Film tearing mechanism and film tearing method based on multilayer ceramic capacitor lamination equipment

Abstract

The invention provides a film tearing device and a film tearing method based on multilayer ceramic capacitor lamination equipment, and the device comprises a bearing assembly which comprises a bearing plate and a film tearing table which are oppositely arranged up and down, and a power assembly and a positioning fixing part which are connected between the bearing plate and the film tearing table, the power assembly is used for driving the film tearing table to reciprocate relative to the bearing plate, and the positioning fixing piece is used for fixing the film tearing table. The negative-pressure assembly is used for generating negative pressure, and the high-pressure assembly is used for generating high-pressure gas to release negative pressure. The power assembly drives the film tearing table and the bearing plate to generate relative motion, so that the film tearing table generates separation action of accelerated rising, and upward pulling force is applied to the bearing assembly, so that the film tearing table is separated from the ceramic films on the stacking table; the problem that in a traditional membrane tearing mode, due to uneven stress, the ceramic membrane is damaged or left is solved, and the membrane tearing stability and the rate of finished products are improved.

Description

Technical Field

[0001] This invention relates to the field of electronic component manufacturing technology, specifically to a film-removing mechanism and method based on a multilayer ceramic capacitor stacking device. Background Technology

[0002] Multilayer ceramic capacitors (MLCCs), as key passive electronic components in electronic devices, are widely used in various electronic terminal products such as smartphones, computers, and new energy vehicles due to their advantages of small size, large capacitance, and high reliability. In the manufacturing process of MLCCs, the lamination process is the core link that determines the structural integrity and performance stability of the product. Its main function is to precisely stack ceramic films and electrode films printed with internal electrodes layer by layer in a preset order to form a ceramic green body with a staggered electrode structure, laying the foundation for subsequent sintering, end-capping and other processes.

[0003] The successful implementation of the lamination process highly depends on the stable operation of the film-peeling stage. This stage must complete key actions such as peeling the ceramic film from the substrate, transferring it to the stacking platform, and hydraulic pressing. The specific workflow includes: in the film-peeling area, negative pressure is used to adsorb the ceramic film and peel it from the substrate; then, it moves to the stacking area and descends, where hydraulic cylinders apply pressure to press the film onto the stacking platform; before the pressure is fully applied, high-pressure gas is introduced to break the negative pressure, after which the film-peeling stage moves upward to separate from the ceramic film on the stacking platform, and finally returns to the film-peeling area to prepare for the next operation. The accuracy and separation effect of this mechanism directly affect the stacking quality of the ceramic green bodies, which in turn relates to the electrical performance and yield rate of the MLCC products.

[0004] However, the rising process of the tearing stage in the existing technology has a significant drawback: after the tearing stage completes the pressure application, it does not rise at a uniform speed, but rather accelerates gradually from an initial speed of 0 to a maximum speed. Due to the inherent viscosity and flexibility of the ceramic diaphragm, and limitations imposed by factors such as the motion precision of the mechanical mechanism and the power output characteristics of the equipment, this gradual acceleration easily leads to adhesion between the ceramic diaphragm on the stacking platform and the tearing stage. The adhered diaphragm rises with the tearing stage, and during the stage's return to the tearing area, it either folds and misaligns or detaches completely, ultimately causing problems such as electrode structure misalignment in the ceramic green body and poor interlayer bonding. This severely affects the production yield of MLCC products and increases production costs. Summary of the Invention

[0005] To address the shortcomings of existing technologies, this invention provides a film-tearing device and method based on a multilayer ceramic capacitor stacking equipment. The device uses a power component to drive relative motion between the film-tearing platform and the support plate, causing the film-tearing platform to accelerate upwards and separate. It also applies an upward pulling force to the support component, thereby separating the film-tearing platform from the ceramic films on the stacking platform. This solves the problem of ceramic film damage or residue in traditional film-tearing methods and improves the stability and yield of film-tearing.

[0006] This invention discloses a film-peeling device based on a multilayer ceramic capacitor stacking equipment, comprising: The support assembly includes a support plate and a film-tearing stage arranged opposite each other. The support plate is positioned above the film-tearing stage and is used to provide installation support. The film-tearing stage is used to adsorb and press the ceramic film to transfer the ceramic film from the film-tearing area to the stacking area. The power assembly is connected between the support plate and the film-tearing stage, and is used to drive the relative movement between the film-tearing stage and the support plate to control the film-tearing stage and the support plate to be in a bonded or separated state. The positioning and fixing component is set between the support plate and the film-tearing table, and is used to fix the film-tearing table when the film-tearing table and the support plate are in a close fit. The negative pressure component is fixedly connected to the film-tearing stage and is used to create a negative pressure state on the lower surface of the film-tearing stage to adsorb the ceramic film. The high-pressure component is fixedly connected to the film-tearing stage and is used to eliminate the negative pressure state on the lower surface of the film-tearing stage in order to release the ceramic film adsorbed on the film-tearing stage.

[0007] Preferably, when the film-tearing platform and the carrier plate are separated, the first distance between the film-tearing platform and the carrier plate is less than or equal to one-third of a preset distance. The preset distance is the distance between the ceramic film adsorbed by the film-tearing platform and the top ceramic film of the stacking area before the carrier component moves to the stacking area and performs the descent action. The descent action is used to characterize the process of the carrier component pressing the ceramic film to the stacking area.

[0008] Preferably, the first force by which the power component drives the film-tearing stage to generate displacement is less than or equal to a preset force; The first force is used to characterize the force that drives the power component to move the film-tearing stage away from the support plate. The preset force is used to characterize the force exerted on the load-bearing component during the pressing of the ceramic diaphragm.

[0009] Preferably, the weight of the film-tearing table is less than or equal to the weight of the support plate.

[0010] Preferably, the power assembly includes one or more of a cylinder, spring, leaf spring, screw, and motor.

[0011] Preferably, the power component has multi-stage acceleration drive capability to drive the film tearing platform to achieve multi-stage stepped acceleration upward.

[0012] This invention discloses a film-removing method based on a multilayer ceramic capacitor stacking device, applicable to a film-removing apparatus for a multilayer ceramic capacitor stacking device. The film-removing method includes: The power assembly is used to drive the carrier plate to adhere to the film-tearing stage, and the carrier assembly is controlled to move above the ceramic film. The load-bearing component is controlled to descend, and a negative pressure is generated by the negative pressure component to cause the ceramic diaphragm to be adsorbed onto the lower surface of the tearing stage; The carrier component with the ceramic membrane adsorbed is moved to the stacking area, and the carrier component is controlled to descend to press the ceramic membrane onto the stacking stage; Gas is introduced into the film-tearing stage using a high-pressure component to release the negative pressure; An upward pulling force is applied to the support component, and the power component drives the tearing stage to generate relative motion between the tearing stage and the support plate, causing the tearing stage to accelerate upward and separate the ceramic film on the tearing stage and the stacking stage.

[0013] Preferably, the relative motion between the film-tearing stage and the support plate is generated by using a power component, including: Before the support assembly begins to rise, the power assembly applies a first force to the film-tearing stage, so that the film-tearing stage tends to move away from the support plate. When the load-bearing component begins to rise, the power component applies a second force to the load-bearing plate. The direction of the second force is opposite to that of the first force. The second force is used to make the load-bearing plate generate a first acceleration. When the support plate and the film-tearing stage are separated, a third force is applied to the film-tearing stage using a power assembly. The direction of the third force is the same as that of the second force, and the third force is used to generate a second acceleration in the film-tearing stage.

[0014] Preferably, the second acceleration is greater than the first acceleration.

[0015] Preferably, after applying an upward tensile force to the load-bearing component, the method further includes: The film-tearing table is driven by a power unit to perform at least one shaking action, which includes pushing and pulling the film-tearing table.

[0016] Compared with the prior art, the beneficial effects of the present invention are as follows: 1. This invention uses a power component to drive relative motion between the film-tearing platform and the support plate, causing the film-tearing platform to accelerate upwards and separate, thus solving the problem of ceramic film breakage or residue in traditional film-tearing methods and improving the stability and yield of film-tearing.

[0017] 2. The power component of the present invention has multi-stage acceleration drive capability, which can drive the film tearing platform to achieve multi-stage stepped acceleration and rise, further improving the efficiency and effect of film tearing.

[0018] 3. The membrane tearing method of the present invention achieves efficient and stable membrane tearing of ceramic membranes through steps such as negative pressure adsorption, high pressure release and accelerated separation, reducing the risk of membrane damage and residue.

[0019] 4. The film-tearing device of the present invention has a simple structure and is easy to operate. It can adapt to the film-tearing needs of ceramic films of different specifications and has broad application prospects. Attached Figure Description

[0020] Figure 1 A schematic diagram of the film-peeling device based on a multilayer ceramic capacitor stacking device provided by the present invention; Figure 2 This is a schematic flowchart of the film-peeling method based on a multilayer ceramic capacitor stacking device provided by the present invention.

[0021] Icon labels: 1. Support plate; 2. Film tearing table; 3. Power assembly; 4. Positioning and fixing components. Detailed Implementation

[0022] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0023] The present invention will now be described in further detail with reference to the accompanying drawings.

[0024] This invention provides a film-peeling device based on a multilayer ceramic capacitor stacking device, such as... Figure 1 As shown, the film-tearing device includes a support assembly, which comprises a support plate 1 and a film-tearing platform 2 arranged vertically opposite each other. The support plate 1 is positioned above the film-tearing platform 2 and provides installation support, offering a stable installation support platform for core components such as the power assembly and positioning fasteners 4, ensuring the structural rigidity and operational accuracy of the entire film-tearing device. The film-tearing platform 2 is used to adsorb and press the ceramic film sheet, transferring it from the film-tearing area to the stacking area. The power assembly 3 is connected between the support plate 1 and the film-tearing platform 2, driving the relative movement between the film-tearing platform 2 and the support plate 1 to control whether the film-tearing platform 2 and the support plate 1 are in a fitted or separated state.

[0025] A positioning and fixing component 4 is disposed between the support plate 1 and the film-tearing platform 2, used to fix the film-tearing platform 2 when it is in contact with the support plate 1. A negative pressure component is fixedly connected to the film-tearing platform 2, used to create a negative pressure state on the lower surface of the film-tearing platform to adsorb the ceramic film. A high pressure component is fixedly connected to the film-tearing platform 2, used to eliminate the negative pressure state on the lower surface of the film-tearing platform to release the ceramic film adsorbed on the film-tearing platform 2.

[0026] It should be noted that, in use, the film-tearing device based on a multilayer ceramic capacitor stacking device provided by this invention first controls the film-tearing platform 2 to be in a bonded state with the carrier plate 1, and moves the carrier component to the film-tearing area. The film-tearing area has a substrate, and the ceramic film to be transferred is placed on top of the substrate. When the carrier component is directly above the ceramic film to be transferred, the gap between the lower surface of the film-tearing platform 2 and the ceramic film is a preset distance. A preset force is applied to the carrier component to control the entire carrier component to move downward. After the lower surface of the film-tearing platform 2 contacts the ceramic film, the ceramic film is adsorbed by the negative pressure component, and then the carrier component moves upward, causing the ceramic film to be torn off the substrate. Next, the carrier component moves to the stacking area and descends, pressing the torn ceramic film onto the stacking platform. The high-pressure component introduces high-pressure gas into the airflow channel to disrupt the negative pressure environment, preparing for the subsequent separation of the film from the film-tearing platform. Next, an upward pulling force is applied to the support component, and before the film-tearing mechanism rises, the power component 3 applies a first force to the film-tearing platform 2, causing the support plate 1 and the film-tearing platform 2 to tend towards separation. When the support component begins to rise, the power component 3 applies a second force to the support plate 1, causing the support plate 1 to rise more rapidly and reach its maximum rising speed V1 in a shorter time. When the support plate 1 and the film-tearing platform 2 are in a separated state, the power component 3 applies a third force to the film-tearing platform, starting to pull the film-tearing platform 2 upward. The initial rising speed of the film-tearing platform 2 is approximately equal to the rising speed of the support plate 1 at this time, that is, the initial rising speed of the film-tearing platform 2 is approximately V1. Due to the application of the third force, the power component 3 accelerates the rising of the film-tearing platform 2. Assuming that the maximum relative speed of the film-tearing platform 2 with respect to the support plate 1 is V2, then the maximum rising speed of the film-tearing platform 2 is approximately V1 + V2, thereby achieving more efficient film separation and effectively reducing the risk of folding or falling off of the ceramic film due to adhesion.

[0027] In this embodiment of the invention, when the film-tearing platform 2 and the carrier plate 1 are separated, the first distance between the film-tearing platform 2 and the carrier plate 1 is less than or equal to one-third of a preset distance. The preset distance is the distance between the ceramic film adsorbed by the film-tearing platform 2 and the top ceramic film of the stacking area before the carrier component moves to the stacking area and performs the descent action. The descent action is used to characterize the process of the carrier component pressing the ceramic film to the stacking area.

[0028] Specifically, the preset distance can be determined through preliminary process testing. For example, if the initial gap between the tearing stage 2 and the ceramic membrane is 3cm before the tearing device adsorbs the ceramic membrane, the preset distance can be set to 1cm. By controlling the initial distance between the tearing stage 2 and the support plate 1 in the separated state to ≤1cm, the stroke accuracy of the power component 3 driving the tearing stage 2 in relative motion can be guaranteed, and power output loss due to excessive distance can be avoided. This design further optimizes the structural layout of the tearing device and improves the continuity of membrane adsorption and separation actions.

[0029] In this embodiment of the invention, the first force that drives the tearing stage 2 to generate displacement by the power component 3 is less than or equal to the preset force; the first force is used to characterize the force that drives the tearing stage 2 to move away from the support plate 1; the preset force is used to characterize the force that the support component experiences during the pressing of the ceramic diaphragm.

[0030] Specifically, the value of the preset force needs to be determined based on the material properties of the ceramic diaphragm and the pressing process parameters. For example, when the tearing stage presses a ceramic diaphragm with a thickness of 10μm, the pressing force applied by the hydraulic cylinder is 50N. In this case, the preset force can be set to 50N, and the first force needs to be controlled to be ≤50N. The core logic of this design is to ensure that the tension on the ceramic diaphragm during the tearing stage's ascent does not exceed the pressing force, thus avoiding diaphragm stretching deformation or interlayer delamination due to excessive tension. At the same time, by limiting the upper limit of the first force, the ascent of the tearing stage is made smoother, reducing mechanical vibration caused by power output overload, and further improving the integrity of diaphragm separation.

[0031] In this embodiment of the invention, the weight of the film-tearing platform 2 is less than or equal to the weight of the support plate 1.

[0032] In this embodiment of the invention, the power assembly includes one or more of a cylinder, spring, spring sheet, screw, and motor.

[0033] For example, when a cylinder is used as a power component, the cylinder is connected to a push rod, and the cylinder drives the push rod to reciprocate. The cylinder is fixed to the side of the support plate 1, and the push rod is fixed to the side of the film-tearing stage 2. The cylinder drives the push rod to reciprocate, so that the push rod moves the film-tearing stage 2 closer to or away from the support plate 1.

[0034] It should be noted that this application does not specify the number of power components 3. For example, the power components 3 can be set on one or both sides of the load-bearing component.

[0035] In this embodiment of the invention, the power component 3 has a multi-stage acceleration drive capability to drive the film tearing platform 2 to achieve multi-stage stepped acceleration upward.

[0036] For example, the power unit 3 has a two-stage acceleration drive capability. The first-stage acceleration process is as follows: when the film-tearing mechanism transfers the ceramic film to the stacking area and begins to rise, the power unit 3 pushes the film-tearing platform 2 downward, causing it to tend to separate from the support plate 1. At this time, the film-tearing platform 2 is still tightly attached to the ceramic film on the stacking platform; the reaction force of the power unit pushes the support plate 1 to rise rapidly, reaching a relatively high speed V1. The second-stage acceleration process is as follows: when the support plate 1 and the film-tearing platform 2 are separated, the power unit 3 turns to pull the film-tearing platform 2 upward, and the film-tearing platform begins to rise with the current speed of the support plate (≈V1) as the initial speed; the power unit further applies a lifting force, causing the film-tearing platform 2 to generate additional acceleration relative to the support plate 1 (the relative speed is denoted as V2); the final rising speed of the film-tearing platform 2 reaches V1+V2, forming a significant stepped acceleration effect, thereby achieving a more thorough separation between the ceramic film and the film-tearing platform 2.

[0037] like Figure 2 As shown, the present invention also provides a film-removing method based on a multilayer ceramic capacitor stacking device, which is applied to the above-mentioned film-removing device based on the multilayer ceramic capacitor stacking device. The film-removing method based on the multilayer ceramic capacitor stacking device includes the following steps.

[0038] S1. Use the power component to drive the carrier plate to adhere to the film-tearing stage, and control the carrier component to move above the ceramic film.

[0039] S2. Control the descent of the bearing component and generate negative pressure through the negative pressure component to cause the ceramic film on the substrate surface to be adsorbed onto the lower surface of the film-tearing stage.

[0040] S3. Move the carrier component with the adsorbed ceramic membrane to the stacking area and control the carrier component to descend so as to press the ceramic membrane onto the stacking stage.

[0041] S4. Use the high-pressure component to introduce gas into the film-tearing stage to release the negative pressure.

[0042] S5. Apply an upward pulling force to the bearing component and use the power component to drive the tearing stage and the bearing plate to generate relative motion, so that the tearing stage produces an accelerated upward separation action to separate the ceramic film on the tearing stage and the stacking stage.

[0043] In this embodiment of the invention, the power assembly first drives the carrier plate to adhere to the film-tearing stage. While adhered, the carrier assembly moves to directly above the ceramic membrane to be separated, ensuring accurate positioning. Then, the carrier assembly is lowered so that the lower surface of the film-tearing stage contacts the ceramic membrane. The negative pressure assembly is then activated to generate suction force, firmly adsorbing the ceramic membrane onto the film-tearing stage. After adsorption is complete, the carrier assembly rises and moves to the stacking area, precisely pressing the ceramic membrane to the designated position on the stacking stage. At this point, the high-pressure assembly introduces gas to release the negative pressure, preparing for the separation process.

[0044] Furthermore, the power assembly drives relative motion between the film-tearing stage and the support plate, causing the film-tearing stage to accelerate upwards in a separation motion. Specifically, before the support assembly begins to rise, the power assembly applies a first force to the film-tearing stage, causing it to tend to move away from the support plate. When the support assembly begins to rise, the power assembly applies a second force to the support plate, the direction of which is opposite to the first force. This second force is used to generate a first acceleration in the support plate. Finally, when the support plate and the film-tearing stage are separated, the power assembly applies a third force to the film-tearing stage, the direction of which is the same as the second force. This third force is used to generate a second acceleration in the film-tearing stage. The second acceleration is greater than the first acceleration.

[0045] In this way, the support plate 1 rises rapidly with the first acceleration under the drive of the second force. When the distance between the support plate 1 and the film-tearing platform 2 approaches the preset distance, the power component 3 switches to output the third force. Under the third force, the film-tearing platform 2 rises synchronously with a greater second acceleration, so that the rising speed of the film-tearing platform 2 instantly exceeds the rising speed of the support plate 1, forming a stepped motion mode of "the support plate accelerates first, and the film-tearing platform accelerates in succession". In this mode, the separation action of the film-tearing platform 2 from the ceramic diaphragm on the stacking platform is compressed into a very short time, effectively avoiding the hysteresis adhesion caused by the adhesion of the diaphragm during the traditional uniform speed rise process. When the rising acceleration of the film-tearing platform 2 is greater than the maximum acceleration that the adhesive force between the diaphragm and the film-tearing platform can provide, the diaphragm will remain in contact with the stacking platform or the previous ceramic diaphragm due to inertia, while the film-tearing platform 2 will quickly detach, completely eliminating the risk of the diaphragm flipping as it rises with the film-tearing platform.

[0046] In this embodiment of the invention, after applying an upward pulling force to the bearing component, the method further includes: using a power component to drive the film-tearing platform to perform at least one shaking action, the shaking action including pushing and pulling the film-tearing platform.

[0047] It should be understood that after the carrier component completes the pressing and separation of the ceramic diaphragm, the carrier component continues to move upward based on the pulling force. In order to prevent the ceramic diaphragm from sticking to the lower surface of the tearing stage, the power component drives the tearing stage to perform at least one downward and upward shaking action. Through short reciprocating motion, the residual adhesive force is destroyed, so that any weak adhesion that may exist between the diaphragm and the tearing stage is completely removed.

[0048] As can be seen from the above technical solution, this invention provides a film-tearing device and method based on a multilayer ceramic capacitor stacking equipment. The film-tearing device includes: a support component, comprising a support plate and a film-tearing stage arranged vertically opposite each other; a power component and a positioning and fixing component connected between the support plate and the film-tearing stage; the power component is used to drive the reciprocating movement of the film-tearing stage relative to the support plate; and the positioning and fixing component is used to fix the film-tearing stage. A negative pressure component is used to generate negative pressure, and a high pressure component is used to generate high pressure gas to release the negative pressure. This invention drives the relative movement between the film-tearing stage and the support plate through the power component, causing the film-tearing stage to accelerate upward and separate, and applying an upward pulling force to the support component, so as to separate the film-tearing stage from the ceramic diaphragm on the stacking stage. This solves the problem of ceramic diaphragm damage or residue caused by traditional film-tearing methods, and improves the stability and yield of film-tearing.

[0049] The above are merely preferred embodiments of the present invention and are not intended to limit the present invention. Various modifications and variations can be made to the present invention by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A film-peeling device based on a multilayer ceramic capacitor stacking equipment, characterized in that, include: The carrier assembly includes a carrier plate and a film-tearing platform arranged opposite each other. The carrier plate is disposed above the film-tearing platform and is used to provide installation support. The film-tearing platform is used to adsorb and press the ceramic film to transfer the ceramic film from the film-tearing area to the stacking area. A power assembly is connected between the support plate and the film-tearing stage to drive the relative movement between the film-tearing stage and the support plate, so as to control the film-tearing stage and the support plate to be in a close-fitting state or a separated state. A positioning fastener is disposed between the support plate and the film-tearing platform, and is used to fix the film-tearing platform when the film-tearing platform and the support plate are in the attached state; A negative pressure component is fixedly connected to the film-tearing platform and is used to create a negative pressure state on the lower surface of the film-tearing platform to adsorb the ceramic film. A high-pressure component is fixedly connected to the film-tearing stage and is used to eliminate the negative pressure state on the lower surface of the film-tearing stage in order to release the ceramic membrane adsorbed on the film-tearing stage.

2. The film-tearing device according to claim 1, characterized in that, When the film-tearing platform is separated from the carrier plate, the first distance between the film-tearing platform and the carrier plate is less than or equal to one-third of a preset distance. The preset distance is the distance between the ceramic film adsorbed by the film-tearing platform and the top ceramic film of the stacking area before the carrier component moves to the stacking area and performs a descent action. The descent action is used to characterize the process by which the carrier component presses the ceramic film onto the stacking area.

3. The film-tearing device according to claim 1, characterized in that, The first force by which the power component drives the film-tearing platform to generate displacement is less than or equal to a preset force. The first force is used to characterize the force by which the power component drives the film-tearing stage to move away from the support plate; The preset force is used to characterize the force exerted on the bearing component during the pressing of the ceramic diaphragm.

4. The film-tearing device according to claim 1, characterized in that, The weight of the film-tearing table is less than or equal to the weight of the support plate.

5. The film-tearing device according to claim 1, characterized in that, The power assembly includes one or more of the following: cylinder, spring, leaf spring, screw, and motor.

6. The film-tearing device according to claim 1, characterized in that, The power component has multi-stage acceleration drive capability to drive the film-tearing platform to achieve multi-stage stepped acceleration upward.

7. A film-removing method based on a multilayer ceramic capacitor stacking device, applied to any one of the film-removing devices based on a multilayer ceramic capacitor stacking device as described in claims 1-6, characterized in that, The film-peeling method includes: The power assembly is used to drive the carrier plate to adhere to the film-tearing stage, and the carrier assembly is controlled to move above the ceramic film. The carrier component is controlled to descend, and a negative pressure is generated by the negative pressure component to cause the ceramic membrane to be adsorbed onto the lower surface of the film-tearing stage; The carrier assembly with the ceramic membrane adsorbed on it is moved to the stacking area, and the carrier assembly is controlled to descend so as to press the ceramic membrane onto the stacking platform; Gas is introduced into the film-tearing stage using a high-pressure component to release the negative pressure; An upward pulling force is applied to the bearing assembly, and the power assembly drives the tearing stage and the bearing plate to generate relative motion, causing the tearing stage to accelerate upward and separate the ceramic film on the stacking platform.

8. The film-peeling method according to claim 7, characterized in that, The method of using a power component to drive relative motion between the film-tearing platform and the support plate includes: Before the supporting component begins to rise, the power component applies a first force to the film-tearing stage, so that the film-tearing stage tends to move away from the supporting plate; When the load-bearing component begins to rise, the power component applies a second force to the load-bearing plate. The direction of the second force is opposite to that of the first force. The second force is used to cause the load-bearing plate to generate a first acceleration. When the support plate is separated from the film-tearing platform, a third force is applied to the film-tearing platform using the power assembly. The direction of the third force is the same as that of the second force, and the third force is used to cause the film-tearing platform to generate a second acceleration.

9. The film-peeling method according to claim 8, characterized in that, The second acceleration is greater than the first acceleration.

10. The film-peeling method according to claim 7, characterized in that, After applying an upward tensile force to the load-bearing component, the method further includes: The power assembly is used to drive the film-tearing platform to perform at least one shaking action, the shaking action including pushing and pulling the film-tearing platform.

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