugging the optical path of a five-axis galvanometer laser processing system, which adopts the following technical scheme:

[0007] A kind of calibration and debugging method of optical path of five-axis laser processing system, the five-axis galvanometer laser processing system includes laser generator, mirror, beam expander, dynamic deflection scanning module and motion platform;The mirror includes adjusting device, for adjusting the light direction of the laser beam, the beam expander is used to adjust the diameter and divergence angle of the laser beam, so that the laser beam enters the dynamic deflection scanning module in collimated state;The dynamic deflection scanning module includes focusing module, galvanometer module and focusing field lens module, for regulating the position of laser focus and the attitude of laser beam;The galvanometer module includes galvanometer one, galvanometer two, galvanometer three and galvanometer four;The focusing field lens module includes focusing field lens;The motion platform is provided with processing surface;

[0008] The calibration and debugging method of optical path includes the following steps:

[0009] S1, setting beam limiting structure: the aperture of the aperture ≤0.5mm of the blocking plate is installed in the light inlet and light outlet of the focusing field lens, to limit the spot range of incident and emitted laser beam;

[0010] S2, four galvanometer mirror angle electric control fine adjustment:

[0011] Four galvanometers are powered on, and the laser generator is opened to output low-power indicating laser;

[0012] The projection position of laser beam output from the galvanometer module on the field lens light inlet blocking plate is observed;

[0013] When the laser projection point of laser beam deviates from the light inlet in X axis direction, the mirror angle of galvanometer two and galvanometer four is adjusted synchronously, so that the laser projection point gradually approaches the light inlet;Or when the laser projection point of laser beam deviates from the light inlet in Y axis direction, the mirror angle of galvanometer one and galvanometer three is adjusted synchronously, so that the laser projection point gradually approaches the light inlet;

[0014] S3, optical axis collinearity verification:

[0015] Laser spot position detection sensor PSD is installed on the motion platform below the focusing field lens, for detecting the position coordinates of laser spot projected thereon in X axis and Y axis direction;Firstly, the position data of spot on PSD is collected in the initial position of motion platform, then the motion platform is operated to rise 1mm, and the spot position data on PSD is collected again;

[0016] If the deviation of spot position collected twice in X axis and Y axis direction is controlled within 10 μm, it is determined that the laser beam output from the galvanometer module is collinear with the central axis of the focusing field lens, and enters the next step;If not, return to step S3 for iterative calibration;

[0017] S4, deflection coefficient calibration of galvanometer three and galvanometer four:

[0018] Keeping galvanometer one, galvanometer two and galvanometer four fixed, angle change instruction is sent to galvanometer three, according to five-axis galvanometer laser processing optical theory, angle change of galvanometer three exists corresponding linear distance of laser beam scanning on the processing surface, and the distance has a theoretical calculation value;

[0019] The linear distance of laser beam scanning on the processing surface is obtained by optical microscope image measurement after the laser beam output from the galvanometer module is focused by the field lens; the actual scanning distance of the laser beam on the processing surface is compared with the theoretical scanning distance, and the angle change instruction of the galvanometer three is multiplied by a deflection coefficient, so that the actual scanning distance on the processing surface gradually approaches the theoretical scanning distance;

[0020] Similarly, the galvanometer four is calibrated independently;

[0021] S5, galvanometer cooperative deflection coefficient calibration;

[0022] Angle change instruction is sent to galvanometer three or galvanometer four, at this time the spot position projected on the PSD will shift; at the same time, angle change instruction is sent to galvanometer one or galvanometer two, until the spot on the PSD returns to the initial spot position collected in step S3;

[0023] The corresponding relationship between the angle change of galvanometer three and galvanometer one or galvanometer two and galvanometer four is analyzed, the proportional coefficient of the two is calculated, the proportional coefficient relationship between the two is established, and a cooperative control model is formed, which is used for independent compensation control of the angle axis in five-axis motion.

[0024] In a preferred embodiment, the galvanometer one is installed in the mounting hole of the corresponding galvanometer tool, the main shaft of the galvanometer one is collinear with the Y axis, and the projection of the mirror surface of the galvanometer one in the XOZ plane is nearly 135° with the X axis;

[0025] The galvanometer two is installed in the mounting hole of the corresponding galvanometer tool, the main shaft of the galvanometer two is collinear with the X axis, and the projection of the mirror surface of the galvanometer two in the YOZ plane is nearly 45° with the Y axis;

[0026] The galvanometer three is installed in the mounting hole of the corresponding galvanometer tool, the main shaft of the galvanometer three is collinear with the Z axis, and the projection of the mirror surface of the galvanometer three in the XOY plane is nearly 135° with the X axis;

[0027] The galvanometer four is installed in the mounting hole of the corresponding galvanometer tool, the main shaft of the galvanometer four is collinear with the Y axis, and the projection of the mirror surface of the galvanometer four in the XOZ plane is nearly 135° with the X axis.

[0028] In a preferred embodiment, the adjustment of the optical path includes three-axis movement of the laser focal point in X, Y and Z directions, and the angles α and β of the projection of the laser beam in XOZ and YOZ planes with the X and Z axes respectively;

[0029] The galvanometer three and the galvanometer four cooperatively control the movement of the laser focal point in X, Y and Z directions, and the cooperative deflection coefficient calibration of the galvanometer one and the galvanometer three is used for controlling the angle α of the projection of the laser beam in the XOZ plane with the X axis, and the cooperative deflection coefficient calibration of the galvanometer two and the galvanometer four is used for controlling the angle β of the projection of the laser beam in the YOZ plane with the Z axis.

[0030] In summary, the present application includes the following beneficial effects:

[0031] The method provided by the present application includes setting a light beam limiting structure, electrically controlled fine adjustment of four galvanometer mirror angles, optical axis collinearity verification, deflection coefficient calibration of the galvanometer three and the galvanometer four, and cooperative deflection coefficient calibration of the galvanometers, and provides a complete and applicable calibration and adjustment method for the optical path of a five-axis laser processing system, which can systematically solve key problems such as optical path transmission, focusing and collimation, and has important significance for effectively improving the overall performance such as processing precision and stability of the five-axis laser processing equipment. BRIEF DESCRIPTION OF DRAWINGS

[0032] Figure 1 It is a structure schematic diagram of the five-axis laser processing system in the preferred embodiment of the present application;

[0033] Figure 2 It is a principle schematic diagram of the five-axis laser processing in the preferred embodiment of the present application;

[0034] Figure 3 It is an explanatory schematic diagram of the initial position installation of the four galvanometers in the preferred embodiment of the present application;

[0035] Figure 4 It is a schematic diagram of the light beam limiting structure in the preferred embodiment of the present application;

[0036] Figure 5 It is a principle explanatory diagram of the electrically controlled fine adjustment of the four galvanometer mirror angles in the preferred embodiment of the present application, wherein Figure 5 a is a schematic diagram of the projection position of the laser beam output from the galvanometer module on the light inlet shielding plate, Figure 5 b is a schematic diagram that the laser cannot be emitted from the light outlet when the single galvanometer two or four is adjusted, Figure 5 c is a schematic diagram that the laser beam is collinear with the central axis of the focusing field lens;

[0037] Figure 6 It is a principle schematic diagram of the deflection coefficient calibration of the galvanometer three and the galvanometer four in the preferred embodiment of the present application, wherein Figure 6 a is a schematic diagram of the theoretical scanning distance Δd,Figure 6 b is a schematic diagram of the actual scanned straight line distance Δd';

[0038] Figure 7 a is a schematic diagram of the initial transmission path being collinear with the central axis of the field lens module, Figure 7 a is a schematic diagram of the initial transmission path being collinear with the central axis of the field lens module, Figure 7 b is a schematic diagram of the shift of the spot position, Figure 7 c is a schematic diagram of the spot position returning to the initial spot position.

[0039] Reference signs: 1, laser generator; 2, laser beam; 27, laser beam output from the galvanometer module; 271, laser projection point; 28, laser beam output from the field lens module; 281, projection of the YOZ plane; 282, laser focal point; 283, projection of the XOZ plane; 3, first reflecting mirror; 4, beam expander; 5, second reflecting mirror; 6, third reflecting mirror; 7, focusing module; 8, galvanometer module; 81, galvanometer tooling; 82, main shaft; 83, mirror surface; 9, field lens module; 91, light inlet shielding plate; 911, light inlet; 92, focusing field lens; 93, light outlet shielding plate; 931, light outlet; 10, motion platform; 11, laser spot position detection sensor PSD. DETAILED DESCRIPTION

[0040] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the protection scope of the present application.

[0041] The following will be described in detail with reference to the drawings in the embodiments of the present application. Figures 1-7 The present application will be further described in detail.

[0042] The present embodiment provides a calibration and debugging method for the optical path of a five-axis galvanometer laser processing system, which standardizes the adjustment process and significantly improves the debugging efficiency and processing precision of the five-axis galvanometer laser processing equipment. This method can systematically solve key problems such as optical path transmission, focusing, and collimation, and has important significance for effectively improving the overall performance of the five-axis galvanometer laser processing equipment such as processing precision and stability.

[0043] In the present embodiment, as Figure 1As shown, the five-axis galvanometer laser processing system includes a laser generator 1, a mirror, a beam expander 4, a dynamic deflection scanning module, and a motion platform 10; the laser generator 1 is used to output a laser beam 2 required for processing, the mirror is used to adjust the direction of the laser beam 2, the beam expander 4 is used to adjust the diameter and divergence angle of the laser beam 2, so that the laser beam 2 enters the dynamic deflection scanning module in a collimated state, the dynamic deflection scanning module is used to regulate the position of a laser focal point 282 (the laser focal point 282 is the laser focal point of the laser beam output from the field lens module) and the attitude of the laser beam 28 output from the field lens module; the dynamic deflection scanning module includes a focusing module 7, a galvanometer module 8, and a focusing field lens module 9, the galvanometer module includes a galvanometer one, a galvanometer two, a galvanometer three, and a galvanometer four; the focusing field lens module includes a focusing field lens 92; the motion platform 10 is provided with a processing surface.

[0044] In the embodiment, the direction of the laser beam 2 output by the laser generator is used to establish the coordinate system of the five-axis galvanometer laser processing system as the X-axis negative direction. The projection 281 of the laser beam 28 output from the field lens module in the YOZ plane, the projection 283 in the XOZ plane, and the laser focal point 282 of the laser beam 28 output from the field lens module on the processing surface; the angle between the projection of the laser beam 28 output from the field lens module in the XOZ plane and the X-axis is set as α, and the angle between the projection of the laser beam 28 output from the field lens module in the YOZ plane and the Z-axis is set as β. The "five axes" of the five-axis galvanometer laser processing system specifically include two parts of motion: one is the three-axis movement of the laser focal point 282 in the X, Y, and Z directions, and the other is the adjustment of the two angle axes (α angle and β angle) (for example Figure 2 As shown).

[0045] The four galvanometers and four galvanometer tooling 81 for galvanometer installation are used to control the laser beam 28 output from the field lens module in the "five axes", as shown in Figure 3 The main shaft 82 of the galvanometer is assembled in the preset mounting hole of the galvanometer tooling 81, the galvanometer and the galvanometer tooling 81 are installed in a hole shaft cooperation mode, and the hole shaft cooperation tolerance is ≤0.016 mm; the main shaft 82 is connected with a driving motor, and the four galvanometers are divided into a galvanometer one, a galvanometer two, a galvanometer three, and a galvanometer four. The control of each galvanometer is as follows: the galvanometer three and the galvanometer four work cooperatively with the focusing module 7 to jointly control the movement of the laser focal point 282 in the X, Y, and Z directions; the galvanometer one cooperatively controls the adjustment of the β angle, and the galvanometer two cooperatively controls the adjustment of the α angle.

[0046] In the embodiment, the installation of the initial positions of the four galvanometers includes the following steps:

[0047] Step 1, install the first galvanometer on the corresponding galvanometer tool 81, the main shaft 82 of the first galvanometer is collinear with the Y axis, after the first galvanometer is powered on, rotate the main shaft 82 of the first galvanometer, so that the projection of the mirror surface 83 of the first galvanometer in the XOZ plane is nearly 135° with the X axis, Figure 3 Take the first galvanometer as an example;

[0048] Step 2, install the second galvanometer on the corresponding galvanometer tool 81, the main shaft 82 of the second galvanometer is collinear with the X axis, after the second galvanometer is powered on, rotate the main shaft 82 of the second galvanometer, so that the projection of the mirror surface 83 of the second galvanometer in the YOZ plane is nearly 45° with the Y axis;

[0049] Step 3, install the third galvanometer on the corresponding galvanometer tool 81, the main shaft 82 of the third galvanometer is collinear with the Z axis, after the third galvanometer is powered on, rotate the main shaft 82 of the third galvanometer, so that the projection of the mirror surface 83 of the third galvanometer in the XOY plane is nearly 135° with the X axis.

[0050] Step 4, install the fourth galvanometer on the corresponding galvanometer tool 81, the main shaft 82 of the fourth galvanometer is collinear with the Y axis, after the fourth galvanometer is powered on, rotate the main shaft 82 of the fourth galvanometer, so that the projection of the mirror surface 83 of the fourth galvanometer in the XOZ plane is nearly 135° with the X axis.

[0051] In this embodiment, the light path calibration and debugging method comprises the following steps:

[0052] S1, set the light beam limiting structure: as Figure 4 The focusing field mirror module 9 comprises a focusing field mirror 92, which is provided with an entrance aperture shielding plate 91 and an exit aperture shielding plate 93 to limit the spot range of the incident and exit laser beams 2; the aperture size of the light transmission hole of the entrance aperture shielding plate 91 and the exit aperture shielding plate 93 is 0.5mm.

[0053] S2, electrically controlled fine adjustment of the angles of the four galvanometer mirrors:

[0054] The electrically controlled fine adjustment of the angles of the mirrors of the galvanometer is based on the initial position installation of the galvanometer, and the electrically controlled fine adjustment of the angles of the mirrors of the galvanometer comprises the following steps:

[0055] Step 11, power on the four galvanometers which have completed the initial position installation, and turn on the low-power indicating laser output of the laser generator 1, and observe the projection position of the laser beam 27 output from the galvanometer module on the entrance aperture shielding plate 91, that is, the spot projected on the field mirror entrance aperture shielding plate, which is recorded as the laser projection point 271, as Figure 5 a);

[0056] Step 12, when the laser projection point 271 of the laser beam 27 output from the galvanometer module deviates from the light inlet 911 of the light inlet shielding plate 91 in the X-axis direction, the adjustment instruction is sent to the galvanometer two and the galvanometer four, the mirror angle of the galvanometer two and the galvanometer four is changed by rotating the corresponding driving motor, so that the laser projection point 271 gradually approaches the light inlet 911; or when the laser projection point 271 deviates from the light inlet 911 of the light inlet shielding plate 91 in the Y-axis direction, the adjustment instruction is sent to the galvanometer one and the galvanometer three, the mirror angle of the galvanometer one and the galvanometer three is changed by rotating the corresponding driving motor, so that the laser projection point 271 gradually approaches the light inlet 911.

[0057] In step 12, the galvanometer one and the galvanometer three both have the function of controlling the movement of the laser projection point 271 in the Y-axis direction, but when only the galvanometer one or the galvanometer three is adjusted, although the laser projection point 271 can approach the light inlet 911 of the light inlet shielding plate 91, the laser cannot be emitted from the light outlet 931 of the light outlet shielding plate 93 and transmitted to the processing surface (as shown in Figure 5 b), the reason is that the laser beam 27 output from the galvanometer module is not collinear with the central axis of the focusing field lens 92 at this time; therefore, the mirror angles of the galvanometer one and the galvanometer three are adjusted at the same time to ensure that the laser beam 27 output from the galvanometer module is collinear with the central axis of the focusing field lens 92, as shown in Figure 5 c).

[0058] In step 12, the galvanometer two and the galvanometer four both have the function of controlling the movement of the laser projection point 271 in the X-axis direction, but when only the galvanometer two or the galvanometer four is adjusted, although the laser projection point 271 can approach the light inlet 911 of the light inlet shielding plate 91, the laser cannot be emitted from the light outlet 931 of the light outlet shielding plate 93 and transmitted to the processing surface (as shown in Figure 5 b), the reason is that the laser beam 27 output from the galvanometer module is not collinear with the central axis of the focusing field lens 92 at this time; therefore, the mirror angles of the galvanometer two and the galvanometer four are adjusted at the same time to ensure that the laser beam 27 output from the galvanometer module is collinear with the central axis of the focusing field lens 92, as shown in Figure 5 c).

[0059] S3, optical axis collinearity verification:

[0060] As Figure 5c) a laser spot position detection sensor PSD 11 is installed on the motion platform 10 below the focusing field lens 92, which is used to detect the position coordinates of the laser spot formed by the laser focal point 282 projected thereon in the X axis and Y axis directions; first, the spot position data on the laser spot position detection sensor PSD 11 is collected at the initial position of the motion platform 10, then the motion platform 10 is operated to rise by 1 mm, and the spot position data on the laser spot position detection sensor PSD 11 is collected again;

[0061] If the deviation of the spot positions collected twice in the X axis and Y axis directions is controlled within 10 μm, it can be determined that the laser beam 27 output from the galvanometer module is collinear with the central axis of the focusing field lens 92;

[0062] If the deviation of the spot positions collected twice in the X axis and Y axis directions exceeds 10 μm, it is necessary to return to step S3 for iterative calibration until the deviation is controlled within 10 μm, satisfying the deviation requirement.

[0063] S4, deflection coefficient calibration of the galvanometer three and the galvanometer four:

[0064] In the embodiment, the deflection coefficient calibration of the galvanometer three and the galvanometer four includes the following steps (taking the galvanometer three as an example):

[0065] Step (1), set the laser power that can realize material processing and turn on the laser generator 1, the light emission and light off of the laser generator 1 are linked with the control of the galvanometer module 8, that is, when the galvanometer module 8 is controlled, the laser generator 1 emits light, and when the galvanometer module 8 stops control, the laser generator 1 turns off;

[0066] Step (2), keep the galvanometer one, the galvanometer two and the galvanometer four fixed, send an angle change instruction θ to the galvanometer three, according to the five-axis galvanometer laser processing optical theory, the angle change of the galvanometer three has a corresponding linear distance of the laser beam 28 output from the field lens module on the processing surface, the distance has a theoretical calculation value, and the theoretical scanning distance Δd can be calculated, such as Figure 6 a);

[0067] Step (3), observe and analyze the actual scanning distance Δd' of the laser beam 27 output from the galvanometer module on the processing surface through the focusing field lens 92 by using an optical microscope, such as Figure 6 b);

[0068] Step (4), compare the actual scanning distance Δd' of the laser beam 28 output from the field lens module on the processing surface with the theoretical scanning distance Δd, multiply the angle change instruction of the galvanometer three by a deflection coefficient, so that the actual scanning distance Δd' on the processing surface gradually approaches the theoretical scanning distance Δd.

[0069] The deflection coefficient of the galvanometer four is calibrated by referring to the calibration method of steps (1)-(4).

[0070] S5, the galvanometer cooperates with the deflection coefficient calibration;

[0071] The cooperative deflection coefficient calibration of the galvanometer one and the galvanometer three includes the following steps:

[0072] Step (11), a laser spot position detection sensor PSD11 is installed on the motion platform below the focusing field mirror 92, and the laser spot position detection sensor PSD11 is used to detect the position coordinates of the laser spot projected thereon in the X axis and Y axis directions;

[0073] Step (12), turn on the laser generator 1 to output low-power indicating laser to provide a light source for laser spot position detection;

[0074] Step (13), after the optical axis collinearity verification, the laser beam 27 output from the galvanometer module has an initial transmission path that is collinear with the central axis of the field mirror module 9, as shown in Figure 7 a), at this time, the spot position data on the laser spot position detection sensor PSD11 is collected, and the data is taken as the initial spot position data as the reference position for subsequent adjustment;

[0075] Step (14), send an angle change instruction to the galvanometer three, at this time, the laser beam 27 output from the galvanometer module will be offset, and the laser beam 28 output from the field mirror module and the spot position projected on the laser spot position detection sensor PSD11 will also be offset, as shown in Figure 7 b), at the same time, send an angle change instruction to the galvanometer one until the spot position projected on the laser spot position detection sensor PSD11 returns to the initial spot position collected in step (13), as shown in Figure 7 c);

[0076] Step (15), analyze the corresponding relationship between the angle change amount of the galvanometer three and the galvanometer one, calculate the proportional coefficient of the two, complete the coefficient cooperative calibration of the galvanometer three and the galvanometer one, and by adjusting the galvanometer one and the galvanometer three, the angle of the laser beam 28 output from the field mirror module relative to the central axis of the field mirror module 9 can be adjusted, and the attitude of the laser beam 28 output from the field mirror module can be controlled.

[0077] The cooperative calibration of the deflection coefficient relationship of the galvanometer two and the galvanometer four is performed by referring to the method of steps (11)-(15).

[0078] The above merely describes preferred specific embodiments of the present application, but the design concept of the present application is not limited thereto, and any person skilled in the art, within the technical scope disclosed by the present application, can make non-essential modifications to the present application using the concept, and such modifications shall not be deemed to be within the scope of the present application.

Claims

1. A method for calibration and commissioning of an optical path of a five-axis galvanometer laser processing system, characterized in that: The five-axis galvanometer laser processing system comprises a laser generator, a mirror, a beam expander, a dynamic deflection scanning module and a motion platform; the mirror comprises an adjusting device for adjusting the light direction of the laser beam, and the beam expander is used for adjusting the diameter and divergence angle of the laser beam so that the laser beam enters the dynamic deflection scanning module in a collimated state; the dynamic deflection scanning module comprises a focusing module, a galvanometer module and a focusing field mirror module, which are used for regulating the position of the laser focal point and the attitude of the laser beam; the galvanometer module comprises galvanometer one, galvanometer two, galvanometer three and galvanometer four; the focusing field mirror module comprises a focusing field mirror; the motion platform is provided with a processing surface; The calibration and debugging method of the optical path comprises the following steps: S1, setting a beam limiting structure: installing a blocking plate with an aperture ≤0.5mm at the light entrance and exit of the focusing field mirror to limit the spot range of the incident and exit laser beams; S2, electrically controlled fine adjustment of the angles of the four galvanometers: Power on the four galvanometers, and turn on the laser generator to output low-power indicating laser; Observe the projection position of the laser beam output from the galvanometer module on the light entrance blocking plate of the focusing field mirror; When the laser projection point of the laser beam deviates from the light entrance in the X-axis direction, the mirror angles of the galvanometer two and the galvanometer four are adjusted synchronously to gradually approach the light entrance; or when the laser projection point of the laser beam deviates from the light entrance in the Y-axis direction, the mirror angles of the galvanometer one and the galvanometer three are adjusted synchronously to gradually approach the light entrance; S3, verification of the collinearity of the optical axis: A laser spot position detection sensor PSD is installed on the motion platform below the focusing field mirror to detect the position coordinates of the laser spot projected thereon in the X-axis and Y-axis directions; first, collect the position data of the spot on the PSD at the initial position of the motion platform, then operate the motion platform to raise it by 1mm, and collect the position data of the spot on the PSD again; If the deviations of the two collected spot positions in the X-axis and Y-axis directions are controlled within 10μm, it is determined that the laser beam output from the galvanometer module is collinear with the central axis of the focusing field mirror, and the next step is entered; otherwise, return to step S3 for iterative calibration; S4, calibration of the deflection coefficients of the galvanometer three and the galvanometer four: Keep the galvanometer one, the galvanometer two and the galvanometer four fixed, send an angle change instruction to the galvanometer three, and according to the five-axis galvanometer laser processing optical theory, the angle change of the galvanometer three corresponds to a straight line distance of the laser beam scanning on the processing surface, and the distance has a theoretical calculation value; Obtain the actual scanning straight line distance of the laser beam output from the galvanometer module after the focusing field mirror on the processing surface by optical microscope image measurement; compare the actual scanning distance of the laser beam on the processing surface with the theoretical scanning distance, multiply the angle change instruction of the galvanometer three by a deflection coefficient, and gradually approach the theoretical scanning distance; Similarly, calibrate the galvanometer four independently; S5, galvanometer cooperative deflection coefficient calibration; Send angle change instruction to the third or fourth galvanometer, at this time the light spot position on the PSD will be offset; at the same time, send angle change instruction to the first or second galvanometer until the light spot on the PSD returns to the initial light spot position collected in step S3; Analyze the corresponding relationship between the angle change amount of the third galvanometer and the first or second galvanometer or the fourth galvanometer, calculate the proportional coefficient of the two, establish the proportional coefficient relationship between the two, form a cooperative control model, and use the model for independent compensation control of the angle axis in five-axis motion.

2. The method of calibration and adjustment of the optical path of a five-axis galvanometer laser processing system according to claim 1, characterized in that: The galvanometer module includes a galvanometer tool for mounting four galvanometers, the main shaft of the galvanometer is assembled in the preset mounting hole of the galvanometer tool, and the main shaft is connected with a driving motor; The galvanometer and the galvanometer tool are installed in a hole shaft matching mode, and the hole shaft matching tolerance is ≤0.016mm.

3. The method of calibration and adjustment of the optical path of a five-axis galvanometer laser processing system according to claim 2, characterized in that: The first galvanometer is mounted in the mounting hole of the corresponding galvanometer tool, the main shaft of the first galvanometer is collinear with the Y axis, and the projection of the mirror surface of the first galvanometer in the XOZ plane is approximately 135° with the X axis; The second galvanometer is mounted in the mounting hole of the corresponding galvanometer tool, the main shaft of the second galvanometer is collinear with the X axis, and the projection of the mirror surface of the second galvanometer in the YOZ plane is approximately 45° with the Y axis; The third galvanometer is mounted in the mounting hole of the corresponding galvanometer tool, the main shaft of the third galvanometer is collinear with the Z axis, and the projection of the mirror surface of the third galvanometer in the XOY plane is approximately 135° with the X axis; The fourth galvanometer is mounted in the mounting hole of the corresponding galvanometer tool, the main shaft of the fourth galvanometer is collinear with the Y axis, and the projection of the mirror surface of the fourth galvanometer in the XOZ plane is approximately 135° with the X axis.

4. The method of claim 1, wherein the method further comprises: determining the position of the laser beam on the workpiece; and adjusting the position of the laser beam on the workpiece. The debugging of the optical path includes three-axis movement of the laser focal point in X, Y and Z directions, and the included angle α and β between the projection of the laser beam in XOZ and YOZ planes and the X axis and Z axis, respectively; The third and fourth galvanometers cooperatively control the movement of the laser focal point in X, Y and Z directions with the focusing module, the cooperative deflection coefficient scaling of the first and third galvanometers is used for controlling the included angle α between the projection of the laser beam in the XOZ plane and the X axis, and the cooperative deflection coefficient scaling of the second and fourth galvanometers is used for controlling the included angle β between the projection of the laser beam in the YOZ plane and the Z axis.

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