Ultrahigh / extremely high thermal cathode vacuum gauge calibration and simulation integrated platform

Abstract

The invention discloses an ultrahigh / extremely high thermal cathode vacuum gauge calibration and simulation integrated platform, which relates to the technical field of vacuum test instruments, and is characterized in that an ionization gauge sensing unit ball is connected with an air inlet flowmeter, a mass spectrometer and a comparison vacuum gauge, and an extremely high evacuation unit provides ultimate vacuum pressure for an ionization gauge sensing unit ball chamber; the pre-evacuating unit is used as a pre-evacuating pump after a to-be-tested thermionic cathode ionization gauge is replaced, the automatic parameter adjusting unit is used for providing continuous and adjustable electrical parameters, the electrometer is used for acquiring ion flow acquisition signals, and the mass spectrometer is used for providing a deflation rate and component analysis function. The comparison vacuum gauge and the air inlet flow meter form a calibration and simulation integrated platform flow detection and control unit, and the calculation unit serves as an intelligent control unit and provides algorithm processing, electrical parameter adaptation and data processing work for the calibration and simulation integrated platform. Through the calibration and simulation integrated design of the to-be-tested vacuum gauge, a real simulation environment is provided for development, optimization, iteration and shaping of the ultrahigh / extremely high thermal cathode vacuum gauge.

Description

Technical Field

[0001] This invention relates to the field of vacuum testing instrument technology, specifically to an integrated calibration and simulation platform for ultra-high / extremely high thermal cathode vacuum gauges. Background Technology

[0002] Ultra-high / extremely high thermionic vacuum gauges are based on the principle of thermionic vacuum measurement and are specifically designed for detecting ultra-high vacuum (UHV, 10⁻⁶). -7 ~10 -10 Pa) and extremely high vacuum (XHV, <10 -10 The ionization vacuum gauge, which measures vacuum levels in the Pa range, is a core testing instrument in the field of vacuum measurement for ultra-high / extremely high vacuum environments.

[0003] Currently, ultra-high / extremely high thermal cathode vacuum gauges are the only commercially available product capable of achieving high-precision measurements in ultra-high or extremely high vacuum conditions. Entering ultra-high vacuum, especially when the pressure is below 10... -8 After reaching the Pa level, the measurement accuracy and lower limit of ultra-high / extremely high thermal cathode vacuum gauges are affected by many factors. For example, the anode voltage affects the space electric field, which in turn affects the electron motion path and causes changes in ionization efficiency. The power of the cathode filament significantly affects the outgassing rate of the ionization gauge, thus affecting the lower limit of measurement. In particular, with the feature size of microelectronic devices entering the nanometer scale and the stringent vacuum environment requirements of deep space exploration missions, more stringent requirements are placed on the geometry and power consumption of ultra-high / extremely high vacuum gauges; in addition, ultra-high / extremely high thermal cathode vacuum gauges, as 10 -8 Pa to 10 -12 Core vacuum metrology tools within the Pa range directly impact key indicators such as semiconductor manufacturing yield and the reliability of spacecraft vacuum leak detection. However, in high-precision measurement scenarios, these ionization gauges face the challenge of requiring specialized devices to simultaneously simulate the nonlinear interactions of multiple parameters, including gas ionization paths, heat conduction, and power consumption.

[0004] Therefore, an integrated platform capable of real-time control of multiple parameters, full-condition simulation verification, and intelligent data analysis is particularly important to improve the efficiency of existing ionization gauge development. Summary of the Invention

[0005] In view of this, the present invention provides an integrated platform for calibration and simulation of ultra-high / extremely high thermal cathode vacuum gauges. The integrated design of vacuum gauge calibration and simulation facilitates the development, improvement, and evaluation process of ultra-high / extremely high thermal cathode vacuum gauges, and provides a path for accurate measurement of ultra-high / extremely high thermal cathode vacuum gauges under the combined influence of different temperatures, different power, and different electrical parameters. At the same time, it provides a realistic and reliable simulation environment for the simulation of the development and improvement process of ultra-high / extremely high thermal cathode vacuum gauges with different geometric dimensions.

[0006] To achieve the above objectives, the present invention provides an integrated calibration and simulation platform for ultra-high / extremely high thermal cathode vacuum gauges. The technical solution includes an ultra-high vacuum evacuation unit, an ionization gauge sensing unit spherical chamber, a pre-evacuation unit, an inlet flow meter, a mass spectrometer, an electrometer, a comparison vacuum gauge, an automatic parameter adjustment unit, and a calculation unit.

[0007] The ionization gauge sensing unit is equipped with a mass spectrometer, a thermometer of the gauge to be measured, and a comparison vacuum gauge.

[0008] The ultra-high vacuum unit provides the ultimate vacuum pressure for the spherical chamber of the ionization gauge sensing unit.

[0009] The pre-evacuation unit serves as a pre-evacuation pump after the replacement of the hot cathode ionization gauge to be tested.

[0010] The automatic parameter adjustment unit is used to provide continuously adjustable electrical parameters.

[0011] An electrometer is used to collect ion flow acquisition signals.

[0012] Mass spectrometers are used to provide outgassing rate and composition analysis capabilities.

[0013] The vacuum gauge and the inlet flow meter are combined to form an integrated calibration and simulation platform for flow detection and control.

[0014] The computing unit, as an intelligent control unit, provides algorithm processing, electrical parameter adaptation, and data processing for the integrated calibration and simulation platform.

[0015] Furthermore, a pre-vacuum pump is installed on the gauge channel to be tested. The pre-vacuum pump includes a pre-vacuum inlet pump and a pre-vacuum main pump. The pre-vacuum inlet pump is connected to the pre-vacuum main pump and then connected to the gauge channel to be tested through a pre-vacuum shut-off valve.

[0016] The pre-evacuation ultra-high vacuum unit, consisting of the pre-evacuation forepump and the pre-evacuation main pump, provides pre-evacuation pressure for the installation and replacement of the gauge under test. This reduces the amount of external gas entering the spherical chamber of the ionization gauge sensing unit after the gauge under test is replaced, thus affecting the ultimate evacuation time. Specifically, after closing the pre-evacuation shut-off valve and replacing the gauge under test, the pre-evacuation vacuum unit is turned on. When the pressure in the chamber of the gauge under test drops to the rated value, the pre-evacuation shut-off valve is closed again, and the test shut-off valve is opened. After the spherical chamber of the ionization gauge sensing unit reaches the test pressure, the test begins.

[0017] Furthermore, a test shut-off valve is provided between the test gauge and the ionization gauge sensing unit ball chamber.

[0018] Furthermore, the outer surface of the spherical chamber of the ionization gauge sensing unit is provided with a continuously adjustable temperature control unit; the electrical parameters of the gauge under test and the temperature control unit are provided by the automatic parameter adjustment unit.

[0019] Furthermore, the computing unit is connected to the flow meter, mass spectrometer, automatic parameter adjustment unit, and electrometer via a data bus to achieve multi-parameter coupled control and intelligent calibration; the electrometer is also connected to the gauge under test.

[0020] The automatic parameter adjustment unit achieves continuous adjustment and control of any single parameter through the calculation unit.

[0021] Furthermore, a temperature control module is provided on the outer surface of the automatic parameter adjustment unit to simulate the stability of electrical parameters under extreme environments.

[0022] Furthermore, the automatic parameter adjustment unit includes a cathode voltage adjustment module, a filament heating source module, an anode voltage adjustment module, a grounding protection module, and a temperature control module.

[0023] The output voltage range of the cathode voltage regulation module is 0 to 100 V, with an adjustment accuracy of ±1 V.

[0024] The power adjustment range of the filament heating source module is 0~50 W, and the temperature control accuracy is ±1℃.

[0025] The output voltage range of the anode voltage regulation module is 0 to 800V, and the ripple coefficient is ≤1%.

[0026] The temperature control module is located on the outer surface of the automatic parameter adjustment unit. It uses a multi-segment resistance heating band and a compression refrigeration unit for circulation. Through an independent temperature control loop, it supports uniform temperature distribution in different zones.

[0027] Furthermore, the ultra-high vacuum unit includes a backing pump, a sustaining pump, and a main pump connected in sequence; the ultra-high vacuum unit, consisting of the backing pump, sustaining pump, and main pump, provides the ultimate pressure guarantee for the spherical chamber of the ionization gauge sensing unit.

[0028] Furthermore, the calculation unit is used to couple the temperature, pressure, and electrical parameters set by the automatic parameter adjustment unit inside the spherical chamber of the ionization gauge sensing unit to calibrate the metrological characteristics of the gauge under test under the influence of multiple parameters such as temperature, pressure, and electrical parameters.

[0029] Further, perform the calibration as follows: S1: When the pressure inside the spherical chamber of the ionization gauge sensing unit is better than 0.1 times the lower limit of the ionization gauge measurement, if the lower limit of the ionization gauge measurement is 1×10 -9 Pa, when the pressure inside the spherical chamber of the off-grid sensing unit is better than 1×10 Pa. -10 After Pa, the temperature of the temperature adjustment unit and the temperature control module are set by the calculation unit to provide the simulated operating environment temperature for the ionization gauge under test and the automatic parameter adjustment unit, respectively.

[0030] S2: Set the cathode voltage regulator to 20V, the anode voltage regulator relative to the cathode voltage regulator to 100V, and adjust the filament heating source to 0.1mA; S3: When the fluctuation of the ion current measured by the electrometer is less than 1%, adjust the cathode voltage adjustment device to 80V in 20V steps; adjust the anode voltage adjustment device to 190V in 30V steps. At each step, adjust the filament heating source to make the emission current 0.1mA, 1mA and 10mA respectively, for a total of 3 levels.

[0031] S4: Complete 1×10 -9 After Pa, a predetermined flow command is sent to the flow meter. By changing the inlet flow rate of the flow meter, the ion flow test values ​​of the gauge under test under different standard pressures, cathode voltages, anode voltages, and emission currents are obtained.

[0032] S5: Statistically measure the linearity of the ion current measured under the same cathode voltage, anode voltage, and emission current under different pressures; use the minimum sum of squared residuals within the test pressure range as the electrical parameter setting value of the controller and ionization gauge under the operating environment temperature, and store it in the controller memory for subsequent execution parameter calls; Specifically, the flow meter is a constant pressure flow meter or a fixed flow conductance flow meter.

[0033] Beneficial effects: The platform includes a flow meter, a pre-pump fore-pump, a pre-pump main pump, a mass spectrometer, a pre-pump shut-off valve, a gauge to be tested, a test shut-off valve, a thermometer, a monitoring and comparison vacuum gauge, an automatic parameter adjustment unit, an electrometer, a calculation unit, an ultra-high vacuum unit fore-pump, an ultra-high vacuum unit maintenance pump, an ultra-high vacuum unit main pump, a heating unit, and a spherical chamber for the ionization gauge sensing unit. The automatic parameter adjustment unit includes a cathode voltage adjustment module, a filament heating source module, an anode voltage adjustment module, and a grounding protection and heating module. This application achieves convenience in the development, improvement, and evaluation process of ultra-high / ultra-high thermal cathode vacuum gauges through the integrated design of calibration and simulation of the vacuum gauge under test. It provides a path for accurate measurement of ultra-high / ultra-high thermal cathode vacuum gauges under the combined influence of different temperatures, power levels, and electrical parameters, and provides a realistic and reliable simulation environment for the simulation of the development and improvement process of ultra-high / ultra-high thermal cathode vacuum gauges with different geometric dimensions. Attached Figure Description

[0034] Figure 1 This is a schematic diagram of an integrated calibration and simulation platform for ultra-high / extremely high thermal cathode vacuum gauges provided in the embodiments of this application; Figure 2 This is a schematic diagram of an automatic adjustment unit provided according to an embodiment of this application; In the diagram: 1-Flow meter, 2-Pre-evacuation forepump, 3-Pre-evacuation main pump, 4-Mass spectrometer, 5-Pre-evacuation shut-off valve, 6-Test gauge, 7-Test shut-off valve, 8-Thermometer, 9-Monitoring and comparison vacuum gauge, 10-Automatic parameter adjustment unit, 101-Cathode voltage adjustment device, 102-Filament heating source, 103-Anode voltage adjustment device, 104-Grounding protection, 105-Heating device, 11-Electrometer, 12-Calculation unit, 13-Ultra-high vacuum unit forepump, 14-Ultra-high vacuum unit maintenance pump, 15-Ultra-high vacuum unit main pump, 16-Heating unit, 17-Ionization gauge sensing unit spherical chamber. Detailed Implementation

[0035] The present invention will now be described in detail with reference to the accompanying drawings and embodiments.

[0036] This invention provides an integrated platform for calibration and simulation of ultra-high / extremely high thermal cathode vacuum gauges, such as... Figure 1 As shown, this application provides a platform including a flow meter 1, a pre-pump fore-pump 2, a pre-pump main pump 3, a mass spectrometer 4, a pre-pump shut-off valve 5, a test gauge 6, a test shut-off valve 7, a thermometer 8, a monitoring and comparison vacuum gauge 9, an automatic parameter adjustment unit 10, an electrometer 11, a calculation unit 12, an ultra-high vacuum unit fore-pump 13, an ultra-high vacuum unit maintenance pump 14, an ultra-high vacuum unit main pump 15, a temperature control unit 16, and an ionization gauge sensing unit spherical chamber 17. The automatic parameter adjustment unit 10 includes a cathode voltage adjustment device 101 module, a filament heating source 102 module, an anode voltage adjustment device 103 module, a grounding protection 104 module, and a temperature control module 105.

[0037] In this embodiment of the invention, a mass spectrometer 4, a gauge under test 6, a thermometer 8, and a monitoring and comparison vacuum gauge 9 are respectively connected to the spherical chamber 17 of the ionization gauge sensing unit. In the technical context of ultra-high / extremely high hot cathode vacuum gauges, the gauge under test refers to the hot cathode vacuum gauge tube that needs to undergo performance testing, calibration, aging testing, or fault diagnosis. It is the core sensing component of the vacuum gauge, and its performance directly determines the accuracy of vacuum degree measurement.

[0038] In this embodiment of the invention, the pre-evacuation ultra-high vacuum unit, composed of the pre-evacuation forepump 2 and the pre-evacuation main pump 3, provides pre-evacuation pressure for the installation and replacement of the gauge under test 6, thereby reducing the amount of external gas entering the spherical chamber of the ionization gauge sensing unit after the test shut-off valve 7 is opened, thus affecting the ultimate evacuation time. Specifically, when the test shut-off valve 7 is closed, the knife-edge sealing flange on the gauge under test 6 is installed, and the pre-evacuation vacuum unit is turned on, the test shut-off valve 7 is reopened after the pressure in the chamber of the gauge under test 6 drops to better than 0.1 Pa. After the spherical chamber 17 of the ionization gauge sensing unit reaches the test pressure, the test begins.

[0039] In this embodiment of the invention, the ultra-high / ultra-high vacuum unit, consisting of the ultra-high vacuum unit fore-pump 13, the ultra-high vacuum unit maintenance pump 14, and the ultra-high vacuum unit main pump 15, provides the ultimate pressure guarantee for the spherical chamber 17 of the ionization gauge sensing unit. Specifically, the spherical chamber 17 of the ionization gauge sensing unit is equipped with a constant elastic alloy array of circular orifices that have undergone rigorous degassing and high-temperature shaping to limit flow. The orifice structure divides the spherical chamber 17 of the ionization gauge sensing unit into an upper spherical chamber and a lower spherical chamber. The ultra-high / ultra-high vacuum unit is connected to the lower spherical chamber, while the mass spectrometer 4, the gauge under test 6, the thermometer 8, and the monitoring and comparison vacuum gauge 9 are connected to the upper spherical chamber. The mass spectrometer 4 is used to detect the leakage rate of the spherical chamber 17 of the ionization gauge sensing unit and monitor the outgassing amount of the gauge under test 6 to determine the degassing time of the gauge under test. The outer surface of the spherical chamber 17 of the ionization gauge sensing unit is provided with a continuously adjustable temperature adjustment unit 16, which provides temperature assurance for the testing accuracy of the ionization gauge 6 under test at different temperatures.

[0040] In this embodiment of the invention, the electrical parameters such as the bias voltage of the filament, the heating power of the filament, the anode voltage, and the control of the heating temperature of the spherical chamber of the gauge under test 6 and the temperature control 16 are provided by the automatic parameter adjustment unit 10. Specifically, for a gauge under test 6, the automatic adjustment unit 12 automatically outputs electrical parameters through the signal output setting of the calculation unit 12, thereby controlling the electrical parameters of the ionization gauge under test 6.

[0041] In this embodiment of the invention, the automatic parameter adjustment unit 10, through the calculation unit 12, can achieve continuous adjustment and controllability of any single parameter, such as the filament bias voltage, filament heating power, anode voltage, spherical chamber heating temperature, and electrical parameter adjustment unit. A temperature adjustment device 105 is provided on the outer surface of the automatic parameter adjustment unit 10 to simulate the measurement accuracy of the automatic parameter adjustment unit 10 in an environment of -20℃ to 60℃. In the high-temperature range of 20℃ to 60℃, the temperature adjustment device 105 uses a multi-segment resistance heating strip; in the low-temperature range of -20℃ to 20℃, the temperature adjustment device 105 uses a compression refrigeration cycle. The temperature adjustment unit 16, arranged on the spherical chamber 17 of the ionization gauge sensing unit, simulates the measurement accuracy of the ionization gauge under test in the range of -100℃ to 25℃. In the high-temperature range of 20℃ to 250℃, a multi-segment resistance heating strip is used; in the low-temperature range of -100℃ to 20℃, the temperature adjustment device 105 uses a jacketed liquid nitrogen cycle, and through an independent temperature control loop, it supports the uniform distribution of zoned temperature control along the axial direction of the spherical chamber. Specifically, the automatic parameter adjustment unit 10 includes an anode voltage 101, a filament power 102, a cathode-to-ground voltage 103, and an ionization gauge sensing unit spherical chamber temperature adjustment module 104.

[0042] Specifically, the cathode voltage regulation module 101 has an output voltage range of 0 to 100 V and an adjustment accuracy of ±1 V; the filament heating source module 102 has a power adjustment range of 0 to 50 W and a temperature control accuracy of ±1℃; and the anode voltage regulation module 103 has an output voltage range of 0 to 800 V and a ripple coefficient of ≤1%.

[0043] In this embodiment of the invention, the calculation unit 12 can couple the temperature, pressure, and electrical parameters set by the automatic parameter adjustment unit within the spherical chamber of the ionization gauge sensing unit to calibrate the metrological characteristics of the gauge under test under the influence of multiple parameters such as cathode bias voltage, anode voltage, and filament power. The cathode voltage adjustment device 101 is connected to the negative potential of the ionization gauge, the anode voltage adjustment device 103 is connected to the anode core of the ionization gauge, the filament heating source 102 is connected to both ends of the ionization gauge filament via positive and negative terminals, and the grounding protection 104 is connected to the ground core of the ionization gauge. The flow meter 1, mass spectrometer 4, automatic parameter adjustment unit 10, and electrometer 11 are respectively connected to the calculation unit 12. The calculation unit 12 achieves intelligent verification and optimal parameter configuration of the gauge under test 6 through data processing, algorithm simulation, and electrical parameter adaptation.

[0044] Specifically, the calibration should be performed as follows: (1) After the pressure inside the spherical chamber 17 of the ionization gauge sensing unit is better than 0.1 times the lower limit of the ionization gauge measurement, if the lower limit of the ionization gauge measurement is 1×10 -9 Pa, when the pressure inside the spherical chamber 17 of the off-grid sensing unit is better than 1×10 Pa, -10 After Pa, the temperature of the temperature adjustment unit 16 and the temperature control module 105 are set by the calculation unit 12 to provide the simulated operating environment temperature for the ionization gauge 6 to be tested and the automatic parameter adjustment unit 10, respectively.

[0045] (2) Set the cathode voltage adjustment device 101 to 20V, the anode voltage adjustment device 103 to 100V relative to the cathode voltage adjustment device 101, and adjust the filament heating source 102 to 0.1mA.

[0046] (3) When the fluctuation of the ion current measured by the electrometer 11 is less than 1%, adjust the cathode voltage adjustment device 101 to 80V in 20V steps; adjust the anode voltage adjustment device 103 to 190V in 30V steps. At each step, adjust the filament heating source 102 to make the emission current 0.1mA, 1mA and 10mA for a total of 3 levels. (4) Further, complete 1×10 according to (1) to (4) above. -9 After Pa, a predetermined flow command is sent to flow meter 1. By changing the inlet flow rate of flow meter 1, the ion flow test values ​​of the gauge under test 6 under different standard pressures, cathode voltages, anode voltages, and emission currents are obtained.

[0047] (5) The calculation system automatically calculates the linearity of the ion current measured under the same cathode voltage, anode voltage, and emission current at different pressures. The minimum sum of squares of residuals within the test pressure range is used as the electrical parameter setting value of the controller and ionization gauge at the operating ambient temperature, and stored in the controller memory as subsequent execution parameter calls.

[0048] Specifically, flow meter 1 is a constant pressure flow meter or a fixed flow conductance flow meter.

[0049] In summary, the above are merely preferred embodiments of the present invention and are not intended to limit the scope of protection of the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. An integrated calibration and simulation platform for ultra-high / extremely high thermal cathode vacuum gauges, characterized in that, It includes an ultra-high vacuum evacuation unit, an ionization gauge sensing unit spherical chamber (17), a pre-evacuation unit, an air intake flow meter (1), a mass spectrometer (4), an electrometer (11), a comparison vacuum meter (9), an automatic parameter adjustment unit (10), and a calculation unit (12). The ionization gauge sensing unit sphere (17) is connected to a mass spectrometer (4), a gauge to be measured (6), a thermometer (8), and a comparison vacuum gauge (9). The ultra-high vacuum unit provides the ultimate vacuum pressure for the spherical chamber (17) of the ionization gauge sensing unit; The pre-evacuation unit serves as a pre-evacuation pump after the replacement of the thermal cathode ionization gauge to be tested. The automatic parameter adjustment unit (10) is used to provide continuously adjustable electrical parameters; The electrometer (11) is used to collect ion flow acquisition signals; The mass spectrometer (4) is used to provide outgassing rate and component analysis functions; The comparison vacuum gauge (9) and the inlet flow meter (1) together form a flow detection and control unit for an integrated calibration and simulation platform; The computing unit (12) serves as an intelligent control unit, providing algorithm processing, electrical parameter adaptation, and data processing for the integrated calibration and simulation platform.

2. The integrated calibration and simulation platform for ultra-high / extremely high thermal cathode vacuum gauges as described in claim 1, characterized in that, The gauge under test (6) channel is equipped with a pre-vacuum pump unit, which includes a pre-vacuum pump (2) and a pre-vacuum pump (3); the pre-vacuum pump (2) is connected to the pre-vacuum pump (3) and then connected to the gauge under test (6) channel through a pre-vacuum shut-off valve (5); The pre-evacuation ultra-high vacuum unit, consisting of the pre-evacuation front pump (2) and the pre-evacuation main pump (3), provides pre-evacuation pressure for the installation and replacement of the gauge to be tested, so as to reduce the amount of external gas entering the spherical chamber of the ionization gauge sensing unit after the gauge to be tested is replaced (6), thereby affecting the limit evacuation time. Specifically, after closing the pre-evacuation shut-off valve and replacing the gauge to be tested, the pre-evacuation vacuum unit is turned on. When the pressure in the chamber of the gauge to be tested drops to the rated value, the pre-evacuation shut-off valve is closed again and the test shut-off valve (7) is turned on. After the spherical chamber of the ionization gauge sensing unit reaches the test pressure, the test begins.

3. The integrated calibration and simulation platform for ultra-high / extremely high thermal cathode vacuum gauges as described in claims 1 and 2, characterized in that, A test shut-off valve (7) is provided between the gauge to be tested (6) and the ball chamber (17) of the ionization gauge sensing unit.

4. The integrated calibration and simulation platform for ultra-high / extremely high thermal cathode vacuum gauges as described in claim 1, characterized in that, The outer surface of the spherical chamber (17) of the ionization gauge sensing unit is provided with a continuously adjustable temperature adjustment unit (16); the electrical parameters of the gauge to be measured (6) and the temperature adjustment unit (16) are provided by the parameter automatic adjustment unit (10).

5. The integrated calibration and simulation platform for ultra-high / extremely high thermal cathode vacuum gauges as described in claims 1 and 3, characterized in that, The computing unit (12) is connected to the flow meter (1), mass spectrometer (4), automatic parameter adjustment unit (10), and electrometer (11) via a data bus to realize multi-parameter coupled control and intelligent calibration; the electrometer (11) is also connected to the gauge under test (6). The automatic parameter adjustment unit (10) realizes the continuous adjustment and controllability of any single parameter through the calculation unit (12).

6. The integrated calibration and simulation platform for ultra-high / extremely high thermal cathode vacuum gauges as described in claims 1, 3, and 4, characterized in that, The outer surface of the automatic parameter adjustment unit is provided with a temperature control module (105) to simulate the stability of electrical parameters under extreme environments.

7. The integrated calibration and simulation platform for ultra-high / extremely high thermal cathode vacuum gauges as described in claims 1 and 4, characterized in that, The automatic parameter adjustment unit (10) includes a cathode voltage adjustment module (101), a filament heating source module (102), an anode voltage adjustment module (103), a grounding protection module (104), and a temperature control module (105). The output voltage range of the cathode voltage regulation module (101) is 0 to 100 V, and the regulation accuracy is ±1 V; The power adjustment range of the filament heating source module (102) is 0 to 50 W, and the temperature control accuracy is ±1℃. The output voltage range of the anode voltage regulation module (103) is 0 to 800V, and the ripple coefficient is ≤1%. The temperature control module (105) is located on the outer surface of the parameter automatic adjustment unit (10). It adopts a multi-segment resistance heating belt and a compression refrigeration cycle, and supports uniform distribution of zoned temperature control through an independent temperature control loop.

8. The integrated calibration and simulation platform for ultra-high / extremely high thermal cathode vacuum gauges as described in claim 1, characterized in that, The ultra-high vacuum unit includes an ultra-high vacuum unit fore-pump (13), an ultra-high vacuum unit maintenance pump (14), and an ultra-high vacuum unit main pump (15) connected in sequence. The ultra-high vacuum unit, consisting of the ultra-high vacuum unit fore-pump (13), the ultra-high vacuum unit maintenance pump (14), and the ultra-high vacuum unit main pump (15), provides the ultimate pressure guarantee for the spherical chamber of the ionization gauge sensing unit.

9. The integrated calibration and simulation platform for ultra-high / extremely high thermal cathode vacuum gauges as described in claim 1, characterized in that, The calculation unit (12) is used to couple the temperature, pressure and electrical parameters set by the automatic parameter adjustment unit (10) in the spherical chamber (17) of the ionization gauge sensing unit to realize the calibration of the metrological characteristics of the gauge under test (6) under the influence of multiple parameters such as temperature, pressure and electrical parameters.

10. The integrated calibration and simulation platform for ultra-high / extremely high thermal cathode vacuum gauges as described in claim 9, characterized in that, Specifically, the calibration should be performed as follows: S1: When the pressure inside the spherical chamber (17) of the ionization gauge sensing unit is better than 0.1 times the lower limit of the ionization gauge measurement, if the lower limit of the ionization gauge measurement is 1×10 -9 Pa, when the pressure inside the spherical chamber (17) of the off-grid sensing unit is better than 1×10 -10 After Pa, the temperature of the temperature adjustment unit (16) and the temperature control module (105) are set by the calculation unit (12) to provide the operating environment simulation temperature for the ionization gauge (6) to be tested and the parameter automatic adjustment unit (10), respectively; S2: Sequentially set the cathode voltage regulator (101) to 20V, the anode voltage regulator (103) relative to the cathode voltage regulator (101) to 100V, and adjust the filament heating source (102) to 0.1mA; S3: When the fluctuation of the ion current measured by the electrometer (11) is less than 1%, adjust the cathode voltage adjustment device (101) to 80V in 20V steps; adjust the anode voltage adjustment device (103) to 190V in 30V steps. At each step, adjust the filament heating source (102) to make the emission current 0.1mA, 1mA and 10mA for a total of 3 levels. S4: Complete 1×10 -9 After Pa, a predetermined flow command is sent to the flow meter (1). By changing the inlet flow of the flow meter (1), the ion flow test values ​​of the gauge under test (6) under different standard pressures, cathode voltages, anode voltages and emission currents are obtained. S5: Statistically measure the linearity of the ion current measured under the same cathode voltage, anode voltage, and emission current under different pressures; use the minimum sum of squared residuals within the test pressure range as the electrical parameter setting value of the controller and ionization gauge under the operating environment temperature, and store it in the controller memory for subsequent execution parameter calls; Specifically, the flow meter (1) is a constant pressure flow meter or a fixed flow conductance flow meter.

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