Novel electroplating uniformity test auxiliary device

By combining the design of the adsorption platform and the positioning element, the problems of fixture obstruction and vacuum adsorption failure in electroplating inspection are solved, achieving high precision and reliability in electroplating uniformity testing, and suitable for unobstructed measurement of complex structures.

CN121558796APending Publication Date: 2026-02-24GUANGZHOU HUIKE HIGH-TECH MATERIALS TECH CO LTD
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Patent Information

Application Number
CN202610077378.4
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2026-01-21
Publication Date
2026-02-24

AI Technical Summary

Technical Problem

In existing electroplating inspection technologies, fixture obstruction and vacuum adsorption failure lead to inaccurate coating thickness measurement. In particular, it is difficult to achieve precise positioning and unobstructed measurement in complex structures and weak areas, which affects the reliability of coating uniformity assessment.

Method used

The system employs an adsorption platform combined with positioning components and an adjustable adsorption zone. By combining pin-type positioning and vacuum adsorption, it ensures consistent workpiece positioning each time and provides unobstructed fixing force. The mechanical locking/releasing mechanism and partitioned material placement table design enable flexible adjustment of the piston position and maintenance of sealing.

Benefits of technology

It significantly improves the repeatability of XRF measurements and the reliability of coating uniformity assessment, expands the application boundaries of unobstructed fixation technology, and ensures complete exposure of critical areas and measurement accuracy.

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Abstract

The invention belongs to the technical field of electroplating detection, and discloses a novel electroplating uniformity test auxiliary device which comprises an adsorption platform, a positioning part is arranged on the adsorption platform, and the adsorption platform is provided with an adsorption area; a rigid / elastic positioning piece and an adjustable adsorption area are integrated on an adsorption platform, so that in the clamping process of a workpiece, firstly, an accurate space reference is established through a plug pin type positioning piece, and then uniformly-distributed non-contact fixing force is provided through lower vacuum adsorption. According to the composite mode, physical shielding of traditional clamps such as pressing plates and screws on an X-ray measurement path is avoided, and particularly it is guaranteed that key areas such as edges and hole peripheries are completely exposed; and meanwhile, the mechanical positioning ensures that the clamping postures are consistent each time, so that the repeatability of multi-point XRF measurement data and the credibility of coating uniformity evaluation are remarkably improved.
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Description

Technical Field

[0001] This invention belongs to the field of electroplating testing technology, specifically relating to a novel auxiliary device for testing electroplating uniformity. Background Technology

[0002] In electroplating processes, the uniformity of coating thickness is a key quality indicator, directly affecting product reliability, corrosion resistance, and service life. Currently, X-ray fluorescence spectrometry (XRF) has become the mainstream method for coating thickness detection due to its advantages of speed, non-destructive testing, and quantifiability, and is widely used in production line control and incoming material inspection. However, in practical applications, achieving precise positioning, unobstructed measurement, avoidance of fluorescence interference, and adaptation to complex structures still present significant challenges.

[0003] Firstly, while traditional mechanical fixtures (such as clamping plates, lever mechanisms, and screw clamps) possess strong clamping capabilities and are suitable for workpieces of various shapes, their inherent limitations are becoming increasingly prominent. The clamping mechanism often directly covers or is adjacent to the area to be measured, preventing X-rays from directly reaching the target location. This is especially problematic when inspecting thin areas or edge regions in electroplating, often forcing the abandonment of real data acquisition due to obstruction. Even with locating pins, without an effective auxiliary contact mechanism, the workpiece may still experience posture deviations during each clamping due to slight warping, surface unevenness, or assembly gaps. This severely affects the consistency of multi-point measurement results, thereby weakening the reliability of the assessment of coating uniformity.

[0004] Secondly, vacuum adsorption, with its "non-contact, fully exposed front" characteristics, is widely used for fixing PCB boards and thin sheet metal workpieces, offering a natural advantage in avoiding obstruction. However, its applicability is severely limited when dealing with electroplated parts with mounting holes and heat dissipation holes. The pores can disrupt the vacuum seal, leading to insufficient adsorption force or even complete failure, making stable and reliable fixing difficult. More importantly, vacuum adsorption can only achieve "fixation," not "precise alignment." Without additional mechanical references or guiding structures, relying solely on operator visual placement can easily introduce translational or rotational errors, causing positional shifts in the same tooth surface, edge, or critical feature area during repeated measurements. This ultimately leads to distorted plating uniformity data, affecting process judgment and quality control decisions. Summary of the Invention

[0005] In view of this, the purpose of the present invention is to provide a novel auxiliary device for testing electroplating uniformity, so as to solve the problems existing in the above-mentioned background art.

[0006] To solve the above-mentioned technical problems, the technical solution of the present invention is a novel auxiliary device for testing electroplating uniformity, including an adsorption platform equipped with a positioning element and an adsorption area; the positioning element performs mechanical positioning of the workpiece to be tested to ensure that the workpiece is placed in the same position each time; and the adsorption area provides an unobstructed fixing force for the workpiece to be tested, thereby realizing auxiliary positioning and fixing during electroplating uniformity testing.

[0007] Preferably, the adsorption platform includes a material placement table with a movable adsorption cavity. The end of the adsorption cavity facing the material placement table is open, and an external channel that cooperates with the adsorption cavity is provided on the material placement table. The adsorption cavity and the material placement table cooperate to realize the adsorption area of ​​the adsorption platform. By moving the position of the adsorption cavity on the material placement table, the position of the absorption area on the adsorption platform changes, thereby realizing the adsorption and fixation of workpieces of different specifications.

[0008] Furthermore, a piston is slidably disposed within the adsorption chamber, the piston being perpendicular to the material placement platform. The piston divides the adsorption chamber into an adjustment chamber and a generation chamber, with the generation chamber realizing the adsorption function of the adsorption zone. By changing the position of the piston within the adsorption chamber, the size of the generation chamber changes, thereby controlling the area of ​​the adsorption zone on the adsorption platform.

[0009] Furthermore, a sealing ball screw is provided inside the adsorption chamber, and the length direction of the sealing ball screw is parallel to the sliding direction of the piston; the sealing ball screw is connected to the piston, and the sealing ball screw drives the piston to move inside the adsorption chamber.

[0010] Furthermore, at least one side of the opening of the adsorption chamber is provided with a locking strip, the locking strip having a limiting protrusion that restricts the movement of the piston, and the locking strip is slidably disposed on the side wall of the adsorption chamber; a control element for controlling the sliding of the locking strip is provided on one side of the opening of the adsorption chamber, and a first spring is provided between the control element and the side wall of the adsorption chamber; by pressing the control element to overcome the elastic force of the first spring, the locking strip is moved, so that the limiting protrusion releases the constraint on the movement of the piston, allowing the piston to slide within the adsorption chamber to achieve position changes.

[0011] Furthermore, when the positioning strip and the control component are located on different sides of the adsorption chamber opening, the positioning strip and the control component are directly connected, allowing the control component to drive the positioning strip to move in the same direction, thereby removing the constraint on the piston movement; when the positioning strip and the control component are located on the same side of the adsorption chamber opening, the opposite sides of the positioning strip and the control component each have transmission teeth, and an intermediate gear is provided between the positioning strip and the control component, with the intermediate gear meshing with the transmission teeth; under the action of the intermediate gear and the transmission teeth, the control component drives the positioning strip to move in the opposite direction, thereby removing the constraint on the piston movement.

[0012] Furthermore, the material placement platform is divided into an action area and an adjustment area. The adjustment area is located on the side of the control component on the adsorption chamber. The action area of ​​the material placement platform has holes arranged in a rectangular array as external channels. These external channels are only located in the action area. The material placement platform has a limit block on the back of the adjustment area. When the adsorption chamber retracts into the adjustment area, the limit block acts as a pressing force to remove the constraint on the piston's movement. Since the adjustment area does not have an external channel, the adsorption chamber is in a sealed state. The position of the piston is adjusted by the suction and blowing of the generating chamber and the adjustment chamber.

[0013] Furthermore, the positioning component is divided into a rigid component and an elastic component, both of which have pins that are adapted to the holes; the pins are placed in the holes to fix the positioning component, thereby achieving mechanical positioning of the workpiece; by changing different holes and pin connections, mechanical positioning of workpieces of different specifications can be achieved.

[0014] Furthermore, the elastic element includes a fixed base connected to the pin, and an elastic element is provided on the fixed base. The elastic element is an elastic material that cooperates with the second spring and the moving block or covers the surface of the fixed base.

[0015] The main technical effects of this invention are reflected in the following aspects: This invention integrates rigid / elastic positioning components and an adjustable adsorption zone on an adsorption platform. During workpiece clamping, a precise spatial reference is first established by the pin-type positioning component, followed by uniformly distributed non-contact fixing force provided by the vacuum adsorption below. This composite method avoids the physical obstruction of the X-ray measurement path by traditional clamps such as pressure plates and screws, especially ensuring complete exposure of critical areas such as edges and around holes. Simultaneously, mechanical positioning ensures consistent clamping posture each time, significantly improving the repeatability of multi-point XRF measurement data and the reliability of coating uniformity assessment.

[0016] This invention designs the adsorption chamber to be movable on the material placement platform, and uses a built-in piston to separate the generating chamber and the adjusting chamber, enabling the relocation of the adsorption area and dynamic adjustment of the effective area. When dealing with electroplated parts of different sizes, with different opening layouts, or with complex shapes, users can move the adsorption chamber to the solid area of ​​the workpiece to avoid through holes, and adjust the piston position to reduce or increase the adsorption area, thereby maintaining an effective vacuum seal. This fundamentally solves the problem of traditional vacuum adsorption failing due to air leakage on perforated workpieces, significantly expanding the application boundaries of unobstructed fixation technology.

[0017] Compared to the sealed ball screw used in Embodiment 1, this embodiment innovatively employs a mechanical locking / releasing mechanism consisting of a control component, a locking strip, a limiting protrusion, and a first spring. This structure releases the axial constraint on the piston simply by pressing the control component, making operation simple and eliminating the need for a motor or complex sealed transmission system. Furthermore, the bidirectional layout design, combining an intermediate gear or direct drive, adapts to different space constraints, ensuring reliable operation even in a compact structure.

[0018] This invention divides the material placement platform into an action zone and an adjustment zone: the action zone has external channels for normal adsorption and detection, while the adjustment zone is perforated and has a limiting block on its back. When the piston position needs to be adjusted, the adsorption chamber is moved to the adjustment zone, and the limiting block automatically triggers the locking and unlocking mechanism. The piston displacement is controlled by an air passage while the system is sealed. This partitioning mechanism ensures that the adjustment process does not contaminate or interfere with the measurement environment of the action zone, while also preventing mis-adsorption or airtightness failure caused by adjustment in the perforated area, thus improving operational safety and system stability. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the structure of the present invention; Figure 2 for Figure 1 Structural diagram of the centrally located material handling platform; Figure 3 for Figure 1 A structural diagram of the piston using a sealed ball screw drive; Figure 4 for Figure 1 A schematic diagram showing the structure of the center positioning strip and control components on different sides; Figure 5 for Figure 1 A schematic diagram showing that the center locking strip and control components are on the same side; Figure 6 for Figure 1 Structural diagram of the positioning component; In the diagram: 1. Adsorption platform; 11. Material placement platform; 111. Action area; 112. Adjustment area; 113. Hole; 12. Adsorption chamber; 13. Piston; 14. Sealing ball screw; 15. Positioning strip; 151. Limiting protrusion; 152. Control component; 153. First spring; 154. Intermediate gear; 16. Adjustment chamber; 17. Generating chamber; 2. Positioning component; 21. Pin. Detailed Implementation

[0020] The specific embodiments of the present invention will be further described in detail below with reference to the accompanying drawings, so as to make the technical solution of the present invention easier to understand and master. In the embodiments, it should be understood that the terms "middle," "upper," "lower," "top," "right side," "left end," "above," "back," "center," etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present invention. In addition, unless otherwise specified in this specific embodiment, the connection or fixing method between components can be achieved by bolt fixing, pin fixing, or pin connection commonly used in the prior art, etc., and therefore will not be described in detail in this embodiment.

[0021] The electroplating uniformity testing auxiliary device provided by this invention is mainly used for non-destructive testing and uniformity evaluation of coating thickness in electroplating processes. However, its application scope is not limited to this. It can also be applied to other production processes with similar positioning, unobstructed fixation and surface coating testing requirements, such as electroless plating, spraying, anodizing, PVD / CVD thin film preparation, etc.

[0022] Furthermore, as common knowledge in this industry, the X-ray fluorescence spectrometry (XRF) detection principle, the basic structure of the vacuum adsorption system, the spring reset mechanism, the gear transmission method, and the workpiece reference positioning method mentioned above are all technical means that are generally known and routinely used by those skilled in the art. Therefore, their principles and structures will not be elaborated upon further.

[0023] Example 1 This embodiment provides a novel auxiliary device for testing electroplating uniformity, aiming to solve the problem of coating thickness measurement errors caused by fixture obstruction, inaccurate positioning, or adsorption failure in the prior art. See also Figure 1 The auxiliary device includes an adsorption platform 1, on which a positioning element 2 is provided. The adsorption platform 1 has an adsorption area. The positioning element 2 performs mechanical positioning of the workpiece to be tested, ensuring that the workpiece is placed in the same position each time. The adsorption area provides an unobstructed fixing force for the workpiece to be tested, realizing auxiliary positioning and fixing during electroplating uniformity testing, thereby achieving reliable constraint on the workpiece. This facilitates non-interference and highly repeatable thickness detection of key areas (such as edges, hole peripheries, weak areas, etc.) by X-ray fluorescence spectrometry (XRF).

[0024] Preferred, see Figure 2The adsorption platform 1 includes a material placement table 11, which has a movable adsorption cavity 12. The adsorption cavity 12 is equipped with an independent movement control component (telescopic rod, slide, etc.). The end of the adsorption cavity 12 facing the material placement table 11 is open, and the material placement table 11 has an external channel that cooperates with the adsorption cavity 12. The adsorption area of ​​the adsorption platform 1 is realized by the cooperation of the adsorption cavity 12 and the material placement table 11. By moving the position of the adsorption cavity 12 on the material placement table 11, the position of the adsorption area on the adsorption platform 1 changes, thereby achieving the adsorption and fixation of workpieces of different specifications. By adjusting the relative position of the adsorption cavity 12 on the material placement table 11, the layout of the adsorption area can be dynamically adjusted to adapt to electroplated workpieces of different sizes, shapes, or opening structures, thus improving the versatility of the device.

[0025] Further, see Figure 3 A piston 13 is slidably disposed within the adsorption chamber 12, perpendicular to the material placement platform 11. The piston 13 divides the adsorption chamber 12 into an adjustment chamber 16 and a generating chamber 17, with the generating chamber 17 providing the adsorption function of the adsorption zone. The generating chamber 17 is connected to an external vacuum source via an external channel to generate negative pressure adsorption force. By driving the piston 13 to move axially along the adsorption chamber 12, the effective volume of the generating chamber 17 can be changed, thereby dynamically adjusting the adsorption area and adsorption intensity to achieve adaptive matching for different workpiece surface conditions (such as flatness and porosity). By changing the position of the piston 13 within the adsorption chamber 12, the size of the generating chamber 17 changes, thus controlling the adsorption area on the adsorption platform 1.

[0026] To achieve precise and stable displacement of the piston 13, a sealed ball screw 14 is installed inside the adsorption chamber 12. The length direction of the sealed ball screw 14 is parallel to the sliding direction of the piston 13. The sealed ball screw is connected to the piston 13, and drives the piston 13 to move within the adsorption chamber 12. When the screw rotates, it drives the piston 13 to move linearly within the adsorption chamber 12 through the ball transmission mechanism, thereby precisely controlling the volume of the generating chamber 17 and ensuring the sealing and repeatability of the adjustment process.

[0027] Example 2 This embodiment provides a novel auxiliary device for testing electroplating uniformity. Compared with Embodiment 1, the sealed ball screw 14 structure is eliminated, and a mechanical positioning mechanism and a partitioned material placement table 11 are adopted instead.

[0028] Preferred, see Figure 4 , Figure 5To achieve reliable locking and convenient adjustment of the piston 13 position, at least one side of the opening of the adsorption chamber 12 is provided with a locking strip 15. The locking strip 15 is slidably disposed on the side wall of the adsorption chamber 12. The locking strip 15 has a limiting protrusion 151 that restricts the movement of the piston 13. The limiting protrusion 151 faces the piston 13. When the limiting protrusion 151 is embedded in the corresponding groove on the outer periphery of the piston 13 or abuts against its end face, it can restrict the axial movement of the piston 13 in the adsorption chamber 12, thereby fixing the current adsorption area.

[0029] Furthermore, a control element 152 for controlling the sliding of the locking strip 15 is provided on one side of the opening of the adsorption chamber 12. A first spring 153 is provided between the control element 152 and the side wall of the adsorption chamber 12. Under normal conditions, the first spring 153 pushes the control element 152 to reset, so that the locking strip 15 is in a locked state. By pressing the control element 152 to overcome the elastic force of the first spring 153, the locking strip 15 is moved, so that the limiting protrusion 151 releases the constraint on the movement of the piston 13. At this time, the piston 13 can slide along the adsorption chamber 12 under the action of external force (such as manual push and pull or air pressure difference) to realize position adjustment.

[0030] Based on the relative arrangement of the positioning strip 15 and the control element 152 on both sides of the opening of the adsorption chamber 12, the transmission method is divided into two cases: See Figure 4 When the positioning strip 15 and the control element 152 are located on different sides of the opening of the adsorption chamber 12, the positioning strip 15 and the control element 152 are directly connected, allowing the control element 152 to drive the positioning strip 15 to move in the same direction, thereby removing the constraint on the movement of the piston 13; see also Figure 5 When the positioning strip 15 and the control element 152 are located on the same side of the opening of the adsorption chamber 12, the opposite sides of the positioning strip 15 and the control element 152 are provided with transmission teeth, and an intermediate gear 154 is provided between the positioning strip 15 and the control element 152. The intermediate gear 154 meshes with the transmission teeth. Under the action of the intermediate gear 154 and the transmission teeth, the control element 152 drives the positioning strip 15 to move in the opposite direction, so as to release the constraint on the movement of the piston 13.

[0031] Further, see Figure 3The material placement platform 11 is divided into an action area 111 and an adjustment area 112. The adjustment area 112 is located on the side of the control component 152 on the adsorption chamber 12. The action area 111 is used to place the workpiece to be tested. The action area 111 of the material placement platform 11 has holes 113. The holes 113 are distributed in a rectangular array in the action area 111 as external channels. The external channels are only located in the action area 111 to ensure that the area to be tested is unobstructed and the adsorption is effective during XRF detection. The material placement platform 11 has a limit block on the back of the adjustment area 112. When the adsorption chamber 12 retracts into the adjustment area 112, the limit block achieves a pressing effect to remove the constraint on the movement of the piston 13. Since the adjustment area 112 does not have an external channel, the adsorption chamber 12 is in a sealed state. The position of the piston 13 is adjusted by the suction and blowing of the generating chamber 17 and the adjustment chamber 16. When the position of piston 13 needs to be adjusted, the entire adsorption chamber 12 is moved horizontally along the platform to the adjustment area 112. At this time, since the adjustment area 112 has no external passage, the adsorption chamber 12 is in a completely sealed state. Continue to push the adsorption chamber 12 until it contacts the limiting block on the back of the platform. The limiting block applies pressure to the control element 152, automatically triggering the locking mechanism to unlock (i.e., simulating manual pressing), thereby releasing piston 13. Subsequently, air can be alternately drawn into or blown into the generating chamber 17 and the adjustment chamber 16 through the external air passage, using the air pressure difference to drive piston 13 to move precisely to the target position within the sealed chamber. After adjustment, the adsorption chamber 12 is moved back to the action area 111, and the locking mechanism automatically resets and locks under the action of the first spring 153, restoring the adsorption function.

[0032] Preferred, see Figure 6 The positioning component 2 consists of a rigid component and an elastic component, both of which have pins 21 that fit into the holes 113. Placing the pins 21 within the holes 113 fixes the positioning component 2, achieving mechanical positioning of the workpiece. By changing the connections between different holes 113 and pins 21, mechanical positioning of workpieces of different specifications can be achieved. Since the holes 113 are arranged in a rectangular array, users can select the appropriate combination of holes 113 based on the positioning reference hole positions of different workpiece specifications, and match pins 21 of corresponding size or layout, achieving rapid adaptation and precise positioning of various workpieces, significantly improving the versatility and changeover efficiency of the device.

[0033] The rigid component employs a fixed pin 21 structure, suitable for workpieces with stable shapes and small assembly gaps, providing highly repeatable rigid constraints. The elastic component compensates for clamping deviations caused by manufacturing tolerances, minor warping, or surface unevenness, preventing stress deformation or poor contact due to forced positioning. Specifically, the elastic component includes a fixed base connected to the pin 21, with an elastic element on the fixed base. This elastic element is either a second spring and a movable block working together, or an elastic material covering the surface of the fixed base. The elastic buffer assembly consists of a second spring and a movable block: the movable block is connected to the pin 21 and can slide along the pin 21 axially within the fixed base; the second spring provides a restoring force, allowing the pin 21 to automatically reset and maintain contact preload after being compressed; or it can be an elastic material layer (such as polyurethane, silicone, or rubber) covering the surface of the fixed base, absorbing assembly errors through the material's own compression and rebound characteristics to achieve flexible fit. By combining rigid and elastic components, this device can ensure the geometric consistency of key positioning points and adapt to the actual assembly state of the workpiece. While ensuring the repeatability accuracy of XRF measurements, it effectively improves the clamping success rate and ease of operation.

[0034] Of course, the above are just typical examples of the present invention. In addition, the present invention may have many other specific embodiments. All technical solutions formed by equivalent substitution or equivalent transformation fall within the scope of protection claimed by the present invention.

Claims

1. A novel auxiliary device for testing electroplating uniformity, characterized in that, Includes an adsorption platform, which is equipped with a positioning element and has an adsorption area; The positioning component performs mechanical positioning of the workpiece to be tested, ensuring that the workpiece is placed in the same position each time; then the adsorption area provides an unobstructed fixing force for the workpiece to be tested, realizing auxiliary positioning and fixation during electroplating uniformity testing.

2. The novel electroplating uniformity testing auxiliary device as described in claim 1, characterized in that, The adsorption platform includes a material placement platform with a movable adsorption cavity. The adsorption cavity is open at one end facing the material placement platform, and an external channel that cooperates with the adsorption cavity is provided on the material placement platform. The adsorption chamber and the material placement platform work together to form the adsorption area of ​​the adsorption platform; By moving the adsorption chamber on the material placement platform, the position of the absorption area on the adsorption platform changes, thereby achieving the adsorption and fixation of workpieces of different specifications.

3. The novel electroplating uniformity testing auxiliary device as described in claim 2, characterized in that, A piston is slidably disposed inside the adsorption chamber. The piston is perpendicular to the material placement platform. The piston divides the adsorption chamber into an adjustment chamber and a generation chamber. The generation chamber realizes the adsorption function of the adsorption zone. By changing the position of the piston within the adsorption chamber, the size of the generating chamber changes, thereby controlling the area of ​​the adsorption zone on the adsorption platform.

4. The novel electroplating uniformity testing auxiliary device as described in claim 3, characterized in that, A sealed ball screw is provided inside the adsorption chamber, and the length direction of the sealed ball screw is parallel to the sliding direction of the piston. The sealed ball screw is connected to the piston, and the sealed ball screw drives the piston to move within the adsorption chamber.

5. The novel electroplating uniformity testing auxiliary device as described in claim 3, characterized in that, At least one side of the opening of the adsorption chamber is provided with a locking strip, the locking strip has a limiting protrusion that restricts the movement of the piston, and the locking strip is slidably disposed on the side wall of the adsorption chamber. A control component for controlling the sliding of the locking strip is provided on one side of the opening of the adsorption chamber, and a first spring is provided between the control component and the side wall of the adsorption chamber. By pressing the control component to overcome the elastic force of the first spring, the locking strip is moved, which causes the limiting protrusion to remove the constraint on the piston movement, allowing the piston to slide in the adsorption chamber to achieve position changes.

6. The novel electroplating uniformity testing auxiliary device as described in claim 5, characterized in that, When the positioning strip and the control component are located on different sides of the opening of the adsorption chamber, the positioning strip and the control component are directly connected, allowing the control component to drive the positioning strip to move in the same direction, thereby removing the constraint on the piston movement. When the positioning bar and the control component are located on the same side of the opening of the adsorption chamber, the opposite sides of the positioning bar and the control component have transmission teeth, and an intermediate gear is provided between the positioning bar and the control component. The intermediate gear meshes with the transmission teeth. Under the action of the intermediate gear and the transmission teeth, the control component drives the positioning bar to move in the opposite direction, so as to remove the constraint on the piston movement.

7. The novel electroplating uniformity testing auxiliary device as described in claim 6, characterized in that, The material placement platform is divided into an action area and an adjustment area. The adjustment area is located on the side where the control component is located on the adsorption chamber. The action area of ​​the material placement platform has holes. The holes are distributed in a rectangular array in the action area as external channels. The external channels are only located in the action area. The material placement platform has a limit block on the back of the adjustment area. When the adsorption chamber retracts into the adjustment zone, the limiting block applies pressure to remove the constraint on the piston's movement. Since the adjustment zone has no external passage, the adsorption chamber is sealed. The position of the piston is then adjusted by the intake and exhaust of the generating and adjusting chambers.

8. The novel electroplating uniformity testing auxiliary device as described in claim 7, characterized in that, The positioning component is divided into a rigid component and an elastic component, and both the rigid component and the elastic component have a pin that is adapted to the hole; The pin is placed in the hole to fix the positioning component, thereby achieving mechanical positioning of the workpiece; By changing different holes and pin connections, mechanical positioning of workpieces of different specifications can be achieved.

9. The novel electroplating uniformity testing auxiliary device as described in claim 8, characterized in that, The elastic element includes a fixed base connected to a pin, and an elastic element is provided on the fixed base. The elastic element is an elastic material that cooperates with or covers the surface of the fixed base, which is a second spring and a movable block.

Citation Information

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