Decoupling amplification mechanism for acceleration sensor

Abstract

The invention discloses a decoupling and amplifying mechanism for an acceleration sensor, and relates to the technical field of high-precision measurement, the decoupling and amplifying mechanism comprises an input part, an output part, an amplifying part and a decoupling part which are sequentially arranged along a target direction, the input part is used for being fixedly connected with a measured object, and the output part is used for being fixedly connected with a shell of the acceleration sensor; the input part is connected with the driving end of the amplification part, and the follow-up end of the amplification part is connected with the output part; the decoupling part comprises a flexible hinge, the flexible hinge is arranged at the connecting position of the input part and the driving end of the amplification part, one end of the flexible hinge can rotate relative to the other end of the flexible hinge, coupled infinitesimal displacement in all directions is decoupled, and only infinitesimal displacement components in the target direction are transmitted. The infinitesimal displacement input from the driving end of the amplifying part in the target direction is amplified through the amplifying part, so that the infinitesimal displacement is larger than the lower limit of the resolution of the acceleration sensor, and the acceleration sensor can accurately measure the acceleration value in the target direction.

Description

Technical Field

[0001] This invention relates to the field of high-precision measurement technology, and in particular to a decoupling amplification mechanism for an accelerometer. Background Technology

[0002] In high-precision vibration isolation systems and inertial measurement scenarios, inertial sensors, represented by accelerometers, have become key components for realizing nanoscale vibration sensing and control, and are widely used in ultra-precision manufacturing, metrology, aerospace, and other fields. The measurement principle of an accelerometer is to convert the acceleration of the measured object into a tiny structural displacement of the sensor's internal inertial mass, and then indirectly obtain the acceleration by detecting changes in displacement. In practical applications, accelerometers are usually fixed to the measured object via rigid connections or mounting brackets. However, because the measured object often exhibits tiny coupled vibrations with multiple degrees of freedom during actual operation, tiny displacement components in non-target directions often couple into the sensor readings, interfering with the tiny displacement components in the target direction, thus causing measurement errors and affecting the accuracy of the accelerometer's acceleration measurement in the target direction. Furthermore, the amplitude of the tiny displacement in the target direction is often smaller than the lower resolution limit of the accelerometer itself, further affecting the accuracy of the accelerometer's acceleration measurement in the target direction. Summary of the Invention

[0003] The purpose of this invention is to provide a decoupling amplification mechanism for an accelerometer to solve the problems existing in the prior art and improve the accuracy of the accelerometer in measuring acceleration in the target direction.

[0004] To achieve the above objectives, the present invention provides the following solution: This invention provides a decoupling amplification mechanism for an accelerometer, comprising an input section and an output section arranged sequentially along a target direction. The input section is fixedly connected to the object being measured, and the output section is fixedly connected to the accelerometer housing. At least two planes of each of the plurality of amplification sections have an included angle. The input section is connected to the driving ends of each of the plurality of amplification sections, and the follower ends of each of the plurality of amplification sections are connected to the output section. The amplification section amplifies the displacement input from the driving end and outputs it through the follower end. The decoupling section includes a flexible hinge, which corresponds one-to-one with each amplification section. The axis of each flexible hinge is parallel to the target direction. One end of each flexible hinge can rotate relative to the other end, maintaining a distance parallel to the target direction between one end and the other end. The input section is connected to the driving ends of each amplification section via the flexible hinge, with one end of the flexible hinge connected to the input section and the other end connected to the driving end of each amplification section.

[0005] In some embodiments, the amplification section includes a first lever unit and a second lever unit, the input section is connected to the driving end of the first lever unit via the flexible hinge, the follower end of the first lever unit is hinged to the driving end of the second lever unit, and the follower end of the second lever unit is connected to the output section.

[0006] In some embodiments, a housing is also included. The first lever unit includes a first rod, which is straight. One end of the first rod is a driving end, and the other end is a following end. The first rod has a fulcrum between the driving end and the following end. The fulcrum of the first rod is hinged to the inner wall of the housing near the input part. The distance from the fulcrum of the first rod to the driving end of the first rod is smaller than the distance from the fulcrum of the first rod to the following end of the first rod.

[0007] In some embodiments, the second lever unit includes a second rod, which is straight, with one end of the second rod being a driving end and the other end being a following end. The second rod has a fulcrum between the driving end and the following end. The fulcrum of the second rod is hinged to the inner wall of the housing near the output end, and the distance from the fulcrum of the second rod to the driving end of the second rod is smaller than the distance from the fulcrum of the second rod to the following end of the second rod.

[0008] In some embodiments, the flexible hinge includes a flexible first short post with its axis parallel to the target direction. The two ends of the first short post are used for connection, and an circumferential groove is formed on the circumferential sidewall of the first short post so that one end of the first short post can rotate relative to the other end.

[0009] In some embodiments, the fulcrum of the first rod and the fulcrum of the second rod are both hinged to the inner wall of the housing via the semi-flexible hinge. The semi-flexible hinge includes a flexible second short column. The second short column has two oppositely arranged first side surfaces and two oppositely arranged second side surfaces. The two first side surfaces are the same size and arranged in parallel. The two second side surfaces are both inwardly concave curved surfaces and are symmetrically arranged, so that the rotational stiffness of one end of the second short column relative to the other end in a virtual plane parallel to the first side surface is less than the rotational stiffness in a virtual plane perpendicular to the first side surface.

[0010] In some embodiments, the number of amplification sections and flexible hinges is four, and each amplification section and each flexible hinge is evenly arranged along the circumference of the input section.

[0011] In some embodiments, the decoupling unit further includes a plurality of decoupling beams, each of which is located on a virtual plane perpendicular to the target direction. One end of each decoupling beam is fixedly connected to one end of the housing near the output part, and the other end is fixedly connected to the output part. The decoupling beams are evenly arranged circumferentially in the output part, and the bending stiffness of the decoupling beam along the target direction is less than the bending stiffness in other directions.

[0012] In some embodiments, the input section, the output section, the decoupling section, and the amplification section are all made of flexible materials.

[0013] In some embodiments, the input section, the output section, the decoupling section, and the amplification section are integrally formed.

[0014] The present invention achieves the following technical effects compared to the prior art: This invention provides a decoupling amplification mechanism for an accelerometer. The input and output sections are positioned along a target direction. The input section is fixedly connected to the object being measured, and small displacements coupled in various directions are input into the input section. A flexible hinge with an axis (i.e., the line connecting the two ends of the flexible hinge) parallel to the target direction is provided between the driving ends of the input and amplification sections. One end of the flexible hinge can rotate relative to the other end while maintaining a distance between one end and the other end parallel to the target direction. For small displacement components perpendicular to the target direction, the rotation of one end of the flexible hinge relative to the other end will prevent transmission from one end to the other, thereby achieving the desired effect through the flexible hinge. The minute displacement components perpendicular to the target direction are filtered out. For the minute displacement components in the target direction, they are transmitted from one end to the other through a flexible hinge, thereby decoupling the coupled minute displacements in each direction and preventing minute displacement components in non-target directions from interfering with the minute displacement components in the target direction. Furthermore, the minute displacement in the target direction input from the drive end of the amplification unit is amplified by the amplification unit to make it greater than the lower limit of the resolution of the accelerometer itself. By connecting the follower end of the amplification unit to the output unit, the amplified minute displacement in the target direction is transmitted to the accelerometer, enabling the accelerometer to accurately measure the acceleration value in the target direction. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] Figure 1This is a schematic diagram of the decoupling amplification mechanism for the accelerometer in some embodiments of Example 1; Figure 2 This is a schematic diagram of the decoupling amplification mechanism for the accelerometer inside the housing in some embodiments of Example 1; Figure 3 This is a cross-sectional view of the decoupling amplification mechanism for an accelerometer in some embodiments of Example 1; Figure 4 This is a bottom view of the decoupling amplification mechanism for the accelerometer in some embodiments of Example 1; Figure 5 This is a schematic diagram of the structure inside the housing of the decoupling amplification mechanism for the accelerometer in some embodiments of Example 2.

[0017] In the diagram: 1-Input section; 2-Output section; 3-Amplification section; 31-First lever unit; 311-First rod; 3111-Drive end of first rod; 3112-Follower end of first rod; 3113-Fulcrum of first rod; 32-Second lever unit; 321-Second rod; 3211-Drive end of second rod; 3212-Follower end of second rod; 3213-Fulcrum of second rod; 4-Decoupling section; 41-Flexible hinge; 42-Semi-flexible hinge; 421-First side surface; 422-Second side surface; 43-Decoupling beam; 431-Thin beam; 5-Shell. Detailed Implementation

[0018] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0019] The purpose of this invention is to provide a decoupling amplification mechanism for an accelerometer to solve the problems existing in the prior art and improve the accuracy of the accelerometer in measuring acceleration in the target direction.

[0020] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0021] Example 1 This embodiment provides a decoupling amplification mechanism for an accelerometer, such as... Figures 1-4As shown, the device includes an input section 1 and an output section 2 arranged sequentially along the target direction, as well as multiple amplification sections 3 and multiple decoupling sections 4. The input section 1 is used for fixed connection with the object being measured, and the output section 2 is used for fixed connection with the accelerometer housing 5. At least two planes of each of the multiple amplification sections 3 have an included angle. The input section 1 is connected to the driving ends of the multiple amplification sections 3, and the follower ends of the multiple amplification sections 3 are connected to the output section 2. The amplification section 3 can amplify the displacement input from the driving end and output it through the follower end. The decoupling section 4 includes a flexible hinge 41. Each flexible hinge 41 corresponds to one of the amplification sections. The axis of each flexible hinge 41 (i.e., the line connecting the two ends of the flexible hinge 41) is parallel to the target direction. One end of each flexible hinge 41 can rotate relative to the other end while maintaining the distance between the two ends of the flexible hinge 41 in the axial direction. The input section 1 is connected to the driving end of each amplification section 3 through the flexible hinge 41. One end of the flexible hinge 41 is used to connect to the input section 1, and the other end is used to connect to the driving end of each amplification section 3. By fixing the input section 1 to the object being measured, the small displacements coupled in each direction are input into the input section 1. A flexible hinge 41 with its axis parallel to the target direction is provided between the driving ends of the input unit 1 and the amplification unit 3. One end of the flexible hinge 41 can rotate relative to the other end while maintaining the distance between the two ends of the flexible hinge 41 in the axial direction. For small displacement components perpendicular to the target direction, one end of the flexible hinge 41 will rotate relative to the other end and will not be transmitted from one end of the flexible hinge 41 to the other end. Thus, the small displacement components perpendicular to the target direction are filtered out by the flexible hinge 41. For small displacement components in the target direction, they are transmitted from one end of the flexible hinge 41 to the other end, thereby decoupling the coupled small displacements in each direction and avoiding interference from small displacement components in non-target directions to small displacement components in the target direction. Furthermore, the amplification unit 3 amplifies the small displacement in the target direction input from the driving end of the amplification unit 3, making it larger than the lower limit of the resolution of the accelerometer itself. By connecting the follower end of the amplification unit 3 to the output unit 2, the amplified small displacement in the target direction is transmitted to the accelerometer, so that the accelerometer can accurately measure the acceleration value in the target direction.

[0022] In some embodiments of this example, the amplification unit 3 includes a first lever unit 31 and a second lever unit 32. The input unit 1 is connected to the driving end of the first lever unit 31 via a flexible hinge 41. The follower end of the first lever unit 31 is hinged to the driving end of the second lever unit 32. The follower end of the second lever unit 32 is connected to the output unit 2. The first lever unit 31 can amplify the displacement input from the driving end of the first lever unit 31 and output it through the follower end of the first lever unit 31. The second lever unit 32 can amplify the displacement input from the driving end of the second lever unit 32 and output it through the follower end of the second lever unit 32. After the hinge 41 filters the minute displacement component perpendicular to the target direction, it transmits the minute displacement component in the target direction to the drive end of the first lever unit 31. The first lever unit 31 amplifies the minute displacement component in the target direction on the drive end to the follower end and transmits it to the drive end of the second lever unit 32. The second lever unit further amplifies the minute displacement component in the target direction on the drive end to the follower end and transmits it to the output unit 2. Through the amplification unit 3, the minute displacement component in the target direction is amplified twice, making it greater than the lower limit of the resolution of the accelerometer itself, so that the accelerometer can accurately measure the acceleration value in the target direction.

[0023] In some embodiments of this example, the decoupling amplification mechanism for the accelerometer further includes a housing 5. The first lever unit 31 includes a first rod 311, which is straight. One end of the first rod 311 is a driving end 3111, and the other end is a follower end 3112. The first rod 311 has a fulcrum 3113 between the driving end and the follower end. The fulcrum 3113 is hinged to the inner wall of the housing 5 near the input end, and the fulcrum 3113 is connected to the first rod driving end 3112. The distance between the moving end 3111 and the first rod fulcrum 3113 is smaller than the distance between the first rod follower end 3112. During the transmission of a small displacement from the input unit 1 to the output unit 2, the housing 5 remains stationary to provide a fulcrum for the first rod 311. By bringing the first rod fulcrum 3113 closer to the first rod drive end 3111, when the first rod 311 rotates around the fulcrum, the displacement of the first rod follower end 3112 is greater than the displacement of the first rod drive end 3111, thereby transmitting the displacement input from the first rod drive end 3111. The output is amplified and transmitted through the follower end 3112 of the first lever; the second lever unit 32 includes a second lever 321, which is straight. One end of the second lever 321 is the driving end 3211, and the other end is the follower end 3212. The second lever 321 has a fulcrum 3213 between the driving end and the follower end. The fulcrum 3213 is hinged to the inner wall of the housing 5 near the output end, and the distance from the fulcrum 3213 to the driving end 3211 of the second lever unit is greater than the distance from the fulcrum 3213 to the driving end 3211 of the second lever unit. The distance to the follower end 3212 of the second lever unit is small. During the process of transmitting a small displacement from the input part 1 to the output part 2, the housing 5 remains stationary to provide a fulcrum for the second rod 321. By bringing the fulcrum 3213 of the second rod closer to the driving end 3211 of the second rod, when the second rod 321 rotates around the fulcrum, the displacement of the follower end 3212 of the second rod is greater than the displacement of the driving end 3211 of the second rod. Thus, the displacement input by the driving end 3211 of the second rod is amplified and output through the follower end 3212 of the second rod.

[0024] In some embodiments of this example, the flexible hinge 41 includes a flexible first short column with its axis parallel to the target direction. The two ends of the first short column are used for connection. A circumferential groove is formed on the circumferential sidewall of the first short column, so that the rotational stiffness of the first short column in any direction is very small, allowing one end of the first short column to rotate relative to the other end, thereby filtering out the small displacement component perpendicular to the target direction. This decouples the small displacements coupled in each direction, transmitting only the small displacement component along the target direction. Moreover, the flexible hinge, made of an integral first short column, has no internal friction or gaps. Within the range of small displacements, the axial deformation of the flexible hinge itself is negligible, thus effectively transmitting the small displacement component in the target direction.

[0025] In some embodiments of this example, both the first rod fulcrum 3113 and the second rod fulcrum 3213 are hinged to the inner wall of the housing 5 via a semi-flexible hinge 42. The semi-flexible hinge includes a flexible second short post. The second short post has two opposing first side surfaces 421 and two opposing second side surfaces 422. The two first side surfaces 421 are the same size and are parallel. The two second side surfaces 422 are both inwardly concave curved surfaces and are symmetrically arranged. The two first side surfaces 421 and the two second side surfaces 422 are located only between the two ends of the second short post, so that one end of the second short post is opposite the other end. The rotational stiffness of one end in a virtual plane parallel to the first side surface 421 is less than that in a virtual plane perpendicular to the first side surface 421, so that one end of the second short column can only rotate relative to the other end in a virtual plane parallel to the first side surface 421. The fulcrum of the first rod 311 is hinged to the inner wall of the shell 5 through a semi-flexible hinge 42, ensuring that the first rod 311 can rotate around its fulcrum. The fulcrum of the second rod 312 is hinged to the inner wall of the shell 5 through a semi-flexible hinge 42, ensuring that the first rod 312 can rotate around its fulcrum. Furthermore, by making the first side surface 421 of the semi-flexible hinge 42 parallel to the surfaces where the first and second rods 311 are located, the first rod 311 can rotate around its fulcrum in a plane parallel to the first surface 421, further preventing small displacements in other directions from causing the first rod 311 to rotate.

[0026] In some embodiments of this example, semi-flexible hinges 42 are also provided at the connection between the flexible hinge 41 and the driving end of the first lever unit 31, at the hinge between the follower end of the first lever unit 31 and the second lever unit 32, and at the connection between the follower end of the second lever unit 32 and the output part 2. The first surface 421 of each semi-flexible hinge 42 is parallel to the surface where the first lever unit 31 and the second lever unit 32 are located, ensuring the transmission of small displacements in the target direction and avoiding interference from small displacements in other directions.

[0027] In some embodiments of this example, there are four amplification parts 3 and four flexible hinges 41, and each amplification part 3 and each flexible hinge 41 are evenly arranged along the circumference of the input part 1, so that the small displacement in the target direction is transmitted through each amplification part 3, reducing the additional error caused by asymmetrical force, and reducing the stress level inside each amplification part 3 and the corresponding flexible hinge 41, thereby improving reliability and service life.

[0028] Specifically, each amplification part 3 is located inside the housing 5. The housing 5 provides a protective structure for each amplification part 3 to avoid external interference. In the process of a small displacement being transmitted from the input part 1 to the output part 2, the housing 5 remains stationary to provide a fulcrum for the first rod 311 and the second rod 321.

[0029] In some embodiments of this example, the decoupling unit 4 further includes multiple decoupling beams 43, each of which is located on a virtual plane perpendicular to the target direction. One end of each decoupling beam 43 is fixedly connected to the end of the housing 5 near the output section, and the other end is fixedly connected to the output section 2. The decoupling beams 43 are evenly arranged around the output section 2. The bending stiffness of the decoupling beams 43 along the target direction is less than that in other directions. For displacements in the target direction output to the output section 2, the bending stiffness of the decoupling beams 43 along the target direction is smaller. The end of the decoupling beam 43 near the output section 2 can rotate around the end near the housing 5 along the target direction to transmit the displacement in the target direction to the accelerometer housing 5. For displacements in other directions output to the output section 2, the bending stiffness of the decoupling beams 43 along other directions is larger to suppress the rotation of the end of the decoupling beam 43 near the output section 2 around the end near the housing 5 along other directions.

[0030] In some embodiments of this example, the decoupling beam 43 includes a thin beam 431, which is arranged perpendicular to the target direction. The cross-sectional height of the thin beam 431 along the target direction is very small, so the bending stiffness along the target direction is small. The cross-sectional height of the thin beam 431 perpendicular to the target direction is very large, so the bending stiffness along other directions is large. Specifically, the cross-sectional height of the thin beam 431 along the target direction is 1 / 30 to 1 / 50 of the cross-sectional height of the thin beam 431 perpendicular to the target direction.

[0031] Specifically, the thin beams 431 have two layers, with four thin beams 431 in each layer. The four thin beams 431 are evenly arranged around the output section 2, and the two layers of thin beams 431 are spaced apart in the target direction.

[0032] In some embodiments of this example, the input section 1, output section 2, decoupling section 4, and amplification section 3 are all made of flexible materials, and the input section 1, output section 2, decoupling section 4, and amplification section 3 are integrally molded to ensure the synergy and high precision between the components. Specifically, the flexible material is thermoplastic polyurethane elastomer (TPU), which has excellent elasticity, can be repeatedly stretched and has good recovery. It can be processed by various methods such as injection molding, extrusion and 3D printing, and is flexible in molding. Other polymer elastic materials or steel can also be used.

[0033] Example 2 The difference between this embodiment and Embodiment 1 is that it provides another form of flexible hinge 41, such as... Figure 5As shown, the flexible hinge 41 includes two semi-flexible hinges 42 arranged along the target direction and connected at their ends. The first side surfaces 421 of the two semi-flexible hinges 42 are perpendicular to each other. After connecting their ends, the two semi-flexible hinges 42 are arranged parallel to the target direction to form the flexible hinge 41, so that one end of the flexible hinge 41 can rotate relative to the other end and maintain the distance between the two ends of the flexible hinge 41 in the direction parallel to the target direction. For small displacement components perpendicular to the target direction, one end of the flexible hinge 41 will rotate relative to the other end and will not be transmitted from one end of the flexible hinge 41 to the other end. Thus, the small displacement components perpendicular to the target direction are filtered out by the flexible hinge 41. For small displacement components in the target direction, they are transmitted from one end of the flexible hinge 41 to the other end, thereby achieving decoupling of small displacements coupled in each direction.

[0034] Specific examples have been used to illustrate the principles and implementation methods of this invention. The descriptions of the above embodiments are only for the purpose of helping to understand the method and core ideas of this invention. Furthermore, those skilled in the art will recognize that, based on the ideas of this invention, there will be changes in the specific implementation methods and application scope. Therefore, the content of this specification should not be construed as a limitation of this invention.

Claims

1. A decoupling amplification mechanism for an accelerometer, characterized in that: include An input section and an output section are arranged sequentially along the target direction. The input section is used to be fixedly connected to the object being measured, and the output section is used to be fixedly connected to the housing of the accelerometer. The system includes multiple amplification sections, each of which has at least two planes with an included angle between them. The input section is connected to the driving ends of the multiple amplification sections, and the follower ends of the multiple amplification sections are connected to the output section. The amplification section can amplify the displacement input by the driving end and output it through the follower end. as well as Multiple decoupling units are provided, each including a flexible hinge. Each flexible hinge corresponds to one of the amplification units. The axis of each flexible hinge is parallel to the target direction. One end of each flexible hinge can rotate relative to the other end while maintaining the distance between the two ends of the flexible hinge in the axial direction. The input unit is connected to the driving end of each amplification unit through the flexible hinge. One end of each flexible hinge is used to connect to the input unit, and the other end is used to connect to the driving end of each amplification unit.

2. The decoupling amplification mechanism for an accelerometer according to claim 1, characterized in that: The amplification section includes a first lever unit and a second lever unit. The input section is connected to the driving end of the first lever unit via the flexible hinge. The follower end of the first lever unit is hinged to the driving end of the second lever unit. The follower end of the second lever unit is connected to the output section. The first lever unit can amplify the displacement input from the driving end of the first lever unit and output it through the follower end of the first lever unit. The second lever unit can amplify the displacement input from the driving end of the second lever unit and output it through the follower end of the second lever unit.

3. The decoupling amplification mechanism for an accelerometer according to claim 2, characterized in that: It also includes a housing. The first lever unit includes a first rod, which is straight. One end of the first rod is a driving end, and the other end of the first rod is a following end. The first rod has a fulcrum between the driving end and the following end. The fulcrum of the first rod is hinged to the inner wall of the housing near the input part. The distance from the fulcrum of the first rod to the driving end of the first rod is smaller than the distance from the fulcrum of the first rod to the following end of the first rod.

4. The decoupling amplification mechanism for an accelerometer according to claim 3, characterized in that: The second lever unit includes a second rod, which is straight. One end of the second rod is a driving end, and the other end is a following end. The second rod has a fulcrum between the driving end and the following end. The fulcrum of the second rod is hinged to the inner wall of the housing near the output part. The distance from the fulcrum of the second rod to the driving end of the second rod is smaller than the distance from the fulcrum of the second rod to the following end of the second rod.

5. The decoupling amplification mechanism for an accelerometer according to claim 4, characterized in that: The flexible hinge includes a flexible first short post, the axis of which is parallel to the target direction. The two ends of the first short post are used for connection. A circumferential groove is formed on the circumferential sidewall of the first short post so that one end of the first short post can rotate relative to the other end and maintain the distance between one end of the flexible hinge and the other end in the axial direction.

6. The decoupling amplification mechanism for an accelerometer according to claim 5, characterized in that: The fulcrum of the first rod and the fulcrum of the second rod are both hinged to the inner wall of the shell via semi-flexible hinges. The semi-flexible hinge includes a flexible second short column. The second short column has two oppositely arranged first side surfaces and two oppositely arranged second side surfaces. The two first side surfaces are the same size and arranged in parallel. The two second side surfaces are both inwardly concave curved surfaces and are symmetrically arranged. The two first side surfaces and the two second side surfaces are located only between the two ends of the second short column, so that the rotational stiffness of one end of the second short column relative to the other end in a virtual plane parallel to the first side surface is less than the rotational stiffness in a virtual plane perpendicular to the first side surface.

7. The decoupling amplification mechanism for an accelerometer according to claim 5, characterized in that: The number of amplification sections and flexible hinges are both four, and each amplification section and each flexible hinge is evenly arranged along the circumference of the input section.

8. The decoupling amplification mechanism for an accelerometer according to claim 3, characterized in that: The decoupling section also includes multiple decoupling beams, each of which is located on a virtual plane perpendicular to the target direction. One end of each decoupling beam is fixedly connected to the end of the housing near the output section, and the other end is fixedly connected to the output section. The decoupling beams are evenly arranged around the output section, and the bending stiffness of the decoupling beams along the target direction is less than the bending stiffness in other directions.

9. The decoupling amplification mechanism for an accelerometer according to claim 1, characterized in that: The input section, the output section, the decoupling section, and the amplification section are all made of flexible materials.

10. The decoupling amplification mechanism for an accelerometer according to claim 1, characterized in that: The input section, the output section, the decoupling section, and the amplification section are integrally formed.

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