Air bearing table device with anti-reflection structure
By setting anti-reflective structures around the air-bearing platform unit and in the splicing gaps, the problem of reflective interference in the air-bearing platform device was solved, achieving high-precision positioning, stable support, and anti-reflective effects, thereby improving the detection accuracy and equipment adaptability of optical component processing.
Patent Information
- Application Number
- CN202511617562.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-11-06
- Publication Date
- 2026-02-27
AI Technical Summary
Existing air-bearing stage devices are affected by light reflection, which affects the detection accuracy and leads to dimensional measurement errors and misjudgments of defects. This is especially true in the processing of high-precision optical components, where stray light may cause micro-scratches and stress concentrations.
Anti-reflective structures, such as bevels, coatings, frosted surfaces, and moving mechanisms, are installed around the air-bearing platform unit and in the splicing gaps to change the angle of light reflection, scatter or absorb light, thereby preventing reflected light from interfering with optical inspection equipment.
It achieves high-precision positioning and stable support, reduces mechanical contact stress deformation, ensures the flatness and positional accuracy of the panel during processing, eliminates light spot or stray light interference, and improves detection accuracy and equipment adaptability.
Smart Images
Figure CN121577524A_ABST
Abstract
Description
Technical Field
[0001] This disclosure relates to the field of panel inspection technology, specifically to an air-floating platform device with an anti-reflective structure. Background Technology
[0002] Air-bearing stage devices are widely used in panel or optical component manufacturing. However, under current technologies, air-bearing stage devices face the problem of light reflection, which adversely affects the detection accuracy.
[0003] Specifically, air-bearing stage units are mostly made of metal or smooth-surfaced materials, which easily generate strong reflected light when illuminated by ambient light during processing. This strong reflected light can interfere with the imaging quality of optical inspection equipment, such as cameras and laser sensors, ultimately leading to errors in dimensional measurement or misjudgment of defects. Furthermore, the gaps formed by the splicing of adjacent air-bearing stage units can create light spots or stray light when directly illuminated. Especially in the processing of high-precision optical components, stray light can cause micro-scratches on the processed surface and even induce stress concentration.
[0004] Therefore, there is an urgent need for an air-float platform device that can solve the problem of reflections on the periphery and splicing gaps of the air-float platform unit affecting the detection accuracy in related technologies. Summary of the Invention
[0005] The main objective of this disclosure is to provide an air-floating platform device with an anti-reflective structure to solve the problem of reflections on the periphery of the air-floating platform unit and the splicing gaps affecting the detection accuracy in related technologies.
[0006] To achieve the above objectives, this disclosure provides an air-floating platform device with an anti-reflective structure, including multiple air-floating platform units, a support frame, and a pneumatic structure.
[0007] Multiple air-bearing platform units, each with multiple air holes, are spliced together to form an air-bearing platform. The air-bearing platform can position, support, or move the panel or optical component to be processed.
[0008] The support frame is connected to the air-bearing platform unit, and the support frame can support the air-bearing platform unit to a preset position.
[0009] The pneumatic structure, connected to the support frame or air-float unit, can directly or indirectly supply gas to the air-float unit.
[0010] The air-bearing platform unit has an anti-reflective structure on its periphery, and the gap between two adjacent air-bearing platform units is also equipped with an anti-reflective structure.
[0011] The aforementioned structure enables high-precision positioning and stable support. Specifically, multiple air-bearing platform units are spliced together to form an air-bearing platform. Gas is output through air holes to form an air film, achieving non-contact support for the panel or optical components to be processed. This reduces stress deformation caused by mechanical contact and ensures the flatness and positional accuracy of the panel during processing. Each air-bearing platform unit is independently connected to a pneumatic structure and its air pressure can be controlled individually. The local support force can be adjusted according to the panel's weight distribution or processing requirements, further improving positioning stability.
[0012] Anti-reflective structures (such as bevels, coatings, and frosted surfaces) are installed around the periphery of the air-bearing table unit and in the splicing gaps. By changing the angle of light reflection, scattering, or absorbing light, these structures prevent reflected light from interfering with the imaging quality of optical inspection equipment (such as cameras and laser sensors), ensuring the accuracy of dimensional measurements and defect detection during processing. Anti-reflective treatments in the gaps between adjacent units (such as fillers and moving mechanisms) eliminate light spots or stray light caused by direct light at the splicing points of traditional air-bearing tables, making them particularly suitable for high-precision optical component processing scenarios.
[0013] In some examples, the anti-reflective structure includes at least one of the following: anti-reflective bevel, anti-reflective coating, anti-reflective frosted surface, anti-reflective moving mechanism, anti-reflective interlayer, and anti-reflective filler.
[0014] In the aforementioned structure, the anti-reflective angled section, through a specific angle design, causes light to be reflected in a non-perpendicular direction, effectively reducing the interference of directly reflected light on the processing area. The anti-reflective coating uses a low-reflectivity material to form a coating on the surface that can absorb or scatter light, further reducing the intensity of reflection. The anti-reflective frosted surface increases surface roughness, causing diffuse reflection of light upon contact with the surface, thereby dispersing reflection and preventing excessively high local light intensity. The anti-reflective movable mechanism can dynamically adjust its position or angle according to processing needs to adapt to anti-reflective requirements under different light source conditions. The anti-reflective interlayer embeds materials with light-absorbing or light-scattering functions inside or on the surface of the air-floating platform, forming a multi-layered protective structure. Anti-reflective fillers are filled in key areas of the air-floating platform, such as gaps or grooves, to eliminate reflection points caused by structural unevenness. These anti-reflective structures can be used individually or combined according to the actual processing scenario to achieve the best anti-reflective effect.
[0015] In some examples, the anti-reflective structure is an anti-reflective angle set around the periphery of the air-float unit. The anti-reflective angle is inclined downward relative to the air-float unit, and the angle between the anti-reflective angle and the plane of the air-float platform is in the range of 15°-75°.
[0016] The anti-reflective angle in the above structure achieves its anti-reflective effect primarily by changing the reflection angle. The angle is tilted downwards relative to the air-bearing platform unit, with an angle between 15° and 75°. This causes the incident light to be deflected downwards or into non-observation areas after being reflected by the angle, thus preventing reflected light from directly entering optical detection equipment such as cameras or the operator's field of vision, effectively reducing interference with image quality and visual judgment.
[0017] In some examples, the anti-reflective structure is an anti-reflective coating disposed on the peripheral surface of the air-floating platform unit, and the anti-reflective coating is at least one of an anti-reflective film and a multilayer dielectric film.
[0018] Anti-reflective coatings primarily achieve their effect through optical interference to reduce reflection. Anti-reflective films, based on the principle of destructive interference of reflected light from the upper and lower surfaces of the thin film, reduce the reflectivity of specific wavelengths of light, thus minimizing direct reflection from the peripheral surfaces of the air-bearing platform. Multilayer dielectric films, by precisely controlling the thickness and refractive index of each layer, achieve low reflection under broad light conditions, making them suitable for processing scenarios with complex light sources. Other types of anti-reflective coatings are also available as needed, and are not limited to the two types described above.
[0019] In some examples, the anti-reflective structure is an anti-reflective frosted surface set on the peripheral surface of the air-floating platform unit. The anti-reflective frosted surface has irregular micro-undulations to reflect or scatter the surrounding light multiple times.
[0020] Among them, the anti-reflective frosted surface is a frosted surface with a surface roughness between Ra0.8 and Ra3.2μm.
[0021] Anti-reflective frosted surfaces achieve anti-reflection through microscopic structure that scatters light. Their irregular microscopic undulations cause light to be reflected and scattered multiple times on the uneven surface, resulting in uniform diffusion of reflected light, reducing the intensity of reflection at the observation location, and avoiding interference with optical detection equipment.
[0022] The surface roughness is precisely controlled between Ra0.8 and Ra3.2μm, which not only efficiently scatters light through micro-undulations but also prevents excessive roughness from affecting surface flatness and dust accumulation, ensuring the structural accuracy and ease of cleaning and maintenance of the air-bearing platform unit. Simultaneously, the frosted surface adapts to the processing environment and can withstand illumination from different angles of light sources (such as top lighting and side lighting). Under strong light, it reduces the directionality of reflected light, improving operator visual comfort and the accuracy of processing, measurement, and inspection, making it suitable for scenarios with high surface quality requirements.
[0023] In some examples, the anti-reflective structure is an anti-reflective movable mechanism located around or below the air-floating platform unit, and the anti-reflective movable mechanism includes: The drive structure is connected to the air-bearing platform unit.
[0024] A light-shielding plate or reflector is connected to the drive structure and moves with the drive structure, and can move to the external area or gap that blocks the gap between two adjacent air-floating platform units.
[0025] In the above structure, the anti-reflective mechanism mainly achieves the anti-reflective effect through dynamic light-blocking / reflection adjustment. With the help of a drive structure, such as a motor or pneumatic cylinder, the light-blocking plate or reflector moves, and the position of the plate is adjusted in real time according to the angle and intensity of light and the requirements of the processing scene. This precisely blocks direct light or changes the reflection path, thereby avoiding light spots and stray light interference with optical inspection equipment caused by direct light at the gaps.
[0026] Unlike fixed anti-reflective structures, movable mechanisms can adapt to changes in the scene. They can flexibly adapt to different processing procedures and light source conditions. For example, they can unfold the light shield to block reflections during the optical inspection stage and retract into the gap to avoid interference during the panel transfer stage, greatly improving the equipment's adaptability to complex working conditions.
[0027] In some examples, the drive structure includes interconnected drive components and transmission mechanisms. The drive component is at least one of a motor, a pneumatic cylinder, a hydraulic cylinder, and a manual push-pull rod, and the transmission mechanism is at least one of a gear mechanism, a gear and rack mechanism, a lead screw and nut mechanism, and a rocker arm mechanism.
[0028] In the above structure, the drive mechanism achieves precise control of the anti-reflective mechanism through a combination of drive components and transmission mechanisms, featuring diverse power adaptability. The drive components support motors, pneumatic cylinders, hydraulic cylinders, manual push-pull rods, etc. The power source can be flexibly configured according to the automation level and load requirements of the processing scenario; for example, motors are suitable for fully automated production lines, while manual push-pull rods can be selected for simple debugging scenarios. Heavy-duty light-shielding plates are adapted to hydraulic cylinders, while lightweight reflectors are selected to use pneumatic cylinders, thus ensuring the stability and adaptability of the mechanism's operation.
[0029] High-precision transmission adjustment is also a major advantage of this drive structure. The transmission mechanism adopts mature structures such as gears, lead screws and nuts, which can convert the power of the drive components into smooth movement or oscillation of the light shield, achieving millimeter-level or even micrometer-level position adjustment accuracy. For example, the transmission accuracy of the lead screw and nut mechanism can reach 0.01mm, ensuring accurate light shielding / reflection position and avoiding reflection control failure.
[0030] In some examples, the anti-reflective structure is an anti-reflective interlayer disposed around the air-float unit, which is fixed to the periphery of the air-float unit by at least one of the following methods: adhesive, snap-fit, magnetic attraction, embedding, or plugging.
[0031] Alternatively, the anti-reflective interlayer may have a multi-layer structure, with at least one layer being a light-absorbing layer.
[0032] The anti-reflective interlayer in the above structure achieves light absorption and light blocking through a multi-layered structure, with at least one layer being a light-absorbing layer, such as a material containing carbon black or nano-light-absorbing particles. It utilizes the principles of physical absorption or optical interference to reduce light reflection. In particular, it provides secondary blocking for scattered light penetrating the surface of the air-floating platform unit, effectively avoiding the reflection residue problem of traditional single-layer anti-reflective structures (such as coatings) when facing complex light.
[0033] The anti-reflective interlayer offers a variety of flexible fixing methods, including adhesive, snap-fit, magnetic attachment, embedding, and plug-in. This allows it to be adapted to different materials, such as the periphery of air-floating platform units made of aluminum alloy and engineering plastics. Its installation process is convenient and does not damage the integrity of the main structure. Furthermore, subsequent maintenance and replacement are supported, reducing operating costs in the long run.
[0034] In some examples, the anti-reflective structure is an anti-reflective filler installed in the gap or cavity between two adjacent air-floating platform unit supports. The anti-reflective filler is a flexible structure that can be stretched or compressed as the gap between the two adjacent air-floating platform unit supports changes.
[0035] The anti-reflective filler achieves its anti-reflective effect primarily by fully covering the gaps to block light. As a flexible structure, it fills the gaps or voids between adjacent air-floating platform units, completely covering the gaps caused by assembly errors or dynamic deformation in traditional spliced air-floating platforms. This effectively blocks the direct path of light and prevents light spots or stray light formed by light refraction and reflection at the gaps from interfering with optical detection equipment (such as camera imaging and laser ranging).
[0036] In some examples, each air-bearing platform unit is equipped with an air inlet and an air outlet. The air inlet and air outlet work together to connect the air-bearing platform unit to the air circuit of the pneumatic structure. Each air-bearing platform unit is independently connected and can independently control the air pressure.
[0037] In the above structure, each air-bearing platform unit is connected to the pneumatic structure through independent air inlet and outlet ports, enabling independent air pressure control. This design provides high-precision air pressure regulation and differentiated support. The independent air path allows for individual air pressure adjustment for each air-bearing platform unit, dynamically adjusting the support force based on the weight distribution and size differences of the panel or optical component to be processed. This ensures high-precision panel positioning and stable support, reducing the risk of processing deformation.
[0038] Each air-bearing platform unit has independent air pressure control. When a unit experiences a fault such as air path blockage or abnormal air pressure, it will only affect the local support and will not cause the entire air-bearing platform to fail. For example, in a large air-bearing platform with multiple units spliced together, a fault in a single unit can shut down its air path, maintaining the normal operation of other units, improving system reliability, and reducing downtime maintenance costs. Attached Figure Description
[0039] To more clearly illustrate the technical solutions in the specific embodiments or related technologies of this disclosure, the accompanying drawings used in the description of the specific embodiments or related technologies will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this disclosure. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0040] Figure 1 This is a schematic diagram of the structure when two air-floating platform units are spliced together according to an embodiment of this disclosure.
[0041] Figure 2 This is a side view of the structure when two air-floating platform units are spliced together, as provided in an embodiment of this disclosure.
[0042] Figure 3 This is a schematic diagram of the structure when two air-floating platform units are spliced together according to an embodiment of this disclosure, showing the anti-reflective angle.
[0043] Figure 4 This is a schematic diagram of the structure of two air-floating platform units spliced together and provided with an anti-reflective coating, as provided in the embodiments of this disclosure.
[0044] Figure 5 This is a schematic diagram of the structure of two air-floating platform units spliced together and provided with anti-reflective bevel angles and anti-reflective coatings, as provided in the embodiments of this disclosure.
[0045] Figure 6 This is a schematic diagram of the structure of two air-floating platform units spliced together and provided with an anti-reflective frosted surface, as provided in the embodiments of this disclosure.
[0046] Figure 7 This is a schematic diagram of the structure of two air-floating platform units spliced together and equipped with an anti-reflective mechanism, as provided in the embodiments of this disclosure.
[0047] Figure 8 This is a schematic diagram of the structure of two air-floating platform units spliced together and provided with an anti-reflective interlayer, as provided in the embodiments of this disclosure.
[0048] Figure 9 This is a schematic diagram of the structure of two air-floating platform units spliced together and equipped with anti-reflective fillers, as provided in the embodiments of this disclosure.
[0049] Figure 10 This is another structural diagram showing the splicing of two air-floating platform units provided in the embodiments of this disclosure and the provision of anti-reflective fillers.
[0050] Figure label: 100. Air float unit; 110. Air vent; 120. Air inlet; 130. Air outlet; 200. Support frame; 300. Anti-reflective structure; 310. Anti-reflective angle; 320. Anti-reflective coating; 330. Anti-reflective frosted surface; 340. Anti-reflective moving mechanism; 341. Drive component; 342. Transmission mechanism; 350. Anti-reflective interlayer; 360. Anti-reflective filler. Detailed Implementation
[0051] To enable those skilled in the art to better understand the present disclosure, the technical solutions of the present disclosure will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present disclosure, and not all embodiments. Based on the embodiments of the present disclosure, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of the present disclosure.
[0052] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this disclosure are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate for the embodiments of this disclosure described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.
[0053] In this disclosure, the terms "upper," "lower," "left," "right," "front," "rear," "top," "bottom," "inner," "outer," "middle," "vertical," "horizontal," "lateral," and "longitudinal" indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings. These terms are primarily for the purpose of better describing this disclosure and its embodiments, and are not intended to limit the indicated devices, elements, or components to having a specific orientation, or to be constructed and operated in a specific orientation.
[0054] Furthermore, in addition to indicating location or positional relationship, some of the aforementioned terms may also have other meanings. For example, the term "above" may also be used in certain circumstances to indicate a dependency or connection. Those skilled in the art can understand the specific meaning of these terms in this disclosure according to the specific circumstances.
[0055] Furthermore, the terms "installation," "setup," "equipped with," "connection," "linking," and "socketing" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral construction. They can refer to a mechanical connection or an electrical connection. They can refer to a direct connection, an indirect connection via an intermediate medium, or an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of the above terms in this disclosure according to the specific circumstances.
[0056] It should be noted that, unless otherwise specified, the embodiments and features described in this disclosure can be combined with each other. This disclosure will now be described in detail with reference to the accompanying drawings and embodiments.
[0057] Reference Figures 1 to 3 In some examples, this disclosure provides an air-floating platform device with an anti-reflective structure 300, including multiple air-floating platform units 100, a support frame 200, and a pneumatic structure.
[0058] Each air-bearing platform unit 100 is provided with multiple air holes 110, and multiple air-bearing platform units 100 are spliced together to form an air-bearing platform. The air-bearing platform can position, support or move the panel or optical component to be processed.
[0059] The support frame 200 is connected to the air-bearing platform unit 100, and the support frame 200 can support the air-bearing platform unit 100 to a preset position.
[0060] The pneumatic structure is connected to the support frame 200 or the air-floating platform unit 100, and can directly or indirectly supply gas to the air-floating platform unit 100.
[0061] Among them, the periphery of the air-float platform unit 100 is provided with an anti-reflective structure 300, and the gap between two adjacent air-float platform units 100 on the air-float platform is provided with an anti-reflective structure 300.
[0062] The aforementioned structure enables high-precision positioning and stable support. Specifically, multiple air-bearing platform units 100 are spliced together to form an air-bearing platform. Gas is output through air holes 110 to form an air film, achieving non-contact support for the panel or optical components to be processed. This reduces stress deformation caused by mechanical contact and ensures the flatness and positional accuracy of the panel during processing. Each air-bearing platform unit 100 is independently connected to a pneumatic structure and its air pressure can be controlled individually. The local support force can be adjusted according to the weight distribution of the panel or processing requirements, further improving positioning stability.
[0063] The air-bearing stage unit 100 features anti-reflective structures 300 (such as beveled edges, coatings, or frosted surfaces) around its perimeter and splicing gaps. By altering the angle of light reflection, scattering, or absorbing light, these structures prevent reflected light from interfering with the imaging quality of optical inspection equipment (such as cameras and laser sensors), ensuring the accuracy of dimensional measurements and defect detection during processing. Anti-reflective treatments (such as fillers and moving mechanisms) between adjacent units eliminate light spots or stray light caused by direct sunlight at the splicing points of traditional air-bearing stages, making it particularly suitable for high-precision optical component processing scenarios.
[0064] The air-bearing platform unit 100 can be assembled to form air-bearing platforms of different sizes, adapting to the processing needs of various specifications of products such as mobile phone panels and TV panels, thus improving the versatility of the equipment. The pneumatic structure conveys gas not only to provide support, but also allows for micro-movement or translation via the airflow difference control panel, combined with high-precision positioning, reducing clamping and adjustment time during processing and improving production efficiency.
[0065] The support frame stably supports the air-bearing platform unit 100 at a preset height, preventing ground vibration or environmental interference from affecting the detection accuracy, while also providing a structural foundation for the pneumatic pipeline layout. The anti-reflective structure 300 supports various forms such as angled, coated, frosted surface, and movable mechanism, and can select an appropriate solution according to the processing environment (such as light source type and light intensity) to ensure stability in scenarios such as optical inspection and laser cutting.
[0066] The air-bearing stage device disclosed herein combines air-bearing support and anti-reflective design, which retains the advantages of air-bearing technology such as non-contact and low friction, while specifically solving the problem of reflective interference in detection accuracy. It is especially suitable for fields such as 3C electronics and optical components that have strict requirements for surface quality and dimensional accuracy, and realizes the integrated function of "high-precision positioning - stable support - anti-reflective interference - high-efficiency processing".
[0067] Air-bearing stage devices can be used for panel inspection or optical component processing. Panels include at least one of mobile phone panels, tablet panels, computer panels, and television panels. During panel inspection, the air-bearing stage utilizes a stable airflow generated by a pneumatic structure to keep the panel stable during processing, effectively avoiding processing errors caused by external vibrations or contact friction. For optical component processing, the anti-reflective structure 300 of the air-bearing stage plays a crucial role. By selecting appropriate bevel angles, coatings, frosted surfaces, or moving mechanisms, the impact of light reflection on inspection accuracy can be greatly reduced, ensuring that the surface quality and dimensional accuracy of the optical components meet high standards. Furthermore, the high-precision positioning function of the air-bearing stage can accurately control the position of the panel or optical component during processing, further improving the accuracy and consistency of the processing.
[0068] Reference Figures 3 to 10In some examples, the anti-reflective structure 300 includes at least one of the following: anti-reflective angle 310, anti-reflective coating 320, anti-reflective frosted surface 330, anti-reflective moving mechanism 340, anti-reflective interlayer 350, and anti-reflective filler 360.
[0069] In the above structure, the anti-reflective angle 310, through its specific angle design, causes light to be reflected in a non-perpendicular direction, effectively reducing the interference of direct reflected light on the processing area. The anti-reflective coating 320 uses a low-reflectivity material to form a coating on the surface that can absorb or scatter light, further reducing the intensity of reflection. The anti-reflective frosted surface 330 increases surface roughness, causing diffuse reflection of light upon contact with the surface, thereby dispersing reflection and avoiding excessively high local light intensity. The anti-reflective movable mechanism 340 can dynamically adjust its position or angle according to processing needs to adapt to anti-reflective requirements under different light source conditions. The anti-reflective interlayer 350 embeds materials with light-absorbing or light-scattering functions inside or on the surface of the air-floating platform, forming a multi-layer protective structure. The anti-reflective filler 360 fills key parts of the air-floating platform, such as gaps or grooves, to eliminate reflection points caused by structural unevenness. These anti-reflective structures 300 can be used individually or combined according to the actual processing scenario to achieve the best anti-reflective effect.
[0070] Reference Figure 3 In some examples, the anti-reflective structure 300 is an anti-reflective angle 310 disposed around the air-float unit 100. The anti-reflective angle 310 is inclined downward relative to the air-float unit 100, and the angle between the anti-reflective angle 310 and the plane of the air-float platform is in the range of 15°-75°.
[0071] The anti-reflective angle 310 in the above structure mainly achieves the anti-reflective effect by changing the reflection angle. The angle is tilted downward relative to the air-bearing platform unit 100, with an angle between 15° and 75°. This way, the incident light is deflected downward or to the non-observation area after being reflected by the angle, thereby preventing the reflected light from directly entering optical detection equipment such as cameras or the operator's field of vision, effectively reducing interference with image quality and visual judgment.
[0072] Dispersing and concentrating reflections is also an important function of the 310° anti-reflective angle. Unlike a vertical side, the angled structure increases the diffusion angle of reflected light, reduces the concentration of reflected light intensity, and avoids the formation of light spots or glare from localized strong light. This characteristic is particularly suitable for high-precision optical component manufacturing processes that are sensitive to light environments, such as laser cutting and dimensional measurement.
[0073] Furthermore, the anti-reflective angle 310 is adaptable to various processing environments. The 15°-75° angle range can be flexibly adjusted according to the actual light source position, such as top lighting or side lighting, effectively dispersing reflected light under different lighting conditions while maintaining both anti-reflective performance and the compact structure of the air-bearing platform unit 100. This avoids excessive space occupation or impact on structural stability due to excessive angles. Moreover, this setup requires no additional materials or complex mechanisms; long-lasting anti-reflective performance can be achieved through mechanical structure optimization without affecting the splicing accuracy and pneumatic support function of the air-bearing platform unit 100, greatly improving the practicality and reliability of the device in optical processing scenarios.
[0074] Reference Figure 4 and Figure 5 In some examples, the anti-reflective structure 300 is an anti-reflective coating 320 disposed on the peripheral surface of the air-floating platform unit 100, and the anti-reflective coating 320 is at least one of an anti-reflective film and a multilayer dielectric film.
[0075] Anti-reflective coating 320 primarily achieves its anti-reflective effect through optical interference. Anti-reflective coatings, based on the principle of destructive interference of reflected light from the upper and lower surfaces of the thin film, reduce the reflectivity of specific wavelengths of light, thus minimizing direct reflection from the peripheral surfaces of the air-floating platform. Multilayer dielectric films, by precisely controlling the thickness and refractive index of each layer, achieve low reflection under broad light conditions, making them suitable for processing scenarios with complex light sources. Other types of anti-reflective coating 320 can also be used as needed, not limited to the two types described above.
[0076] Furthermore, the aforementioned anti-reflective coating 320 can also improve light transmittance. Its material allows more light to pass through or be absorbed, preventing reflected light from interfering with the accuracy of optical inspection equipment. It is particularly suitable for panel inspection where high surface gloss is required, preventing reflected light from adversely affecting the processing.
[0077] The anti-reflective coating 320 not only prevents glare but also forms a protective layer on the surface of the air-bearing platform unit 100, resisting dust, moisture, and minor friction, extending the device's lifespan, maintaining surface flatness, and ensuring the stability of the air-bearing support. This design optimizes the material's optical properties to achieve highly efficient anti-reflective properties without altering the air-bearing platform's structural dimensions. It is highly compatible and can be combined with other anti-reflective structures 300 to improve the reliability of processing under complex lighting conditions.
[0078] The aforementioned anti-reflective coating 320 may include a base layer and a coating layer. The coating layer is at least one of a light-absorbing coating layer, a light-diffusing coating layer, or a light-polarizing coating layer. The coating layer thickness can be set to 3μm-300μm, and the adhesion between the coating layer and the base layer is ≥5N / cm.
[0079] Reference Figure 6In some examples, the anti-reflective structure 300 is an anti-reflective frosted surface 330 disposed on the peripheral surface of the air-floating platform unit 100. The anti-reflective frosted surface 330 has irregular micro-undulations to reflect or scatter the surrounding light multiple times.
[0080] Among them, the anti-reflective frosted surface 330 is a frosted surface with a surface roughness between Ra0.8 and Ra3.2μm.
[0081] The anti-reflective frosted surface 330 achieves anti-reflection through its microstructure that scatters light. Its irregular micro-undulations cause light to be reflected and scattered multiple times on the uneven surface, resulting in uniform diffusion of reflected light, reducing the intensity of reflection at the observation location, and avoiding interference with optical detection equipment.
[0082] The surface roughness is precisely controlled between Ra0.8 and Ra3.2μm, which not only efficiently scatters light through micro-undulations but also prevents excessive roughness from affecting surface flatness and dust accumulation, ensuring the structural accuracy and ease of cleaning and maintenance of the air-bearing platform unit 100. Simultaneously, the frosted surface adapts to the processing environment and can withstand illumination from different angles of light sources (such as top lighting and side lighting). Under strong light, it reduces the directionality of reflected light, improving operator visual comfort and the accuracy of processing measurement and inspection, making it suitable for scenarios with high surface quality requirements.
[0083] The above setup can achieve long-term anti-reflective properties through physical surface treatment without the need for additional consumables. It does not conflict with the pneumatic support function of the air-floating platform unit 100 and can be used alone or in combination with structures such as coatings and bevels to further optimize the processing reliability under complex lighting conditions.
[0084] Reference Figure 7 In some examples, the anti-reflective structure 300 is an anti-reflective movable mechanism 340 disposed around or below the air-floating platform unit 100, and the anti-reflective movable mechanism 340 includes: The drive structure is connected to the air-bearing platform unit 100.
[0085] A light-shielding plate or reflector is connected to the drive structure and moves with the drive structure, and can move to the external area or gap that blocks the gap between two adjacent air-floating platform units 100.
[0086] In the above structure, the anti-reflective mechanism 340 mainly achieves the anti-reflective effect through dynamic light-shielding / reflection adjustment. With the help of a drive structure, such as a motor or pneumatic cylinder, the light-shielding plate or reflector moves. According to the angle and intensity of light irradiation and the requirements of the processing scene, the position of the plate is adjusted in real time to accurately block direct light or change the reflection path, thereby avoiding light spots and stray light interference with optical inspection equipment caused by direct light at the gaps.
[0087] Unlike the fixed anti-reflective structure 300, the movable mechanism can adapt to changes in the scene. It can flexibly adapt to different processing procedures and light source conditions. For example, it can unfold the light shield to block reflections during the optical inspection stage and retract into the gap to avoid interference during the panel transfer stage, which greatly improves the equipment's adaptability to complex working conditions.
[0088] The 340 anti-reflective mechanism also features full gap coverage and interference-free design. Light-shielding plates or reflectors specifically cover the gaps between adjacent units, eliminating reflections caused by light leakage. Furthermore, the movable structure can retract into the gap or below the air-floating platform, occupying no extra space and not affecting the splicing accuracy of the air-floating platform, the stability of the pneumatic support, or the panel movement path, ensuring a smooth processing flow. This active adjustment combined with precise shading design overcomes the limitations of fixed structures, making it suitable for high-precision panel inspection scenarios and achieving a dynamic balance between anti-reflective effect and equipment functionality.
[0089] Reference Figure 7 In some examples, the drive structure includes a drive component 341 and a transmission mechanism 342 connected to each other. The drive component 341 is at least one of a motor, a pneumatic cylinder, a hydraulic cylinder, and a manual push-pull rod. The transmission mechanism 342 is at least one of a gear mechanism, a gear and rack mechanism, a lead screw and nut mechanism, and a rocker arm mechanism.
[0090] In the above structure, the drive mechanism achieves precise control of the anti-reflective mechanism 340 through the combination of the drive component 341 and the transmission mechanism 342, featuring diverse power adaptability. The drive component 341 supports motors, pneumatic cylinders, hydraulic cylinders, manual push-pull rods, etc. The power source can be flexibly configured according to the degree of automation and load requirements of the processing scenario. For example, motors are suitable for fully automated production lines, while manual push-pull rods can be selected for simple debugging scenarios. Heavy-duty light-shielding plates are adapted to hydraulic cylinders, while light-duty reflectors are selected to pneumatic cylinders, thereby ensuring the stability and adaptability of the mechanism's operation.
[0091] High-precision transmission adjustment is also a major advantage of this drive structure. The transmission mechanism 342 adopts mature structures such as gears, lead screws and nuts, which can convert the power of the drive component 341 into the smooth movement or oscillation of the light shield, etc., and achieve millimeter-level or even micrometer-level position adjustment accuracy. For example, the transmission accuracy of the lead screw and nut mechanism can reach 0.01mm, ensuring accurate light shielding / reflection position and avoiding reflection control failure.
[0092] Furthermore, this drive structure features scenario-based motion control, structural compatibility, and reliability. Different transmission mechanisms 342 adapt to diverse motion requirements, satisfying the functional needs of the anti-reflective mechanism 340 in various scenarios. Moreover, the modular combination of the drive component 341 and transmission mechanism 342 allows for flexible design of installation positions, avoiding interference with core components. Simultaneously, the mechanical transmission structure is wear-resistant, interference-resistant, and adaptable to complex working conditions. Through end-to-end optimization, it provides a reliable mechanical execution foundation for dynamic anti-reflective mechanisms.
[0093] Specifically, the gear and rack mechanism enables long-stroke linear motion, such as covering gaps in large-sized air-bearing platforms. The rocker arm mechanism enables rapid angle rotation, such as opening and closing a 90° light-shielding plate. The lead screw and nut mechanism enables self-locking, preventing positional shifts caused by machining vibrations, and meeting the functional requirements of the anti-reflective motion mechanism 340 in scenarios such as dynamic light shading, gap blocking, and attitude maintenance.
[0094] The drive component 341 and the transmission mechanism 342 can be modularly combined, and their installation positions can be flexibly designed according to the spatial layout of the air-bearing platform unit 100, avoiding interference with core components such as pneumatic pipelines and air vents 110. Moreover, the mechanical transmission structure is wear-resistant and interference-resistant, adapting to dusty and vibrating working conditions in the processing environment, ensuring long-term stable operation.
[0095] Reference Figure 8 In some examples, the anti-reflective structure 300 is an anti-reflective interlayer 350 disposed around the air-float unit 100. The anti-reflective interlayer 350 is fixed to the periphery of the air-float unit 100 by at least one of the following methods: adhesive, snap-fit, magnetic attraction, embedding, and plugging.
[0096] Alternatively, the anti-reflective interlayer 350 may include a multi-layer structure, with at least one layer being a light-absorbing layer.
[0097] The anti-reflective interlayer 350 in the above structure achieves light absorption and light blocking through a multi-layer structure, with at least one layer being a light-absorbing layer, such as a material containing carbon black or nano-light-absorbing particles. It utilizes the principles of physical absorption or optical interference to reduce light reflection. In particular, it provides secondary blocking for scattered light penetrating the surface of the air-floating unit 100, effectively avoiding the reflection residue problem of traditional single-layer anti-reflective structures 300 (such as coatings) when facing complex light conditions.
[0098] The anti-reflective interlayer 350 offers a variety of flexible mounting methods, including adhesive, snap-fit, magnetic attachment, embedding, and plug-in. This allows it to be adapted to different materials, such as the air-floating platform unit 100 made of aluminum alloy and engineering plastics. Its installation process is convenient and does not damage the integrity of the main structure. Furthermore, subsequent maintenance and replacement are supported, reducing operating costs in the long run.
[0099] The anti-reflective interlayer 350 fits snugly against the periphery of the air-float unit 100, covering delicate areas prone to reflection, such as corners and seams, and filling protective blind spots present in fixed anti-reflective structures 300, such as those with angled edges or frosted surfaces. For modular air-float units, the interlayer can also enhance the sealing of adjacent units through embedding or plugging, reducing light leakage through gaps. This design, through a combination of material light absorption and structural adaptation, constructs a long-lasting anti-reflective barrier without increasing the thickness of the air-float unit or occupying additional space. It is particularly suitable for scenarios requiring high surface flatness, such as optical component processing, and scenarios requiring frequent cleaning and maintenance. When used in conjunction with structures such as coatings and frosted surfaces, it can further enhance anti-reflective redundancy.
[0100] In other examples, multi-layered light-absorbing / light-blocking embodiments are shown: Carbon black light-absorbing layer: On an air-floating platform used in an optical component processing workshop, the anti-reflective interlayer 350 uses a carbon black-containing material as the light-absorbing layer. When light shines on the surface of the air-floating platform, the carbon black-containing light-absorbing layer physically absorbs the light, converting most of the light energy into heat energy, effectively reducing the intensity of reflected light. Actual testing showed that under various angles of light illumination, compared to the traditional single-layer coated anti-reflective structure 300, the reflected light intensity was reduced by 40%.
[0101] Nanoscale light-absorbing particle material light-absorbing layer: On another laboratory air-floating platform with high cleanliness and maintenance requirements, the anti-reflective interlayer 350 uses nanoscale light-absorbing particle material. This material utilizes the principle of optical interference; when light enters the nanoscale light-absorbing particle layer, light of different wavelengths interferes and cancels each other out, thereby weakening reflected light. In practical applications, under complex lighting environments, it can perform secondary blocking of scattered light penetrating the surface of the air-floating platform unit 100, reducing overall reflected light by 35% and significantly improving the light uniformity of the air-floating platform surface.
[0102] In other examples, flexible fixing and compatibility implementations are shown: Adhesive fixing method: For some small engineering plastic air-float unit 100, the anti-reflective interlayer 350 is fixed by adhesive bonding. A special high-strength, wear-resistant adhesive that does not affect the performance of the air-float unit is used to firmly attach the interlayer to the perimeter of the air-float unit. This method is simple and quick to operate. In multiple vibration tests after installation, the interlayer did not detach, nor did it cause any damage to the main structure of the air-float unit. Maintenance only requires carefully removing the interlayer for replacement.
[0103] Magnetic Fixing Method: The anti-reflective interlayer 350 is magnetically fixed to the aluminum alloy air-float platform. Matching magnetic materials are installed on the contact surfaces of the interlayer and the aluminum alloy air-float platform. When installation is required, simply bring the interlayer close to the perimeter of the air-float platform, and it will automatically adhere and fix. This method is convenient and quick, allowing for easy disassembly for cleaning or replacement without affecting the normal use of the air-float platform, while ensuring installation stability. It is suitable for scenarios requiring frequent maintenance.
[0104] In other examples, structurally integrated design embodiments are shown: Anti-reflective coverage in subtle areas: On a high-precision optical air-bearing platform, the anti-reflective interlayer 350 perfectly fits the platform's perimeter, successfully covering corners and seams. Actual optical testing shows that the intensity of reflected light is reduced by 50% in these reflective areas, effectively preventing interference with optical testing accuracy caused by reflection and ensuring the air-bearing platform's performance in high-precision optical processing.
[0105] Enhanced Sealing of Interlocking Air-Floating Platform Connections: For interlocking air-floating platforms, the anti-reflective interlayer 350 is installed via an embedded method. At the joints of adjacent air-floating platform units 100, the interlayer not only serves to prevent glare but also enhances the sealing of the connection between adjacent units through its tight embedded structure. Airtightness tests showed that using this interlayer reduced light leakage by 60%, while simultaneously increasing the connection strength between adjacent units by 30%, effectively improving the overall performance of the interlocking air-floating platform.
[0106] Reference Figure 9 and Figure 10 In some examples, the anti-reflective structure 300 is an anti-reflective filler 360 disposed in the gap or cavity between two adjacent air-floating platform units 100 supports. The anti-reflective filler 360 is a flexible structure that can be stretched or compressed as the gap between the two adjacent air-floating platform units 100 supports changes.
[0107] The anti-reflective filler 360 achieves its anti-reflective effect primarily by providing full coverage of the gaps. As a flexible structure, it fills the gaps or voids between adjacent air-floating platform units 100, completely covering the gaps caused by assembly errors or dynamic deformation in traditional spliced air-floating platforms. This effectively blocks the direct path of light and prevents light spots or stray light formed by light refraction and reflection at the gaps from interfering with optical detection equipment (such as camera imaging and laser ranging).
[0108] The anti-reflective filler 360 also achieves its anti-reflective purpose through adaptive gap changes, low-reflective material characteristics, and interference-free design. Its flexible material (such as elastic rubber or silicone foam) possesses stretching / compression properties, allowing it to adjust its shape in real time to accommodate minute gap changes (such as thermal expansion and contraction or displacement caused by pneumatic adjustment) during the support and movement of the air-floating platform unit 100. This ensures the gaps remain sealed, resolving light leakage issues caused by dynamic gap changes in fixed structures (such as metal baffles). The filler itself uses matte or light-absorbing materials (such as black flexible rubber), with a surface reflectivity far lower than metal or smooth plastic, further reducing light reflection intensity in the gap area. This, combined with the anti-reflective angled 310 and frosted surface structures, reduces the risk of multi-path reflection. The flexible structure does not affect the splicing accuracy or pneumatic support function of the air-floating platform unit 100. After filling, it does not protrude from the air-floating platform surface, avoiding contact with the panel to be processed and preventing scratches. It also accommodates the modular splicing requirements of the air-floating platform (such as quickly adapting to different gap sizes when increasing or decreasing the number of units).
[0109] The above setup uses a combination of physical filling and flexible adaptation to specifically address the dynamic protection problem of the air-floating platform splicing gap, a major area prone to reflection. It is particularly suitable for high-precision optical component processing scenarios with stringent requirements for stray light control, and has the advantages of convenient installation and low maintenance costs.
[0110] In some examples, each air-bearing platform unit 100 is provided with an air inlet 120 and an air outlet 130. The air inlet 120 and the air outlet 130 work together to connect the air-bearing platform unit 100 to the air circuit of the pneumatic structure. Each air-bearing platform unit 100 is independently connected and can independently control the air pressure.
[0111] In the above structure, each air-bearing platform unit 100 is connected to the pneumatic structure through independent air inlet and outlet ports 130, enabling independent air pressure control. This design provides high-precision air pressure regulation and differentiated support. The independent air path allows for individual air pressure adjustment for each air-bearing platform unit 100, dynamically adjusting the support force based on the weight distribution and size differences of the panel or optical component to be processed. This ensures high-precision panel positioning and stable support, reducing the risk of processing deformation.
[0112] Each air-bearing platform unit 100 has independent air pressure control. When a unit experiences a fault such as air path blockage or abnormal air pressure, it will only affect the local support and will not cause the entire air-bearing platform to fail. For example, in a large air-bearing platform with multiple units spliced together, a fault in a single unit can shut down its air path to maintain the normal operation of other units, improve system reliability, and reduce downtime maintenance costs.
[0113] Independent air pressure control supports the modular combination and functional expansion of the air-float unit 100, enabling dynamic airflow control. By adjusting the airflow rate, it achieves micro-motion of the panel or creates "air-float damping" to suppress vibration interference. It is also compatible with different load requirements, adjusting the air pressure for light or heavy workpieces. At the same time, this design optimizes air circuit management and energy consumption control, facilitates pipeline zoning and maintenance, reduces interference, and can dynamically shut down units in non-working areas to reduce compressed gas consumption.
[0114] Independent air pressure control ensures that the air-bearing platform units 100 are at the same height when spliced, avoiding unit tilting and guaranteeing the relative positional accuracy of the peripheral anti-reflective structure 300, preventing reflective interference. For example, when the air pressure of a certain unit is finely adjusted, the flexible anti-reflective filler 360 can adaptively expand and contract, forming a "support-protection" linkage with the independent air pressure control, improving the overall detection accuracy.
[0115] In summary, the above-described setup, through an independent air path and precise pressure control as its core mechanism, allows the air-bearing stage to combine rigid support accuracy with flexible scene adaptability, providing a stable and reliable pneumatic foundation for high-precision panel inspection. Furthermore, it works in conjunction with the anti-reflective structure 300 to create an interference-free processing environment. In related technologies, air-bearing stage devices often face the problem of decreased inspection accuracy due to structural reflections in the field of high-precision panel or optical component processing. Specifically, the problems are as follows: the air-bearing stage units 100 are mostly made of metal or smooth surface materials, which are prone to strong directional reflected light under the illumination of ambient light sources (such as top lighting and side lighting detection) during processing. This interferes with the imaging quality of optical inspection equipment (such as CCD cameras and laser interferometers), leading to dimensional measurement errors (up to ±5μm or more) or misjudgment of surface defects. The gaps formed by splicing adjacent air-bearing stage units 100 (usually 0.1-0.5mm) can form light spots or stray light due to direct light. Especially in scenarios such as optical component photolithography and laser cutting, stray light can cause micro-scratches or uneven energy distribution on the processing surface, affecting product yield. Existing anti-reflective measures are mostly single fixed structures (such as surface sandblasting and single-layer anti-reflective films), which are difficult to adapt to dynamic processing scenarios (such as multi-angle light changes during panel transfer). There are risks of incomplete reflection control (reflectivity is still higher than 8%) or structural interference (such as fixed baffles obstructing the panel movement path), which restricts the application expansion of air-bearing stage devices in the field of high-precision processing. The air-floating platform device with anti-reflective structure 300 disclosed herein can solve the problem of reflection affecting detection accuracy on the periphery and splicing gaps of the air-floating platform unit 100 in related technologies.
[0116] Although embodiments of the present disclosure have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the present disclosure, and such modifications and variations all fall within the scope defined by the appended claims.
Claims
1. A floating platform device with an anti-reflective structure, characterized in that, include: Multiple air-bearing platform units, each of which is provided with multiple air holes, are spliced together to form an air-bearing platform, which can position, support or move the panel or optical element to be processed. A support frame is connected to the air-bearing platform unit, and the support frame is capable of supporting the air-bearing platform unit to a preset position. A pneumatic structure, connected to the support frame or the air-float unit, is capable of directly or indirectly supplying gas to the air-float unit. The air-bearing platform unit is provided with an anti-reflective structure on its peripheral area, and the gap between two adjacent air-bearing platform units on the air-bearing platform is also provided with the anti-reflective structure.
2. The air-floating platform device with an anti-reflective structure according to claim 1, characterized in that, The anti-reflective structure includes at least one of the following: anti-reflective angle, anti-reflective coating, anti-reflective frosted surface, anti-reflective moving mechanism, anti-reflective interlayer, and anti-reflective filler.
3. The air-floating platform device with an anti-reflective structure according to claim 1, characterized in that, The anti-reflective structure is an anti-reflective angle set around the periphery of the air-float unit. The anti-reflective angle is inclined downward relative to the air-float unit, and the angle between the anti-reflective angle and the plane of the air-float platform is in the range of 15°-75°.
4. The air-floating platform device with an anti-reflective structure according to claim 1, characterized in that, The anti-reflective structure is an anti-reflective coating disposed on the peripheral surface of the air-floating platform unit, and the anti-reflective coating is at least one of an anti-reflective film and a multilayer dielectric film.
5. The air-floating platform device with an anti-reflective structure according to claim 1, characterized in that, The anti-reflective structure is an anti-reflective frosted surface set on the peripheral surface of the air-floating platform unit. The anti-reflective frosted surface has irregular micro-undulations to reflect or scatter the light multiple times to the surrounding area. The anti-reflective frosted surface is a frosted surface with a surface roughness between Ra0.8 and Ra3.2μm.
6. The air-floating platform device with an anti-reflective structure according to claim 1, characterized in that, The anti-reflective structure is an anti-reflective movable mechanism disposed on the periphery or below the air-floating platform unit, and the anti-reflective movable mechanism includes: A drive structure is connected to the air-float unit; A light-shielding plate or reflector is connected to the drive structure and moves with the drive structure, and can move to the outer area or gap that blocks the gap between two adjacent air-floating platform units.
7. The air-floating platform device with an anti-reflective structure according to claim 6, characterized in that, The drive structure includes a drive component and a transmission mechanism connected to each other. The drive component is at least one of a motor, a pneumatic cylinder, a hydraulic cylinder, and a manual push-pull rod. The transmission mechanism is at least one of a gear mechanism, a gear and rack mechanism, a lead screw and nut mechanism, and a rocker arm mechanism.
8. The air-floating platform device with an anti-reflective structure according to claim 1, characterized in that, The anti-reflective structure is an anti-reflective interlayer disposed on the periphery of the air-float unit. The anti-reflective interlayer is fixed to the periphery of the air-float unit by at least one of the following methods: adhesive, snap-fit, magnetic attraction, embedding, and insertion. Alternatively, the anti-reflective interlayer may include a multi-layer structure, with at least one layer being a light-absorbing layer.
9. The air-floating platform device with an anti-reflective structure according to claim 1, characterized in that, The anti-reflective structure is an anti-reflective filler installed in the gap or cavity between two adjacent air-floating platform unit supports. The anti-reflective filler is a flexible structure that can be stretched or compressed as the gap between the two adjacent air-floating platform unit supports changes.
10. The air-floating platform device with an anti-reflective structure according to any one of claims 1 to 9, characterized in that, Each of the air-bearing platform units is provided with an air inlet and an air outlet. The air inlet and the air outlet cooperate to connect the air-bearing platform unit to the air circuit of the pneumatic structure. Each air-bearing platform unit is independently connected and can independently control the air pressure.