Static pressure adsorption device capable of being driven directionally
By combining the static pressure adsorption device with a piezoelectric drive mechanism, and utilizing the periodic vibration of the piezoelectric stack and the friction drive of the V-shaped frame, the directional movement and ultra-precise positioning of the static pressure adsorption device are realized, solving the problem that existing devices cannot move and enhancing the movement accuracy and driving force.
Patent Information
- Application Number
- CN202511822633.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-12-04
- Publication Date
- 2026-03-03
AI Technical Summary
Existing static pressure adsorption devices are immobile and cannot meet the needs of ultra-precision manufacturing and ultra-precision positioning.
The static pressure adsorption device is combined with a piezoelectric drive mechanism. The periodic elongation and contraction of the piezoelectric stack drives the static pressure adsorption device to move in a specific direction, and the driving force is generated by the friction between the V-shaped frame and the ground.
It achieves directional movement and ultra-precision positioning of the static pressure adsorption device, enhances movement accuracy and driving force, and supports multi-directional movement.
Smart Images

Figure CN121589738A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to a static pressure adsorption device, and more specifically to a directionally driven static pressure adsorption device. Background Technology
[0002] Depending on the principle, adsorption can be divided into static pressure adsorption, dynamic pressure adsorption, and extrusion adsorption. This invention is based on the principle of static pressure adsorption. The adsorption process is the opposite of suspension; adsorption achieves close contact with the platform by continuously drawing air outwards.
[0003] Current hydrostatic adsorption devices are all immovable; once they start working, they are firmly adsorbed onto the platform, which cannot meet the needs of ultra-precision manufacturing and ultra-precision positioning. As manufacturing precision continues to increase, increasingly higher requirements are being placed on the movement accuracy of adsorption devices.
[0004] This invention utilizes piezoelectric driving technology, applying alternating current to both ends of a piezoelectric stack to cause the piezoelectric stack to periodically elongate and shorten, thereby driving the static pressure adsorption device to move in a specific direction. Summary of the Invention
[0005] This invention discloses a directionally driven hydrostatic adsorption device. Structurally, this device integrates a hydrostatic adsorption unit with a piezoelectric driving mechanism; in principle, it involves the principles of hydrostatic adsorption and the inverse piezoelectric effect. This device not only achieves adsorption but also provides a driving effect in different directions, achieving positioning. The piezoelectric stack continuously elongates and shortens, utilizing the friction between the V-shaped frame and the ground to generate driving force, thus moving the adsorption unit.
[0006] To achieve the above objectives, the technical solution of the present invention is as follows:
[0007] A directionally driven static pressure adsorption device comprises a static pressure adsorption unit and a piezoelectric driving mechanism. The static pressure adsorption unit is cylindrical, with a through-hole of a certain diameter at its center, serving as the air intake. Four sets of piezoelectric driving mechanisms are installed inside the static pressure adsorption unit. Each set of piezoelectric driving mechanisms has identical structure, materials, quantity, and dimensional parameters. Its structure includes an end cap, two cylindrical piezoelectric stacks, two rubber pillars, and a V-shaped frame. Strong adhesive is also required during installation and fixing. The tops of the two cylindrical piezoelectric stacks are glued to the bottom of the end cap. Each end of the V-shaped frame has a rubber pillar, and the two components are 3D printed as a single unit. The tops of the two rubber pillars are threaded to the bottoms of the two cylindrical piezoelectric stacks, thus forming a unified whole from the end cap, cylindrical piezoelectric stacks, rubber pillars, and V-shaped frame. The end cap surface has two through-holes for connecting the two cylindrical piezoelectric stacks to electricity. The static pressure adsorption device also features a wiring groove. The wires extending from the cylindrical piezoelectric stacks connect to the power supply through this groove, ensuring the tops of the device are on the same plane. When alternating current is applied to the two cylindrical piezoelectric stacks, they generate periodic vibrations with a 180-degree phase difference. When one stack extends, the other contracts. Once the displacement amplitude is reached, the movement reverses, eventually returning to the initial position. The bottom of the V-shaped frame features a balance beam structure to increase friction with the horizontal plane, providing greater driving force for the static pressure adsorption device. After the piezoelectric drive mechanism is assembled, the end caps are placed into the grooves on the static pressure adsorption device body and then glued and sealed, making the piezoelectric drive mechanism and the static pressure adsorption device a single unit.
[0008] As a preferred embodiment of the present invention, the static pressure adsorption device body is cylindrical and contains four through holes inside. Each through hole houses a set of piezoelectric drive mechanisms. The static pressure adsorption device body is machined and made of stainless steel or aluminum alloy.
[0009] As a preferred embodiment of the present invention, the top view of the end cap has semi-circular arcs on both sides, which are fixed in the slots of the static pressure adsorption device body, using a gap fit method, and then applying glue to achieve fixation and sealing.
[0010] As a preferred embodiment of the present invention, the suction pipe is connected to the central hole at the upper end of the static pressure adsorption device to continuously draw air outward, thereby achieving the adsorption effect, and the suction pressure is adjustable.
[0011] In a preferred embodiment of the present invention, there are four sets of piezoelectric drive mechanisms, each located on two mutually perpendicular straight lines. Two sets of mechanisms on one straight line can achieve movement in two opposite directions along that line. If necessary, the number of piezoelectric drive mechanisms can be increased to achieve movement in more directions.
[0012] As a preferred embodiment of the present invention, each cylindrical piezoelectric stack and the rubber column are coaxially assembled and fixed by a threaded connection.
[0013] As a preferred embodiment of the present invention, each cylindrical piezoelectric stack has two wires, which are respectively connected to the positive and negative terminals of the power supply. The input AC voltage can cause the piezoelectric stack to produce periodic elongation-shortening vibrations. The vibration frequency, power and phase can be adjusted. The phase difference described in the present invention is 180 degrees.
[0014] As a preferred embodiment of the present invention, after the four sets of piezoelectric drive mechanisms are installed, they are all at the same height, and the vibration frequency and amplitude after being energized are the same.
[0015] As a preferred embodiment of the present invention, the static pressure adsorption device is firmly adsorbed onto the horizontal surface during the outward air intake process, and can move horizontally under the action of the piezoelectric drive mechanism.
[0016] As a preferred embodiment of the present invention, after the piezoelectric drive mechanism and the static pressure adsorption device are assembled and fixed, there is a certain height difference between the antennae of the V-shaped frame and the horizontal platform, the range of which does not exceed tens of micrometers.
[0017] As a preferred embodiment of the present invention, the upper end of the static pressure adsorption device body can withstand pressure and fix some measuring or sensing devices.
[0018] The present invention provides a directionally driven hydrostatic adsorption device, the advantages of which are:
[0019] By adding a piezoelectric drive mechanism to the static pressure adsorption device, directional movement can be achieved on a water platform, realizing ultra-precision positioning or ultra-precision driving effects.
[0020] The present invention uses piezoelectric drive, and the driving frequency, amplitude and phase can be adjusted. Increasing the driving frequency and amplitude can realize the rapid movement of the static pressure adsorption device.
[0021] The present invention proposes a directionally driven static pressure adsorption device that can move in four directions along two straight lines, with diverse movement directions. The number of piezoelectric drive mechanisms can also be increased as needed to achieve movement in more directions. Attached Figure Description
[0022] To more clearly illustrate the technical solution of the present invention, the embodiments of the present invention will be described in detail below with reference to the accompanying drawings. The accompanying drawings are only one embodiment of the present invention, and other improvements and designs can be made based on these drawings without creative effort. Wherein:
[0023] Figure 1 This is a piezoelectric drive mechanism according to an embodiment of the present invention;
[0024] Figure 2 The three-dimensional structure of the static pressure adsorption device body according to the embodiment of the present invention;
[0025] Figure 3 This is a top view of the static pressure adsorption device according to an embodiment of the present invention;
[0026] Figure 4 This is a bottom view of the static pressure adsorption device according to an embodiment of the present invention.
[0027] Among them, 1 is the end cap; 2 is the cylindrical piezoelectric stack; 3 is the cylindrical piezoelectric stack; 4 is the rubber column; 5 is the rubber column; 6 is the V-shaped frame; 7 is the wiring hole; 8 is the top of the air intake hole; 9 is the wiring groove; 10 is the body of the static pressure adsorption device; and 11 is the bottom of the air intake hole. Detailed Implementation
[0028] The technical solution of the present invention will be described in detail below with reference to the accompanying drawings of the embodiments described herein.
[0029] The entire device mainly consists of two parts: a static pressure adsorption device and a piezoelectric drive mechanism. The static pressure adsorption device body 10, wiring hole 7, wiring groove 9, top of suction port 8, and bottom of suction port 11 constitute the static pressure adsorption device. The end cap 1, cylindrical piezoelectric stack 2, cylindrical piezoelectric stack 3, rubber column 4, rubber column 5, and V-shaped frame 6 constitute the piezoelectric drive mechanism. The top of suction port 8 is connected to an external air pipe, continuously drawing air outward under pressure to achieve the adsorption effect. The static pressure adsorption device can only move horizontally.
[0030] This invention comprises four sets of piezoelectric drive mechanisms. Each set includes an end cap 1, two cylindrical piezoelectric stacks 2 and 3, two rubber pillars 4 and 5, and a V-shaped frame 6. All components are connected and bonded together to form a single unit. Specifically, the rubber pillars 4 and 5 and the V-shaped frame 6 are integrally manufactured using 3D printing. The other ends of the rubber pillars 4 and 5 are fixed to the two cylindrical piezoelectric stacks 2 and 3 via threaded connections. The other ends of the two cylindrical piezoelectric stacks 2 and 3 are bonded to the end cap 1. Both the upper and lower surfaces of the piezoelectric stacks are planar.
[0031] The two cylindrical piezoelectric stacks 2 and 3 have a phase difference of 180 degrees. When an alternating current is applied to piezoelectric stack 2, it generates elongation vibration, while piezoelectric stack 3 synchronously generates contraction vibration. When each reaches its amplitude, the vibration state changes; the previously elongated state becomes contraction, and the previously contracted state becomes elongation. Rubber columns 4 and 5 connect the cylindrical piezoelectric stacks 2 and 3 to the V-shaped frame. These rubber columns 4 and 5 can not only extend and retract axially but also undergo bending deformation.
[0032] As attached Figure 1As shown, when the cylindrical piezoelectric stack 3 extends, it transmits force to the rubber column 5 and the right end of the V-shaped frame 6. At the same time, the cylindrical piezoelectric stack 2 contracts. This contraction and contraction causes the V-shaped frame 6 to move downward to the left, and the bottom of the V-shaped frame 6 contacts the marble platform. After reaching the vibration amplitude, the cylindrical piezoelectric stack 2 extends, and the cylindrical piezoelectric stack 3 contracts. In one cycle, all mechanisms return to their initial positions. Due to the friction between the bottom of the V-shaped frame 6 and the marble platform, the static pressure adsorption device is driven to move horizontally to the left during the return to the initial position. This cycle repeats, and the static pressure adsorption device can generate a certain amount of movement and positioning.
[0033] When the cylindrical piezoelectric stack 2 first undergoes elongation vibration, the cylindrical piezoelectric stack 3 subsequently undergoes contraction vibration, causing the static pressure adsorption device to move horizontally to the right. Thus, movement in two opposite directions along a straight line can be achieved. In the same way, the static pressure adsorption device can be moved in another vertical direction.
[0034] The current design employs four sets of piezoelectric drive mechanisms, and the structural dimensions can be optimized by adding more piezoelectric drive mechanisms to achieve movement in more directions. The tentacles of the V-shaped frame 6 can be designed with other structural forms to achieve turning or more complex movements.
[0035] It should be noted that the above description is only one embodiment of the present invention and should not be construed as a limitation of the present invention. For those skilled in the art, various modifications can be made on this basis. Any modifications made without innovative effort are within the protection scope of the present invention.
Claims
1. A directionally driven hydrostatic adsorption device, characterized in that: The device mainly includes a piezoelectric drive mechanism and a static pressure adsorption device; the static pressure adsorption device is cylindrical, and the body (10) is composed of an air intake hole (8), a wiring groove (9), and a hole (11); the piezoelectric drive mechanism is composed of an end cap (1), a cylindrical piezoelectric stack (2), a cylindrical piezoelectric stack (3), a rubber column (4), a rubber column (5), and a V-shaped frame (6); the cylindrical piezoelectric stack is based on the inverse piezoelectric effect, and when AC voltage is applied to both ends, it will generate periodic vibration along the axial direction, and the phase difference between the two cylindrical piezoelectric stacks is 180 degrees; a rubber column is fixed at each end of the top of the V-shaped frame, and the rubber column is then connected and fixed to the bottom of the cylindrical piezoelectric stack, so that the cylindrical piezoelectric stack, the rubber column, and the V-shaped frame form a whole; each set of piezoelectric drive mechanisms includes two cylindrical piezoelectric stacks. When one of them is energized and generates an elongation motion, it will drive the V-shaped frame below to generate a downward displacement, while the other cylindrical piezoelectric stack, due to the opposite phase, will generate a contraction motion, and the V-shaped frame will... Under the action of stretching and contraction, a displacement with components in both the horizontal and vertical directions is generated, while contacting the marble platform. When the stretching and contraction motions reach their amplitude, the two cylindrical piezoelectric stacks will deform in opposite directions. At this time, the V-shaped frame will also move in opposite directions. Due to the friction between the bottom antennae of the V-shaped frame and the marble platform, this frictional force will cause the static pressure adsorption device to move in opposite directions, realizing directional drive. When the V-shaped frame returns to the initial state, one drive process is completed. With continuous power supply, the static pressure adsorption device will continue to move in a specific direction. If the phase difference between the two cylindrical piezoelectric stacks of each drive mechanism is adjusted to -180 degrees, the V-shaped frame will first move in opposite directions. When the deformation of the cylindrical piezoelectric stacks reaches its limit, it will gradually return to the initial state. At this time, the static pressure adsorption device will move in opposite directions. By adjusting the phase difference, the static pressure adsorption device can realize two drive processes, forward and backward, in a straight line.
2. The directionally driven hydrostatic adsorption device according to claim 1, characterized in that: The wiring hole (7) on the body (10) of the static pressure adsorption device is circular, from which the wires of the cylindrical piezoelectric stack extend and are connected to the power supply; the wiring hole (7) is located on the surface of the end cap (1), and each end cap contains two wiring holes.
3. The directionally driven hydrostatic adsorption device according to claim 1, characterized in that: The cylindrical piezoelectric stack (2) and the cylindrical piezoelectric stack (3) are exactly the same. Each piezoelectric drive mechanism contains two cylindrical piezoelectric stacks. The structure of the present invention contains a total of 8 such piezoelectric stacks.
4. The directionally driven hydrostatic adsorption device according to claim 1, characterized in that: The rubber columns (4) and (5) have the same structure and material. The two rubber columns and the V-shaped frame are an integral structure, which is formed by 3D printing. The top of the two rubber columns is bonded to the bottom of the two cylindrical piezoelectric stacks with glue.
5. The directionally driven hydrostatic adsorption device according to claim 1, characterized in that: The two cylindrical piezoelectric stacks of each piezoelectric drive mechanism are fixed to the bottom of the end cap with glue at the top, and the wires are connected to the external power supply through the wiring hole (7) and wiring groove (9).
6. The directionally driven hydrostatic adsorption device according to claim 1, characterized in that: The static pressure adsorption device has a through hole from the top center to the bottom. The top port is connected to the pressure pipe to draw air out and achieve the adsorption effect. During the adsorption process, the device can only move in the horizontal direction.
7. The directionally driven hydrostatic adsorption device according to claim 1, characterized in that: The static pressure adsorption device body includes four through holes, each through hole housing a piezoelectric drive mechanism. The end cap of the piezoelectric drive mechanism is fixed in the slot of the static pressure adsorption device body and sealed and fixed by applying glue.
8. The directionally driven hydrostatic adsorption device according to claim 1, characterized in that: The antennae at the bottom of the V-shaped frame are crossbeams, which can increase the contact area with the horizontal surface, thereby increasing the friction.
9. The directionally driven hydrostatic adsorption device according to claim 1, characterized in that: The rubber column can not only expand and contract along the axial direction, but also bend and deform.