Cabinet productivity evaluation method and cabinet productivity evaluation system
By using an automated machine capacity assessment system to calculate WPH values through sorting and conditional judgment functions, the problems of untimely and inaccurate machine capacity assessment have been solved, achieving more efficient capacity monitoring and data analysis.
Patent Information
- Application Number
- CN202411151601.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-21
- Publication Date
- 2026-03-03
AI Technical Summary
In existing technologies, machine capacity assessment relies on manual data retrieval, resulting in untimely data updates and insufficient accuracy, making it impossible to effectively monitor machine utilization and production data.
By acquiring the machine's running records within a specified time period, the WPH value is calculated using sorting and conditional judgment functions. Combined with the lower and upper limits of WPH, automated capacity assessment is achieved.
It improves the timeliness and accuracy of machine capacity assessment, effectively monitors machine utilization and analyzes production data, and reduces errors caused by manual intervention.
Smart Images
Figure CN121599261A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of semiconductor technology, and in particular to a machine capacity assessment method and a machine capacity assessment system. Background Technology
[0002] For equipment used in semiconductor manufacturing, production capacity (output) is often assessed using WPH (wafers per hour). WPH is a crucial indicator for capacity assessment. However, currently, many systems still rely on manual data retrieval and calculation of WPH values, which cannot be updated in a timely manner and lacks accuracy. To monitor equipment utilization and analyze production data, thereby improving the timeliness and accuracy of equipment capacity assessment, there is an urgent need for tools or methods capable of statistically calculating the WPH value of equipment. Summary of the Invention
[0003] To improve the timeliness and accuracy of machine capacity assessment, this invention provides a machine capacity assessment method and a machine capacity assessment system.
[0004] On one hand, the present invention provides a method for evaluating machine capacity, the method comprising:
[0005] Multiple running records are generated by a specified machine running multiple batches of wafers within a specified time period. Each running record includes the batch number, wafer quantity, process name of the process performed, and departure time after the running is completed.
[0006] According to the order of departure time, the multiple delivery records are sorted using a sorting function to obtain a delivery record arrangement;
[0007] Compare the process names of two adjacent running records in the arrangement of running records to obtain a specific running record, wherein the specific running record has the same process name as the running record preceding it; and
[0008] The WPH value corresponding to the corresponding process name within the specified time period is calculated and output using the specific running record and the corresponding previous running record. The WPH value is equal to lot_qty / (t2-t1), where lot_qty represents the number of wafers in the specific running record, t2 represents the departure time in the specific running record, and t1 represents the departure time in the previous running record of the specific running record.
[0009] Optionally, comparing the process names of two adjacent running records in the arrangement of running records to obtain a specific running record includes:
[0010] Select one of the delivery records from the arrangement of delivery records;
[0011] Use the grouping translation function to retrieve the process name from the previous running record of the currently selected running record; and
[0012] Using a conditional judgment function, determine whether the process name in the currently selected running record is the same as the process name in the previous running record. If yes, the currently selected running record is the specific running record; otherwise, the currently selected running record is not the specific running record and corresponds to an invalid WPH value.
[0013] Optionally, the machine capacity assessment method further includes:
[0014] When at least two WPH values corresponding to the same process name are calculated within the specified time period, the average of the at least two WPH values is calculated as the WPH value corresponding to the corresponding process name within the specified time period.
[0015] Optionally, the machine capacity assessment method further includes:
[0016] Set the lower limit and upper limit of WPH corresponding to the process name of the process performed by the specified machine;
[0017] Specifically, after obtaining the WPH value corresponding to the corresponding process name within the specified time period, it is determined whether the obtained WPH value is less than the corresponding lower limit value and whether it is greater than the corresponding upper limit value, and the determination result is obtained. When outputting the WPH value, information about the determination result is also output.
[0018] Optionally, the machine capacity assessment method further includes:
[0019] Obtain the WPH values of one or more of the specified machines within multiple specified time periods, corresponding to the process names of the processes being executed, and output them in report form.
[0020] On the other hand, the present invention provides a machine capacity assessment system, the machine capacity assessment system comprising:
[0021] The data acquisition module is used to acquire multiple running records formed by a specified machine running multiple batches of wafers within a specified time period. Each running record includes the batch number corresponding to the same batch of wafers, the number of wafers, the process name of the process performed, and the departure time after the running is completed.
[0022] The data sorting module is used to sort the multiple delivery records according to the order of their departure times using a sorting function, resulting in a delivery record arrangement; and
[0023] The process comparison module is used to compare the process names of two adjacent running records in the running record arrangement to obtain a specific running record with the same process name as the previous running record.
[0024] The WPH value calculation module is used to calculate the WPH value corresponding to the corresponding process name within the specified time period using the specific shipment record and the corresponding previous shipment record. The WPH value is equal to lot_qty / (t2-t1), where lot_qty represents the number of wafers in the specific shipment record, t2 represents the departure time in the specific shipment record, and t1 represents the departure time in the previous shipment record.
[0025] The output module is used to output the WPH value obtained by the WPH value calculation module.
[0026] Optionally, the process comparison module compares the process names of two adjacent running records in the running record arrangement to obtain a specific running record, including:
[0027] Select one of the delivery records from the arrangement of delivery records;
[0028] Use the grouping translation function to retrieve the process name from the previous running record of the currently selected running record; and
[0029] Using a conditional judgment function, determine whether the process name in the currently selected running record is the same as the process name in the previous running record. If yes, the currently selected running record is the specific running record; otherwise, the currently selected running record is not the specific running record and corresponds to an invalid WPH value.
[0030] Optionally, the WPH value calculation module is further configured to: when at least two WPH values corresponding to the same process name within the specified time period are calculated, calculate the average of the at least two WPH values as the WPH value corresponding to the corresponding process name within the specified time period.
[0031] Optionally, the machine capacity assessment system further includes:
[0032] The data maintenance module is used to set the lower limit and upper limit of WPH corresponding to the process name of the process performed by the specified machine.
[0033] The data comparison module is used to obtain the WPH value calculated by the WPH value calculation module, and determine whether the WPH value is less than the corresponding lower limit value of WPH and whether it is greater than the corresponding upper limit value of WPH, and obtain the judgment result. The output module outputs information about the judgment result when outputting the WPH value.
[0034] Optionally, the output module obtains the WPH values of one or more of the specified machines corresponding to the process names of the executed processes within multiple specified time periods, and outputs them in the form of a report.
[0035] Optionally, the designated machine is a lithography machine, and the process name includes product category information and photomask layer information under the corresponding product category information; when the product category information and the photomask layer information under the corresponding product category information are the same in two process names, the two process names are the same.
[0036] The machine capacity assessment method and system provided by this invention can utilize multiple running records generated by a specified machine within a specified time period. These records are sorted according to their departure time using a sorting function to form a running record arrangement. The process names of two adjacent running records in the arrangement are compared to obtain a specific running record with the same process name as the previous running record. The WPH value corresponding to the corresponding process name within the specified time period is calculated using this specific running record and the corresponding previous running record, and then output. This allows for statistical analysis of the WPH value. Compared to manually retrieving data and calculating the WPH value, this method improves the timeliness and accuracy of machine capacity assessment, and helps monitor machine utilization and analyze production data. Attached Figure Description
[0037] Figure 1 This is a flowchart illustrating a machine capacity assessment method according to an embodiment of the present invention.
[0038] Figure 2 A schematic diagram of a maintenance report used to set the lower limit and upper limit of WPH in a machine capacity assessment method according to an embodiment of the present invention.
[0039] Figure 3 This is a schematic diagram of the structure of a machine capacity assessment system according to an embodiment of the present invention. Detailed Implementation
[0040] The machine capacity assessment method and system of the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. The advantages and features of the present invention will become clearer from the following description. It should be understood that the accompanying drawings are in a very simplified form and use non-precise proportions, and are only used to facilitate and clarify the illustration of the embodiments of the present invention.
[0041] Figure 1 This is a flowchart illustrating a machine capacity assessment method according to an embodiment of the present invention. (Refer to...) Figure 1 This invention includes a method for evaluating machine capacity. This machine capacity evaluation method can be implemented in software; however, all or part of it can also be implemented in hardware circuitry. The machine capacity evaluation method can be implemented as a software program in conjunction with a device or equipment, for example, through a software program located on a storage medium (such as a hard disk, RAM, registers in a CPU, external storage media, and storage devices via communication lines). When the software program is executed by a processor, it can perform actions such as... Figure 1 The machine capacity assessment method shown is described below. Regardless of whether it's implemented in software or hardware, the specific software or hardware components for achieving this method can be carried out by those skilled in electronics and software; therefore, the details are not elaborated in this specification. The following will first combine... Figure 1 The method for evaluating machine capacity is introduced.
[0042] Reference Figure 1 In the machine capacity assessment method of this invention, in step S1, multiple running records are obtained by a specified machine running multiple batches of wafers within a specified time period. Each running record includes the batch number corresponding to the same batch of wafers, the number of wafers, the process name of the process performed, and the departure time after the running is completed.
[0043] The machine capacity assessment method can be used to assess the capacity of machines used in various semiconductor manufacturing plants (such as machines for semiconductor manufacturing or machines for semiconductor testing). Therefore, the designated machine in step S1 can be selected according to specific needs. In the following embodiments, the designated machine is, for example, a lithography machine.
[0044] In a semiconductor manufacturing plant, each machine has a corresponding equipment name. When a machine is processing wafers, its operational data can be recorded and stored either by the machine's control system or by the manufacturing execution system (MES) of the semiconductor manufacturing plant, thus forming a processing record. Therefore, multiple processing records can be obtained by accessing the relevant storage location using known methods, representing multiple batches of wafers processed by a specified machine within a specified time period. The specified time period can be set as needed, for example, it can be a specified hour, a specified half-day, a specified day, or a specified month.
[0045] Each track record is a record of the processing of a batch of wafers under the same batch number on the designated machine. When a batch of wafers is tracked to the designated machine for processing, it is called "track in" for that batch of wafers; after the corresponding processing is completed, it is called "track out" for that batch of wafers. Each track record on the designated machine may include information such as the batch number corresponding to the batch of wafers, the quantity of wafers, the name of the process performed, and the time of track out after completion.
[0046] Taking a lithography machine as an example when performing step S1, the process name of the process it performs may include product category information and the corresponding photomask layer information under the product category information. The process name is represented in the form of "product category (such as BCD or IGBT) + photomask layer under the corresponding product category (such as layer1 or layer2)".
[0047] Reference Figure 1 In step S2, the multiple cargo records are sorted according to the order of departure time using a sorting function to obtain a cargo record arrangement.
[0048] Since the shipping records obtained in step S1 include information on the outbound time corresponding to the same batch of wafers, the outbound time information can be collected from the data of each shipping record, and the instruction containing the sorting function in step S2 can be executed to achieve the purpose of sorting the multiple shipping records obtained in step S1 according to the order of the outbound time. After sorting, each shipping record has corresponding sequence position information, thus obtaining a shipping record arrangement.
[0049] As an example, step S1 obtains multiple shipment records of a lithography machine with a specified device number. A sorting function (such as orderby) can be used to sort the multiple shipment records in ascending order according to the departure time (i.e., the later the departure time, the later the record is placed), resulting in a shipment record arrangement.
[0050] Reference Figure 1 In step S3, the process names of two adjacent running records in the running record arrangement are compared to obtain a specific running record. The specific running record has the same process name as the running record above it.
[0051] As an example, step S3 may include the following process.
[0052] First, select a shipment record from the arrangement of shipment records to compare its process name with the previous shipment record. The shipment records can be selected sequentially in ascending order, excluding the shipment record with the earliest departure time. For example, if a shipment record arrangement includes shipment records R1, R2, R3, R4, and R5 arranged in ascending order of departure time, the following steps can be performed: R2, R3, R4, and R5.
[0053] Then, use a grouping shift function (such as lag()over(partitionby)) to retrieve the process name from the previous running record of the currently selected running record.
[0054] For example, the process name in the first shipment record R1 is "BCD-layer1" (indicating that the first photomask layer process under the BCD category is performed on the corresponding batch of wafers). The process names in the second shipment record R2, the third shipment record R3, and the fourth shipment record R4 are all "IGBT-layer1" (indicating that the first photomask layer process under the IGBT category is performed on the corresponding batch of wafers). The process name in the fifth shipment record R5 is "IGBT-layer2" (indicating that the second photomask layer process under the IGBT category is performed on the corresponding batch of wafers). Therefore, when the second shipment record R2 is selected for comparison of process names, the process name "BCD-layer1" in the first shipment record R1 preceding the second shipment record R2 can be retrieved using a grouping translation function. Similarly, when the third shipment record R3 is selected for comparison of process names, the process name "IGBT-layer1" in the second shipment record R1 preceding the third shipment record R3 can be retrieved using a grouping translation function, and so on.
[0055] Next, a conditional judgment function (such as CASE WHEN) is used to determine whether the process name in the currently selected running record is the same as the process name in the previous running record. If so, the currently selected running record is the specific running record; otherwise, the currently selected running record is not the specific running record and corresponds to an invalid WPH value (null). In this embodiment, the specific running record and its previous running record have the same process name and adjacent departure times, so only the specific running record and its previous running record are used to calculate the WPH value (referring to hourly wafer production) corresponding to the corresponding process name.
[0056] In the example above, since the process name of the second running record R2, the third running record R3 and the fourth running record R4 are all "IGBT-layer1", then through step S3, it can be obtained that the third running record R3 and the fourth running record R4 are specific running records used to calculate the WPH value.
[0057] Reference Figure 1 In step S4, the WPH value corresponding to the corresponding process name within the specified time period is calculated using the specific running record and the corresponding previous running record, and then output.
[0058] The WPH value can be calculated using the following equation:
[0059] WPH = lot_qty / (t2 - t1)
[0060] In this equation, "WPH" represents the WPH value, lot_qty represents the number of wafers in the specific shipment record, t2 represents the departure time in the specific shipment record, and t1 represents the departure time in the previous shipment record of the specific shipment record. When calculating the WPH value using the above equation, the unit of (t2-t1) is uniformly converted to hours, for example.
[0061] As an example, when calculating the WPH value using the second and third shipping records R2 and R3, `lot_qty` represents the number of wafers in the third shipping record R3, `t2` represents the outbound time in the third shipping record R3, and `t1` represents the outbound time in the second shipping record R2. Similarly, when calculating the WPH value using the third and fourth shipping records R4, `lot_qty` represents the number of wafers in the fourth shipping record R4, `t2` represents the outbound time in the fourth shipping record R4, and `t1` represents the outbound time in the third shipping record R3.
[0062] The WPH value calculated in step S4 can be output to a display so that staff can promptly understand the WPH value corresponding to a specific process name (e.g., different photomask layers), assess machine capacity, monitor machine utilization, and monitor and analyze production data. As an example, reports can be output showing the WPH values of one or more specified machines corresponding to the process names of the executed processes over multiple specified time periods. The output reports may also include information on invalid WPH values. As an example, FineReport can be used to create visual reports, displaying information from multiple dimensions as needed, such as WPH data display within a set time range, comparison of WPH data from different machines within the same time period (e.g., the same day or the same month), and changes in WPH values over consecutive periods (e.g., multiple consecutive days or weeks). This invention is not limited to these examples; for instance, WPH value data can also be calculated.
[0063] In the above-mentioned machine capacity assessment method, when at least two specific running records with the same process name are obtained in step S3, at least two WPH values corresponding to the same process name can be obtained in step S4 using the at least two specific running records. At this time, step S4 can also calculate the average value of the at least two WPH values as the WPH value corresponding to the corresponding process name within the specified time period and output it. That is, the WPH value corresponding to the specified process name within the specified time period can also be the average value.
[0064] During wafer processing, abnormal situations may occur, causing the difference in exit time (i.e., (t2-t1)) between two consecutive wafer runs performing the same process to be abnormal. Consequently, the WPH value calculated using the above equation may be larger or smaller than normal. For example, one abnormal situation is that after a batch of wafers enters the designated wafer station, it may be unable to perform the corresponding process for various reasons, resulting in a long waiting time. This situation leads to a large difference in exit time, and the calculated WPH value is too small. Another abnormal situation is that after a batch of wafers enters the designated wafer station, it may be manually skipped, causing the batch of wafers to leave the station without being processed by the designated wafer station. This situation leads to a small difference in exit time, and the calculated WPH value is too large. The WPH values obtained from these abnormal situations affect the accuracy of the wafer processing capacity assessment. To improve the accuracy of wafer processing capacity assessment, the preferred solution can avoid abnormal WPH values.
[0065] In some embodiments, to avoid abnormal situations during machine operation affecting the accuracy of WPH values and to improve the accuracy of machine capacity assessment, the machine capacity assessment method may set a lower limit and an upper limit of WPH corresponding to the process name of the process executed by the specified machine, so as to facilitate the assessment of the WPH value obtained in step S4 above. The lower limit of WPH is, for example, the minimum capacity target of the specified machine when executing the corresponding process, and the upper limit of WPH is, for example, the theoretical capacity of the specified machine when executing the corresponding process.
[0066] Set the lower and upper limits of WPH corresponding to the process name of the process performed by the specified machine, for example, by creating a maintenance report. (Refer to...) Figure 2 As an example, the maintenance report includes a region for recording multiple process names that can be performed on the same type of machine (such as a lithography machine), as well as the corresponding lower and upper WPH values for each process name. Furthermore, the maintenance report may also have a region for recording the time when the lower and upper WPH values are maintained (or entered).
[0067] As an example, after obtaining the WPH value corresponding to the corresponding process name within the specified time period using step S4 above, it can be determined whether the obtained WPH value is less than the corresponding lower WPH limit and whether it is greater than the corresponding upper WPH limit, and a judgment result can be obtained. When outputting the WPH value, information about the judgment result is also output. For example, by setting the report used to output the WPH value, when the WPH value is less than the corresponding lower WPH limit, the corresponding WPH value is displayed in a different color, and when the WPH value is greater than the corresponding upper WPH limit, the corresponding WPH value is displayed in another different color. This facilitates the staff to analyze the reasons for machines that have not achieved the minimum production capacity target, so as to improve the machine capacity and assist production in the later stage.
[0068] As an example, after obtaining multiple WPH values corresponding to the corresponding process name within a specified time period using step S4 above, and before calculating the multiple WPH values, it can be determined whether each WPH value is less than the corresponding lower limit value or greater than the corresponding upper limit value. If a WPH value is less than the corresponding lower limit value or greater than the corresponding upper limit value, then the WPH value is determined to be abnormal. When calculating the average value of the multiple WPH values, abnormal WPH values can be excluded before averaging, which can improve the accuracy of the machine capacity reflected by the obtained average value.
[0069] The machine capacity assessment method described in the above embodiments can realize WPH value statistics. Compared with manually selecting data and calculating WPH values, it can improve the timeliness and accuracy of machine capacity assessment and can be used to monitor machine utilization and monitor and analyze production data.
[0070] Figure 2 This is a schematic diagram of the structure of a machine capacity assessment system according to an embodiment of the present invention. (Refer to...) Figure 2 The present invention also includes a machine capacity assessment system 100, which includes a data acquisition module 110, a data sorting module 120, a process comparison module 130, a WPH value calculation module 140, and an output module 150.
[0071] The data acquisition module 110 is used to acquire multiple running records formed by a specified machine running multiple batches of wafers within a specified time period. Each running record includes the batch number corresponding to the same batch of wafers, the number of wafers, the process name of the process performed, and the departure time after the running is completed.
[0072] The designated machine can be a machine used for semiconductor manufacturing or a machine used for semiconductor testing, such as a lithography machine. Accordingly, the process name of the process it performs may include product category information and the mask layer information under the corresponding product category information. The designated time period can be set as needed, such as a designated hour, a designated half-day, a designated day, or a designated month.
[0073] The data sorting module 120 is used to sort the multiple delivery records according to the order of departure time using a sorting function (such as orderby) to obtain a delivery record arrangement.
[0074] The process comparison module 130 is used to compare the process names of two adjacent running records in the running record arrangement to obtain a specific running record, wherein the specific running record has the same process name as the running record preceding it. As an example, the process comparison module 130 performing this function may include the following process: First, selecting a running record from the running record arrangement; second, using a grouping shift function (such as lag()over(partitionby)) to retrieve the process name from the previous running record of the currently selected running record; then, using a conditional judgment function (such as case when) to determine whether the process name in the currently selected running record is the same as the process name in the previous running record. If so, the currently selected running record is the specific running record; otherwise, the currently selected running record is not the specific running record and corresponds to an invalid WPH value. Taking a lithography machine as an example, if the process name in the currently selected running record is the same as the process name in the previous running record, and the product category information and the photomask layer information under the corresponding product category information are the same, then the two process names are determined to be the same.
[0075] The WPH value calculation module 140 is used to calculate the WPH value corresponding to the corresponding process name within the specified time period using the specific running record and the corresponding previous running record. The WPH value is equal to lot_qty / (t2-t1), where lot_qty represents the number of wafers in the specific running record, t2 represents the departure time in the specific running record, and t1 represents the departure time in the previous running record of the specific running record. Optionally, the WPH value calculation module 140 can also be used to: when at least two WPH values corresponding to the same process name are calculated within the specified time period, calculate the average of the at least two WPH values as the WPH value corresponding to the corresponding process name within the specified time period.
[0076] The output module 150 is used to output the WPH value obtained by the WPH value calculation module 140. For example, the output module 150 can obtain the WPH values of one or more of the specified machines corresponding to the process names of the executed processes within multiple specified time periods, and output them in the form of a report. As an example, FineReport can be used to create a visual report, which can display information from multiple dimensions as needed.
[0077] Using the data acquisition module 110, data sorting module 120, process comparison module 130, WPH value calculation module 140, and output module 150 described above, steps S1 to S4 in the machine capacity assessment method described in the above embodiments can be executed. The understanding of these modules can be referred to the description of steps S1 to S4.
[0078] In some embodiments, such as Figure 1 As shown, in addition to the data acquisition module 110, data sorting module 120, process comparison module 130, WPH value calculation module 140 and output module 150 mentioned above, the machine capacity assessment system 100 may also include a data maintenance module 160 and a data comparison module 170.
[0079] The data maintenance module 160 is used to set the lower limit and upper limit of WPH corresponding to the process name of the process performed by the specified machine. As an example, a maintenance report can be created (refer to...). Figure 2 To set the lower limit value and the upper limit value of WPH.
[0080] The data comparison module 170 is used to obtain the WPH value calculated by the WPH value calculation module, and to determine whether the WPH value is less than the corresponding lower limit value and whether it is greater than the corresponding upper limit value, and to obtain the judgment result. The output module 150 outputs information about the judgment result when outputting the WPH value. For example, the report used to output the WPH value can be set so that when the WPH value is less than the corresponding lower limit value, the corresponding WPH value is displayed in a different color, and when the WPH value is greater than the corresponding upper limit value, the corresponding WPH value is displayed in another color. This makes it easier for staff to analyze the reasons for machines that have not achieved the minimum production capacity target, so as to improve the machine capacity and assist production in the later stage. The present invention is not limited thereto. In one embodiment, before calculating the average value of multiple WPH values corresponding to the same process name as needed, it can be determined whether each WPH value is less than the corresponding lower limit value or greater than the corresponding upper limit value. If a WPH value is less than the corresponding lower limit value or greater than the corresponding upper limit value, it is determined that the WPH value is abnormal. When calculating the average value of the multiple WPH values, abnormal WPH values are excluded before calculating the average value, which can improve the accuracy of the machine capacity reflected by the obtained average value.
[0081] Each module of the aforementioned machine capacity assessment system 100 corresponds to the machine capacity assessment method described in the foregoing embodiments. For understanding each module of the machine capacity assessment system 100, reference can be made to the description of the machine capacity assessment method in the foregoing embodiments. The machine capacity assessment system 100 may include multiple computers, hardware, devices, etc., interconnected via communication units such as a network, or may include a single computer, hardware, device, etc., having the process for implementing the present invention. The aforementioned data acquisition module 110, data sorting module 120, process comparison module 130, WPH value calculation module 140, output module 150, data maintenance module 160, and data comparison module 170 may be combined into one module, or any one of these modules may be split into multiple modules, or at least some of the functions of one or more of these modules may be combined with at least some of the functions of other modules and implemented in one module.
[0082] Using the aforementioned machine capacity assessment system 100, multiple delivery records generated by a specified machine within a specified time period can be sorted according to their departure time using a sorting function to form a delivery record arrangement. The process names of two adjacent delivery records in the arrangement are compared to obtain a specific delivery record with the same process name as the previous delivery record. The WPH value corresponding to the corresponding process name within the specified time period is calculated using the specific delivery record and the corresponding previous delivery record, and then output. This enables WPH value statistics. Compared to manually selecting data and calculating WPH values, this method can improve the timeliness and accuracy of machine capacity assessment, and helps monitor machine utilization and analyze production data.
[0083] The above description is merely a description of preferred embodiments of the present invention and is not intended to limit the scope of the present invention. Any person skilled in the art can make possible changes and modifications to the technical solutions of the present invention by utilizing the methods and techniques disclosed above without departing from the spirit and scope of the present invention. Therefore, any simple modifications, equivalent changes and alterations made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solutions of the present invention shall fall within the protection scope of the technical solutions of the present invention.
Claims
1. A method for evaluating machine capacity, characterized in that, include: Multiple running records are generated by a specified machine running multiple batches of wafers within a specified time period. Each running record includes the batch number, wafer quantity, process name of the process performed, and departure time after the running is completed. According to the order of departure time, the multiple delivery records are sorted using a sorting function to obtain a delivery record arrangement; The process names of two adjacent running records in the running record arrangement are compared to obtain a specific running record, and the specific running record has the same process name as the running record above it. as well as The WPH value corresponding to the corresponding process name within the specified time period is calculated and output using the specific running record and the corresponding previous running record. The WPH value is equal to lot_qty / (t2-t1), where lot_qty represents the number of wafers in the specific running record, t2 represents the departure time in the specific running record, and t1 represents the departure time in the previous running record of the specific running record.
2. The machine capacity assessment method as described in claim 1, characterized in that, Comparing the process names of two adjacent running records in the arrangement of running records to obtain a specific running record includes: Select one of the delivery records from the arrangement of delivery records; Use the grouping translation function to retrieve the process name from the previous running record of the currently selected running record; and Using a conditional judgment function, determine whether the process name in the currently selected running record is the same as the process name in the previous running record. If yes, the currently selected running record is the specific running record; otherwise, the currently selected running record is not the specific running record and corresponds to an invalid WPH value.
3. The machine capacity assessment method as described in claim 1, characterized in that, Also includes: When at least two WPH values corresponding to the same process name are calculated within the specified time period, the average of the at least two WPH values is calculated as the WPH value corresponding to the corresponding process name within the specified time period.
4. The machine capacity assessment method as described in claim 1, characterized in that, Also includes: Set the lower limit and upper limit of WPH corresponding to the process name of the process performed by the specified machine; Specifically, after obtaining the WPH value corresponding to the corresponding process name within the specified time period, it is determined whether the obtained WPH value is less than the corresponding lower limit value and whether it is greater than the corresponding upper limit value, and the determination result is obtained. When outputting the WPH value, information about the determination result is also output.
5. The machine capacity assessment method as described in any one of claims 1 to 4, characterized in that, Also includes: Obtain the WPH values of one or more of the specified machines within multiple specified time periods, corresponding to the process names of the processes being executed, and output them in report form.
6. The machine capacity assessment method as described in any one of claims 1 to 4, characterized in that, The designated machine is a lithography machine, and the process name includes product category information and photomask layer information under the corresponding product category information; when the product category information and the photomask layer information under the corresponding product category information are the same in two process names, the two process names are the same.
7. A machine capacity assessment system, characterized in that, include: The data acquisition module is used to acquire multiple running records formed by a specified machine running multiple batches of wafers within a specified time period. Each running record includes the batch number corresponding to the same batch of wafers, the number of wafers, the process name of the process performed, and the departure time after the running is completed. The data sorting module is used to sort the multiple delivery records according to the order of departure time using a sorting function to obtain a delivery record arrangement. as well as The process comparison module is used to compare the process names of two adjacent running records in the running record arrangement to obtain a specific running record, wherein the specific running record has the same process name as the running record above the specific running record. The WPH value calculation module is used to calculate the WPH value corresponding to the corresponding process name within the specified time period using the specific running record and the corresponding previous running record. The WPH value is equal to lot_qty / (t2-t1), where lot_qty represents the number of wafers in the specific running record, t2 represents the departure time in the specific running record, and t1 represents the departure time in the previous running record of the specific running record. as well as The output module is used to output the WPH value obtained by the WPH value calculation module.
8. The machine capacity assessment system as described in claim 7, characterized in that, The process comparison module compares the process names of two adjacent running records in the arrangement of running records to obtain a specific running record, including: Select one of the delivery records from the arrangement of delivery records; Use the grouping translation function to retrieve the process name from the previous running record of the currently selected running record; and Using a conditional judgment function, determine whether the process name in the currently selected running record is the same as the process name in the previous running record. If yes, the currently selected running record is the specific running record; otherwise, the currently selected running record is not the specific running record and corresponds to an invalid WPH value.
9. The machine capacity assessment system as described in claim 7, characterized in that, The WPH value calculation module is further configured to: when at least two WPH values corresponding to the same process name within the specified time period are calculated, calculate the average of the at least two WPH values as the WPH value corresponding to the corresponding process name within the specified time period.
10. The machine capacity assessment system as described in claim 7, characterized in that, Also includes: The data maintenance module is used to set the lower limit and upper limit of WPH corresponding to the process name of the process performed by the specified machine. as well as The data comparison module is used to obtain the WPH value calculated by the WPH value calculation module, and determine whether the WPH value is less than the corresponding lower limit value of WPH and whether it is greater than the corresponding upper limit value of WPH, and obtain the judgment result. The output module outputs information about the judgment result when outputting the WPH value.
11. The machine capacity assessment system as described in any one of claims 7 to 10, characterized in that, The output module obtains the WPH value of one or more of the specified machines corresponding to the process name of the executed process within multiple specified time periods, and outputs it in the form of a report.