Photoetching microscope

Abstract

The invention relates to a photoetching microscope, and belongs to the technical field of photoetching machines, the photoetching microscope comprises a shell, an eyepiece, a reflector and an objective lens, an air outlet pipe is arranged in the shell, the air outlet pipe is communicated with an external air supply device, a plurality of air outlets are formed in the air outlet pipe, the air outlet pipe is perpendicular to the side wall used for being arranged on the photoetching machine, and the air outlet pipe is rotatably arranged in the shell; the air outlet pipe rotates in the axis direction of the air outlet pipe, the air outlet pipe is movably arranged in the shell, the first driving part is used for driving the air outlet pipe to rotate, and the second driving part is used for driving the air outlet pipe to move in the shell to change the position of the air outlet pipe so as to remove impurities on the reflecting mirror. The effect of improving the reflection efficiency of the reflector is achieved.

Description

Technical Field

[0001] This application relates to the field of photolithography technology, and in particular to a photolithography microscope. Background Technology

[0002] A lithography machine mainly includes major subsystems such as an exposure optical system, an alignment microscope, a workpiece stage, an electrical control system, a microcontroller system, and a video imaging system. The alignment microscope is used to observe the alignment marks on the mask and sample during alignment, and consists of an illumination power supply, a microscope body, an eyepiece, and an objective lens.

[0003] The maximum size of silicon wafer observable by the alignment microscope is Φ80mm. Because the microscope has two adjustable objectives spaced a certain distance apart, corresponding marks or patterns on the silicon wafer and mask, also spaced a certain distance apart, can be imaged within the microscope's field of view for simultaneous observation and alignment. The microscope can be focused as a whole or relative to the left and right fields of view using the focusing and relative focusing knobs; the field-of-view switching handle allows simultaneous observation of both fields, observation of only the left field of view, or observation of only the right field of view. Generally, there is a central dividing line within the eyepiece. The alignment within the field of view to the left of the dividing line represents the alignment of the silicon wafer and mask within a small area in the left half (this area corresponds to the half-field of view when the left objective is in a certain position). Similarly, the alignment to the right of the central dividing line represents the alignment of the silicon wafer and mask within a small area in the right half. To clearly see the alignment within the entire left or right objective field of view, the field-of-view switching lever can be pulled or pushed.

[0004] However, the microscope housing is connected to the environment due to the movement notch of the objective lens. This allows small impurities in the environment to easily enter the housing through the movement notch and adhere to the mirror, thus reducing the mirror's reflectivity to the light source. Summary of the Invention

[0005] To improve the reflection efficiency of a mirror, this application provides a photolithography microscope.

[0006] The photolithography microscope provided in this application adopts the following technical solution: A photolithography microscope includes a housing, an eyepiece, a reflecting mirror, and an objective lens. The housing is used to mount a photolithography machine. The eyepiece is mounted on the top of the housing, and the objective lens is mounted on the bottom of the housing. Multiple reflecting mirrors are arranged inside the housing. A light source is arranged on the side wall of the housing. The light emitted by the light source passes through the reflecting mirror and then directly hits the objective lens. When the light passes through the reflecting mirror, some of the light passes through the reflecting mirror and directly hits the reflecting mirror, and then the remaining reflecting mirrors reflect the light and then directly hit the eyepiece. An air outlet duct is provided inside the housing and is connected to an external air supply device. The air outlet duct has multiple air outlets and is perpendicular to the side wall of the lithography machine. The air outlet duct is rotatably disposed inside the housing and rotates about its axial direction. The air outlet duct is also movable inside the housing. The housing also includes a first driving member and a second driving member. The first driving member is used to drive the air outlet duct to rotate, and the second driving member is used to drive the air outlet duct to move inside the housing to change its position in order to remove impurities on the mirror.

[0007] Optionally, the outer casing has a mounting notch on the side wall facing the lithography machine, and a mounting plate is provided on the outer casing through the mounting notch. The air outlet pipe is provided on the mounting plate, and the length direction of the air outlet pipe is perpendicular to the mounting plate. The air outlet pipe is rotatably provided on the mounting plate and movable on the mounting plate. The first driving component includes a first motor provided on the mounting plate, and the air outlet pipe is provided on the output shaft of the first motor.

[0008] Optionally, the second driving component includes a second motor, a moving guide rail, and a guide rod mounted on the mounting plate. The moving guide rail is connected end to end in a ring shape, and the moving guide rail as a whole is rectangular. The second motor is located at the center of the moving guide rail. A mounting base is slidably mounted on the moving guide rail. The first motor is mounted on the mounting base. The guide rod is located between the second motor and the mounting base to connect the output shaft of the second motor and the mounting base. The guide rod is hinged to the mounting base and has a telescopic structure. The output shaft of the second motor drives the guide rod to rotate, thereby driving the mounting base to move on the moving guide rail.

[0009] Optionally, the mounting plate is provided with an air inlet pipe that penetrates the mounting plate and enters the housing. The mounting plate is provided with an annular pipe that sleeves the output shaft of the second motor. The annular pipe is located between the second motor body and the guide rod. An air outlet notch is opened in the inner ring of the annular pipe, and the air outlet notch faces the output shaft of the second motor. A ventilation channel is opened in the output shaft of the second motor, and the air outlet notch communicates with the ventilation channel. The guide rod is hollow and communicates with the ventilation channel. A connecting pipe is provided on the mounting base, and the connecting pipe communicates with the guide rod and the air outlet pipe. Clean gas from the outside of the housing enters the annular pipe through the air inlet pipe, then enters the output shaft of the second motor through the annular pipe, and is then sent into the air outlet pipe by the guide rod and the connecting pipe.

[0010] Optionally, the connecting pipe has an installation hole, the air outlet pipe is rotatably installed inside the connecting pipe through the installation hole, and the part of the air outlet pipe that is sleeved inside the connecting pipe has a connection hole, and the connecting pipe and the air outlet pipe are connected through the connection hole.

[0011] Optionally, an arc-shaped cover plate is provided on the air outlet duct and covering the air outlet. Along the sliding direction of the air outlet duct and the moving guide rail, a guide notch is provided on the cover plate, and the clean gas passes through the guide notch and acts obliquely on the reflector.

[0012] Optionally, the mounting plate has multiple layers, and a connecting rod is provided between adjacent mounting plates. The connecting rod is perpendicular to the mounting plate, and the air outlet pipe is located on the innermost mounting plate. The entire mounting plate can be slid to adjust the position of the air outlet pipe inside the housing, thereby adjusting the cleaning position of the reflector.

[0013] Optionally, the mounting plate has a fixing hole on its peripheral wall, and a fixing rod that is inserted into the fixing hole is slidably disposed on the inner wall of the mounting notch.

[0014] Optionally, the side wall of the mounting plate is provided with a positioning rod, the positioning rod connects all mounting plates, the cross section of the positioning rod is dovetail-shaped, and the inner wall of the outer shell located at the mounting notch is provided with a dovetail groove for the positioning rod to slide.

[0015] Optionally, a corrugated pipe is provided inside the guide rod, and the guide rod is connected to the ventilation channel and the connecting pipe through the corrugated pipe.

[0016] In summary, this application includes at least one of the following beneficial technical effects: When the brightness of the light source decreases as observed through the eyepiece, the first driving component first drives the exhaust pipe to rotate, injecting clean gas into the housing. The clean gas flows within the housing, removing impurities from the reflector and thus improving its reflection efficiency, thereby increasing the brightness observed through the eyepiece. Simultaneously, the second driving component moves the exhaust pipe within the housing, adjusting its position to change the location where the clean gas acts on the reflector, thereby increasing the effective range of the clean gas and improving the cleaning effect and efficiency of the reflector. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall structure of a photolithography microscope according to an embodiment of this application; Figure 2 This is a schematic diagram of the internal structure of a photolithography microscope according to an embodiment of this application; Figure 3 This is a schematic diagram of the fit between the mounting plate and the outer shell in a photolithography microscope according to an embodiment of this application; Figure 4 This is a schematic diagram of the cooperation between the mounting plate and the reflector in a photolithography microscope according to an embodiment of this application; Figure 5 This is a schematic diagram of the structure of a mounting plate in a photolithography microscope according to an embodiment of this application; Figure 6 This is a cross-sectional view of a mounting base in a photolithography microscope according to an embodiment of this application; Figure 7 yes Figure 6 An enlarged schematic diagram of part A in the middle; Figure 8 yes Figure 6 Enlarged diagram of part B.

[0018] Explanation of reference numerals in the attached drawings: 1. Outer shell; 2. Eyepiece; 3. Reflector; 4. Objective lens; 5. Air outlet duct; 6. Air outlet; 7. Mounting notch; 8. Mounting plate; 9. First motor; 10. Second motor; 11. Moving guide rail; 12. Guide rod; 121. Sleeve; 122. Sliding tube; 13. Mounting base; 14. Air inlet duct; 15. Annular tube; 16. Air outlet notch; 17. Ventilation channel; 18. Connecting pipe; 19. Corrugated pipe; 20. Mounting hole; 21. Cover plate; 22. Guide notch; 23. Connecting rod; 24. Fixing hole; 25. Fixing rod; 26. Positioning rod; 27. Dovetail groove. Detailed Implementation

[0019] The following is in conjunction with the appendix Figure 1 - Appendix Figure 8 This application will be described in further detail.

[0020] This application discloses a photolithography microscope. (Refer to...) Figure 1 and Figure 2 The photolithography microscope includes a housing 1, an eyepiece 2, a reflector 3, and an objective lens 4. The housing 1 is used to mount the photolithography machine. The eyepiece 2 is mounted on the top of the housing 1, and the objective lens 4 is mounted on the bottom of the housing 1. Multiple reflectors 3 are mounted inside the housing 1. A light source is mounted on the side wall of the housing 1. The light emitted by the light source passes through the reflector 3 and then shines directly on the objective lens 4. When the light passes through the reflector 3, some of the light passes through the reflector 3 and shines directly on the reflector 3. The remaining reflectors 3 then reflect the light and shine it directly on the eyepiece 2. Reference Figure 3 and Figure 4 The outer casing 1 is provided with an air outlet 5, which is connected to an external air supply device. The air outlet 5 has multiple air outlets 6. The air outlet 5 is perpendicular to the side wall of the lithography machine. The air outlet 5 is rotatably disposed inside the outer casing 1. The air outlet 5 rotates about the axis of the air outlet 5. The air outlet 5 is movable disposed inside the outer casing 1. It also includes a first driving member and a second driving member. The first driving member is used to drive the air outlet 5 to rotate, and the second driving member is used to drive the air outlet 5 to move inside the outer casing 1 to change the position of the air outlet 5 in order to remove impurities on the reflector 3.

[0021] When the brightness of the light source decreases as observed through eyepiece 2, the first driving component first drives the exhaust pipe 5 to rotate. The rotation of the exhaust pipe 5 injects clean gas into the housing 1. The clean gas flows within the housing 1 and removes impurities from the reflector 3, thereby improving the reflection efficiency of the reflector 3 and increasing the observation brightness through eyepiece 2. Simultaneously, the second driving component drives the exhaust pipe 5 to move within the housing 1. As the exhaust pipe 5 moves within the housing 1, its position is adjusted, thereby changing the position where the clean gas acts on the reflector 3. This increases the effective range of the clean gas and improves the cleaning effect and efficiency of the reflector 3.

[0022] Reference Figure 3 , Figure 4 and Figure 5 In this embodiment, the outer casing 1 has a rectangular mounting notch 7 on its side wall facing the lithography machine. A mounting plate 8 is mounted on the outer casing 1 through the mounting notch 7 and is embedded in the mounting notch 7. An air outlet duct 5 is mounted on the mounting plate 8, with its length direction perpendicular to the mounting plate 8. The air outlet duct 5 is rotatably mounted on the mounting plate 8 and can be moved on the mounting plate 8. The first driving component includes a first motor 9 mounted on the mounting plate 8, and the air outlet duct 5 is mounted on the output shaft of the first motor 9. When the air outlet duct 5 rotates, the first motor 9 is started, driving the air outlet duct 5 to rotate. The air outlet duct 5 rotates along the length direction of the output shaft of the first motor 9, making the operation simple and convenient. At this time, the second driving component drives the air outlet duct 5 to move on the mounting plate 8, thereby changing the position of the air outlet 6 on the mounting plate 8. The operation is simple and convenient.

[0023] Reference Figure 6 , Figure 7 and Figure 8 In this embodiment, the second driving component includes a second motor 10, a moving guide rail 11, and a guide rod 12 mounted on a mounting plate 8. The moving guide rail 11 is connected end to end in a ring shape, and the moving guide rail 11 is generally rectangular. The second motor 10 is located at the center of the moving guide rail 11, and the body of the second motor 10 is embedded in the mounting plate 8. The length direction of the output shaft of the second motor 10 is perpendicular to the mounting plate 8. A mounting seat 13 is slidably mounted on the moving guide rail 11 and is slidably engaged with the moving guide rail 11. A first motor 9 is mounted on the mounting seat 13. The guide rod 12 is located between the second motor 10 and the mounting seat 13 to connect the output shaft of the second motor 10 and the mounting seat 13. The guide rod 12 is hinged to the mounting seat 13 and is a telescopic structure. The output shaft of the second motor 10 drives the guide rod 12 to rotate, thereby driving the mounting seat 13 to move on the moving guide rail 11.

[0024] When adjusting the position of the air outlet duct 5 on the mounting plate 8, the second motor 10 is started. The second motor 10 drives the guide rod 12 to rotate, and the rotation of the guide rod 12 drives the mounting base 13 to rotate. Under the limiting action of the moving guide rail 11, the mounting base 13 slides on the moving guide rail 11. The sliding of the mounting base 13 drives the first motor 9 and the air outlet duct 5 to move, making the operation simple and convenient. The guide rod 12 includes a sleeve 121 fixedly set on the output shaft of the second motor 10 and a sliding tube 122 that is slidably sleeved in the sleeve 121. The sliding tube 122 is fixedly set on the mounting base 13. When the second motor 10 drives the mounting base 13 to move on the moving guide rail 11, the sliding tube 122 slides in the sleeve 121 and passively adjusts the distance between the mounting base 13 and the output shaft of the second motor 10, so that the second motor 10 can drive the mounting base 13 to run along the moving guide rail 11.

[0025] Reference Figure 6 , Figure 7 and Figure 8 In this embodiment of the application, in order to facilitate the delivery of clean gas to the moving air outlet pipe 5, an air inlet pipe 14 is provided on the mounting plate 8. The air inlet pipe 14 passes through the mounting plate 8 and enters the housing 1. An annular pipe 15 is provided on the mounting plate 8. The air outlet pipe 5 is connected to the annular pipe 15. The annular pipe 15 is sleeved on the output shaft of the second motor 10, and the inner ring of the annular pipe 15 is attached to the output shaft of the second motor 10. The annular pipe 15 is located between the body of the second motor 10 and the guide rod 12. Reference Figure 6 , Figure 7 and Figure 8 An air outlet 16 is provided in the inner ring of the annular tube 15. The air outlet 16 faces the output shaft of the second motor 10. A ventilation channel 17 is provided in the output shaft of the second motor 10. The air outlet 16 is connected to the ventilation channel 17. The guide rod 12 is hollow and connected to the ventilation channel 17. Reference Figure 6 , Figure 7 and Figure 8 The mounting base 13 is provided with a connecting pipe 18, which is connected to the guide rod 12 and the air outlet pipe 5. The clean gas outside the outer shell 1 enters the annular pipe 15 through the air inlet pipe 14, and then enters the output shaft of the second motor 10 through the annular pipe 15. The clean gas is then sent into the air outlet pipe 5 by the guide rod 12 and the connecting pipe 18.

[0026] When clean air from the outside is introduced into the air inlet pipe 14, the clean air in the air inlet pipe 14 is transported to the output shaft of the second motor 10 through the annular pipe 15, and then to the guide rod 12 through the output shaft of the second motor 10. The guide rod 12 then transports the clean air to the connecting pipe 18, and the clean air in the connecting pipe 18 is transported to the air outlet pipe 5. The operation is simple and convenient. Under the action of the annular pipe 15, the clean air is transported to the air outlet pipe 5 during the movement of the air outlet pipe 5 driven by the second motor 10, which facilitates the removal of impurities on the reflector 3.

[0027] Reference Figure 6 and Figure 8 In this embodiment, both ends of the sleeve 121 are open, and a bellows 19 is provided inside the guide rod 12. One end of the bellows 19 is located at the opening of the air inlet end of the sleeve 121, and the other end is moved out from the side wall of the slide tube 122. The guide rod 12 is connected to the ventilation channel 17 and the connecting pipe 18 through the bellows 19. Under the action of the bellows 19, on the one hand, it is convenient for clean gas to be transported to the connecting pipe 18 through the guide rod 12, and on the other hand, it is convenient for the slide tube 122 to have a sliding tendency towards the sleeve 121, which facilitates the reciprocating extension and retraction of the guide rod 12 during the movement of the mounting base 13, thereby reducing the possibility of the guide rod 12 getting stuck during the extension and retraction process.

[0028] Reference Figure 6 and Figure 8 In this embodiment, the diameter of the connecting pipe 18 is larger than the diameter of the outlet pipe 5. The connecting pipe 18 is provided with an installation hole 20. The outlet pipe 5 is rotatably disposed inside the connecting pipe 18 through the installation hole 20 and is rotatably sealed inside the connecting pipe 18. A connection hole is provided at the part of the outlet pipe 5 that is sleeved inside the connecting pipe 18. The connecting pipe 18 and the outlet pipe 5 are connected through the connection hole. When clean gas is transported to the connecting pipe 18 through the corrugated pipe 19, the clean gas in the connecting pipe 18 enters the outlet pipe 5 through the connection hole and is then sprayed out through the outlet hole on the outlet pipe 5 to remove impurities on the mirror surface of the reflector 3. The operation is simple and convenient.

[0029] Reference Figure 6 and Figure 7In this embodiment, to improve the cleaning effect of the clean gas on the reflector 3 and reduce the damage to the reflector 3, an arc-shaped cover plate 21 is provided on the air outlet duct 5 and covering the air outlet 6. A guide notch 22 is provided on the cover plate 21 along the sliding direction of the sliding guide rail 11 of the air outlet duct 5. The clean gas passes through the guide notch 22 and acts obliquely on the reflector 3. Under the action of the cover plate 21, the clean gas is ejected tangentially through the air outlet duct 5, thus obliquely spraying the clean gas onto the reflector 3, thereby cleaning the reflector 3. The method of removing impurities by spraying clean gas at an angle reduces the possibility of impurities being pressed onto the reflector 3 by the clean gas compared to spraying clean gas directly onto the reflector 3, thereby improving the cleaning effect on the reflector 3. At the same time, the clean gas is sprayed at an angle onto the reflector 3, which reduces the impact force of the clean gas on the reflector 3 and reduces the possibility of damage to the reflector 3. Furthermore, the angled spraying of clean gas onto the reflector 3 reduces the possibility of the clean gas impacting the reflector 3 and causing the reflector 3 to shift its position, thus facilitating the reflection of light by the reflector 3.

[0030] Reference Figure 3 , Figure 4 and Figure 5 In this embodiment, to facilitate adjusting the depth of the air outlet duct 5 within the housing 1 and further changing the cleaning position of the air outlet duct 5 on the reflector 3, the mounting plate 8 is provided with multiple layers. A connecting rod 23 is provided between adjacent mounting plates 8, and the connecting rod 23 is perpendicular to the mounting plate 8. The air outlet duct 5 is located on the innermost mounting plate 8. The entire mounting plate 8 slides to adjust the position of the air outlet duct 5 within the housing 1, thereby adjusting the cleaning position of the reflector 3. When changing the depth position of the air outlet duct 5 within the housing 1, the outer mounting plate 8 is moved into the mounting notch 7, so that the innermost mounting plate 8 enters the depth of the housing 1, thereby adjusting the depth position of the air outlet duct 5 within the housing 1 and further improving the cleaning effect on the reflector 3. Furthermore, by embedding the mounting plate 8 into the mounting notch 7 and closing the mounting notch 7, the possibility of impurities from the outside entering the housing 1 through the mounting notch 7 is avoided.

[0031] Reference Figure 3 , Figure 4 and Figure 5 In this embodiment, the mounting plate 8 has a fixing hole 24 on its peripheral wall, and a fixing rod 25 is slidably disposed on the inner wall of the mounting notch 7 and inserted into the fixing hole 24. When the mounting plate 8 enters the mounting notch 7, the sliding fixing rod 25 enters the fixing hole 24 and fixes the mounting plate 8 in the mounting notch 7, thereby improving the stability of the mounting plate 8 on the outer shell 1.

[0032] Reference Figure 3 , Figure 4 and Figure 5To facilitate the installation plate 8 entering the installation notch 7, a positioning rod 26 is provided on the side wall of the installation plate 8. The positioning rod 26 connects all the installation plates 8. The cross-section of the positioning rod 26 is dovetail-shaped. A dovetail groove 27 is provided on the inner wall of the outer shell 1 and located in the installation notch 7 for the positioning rod 26 to slide. The installation plate 8 is hung in the installation notch 7 by the positioning rod 26, which facilitates the sliding of the installation plate 8 into the installation notch 7, thereby facilitating the adjustment of the position of the air outlet duct 5.

[0033] The implementation principle of a photolithography microscope in this application embodiment is as follows: When the brightness of the light source decreases as observed through eyepiece 2, the first driving component first drives the exhaust pipe 5 to rotate. The rotation of the exhaust pipe 5 injects clean gas into the housing 1. The clean gas flows within the housing 1 and removes impurities from the reflector 3, thereby improving the reflection efficiency of the reflector 3 and increasing the observation brightness through eyepiece 2. Simultaneously, the second driving component drives the exhaust pipe 5 to move within the housing 1. As the exhaust pipe 5 moves within the housing 1, its position is adjusted, thereby changing the position where the clean gas acts on the reflector 3. This increases the effective range of the clean gas and improves the cleaning effect and efficiency of the reflector 3. When the air outlet duct 5 rotates, the first motor 9 is started, and the first motor 9 drives the air outlet duct 5 to rotate. The air outlet duct 5 rotates in the length direction of the output shaft of the first motor 9. At the same time, the second motor 10 is started, and the second motor 10 drives the guide rod 12 to rotate. The rotation of the guide rod 12 drives the mounting base 13 to rotate. Under the limiting action of the moving guide rail 11, the mounting base 13 slides on the moving guide rail 11. The sliding of the mounting base 13 drives the first motor 9 and the air outlet duct 5 to move, so as to adjust the position of the air outlet duct 5 inside the outer casing 1. Simultaneously, clean gas from the outside is injected into the air inlet pipe 14. The clean gas in the air inlet pipe 14 is transported to the output shaft of the second motor 10 through the annular pipe 15, and then to the guide rod 12 through the output shaft of the second motor 10. The guide rod 12 then transports the clean gas to the connecting pipe 18, and the clean gas in the connecting pipe 18 is transported to the air outlet pipe 5. The clean gas is then sprayed from the air outlet 6 onto the reflector 3 to remove impurities on the reflector 3.

[0034] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A photolithography microscope, characterized in that: The assembly includes a housing (1), an eyepiece (2), a reflector (3), and an objective lens (4). The housing (1) is used to mount the assembly on a lithography machine. The eyepiece (2) is mounted on the top of the housing (1). The objective lens (4) is mounted on the bottom of the housing (1). Multiple reflectors (3) are mounted inside the housing (1). A light source is mounted on the side wall of the housing (1). The light emitted by the light source passes through the reflector (3) and then shines directly on the objective lens (4). When the light passes through the reflector (3), some of the light passes through the reflector (3) and shines directly on the reflector (3). The remaining reflectors (3) then reflect the light and shine it directly on the eyepiece (2). An air outlet pipe (5) is provided inside the outer casing (1). The air outlet pipe (5) is connected to an external air supply device. Multiple air outlets (6) are provided on the air outlet pipe (5). The air outlet pipe (5) is perpendicular to the side wall of the lithography machine. The air outlet pipe (5) is rotatably disposed inside the outer casing (1). The air outlet pipe (5) rotates about the axis of the air outlet pipe (5). The air outlet pipe (5) is movably disposed inside the outer casing (1). It also includes a first driving member and a second driving member. The first driving member is used to drive the air outlet pipe (5) to rotate. The second driving member is used to drive the air outlet pipe (5) to move inside the outer casing (1) to change the position of the air outlet pipe (5) in order to remove impurities on the reflector (3).

2. The photolithography microscope according to claim 1, characterized in that: The outer casing (1) has an installation notch (7) on the side wall facing the lithography machine. An installation plate (8) is provided on the outer casing (1) and through the installation notch (7). The air outlet pipe (5) is provided on the installation plate (8). The length direction of the air outlet pipe (5) is perpendicular to the installation plate (8). The air outlet pipe (5) is rotatably provided on the installation plate (8). The air outlet pipe (5) is movable on the installation plate (8). The first driving component includes a first motor (9) provided on the installation plate (8). The air outlet pipe (5) is provided on the output shaft of the first motor (9).

3. A photolithography microscope according to claim 2, characterized in that: The second driving component includes a second motor (10), a moving guide rail (11), and a guide rod (12) mounted on the mounting plate (8). The moving guide rail (11) is connected end to end in a ring shape, and the moving guide rail (11) is in the shape of a rectangular ring. The second motor (10) is located at the center of the moving guide rail (11). A mounting seat (13) is slidably mounted on the moving guide rail (11). The first motor (9) is mounted on the mounting seat (13). The guide rod (12) is located between the second motor (10) and the mounting seat (13) and is used to connect the output shaft of the second motor (10) and the mounting seat (13). The guide rod (12) is hinged to the mounting seat (13). The guide rod (12) is a telescopic structure. The output shaft of the second motor (10) drives the guide rod (12) to rotate, thereby driving the mounting seat (13) to move on the moving guide rail (11).

4. A photolithography microscope according to claim 3, characterized in that: An air inlet pipe (14) is provided on the mounting plate (8), which penetrates the mounting plate (8) and enters the outer casing (1). An annular pipe (15) is provided on the mounting plate (8), which is fitted with the output shaft of the second motor (10). The annular pipe (15) is located between the body of the second motor (10) and the guide rod (12). An air outlet notch (16) is opened in the inner ring of the annular pipe (15), which faces the output shaft of the second motor (10). A ventilation passage is opened in the output shaft of the second motor (10). The air outlet (16) is connected to the ventilation channel (17), the guide rod (12) is hollow and connected to the ventilation channel (17), the mounting base (13) is provided with a connecting pipe (18), the connecting pipe (18) is connected to the guide rod (12) and the air outlet pipe (5), the clean gas outside the outer shell (1) enters the annular pipe (15) through the air inlet pipe (14), and then enters the output shaft of the second motor (10) through the annular pipe (15), and then the clean gas is sent into the air outlet pipe (5) by the guide rod (12) and the connecting pipe (18).

5. A photolithography microscope according to claim 4, characterized in that: The connecting pipe (18) has an installation hole (20), and the air outlet pipe (5) is rotatably installed inside the connecting pipe (18) through the installation hole (20). The part of the air outlet pipe (5) that is sleeved inside the connecting pipe (18) has a connection hole, and the connecting pipe (18) and the air outlet pipe (5) are connected through the connection hole.

6. A photolithography microscope according to claim 5, characterized in that: An arc-shaped cover plate (21) is provided on the air outlet pipe (5) and covering the air outlet (6). Along the air outlet pipe (5) in the sliding direction of the moving guide rail (11), a guide notch (22) is provided on the cover plate (21). The clean gas passes through the guide notch (22) and acts obliquely on the reflector (3).

7. A photolithography microscope according to claim 2, characterized in that: The mounting plate (8) has multiple layers, and a connecting rod (23) is provided between adjacent mounting plates (8). The connecting rod (23) is perpendicular to the mounting plate (8). The air outlet pipe (5) is located on the innermost mounting plate (8). The entire mounting plate (8) slides to adjust the position of the air outlet pipe (5) inside the outer casing (1) and adjust the cleaning position of the reflector (3).

8. A photolithography microscope according to claim 7, characterized in that: The mounting plate (8) has a fixing hole (24) on its peripheral wall, and a fixing rod (25) is slidably provided on the inner wall of the mounting notch (7) and inserted into the fixing hole (24).

9. A photolithography microscope according to claim 7, characterized in that: The mounting plate (8) is provided with a positioning rod (26) on its side wall. The positioning rod (26) connects all the mounting plates (8). The positioning rod (26) has a dovetail-shaped cross section. The inner wall of the outer shell (1) located at the mounting notch (7) is provided with a dovetail groove (27) for the positioning rod (26) to slide.

10. A photolithography microscope according to claim 4, characterized in that: The guide rod (12) is provided with a corrugated pipe (19), and the guide rod (12) is connected to the ventilation channel (17) and the connecting pipe (18) through the corrugated pipe (19).

Images