Vacuum cabin equipment transferring and mounting system and workpiece transferring method

Abstract

The invention relates to intelligent logistics equipment, in particular to a vacuum chamber equipment transfer and installation system which comprises a main bearing transfer trolley, auxiliary installation equipment and a transfer frame, the main bearing transfer trolley is provided with a set of first rails, and the first rails are consistent with rails in a vacuum chamber; the auxiliary mounting equipment comprises a chassis frame, a bearing platform and a plurality of transfer frame mounting ends, the transfer frame mounting ends are all arranged on the bearing platform, the bearing platform is connected to the chassis frame, and the bearing platform is suitable for moving in the X direction and the Y direction relative to the chassis frame. The chassis frame is connected to the main bearing transfer trolley, the chassis frame is suitable for moving relative to the first track, the top of the transfer frame is used for being connected with a workpiece to be transferred, and the bottom of the transfer frame is connected to the transfer frame mounting end. According to the invention, the transfer and assembly efficiency of large-size and large-tonnage workpieces mounted in the vacuum cabin can be improved.

Description

Technical Field

[0001] This invention relates to an intelligent logistics device, and more particularly to a vacuum chamber equipment transfer and installation system and a method for transferring workpieces. Background Technology

[0002] Currently, large-tonnage and large-size workpieces in vacuum chamber equipment are mostly transferred using cranes. However, the use of cranes has high limitations on the conditions of the factory and the transfer site. The existing factory conditions and transfer site limit the use of cranes, making it inconvenient to turn over large-tonnage and large-size workpieces and resulting in low assembly efficiency. Summary of the Invention

[0003] The technical problem to be solved by the present invention is to provide a vacuum chamber equipment transfer and installation system and a method for transferring workpieces, which improves the efficiency of transfer and assembly of large-size, heavy-tonnage workpieces installed in a vacuum chamber.

[0004] To address the aforementioned technical problems, this application provides the following technical solution:

[0005] This invention discloses a vacuum chamber equipment transfer and installation system, comprising a main load-bearing transfer vehicle, auxiliary installation equipment, and a transfer frame.

[0006] The main load-bearing transfer vehicle is used to travel between the assembly frame and the vacuum chamber. The main load-bearing transfer vehicle is equipped with a first track, which is consistent with the track inside the vacuum chamber.

[0007] The auxiliary installation equipment includes a chassis frame, a load-bearing platform, and multiple adapter bracket mounting ends. All adapter bracket mounting ends are mounted on the load-bearing platform, and the height of each adapter bracket mounting end is adjustable. The load-bearing platform is connected to the chassis frame and is adapted to move relative to the chassis frame in the X and Y directions. The chassis frame is connected to the main load-bearing transfer vehicle, and a detachable locking device is provided between the chassis frame and the main load-bearing transfer vehicle. The chassis frame is adapted to move relative to the first track.

[0008] The top of the adapter frame is used to connect the workpiece to be transferred, and the bottom of the adapter frame is connected to the mounting end of the adapter frame.

[0009] Furthermore, the auxiliary installation equipment also includes a rail wheel connected to the bottom surface of the chassis frame, and the rail wheel is adapted to move relative to the first rail.

[0010] Furthermore, the auxiliary installation equipment also includes a mounting plate, a first mounting seat, a second mounting seat, a third mounting seat, a fourth mounting seat, a first driving component, and a second driving component. The mounting plate is disposed below the bearing platform. A second track is disposed on the chassis frame, and the second track is disposed along the X-axis. The mounting plate is adapted to move relative to the second track under the drive of the second driving component. Four adapter mounting ends are disposed, and the four adapter mounting ends are respectively disposed on the first mounting seat, the second mounting seat, the third mounting seat, and the fourth mounting seat. The first mounting seat, the second mounting seat, the third mounting seat, and the fourth mounting seat are all connected to the bearing platform. A third track is disposed on the mounting plate, and the third track is disposed along the Y-axis. The bearing platform moves relative to the third track under the drive of the first driving component, thereby driving the first mounting seat, the second mounting seat, the third mounting seat, and the fourth mounting seat to move along the Y-axis.

[0011] Furthermore, it also includes four hydraulic cylinders, the cylinder bodies of which are respectively connected to the first mounting base, the second mounting base, the third mounting base, and the fourth mounting base, and the four adapter bracket mounting ends are respectively connected to the piston rod end of one of the hydraulic cylinders.

[0012] Furthermore, the adapter frame includes a base frame, a first rocker arm, and a second rocker arm. The bottoms of the first rocker arm and the second rocker arm are both connected to the base frame. The first rocker arm and the second rocker arm are respectively located at both ends of the base frame along the length direction. The angle between the first rocker arm and the base frame and the angle between the second rocker arm and the base frame are both adjustable. The tops of the first rocker arm and the second rocker arm are used to connect the workpiece to be transferred.

[0013] Furthermore, it also includes a rocker arm drive component, which includes a handwheel, a reducer, a first gear, a second gear, and a drive shaft. The drive shaft is rotatably connected to the base frame. The first rocker arm and the second gear are both connected to the drive shaft and rotate synchronously with the drive shaft. The reducer is mounted on the base frame. The handwheel is connected to the input shaft of the reducer, and the first gear is connected to the output shaft of the reducer. The first gear meshes with the second gear.

[0014] Furthermore, the base frame is a rectangular frame composed of a base frame front rod, a base frame rear rod, a base frame left rod, and a base frame right rod. The first rocker arm and the second rocker arm have the same structure. The first rocker arm is a frame structure composed of a rocker arm front rod, a rocker arm rear rod, a rocker arm upper rod, and a rocker arm lower rod. The drive shaft is rotatably connected to the base frame front rod, the rocker arm front rod is connected to the drive shaft, a support shaft is provided on the base frame rear rod, and the rocker arm rear rod is rotatably connected to the support shaft.

[0015] Furthermore, limit stops are provided on both sides of the rocker arm front rod on the base frame front rod and on both sides of the rocker arm rear rod on the base frame rear rod.

[0016] Furthermore, a groove is provided on the upper surface of the middle part of the base frame, and casters are connected to the bottom of the base frame. Both the front rod and the rear rod of the base frame are provided with connecting through holes. Multiple bolts pass through the connecting through holes and are connected to the mounting end of the adapter frame to connect the adapter frame to the auxiliary installation equipment. The top of the first rocker arm and the second rocker arm are provided with support blocks, and the top surface of the support blocks is an arc surface.

[0017] The present invention employs a method for transferring workpieces using the aforementioned vacuum chamber equipment transfer and installation system, comprising the following steps:

[0018] Step 1: Move the auxiliary installation equipment to the track below the assembly frame and directly beneath it. Connect the adapter frame to its mounting end, and attach the workpiece to be transferred from the assembly frame to the adapter frame.

[0019] Step 2: Align and effectively overlap the first track on the main load-bearing transfer vehicle with the track on the assembly frame. The auxiliary installation equipment then moves from the assembly frame onto the first track, and the auxiliary installation equipment and the main load-bearing transfer vehicle are locked together.

[0020] Step 3: The main load-bearing transfer vehicle moves to the vacuum chamber area, the first track aligns with and effectively overlaps with the track inside the vacuum chamber, the auxiliary installation equipment unlocks from the main load-bearing transfer vehicle, and the auxiliary installation equipment travels along the first track and the track inside the vacuum chamber into the vacuum chamber.

[0021] Step 4: Adjust the position of the workpiece to be transferred by adjusting the height of each of the adapter mounting ends. After the position is adjusted, install the workpiece on the special bracket inside the vacuum chamber, disconnect the connection between the workpiece and the adapter, and crank the handwheel to open the first and second rocker arms to both sides.

[0022] Step 4: The auxiliary installation equipment is removed from the vacuum chamber and returned to the main transport vehicle.

[0023] Compared with the prior art, the vacuum chamber equipment transfer and installation system of the present invention has at least the following beneficial effects:

[0024] This invention discloses a vacuum chamber equipment transfer and installation system. It includes a main load-bearing transfer vehicle, auxiliary installation equipment, and adapter frames. The auxiliary installation equipment comprises a chassis frame, a load-bearing platform, and multiple adapter frame mounting ends. The chassis frame of the auxiliary installation equipment is connected to the main load-bearing transfer vehicle and is adapted to move relative to a first track. The track dimensions, spacing, and height of the first track are the same as the track inside the vacuum chamber and the track below the assembly frame. The adapter frames are used to connect the workpieces to be transferred and are connected to the adapter frame mounting ends. Therefore, it enables the transfer of large-size, high-tonnage test pieces between the assembly frame and the vacuum chamber. Furthermore, since the vertical height of each adapter frame mounting end is adjustable, the posture of the workpiece to be transferred can be adjusted within the vacuum chamber by adjusting the height of each adapter frame mounting end, thereby facilitating assembly. This significantly improves the transfer and assembly efficiency of large workpieces installed within the vacuum chamber.

[0025] The vacuum chamber equipment transfer and installation system of the present invention will be further described below with reference to the accompanying drawings. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of the vacuum chamber equipment transfer and installation system of the present invention when transferring the workpiece to be transferred;

[0027] Figure 2 This is a schematic diagram of the main load-bearing transport vehicle in the vacuum chamber equipment transport and installation system of the present invention;

[0028] Figure 3 This is a three-dimensional structural diagram of the auxiliary installation equipment in the vacuum chamber equipment transfer and installation system of the present invention;

[0029] Figure 4 This is a top view of the auxiliary installation equipment in the vacuum chamber equipment transfer and installation system of the present invention after removing the supporting platform and sheet metal shell;

[0030] Figure 5 This is a three-dimensional structural diagram of the transfer frame in the vacuum chamber equipment transfer and installation system of the present invention;

[0031] Figure 6 This is a top view of the transfer frame in the vacuum chamber equipment transfer and installation system of the present invention. Detailed Implementation

[0032] like Figure 1 As shown, the present invention discloses a vacuum chamber equipment transfer and installation system, comprising a main load-bearing transfer vehicle 01, auxiliary installation equipment 02, and a transfer frame 03.

[0033] like Figure 2As shown, the main load-bearing transfer vehicle 01 is used to travel between the assembly frame and the vacuum chamber. The main load-bearing transfer vehicle 01 is equipped with a set of first tracks 11, which are aligned with the tracks inside the vacuum chamber. In this embodiment, four universal lifting rings are installed on the roof of the main load-bearing transfer vehicle 01 for equipment hoisting. The main load-bearing transfer vehicle 01 is powered by a battery and has Mecanum structure wheels installed on its bottom, enabling omnidirectional travel. It has a rated load of 40t. A limit baffle 111 is provided at one end of the first track 11. The first track 11 is made of steel and is connected to the crossbeam of the main load-bearing transfer vehicle 01 by screws. The track dimensions, spacing, and height of the first track 11 are aligned with the tracks inside the vacuum chamber. The tracks below the mounting rack are the same. The main load-bearing transfer vehicle 01 has a control panel at the rear of its body, which is the control center of the whole vehicle. The control system adopts a high-speed CAN bus control architecture. The control system uses the CANOPEN protocol to control the motors of each drive shaft of the main load-bearing transfer vehicle 01 and monitor their status in real time. Emergency stop switches and three-color audible and visual alarm lights are set at the four corners of the main load-bearing transfer vehicle 01. The three-color audible and visual alarm lights use different colors and intelligent voice broadcast system to prompt users of different working states of the main load-bearing transfer vehicle 01. Each corner of the main load-bearing transfer vehicle 01 is equipped with a safety laser scanner, which can autonomously avoid obstacles during movement to ensure the safety of on-site personnel and equipment.

[0034] like Figure 3 , Figure 4As shown, the auxiliary installation equipment 02 includes a chassis frame 21, a support platform 22, and multiple adapter mounting ends 23. All adapter mounting ends 23 are mounted on the support platform 22, and their vertical height is adjustable. The support platform 22 is connected to the chassis frame 21 and is adapted to move relative to the chassis frame 21 in the X-axis and Y-axis directions. The chassis frame 21 is connected to the main load-bearing transfer vehicle 01, and a detachable locking device is provided between the chassis frame 21 and the main load-bearing transfer vehicle 01. The chassis frame 21 is adapted to move relative to the first track 11, and the support platform 22 moves relative to the chassis frame 21 in the X-axis direction. The position of the adapter mounting end 23 in the X and Y axes can be adjusted by moving it in the Y-axis direction, and its position in the Z-axis direction can be adjusted by adjusting the height of the adapter mounting end 23 in the vertical direction. Specifically, in this embodiment, four adapter mounting ends 23 are provided, and more than four can also be provided. A skin is also connected to the chassis frame 21. The skin is connected by screws for easy disassembly, which facilitates the maintenance or replacement of the internal modules of the auxiliary installation equipment 02. The auxiliary installation equipment 02 also includes an electrical system modular control box, which is installed at the front, rear and inside of the chassis frame 21. A window is reserved in the skin at the control box location for easy maintenance or replacement. A comprehensive control box is installed on the rear side of the chassis frame 21. The comprehensive control box is a human-machine interface. The display screen and indicator lights of the comprehensive control box show the vehicle status. The operator performs operations such as equipment start-up and shutdown and mode switching through the comprehensive control box.

[0035] The top of the adapter 03 is used to connect the workpiece to be transferred, and the bottom of the adapter 03 is connected to the four adapter mounting ends 23.

[0036] The working process of the vacuum chamber equipment transfer and installation system of the present invention is as follows:

[0037] The auxiliary installation equipment 02 is moved to the track below the assembly rack and positioned directly beneath it. The adapter frame 03 is connected to the auxiliary installation equipment 02, and the workpiece to be transferred from the assembly rack is attached to the adapter frame 03. The main load-bearing transfer vehicle 01 moves to the vicinity of the assembly rack, aligning its first track 11 with the track on the assembly rack and effectively overlapping it. The auxiliary installation equipment 02 moves from the assembly rack onto the first track 11 of the main load-bearing transfer vehicle 01, and the locking device between the auxiliary installation equipment 02 and the main load-bearing transfer vehicle 01 is locked to prevent the auxiliary installation equipment 02 from... The main transport vehicle 01 moves to the vacuum chamber area. The first track 11 on the main transport vehicle 01 aligns with the track inside the vacuum chamber and effectively overlaps. The locking device is released, and the auxiliary installation equipment 02 is controlled to move along the first track 11 and the track inside the vacuum chamber into the vacuum chamber. The pitch and roll of the workpiece to be transferred are adjusted by adjusting the height of each adapter mounting end 23, thereby adjusting the position of the workpiece to be transferred. After the position is adjusted, it is installed on the special bracket inside the vacuum chamber. The connection between the workpiece to be transferred and the adapter 03 is removed, and the auxiliary installation equipment 02 is controlled to exit the vacuum chamber.

[0038] This invention discloses a vacuum chamber equipment transfer and installation system. It includes a main load-bearing transfer vehicle 01, auxiliary installation equipment 02, and a transfer frame 03. The auxiliary installation equipment 02 includes a chassis frame 21, a load-bearing platform 22, and multiple transfer frame mounting ends 23. The chassis frame 21 of the auxiliary installation equipment 02 is connected to the main load-bearing transfer vehicle 01 and is adapted to move relative to a first track 11. The track dimensions, spacing, and height of the first track 11 are the same as the tracks inside the vacuum chamber and the tracks below the assembly frame. The transfer frame 03 is used to connect the workpiece to be transferred and is connected to the transfer frame mounting ends 23. Therefore, it enables the transfer of large-size, high-tonnage test pieces between the assembly frame and the vacuum chamber. Furthermore, since the height of each transfer frame mounting end 23 is adjustable in the vertical direction, the posture of the workpiece to be transferred can be adjusted by adjusting the height of each transfer frame mounting end 23 in the vacuum chamber, thereby assembling it. This greatly improves the transfer and assembly efficiency of large workpieces installed in the vacuum chamber.

[0039] Optionally, the auxiliary installation device 02 also includes rail wheels connected to the bottom surface of the chassis frame 21. The rail wheels are adapted to move relative to the first track 11, and the auxiliary installation device 02 moves relative to the first track 11 via the rail wheels.

[0040] Optionally, the auxiliary installation equipment 02 also includes a mounting plate 26, a first mounting base 271, a second mounting base 272, a third mounting base 273, a fourth mounting base 274, a first driving component, and a second driving component. The mounting plate 26 is disposed below the support platform 22. A second track 211 is disposed on the chassis frame 21, and the second track 211 is disposed along the X-axis direction. The mounting plate 26 is adapted to move relative to the second track 211 under the drive of the second driving component. Four adapter mounting ends 23 are provided, and the four adapter mounting ends 23 are respectively disposed on the first mounting base 271. 1. The first mounting base 271, second mounting base 272, third mounting base 273, and fourth mounting base 274 are all connected to the support platform 22. A third track 261 is provided on the mounting plate 26, which is arranged along the Y-axis. The support platform 22 moves relative to the third track 261 under the drive of the first driving member, causing the first mounting base 271, second mounting base 272, third mounting base 273, and fourth mounting base 274 to move in the Y-axis direction. Specifically, it also includes a sheet metal housing 28, and the four adapter mounting ends 23 all protrude from the sheet metal housing 28. In this embodiment, the first driving member and the second driving member are both nut-screw pairs. Because the auxiliary installation equipment 02 has a large acceleration and deceleration inertia, moving forward is dangerous. By using the second track 211 and the second drive component, when the workpiece needs to move forward after alignment, the first mounting seat 271, the second mounting seat 272, the third mounting seat 273, and the fourth mounting seat 274 can move forward relative to the second track 211. The third track 261 and the first drive component facilitate fine-tuning of the workpiece's deviation in the Y-axis direction after the workpiece enters the vacuum chamber.

[0041] Optionally, it also includes four hydraulic cylinders, the cylinder bodies of the four hydraulic cylinders are respectively connected to the first mounting base 271, the second mounting base 272, the third mounting base 273 and the fourth mounting base 274, and the four adapter mounting ends 23 are respectively connected to the piston rod end of one hydraulic cylinder, and the position of each adapter mounting end 23 in the vertical direction is adjusted by the extension and retraction of the piston rod.

[0042] Optionally, such as Figure 5 , Figure 6As shown, the transfer frame 03 includes a base frame 31, a first rocker arm 32, and a second rocker arm 33. The bottoms of the first rocker arm 32 and the second rocker arm 33 are both connected to the base frame 31. The first rocker arm 32 and the second rocker arm 33 are located at opposite ends of the base frame 31 along its length. The angles between the first rocker arm 32 and the base frame 31, and between the second rocker arm 33 and the base frame 31, are adjustable. The tops of the first rocker arm 32 and the second rocker arm 33 are used to connect the workpiece to be transferred. Specifically, the transfer frame 03 is composed of welded steel profiles and steel plates, forming a truss structure. During transfer, the first rocker arm 32 and the second rocker arm 33 are in a figure-eight shape. When the support is unloaded, the angles between the first rocker arm 32 and the second rocker arm 33 and the base frame 31 are adjusted to reduce the storage space required by the transfer frame 03.

[0043] Optionally, a groove 318 is provided on the upper surface of the middle part of the base frame 31. After the workpiece is successfully installed, the auxiliary installation equipment 02 needs to be removed from the tank. At this time, the workpiece will interfere with its travel path, so the first rocker arm 32 and the second rocker arm 33 need to be opened to make spatial avoidance through the groove 318.

[0044] Optionally, the system also includes two rocker arm drive units 04. These two drive units 04 respectively drive the first rocker arm 32 and the second rocker arm 33 to rotate relative to the base frame 31. Each rocker arm drive unit 04 includes a handwheel 41, a reducer 42, a first gear 43, a second gear 44, and a drive shaft. The drive shaft is rotatably connected to the base frame 31. The first rocker arm 32 and the second gear 44 are both connected to the drive shaft and rotate synchronously with it. The reducer 42 is mounted on the base frame 31. The handwheel 41 is connected to the input shaft of the reducer 42, and the first gear 43 is connected to the output shaft of the reducer 42. The first gear 43 meshes with the second gear 44. The rocker arm drive units 04 drive the first rocker arm 32 and the second rocker arm 33 to rotate relative to the base frame 31, providing convenient operation and controllable rotation angle.

[0045] Optionally, the base frame 31 is a rectangular frame composed of a front rod 311, a rear rod 312, a left rod 313, and a right rod 314. The first rocker arm 32 and the second rocker arm 33 have the same structure. The first rocker arm 32 is a frame structure composed of a front rod 321, a rear rod 322, an upper rod 323, and a lower rod 324. The drive shaft is rotatably connected to the front rod 311, the front rod 321 is connected to the drive shaft, and a support shaft 315 is provided on the rear rod 312. The rear rod 322 is rotatably connected to the support shaft 315. The first rocker arm 32 rotates relative to the base frame 31 through the drive shaft and the support shaft 315, making the rotation process more stable and controllable.

[0046] Optionally, limiting stops 316 are respectively provided on both sides of the rocker arm front rod 321 on the base frame front rod 311 and on both sides of the rocker arm rear rod 322 on the base frame rear rod 312. The limiting stops 316 on the base frame front rod 311 and the limiting stops 316 on the base frame rear rod 312 correspond to the extreme positions of the first rocker arm 32 relative to the base frame 31. When the first rocker arm 32 rotates to the extreme position, it is blocked by the limiting stops 316. Specifically, the base frame front rod 311 and the base frame rear rod 312 have the same structure. The position on the base frame front rod 311 where the drive shaft is installed is set as a groove. The limiting stop 316 on the base frame front rod 311 inside the rocker arm front rod 321 is an inclined surface from the bottom surface of the groove to the upper surface of the base frame front rod 311. The limiting stop 316 on the base frame front rod 311 outside the rocker arm front rod 321 is a vertical plate.

[0047] Optionally, the base frame 31 is connected to casters 317 at its bottom. Through the casters 317, the adapter frame 03 can move linearly on the auxiliary installation equipment 02 manually or detach from the auxiliary installation equipment 02 and be placed independently in the workshop storage area. Both the front rod 311 and the rear rod 312 of the base frame are provided with connecting through holes. Multiple bolts pass through these holes and connect to the adapter frame mounting end 23, connecting the adapter frame 03 to the auxiliary installation equipment 02. The top of the first rocker arm 32 and the second rocker arm 33 are each provided with support blocks 326 and 327. The top surfaces of the support blocks 326 and 327 are curved. When installing the workpiece to be transferred, the support blocks 326 and 327 contact the outer side of the mounting ears of the workpiece to be transferred, reducing the stress on the mounting holes.

[0048] The present invention employs a method for transferring workpieces using the aforementioned vacuum chamber equipment transfer and installation system, comprising the following steps:

[0049] Step 1: Move the auxiliary installation equipment 02 to the track below the assembly frame and directly below the assembly frame. Connect the adapter frame 03 to the adapter frame mounting end 23, and connect the workpiece to be transferred from the assembly frame to the adapter frame 03.

[0050] Step 2: Align and effectively overlap the first track 11 on the main load-bearing transfer vehicle 01 with the track on the assembly frame. The auxiliary installation equipment 02 moves from the assembly frame onto the first track 11, and the auxiliary installation equipment 02 and the main load-bearing transfer vehicle 01 are locked together.

[0051] Step 3: The main load-bearing transfer vehicle 01 moves to the vacuum chamber area, the first track 11 aligns with and effectively overlaps with the track inside the vacuum chamber, the auxiliary installation equipment 02 unlocks from the main load-bearing transfer vehicle 01, and the auxiliary installation equipment 02 travels along the first track 11 and the track inside the vacuum chamber into the vacuum chamber.

[0052] Step 4: Adjust the position of the workpiece to be transferred by adjusting the height of each adapter mounting end 23. After the position is adjusted, install the workpiece on the special bracket inside the vacuum chamber, disconnect the connection between the workpiece and the adapter 03, and crank the handwheel 41 to open the first rocker arm 32 and the second rocker arm 33 to both sides.

[0053] Step 4: The auxiliary installation equipment 02 exits the vacuum chamber and returns to the main load-bearing transfer vehicle 01.

[0054] The above embodiments are merely descriptions of preferred embodiments of the present invention and are not intended to limit the scope of the present invention. Various modifications and improvements made by those skilled in the art to the technical solutions of the present invention without departing from the spirit of the present invention should fall within the protection scope defined by the claims of the present invention.

Claims

1. A vacuum chamber equipment transfer and installation system, characterized in that, Includes the main load-bearing transfer vehicle (01), auxiliary installation equipment (02), and transfer frame (03). The main load-bearing transfer vehicle (01) is used to travel between the assembly frame and the vacuum chamber. The main load-bearing transfer vehicle (01) is equipped with a first track (11), which is consistent with the track inside the vacuum chamber. The auxiliary installation equipment (02) includes a chassis frame (21), a support platform (22), and multiple adapter frame mounting ends (23). All adapter frame mounting ends (23) are mounted on the support platform (22), and the height of each adapter frame mounting end (23) is adjustable. The support platform (22) is connected to the chassis frame (21) and is adapted to move relative to the chassis frame (21) in the X and Y directions. The chassis frame (21) is connected to the main load-bearing transfer vehicle (01), and a detachable locking device is provided between the chassis frame (21) and the main load-bearing transfer vehicle (01). The chassis frame (21) is adapted to move relative to the first track (11). The top of the adapter (03) is used to connect the workpiece to be transferred, and the bottom of the adapter (03) is connected to the mounting end (23) of the adapter.

2. The vacuum chamber equipment transfer and installation system according to claim 1, characterized in that, The auxiliary installation device (02) also includes a track wheel connected to the bottom surface of the chassis frame (21) and the track wheel is adapted to move relative to the first track (11).

3. The vacuum chamber equipment transfer and installation system according to claim 2, characterized in that, The auxiliary installation equipment (02) further includes a mounting plate (26), a first mounting base (271), a second mounting base (272), a third mounting base (273), a fourth mounting base (274), a first driving component, and a second driving component. The mounting plate (26) is disposed below the bearing platform (22). A second track (211) is disposed on the chassis frame (21). The second track (211) is disposed along the X-axis. The mounting plate (26) is adapted to move relative to the second track (211) under the drive of the second driving component. Four adapter mounting ends (23) are provided. The four adapter mounting ends (23) are respectively disposed on the first mounting base (271), the second mounting base (272), the third mounting base (273), the fourth mounting base (274), the first mounting base (275), and the second mounting base (276). The first mounting base (271), the second mounting base (272), the third mounting base (273), and the fourth mounting base (274) are all connected to the bearing platform (22). A third track (261) is provided on the mounting plate (26). The third track (261) is arranged along the Y-axis. The bearing platform (22) moves relative to the third track (261) under the drive of the first driving member, thereby driving the first mounting base (271), the second mounting base (272), the third mounting base (273), and the fourth mounting base (274) to move along the Y-axis.

4. The vacuum chamber equipment transfer and installation system according to claim 3, characterized in that, It also includes four hydraulic cylinders, the cylinder bodies of which are respectively connected to the first mounting base (271), the second mounting base (272), the third mounting base (273), and the fourth mounting base (274), and the four adapter mounting ends (23) are respectively connected to the piston rod end of one of the hydraulic cylinders.

5. The vacuum chamber equipment transfer and installation system according to claim 4, characterized in that, The adapter frame (03) includes a base frame (31), a first rocker arm (32), and a second rocker arm (33). The bottoms of the first rocker arm (32) and the second rocker arm (33) are both connected to the base frame (31). The first rocker arm (32) and the second rocker arm (33) are located at both ends of the base frame (31) along the length direction. The angle between the first rocker arm (32) and the base frame (31) and the angle between the second rocker arm (33) and the base frame (31) are adjustable. The tops of the first rocker arm (32) and the second rocker arm (33) are used to connect the workpiece to be transferred.

6. The vacuum chamber equipment transfer and installation system according to claim 5, characterized in that, It also includes a rocker arm drive (04), which includes a handwheel (41), a reducer (42), a first gear (43), a second gear (44), and a drive shaft. The drive shaft is rotatably connected to the base frame (31). The first rocker arm (32) and the second gear (44) are both connected to the drive shaft. The first rocker arm (32) and the second gear (44) rotate synchronously with the drive shaft. The reducer (42) is mounted on the base frame (31). The handwheel (41) is connected to the input shaft of the reducer (42). The first gear (43) is connected to the output shaft of the reducer (42). The first gear (43) meshes with the second gear (44).

7. The vacuum chamber equipment transfer and installation system according to claim 6, characterized in that, The base frame (31) is a rectangular frame composed of a base frame front rod (311), a base frame rear rod (312), a base frame left rod (313), and a base frame right rod (314). The first rocker arm (32) and the second rocker arm (33) have the same structure. The first rocker arm (32) is a frame structure composed of a rocker arm front rod (321), a rocker arm rear rod (322), a rocker arm upper rod (323), and a rocker arm lower rod (324). The drive shaft is rotatably connected to the base frame front rod (311). The rocker arm front rod (321) is connected to the drive shaft. A support shaft (315) is provided on the base frame rear rod (312). The rocker arm rear rod (322) is rotatably connected to the support shaft (315).

8. The vacuum chamber equipment transfer and installation system according to claim 7, characterized in that, Limiting stops (316) are respectively provided on both sides of the rocker arm front rod (321) on the base frame front rod (311) and on both sides of the rocker arm rear rod (322) on the base frame rear rod (312).

9. The vacuum chamber equipment transfer and installation system according to claim 8, characterized in that, The base frame (31) has a groove (318) on its upper surface in the middle. The base frame (31) is connected to a caster (317) at its bottom. The front rod (311) and the rear rod (312) of the base frame are provided with connecting through holes. Multiple bolts pass through the connecting through holes and are connected to the adapter mounting end (23) to connect the adapter (03) to the auxiliary installation equipment (02). The top of the first rocker arm (32) and the second rocker arm (33) are provided with support blocks (326, 327). The top surface of the support blocks (326, 327) is an arc surface.

10. A method for transferring workpieces using the vacuum chamber equipment transfer and installation system according to any one of claims 1-9, characterized in that, Includes the following steps: Step 1: Move the auxiliary installation equipment (02) to the track below the assembly frame and directly below the assembly frame. Connect the adapter frame (03) to the adapter frame mounting end (23). Connect the workpiece to be transferred on the assembly frame to the adapter frame (03). Step 2: Align and effectively overlap the first track (11) on the main load-bearing transfer vehicle (01) with the track on the assembly frame. The auxiliary installation device (02) moves from the assembly frame onto the first track (11), and the auxiliary installation device (02) and the main load-bearing transfer vehicle (01) are locked together. Step 3: The main load-bearing transfer vehicle (01) moves to the vacuum chamber area, the first track (11) aligns with and effectively overlaps with the track inside the vacuum chamber, the auxiliary installation equipment (02) unlocks from the main load-bearing transfer vehicle (01), and the auxiliary installation equipment (02) travels along the first track (11) and the track inside the vacuum chamber into the vacuum chamber. Step 4: Adjust the position of the workpiece to be transferred by adjusting the height of each of the adapter mounting ends (23). After the position is adjusted, install the workpiece to be transferred on the special bracket in the vacuum chamber, disconnect the connection between the workpiece to be transferred and the adapter (03), and crank the handwheel (41) to open the first rocker arm (32) and the second rocker arm (33) to both sides. Step 4: The auxiliary installation equipment (02) exits the vacuum chamber and returns to the main carrier transfer vehicle (01).

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