Image intensifier and detector coupling assembly detection platform and use method
The integrated design of the three-dimensional coordinate platform and the detection system has solved the cumbersome problem of coupling detection between the image intensifier and the detector, and has achieved efficient and accurate assembly and detection.
Patent Information
- Application Number
- CN202511780710.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-11-28
- Publication Date
- 2026-03-03
AI Technical Summary
The traditional image intensifier-detector coupling detection process is cumbersome, has low accuracy, requires multiple iterative adjustments, and is prone to errors and uncertainties.
A coupled assembly and inspection platform using a three-dimensional coordinate platform, carrying a microscopic imaging system and a transfer function detection system, is adopted to achieve integrated process. The position of the image intensifier and detector is precisely adjusted by the adjustment mechanism to ensure that the optical axis is parallel, and the inspection is carried out in combination with an integrating sphere and a microscope head.
It improves the detection accuracy and efficiency of image intensifier-detector coupling, reduces errors, simplifies the operation process, and shortens the detection time.
Smart Images
Figure CN121596533A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of space optical low-light night vision technology, specifically to an image intensifier and detector coupling assembly and testing platform and its usage method. Background Technology
[0002] Low-light night vision technology is an optoelectronic technology that utilizes enhanced natural light (such as moonlight, starlight, and atmospheric glow) to achieve nighttime observation. The core component of low-light night vision technology is the image intensifier. Its working principle involves the photocathode of the image intensifier converting the received target image into a photoelectric image. Electrons are multiplied through a chain reaction of high-voltage electric fields and multiple impacts within a microchannel plate. These multiplied electrons then bombard a fluorescent screen with extremely high energy, forming an enhanced optical image. By directly coupling a detector to the end of the fluorescent screen of the image intensifier, an intensifier-type detector is obtained, allowing for the capture and analysis of the intensified image.
[0003] In traditional techniques, the coupling detection of the intensifier and detector is performed independently. After coupling, the transfer function value of the intensifier detector's optical properties is detected using a collimator and coupling lens. If the value is not met, the coupling process needs to be iterated repeatedly. Furthermore, the detection process using a collimator and coupling lens requires repeated measurement and adjustment of the thickness of the trimming pad between the intensifier detector and the coupling lens until the optimal transfer function value is reached. This involves multiple iterations, making the process cumbersome and resulting in low accuracy. Summary of the Invention
[0004] To address existing problems, this invention provides an image intensifier and detector coupling assembly and inspection platform. By mounting a microscopic imaging system (assembly process) and a transfer function detection system (inspection process) on a highly integrated three-dimensional coordinate platform, the integrated process of image intensifier and detector coupling splicing assembly and inspection is completed. This avoids errors and uncertainties in multiple transfers and secondary assembly and inspection processes, reduces the transition and isolation between assembly and inspection, and makes the entire image intensifier and detector coupling process simpler and more efficient, improving assembly and inspection accuracy.
[0005] To achieve the above objectives, the present invention provides the following technical solution.
[0006] This invention provides an image intensifier and detector coupling assembly and inspection platform, including a three-dimensional coordinate platform, a microscopic imaging system, a transfer function detection system, a mounting base, an image intensifier adjustment mechanism, and a detector adjustment mechanism. The mounting base is disposed on the three-dimensional coordinate platform for adjustment in three orthogonal dimensions. The microscopic imaging system and the transfer function detection system are spaced apart on the mounting base. The image intensifier adjustment mechanism is used to adjust the position of the image intensifier, and the detector adjustment mechanism is used to adjust the position of the detector. The image intensifier adjustment mechanism and the detector adjustment mechanism are nested on a coupling multidimensional adjustment stage, which is disposed on the three-dimensional coordinate platform corresponding to the mounting base.
[0007] As a further improvement of the present invention, the optical axes of the transfer function detection system and the microscopic imaging system are parallel.
[0008] As a further improvement of the present invention, the transmission function detection system includes a detection lens, an integrating sphere, and a target plate. The light emitted by the integrating sphere illuminates the target plate and then passes through the detection lens to reach the image intensifier and detector to be inspected in sequence.
[0009] As a further improvement of the present invention, the microscopic imaging system includes a microscope head, an illumination system and an image sensor. The illumination system emits light in one direction, which passes through the microscope head and then sequentially reaches the image intensifier and detector to be inspected, and in another direction, it reaches the image sensor.
[0010] As a further improvement of the present invention, the microscope head consists of 9 lenses, with a working distance ≥100mm; a magnification of 10X; a working spectrum of the visible spectrum; a minimum resolution better than 2μm; an observation field of view ≥1.5mm; and a lens depth of field of 3.5μm. The illumination system consists of 2 lenses.
[0011] As a further improvement of the present invention, the image sensor uses pixels with a resolution of ≤3.2μm.
[0012] As a further improvement of the present invention, the X-axis air flotation platform is disposed on the platform base, the Y-axis gantry air flotation platform is disposed on the X-axis air flotation platform, and the Z-axis motion mechanism is disposed on the Y-axis gantry air flotation platform.
[0013] As a further improvement of the present invention, the transfer function detection system also includes a transfer function detection precision measuring mirror.
[0014] As a further improvement of the present invention, the microscopic imaging system also includes a microscopic imaging precision measuring mirror.
[0015] The present invention also provides a method for using an image intensifier and detector coupling assembly inspection platform, comprising the following steps: The position of the mounting substrate is adjusted using a three-dimensional coordinate platform, aligning the microscopic imaging system fixed to the mounting substrate with the assembly area of the image intensifier and detector to be inspected. The microscopic imaging system is then activated; its illumination system emits light, one path passing through the microscope lens and sequentially reaching the image intensifier and detector, while the other path reaches the image sensor. The image sensor acquires a microscopic image of the assembly area of the image intensifier and detector, allowing for the inspection of their assembly condition. The position of the mounting substrate is adjusted using the three-dimensional coordinate platform, aligning the microscopic imaging system fixed to the mounting substrate with the assembly area of the image intensifier and detector. The transfer function detection system on the mounting substrate is aligned with the image intensifier and detector to be inspected. The transfer function detection system is activated, and the integrating sphere emits light that illuminates the target plate and then passes through the detection lens to reach the image intensifier and detector to be inspected in sequence. The optical performance of the image intensifier and detector to be inspected is detected and evaluated by the transfer function detection system. If the optical performance does not meet the standards, the pose and reference alignment of the image intensifier and detector to be inspected are adjusted by the image intensifier adjustment mechanism and the detector adjustment mechanism, and the process is repeated. The assembly condition of the image intensifier and detector to be inspected is detected by the microscopic imaging system.
[0016] Compared with the prior art, the present invention has the following beneficial effects: This platform constructs an integrated coupled assembly and inspection platform. The mounting substrate can be adjusted in three orthogonal dimensions through a three-dimensional coordinate platform, which facilitates the switching between the microscopic imaging system and the transfer function inspection system. The image intensifier adjustment mechanism and the detector adjustment mechanism are nested on the coupled multi-dimensional adjustment stage, which can adjust the position of the image intensifier and detector to be assembled and inspected separately. This realizes the integration of assembly and inspection functions, improves the efficiency and accuracy of assembly and inspection, eliminates the need for inspection on another device, shortens the operation process, and saves equipment space.
[0017] Preferably, the optical axes of the transfer function detection system and the microscopic imaging system are parallel, so that during the detection process, the two systems have the same observation angle of the image intensifier and detector to be inspected. This allows for more accurate synchronous detection and evaluation of the assembly status and optical performance of the image intensifier and detector to be inspected, avoiding detection errors caused by non-parallel optical axes and improving the reliability of the detection results.
[0018] Preferably, the combination of the detection lens, integrating sphere, and target plate can simulate different optical conditions. After the light emitted by the integrating sphere illuminates the target plate, it passes through the detection lens and arrives at the image intensifier and detector to be inspected in sequence. This allows for comprehensive and accurate detection of performance indicators such as the optical transfer function of the image intensifier and detector to be inspected, providing reliable data support for evaluating their optical performance.
[0019] Preferably, the microscope lens, illumination system, and image sensor work together. The illumination system emits light that passes through the microscope lens and sequentially reaches the image intensifier and detector to be inspected, illuminating the assembly area for observation. The other light reaches the image sensor, which can clearly acquire a microscopic image of the assembly area of the image intensifier and detector to be inspected, thereby intuitively and accurately detecting the assembly status and promptly identifying problems in the assembly process.
[0020] Preferably, the 9-lens structure helps improve image quality; the working distance ≥100mm provides ample operating space; the 10X magnification is suitable for detailed observation of the image intensifier and detector assembly areas to be inspected; the working spectrum is the visible spectrum, meeting routine inspection requirements; the minimum resolution is better than 2μm, enabling the resolution of fine assembly structures; the field of view ≥1.5mm can cover a large assembly area; the lens depth of field of 3.5μm ensures clear imaging within a certain depth range; and the illumination system, consisting of 2 lenses, simplifies the structure while ensuring illumination effectiveness. These parameter settings contribute to obtaining high-quality microscopic images and improving the accuracy of assembly inspection.
[0021] Preferably, the image sensor uses pixels with a size of ≤3.2μm. The smaller pixel size can improve the resolution of the image, making the acquired microscopic images of the assembly areas of the image intensifier and detector to be inspected clearer and richer in detail. This is beneficial for more accurate detection of the assembly status and discovery of minute assembly defects.
[0022] Preferably, the specific structure of the three-dimensional coordinate platform is realized by combining the X-axis air-bearing platform, the Y-axis gantry air-bearing platform, the Z-axis motion mechanism, and the platform base. The air-bearing platform features smooth movement, low friction, and high precision, ensuring that the mounting base plate can be precisely and stably adjusted in three dimensions, further improving the accuracy and reliability of the assembly and inspection of the image intensifier and detector to be inspected.
[0023] Preferably, the transfer function detection system is equipped with a transfer function detection precision measuring mirror, which represents the optical axis orientation of the transfer function detection system and can be further adjusted to be consistent with the optical axis orientation of the microscopic imaging system.
[0024] Preferably, the microscopic imaging system is equipped with a microscopic imaging precision measuring mirror, which represents the optical axis orientation of the microscopic imaging system and can be further adjusted to be consistent with the optical axis orientation of the transfer function detection system.
[0025] This method, guided by clear steps, first uses a microscopic imaging system to inspect the assembly, then uses a transfer function testing system to evaluate the optical performance. If the optical performance does not meet the standards, the pose and reference alignment of the image intensifier and detector to be assembled and inspected are adjusted by an adjustment mechanism, and then the inspection is repeated, forming a complete assembly and inspection cycle. This method can systematically complete the assembly and inspection of image intensifiers and detectors to be assembled and inspected, improving assembly quality and inspection efficiency, and ensuring that the product performance meets requirements. Attached Figure Description
[0026] The accompanying drawings described herein are for illustrative purposes only and are not intended to limit the scope of the invention in any way. Furthermore, the shapes and proportions of the components in the drawings are merely schematic to aid in understanding the invention and are not intended to specifically limit the shapes and proportions of the components. In the drawings: Figure 1 This is a schematic diagram of an image intensifier and detector coupling assembly and testing platform in Example 1; Figure 2 This is a schematic diagram of the three-dimensional coordinate platform in Example 1; Figure 3 This is a schematic diagram of the microscopic imaging system in Example 1; Figure 4 This is a schematic diagram of the transfer detection system in Example 1; Figure 5 This is a schematic diagram of the optical axis calibration of the microscopic imaging system and the transfer function detection system in Example 1; Figure 6 This is a schematic diagram of the multidimensional adjustment system for coupling the image intensifier and the detector in Example 1.
[0027] The components include: 1. Three-dimensional coordinate platform; 2. Microscopic imaging system; 3. Transfer function detection system; 4. Coupled multidimensional adjustment stage; 1-1. X-axis air-bearing platform; 1-2. Z-axis motion mechanism; 1-3. Y-axis gantry air-bearing platform; 2-1. Microscopic imaging lens; 2-2. Illumination system; 2-3. Image sensor; 2-4. Microscopic imaging precision measuring mirror; 3-1. Transfer function detection lens; 3-2. Integrating sphere; 3-3. Target plate; 3-4. Transfer function detection precision measuring mirror; 3-5. Mounting substrate; 4-1. Image intensifier adjustment mechanism; 4-2. Detector adjustment mechanism. Detailed Implementation
[0028] To enable those skilled in the art to better understand the technical solutions of this invention, the technical solutions of the embodiments of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this invention, and not all embodiments. Based on the embodiments of this invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of this invention.
[0029] It should be noted that when an element is referred to as being "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only embodiments.
[0030] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein in the description of the invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.
[0031] Example 1 like Figure 1 and Figure 2 As shown, this embodiment provides an image intensifier and detector coupling assembly and testing platform, including a three-dimensional coordinate platform 1, a microscopic imaging system 2, an image transfer function detection system 3, a mounting base plate 3-5, an intensifier adjustment mechanism, and a detector adjustment mechanism; the mounting base plate 3-5 is disposed on the three-dimensional coordinate platform 1 and is used for adjustment in three orthogonal dimensions.
[0032] The microscopic imaging system 2 and the transfer function detection system 3 are spaced apart on the mounting substrate 3-5; the image intensifier adjustment mechanism is used to adjust the position of the image intensifier, and the detector adjustment mechanism is used to adjust the position of the detector. The microscopic imaging lens 2-1 and the transfer function detection lens 3-1 are mounted on the same substrate and on the Z-axis of the three-dimensional coordinate platform 1, enabling microscopic measurement and detector transfer function detection at any position within the three-dimensional coordinate platform 1.
[0033] like Figure 1 and Figure 2As shown, the three-dimensional coordinate platform 1 includes an X-axis air-bearing platform 1-1, a Y-axis gantry air-bearing platform 1-3, a Z-axis motion mechanism 1-2, and a platform base. The X-axis air-bearing platform 1-1 is mounted on the platform base, the Y-axis gantry air-bearing platform 1-3 is mounted on the X-axis air-bearing platform 1-1, and the Z-axis motion mechanism 1-2 is mounted on the Y-axis gantry air-bearing platform 1-3. The three-dimensional coordinate platform 1 consists of a marble platform and three-axis motion mechanisms (X, Y, and Z). The X and Y axes utilize air-bearing platforms, linear motors, and absolute grating rulers to achieve high-precision closed-loop control, while the Z-axis uses a motor, ball screw, and absolute grating rulers to achieve high-precision closed-loop control.
[0034] Preferably, the three-dimensional coordinate platform 1 is constructed entirely of marble, providing excellent stability. The X and Y axes of the three-dimensional coordinate platform 1 utilize a high-precision air-bearing guide rail motion gantry structure. The straightness of the X and Y axes is ensured by the precision of the marble guide rails, employing a linear motor direct drive method. Position feedback utilizes a fully closed-loop absolute value grating ruler to guarantee the stability and accuracy of the X and Y axis motion. The Z axis of the three-dimensional coordinate platform 1 uses a high-precision guide rail for guidance, a lead screw combined with a motor drive, and a high-precision grating ruler to form a closed-loop control. Furthermore, the Z-axis slider is made of titanium alloy to ensure the stability and accuracy requirements of the Z-axis motion.
[0035] Preferably, the optical axes of the transfer function detection system 3 and the microscopic imaging system 2 are parallel. The transfer function detection system 3 and the microscopic imaging system 2 are mounted on the same substrate. First, the optical axes of the two systems are led out to the precision measuring mirror. During the installation process, the consistency of the optical axis pointing of the two systems is calibrated. After calibration, they are mounted on the Z-axis of the three-dimensional coordinate platform 1.
[0036] like Figure 3 As shown, the microscopic imaging system 2 includes a microscope head, an illumination system 2-2, and an image sensor 2-3. The illumination system 2-2 emits light in one direction, which passes through the microscope head and then sequentially reaches the image intensifier and detector to be inspected, and in another direction, it reaches the image sensor 2-3.
[0037] Specifically, the microscope head consists of 9 lenses, with a working distance ≥100mm, a magnification of 10X, a working spectrum of the visible spectrum, a minimum resolution better than 2μm, an observation field of view ≥1.5mm, and a lens depth of field of 3.5μm.
[0038] Specifically, the lighting system 2-2 consists of two lenses.
[0039] The image sensors 2-3 use pixels with a resolution of ≤3.2μm.
[0040] like Figure 4As shown, the transfer function detection system 3 includes a detection lens, an integrating sphere 3-2, and a target plate 3-3. The light emitted from the integrating sphere 3-2 illuminates the target plate 3-3 and then passes through the detection lens to reach the image intensifier and detector to be inspected. A test target is mounted on the object surface of the detection lens, and the target is uniformly illuminated across its entire surface by the integrating sphere 3-2. The magnification of the detection lens is 1 / 4.5, and its optical transfer function test data is used for detector transfer function detection. The transfer function detection system 3 is mounted on a three-dimensional coordinate platform 1, enabling rapid transfer function detection for both ordinary and enhanced detectors, and plotting transfer function overfocus curves.
[0041] like Figure 5 As shown, the transfer function detection system 3 also includes a transfer function detection precision measuring mirror 3-4. The microscopic imaging system 2 also includes a microscopic imaging precision measuring mirror 2-4. Precision measuring mirrors are installed on both the microscopic imaging lens 2-1 and the transfer function detection lens 3-1. These precision measuring mirrors represent the direction of their lens optical axes. During installation, a theodolite is used to calibrate the consistency of the optical axis directions of the two lenses. After the microscopic imaging lens 2-1 and the transfer function detection lens 3-1 are installed on the three-dimensional coordinate platform 1, a theodolite is used to measure the perpendicularity of the two precision measuring mirrors to the three-dimensional coordinate platform 1 to calibrate their perpendicularity.
[0042] like Figure 6 As shown, the image intensifier adjustment mechanism and the detector adjustment mechanism are nested on the coupling multidimensional adjustment stage 4, which is positioned on the three-dimensional coordinate platform 1 corresponding to the mounting base plates 3-5. The image intensifier and detector coupling multidimensional adjustment system, in conjunction with the microscopic imaging system 2, is used for reference extraction and high-precision alignment coupling of the image intensifier and detector. After coupling, the microscopic imaging system 2 is switched to the transfer function detection system 3 via the three-dimensional coordinate platform 1 to perform transfer function detection on the coupled intensifier-type detector. The image intensifier coupling multidimensional adjustment stage 4 is mainly used for the coupling assembly of the image intensifier and detector. In conjunction with the microscopic imaging system 2, it identifies and adjusts the reference extraction marks of the image intensifier and detector, achieving pose adjustment and reference alignment of the image intensifier and detector, thereby achieving high-precision coupling between the image intensifier and detector.
[0043] Example 2 This embodiment also provides a method for using an image intensifier and detector coupling assembly inspection platform, including the following steps: The position of the mounting base plate 3-5 is adjusted using the three-dimensional coordinate platform 1 so that the microscopic imaging system 2 fixed on the mounting base plate 3-5 is aligned with the assembly area of the image intensifier and detector to be inspected. The microscopic imaging system 2 is activated. The illumination system 2-2 in the microscopic imaging system 2 emits light. One path passes through the microscope lens and reaches the image intensifier and detector to be inspected in sequence. The other path reaches the image sensor 2-3. The image sensor 2-3 is used to acquire a microscopic image of the assembly area of the image intensifier and detector to be inspected, and to detect the assembly status of the image intensifier and detector to be inspected. The position of the mounting base plate 3-5 is adjusted by the three-dimensional coordinate platform 1 so that the transfer function detection system 3 fixed on the mounting base plate 3-5 is aligned with the image intensifier and detector to be inspected. The transfer function detection system 3 is activated. The integrating sphere 3-2 emits light to illuminate the target plate 3-3, which then passes through the detection lens and sequentially reaches the image intensifier and detector to be inspected. The optical performance of the image intensifier and detector to be inspected is detected and evaluated using the transfer function detection system 3. If the optical performance does not meet the standards, the pose and reference alignment of the image intensifier and detector to be inspected are adjusted by the image intensifier adjustment mechanism 4-1 and the detector adjustment mechanism 4-2, and the process is repeated. The assembly status of the image intensifier and detector to be inspected is then detected by the microscopic imaging system 2.
[0044] In this method, after the image intensifier and detector are coupled, the microscopic imaging system 2 used during the coupling process is switched to the transfer function detection system 3 via the three-dimensional coordinate platform 1 to perform transfer function detection on the coupled intensifier-type detector. This step can reduce the time required for detection and adjustment of the trimming pad thickness, which was originally completed on another platform device, from several days to just a few hours.
[0045] The transfer function detection process can guide the coupling and assembly process of the image intensifier and detector, reducing the transition between assembly and inspection steps, making the entire image intensifier and detector coupling process simpler and more efficient, and improving assembly and inspection accuracy. The beneficial effects of this embodiment are summarized as follows: The image intensifier and detector coupling splicing assembly and testing platform features an integrated design that reduces the transition and isolation between assembly and testing, making the entire image intensifier and detector coupling process simpler and more efficient, and improving assembly and testing accuracy. The image intensifier and detector coupling assembly testing platform is an integrated design that enables high-precision coupling between the image intensifier and detector. The high-precision displacement characteristics of the three-dimensional coordinate platform enabled rapid detection of the image intensifier and detector reference alignment and the system transfer function after coupling. The method described in this invention enables batch coupling assembly and transfer function detection of image intensifiers and detectors within a finite time.
[0046] The above embodiments are merely one of the implementation methods for achieving the technical solution of the present invention. The scope of protection claimed by the present invention is not limited to this embodiment, but also includes any variations, substitutions and other implementation methods that can be easily conceived by those skilled in the art within the scope of the technology disclosed in the present invention.
Claims
1. A testing platform for coupling and assembling an image intensifier and a detector, characterized in that, The system includes a three-dimensional coordinate platform (1), a microscopic imaging system (2), a transfer function detection system (3), a mounting base (3-5), an image intensifier adjustment mechanism, and a detector adjustment mechanism. The mounting base (3-5) is disposed on the three-dimensional coordinate platform (1) and is used for adjustment in three orthogonal dimensions. The microscopic imaging system (2) and the transfer function detection system (3) are disposed alternately on the mounting base (3-5). The image intensifier adjustment mechanism is used to adjust the position of the image intensifier, and the detector adjustment mechanism is used to adjust the position of the detector. The image intensifier adjustment mechanism and the detector adjustment mechanism are nested on a coupled multidimensional adjustment stage (4), which is disposed on the three-dimensional coordinate platform (1) corresponding to the mounting base (3-5).
2. The image intensifier and detector coupling assembly and testing platform according to claim 1, characterized in that, The optical axes of the transfer function detection system (3) and the microscopic imaging system (2) are parallel.
3. The image intensifier and detector coupling assembly and testing platform according to claim 1, characterized in that, The transmission function detection system (3) includes a detection lens, an integrating sphere (3-2), and a target plate (3-3). The integrating sphere (3-2) emits light to illuminate the target plate (3-3) and then passes through the detection lens to reach the image intensifier and detector to be inspected.
4. The image intensifier and detector coupling assembly and testing platform according to claim 1, characterized in that, The microscopic imaging system (2) includes a microscope head, an illumination system (2-2) and an image sensor (2-3). The illumination system (2-2) emits light in one direction, which passes through the microscope head and arrives sequentially at the image intensifier and detector to be inspected, and in another direction, it arrives at the image sensor (2-3).
5. The image intensifier and detector coupling assembly and testing platform according to claim 4, characterized in that, The microscope head consists of 9 lenses, with a working distance ≥100mm, a magnification of 10X, a working spectrum of the visible spectrum, a minimum resolution better than 2μm, an observation field of view ≥1.5mm, and a lens depth of field of 3.5μm; the illumination system (2-2) consists of 2 lenses.
6. The image intensifier and detector coupling assembly and testing platform according to claim 4, characterized in that, The image sensor (2-3) uses pixels with a resolution of ≤3.2μm.
7. The image intensifier and detector coupling assembly and testing platform according to claim 1, characterized in that, The three-dimensional coordinate platform (1) includes an X-axis air-floating platform (1-1), a Y-axis gantry air-floating platform (1-3), a Z-axis motion mechanism (1-2), and a platform base; the X-axis air-floating platform (1-1) is disposed on the platform base, the Y-axis gantry air-floating platform (1-3) is disposed on the X-axis air-floating platform (1-1), and the Z-axis motion mechanism (1-2) is disposed on the Y-axis gantry air-floating platform (1-3).
8. The image intensifier and detector coupling assembly and testing platform according to claim 1, characterized in that, The transfer function detection system (3) also includes a transfer function detection precision measuring mirror (3-4).
9. The image intensifier and detector coupling assembly and testing platform according to claim 1, characterized in that, The microscopic imaging system (2) also includes a microscopic imaging precision measuring mirror (2-4).
10. The method of using the image intensifier and detector coupling assembly inspection platform as described in any one of claims 1 to 9, characterized in that, Includes the following steps: The position of the mounting base (3-5) is adjusted using a three-dimensional coordinate platform (1) so that the microscopic imaging system (2) fixed on the mounting base (3-5) is aligned with the assembly area of the image intensifier and detector to be inspected. The microscopic imaging system (2) is activated. The illumination system (2-2) in the microscopic imaging system (2) emits light. One path passes through the microscope lens and reaches the image intensifier and detector to be inspected in sequence. The other path reaches the image sensor (2-3). The image sensor (2-3) is used to acquire a microscopic image of the assembly area of the image intensifier and detector to be inspected, and the assembly status of the image intensifier and detector to be inspected is detected. The position of the mounting base plate (3-5) is adjusted by the three-dimensional coordinate platform (1) so that the transfer function detection system (3) fixed on the mounting base plate (3-5) is aligned with the image intensifier and detector to be inspected; The transfer function detection system (3) is activated. The integrating sphere (3-2) emits light to illuminate the target plate (3-3) and then passes through the detection lens to reach the image intensifier and detector to be inspected in sequence. The optical performance of the image intensifier and detector to be inspected is detected and evaluated by the transfer function detection system (3). If the optical performance does not meet the standard, the pose and reference alignment of the image intensifier and detector to be inspected are adjusted by the image intensifier adjustment mechanism (4-1) and the detector adjustment mechanism (4-2). The process is repeated in the above steps. The assembly status of the image intensifier and detector to be inspected is detected by the microscopic imaging system (2).