Light turning prism, optical module, optical device and semiconductor equipment

Abstract

The invention discloses a light turning prism, an optical module, an optical device and semiconductor equipment. The light turning prism comprises a first incident surface, a first reflecting surface, a second reflecting surface and a first emergent surface which are sequentially arranged along a light path direction, the first incident surface is used for receiving a first light beam, the first reflecting surface is used for reflecting the first light beam entering through the first incident surface to the second reflecting surface, the second reflecting surface is used for reflecting the first light beam from the first reflecting surface to the first emergent surface, and the first emergent surface is used for emitting the first light beam from the second reflecting surface; and the first reflecting surface and the second reflecting surface are orthogonally arranged. The light turning prism can realize turning of a light beam propagation direction and rotation of a light beam polarization direction, and can overcome the problem of huge size of a laser when being applied to the laser.

Description

Technical Field

[0001] This invention relates to the field of optics, and in particular to an optical deflection prism, an optical module, an optical device, and a semiconductor device. Background Technology

[0002] In optical devices such as lasers, there are two types of polarized light with mutually perpendicular polarization directions, namely P-light and S-light. It is necessary to combine or split these two types of polarized light. Traditional beam combining / splitting optical paths require the two types of polarized light to be arranged in separate horizontal and vertical optical paths in space. The propagation direction of one type of polarized light is folded and the polarization direction of the other type of polarized light is rotated to achieve beam combining / splitting. This results in the laser extending in multiple dimensions in terms of structure and becoming huge in size. Summary of the Invention

[0003] This application discloses an optical deflection prism, an optical module, an optical device, and a semiconductor device to solve the technical problem of multi-dimensional extension and large size in the structure when two polarized lights with mutually perpendicular polarization directions exist simultaneously in a laser.

[0004] In a first aspect, this application provides an optical deflection prism, comprising a first incident surface, a first reflecting surface, a second reflecting surface, and a first exiting surface arranged sequentially along the optical path direction;

[0005] The first incident surface is used to receive a first light beam, the first reflecting surface is used to reflect the first light beam entering through the first incident surface to the second reflecting surface, the second reflecting surface is used to reflect the first light beam from the first reflecting surface to the first exiting surface, and the first exiting surface is used to exit the first light beam from the second reflecting surface, wherein the first reflecting surface and the second reflecting surface are orthogonally arranged.

[0006] This application provides an optical deflection prism, comprising a first reflecting surface and a second reflecting surface orthogonally arranged. After a first light beam enters the prism and is reflected sequentially by the first and second reflecting surfaces, the propagation direction of the first light beam is deflected and its polarization direction is rotated. Therefore, the first light beam exiting the prism has a deflected propagation direction and a rotated polarization direction compared to the first light beam before entering the prism. Compared to existing technologies that use space-consuming optical path structures to achieve the deflection of the beam propagation direction and the rotation of the beam polarization direction, the optical deflection prism structure is more compact and occupies less space, overcoming the problem of large laser size when applied to lasers.

[0007] In some embodiments, the first beam is incident on the first incident surface at a first preset angle, the first preset angle being Brewster's angle when the first beam is incident on the first incident surface.

[0008] In this embodiment, since the first beam is incident on the first incident surface at Brewster angle, the light energy loss when the first beam enters the light-converting prism from the first incident surface can be reduced, thereby improving the light utilization rate.

[0009] In some embodiments, the first light beam from the second reflecting surface is incident on the first exiting surface at a second preset angle, the second preset angle being Brewster's angle when the first light beam is incident from inside the light-deflecting prism onto the first exiting surface.

[0010] In this embodiment, since the first beam from the second reflecting surface is incident on the first exiting surface at Brewster angle, the light energy loss when the first beam exits from the first exiting surface can be reduced, thereby improving the light utilization rate.

[0011] In some embodiments, when the first beam is incident on the first reflecting surface, the polarization direction of the first beam is parallel or perpendicular to the plane where the optical axis of the first beam intersects the normal of the first reflecting surface.

[0012] In this embodiment, by setting the polarization direction of the first beam to be parallel or perpendicular to the plane where the optical axis of the first beam intersects with the normal of the first reflecting surface, the polarization direction of the first beam can be rotated by 90° relative to the polarization direction of the first beam before it is incident on the first reflecting surface after being reflected sequentially by the orthogonally set first and second reflecting surfaces.

[0013] In some embodiments, the first reflecting surface is disposed opposite to the first incident surface, and the first reflecting surface is inclined toward the first incident surface.

[0014] In this embodiment, since the first reflective surface and the first incident surface are arranged opposite to each other and are inclined, the first light beam enters the light-deflecting prism from the first incident surface and can be incident on the first reflective surface at an incident angle greater than zero degrees. After being reflected by the first reflective surface, it can be incident on the second reflective surface, which can reduce the volume of the prism and improve the integration.

[0015] In some embodiments, the first emitting surface and the second reflecting surface are disposed opposite to each other, and the second reflecting surface is inclined toward the first emitting surface.

[0016] In this embodiment, since the first emitting surface and the second reflecting surface are arranged opposite to each other and are inclined, the first beam can be emitted from the first emitting surface after being reflected by the second reflecting surface, which can avoid the beam generating stray light inside the prism, thereby improving the signal-to-noise ratio of the optical system.

[0017] In some embodiments, the first incident surface and the first exit surface are orthogonally arranged.

[0018] In this embodiment, the first incident surface and the first exit surface are orthogonally arranged, which enables the light-converting prism to have a compact structure, regular shape, and easy processing.

[0019] In some embodiments, the relative positions of the first reflecting surface and the first incident surface are such that total internal reflection occurs when the first light beam enters through the first incident surface and is incident on the first reflecting surface.

[0020] In this embodiment, since the first reflecting surface and the second reflecting surface have a relative positional relationship, total internal reflection occurs when the first light beam enters through the first incident surface and is incident on the first reflecting surface, which can reduce light energy loss and improve light utilization.

[0021] In some embodiments, the relative positions of the second reflecting surface and the first reflecting surface are such that the first light beam reflected from the first reflecting surface undergoes total internal reflection when incident on the second reflecting surface.

[0022] In this embodiment, since the second reflecting surface and the first reflecting surface have a relative positional relationship, total internal reflection occurs when the first light beam enters through the first incident surface and is incident on the first reflecting surface, which can reduce light energy loss and improve light utilization.

[0023] Secondly, this application also provides an optical module, including:

[0024] The light-converting prism provided in any of the above embodiments;

[0025] An angle-compensating prism from which the first beam is emitted.

[0026] The optical module provided in this application can adjust the propagation direction of the first beam before it is incident on the optical deflection prism by means of an angle compensation prism, so that the optical deflection prism can adapt to application scenarios with first beams in different directions.

[0027] In some embodiments, the angle compensation prism and the light deflection prism are disposed separately.

[0028] In this embodiment, since the angle compensation prism and the optical deflection prism are set separately, each prism component can be independently adjusted and optimized according to different optical system requirements, thus making the arrangement of the angle compensation prism and the optical deflection prism flexible.

[0029] In some embodiments, the angle-compensating prism includes a second incident surface, a third reflecting surface, and a second exiting surface arranged sequentially along the optical path direction;

[0030] The second incident surface is used to receive the first light beam, the third reflecting surface is used to reflect the first light beam entering through the second incident surface to the second exiting surface, and the second exiting surface is used to allow the first light beam from the third reflecting surface to exit.

[0031] In this embodiment, the angle compensation prism adopts a three-sided structure design. By adding two incident / outgoing interfaces and one total internal reflection operation, multiple folding of the beam propagation path can be achieved. This optical design can precisely control the incident angle of the first beam incident on the optical turning prism, thereby effectively reducing the overall size of the laser optical path system.

[0032] In some embodiments, the angle compensation prism and the light deflection prism are integrally formed.

[0033] In this embodiment, since the angle compensation prism and the light conversion prism are integrated, the process of the first beam exiting from the angle compensation prism into the air and the process of the first beam entering the light conversion prism from the air can be reduced, thereby reducing light energy loss.

[0034] In some embodiments, the angle-compensating prism includes a second incident surface, a third reflecting surface, and a fourth reflecting surface. The second incident surface receives the first beam, the third reflecting surface reflects the first beam entering through the second incident surface to the fourth reflecting surface, and the fourth reflecting surface reflects the first beam from the third reflecting surface to the first reflecting surface of the optical deflection prism. In this embodiment, the angle-compensating prism adopts a three-sided structure design. By adding one incident interface and two total internal reflection operations, multiple deflections of the beam propagation path can be achieved. This optical design can precisely control the incident angle of the first beam incident on the optical deflection prism, thereby effectively reducing the overall size of the laser optical path system.

[0035] In some embodiments, the third reflecting surface is inclined relative to the second incident surface, and the inclination angle of the third reflecting surface is such that total internal reflection occurs when the first light beam is incident on the third reflecting surface.

[0036] In this embodiment, because it has a third reflecting surface that satisfies the condition of total internal reflection, it can ensure the efficient reflection of the angle-compensating prism, reduce light energy loss, and improve light utilization.

[0037] Thirdly, this application also provides an optical device, comprising:

[0038] The optical module provided in the above embodiment.

[0039] The optical device provided in this application uses an optical module to realize the refraction of the beam propagation direction and the rotation of the beam polarization direction. Compared with the prior art, which uses a large optical path structure to realize the refraction of the beam propagation direction and the rotation of the beam polarization direction, the optical module structure is more compact, occupies less space, and can reduce the size of the optical device.

[0040] Fourthly, this application also provides a semiconductor device, comprising:

[0041] The optical device provided in the above embodiment.

[0042] The semiconductor device provided in this application uses an optical module to realize the reversal of the beam propagation direction and the rotation of the beam polarization direction. Compared with the prior art, which uses a large optical path structure to realize the reversal of the beam propagation direction and the rotation of the beam polarization direction, the optical module structure is more compact and occupies less space, which can overcome the problem of the large size of the laser. Attached Figure Description

[0043] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0044] Figure 1 A schematic diagram of the structure of a light-deflecting prism provided in the first embodiment;

[0045] Figure 2 This is a schematic diagram illustrating the principle of an optical deflection prism that folds the direction of light propagation and rotates the polarization direction, as provided in one embodiment.

[0046] Figure 3 The reflectivity of light intensity when light is incident on a medium from air at different incident angles;

[0047] Figure 4 The reflectivity of light intensity when light is incident from a medium onto air at different incident angles;

[0048] Figure 5 A schematic diagram of the structure of a light-deflecting prism provided in the second embodiment;

[0049] Figure 6 This is a schematic diagram of the propagation of a first light beam on a second reflecting surface and a first exiting surface in an optical deflection prism according to one embodiment.

[0050] Figure 7 This is a schematic diagram of the optical path in which a prism with dispersive properties splits a beam of a target wavelength, according to one embodiment.

[0051] Figure 8 A schematic diagram of the arrangement of an optical deflection prism and a crystal provided for the third embodiment;

[0052] Figure 9 A schematic diagram of the structure of an optical module provided in the fourth embodiment;

[0053] Figure 10 A schematic diagram of the structure of an optical module provided in the fifth embodiment;

[0054] Figure 11 A schematic diagram of an optical device provided for the sixth embodiment;

[0055] Figure 12 A schematic diagram of a semiconductor device provided for the seventh embodiment.

[0056] Explanation of reference numerals in the attached figures:

[0057] 01 - First beam; 02 - Second beam; 03 - Target wavelength beam;

[0058] 10-Light-deflecting prism; 101-First reflecting surface; 102-Second reflecting surface; 103-First incident surface; 104-First exit surface; 105-Horizontal plane;

[0059] 20 - Angle-compensating prism; 201 - Second incident surface; 202 - Third reflecting surface; 203 - Second exiting surface; 204 - Fourth reflecting surface; 21 - Prism; 22 - Crystal;

[0060] 30 - Optical Module;

[0061] 40 - Optical device; 401 - Resonant cavity; 402 - Working medium;

[0062] 50 - Semiconductor equipment; 501 - Testing device; 502 - Motion table; 503 - Wafer. Detailed Implementation

[0063] To enable those skilled in the art to better understand the technical solutions of this invention, the technical solutions of the embodiments of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this invention, and not all embodiments. Based on the embodiments of this invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of this invention.

[0064] Optical deflection prisms have wide applications in chip manufacturing and inspection in the semiconductor industry. For example, in lithography machines, they are integrated into the illumination and projection systems to guide and homogenize deep ultraviolet beams, ensuring that circuit patterns are projected onto silicon wafers with nanometer-level precision. In chip defect detection and 3D metrology equipment, beam-splitting prisms work in conjunction with interferometric systems to achieve non-contact measurement of nanometer-level defects, morphology, and overlay errors on wafer surfaces through precise control of the optical path. Optical deflection prisms, with their integrated and stable structure, extremely high reflection efficiency, and adaptability to clean environments, provide a reliable optical foundation for the ultra-high precision requirements of semiconductor manufacturing.

[0065] In optical devices, prisms are used to refract the direction of light propagation in order to arrange the optical path. For example, a laser's basic structure includes a resonant cavity, a pump source, and an active medium. When particles in the active medium are excited to a high energy level by the energy input from the pump source, stimulated emission occurs, which amplifies the light. The generated light is fed back through the resonant cavity to form an oscillating laser.

[0066] To extend the wavelength of laser output, some lasers incorporate a nonlinear medium. The dielectric polarization of this nonlinear medium is nonlinearly related to the electric field strength. Placed within a resonant cavity, the nonlinear medium generates harmonics of different orders, such as second and third harmonics, when the oscillating laser within the cavity passes through it. Each harmonic has a different frequency and wavelength than the fundamental wave. Harmonics with the desired frequency and wavelength can be selectively output based on the required frequency and wavelength. A prism can be placed on the output side of the nonlinear medium to separate the desired wavelength from other harmonics in the harmonic composite light generated by the nonlinear medium; for example, a Behringbrocca prism can be used.

[0067] However, since the harmonics generated by the nonlinear medium are polarized light, when the polarization direction of the target wavelength light does not match the required polarization direction, it is necessary to adjust the polarization direction of the separated target wavelength light. In existing technologies, multiple prisms are arranged on the light-emitting side of the nonlinear medium to construct spatially separated horizontal and vertical optical paths, achieving the deflection of the propagation direction and rotation of the polarization direction of the target wavelength light. However, this results in the laser extending in multiple dimensions and becoming bulky. To address the above problems, this application provides an optical deflection prism that solves the technical problem of multi-dimensional extension and bulky size when two polarized lights with mutually perpendicular polarization directions exist simultaneously in the laser. The following detailed description is provided with reference to specific embodiments.

[0068] refer to Figure 1 This application provides an optical deflection prism 10, which has a polyhedral structure. It is a light-transmitting medium enclosed by intersecting planes and has a refractive index greater than 1. (See reference...) Figure 1 , Figure 1 This is a schematic diagram of a light-deflecting prism provided in the first embodiment. In the diagram, a unidirectional arrow indicates the propagation direction of the light beam, and a bidirectional arrow indicates the polarization direction of the light beam. Figure 1 As shown, the optical deflection prism 10 includes a first incident surface 103, a first reflecting surface 101, a second reflecting surface 102, and a first exiting surface 104 arranged sequentially along the optical path direction. The first incident surface 103 is used to receive a first light beam 01, the first reflecting surface 101 is used to reflect the first light beam 01 entering through the first incident surface 103 to the second reflecting surface 102, the second reflecting surface 102 is used to reflect the first light beam 01 from the first reflecting surface 101 to the first exiting surface 104, and the first exiting surface 104 is used to exit the first light beam 01 from the second reflecting surface 102. The first reflecting surface 101 and the second reflecting surface 102 are arranged orthogonally.

[0069] The first reflecting surface 101 faces the first incident surface 103. The first light beam O1 is refracted by the first incident surface 103 and enters the light-deflecting prism 10, then incident on the first reflecting surface 101. The first reflecting surface 101 and the second reflecting surface 102 are orthogonally arranged, meaning that the normal of the first reflecting surface 101 is perpendicular to the normal of the second reflecting surface 102. After being reflected by the first reflecting surface 101, the first light beam O1 is incident on the second reflecting surface 102 and reflected again by the second reflecting surface 102. The first exiting surface 104 faces the second reflecting surface 102. The first light beam O1 is reflected by the second reflecting surface 102 and then incident on the first exiting surface 104. The first light beam O1 is refracted out from the first exiting surface 104, forming the second light beam O2 that exits from the light-deflecting prism 10.

[0070] The first beam 01 is incident on the first incident surface 103. After entering the light-deflecting prism 10 through the first incident surface 103, it is reflected by the first reflecting surface 101 and then by the second reflecting surface 102. The propagation direction of the first beam 01 is deflected after being reflected by the first reflecting surface 101, and then the propagation direction is deflected again after being reflected by the second reflecting surface 102.

[0071] The polarization direction of a light beam refers to the vibration direction of its light wave vector, which is perpendicular to the beam's propagation direction. After reflection by the first reflecting surface 101 / second reflecting surface 102, the vibration direction of the light wave vector of the first light beam 01 remains unchanged in the plane perpendicular to its propagation direction. However, because the propagation direction of the first light beam 01 is deflected after reflection by the first reflecting surface 101 / second reflecting surface 102, the plane perpendicular to its propagation direction is deflected. When the vibration direction of the light wave vector of the first light beam 01 is not perpendicular to the incident plane of the first light beam 01 reflected by the first reflecting surface 101 / second reflecting surface 102, the vibration direction of the light wave vector of the first light beam 01 will deflect in space, that is, the polarization direction of the first light beam 01 will deflect in space. (If the vibration direction of the light wave vector of the first beam 01 is perpendicular to the incident plane when the first beam 01 is reflected by the first reflecting surface 101 / second reflecting surface 102, the vibration direction of the light wave vector of the first beam 01 after reflection by the first reflecting surface 101 / second reflecting surface 102 remains perpendicular to the incident plane).

[0072] For reference Figure 2 , Figure 2 This is a schematic diagram illustrating the principle of a light-deflecting prism that folds the propagation direction of a light beam and rotates its polarization direction, as provided in one embodiment. In the diagram, a unidirectional arrow indicates the propagation direction of the light beam, and a bidirectional arrow indicates the polarization direction of the light beam. A spatial coordinate system, namely a three-dimensional Cartesian coordinate system (XYZ), is established. Figure 2 As shown, before the first beam 01 is incident on the first reflecting surface 101, its polarization direction is parallel to the Y-axis and its propagation direction is parallel to the Z-axis. After the first beam 01 is reflected by the first reflecting surface 101, the vibration direction of the light wave vector of the first beam 01 in the plane perpendicular to the propagation direction of the first beam 01 remains unchanged. However, since the propagation direction of the first beam 01 turns to be parallel to the Y-axis, the vibration direction of the light wave vector of the first beam 01 deflects to be parallel to the Z-axis.

[0073] The first reflecting surface 101 and the second reflecting surface 102 are orthogonally arranged, ensuring that when the first beam 01 is reflected by at least one of the first reflecting surface 101 and the second reflecting surface 102, the vibration direction of the light wave vector of the first beam 01 is not perpendicular to the incident plane of the first beam 01 when reflected by the first reflecting surface 101 / second reflecting surface 102, thus ensuring that the polarization direction of the first beam 01 can be rotated after passing through the optical deflection prism 10. Furthermore, the optical deflection prism 10 has two reflecting surfaces, the first reflecting surface 101 and the second reflecting surface 102, so that the exit direction of the second beam 02 after the first beam 01 passes through the optical deflection prism 10 is in the same dimension as the incident direction of the first beam 01. Compared with the prior art, which uses multiple sets of prisms to build spatially separated horizontal and vertical optical paths to achieve the refraction of the beam propagation direction and the rotation of the polarization direction, the optical deflection prism 10 in this embodiment has a more compact structure, occupies less space, and can overcome the problem of the large size of lasers when applied to lasers.

[0074] The material of the optical deflection prism 10 can be selected according to the center wavelength of the first beam 01 so that the transmittance of the optical deflection prism 10 to the first beam 01 meets the requirements.

[0075] An anti-reflection film may be provided on the surface of the first incident surface 103. The anti-reflection film can reduce or eliminate the reflection when the first beam 01 is incident on the first incident surface 103, so as to minimize the light loss of the first beam 01.

[0076] The surface of the first reflecting surface 101 may be provided with a high-reflectivity film, which can enhance the reflectivity of the first beam 01 reflected by the first reflecting surface 101 and reduce the light loss of the first beam 01.

[0077] The surface of the second reflective surface 102 may be provided with a high reflectivity film, which can enhance the reflectivity of the first beam 01 reflected by the second reflective surface 102 and reduce the light loss of the first beam 01.

[0078] An anti-reflection film may be provided on the surface of the first exit surface 104. The anti-reflection film can reduce or eliminate the reflection of the first beam 01 when it enters the first exit surface 104 from the light-deflecting prism 10, thereby reducing the light loss of the first beam 01 when it exits the light-deflecting prism 10.

[0079] Please refer to Figure 5 , Figure 5The diagram below illustrates the structure of a light-deflecting prism provided in the second embodiment. In some implementations, a first beam 01 is incident on a first incident surface 103 at a first preset angle. The first preset angle is Brewster's angle when the first beam 01 is incident on the first incident surface 103. Since the first beam 01 is incident on the first incident surface 103 at Brewster's angle, the transmittance of the first beam 01 on the first incident surface 103 will be relatively high, which can reduce the light energy loss when the first beam 01 enters the light-deflecting prism 10 from the first incident surface 103 and improve the light utilization rate. Furthermore, when the first beam 01 is incident on the first incident surface 103 at a Brewster angle, and the polarization direction of the first beam 01 is parallel to the plane where the optical axis of the first beam 01 intersects with the optical axis of its reflected light on the first incident surface 103 (i.e., the incident plane when the first beam 01 is incident on the first incident surface 103), under this condition, the first beam 01 is a p-beam, satisfying the full transmission condition for Brewster angle incident light. The transmittance of the first beam 01 on the first incident surface 103 will be relatively high. Ideally, the first beam 01 can be completely transmitted, thereby reducing light energy loss. For example, refer to... Figure 3 , Figure 3 Let n1 be the light intensity reflectance when light is incident from air onto a medium at different angles. The medium is glass with a refractive index of n1 = 1.50. Figure 3 This includes the reflectance curves of P-light incident from air to the medium and S-light incident from air to the medium. The horizontal axis represents the incident angle, and the vertical axis represents the light intensity reflectance. For example... Figure 3 As shown, for the P-ray in the incident beam, the polarization direction of the P-ray is parallel to the plane where the optical axis of the incident beam and the optical axis of its reflected beam intersect. When the incident angle is Brewster angle i B At that time, the reflectivity R of P light P The value is 0, meaning that all P-light is transmitted.

[0080] The Brewster angle when the first beam 01 is incident on the first incident surface 103 of the optical deflection prism 10 is determined by the refractive index of the material of the optical deflection prism 10, and is calculated according to the following formula: Where n1 represents the refractive index of air (≈1), and n2 represents the refractive index of the material of the optically variable prism 10. After determining the center wavelength λ1 of the first beam 01, the material of the optically variable prism 10 that can be used is determined according to its center wavelength, and the Brewster angle when the first beam 01 is incident on the first incident surface 103 of the optically variable prism 10 is calculated according to the refractive index of the material of the optically variable prism 10 used. For example, in some instances, the center wavelength of the first beam 01 is 213nm, which is ultraviolet light. Commonly used prism materials for ultraviolet light include ArF grade quartz, calcium fluoride (CaF2), and magnesium fluoride (MgF2). For example, if calcium fluoride is used, its refractive index at a wavelength of 213nm is 1.4855, then according to the formula... It can be calculated If the material of the light-deflecting prism 10 is quartz, then it is Therefore, when the incident direction of the first beam 01 is determined, the angle of the first incident surface 103 can be determined.

[0081] In some embodiments, the first light beam 01 from the second reflecting surface 102 is incident on the first exiting surface 104 at a second preset angle, where the second preset angle is the Brewster angle when the first light beam 01 enters the first exiting surface 104 from within the light-converting prism 10. Because the first light beam 01 from the second reflecting surface 102 is incident on the first exiting surface 104 at a Brewster angle, light energy loss when the first light beam 01 exits the first exiting surface 104 can be reduced, improving light utilization. When the first light beam 01 is incident on the first exiting surface 104 at a Brewster angle, and the polarization direction of the first light beam 01 is parallel to the plane where the optical axis of the first light beam 01 intersects with the optical axis of its reflected light on the first exiting surface 104 (i.e., the incident plane when the first light beam 01 enters the first exiting surface 104), the transmittance of the first light beam 01 on the first exiting surface 104 will be relatively high. Ideally, the first light beam 01 can be completely transmitted through the first exiting surface 104, thereby reducing light energy loss. For example, see [reference needed]. Figure 4 , Figure 4 Let n be the light intensity reflectance when light is incident on the air from the medium at different angles. The medium is glass with a refractive index of n2 = 1.54. Figure 4 This includes the reflectance curves of P-light incident from the medium to air and S-light incident from the medium to air. The horizontal axis represents the angle of incidence, and the vertical axis represents the light intensity reflectance. For example... Figure 4 As shown, for the P-ray in the incident beam, the polarization direction of the P-ray is parallel to the plane where the optical axis of the incident beam and the optical axis of its reflected beam intersect. When the incident angle is Brewster angle... At that time, the reflectivity of P light The value is 0, meaning that all P-light is transmitted.

[0082] In some embodiments, when the first beam 01 is incident on the first reflecting surface 101, the polarization direction of the first beam 01 is parallel or perpendicular to the plane where the optical axis of the first beam 01 intersects the normal of the first reflecting surface 101 (i.e., the incident plane when the first beam 01 is incident on the first reflecting surface 101). By setting the polarization direction of the first beam 01 to be parallel or perpendicular to the incident plane when the first beam 01 is incident on the first reflecting surface 101, the polarization direction of the first beam 01 can be rotated by 90° relative to its polarization direction before it was incident on the first reflecting surface 101 after being reflected sequentially by the orthogonally arranged first reflecting surface 101 and second reflecting surface 102. For example, refer to... Figure 1As shown, when the first beam 01 is incident on the first reflecting surface 101, the polarization direction of the first beam 01 is parallel to the incident plane when the first beam 01 is incident on the first reflecting surface 101, and the polarization direction of the first beam 01 when incident on the first reflecting surface 101 is vertical. After the first beam 01 is reflected sequentially by the first reflecting surface 101 and the second reflecting surface 102, it becomes the second beam 02. The polarization direction of the second beam 02 is horizontal and perpendicular to the polarization direction of the first beam 01.

[0083] For example, refer to Figure 1 or Figure 5 As shown, in some embodiments, the first reflecting surface 101 is disposed opposite to the first incident surface 103, and the first reflecting surface 101 is inclined toward the first incident surface 103. The first reflecting surface 101 being disposed opposite to the first incident surface 103 means that the projection of the first reflecting surface 101 along the direction pointing from the first reflecting surface 101 to the first incident surface 103 at least partially overlaps with the first incident surface 103. The first reflecting surface 101 being inclined toward the first incident surface 103 means that the distance from the end of the first reflecting surface 101 away from the second reflecting surface 102 to the first incident surface 103 is less than the distance from the end of the first reflecting surface 101 closer to the second reflecting surface 102 to the first incident surface 103. Since the first reflecting surface 101 and the first incident surface 103 are inclined relative to each other, the first beam 01 is refracted from the first incident surface 103 into the light-deflecting prism 10 and can be incident on the first reflecting surface 101 with an incident angle greater than zero. After being reflected by the first reflecting surface 101, it can be incident on the second reflecting surface 102, which can reduce the volume of the prism and improve the integration.

[0084] The angle of incidence of the first beam 01 incident on the first incident surface 103 of the light-deflecting prism 10 is: The angle of refraction is According to the law of refraction: The incident angle i of the first beam 01 onto the first reflecting surface 101 21 for: , The angle between the first reflecting surface 101 and the first incident surface 103 can be obtained. The range is n1 represents the refractive index of air (≈1), and n2 represents the refractive index of the material of the light-deflecting prism 10.

[0085] In some embodiments, the relative positions of the first reflecting surface 101 and the first incident surface 103 are such that total internal reflection occurs when the first light beam 01 enters through the first incident surface 103 and is incident on the first reflecting surface 101. The first light beam 01 enters the optical deflection prism 10 from the first incident surface 103 and undergoes total internal reflection upon further incident on the first reflecting surface 101. This reduces light energy loss and improves light utilization. Furthermore, since the first light beam 01 undergoes total internal reflection on the first reflecting surface 101, it avoids the need to form the first reflecting surface 101 by coating a reflective film, thus avoiding the risk of damage to the film for high-power-density beams or ultraviolet beams, and improving the reliability of the optical deflection prism.

[0086] For example, refer to Figure 1 or Figure 5 As shown, in some embodiments, the first emitting surface and the second reflecting surface 102 are disposed opposite to each other, and the second reflecting surface 102 is inclined toward the first emitting surface 104, such that the first beam 01 can be emitted from the first emitting surface 104 after being reflected by the second reflecting surface 102. The first emitting surface 104 and the second reflecting surface 102 being disposed opposite to each other means that the projection of the first emitting surface 104 along the direction from the first emitting surface 104 to the second reflecting surface 102 at least partially overlaps with the second reflecting surface 102. The second reflecting surface 102 being inclined toward the first emitting surface 104 means that the distance from the end of the second reflecting surface 102 away from the first reflecting surface 101 to the first emitting surface 104 is less than the distance from the end of the second reflecting surface 102 closer to the first reflecting surface 101 to the first emitting surface 104. Because the first exit surface 104 and the second reflecting surface 102 are inclined relative to each other, the first beam 01, after being reflected by the second reflecting surface 102, can exit from the first exit surface 104, thus avoiding stray light generation inside the prism and improving the signal-to-noise ratio of the optical system. The inclination angle of the first exit surface 104 can be designed to meet the required direction of the first beam 01 exiting the light-deflecting prism 10. For example, refer to... Figure 6 As shown, Figure 6 This is a schematic diagram illustrating the propagation of a first light beam on a second reflecting surface and a first exiting surface in an optical deflection prism according to one embodiment. For example, it is required that the first light beam 01 exits from the first exiting surface 104 in a horizontal direction and at a Brewster angle, and that the reflection angle of the first light beam 01 reflected from the second reflecting surface 102 is i. 31 The first beam 01, after being reflected by the second reflecting surface 102, makes an angle i with the horizontal plane 105. 32 The incident angle of the light incident on the first exit surface 104 is i 41 The emission angle from the first emission surface 104 is , According to Snell's Law It can be calculated ,but , Therefore, the angle between the second reflecting surface 102 and the horizontal plane 105 can be determined. for The angle between the first exit surface 104 and the horizontal plane 105 for .

[0087] For example, refer to Figure 1 As shown, the first exit surface 104 and the second reflective surface 102 are arranged opposite to each other, and the second reflective surface 102 is inclined toward the first exit surface 104. In some embodiments, the first incident surface 103 and the first exit surface 104 are orthogonally arranged. In this way, the first incident surface 103 and the first exit surface 104 in the light-deflecting prism 10 are orthogonally arranged, and the first reflective surface 101 and the second reflective surface 102 are both disposed between the first incident surface 103 and the first exit surface 104, and the first reflective surface 101 and the second reflective surface 102 are orthogonally arranged. This makes the light-deflecting prism 10 have a compact structure, a regular shape, and is easy to manufacture.

[0088] In some embodiments, the relative positions of the second reflecting surface 102 and the first reflecting surface 101 are such that the first light beam 01 reflected from the first reflecting surface 101 undergoes total internal reflection when incident on the second reflecting surface 102. The first light beam 01 is reflected by the first reflecting surface 101 to the second reflecting surface 102, where it undergoes total internal reflection. This reduces light energy loss and improves light utilization. Furthermore, the total internal reflection of the first light beam 01 on the second reflecting surface 102 avoids the need to form the second reflecting surface 102 by coating a reflective film, thus avoiding the risk of damage to the film for high-power-density beams or ultraviolet beams, and improving the reliability of the optical deflection prism 10. For example, see [reference needed]. Figure 4 As shown, for P-rays and S-rays, when the incident angle is greater than or equal to the total internal reflection angle i C At that time, the reflectivity R of P light P and the reflectivity R of S light S Both are 1, meaning that both P-rays and S-rays undergo total internal reflection.

[0089] In some embodiments, the angles of the first incident surface 103, the first reflecting surface 101, the second reflecting surface 102, and the first exit surface 104 can be designed so that the first beam 01 and the second beam 02 are both parallel to the same surface, such as a horizontal plane. The projections of the first beam 01 and the second beam 02 onto the horizontal plane can be perpendicular or not. Thus, this optical deflection prism 10 can cause a beam of light propagating parallel to a certain plane to still propagate parallel to that plane after passing through the optical deflection prism 10, but its propagation direction is reversed and its polarization direction changes relative to the original beam's polarization direction. For example, as shown... Figure 5As shown, the first incident surface 103 is vertically arranged, and the first exiting surface 104 is inclined relative to the horizontal direction. When the first beam 01 is incident on the first incident surface 103, it is parallel to the horizontal plane. After passing through the first reflecting surface 101, the second reflecting surface 102, and the first exiting surface 104 in sequence, the first beam 01 forms a second beam 02, which exits parallel to the horizontal plane. Figure 5 As shown, when the first beam 01 enters through the first incident surface 103 and is incident on the first reflecting surface 101, the polarization direction of the first beam 01 is perpendicular to the plane where the optical axis of the first beam 01 intersects with the normal of the first reflecting surface 101 (i.e., the incident plane when the first beam 01 is incident on the first reflecting surface 101). The polarization direction of the first beam 01 when it is incident on the first reflecting surface 101 is horizontal. After the first beam 01 is reflected by the first reflecting surface 101 and the second reflecting surface 102, and then exits through the first exit surface 104, it becomes the second beam 02. The polarization direction of the second beam 02 is vertical and perpendicular to the polarization direction of the first beam 01.

[0090] In some embodiments, the optical deflection prism 10 has a dispersive effect. When the first beam O1 is incident on the optical deflection prism 10, the target wavelength beam in the first beam O1 is separated due to the dispersive effect of the optical deflection prism 10. For example, see [reference needed]. Figure 7 , Figure 7 This is a schematic diagram of the optical path in which a prism with dispersive properties splits a beam of light at the target wavelength, as shown in one embodiment. Figure 7 As shown, the first beam 01 is incident on the prism 21. Due to the dispersion effect of the prism 21, the target wavelength beam 03 in the first beam 01 is separated.

[0091] For example, refer to Figure 8 , Figure 8 A schematic diagram of the structure of an optical deflection prism and crystal arrangement provided for the third embodiment is shown below. Figure 8 As shown, the harmonic beam emitted from crystal 22 is the first beam 01. The first beam 01 is incident on the first incident surface 103 of the optical deflection prism 10. After entering the optical deflection prism 10, due to the dispersion effect of the optical deflection prism 10, the target wavelength beam 03 in the first beam 01 is separated. Figure 8The dashed arrows indicate other wavelengths of light in the harmonic beam, which are separated from the target wavelength beam 03 at a certain angle. The target wavelength beam 03 is further incident on the first reflecting surface 101 and reflected by the first reflecting surface 101 to the second reflecting surface 102. The second reflecting surface 102 reflects the target wavelength beam 03 to the first exiting surface 104, and the target wavelength beam 03 is further exited from the optical deflection prism 10 through the first exiting surface 104. The optical deflection prism 10 separates the target wavelength beam 03 from the first beam 01, and causes the propagation direction of the separated target wavelength beam 03 to bend relative to the propagation direction of the first beam 01 when it is incident on the optical deflection prism 10, and also causes the polarization direction of the separated target wavelength beam 03 to rotate relative to the polarization direction of the first beam 01. The harmonic beam emitted by the crystal 22 can be a beam containing harmonics of different orders, and the target wavelength beam is a harmonic of any order.

[0092] Example 2

[0093] This embodiment also provides an optical module 30, which can be exemplarily referred to in the following example. Figure 9 , Figure 9 A schematic diagram of the structure of an optical module 30 provided in the fourth embodiment is shown below. Figure 9 As shown, the optical module 30 includes a light-converting prism 10 and an angle-compensating prism 20 as provided in any of the above embodiments; a first beam O1 exits from the angle-compensating prism 20 and further enters the light-converting prism 10. The angle-compensating prism 20 has a polyhedral structure, consisting of a medium enclosed by intersecting planes that is transparent to light, and its refractive index is greater than 1. The angle-compensating prism 20 and the light-converting prism 10 are arranged adjacent to each other, and the first beam O1 exiting from the angle-compensating prism 20 enters the first incident surface 103 of the light-converting prism 10. In this embodiment, the propagation direction of the first beam O1 before entering the light-converting prism 10 is adjusted by the angle-compensating prism 20, enabling the light-converting prism 10 to adapt to application scenarios with different directions of the first beam O1.

[0094] In some embodiments, the angle-compensating prism 20 and the light-deflecting prism 10 are separately disposed. For example... Figure 9In the diagram, the angle-compensating prism 20 and the optical-deflecting prism 10 are independent prisms, separately arranged. In this embodiment, because the angle-compensating prism 20 and the optical-deflecting prism 10 are separately arranged, each prism component can be independently adjusted and optimized according to different optical system requirements, thus allowing for flexible arrangement of the angle-compensating prism 20 and the optical-deflecting prism 10. In this embodiment, the specific structure and shape of the angle-compensating prism 20 are not limited. In some embodiments, the angle-compensating prism 20 includes a second incident surface 201, a third reflecting surface 202, and a second exiting surface 203 arranged sequentially along the optical path direction; the second incident surface 201 receives the first beam 01, the third reflecting surface 202 reflects the first beam 01 entering through the second incident surface 201 to the second exiting surface 203, and the second exiting surface 203 allows the first beam 01 from the third reflecting surface 202 to exit. The first beam O1 is incident on the second incident surface 201 of the angle-compensating prism 20. After entering the angle-compensating prism 20 through the second incident surface 201, it is further incident on the third reflecting surface 202. The third reflecting surface 202 reflects the first beam O1 to the second exiting surface 203, and the first beam O1 exits from the angle-compensating prism 20 through the second exiting surface 203. In this embodiment, the angle-compensating prism 20 adopts a three-sided structure design. By adding two incident / exit interfaces and one total internal reflection operation, multiple reversals of the beam propagation path can be achieved. This optical design can precisely control the incident angle of the first beam O1 incident on the optical reversing prism 10, thereby effectively reducing the overall size of the laser optical path system.

[0095] In some implementation methods, reference may be made to Figure 9 As shown, the third reflecting surface 202 and the second exiting surface 203 are arranged opposite to each other, that is, the projection of the second exiting surface 203 along the direction from the second exiting surface 203 to the third reflecting surface 202 at least partially overlaps with the third reflecting surface 202. One end of the second incident surface 201 is connected to the third reflecting surface 202, and the other end is connected to the second exiting surface 203. The included angle between the second incident surface 201 and the third reflecting surface 202 satisfies... n1 represents the refractive index of air (≈1), and n3 represents the refractive index of the material of the angle-compensating prism 20. This angle design allows the first beam 01 to be refracted from the second incident surface 201 into the angle-compensating prism 20 and then obliquely incident onto the third reflecting surface 202. The angle-compensating prism 20 can be, but is not limited to, a trapezoidal prism.

[0096] In some embodiments, the angle compensation prism 20 and the light-deflecting prism 10 are integrally disposed. Compared with separate disposals, this reduces the time it takes for the first beam 01 to exit from the angle compensation prism 20 into the air and the time it takes for the first beam 01 to enter the light-deflecting prism 10 from the air, thereby reducing light energy loss. For example, see [reference needed]. Figure 10 , Figure 10 A schematic diagram of the structure of an optical module 30 provided in the fifth embodiment is shown below. Figure 10 As shown, the angle compensation prism 20 and the optical deflection prism 10 are integrally disposed. The angle compensation prism 20 includes a second incident surface 201, a third reflecting surface 202, and a fourth reflecting surface 204. The second incident surface 201 is used to receive the first beam 01. The third reflecting surface 202 is used to reflect the first beam 01 entering through the second incident surface 201 to the fourth reflecting surface 204. The fourth reflecting surface 204 is used to reflect the first beam 01 from the third reflecting surface 202 to the first reflecting surface 101 of the optical deflection prism 10. In this embodiment, the angle compensation prism 20 adopts a three-sided structure design. By adding one incident interface and two total internal reflection operations, multiple reversals of the beam propagation path can be achieved. This optical design can precisely control the incident angle of the first beam 01 incident on the optical deflection prism 10, thereby effectively reducing the overall size of the laser optical path system. One end of the second incident surface 201 is connected to the third reflecting surface 202, and the other end is connected to the fourth reflecting surface 204. The included angle between the second incident surface 201 and the third reflecting surface 202 satisfies n1 represents the refractive index of air (≈1), and n3 represents the refractive index of the material of the angle-compensating prism 20. This angle design allows the first beam 01 to be refracted from the second incident surface 201 into the angle-compensating prism 20 and then obliquely incident onto the third reflecting surface 202.

[0097] In some embodiments, the third reflecting surface 202 is inclined relative to the second incident surface 201, and the inclination angle of the third reflecting surface 202 satisfies the condition that total internal reflection occurs when the first beam 01 is incident on the third reflecting surface 202. Since the first beam 01 undergoes total internal reflection upon incident on the third reflecting surface 202, this embodiment ensures efficient reflection of the angle-compensating prism 20 by having a third reflecting surface 202 that satisfies the condition of total internal reflection, reducing light energy loss and improving light utilization. Furthermore, the total internal reflection of the first beam 01 on the third reflecting surface 202 avoids the need to form the third reflecting surface 202 by coating a reflective film, thus avoiding the risk of damage to the film for high-energy-density beams or ultraviolet beams and improving the reliability of the angle-compensating prism.

[0098] An antireflection coating may be provided on the surface of the second incident surface 201. The antireflection coating can reduce or eliminate the reflection when the first beam 01 is incident on the second incident surface 201, so as to minimize the light loss of the first beam 01.

[0099] The surface of the third reflecting surface 202 may be provided with a high reflectivity film, which can enhance the reflectivity of the first beam 01 reflected by the third reflecting surface 202 and reduce the light loss of the first beam 01.

[0100] The surface of the second exit surface 203 may be provided with an anti-reflection film. The anti-reflection film can reduce or eliminate the reflection of the first beam 01 when it is incident from the angle compensation prism 20 to the second exit surface 203, thereby reducing the light loss of the first beam 01 when it exits from the angle compensation prism 20.

[0101] The surface of the fourth reflecting surface 204 may be provided with a high-reflectivity film, which can enhance the reflectivity of the first beam 01 reflected by the fourth reflecting surface 204 and reduce the light loss of the first beam 01.

[0102] Example 3

[0103] This embodiment also provides an optical device 40, which can be referred to. Figure 11 , Figure 11 A schematic diagram of an optical device 40 provided in the sixth embodiment is shown below. Figure 11 As shown, the optical device 40 includes an optical module 30, a resonant cavity 401, a pump source (not shown) and a working substance 402 as provided in the above embodiments.

[0104] In some embodiments, the optical device 40 further includes: a crystal 22 for generating a harmonic beam containing harmonics of different orders; an optical module 30 disposed on the light-emitting side of the crystal 22, and the optical deflection prism 10 of the optical module 30 having a dispersive effect. The harmonic beam generated by the crystal 22 is incident on the optical module 30, and after passing through the angle compensation prism 20 of the optical module 30, it is incident on the optical deflection prism 10. Due to the dispersive effect of the optical deflection prism 10, the harmonic beam is incident on the first incident surface 103 of the optical deflection prism 10. After entering the optical deflection prism 10, the target wavelength beam 03 in the harmonic beam is separated. The target wavelength beam 03 is further incident on the first reflecting surface 101 and reflected by the first reflecting surface 101 to the second reflecting surface 102. The second reflecting surface 102 reflects the target wavelength beam 03 to the first exit surface 104. The target wavelength beam 03 is further emitted from the optical deflection prism 10 through the first exit surface 104. The optical deflection prism 10 separates the target wavelength beam 03 from the harmonic beam and reverses the propagation direction of the separated target wavelength beam 03 relative to the direction of the harmonic beam emitted from the crystal 22. For example... Figure 11 As shown, the propagation direction of the target wavelength beam 03 emitted from the optical module 30 is folded by 90° relative to the direction of the harmonic beam emitted from the crystal 22.

[0105] The optical device 40 further includes: a working medium 402. This is used to excite particles in the working medium 402 to a high energy level state under the excitation of pump light, resulting in stimulated emission and optical amplification. A resonant cavity 401, a crystal 22, and the working medium 402 are disposed within the resonant cavity 401. The resonant cavity 401 is used to feed back light generated by the working medium 402 or light emitted from the crystal 22 through the resonant cavity 401 to form an oscillating laser. In this embodiment, the optical device 40 outputs laser light of the target wavelength.

[0106] The optical device 40 of this application embodiment uses an optical module 30 to realize the reversal of the beam propagation direction and the rotation of the beam polarization direction. Compared with the prior art, which realizes the reversal of the beam propagation direction and the rotation of the beam polarization direction through a large optical path structure, the optical module 30 has a more compact structure and occupies less space, which can overcome the problem of the large size of the laser.

[0107] Example 4

[0108] This embodiment also provides a semiconductor device 50, including the optical device 40 provided in the above embodiments.

[0109] In this embodiment of the semiconductor device 50, the optical device 40 uses an optical module 30 to realize the reversal of the beam propagation direction and the rotation of the beam polarization direction. Compared with the prior art, which uses a large optical path structure to realize the reversal of the beam propagation direction and the rotation of the beam polarization direction, the optical module 30 has a more compact structure and occupies less space, which can overcome the problem of the large size of the laser.

[0110] For reference Figure 12 , Figure 12 A schematic diagram of a semiconductor device provided in the seventh embodiment, as shown below. Figure 12 As shown, the semiconductor device 50 can be a semiconductor defect detection device. The semiconductor defect detection device includes an optical device 40, a detection device 501, and a motion stage 502. The motion stage 502 is used to place the wafer 503 and can move the wafer 503. The optical device 40 generates a light beam and projects the light beam onto the wafer 503. The detection device 501 acquires the light from the wafer 503 and obtains an image of the surface of the wafer 503. Based on the image, defects in the wafer 503 are detected.

[0111] The above-described preferred embodiments have further illustrated the purpose, technical solutions, and advantages of the present invention. It should be understood that the above are merely preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A light-deflecting prism, characterized in that, It includes a first incident surface, a first reflecting surface, a second reflecting surface, and a first exit surface arranged sequentially along the optical path direction; The first incident surface is used to receive a first light beam, the first reflecting surface is used to reflect the first light beam entering through the first incident surface to the second reflecting surface, the second reflecting surface is used to reflect the first light beam from the first reflecting surface to the first exiting surface, and the first exiting surface is used to exit the first light beam from the second reflecting surface, wherein the first reflecting surface and the second reflecting surface are orthogonally arranged.

2. The light-converting prism according to claim 1, characterized in that, The first beam is incident on the first incident surface at a first preset angle, where the first preset angle is the Brewster angle when the first beam is incident on the first incident surface.

3. The light-converting prism according to claim 1 or 2, characterized in that, The first beam from the second reflecting surface is incident on the first exiting surface at a second preset angle, which is Brewster's angle when the first beam is incident from the light-deflecting prism onto the first exiting surface.

4. The light-deflecting prism according to any one of claims 1 to 3, characterized in that, When the first beam is incident on the first reflecting surface, the polarization direction of the first beam is parallel or perpendicular to the plane where the optical axis of the first beam intersects with the normal of the first reflecting surface.

5. The light-deflecting prism according to any one of claims 1 to 4, characterized in that, The first reflecting surface is disposed opposite to the first incident surface, and the first reflecting surface is inclined toward the first incident surface.

6. The light-deflecting prism according to any one of claims 1 to 5, characterized in that, The first emitting surface and the second reflecting surface are arranged opposite to each other, and the second reflecting surface is inclined toward the first emitting surface.

7. The light-deflecting prism according to any one of claims 1 to 6, characterized in that, The first incident surface and the first exit surface are orthogonally arranged.

8. The light-deflecting prism according to any one of claims 1 to 7, characterized in that, The relative positions of the first reflecting surface and the first incident surface are such that total internal reflection occurs when the first light beam enters through the first incident surface and is incident on the first reflecting surface.

9. The light-deflecting prism according to any one of claims 1 to 8, characterized in that, The relative positions of the second reflecting surface and the first reflecting surface are such that the first light beam reflected from the first reflecting surface undergoes total internal reflection when it is incident on the second reflecting surface.

10. An optical module, characterized in that, include: The light-deflecting prism as described in any one of claims 1 to 9; An angle-compensating prism from which the first beam is emitted.

11. The optical module according to claim 10, characterized in that, The angle compensation prism and the light deflection prism are separately disposed. The angle compensation prism includes a second incident surface, a third reflecting surface and a second exiting surface arranged sequentially along the light path direction. The second incident surface is used to receive the first light beam, the third reflecting surface is used to reflect the first light beam entering through the second incident surface to the second exiting surface, and the second exiting surface is used to allow the first light beam from the third reflecting surface to exit.

12. The optical module according to claim 10, characterized in that, The angle compensation prism and the light-deflecting prism are integrally disposed. The angle compensation prism includes a second incident surface, a third reflecting surface and a fourth reflecting surface. The second incident surface is used to receive the first light beam. The third reflecting surface is used to reflect the first light beam entering through the second incident surface to the fourth reflecting surface. The fourth reflecting surface is used to reflect the first light beam from the third reflecting surface to the first reflecting surface of the light-deflecting prism.

13. The optical module according to claim 11 or 12, characterized in that, The third reflecting surface is inclined relative to the second incident surface, and the inclination angle of the third reflecting surface is such that total internal reflection occurs when the first light beam is incident on the third reflecting surface.

14. An optical device, characterized in that, include: The optical module as described in any one of claims 10 to 13.

15. A semiconductor device, characterized in that, include: The optical device as described in claim 14.

Images