Pneumatic adsorption turntable with multiple pieces

Abstract

The pneumatic adsorption rotary table comprises a rotary table middle portion and rotary table connecting plates located on the periphery of the rotary table middle portion, an adsorption cavity position is formed in the middle of each rotary table connecting plate, a plurality of auxiliary connecting rods are arranged in each adsorption cavity position, and ventilation rods are connected between the side edges of the rotary table connecting plates and the auxiliary connecting rods. A side gas circuit and an internal gas circuit are arranged in the turntable connecting plate, the side gas circuit is located on the side of the turntable connecting plate and communicated to the turntable suction nozzle on the outermost side of the ventilation rod, and the internal gas circuit is located in the middle of the turntable connecting plate and communicated to the turntable suction nozzle at the inner side end of the ventilation rod. According to the pneumatic adsorption rotary table for the multiple pieces, an air path is hidden in the rotary table connecting plate, the multiple pieces are adsorbed by extending the ventilation rod to the middle of the rotary table connecting plate, the designed adsorption cavity position does not affect contact of the multiple pieces queued by upper and lower probes during IV detection, adsorption of the multiple pieces is independently controlled while the structural space is saved, and the detection efficiency is improved. And multiple pieces with different qualities can be respectively discharged according to detection results.

Description

Technical Field

[0001] This invention relates to the technical field of silicon wafer inspection, and more particularly to a multi-segmented pneumatic adsorption turntable. Background Technology

[0002] After printing, crystalline silicon photovoltaic solar wafers require AOI (Automated Optical Inspection) color testing and IV (Inductively Coupled Inspection) testing. AOI, based on optical principles, detects common defects (including color) encountered during printing production. IV testing involves testing the current and voltage characteristic curves (IV curves) of the photovoltaic module. Only wafers that pass this test and are deemed acceptable will proceed to the next stage of production. Current silicon wafer production sizes are increasingly smaller, dividing the entire wafer into double halves, quarters, or even six halves, collectively referred to as multi-wafer production. Conventional multi-wafer production uses uniform, interconnected adsorption modules for adsorption of multiple wafers. However, with multiple wafers being inspected simultaneously, defective wafers cannot be independently removed, impacting production efficiency. Summary of the Invention

[0003] One objective of this invention is to provide a multi-segment pneumatic adsorption turntable, which uses an independent air path for adsorption of each multi-segment, facilitating the independent discharge of defective tablets after IV testing.

[0004] To achieve this objective, the present invention adopts the following technical solution:

[0005] A multi-segmented pneumatic adsorption turntable includes a central part of the turntable and a turntable connecting plate surrounding the central part. A turntable shaft is disposed on the central part of the turntable, and pneumatic components are integrated on the outer side of the turntable shaft. An adsorption cavity is disposed in the central part of the turntable connecting plate, and several auxiliary connecting rods are disposed within the adsorption cavity. A ventilation rod is connected between the side of the turntable connecting plate and the auxiliary connecting rods. Several turntable nozzles are distributed on the ventilation rod. The turntable connecting plate has a side air passage and an internal air passage. The side air passage is located on the side of the turntable connecting plate and connects to the outermost turntable nozzle on the ventilation rod. The internal air passage is located in the central part of the turntable connecting plate and connects to the turntable nozzle at the inner end of the ventilation rod.

[0006] As a preferred technical solution, the pneumatic component is provided with a plurality of first air pipe connectors, and the inner side of the turntable connecting plate is provided with a plurality of second air pipe connectors. The first air pipe connectors are connected to the second air pipe connectors, and the second air pipe connectors are connected to the side air passage and the internal air passage.

[0007] As a preferred technical solution, the ventilation between the outermost rotary nozzle on the ventilation rod and the rotary nozzle at the inner end of the ventilation rod are independent of each other.

[0008] As a preferred technical solution, an L-shaped component is connected between the turntable connecting plates, and the two sides of the L-shaped component are respectively screwed to the two turntable connecting plates.

[0009] As a preferred technical solution, the turntable connecting plate and the auxiliary connecting rod are integrally formed.

[0010] As a preferred technical solution, the side of the turntable connecting plate and the middle of the auxiliary connecting rod are both provided with air rod connection positions, and the air rod is locked to the air rod connection position by screws.

[0011] The beneficial effects of the present invention are as follows: a multi-segment pneumatic adsorption turntable is provided, in which the air path is hidden inside the turntable connecting plate, and the air passage extends to the middle of the turntable connecting plate through the air rod to adsorb the multi-segment. The design of the adsorption cavity position does not affect the contact of the multi-segment between the upper and lower probes during IV detection. While saving structural space, it can independently control the adsorption of several multi-segment, and can discharge multi-segment of different masses according to the detection results. Attached Figure Description

[0012] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments.

[0013] Figure 1 This is a schematic diagram of the overall structure of a multi-segmented pneumatic adsorption turntable as described in the embodiment.

[0014] Figure 2 This is a first cross-sectional view (cut along the auxiliary connecting rod) of a multi-segmented pneumatic adsorption turntable as described in the embodiment;

[0015] Figure 3 This is a second cross-sectional view (cut along the venting rod) of a multi-segmented pneumatic adsorption turntable as described in the embodiment.

[0016] Figures 1 to 3 middle:

[0017] 1. Turntable center; 2. Turntable connecting plate; 3. Turntable shaft; 4. Pneumatic components; 5. Adsorption chamber; 6. Auxiliary connecting rod; 7. Ventilation rod; 8. Turntable nozzle; 9. Side air passage; 10. Internal air passage; 11. First air pipe connector; 12. Second air pipe connector; 13. L-shaped part; 14. Air rod connection position. Detailed Implementation

[0018] The technical solution of the present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0019] like Figures 1 to 3As shown in this embodiment, a multi-segmented pneumatic adsorption turntable includes a turntable center 1 and a turntable connecting plate 2 surrounding the turntable center 1. A turntable shaft 3 is provided on the turntable center 1, and pneumatic components 4 are integrated on the outer side of the turntable shaft 3. An adsorption cavity 5 is provided in the center of the turntable connecting plate 2, and several auxiliary connecting rods 6 are provided in the adsorption cavity 5. A ventilation rod 7 is connected between the side of the turntable connecting plate 2 and the auxiliary connecting rods 6. Several turntable suction nozzles 8 are distributed on the ventilation rod 7. A side air passage 9 and an internal air passage 10 are provided inside the turntable connecting plate 2. The side air passage 9 is located on the side of the turntable connecting plate 2 and is connected to the outermost turntable suction nozzle 8 on the ventilation rod 7. The internal air passage 10 is located in the center of the turntable connecting plate 2 and is connected to the turntable suction nozzle 8 at the inner end of the ventilation rod 7.

[0020] The turntable shaft 3 drives the turntable center 1 to rotate. During the rotation of the turntable center 1, the turntable connecting plates 2 around it move. The air input part is concentrated on the pneumatic component 4, which is installed and fixed on the turntable shaft 3. When the multi-piece is adsorbed under negative pressure, the outermost multi-piece is handled by the two outer air passages on both sides of the turntable connecting plate 2 at the current station. Specifically, the turntable suction nozzle 8 connected to the side air passage 9 is adsorbed. The multi-piece in the middle is adsorbed by several turntable suction nozzles 8 connected to the internal air passage 10. In this embodiment, there are four multi-pieces each time. The two outermost pieces are controlled by the side air passage 9, and the two inner pieces are controlled by the internal air passage 10. In other embodiments, there can be six pieces, eight pieces, etc. The length of the internal air passage 10 and the corresponding ventilation rod 7 can be increased according to the production situation.

[0021] Several first air pipe connectors 11 are distributed on the pneumatic component 4, and several second air pipe connectors 12 are distributed on the inner side of the turntable connecting plate 2. The first air pipe connectors 11 and the second air pipe connectors 12 are connected, and the second air pipe connectors 12 are connected to the side air passage 9 and the internal air passage 10. The air passage outside the equipment is connected to the turntable shaft 3. The first air pipe connectors 11 and the second air pipe connectors 12 are then connected by air pipes, and the overall negative pressure passage is connected.

[0022] The ventilation between the outermost rotary nozzle 8 on the ventilation rod 7 and the innermost rotary nozzle 8 on the ventilation rod 7 is independent. The ventilation rod 7 spans several multi-segment sections. With independent ventilation paths, the adsorption of each multi-segment section is relatively independent. The loosening and tightening are determined according to the IV test results.

[0023] An L-shaped component 13 is connected between the turntable connecting plates 2. The two sides of the L-shaped component 13 are screwed to the two turntable connecting plates 2 respectively. The four turntable connecting plates 2 are connected by the L-shaped component 13 and surround the edge of the turntable center 1.

[0024] The turntable connecting plate 2 and the auxiliary connecting rod 6 are integrally formed. Furthermore, the side of the turntable connecting plate 2 and the middle of the auxiliary connecting rod 6 are provided with air rod connection positions 14. The air rod 7 is locked to the air rod connection position 14 by screws. The air rod 7, which has several turntable suction nozzles 8, is assembled with the auxiliary connecting rod 6 with air passage through the air rod connection position 14 to realize the function of independent adsorption of multiple segments.

[0025] It should be stated that the above specific embodiments are merely preferred embodiments of the present invention and the technical principles applied thereto. Within the scope of the technology disclosed in the present invention, any variations or substitutions that are easily conceived by those skilled in the art should be covered within the protection scope of the present invention.

Claims

1. A multi-segmented pneumatic adsorption turntable, characterized in that, The device includes a central turntable and a turntable connecting plate surrounding the central turntable. A turntable shaft is located on the central turntable, and pneumatic components are integrated on the outer side of the turntable shaft. An adsorption chamber is located in the central part of the turntable connecting plate, and several auxiliary connecting rods are arranged within the adsorption chamber. A ventilation rod is connected between the side of the turntable connecting plate and the auxiliary connecting rods, and several turntable suction nozzles are distributed on the ventilation rod. The turntable connecting plate has a side air passage and an internal air passage. The side air passage is located on the side of the turntable connecting plate and connects to the outermost turntable suction nozzle on the ventilation rod. The internal air passage is located in the central part of the turntable connecting plate and connects to the turntable suction nozzle at the inner end of the ventilation rod.

2. The multi-segmented pneumatic adsorption turntable according to claim 1, characterized in that, The pneumatic component has a plurality of first air pipe connectors distributed on it, and the inner side of the turntable connecting plate has a plurality of second air pipe connectors distributed on it. The first air pipe connectors are connected to the second air pipe connectors, and the second air pipe connectors are connected to the side air passage and the internal air passage.

3. The multi-segmented pneumatic adsorption turntable according to claim 1, characterized in that, The ventilation between the outermost rotary nozzle on the ventilation rod and the rotary nozzle at the inner end of the ventilation rod is independent of each other.

4. The multi-segmented pneumatic adsorption turntable according to claim 1, characterized in that, An L-shaped component is connected between the turntable connecting plates, and the two sides of the L-shaped component are screwed to the two turntable connecting plates respectively.

5. The multi-segmented pneumatic adsorption turntable according to claim 1, characterized in that, The turntable connecting plate and the auxiliary connecting rod are integrally formed.

6. The multi-segmented pneumatic adsorption turntable according to claim 1, characterized in that, The turntable connecting plate and the middle of the auxiliary connecting rod are both provided with air rod connection positions, and the air rod is locked to the air rod connection position by screws.

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