Band-shaped beam hydrogen ion source and system

Abstract

The invention discloses a banded beam hydrogen ion source and system.The banded beam hydrogen ion source comprises an ion source base, an ion source arc chamber and a water cooling assembly, the water cooling assembly is used for cooling the ion source arc chamber, and the ion source arc chamber comprises an arc chamber bottom plate and an arc chamber top plate; the ion source arc chamber is internally provided with a lamp filament, a cathode assembly and a reflector assembly, the cathode assembly and the reflector assembly are oppositely arranged, the lamp filament is used for heating the cathode assembly to emit electrons, the cathode assembly and the reflector assembly are located at the same potential, the arc chamber bottom plate is installed on the ion source base, and the arc chamber top plate is provided with a strip-shaped opening. The hydrogen ionization device has the advantages of high hydrogen ionization efficiency and good hydrogen ion beam stability.

Description

Technical Field

[0001] This invention relates to the field of ion source technology, and in particular to a ribbon-beam hydrogen ion source and system. Background Technology

[0002] In semiconductor manufacturing, ion implantation is a key technology used to precisely control the distribution of dopants in silicon wafers, thereby modulating the electrical properties of the material. Hydrogen ion implantation has received widespread attention in recent years due to its important role in defect repair, interface state manipulation, and SmartCut processes. Hydrogen ions can effectively repair lattice defects, reduce interface state density, and significantly improve the performance and yield of power devices and memory. It is also a core process for achieving ultrathin crystal layer transfer, and is of great value in promoting the development of 3D integration and advanced devices.

[0003] Currently, domestic hydrogen ion source technology still faces several challenges. Publicly available technologies indicate that most existing hydrogen ion generation devices employ speckled beam ion sources, where the generated hydrogen ions are accelerated and then scanned by an electrically scanning coil to form a strip-shaped beam. However, this method suffers from significant drawbacks such as limited current intensity, low injection efficiency, and long processing time, restricting its application in large-scale production. On the other hand, radio frequency hydrogen ion sources have high technical requirements, necessitating precise matching of input power and feedback power to generate a stable and effective hydrogen ion beam; completely overcoming this technology in a short period remains quite difficult.

[0004] Furthermore, there is currently a technological gap in broadband beam hydrogen ion sources in China, with no mature and usable domestically produced equipment available. The main technical challenges include: the high ionization energy and small collision cross-section of hydrogen atoms lead to low ionization efficiency, resulting in high total power consumption of the ion source to achieve a large beam current, and prolonged operation can easily lead to a decrease in structural thermal stability, thus affecting beam stability; hydrogen ions (H⁺) have low mass and momentum, making them susceptible to deflection by the source magnetic field during extraction, causing deviation in the vertical direction of the beam, which is difficult to effectively correct using the extraction electrode or the mid-section quadrupole lens; the small molar mass and high permeability of hydrogen molecules require extremely high sealing performance of the arc chamber, otherwise hydrogen leakage and a decrease in beam quality are likely; in addition, hydrogen has a wide explosive concentration range (4%–75%), and using high-pressure steel cylinders for gas supply poses a risk of leakage, while frequent cylinder replacements can also affect equipment replacement efficiency and operational safety. Summary of the Invention

[0005] The technical problem to be solved by the present invention is to overcome the shortcomings of the prior art and provide a strip-beam hydrogen ion source with high hydrogen ionization efficiency and good hydrogen ion beam stability, and also provides a strip-beam hydrogen ion source system.

[0006] To solve the above-mentioned technical problems, the present invention adopts the following technical solution: A strip-shaped hydrogen ion source includes an ion source base, an ion source arc chamber, and a water-cooling assembly. The water-cooling assembly is used to cool the ion source arc chamber. The ion source arc chamber includes a bottom plate and a top plate. A filament and a cathode assembly and a reflector assembly arranged opposite each other are provided inside the ion source arc chamber. The filament is used to heat the cathode assembly to emit electrons. The cathode assembly and the reflector assembly are at the same potential. The bottom plate of the arc chamber is mounted on the ion source base, and a strip-shaped opening is provided on the top plate of the arc chamber.

[0007] As a further improvement to the above technical solution: The ion source arc chamber also includes a reflective end plate, a cathode end plate, and two side plates. The ion source arc chamber is formed by assembling an arc chamber bottom plate, an arc chamber top plate, a reflective end plate, a cathode end plate, and two side plates. The cathode assembly is located on the cathode end plate, and the reflective electrode assembly is located on the reflective end plate.

[0008] The bottom plate of the arc chamber is provided with a bottom locking groove, the top plate of the arc chamber is provided with a top locking groove, and the reflective extreme plate and the cathode extreme plate are respectively provided with side locking grooves. The bottom locking groove is used to engage with the bottom edge of the reflective extreme plate, the cathode extreme plate and the side plate, the top locking groove is used to engage with the top edge of the reflective extreme plate, the cathode extreme plate and the side plate, and the side locking groove is used to engage with the side edge of the side plate.

[0009] The reflector assembly includes a reflector and a reflector ring. The reflector ring is sealed and embedded in the reflector end plate. The reflector is mounted on the reflector ring. The shape of the reflector is the same as the cross-sectional shape of the ion source arc chamber.

[0010] The ion source base has a through hole. The water-cooling assembly includes a water-cooling base, a blind plate, an inlet pipe, an outlet pipe, a first inlet connector, and a first outlet connector. The water-cooling base is installed on the upper end of the ion source base. The arc chamber base plate is installed on the water-cooling base. The blind plate is installed on the lower end of the ion source base to seal the through hole. The water-cooling base has a first cooling water channel. One end of the inlet pipe is connected to the inlet of the first cooling water channel, and the other end is sealed through the blind plate and connected to the first inlet connector. One end of the outlet pipe is connected to the outlet of the first cooling water channel, and the other end is sealed through the blind plate and connected to the first outlet connector.

[0011] The upper end of the ion source base is provided with a second cooling water channel on the outer periphery of the through hole, and the lower end of the ion source base is provided with a second water inlet connector and a second water outlet connector. The inlet of the second cooling water channel extends to the lower end of the ion source base and is connected to the second water inlet connector, and the outlet of the second cooling water channel extends to the lower end of the ion source base and is connected to the second water outlet connector.

[0012] The two sides of the outlet end of the strip-shaped opening are inclined outward so that the outlet end of the strip-shaped opening is in the shape of a trumpet.

[0013] The strip-shaped opening is inclined upward, and the angle between the strip-shaped opening and the horizontal plane is α, satisfying 0 < α < 2°.

[0014] A strip-beam hydrogen ion source system includes the aforementioned strip-beam hydrogen ion source, a vacuum chamber, an extraction electrode, a hydrogen generator, a hydrogen flow meter, a chiller, a cooling water return detection module, a host computer, and a slave computer. The strip-beam hydrogen ion source and the extraction electrode are located in the vacuum chamber. The extraction electrode is used to extract hydrogen ions from the strip-beam port. The inlet of the water-cooling component is located outside the vacuum chamber and is connected to the chiller. The outlet of the water-cooling component is located outside the vacuum chamber and is connected to the cooling water return detection module. The hydrogen generator is used to supply hydrogen to the ion source arc chamber. The hydrogen flow meter is located between the hydrogen generator and the ion source arc chamber. The slave computer is connected to the hydrogen generator, the hydrogen flow meter, the chiller, and the cooling water return detection module. The host computer is connected to the slave computer.

[0015] As a further improvement to the above technical solution: The hydrogen generator is a water electrolysis hydrogen generation device.

[0016] Compared with the prior art, the advantages of the present invention are as follows: 1. The ribbon-shaped hydrogen ion source of the present invention, by having a ribbon-shaped opening on the top plate of the arc chamber, makes the hydrogen ion beam drawn out by the ribbon-shaped hydrogen ion source into a ribbon shape, which can cover a larger area and has higher processing efficiency compared with the spot-shaped hydrogen ion beam; the cathode assembly and the reflector assembly are arranged opposite to each other and at the same potential, the cathode assembly emits electrons towards the reflector assembly, and the reflector assembly reflects the electrons towards the cathode assembly, which can extend the movement path of the electrons, make full use of the limited number of electrons to bombard hydrogen molecules, and improve the hydrogen ionization efficiency; the ion source arc chamber is cooled by a water-cooling assembly to improve the thermal stability of the hydrogen ion source and improve the stability of the hydrogen ion beam.

[0017] 2. In the ribbon-shaped hydrogen ion source of the present invention, the arc chamber bottom plate, arc chamber top plate, reflective end plate, cathode end plate and side plate are interlocked by snap-fit, which can improve the sealing and stability of the ion source arc chamber.

[0018] 3. The ribbon-shaped hydrogen ion source of the present invention has a reflector designed with the same cross-sectional shape (rectangular) as the arc chamber of the ion source, which can increase the reflector area, reflect as many electrons as possible, and make full use of the limited high-energy electrons to bombard hydrogen gas multiple times, thereby further improving the hydrogen ionization efficiency.

[0019] 4. The second cooling water channel of the ribbon-beam hydrogen ion source of the present invention can cool the ion source base and the water-cooled base installed on the upper end of the ion source base, further reducing the temperature in the ion source arc chamber, resulting in better cooling effect and further improving the stability of the hydrogen ion beam.

[0020] 5. The ribbon-shaped hydrogen ion source of the present invention tilts the ribbon-shaped opening upward at a certain angle α, so that a vertically upward electric field component is formed between the top plate of the arc chamber and the lead-out electrode, thereby allowing the hydrogen ion beam to obtain an upward electric field deflection force to balance the deflection effect brought by the source magnetic field.

[0021] 6. In the ribbon-beam hydrogen ion source system of the present invention, the cooling return water detection module monitors the temperature of the cooling return water of the water-cooled components. When the return water temperature rises above the set temperature range, the chiller can adjust the inlet temperature of the cooling water, thereby stabilizing the temperature of the ribbon-beam hydrogen ion source at a good state, which can significantly improve the stability of the hydrogen ion beam and better adapt to the output requirements of high-power ion sources. According to different process requirements, the set value of the hydrogen flow meter can be adjusted in real time on the host computer to control the amount of hydrogen supplied to the ion source, which can significantly improve the service life of the hydrogen ion source and extend the maintenance cycle, and reduce the risk of hydrogen leakage.

[0022] 7. The ribbon-shaped hydrogen ion source system of the present invention uses a water electrolysis hydrogen generator as the gas source of the hydrogen ion source, which can meet the hydrogen demand of various hydrogen injection processes, and the hydrogen generated by the water electrolysis hydrogen generator is not easy to accumulate to an explosive concentration, thus ensuring good safety. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the structure of the ion source base in the ribbon-shaped hydrogen ion source of the present invention.

[0024] Figure 2 This is a schematic diagram of the structure of the ion source base and water cooling assembly in the ribbon-shaped hydrogen ion source of the present invention.

[0025] Figure 3 This is a schematic diagram of the structure of the ribbon-shaped hydrogen ion source of the present invention when the ion source base is separated from the water-cooling component.

[0026] Figure 4 This is a cross-sectional view of the ion source base and water-cooling components installed in the ribbon-beam hydrogen ion source of the present invention.

[0027] Figure 5 This is a schematic diagram of the exploded structure of the ion source arc chamber in the ribbon-shaped hydrogen ion source of the present invention.

[0028] Figure 6 This is a schematic diagram of the ribbon-shaped port in the ribbon-shaped hydrogen ion source of the present invention.

[0029] Figure 7 This is a schematic diagram of the ribbon-beam hydrogen ion source system of the present invention.

[0030] The labels in the diagram represent: 1. Ion source base; 11. Through hole; 12. Second cooling water channel; 13. Second water inlet connector; 14. Second water outlet connector; 2. Ion source arc chamber; 21. Cathode assembly; 211. Cathode; 212. Cathode ring; 22. Reflector assembly; 221. Reflector; 222. Reflector ring; 23. Arc chamber bottom plate; 231. Bottom slot; 24. Arc chamber top plate; 241. Strip opening; 242. Top slot; 25. Reflector end plate; 251. Side slot; 26. Cathode end plate; 27. Side plate; 28. Filament; 3. Water-cooled assembly; 31. Water-cooled base; 311. First cooling water channel; 32. Blind flange; 33. Water inlet pipe; 331. NPT threaded connector; 332. Sealing ring; 333. Pressure ring; 334. Compression nut; 34. Water outlet pipe; 35. First water inlet connector; 36. First water outlet connector; 4. Vacuum chamber; 5. Lead-out electrode; 6. Hydrogen generator; 61. Hydrogen flow meter; 71. Chiller; 72. Cooling return water detection module; 8. Host computer; 9. Subordinate computer; 10. Strip-beam hydrogen ion source. Detailed Implementation

[0031] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0032] In the description of this invention, it should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0033] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, "a plurality of" means two or more, unless otherwise explicitly specified.

[0034] In this invention, unless otherwise explicitly specified and limited, the terms "assembly," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0035] Example 1: like Figures 1 to 6 As shown, this embodiment includes an ion source base 1, an ion source arc chamber 2, and a water-cooling assembly 3. The water-cooling assembly 3 is used to cool the ion source arc chamber 2. The ion source arc chamber 2 includes an arc chamber bottom plate 23 and an arc chamber top plate 24. The ion source arc chamber 2 is provided with a filament 28 and a cathode assembly 21 and a reflector assembly 22 arranged opposite to each other. The filament 28 is used to heat the cathode assembly 21 to emit electrons. The cathode assembly 21 and the reflector assembly 22 are at the same potential. The arc chamber bottom plate 23 is mounted on the ion source base 1, and a strip-shaped opening 241 is provided on the arc chamber top plate 24.

[0036] In this embodiment, the ribbon-shaped hydrogen ion source operates by introducing hydrogen gas into the ion source arc chamber 2 through a gas supply pipe. The filament 28 heats the cathode assembly 21, releasing electrons. These high-energy electrons bombard hydrogen molecules to generate hydrogen plasma. The water-cooling assembly 3 cools the ion source arc chamber 2 and stabilizes the arc flow. The hydrogen gas is ionized by the high-energy electrons and then extracted from the ribbon port 241 by the external extraction electrode 5, forming a ribbon-shaped hydrogen ion beam. In this embodiment, the strip-shaped hydrogen ion source has a strip-shaped opening 241 on the top plate 24 of the arc chamber, so that the hydrogen ion beam drawn out by the strip-shaped hydrogen ion source is strip-shaped. Compared with the spot-shaped hydrogen ion beam, it can cover a larger area and has higher processing efficiency. The cathode assembly 21 and the reflector assembly 22 are arranged opposite to each other and at the same potential. The cathode assembly 21 emits electrons towards the reflector assembly 22, and the reflector assembly 22 reflects the electrons back to the cathode assembly 21, which can extend the movement path of the electrons and make full use of the limited number of electrons to bombard hydrogen molecules, thereby improving the hydrogen ionization efficiency. The water cooling assembly 3 cools the arc chamber 2 of the ion source, thereby improving the thermal stability of the hydrogen ion source and the stability of the hydrogen ion beam.

[0037] Preferably, in this embodiment, source magnetic fields (not shown in the figure) are also provided on both sides of the ion source arc chamber 2. The source magnetic fields cause electrons to move in a spiral motion from the cathode component 21 to the reflector component 22 in the ion source arc chamber 2, increasing the probability of colliding with hydrogen molecules and improving the hydrogen ionization efficiency.

[0038] Furthermore, such as Figure 5 As shown, in this embodiment, the ion source arc chamber 2 further includes a reflective end plate 25, a cathode end plate 26, and two side plates 27. The ion source arc chamber 2 is formed by assembling an arc chamber bottom plate 23, an arc chamber top plate 24, a reflective end plate 25, a cathode end plate 26, and two side plates 27. The cathode assembly 21 is disposed on the cathode end plate 26, and the reflective electrode assembly 22 is disposed on the reflective end plate 25. The ion source arc chamber 2 adopts a modular structure, which is convenient for assembly and disassembly. Normal maintenance of the hydrogen ion source only requires replacing severely worn parts, saving maintenance costs.

[0039] Furthermore, in this embodiment, the arc chamber bottom plate 23 is provided with a bottom locking groove 231, the arc chamber top plate 24 is provided with a top locking groove 242, and the reflector plate 25 and the cathode plate 26 are respectively provided with side locking grooves 251. The bottom locking groove 231 is used to engage with the bottom edge of the reflector plate 25, the cathode plate 26, and the side plate 27; the top locking groove 242 is used to engage with the top edge of the reflector plate 25, the cathode plate 26, and the side plate 27; and the side locking groove 251 is used to engage with the side edge of the side plate 27. The arc chamber bottom plate 23, the arc chamber top plate 24, the reflector plate 25, the cathode plate 26, and the side plate 27 are interlocked and interwoven through locking, which can improve the sealing and stability of the ion source arc chamber 2.

[0040] Furthermore, in this embodiment, the reflector assembly 22 includes a reflector 221 and a reflector ring 222. The reflector ring 222 is sealed and embedded in the reflector end plate 25, and the reflector 221 is mounted on the reflector ring 222. The shape of the reflector 221 is the same as the cross-sectional shape of the ion source arc chamber 2. The reflector 221 is designed to have the same cross-sectional shape (rectangular) as the ion source arc chamber 2, which can increase the reflective area of ​​the reflector 221, reflect as many electrons as possible, and make full use of the limited high-energy electrons to bombard hydrogen gas multiple times, thereby further improving the hydrogen ionization efficiency.

[0041] Preferably, in this embodiment, the cathode assembly 21 includes a cathode 211 and a cathode ring 212. The cathode ring 212 is sealed and embedded in the cathode end plate 26, and the cathode 211 is mounted on the cathode ring 212, resulting in a simple and reliable structure. The gaps between the cathode 211, the reflector 221, and the cavity of the ion source arc chamber 2 are sealed by the cathode ring 212 and the reflector ring 222, further improving the sealing performance of the ion source arc chamber 2.

[0042] Furthermore, such as Figures 1 to 4As shown, in this embodiment, the ion source base 1 is provided with a through hole 11. The water cooling assembly 3 includes a water cooling base 31, a blind plate 32, a water inlet pipe 33, a water outlet pipe 34, a first water inlet connector 35, and a first water outlet connector 36. The water cooling base 31 is installed on the upper end of the ion source base 1, and the arc chamber bottom plate 23 is installed on the water cooling base 31 (not shown in the figure). The blind plate 32 is installed on the lower end of the ion source base 1 to block the through hole 11. The water cooling base 31 is provided with a first cooling water channel 311. One end of the water inlet pipe 33 is connected to the inlet of the first cooling water channel 311, and the other end is sealed through the blind plate 32 and connected to the first water inlet connector 35. One end of the water outlet pipe 34 is connected to the outlet of the first cooling water channel 311, and the other end is sealed through the blind plate 32 and connected to the first water outlet connector 36. Cooling water enters from the first inlet connector 35, passes through the inlet pipe 33, the first cooling water channel 311, and the outlet pipe 34 in sequence, and finally flows out from the first outlet connector 36. The cooling water cools the ion source arc chamber 2 installed on the water-cooled base 31. The lower end of the through hole 11 is blocked by the blind plate 32, so that the ion source arc chamber 2 and the ion source base 1 can be in the vacuum side, and the first inlet connector 35 and the first outlet connector 36 can be in the atmosphere side for water to flow. The structure is simple and reliable.

[0043] Preferably, in this embodiment, a sealing ring abuts between the blind plate 32 and the ion source base 1; the inlet pipe 33 and the outlet pipe 34 are fitted with an NPT threaded connector 331, a sealing ring 332, a pressure ring 333 and a clamping nut 334 arranged sequentially from top to bottom. The NPT threaded connector 331 is embedded in the blind plate 32. The outer wall of the inlet pipe 33 and the outlet pipe 34 is sealed to the inner ring of the sealing ring 332. The NPT threaded connector 331 is threaded to the clamping nut 334. The pressure ring 333 is pressed by the clamping nut 334 to compress the sealing ring 332, so that the outer ring of the sealing ring 332 is sealed to the inner wall of the NPT threaded connector 331, and the seal is reliable.

[0044] Preferably, in this embodiment, the inlet pipe 33 and the outlet pipe are fixedly supported by a support plate, resulting in a stable structure.

[0045] Furthermore, such as Figure 1 As shown, in this embodiment, a second cooling water channel 12 is provided at the upper end of the ion source base 1 around the outer periphery of the through hole 11, and a second water inlet connector 13 and a second water outlet connector 14 are provided at the lower end of the ion source base 1. The inlet of the second cooling water channel 12 extends to the lower end of the ion source base 1 and is connected to the second water inlet connector 13, and the outlet of the second cooling water channel 12 extends to the lower end of the ion source base 1 and is connected to the second water outlet connector 14. The second cooling water channel 12 can cool the ion source base 1 and the water-cooled base 31 installed at the upper end of the ion source base 1, further reducing the temperature inside the ion source arc chamber 2, resulting in better cooling effect and further improving the stability of the hydrogen ion beam.

[0046] Furthermore, in this embodiment, the two sides of the outlet end of the strip-shaped port 241 are inclined outwards, so that the outlet end of the strip-shaped port 241 is funnel-shaped. The funnel-shaped outlet end of the strip-shaped port 241 facilitates the extraction of the hydrogen ion beam, reduces the collision and scattering of the hydrogen ion beam with other objects during propagation, thereby reducing the loss of the hydrogen ion beam and improving the utilization rate of the hydrogen ion beam.

[0047] Furthermore, in this embodiment, the strip-shaped aperture 241 is tilted upwards, and the angle between the strip-shaped aperture 241 and the horizontal plane is α, satisfying 0 < α < 2°. By tilting the strip-shaped aperture 241 upwards by a certain angle α, a vertically upward electric field component is formed between the arc chamber top plate 24 and the lead-out electrode 5, thereby allowing the hydrogen ion beam to obtain an upward electric field deflection force to balance the deflection effect brought by the source magnetic field. The specific value of α can be selected according to the actual situation. Figure 5 As shown, the solid line represents the conventionally horizontally arranged strip-shaped aperture 241, while the dashed line represents the upwardly tilted strip-shaped aperture 241 in this embodiment. It is worth noting that in this embodiment, the arc chamber top plate 24 and the lead-out electrode 5 are arranged horizontally at intervals. The source magnetic field causes electrons to spiral from the cathode assembly 21 towards the reflector assembly 22 within the ion source arc chamber 2. Under the influence of the source magnetic field, the hydrogen ion beam tilts downwards. Therefore, in this embodiment, balance is achieved by tilting the strip-shaped aperture 241 upwards. In other embodiments, when the direction of the source magnetic field changes, the tilt direction of the strip-shaped aperture 241 is also adjusted accordingly.

[0048] Example 2: like Figure 7 As shown, the ribbon-beam hydrogen ion source system of this embodiment includes the ribbon-beam hydrogen ion source 10 of Embodiment 1, a vacuum chamber 4, an extraction electrode 5, a hydrogen generator 6, a hydrogen flow meter 61, a chiller 71, a cooling water return detection module 72, a host computer 8, and a slave computer 9. The ribbon-beam hydrogen ion source 10 and the extraction electrode 5 are located inside the vacuum chamber 4. The extraction electrode 5 is used to extract hydrogen ions from the ribbon port 241. The water inlet of the water-cooling component 3 (specifically, the first water inlet connector 35 and the second water inlet connector 13) is located... The water outlet (first water outlet connector 36, second water outlet connector 14) of the water-cooled component 3 is located outside the vacuum chamber 4 and connected to the cooling water return detection module 72. The hydrogen generator 6 is used to supply hydrogen to the ion source arc chamber 2. The hydrogen flow meter 61 is located between the hydrogen generator 6 and the ion source arc chamber 2. The lower computer 9 is connected to the hydrogen generator 6, the hydrogen flow meter 61, the chiller 71 and the cooling water return detection module 72 respectively. The upper computer 8 is connected to the lower computer 9.

[0049] In this embodiment, the strip-beam hydrogen ion source system uses a cooling return water detection module 72 to monitor the temperature of the cooling return water in the water-cooled component 3. When the return water temperature rises above the set temperature range, the chiller 71 can adjust the inlet temperature of the cooling water, thereby stabilizing the temperature of the strip-beam hydrogen ion source 10 in a good state. This can significantly improve the stability of the hydrogen ion beam and better adapt to the output requirements of high-power ion sources. Depending on the process requirements, the set value of the hydrogen flow meter 61 can be adjusted in real time on the host computer 8 to control the amount of hydrogen supplied to the ion source. This can significantly extend the service life of the hydrogen ion source and the maintenance cycle, and reduce the risk of hydrogen leakage.

[0050] Preferably, in this embodiment, the hydrogen flow meter 61 is an MFC (Mass Flow Controller), an instrument that accurately measures gas flow and is unaffected by system pressure fluctuations, and is self-stabilizing, with good measurement stability.

[0051] Furthermore, in this embodiment, the hydrogen generator 6 in the ribbon-like hydrogen ion source system is a water electrolysis hydrogen generator. Using a water electrolysis hydrogen generator as the hydrogen ion source can meet the hydrogen demand of various hydrogen injection processes, and the hydrogen generated by the water electrolysis hydrogen generator is less likely to accumulate to explosive concentrations, thus ensuring good safety.

[0052] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention in any way. Although the present invention has been disclosed above with reference to preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art can make many possible variations and modifications to the technical solutions of the present invention using the methods and techniques disclosed above, or modify them into equivalent embodiments with equivalent changes, without departing from the spirit and technical essence of the present invention. Therefore, any simple modifications, equivalent substitutions, equivalent changes, and modifications made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solutions of the present invention shall still fall within the protection scope of the technical solutions of the present invention.

Claims

1. A ribbon-shaped hydrogen ion source, characterized in that: The device includes an ion source base (1), an ion source arc chamber (2), and a water-cooling assembly (3). The water-cooling assembly (3) is used to cool the ion source arc chamber (2). The ion source arc chamber (2) includes an arc chamber bottom plate (23) and an arc chamber top plate (24). The ion source arc chamber (2) is provided with a filament (28) and a cathode assembly (21) and a reflector assembly (22) arranged opposite to each other. The filament (28) is used to heat the cathode assembly (21) to emit electrons. The cathode assembly (21) and the reflector assembly (22) are at the same potential. The arc chamber bottom plate (23) is mounted on the ion source base (1). The arc chamber top plate (24) has a strip-shaped opening (241).

2. The ribbon-shaped hydrogen ion source according to claim 1, characterized in that: The ion source arc chamber (2) also includes a reflective end plate (25), a cathode end plate (26) and two side plates (27). The ion source arc chamber (2) is formed by assembling an arc chamber bottom plate (23), an arc chamber top plate (24), a reflective end plate (25), a cathode end plate (26) and two side plates (27). The cathode assembly (21) is disposed on the cathode end plate (26) and the reflective electrode assembly (22) is disposed on the reflective end plate (25).

3. The ribbon-shaped hydrogen ion source according to claim 2, characterized in that: The bottom plate (23) of the arc chamber is provided with a bottom slot (231), the top plate (24) of the arc chamber is provided with a top slot (242), the reflector plate (25) and the cathode plate (26) are respectively provided with side slots (251). The bottom slot (231) is used to engage with the bottom edge of the reflector plate (25), the cathode plate (26) and the side plate (27). The top slot (242) is used to engage with the top edge of the reflector plate (25), the cathode plate (26) and the side plate (27). The side slot (251) is used to engage with the side edge of the side plate (27).

4. The ribbon-shaped hydrogen ion source according to claim 2, characterized in that: The reflector assembly (22) includes a reflector (221) and a reflector ring (222). The reflector ring (222) is sealed and embedded in the reflector end plate (25). The reflector (221) is mounted on the reflector ring (222). The shape of the reflector (221) is the same as the cross-sectional shape of the ion source arc chamber (2).

5. The ribbon-shaped hydrogen ion source according to claim 1, characterized in that: The ion source base (1) has a through hole (11). The water cooling assembly (3) includes a water cooling base (31), a blind plate (32), a water inlet pipe (33), a water outlet pipe (34), a first water inlet connector (35), and a first water outlet connector (36). The water cooling base (31) is installed on the upper end of the ion source base (1), the arc chamber bottom plate (23) is installed on the water cooling base (31), and the blind plate (32) is installed on the lower end of the ion source base (1). Used to seal the through hole (11), the water-cooled base (31) is provided with a first cooling water channel (311), one end of the water inlet pipe (33) is connected to the inlet of the first cooling water channel (311), the other end is sealed through the blind plate (32) and connected to the first water inlet connector (35), one end of the water outlet pipe (34) is connected to the outlet of the first cooling water channel (311), the other end is sealed through the blind plate (32) and connected to the first water outlet connector (36).

6. The ribbon-shaped hydrogen ion source according to claim 1, characterized in that: The upper end of the ion source base (1) is provided with a second cooling water channel (12) on the outer periphery of the through hole (11), and the lower end of the ion source base (1) is provided with a second water inlet connector (13) and a second water outlet connector (14). The inlet of the second cooling water channel (12) extends to the lower end of the ion source base (1) and is connected to the second water inlet connector (13). The outlet of the second cooling water channel (12) extends to the lower end of the ion source base (1) and is connected to the second water outlet connector (14).

7. The ribbon-shaped hydrogen ion source according to claim 1, characterized in that: The two sides of the outlet end of the strip-shaped opening (241) are inclined outward so that the outlet end of the strip-shaped opening (241) is in the shape of a trumpet.

8. The ribbon-shaped hydrogen ion source according to any one of claims 1 to 7, characterized in that: The strip-shaped opening (241) is inclined upward, and the angle between the strip-shaped opening (241) and the horizontal plane is α, satisfying 0 < α < 2°.

9. A ribbon-beam hydrogen ion source system, characterized in that: The system includes a strip-beam hydrogen ion source (10) as described in any one of claims 1 to 8, a vacuum chamber (4), an extraction electrode (5), a hydrogen generator (6), a hydrogen flow meter (61), a chiller (71), a cooling return water detection module (72), a host computer (8), and a slave computer (9). The strip-beam hydrogen ion source (10) and the extraction electrode (5) are located inside the vacuum chamber (4). The extraction electrode (5) is used to extract hydrogen ions from the strip port (241). The inlet of the water-cooling assembly (3) is located outside the vacuum chamber (4) and... The water cooling component (3) is connected to the chiller (71), and its outlet is located outside the vacuum chamber (4) and connected to the cooling return water detection module (72). The hydrogen generator (6) is used to supply hydrogen to the ion source arc chamber (2). The hydrogen flow meter (61) is located between the hydrogen generator (6) and the ion source arc chamber (2). The lower computer (9) is connected to the hydrogen generator (6), the hydrogen flow meter (61), the chiller (71), and the cooling return water detection module (72) respectively. The upper computer (8) is connected to the lower computer (9).

10. The ribbon-beam hydrogen ion source system according to claim 9, characterized in that: The hydrogen generator (6) is a water electrolysis hydrogen generation device.

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