Metal microsphere target for X-ray light source and preparation method thereof

Abstract

The invention discloses a metal microsphere target for an X-ray light source and a preparation method of the metal microsphere target, and belongs to the field of X-ray generation. The metal microsphere target comprises a carbon fiber-metal microsphere assembly, and the carbon fiber-metal microsphere assembly comprises a high-purity monodisperse metal microsphere with a high atomic number material; the carbon fiber supporting body is composed of one or more carbon fibers; the carbonization bonding layer is positioned at a contact point of the metal microspheres and the carbon fiber support body and is used for connecting the metal microspheres and the carbon fiber support body in a point shape; the connection mode of the metal microspheres and the carbon fiber support body is as follows: a single metal microsphere is adhered to the surface of a single carbon fiber; or a single metal microsphere is adhered between two parallel carbon fibers; or the metal microspheres are adhered to nodes formed by crossing three or more than three carbon fibers. The metal microsphere target is a suspended metal microsphere target, is easy to prepare, and has the advantages of extremely small effective action point, low background noise, suitability for batch preparation and cost reduction.

Description

Technical Field

[0001] This application belongs to the field of X-ray generation technology, specifically relating to metal microsphere targets for X-ray source and their preparation methods. Background Technology

[0002] High-brightness, small-focal-spot (or micro-focal-spot) X-ray sources refer to light source devices capable of generating high-intensity X-rays, with the effective luminescent area (focal spot) size on the order of micrometers to sub-micrometers. These types of light sources are core components of advanced imaging (such as micro / nano CT, phase-contrast imaging), non-destructive testing, and material structure analysis.

[0003] The focal spot size of the light source directly determines the spatial resolution of the imaging system. To obtain a focal spot at the micrometer or even submicrometer scale, the target material's effective area (i.e., the electron beam bombardment point) must be tiny in size, geometrically precise, and able to withstand bombardment from high-power-density electron beams. Traditional bulk metal targets require a certain volume for heat dissipation, resulting in a large effective effective area and limiting the reduction of focal spot size. Furthermore, fabricating the metal target into a miniature target necessitates the use of a support structure to fix the micro-target. Conventional supports (such as Be windows, SiN films, and metal supports) generate additional background X-rays, reducing the signal-to-noise ratio and image contrast. Moreover, precisely and firmly integrating a micrometer-scale metal target into a macroscopic target holder or beamline involves complex micro / nano fabrication and manual operations, resulting in low yield and poor repeatability.

[0004] Given the stringent requirements placed on target materials by high-brightness, small-focal-spot X-ray sources—namely, small point-of-action size (micrometer-scale), good mechanical stability, strong thermal load capacity, and low parasitic X-ray background generated by the supporting structure—existing technologies employ target materials such as fabricating gold targets on polyimide films or depositing tungsten targets on carbon fibers. These methods largely rely on complex micro / nano fabrication processes (such as photolithography and focused ion beam deposition), resulting in high costs, low fabrication efficiency, and difficulties in mass production. Furthermore, these methods have the following shortcomings in reducing target size and optimizing support: polyimide films may carbonize or deform under high thermal loads; and the precision of controlling the shape and size of tungsten deposition points on carbon fibers needs improvement. Summary of the Invention

[0005] In view of this, the primary objective of this application is to provide a metal microsphere target for an X-ray source, which is a "suspended" metal microsphere target that is easy to prepare and has the advantages of a very small effective point of action, low background noise, suitability for mass production, and cost reduction.

[0006] To achieve the above objectives, this application adopts the following technical solution: One aspect of this application discloses a carbon fiber-metal microsphere assembly, comprising: High-purity monodisperse metal microspheres, wherein the metal microspheres are made of a high atomic number metal; A carbon fiber support, which is composed of one or more carbon fibers; And a carbonized bonding layer, which is located at the contact point between the metal microspheres and the carbon fiber support, for point-to-point connection of the metal microspheres and the carbon fiber support; The connection between the metal microspheres and the carbon fiber support is as follows: a single metal microsphere is adhered to the surface of a single carbon fiber; or a single metal microsphere is adhered between two parallel carbon fibers; or a metal microsphere is adhered at the node formed by the intersection of three or more carbon fibers.

[0007] Another aspect of this application discloses a method for preparing carbon fiber-metal microsphere components as described in this application, comprising the following steps: Preparing the carbon fiber: Pre-fix the carbon fiber between the metal frames and tension it; Dispersion and dispensing: Metal microspheres are dispersed on a dispersion platform, where they exhibit monodispersity and low adhesion to the platform surface; curing adhesive is precisely dispensed onto predetermined locations on the carbon fibers. Metal microsphere adhesion and pre-curing: Before the adhesive droplet is fully cured, the droplet is moved to a single metal microsphere and made into slight contact. The surface tension of the liquid is used to make the metal microsphere self-align and adhere to the carbon fiber. Subsequently, the adhesive is pre-cured at low temperature to form a preliminary mechanical fixation. Carbonization treatment: The carbon fibers with preliminarily fixed metal microspheres are placed in a vacuum or non-reactive atmosphere for carbonization treatment, and a carbonized bonding layer is formed in situ at the contact point between the metal microspheres and the carbon fibers, so that the metal microspheres and carbon fibers are firmly fixed.

[0008] Another aspect of this application discloses a metal microsphere target for an X-ray source, comprising the carbon fiber-metal microsphere assembly described in this application or a carbon fiber-metal microsphere assembly prepared using the methods described in this application.

[0009] The beneficial effects of this application are: This application discloses a carbon fiber-metal microsphere assembly, which, through its unique "suspended" structure, can construct X-rays with high brightness and small focal spot, and produces X-rays with low background interference and high signal-to-noise ratio. Its specific advantages are as follows: Generation of high-brightness, small-focal-spot X-rays: Through a unique "suspended" micro-target structure, the energy of the electron beam can be highly concentrated at a micrometer-level point of action to generate high-brightness, small-focal-spot X-rays. This significantly improves the stability and lifespan of the target material while ensuring the brightness and resolution of the light source.

[0010] Extremely low parasitic background: The metal microspheres are "suspended" on the carbon fiber by a dotted carbonized bonding layer. When the electron beam bombards the metal microspheres, the backscattered electrons and the generated X-rays are rarely interfered with by the bulk substrate material, thus significantly improving the signal-to-noise ratio (X-ray intensity ratio) of the X-ray source.

[0011] Excellent heat dissipation path: The high thermal conductivity of carbon fiber provides an efficient heat dissipation channel for the metal microspheres, which can quickly dissipate the local high heat generated by electron beam bombardment, thereby improving the heat load resistance and service life of the metal microsphere target. Attached Figure Description

[0012] Figure 1 The image shown is a scanning electron microscope image of the dispersed tungsten microsphere array in the example.

[0013] Figure 2 This is an optical microscope photograph of the epoxy resin adhesive attached to the carbon fiber in the embodiment.

[0014] Figure 3 This is a schematic diagram of the fabrication process of the metal microsphere target in the embodiment.

[0015] Figure 4 The image shown is a photograph of the actual metal microsphere target preparation process in the example.

[0016] Figure 5 This is a schematic diagram illustrating the fabrication process of the metal microsphere target carbonization process in the embodiment.

[0017] Figure 6 The image shown is a scanning electron microscope image of the carbonized metal microsphere target in the example.

[0018] Figure 7 This is a schematic diagram of the working process of the metal microsphere target after carbonization in the embodiment.

[0019] Figure 3 , Figure 5 and Figure 7 In the diagram, 1 is a metal microsphere, 2 is a curing adhesive, 2-1 is a carbonized bonding layer, 3 is a carbon fiber, 4 is a metal frame, 5 is a graphite platform, 6 is a three-dimensional sample stage, 7 is a microscope, 8 is a five-dimensional moving platform, 9 is a fixture, 10 is a lead wire, and 11 is a vacuum chamber. Detailed Implementation

[0020] The embodiments of this application will be clearly and completely described below. The technical solutions in the embodiments described below are exemplary and only possible technical implementations of this application, not all possible implementations. Those skilled in the art can combine the embodiments of this application to obtain other embodiments without creative effort, and these embodiments are also within the protection scope of this application.

[0021] The first aspect of this application discloses a carbon fiber-metal microsphere assembly, comprising: High-purity monodisperse metal microspheres, wherein the metal microspheres are made of a high atomic number metal; A carbon fiber support, which is composed of one or more carbon fibers; And a carbonized bonding layer, which is located at the contact point between the metal microspheres and the carbon fiber support, for point-to-point connection of the metal microspheres and the carbon fiber support; The connection between the metal microspheres and the carbon fiber support is as follows: a single metal microsphere is adhered to the surface of a single carbon fiber; or a single metal microsphere is adhered between two parallel carbon fibers; or a metal microsphere is adhered at the node formed by the intersection of three or more carbon fibers.

[0022] In this application, metal microspheres are fixed to carbon fibers through a carbonized adhesive layer. The carbon fibers play a supporting, thermally conductive, and mechanically fixed role, thereby forming a unique "suspended" microtarget structure. This structure can highly concentrate the electron beam energy at a micrometer-level point of action to generate high-brightness, small-focal-spot X-rays. While ensuring the brightness and resolution of the light source, it also significantly improves the stability and lifespan of the target material. More importantly, the backscattered electrons and the generated X-rays are rarely interfered with by the bulk substrate material, thereby significantly improving the signal-to-noise ratio (X-ray intensity ratio) of the X-ray source.

[0023] In this application, the metal microspheres have a purity of 99.9% or higher and exhibit monodispersity. Monodispersity here refers to very small size variation in the metal microspheres, generally with a standard deviation of less than 5% in particle size; they are highly uniform in shape and very similar in size. Furthermore, the high atomic number mentioned in this application refers to an atomic number of 40 or higher. In some specific examples, the high atomic number metal is one of tungsten (W), tantalum (Ta), gold (Au), or platinum (Pt), but is not limited to these.

[0024] In this application, the diameter of the metal microspheres can be appropriately selected according to the purpose of the experiment or the needs of the research, and therefore there is no particular limitation. In some specific examples, the diameter of the metal microspheres is 1-50 μm, for example, it can be any diameter or a range between any two diameters selected from 1 μm, 2 μm, 5 μm, 10 μm, 15 μm, 20 μm, 25 μm, 30 μm, 35 μm, 40 μm, 45 μm, and 50 μm; as a preferred example, the diameter of the metal microspheres is 1-15 μm, for example, it can be any diameter or a range between any two diameters selected from 1 μm, 2 μm, 4 μm, 6 μm, 8 μm, 10 μm, 12 μm, 14 μm, and 15 μm.

[0025] In this application, there are no particular requirements for the diameter of the carbon fiber, which can be appropriately selected according to the diameter of the metal microspheres and the experimental needs of the final product. In some specific examples, the diameter of the carbon fiber is 5-30 μm, for example, it can be any diameter or a range between any two diameters from 5μm, 6μm, 8μm, 10μm, 12μm, 14μm, 16μm, 18μm, 20μm, 22μm, 24μm, 26μm, 28μm, and 30μm.

[0026] In a preferred embodiment of this application, the diameters of the carbon fiber and the metal microspheres preferably satisfy the following ratio: carbon fiber / metal microsphere diameter ratio (D... c / D m The value is 0.2 <D c / D m <5.

[0027] The second aspect of this application discloses a method for preparing carbon fiber-metal microsphere components, comprising the following steps: Preparing the carbon fiber: Pre-fix the carbon fiber to the metal frame and tension it; Dispersion and dispensing: The metal microspheres are dispersed on a dispersion platform, so that the metal microspheres are monodisperse on the surface of the dispersion platform and have low adhesion to the surface of the dispersion platform; the curing adhesive is precisely dispensed onto the predetermined positions of the carbon fiber. Metal microsphere adhesion and pre-curing: Before the adhesive droplet is fully cured, the droplet is moved to a single metal microsphere and made into slight contact. The surface tension of the liquid is used to make the metal microsphere self-align and adhere to the carbon fiber. Subsequently, the adhesive is pre-cured at low temperature to form a preliminary mechanical fixation. Carbonization treatment: The carbon fibers with preliminarily fixed metal microspheres are placed in a vacuum or non-reactive atmosphere for carbonization treatment, and a carbonized bonding layer is formed in situ at the contact point between the metal microspheres and the carbon fibers, so that the metal microspheres and carbon fibers are firmly fixed.

[0028] In this application, the metal frame can be any metal material in the art, but preferably a metal with high thermal conductivity. In some specific examples, the metal frame is made of oxygen-free copper, which has high thermal conductivity and cleanliness under ultra-high vacuum conditions, which can improve the performance of the finally prepared metal microsphere target.

[0029] Furthermore, as a preferred example, the structure of the metal frame is consistent with the target holder of the final metal microsphere target, thereby eliminating the need for the carbon fiber-metal microsphere assembly transfer step and improving the fabrication efficiency and success rate of the metal microsphere target. Specifically, after the carbon fiber-metal microsphere assembly is prepared, it typically needs to be removed from the temporary metal frame, and then the ends of the carbon fibers are connected to the final metal or ceramic target holder through welding or bonding to complete the fabrication of the metal microsphere target. Therefore, setting the structure of the metal frame to be consistent with the target holder eliminates the need for the transfer step.

[0030] In this application, the dispersion platform is not particularly limited or required, and any dispersion platform in the art that is temperature resistant and clean can be used. In some specific examples, the dispersion platform is a graphite platform, but it is not limited to this.

[0031] In this application, the curing adhesive is any one of slow-curing adhesive, thermosetting adhesive, and UV-curing adhesive. It is worth noting that the slow-curing adhesive, thermosetting adhesive, and UV-curing adhesive contain only light elements with an atomic number ≤ 8, thus forming a carbonized adhesive layer after carbonization treatment. As a preferred example, the curing adhesive is epoxy resin.

[0032] Furthermore, it is understandable that the amount of curing adhesive used is extremely small. Generally speaking, it is enough to make the size of the adhesive droplet slightly larger than the diameter of the metal microsphere. When the adhesive droplet comes into slight contact with the metal microsphere, the surface tension of the liquid can be used to achieve self-alignment of the metal microsphere and adhesion to the carbon fiber.

[0033] In this application, low-temperature pre-curing allows the metal microspheres and carbon fibers to form a preliminary fixation, preventing displacement and other problems during subsequent carbonization. It is understood that the low temperature and curing temperature are not particularly limited and can be specifically set depending on the type of curing adhesive chosen. In some specific examples, epoxy resin is used as the curing adhesive. In this case, the low-temperature setting can be set to 80-120℃, for example, any temperature or a range between any two of 80℃, 85℃, 90℃, 95℃, 100℃, 105℃, 110℃, 115℃, and 120℃.

[0034] In this application, the carbonization process is carried out in a vacuum or a non-reactive atmosphere, wherein the non-reactive atmosphere refers to any one of nitrogen or rare gases (such as helium, argon, etc.). The specific carbonization temperature varies depending on the type of curing adhesive, and those skilled in the art can adjust or set it as needed. In some specific examples, the curing adhesive used is epoxy resin, and the carbonization temperature is 600-1200℃, for example, any temperature or a range between any two of 600℃, 650℃, 700℃, 750℃, 800℃, 850℃, 900℃, 950℃, 1000℃, 1050℃, 1100℃, 1150℃, and 1200℃.

[0035] The following changes mainly occur during carbonization: (1) The cured adhesive undergoes pyrolysis and carbonization, and the volatiles are removed, eventually forming a dense carbonized adhesive layer of glassy carbon or disordered layered carbon at the contact point between the metal microspheres and the carbon fibers.

[0036] (2) The properties of carbon fiber itself can remain stable or be enhanced at the carbonization temperature.

[0037] (3) The carbonized bonding layer formed forms a strong chemical bond and mechanical interlock with the carbon fiber and metal microspheres, achieving final firm fixation.

[0038] It should be understood that there are no particular restrictions on the heating method for carbonization. It can be external heating wire heating, external irradiation heating, or heating by directly passing an electric current, as long as the cured adhesive can be carbonized and pyrolyzed to form a carbonized adhesive layer.

[0039] Furthermore, the fabrication process of the carbon fiber-metal microsphere assembly in this application is simple and extremely low-cost. It can be fabricated using conventional micromanipulation platforms or microassembly systems, micro-dispensing devices, and vacuum chambers. It completely avoids expensive semiconductor lithography or FIB equipment, primarily utilizing commercially available raw materials (metal microspheres, carbon fibers, and curing adhesive) and conventional micromanipulation and heat treatment equipment. The process is simple, easy to operate, significantly reduces the cost per target, and has the potential for mass production. Simultaneously, the size of the target point is precisely uniform. This application directly uses commercially available monodisperse metal microspheres, ensuring high uniformity in size and regularity in shape of the X-ray target, which is beneficial for obtaining a stable light source. Moreover, the final microtarget structure is highly flexible. By changing the arrangement of the carbon fibers (single, parallel, intersecting) and the dispensing position, different configurations such as single-point targets and multi-point array targets can be flexibly designed to adapt to different beamlines and experimental requirements.

[0040] The third aspect of this application discloses a metal microsphere target for an X-ray source, containing the carbon fiber-metal microsphere assembly described in this application or a carbon fiber-metal microsphere assembly prepared using the preparation method described in this application.

[0041] The X-ray source metal microsphere target also includes a target holder, which is made of metal or ceramic. Preferably, the metal frame material used in the fabrication of the carbon fiber-metal microsphere assembly is oxygen-free copper to improve thermal conductivity and cleanliness under ultra-high vacuum conditions. As mentioned above, preferably, the metal frame structure is consistent with the target holder structure on the final device, thereby eliminating the need for the carbon fiber-metal microsphere assembly transfer step and improving efficiency and success rate.

[0042] The present application will be further illustrated below with reference to specific embodiments. It should be noted that the specific embodiments below are for illustrative purposes only and do not limit the scope of the present application in any way.

[0043] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein in the specification of this application is for the purpose of describing particular embodiments only and is not intended to be limiting of this application.

[0044] In addition, unless otherwise specified, methods without detailed conditions or steps are conventional methods, and the reagents and materials used are commercially available.

[0045] Example This embodiment provides a metal microsphere target for an X-ray source and its preparation method, using tungsten metal microspheres. The preparation steps of the metal microsphere target in this embodiment are as follows: Step 1: Dispersion of tungsten microspheres. Weigh 1g of tungsten microsphere powder with an average diameter of 4μm, add 100ml of anhydrous ethanol, place in an ultrasonic device, and sonicate at 300W ultrasonic power for 5min to obtain a low-concentration tungsten microsphere suspension for later use.

[0046] Step 2: Using a dropper, a small amount of the above-mentioned low-concentration tungsten microsphere suspension is drawn onto a graphite platform and allowed to air dry naturally. This yields a monodisperse array of metallic tungsten microspheres on the graphite platform, with the dispersion state as shown below. Figure 1 The image is shown in the scanning electron microscope (SEM) image.

[0047] Step 3: Fix both ends of a 15μm diameter carbon fiber to a metal frame made of oxygen-free copper using conductive silver glue, apply slight tension to straighten it, and then fix the metal frame to the five-dimensional moving platform using fasteners.

[0048] Step 4: Using a micro-syringe, apply the curing adhesive—epoxy resin—to the center of the carbon fiber. The actual photo after application is shown below. Figure 2 The optical microscope image is shown.

[0049] Step 5: See Figure 3 As shown in the schematic diagram of the metal microsphere target fabrication process, the carbon fiber 3 and metal frame 4, after being coated with adhesive, are fixed on a five-dimensional moving platform 8. Here, five dimensions include linear motion in X', Y', and Z' and rotation along the Y' axis. χ ), and tilt about the X' axis ( ω A graphite platform 5 carrying monodisperse metal microspheres 1 is fixed on a three-dimensional sample stage 6, where three dimensions include linear motion in the X, Y, and Z axes. With the aid of a microscope 7, the cured adhesive 2 on the carbon fiber 3 is precisely bonded to a specific monodisperse metal microsphere 1 on the graphite platform 5. A photograph of the actual process is shown below. Figure 4 As shown.

[0050] Step 6: Place the carbon fiber 3 bonded to the metal microsphere 1 and the fixed metal frame 4 under a hot air gun at 80~120℃ for 30 minutes for pre-curing.

[0051] Step 7: Place the pre-cured components into the vacuum chamber 11, and use the vacuum electric penetration flange to lead out two leads 10 from the fixed metal frame 4 and connect them to the DC power supply. Figure 5 ).

[0052] Step 8: Evacuate to 1×10 -3 After Pa, the DC power supply for heating is applied at a rate of 1mA / min to 4mA and maintained for 10min to complete the carbonization of the curing adhesive 2 and complete the fabrication of the "carbon fiber-metal tungsten ball" component.

[0053] SEM images after vacuum carbonization, as shown Figure 6 As shown in the SEM images, the tungsten microspheres are fixed to the carbon fiber by a tiny carbonization point, which isolates them from the metal framework and other high atomic number materials, thus achieving effective "suspending".

[0054] In specific work, such as Figure 7 As shown, the metal microspheres 1 are connected to the carbon fiber 3 via a carbonized adhesive layer 2-1, forming a suspended structure. When a high-energy electron beam (electron beam) is applied... - When bombarding the microsphere target, the suspended structural design in this application effectively reduces the interference of the supporting material on the X-rays emitted from the metal microsphere 1. The excellent thermal conductivity of carbon fiber 3 improves the heat dissipation capacity and working life of the target material, and greatly avoids the background interference of the bulk material, significantly improving the signal-to-noise ratio of X-rays.

[0055] Taking the tungsten metal microspheres in the embodiments as an example, the implementation principle of the "suspended" metal microsphere target in this application is explained. A system comparison from the specific physical mechanism to the final performance is shown in Table 1: Table 1 Comparison of core physical characteristics

[0056] Therefore, under the same electron beam bombardment conditions, the total intensity of X-rays produced by a tungsten target is two orders of magnitude higher (approximately 100 times) than that of a carbon target; tungsten has strong characteristic radiation and can produce clear and sharp tungsten characteristic X-ray spectral lines (mainly L-series and K-series lines, such as K...). α1 ≈59.3keV, K α2 ≈57.98 keV, its continuous spectrum (bremsstrahlung) is high and "hard", and the intensity of the bremsstrahlung is related to Z. 2 This is directly proportional to the electron beam energy, hence tungsten has a very strong continuous spectrum background. Its shortest wavelength (corresponding to the maximum photon energy) is determined by the electron beam energy, but the high-energy portion ("hard" X-rays) is abundant, while the characteristic X-ray energy of carbon is very low (C's K0). α The X-ray emission intensity is only about 0.28 keV, belonging to the category of "soft X-rays." It is strongly absorbed in air or when passing through any window, exhibiting almost no characteristic radiation. Furthermore, due to its very small Z-axis, its continuous spectrum (bremsstrahlung) intensity is extremely low and "soft," resulting in a weak overall intensity and poor penetrating power. Therefore, the carbon fiber support and carbonized bonding technology employed in this application offers significant advantages, minimizing interference with the X-ray emission substrate and reducing background noise in the tungsten microsphere target.

[0057] It should be noted that this application is not limited to the above-described embodiments. The above embodiments are merely examples, and any embodiments with the same structure and effect as the technical concept within the scope of this application are included in the technical scope of this application. Furthermore, various modifications that can be conceived by those skilled in the art to the embodiments, and other ways of constructing by combining some of the constituent elements of the embodiments, without departing from the spirit of this application, are also included in the scope of this application.

Claims

1. A carbon fiber-metal microsphere assembly, characterized in that, include: High-purity monodisperse metal microspheres, wherein the metal microspheres are made of a high atomic number metal; A carbon fiber support, which is composed of one or more carbon fibers; And a carbonized bonding layer, which is located at the contact point between the metal microspheres and the carbon fiber support, for point-to-point connection of the metal microspheres and the carbon fiber support; The connection between the metal microspheres and the carbon fiber support is as follows: a single metal microsphere is adhered to the surface of a single carbon fiber; or a single metal microsphere is adhered between two parallel carbon fibers; or a metal microsphere is adhered at the node formed by the intersection of three or more carbon fibers.

2. The carbon fiber-metal microsphere assembly as described in claim 1, characterized in that, The metal microspheres are made of one of the following materials: tungsten, tantalum, gold, or platinum.

3. The carbon fiber-metal microsphere assembly as described in claim 1, characterized in that, The diameter of the metal microspheres is 1-50 μm.

4. The carbon fiber-metal microsphere assembly as described in claim 1, characterized in that, The diameter of the carbon fiber is 5-30 μm.

5. A method for preparing a carbon fiber-metal microsphere assembly as described in any one of claims 1-4, characterized in that, Includes the following steps: Preparing the carbon fiber: Pre-fix the carbon fiber between the metal frames and tension it; Dispersion and dispensing: Metal microspheres are dispersed on a dispersion platform, where they exhibit monodispersity and low adhesion to the platform surface; curing adhesive is precisely dispensed onto predetermined locations on the carbon fibers. Metal microsphere adhesion and pre-curing: Before the adhesive droplet is fully cured, the droplet is moved to a single metal microsphere and made into slight contact. The surface tension of the liquid is used to make the metal microsphere self-align and adhere to the carbon fiber. Subsequently, the adhesive is pre-cured at low temperature to form a preliminary mechanical fixation. Carbonization treatment: The carbon fibers with preliminarily fixed metal microspheres are placed in a vacuum or non-reactive atmosphere for carbonization treatment, and a carbonized bonding layer is formed in situ at the contact point between the metal microspheres and the carbon fibers, so that the metal microspheres and carbon fibers are firmly fixed.

6. The method as described in claim 5, characterized in that, The distributed platform is a graphite platform.

7. The method as described in claim 5, characterized in that, The curing adhesive is one of slow-curing adhesive, thermosetting adhesive, or UV-curing adhesive; wherein the curing adhesive contains only light elements with an atomic number ≤ 8.

8. The method as described in claim 5, characterized in that, The low temperature is 80-120℃.

9. The method as described in claim 5, characterized in that, The non-reactive atmosphere is one of nitrogen or a rare gas; the carbonization temperature is 600-1200℃.

10. A metal microsphere target for X-ray source, characterized in that, The carbon fiber-metal microsphere assembly comprising any one of claims 1-4 or the carbon fiber-metal microsphere assembly prepared by the method of any one of claims 5-9.

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