Preheating device for disassociating gaseous anhydrous hydrogen fluoride

Abstract

The invention relates to the technical field of nuclear chemical engineering, and discloses a preheating device for dissociation of gaseous anhydrous hydrogen fluoride, according to the novel baffle plate type preheating device for dissociation of gaseous anhydrous hydrogen fluoride, airflow is forced to pass at a high speed through a tight lower layer heat exchange area formed by a first transverse baffle plate and a first longitudinal baffle plate, and the temperature is increased preliminarily; a middle-layer heat exchange area formed by a second transverse baffle plate and a second longitudinal baffle plate is used for decelerating airflow and deeply exchanging heat; the wide-distance upper-layer heat preservation area formed by the third transverse baffle plate and the third longitudinal baffle plate greatly reduces the flow speed, and provides a stable thermal environment to achieve complete disassociation. An efficient static labyrinth type flow channel is jointly formed by a gradient type air flow organization of acceleration-flow stabilization-heat preservation from bottom to top in cooperation with reverse arch notches formed in all layers of baffle plates in a staggered mode, longitudinal baffle plates with alternating opening directions, arc-shaped grooves, trapezoid-shaped grooves and other special flow channel structures.

Description

Technical Field

[0001] This invention relates to the field of nuclear chemical technology, specifically to a preheating device for the decomposition of gaseous anhydrous hydrogen fluoride. Background Technology

[0002] Anhydrous hydrogen fluoride is a commonly used feedstock in the nuclear fuel cycle, with extensive applications in uranium conversion and electrolytic fluorine production. Due to intermolecular hydrogen bonding, hydrogen fluoride molecules exhibit association properties, meaning that at room temperature and pressure, hydrogen fluoride does not exist as a single molecule but rather as a relatively complex associated molecule (HF)n, making accurate measurement difficult. However, when the temperature rises to 82°C, gaseous hydrogen fluoride essentially becomes a single molecule. Therefore, anhydrous hydrogen fluoride typically needs to be preheated to deassociate before measurement; the preheating temperature is approximately 160°C.

[0003] In existing technologies, the preheating and decomposition of anhydrous hydrogen fluoride typically employs a preheating tank. An electric heater is installed on the inner wall of the tank for heating, and baffles are used to guide the airflow, thereby extending the heat exchange time and increasing the heat exchange area to improve the decomposition efficiency of gaseous anhydrous hydrogen fluoride. However, in practice, due to the corrosive nature of gaseous anhydrous hydrogen fluoride, the preheating tank generally does not contain power transmission components. This means that the static baffles must handle the entire airflow guidance and diversion process. Existing baffle designs are relatively simple and inefficient in guiding and diverting gaseous anhydrous hydrogen fluoride, thus limiting the decomposition efficiency of the preheating tank for anhydrous hydrogen fluoride.

[0004] The above content is only used to help understand the technical solution of the present invention and does not represent an admission that the above content is the closest prior art. Summary of the Invention

[0005] The purpose of this invention is to provide a preheating device for the decomposition of gaseous anhydrous hydrogen fluoride, thereby solving the problems mentioned in the background art. To achieve the above objective, this invention provides the following technical solution: A preheating device for the decomposition of gaseous anhydrous hydrogen fluoride, comprising a tank, and further comprising: An inlet pipe, which runs through and is fixedly installed on the bottom side of the tank, is used to continuously supply gaseous anhydrous hydrogen fluoride. The outlet pipe runs through and is fixedly installed on the top inner wall of the tank, and is used to output the completely decomposed gaseous anhydrous hydrogen fluoride. The pressure gauge port is installed through and fixedly on the top inner wall of the tank, and is used to insert a pressure gauge with a sealing structure to monitor the pressure value of the cavity inside the tank. The thermometer tube is inserted through and fixedly installed on the top inner wall of the tank, and is used to insert a thermometer with a sealing structure to monitor the temperature value in the cavity inside the tank. An electric heater, in a split-type design, is detachably installed on the inner arc surface of the tank body and is used to directly heat the internal cavity of the tank. The flow guiding unit, located inside the tank, is used to guide and disperse the gaseous anhydrous hydrogen fluoride stream entering the inlet pipe; The deflector guiding unit includes: Multiple sets of first transverse baffles are fixedly installed on the inner wall of the tank in a longitudinal linear array to guide the anhydrous hydrogen fluoride gas flow laterally within the tank. Multiple sets of first longitudinal baffles are fixedly installed between two adjacent sets of first transverse baffles to guide the anhydrous hydrogen fluoride gas flow longitudinally within the tank. The reverse bow groove is located on the outer arc surface of the first transverse baffle and is used to transversely deflect the anhydrous hydrogen fluoride gas flow in the tank. The middle heat exchange assembly is located at the center of the tank and is used to provide a stable heat exchange space for the anhydrous hydrogen fluoride gas flow. The upper heat exchange component is located on the inner wall at the top of the tank and is used to provide an insulated cavity for the anhydrous hydrogen fluoride gas flow to achieve complete desiccation.

[0006] Preferably, the bottom of the tank is provided with multiple sets of casters, and the casters have a locking mechanism.

[0007] Preferably, the middle heat exchange assembly includes: The first heat exchange chamber is located between the first transverse baffle at the highest point of the tank and the inner wall of the bottom of the tank, and is used to perform preliminary heat exchange on the gaseous anhydrous hydrogen fluoride stream that has just been introduced into the tank. Multiple sets of second transverse baffles are evenly distributed in a longitudinal linear array on the inner wall of the tank to provide transverse baffles with different flow velocities above the first heat exchange chamber; The second longitudinal baffle is fixedly installed on the upper surface of the first transverse baffle at the highest point inside the tank, and is used to support multiple sets of second transverse baffles and isolation space; The second heat exchange chamber is located between the second transverse baffle at the highest point of the tank and the first transverse baffle at the highest point, and is used to decelerate the gaseous anhydrous hydrogen fluoride gas stream that has undergone preliminary heat exchange.

[0008] Preferably, the upper heat exchange assembly includes: Multiple sets of third transverse baffles are evenly distributed in a longitudinal linear array on the inner wall of the tank to provide further gaseous anhydrous hydrogen fluoride flow guidance above the second heat exchange chamber; The third longitudinal baffle is fixedly installed between the second and third transverse baffles at the highest point inside the tank, and is used to support multiple sets of third transverse baffles and isolation space; The third heat exchange chamber is located between the inner wall at the top of the tank and the third transverse baffle at the lowest point inside the tank. It is used to provide heat exchange and complete disintegration space for gaseous anhydrous hydrogen fluoride.

[0009] Preferably, the gaps between the multiple sets of first transverse baffles and the gaps between the multiple sets of second transverse baffles and the multiple sets of third transverse baffles are arranged in a gradually increasing manner.

[0010] Preferably, the reverse bow slots on the outer arc surfaces of two adjacent sets of the first transverse baffles are staggered on the left and right sides with the center of the tank as the axis of symmetry, and the reverse bow slots of multiple sets of second transverse baffles and multiple sets of third transverse baffles are staggered in the same way.

[0011] Preferably, the first longitudinal baffle, the second longitudinal baffle, and the third longitudinal baffle are all configured such that one end has an opening between it and the inner wall of the tank, and the other end is close to the inner wall of the tank.

[0012] Preferably, there are multiple sets of the first longitudinal baffle, the second longitudinal baffle, and the third longitudinal baffle, and the multiple sets of the first longitudinal baffle, the second longitudinal baffle, and the third longitudinal baffle are arranged in a linear array in the vertical direction, with the opening directions of adjacent plates being opposite.

[0013] Preferably, the inner wall of the first transverse baffle plate away from the anti-bow groove is provided with an arc-shaped groove, and the edges of the arc-shaped groove are all rounded. The inner wall of the second and third transverse baffle plates away from the anti-bow groove is provided with trapezoidal grooves. The trapezoidal grooves are configured as isosceles trapezoids that are narrower at the top and wider at the bottom, and the edges of the trapezoidal grooves are rounded.

[0014] Preferably, the surface of the anti-bow groove near the center of the tank is provided with multiple sets of guide fins in a linear array. The guide fins are C-shaped with their openings facing the center of the tank, and the edges of the guide fins are all rounded.

[0015] Compared with the prior art, the beneficial effects of the present invention are: This invention utilizes a compact lower heat exchange zone formed by a first transverse baffle and a first longitudinal baffle to force the airflow through at high speed and initially raise its temperature. A middle heat exchange zone formed by a second transverse baffle and a second longitudinal baffle decelerates the airflow and allows for deep heat exchange. A wide-spaced upper insulation zone formed by a third transverse baffle and a third longitudinal baffle significantly reduces the flow velocity, providing a stable thermal environment for complete desiccation. This bottom-up acceleration-stabilization-insulation gradient airflow organization, combined with staggered anti-bow slots on each baffle layer, alternating opening directions of the longitudinal baffles, and special flow channel structures such as arc-shaped and trapezoidal slots, forms a highly efficient static labyrinthine flow channel. This extends the airflow path, enhances turbulent mixing, and homogenizes the temperature field, increasing the residence time of gaseous anhydrous hydrogen fluoride within the tank and fully utilizing the heat exchange area. Thus, without the need for rotating components, it achieves significantly higher efficiency in guiding, diverting, and exchanging heat than traditional simple baffle structures.

[0016] This invention also features rounded corners on all the slots and edges of the guide fins on the baffles, which not only reduces flow resistance but also eliminates sharp edges, effectively avoiding the risk of stress corrosion cracking. This also results in a smooth surface that is less prone to liquid accumulation, reducing the adhesion and buildup of corrosive condensate droplets. The guide fins employ a C-shaped design with the opening facing the center, which enhances heat transfer while also guiding airflow and preventing localized stagnation. This enhances the durability of the entire internal system in harsh corrosive environments, ensuring the preheating device can operate long-term, stably, and safely.

[0017] This invention also features casters with locking mechanisms at the bottom of the tank, providing excellent mobility and allowing for flexible adjustment of workstations within the production workshop according to process requirements. This improves the adaptability and efficiency of equipment layout, while ensuring stability and safety during operation when locked. Furthermore, by optimizing the gradient setting of the baffle gap and the flow channel shape, heat exchange efficiency is improved while also reducing unnecessary flow pressure drop, thus helping to reduce system energy consumption. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the overall structure of the present invention; Figure 2 This is a schematic cross-sectional view of the tank body of the present invention; Figure 3 This is a schematic diagram of the middle heat exchange component and the upper heat exchange component of the present invention; Figure 4 This is a schematic diagram of the first transverse baffle structure of the present invention; Figure 5 This is a schematic diagram of the second transverse baffle structure of the present invention.

[0019] Figure Descriptions: 1-Tank body; 2-Cast wheel; 3-Inlet pipe; 4-Outlet pipe; 5-Pressure gauge port; 6-Thermometer port; 7-Electric heater; 8-Baffle guiding unit; 81-First transverse baffle; 82-First longitudinal baffle; 83-Reverse bow groove; 84-Middle heat exchange assembly; 841-First heat exchange chamber; 842-Second longitudinal baffle; 843-Second transverse baffle; 844-Second heat exchange chamber; 85-Upper heat exchange assembly; 851-Third longitudinal baffle; 852-Third transverse baffle; 853-Third heat exchange chamber; 86-Arc-shaped groove; 87-Guide fins; 88-Trapezoidal groove. Detailed Implementation

[0020] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0021] Please see Figure 1-5 The present invention provides a technical solution: a preheating device for the decomposition of gaseous anhydrous hydrogen fluoride, comprising a tank 1, and further comprising: The inlet pipe 3 is installed through and fixedly on the bottom side of the tank 1 for continuously supplying gaseous anhydrous hydrogen fluoride. The gas outlet pipe 4 is installed through and fixedly on the top inner wall of the tank 1, and is used to output the completely decomposed gaseous anhydrous hydrogen fluoride. The pressure gauge port 5 is installed through and fixedly on the top inner wall of the tank 1, and is used to insert a pressure gauge with a sealing structure to monitor the pressure value of the cavity inside the tank 1. The thermometer port 6 penetrates and is fixedly installed on the top inner wall of the tank 1, and is used to insert a thermometer with a sealing structure to monitor the temperature value in the cavity inside the tank 1. The electric heater 7 is a split type that can be detachably installed on the inner arc surface of the tank body 1, and is used to directly heat the cavity inside the tank body 1; The flow guiding unit 8 is located inside the tank 1 and is used to guide and disperse the gaseous anhydrous hydrogen fluoride gas flow input into the inlet pipe 3. The flow guiding unit 8 includes: Multiple sets of first transverse baffles 81 are fixedly installed on the inner wall of the tank 1 in a longitudinal linear array to guide the anhydrous hydrogen fluoride gas flow in the tank 1 laterally. Multiple sets of first longitudinal baffles 82 are fixedly installed between two adjacent sets of first transverse baffles 81 to guide the anhydrous hydrogen fluoride gas flow in the tank 1 longitudinally. The reverse bow slot 83 is opened at the outer arc surface of the first transverse baffle 81 and is used to transversely baffle the anhydrous hydrogen fluoride gas flow in the tank 1. The middle heat exchange component 84 is located at the center of the tank 1 and is used to provide a stable heat exchange space for the anhydrous hydrogen fluoride gas flow. The upper heat exchange component 85 is located on the inner wall of the top of the tank 1 and is used to provide an insulated cavity for the anhydrous hydrogen fluoride gas flow to achieve complete desiccation.

[0022] By setting up an airflow path from bottom to top through the inlet pipe 3 and outlet pipe 4, and cooperating with the pressure gauge port 5 and thermometer port 6 for real-time monitoring, the deactivation process can be accurately controlled. The electric heater 7 adopts a split, detachable design, which facilitates maintenance and replacement and improves the long-term operational reliability of the device. The flow guiding unit 8, through the cooperation of the first transverse baffle 81, the first longitudinal baffle 82, and the anti-bow groove 83, realizes multiple transverse and longitudinal deactivation of the airflow, effectively extending the residence time of the airflow in the tank, increasing the heat exchange area, and significantly improving the initial heat exchange efficiency, laying a good foundation for subsequent complete deactivation. The partitioned design of the middle heat exchange component 84 and the upper heat exchange component 85 realizes a gradient transition of the airflow from high-speed heat exchange to low-speed heat preservation, ensuring that the gaseous anhydrous hydrogen fluoride can be fully and uniformly heated, ultimately achieving a complete deactivation state, effectively solving the problems of poor guiding effect and low deactivation efficiency of existing simple baffles.

[0023] The bottom of the tank body 1 is equipped with multiple sets of casters 2, and the casters 2 have a locking mechanism.

[0024] By incorporating casters 2 with locking mechanisms, the entire preheating unit gains mobility, facilitating transfer and positioning between different workstations. The locking mechanism ensures the stability of the unit during operation, preventing accidental movement, thus improving both the convenience of equipment layout and the safety and reliability of operation.

[0025] The middle heat exchange assembly 84 includes: The first heat exchange chamber 841 is located between the first transverse baffle 81 at the highest point inside the tank 1 and the inner wall of the bottom of the tank 1, and is used to perform preliminary heat exchange on the gaseous anhydrous hydrogen fluoride gas stream that has just been introduced into the tank 1. Multiple sets of second transverse baffles 843 are evenly distributed in a longitudinal linear array on the inner wall of the tank 1 to provide transverse baffles with different flow rates above the first heat exchange chamber 841. The second longitudinal baffle 842 is fixedly installed on the upper surface of the first transverse baffle 81 at the highest point inside the tank 1, and is used to support multiple sets of second transverse baffles 843 and isolation space. The second heat exchange chamber 844 is located between the second transverse baffle 843 and the first transverse baffle 81 at the highest point inside the tank 1, and is used to decelerate the gaseous anhydrous hydrogen fluoride gas stream that has undergone preliminary heat exchange.

[0026] The first heat exchange chamber 841 provides initial and rapid heating to the incoming low-temperature airflow. A middle-layer baffle structure, formed by the second transverse baffle 843 and the second longitudinal baffle 842, further divides and guides the airflow in the region after initial heat exchange. The second heat exchange chamber 844 reduces the airflow velocity, promoting temperature equalization and deeper heat exchange. This avoids insufficient heat exchange due to excessively high airflow velocity, achieving a smooth transition and optimized efficiency in the heat exchange process.

[0027] The upper heat exchange assembly 85 includes: Multiple sets of third transverse baffles 852 are evenly distributed in a longitudinal linear array on the inner wall of the tank 1 to provide further gaseous anhydrous hydrogen fluoride flow guidance above the second heat exchange chamber 844. The third longitudinal baffle 851 is fixedly installed between the second transverse baffle 843 and the third transverse baffle 852 at the highest point inside the tank 1, and is used to support multiple sets of third transverse baffles 852 and the isolation space. The third heat exchange chamber 853 is located between the top inner wall of the tank 1 and the third transverse baffle 852 at the lowest point inside the tank 1, and is used to provide heat exchange and complete disintegration space for gaseous anhydrous hydrogen fluoride.

[0028] By setting up a third transverse baffle 852 and a third longitudinal baffle 851, an upper low-velocity baffle region is constructed, which, together with the third heat exchange chamber 853, forms a heat-insulating buffer space. This further reduces the velocity of the already heated gas flow here, effectively reducing heat loss caused by airflow disturbance. It provides sufficient time and a stable thermal environment for the gaseous anhydrous hydrogen fluoride to achieve complete dissociation, ensuring that the monomolecularization of the output gas meets the metering and usage requirements of subsequent processes.

[0029] The gaps between the multiple sets of first transverse baffles 81 and the gaps between the multiple sets of second transverse baffles 843 and the multiple sets of third transverse baffles 852 are arranged in a gradually increasing manner.

[0030] By designing a stepped gap—smaller gaps in the lower first transverse baffle 81, followed by the middle layer, and largest gaps in the upper layer—gradient control is achieved, gradually reducing airflow velocity from bottom to top. The smaller gaps in the lower layer facilitate rapid and thorough heat exchange between the low-temperature airflow and the hot wall surface; the medium gaps in the middle layer stabilize the airflow and promote deep heat exchange; and the larger gaps in the upper layer effectively reduce velocity and provide insulation. This optimizes the airflow dynamics distribution and heat transfer process, improving overall de-lamination efficiency and energy economy.

[0031] The reverse bow slots 83 on the outer arc surfaces of two adjacent sets of first transverse baffles 81 are staggered on the left and right sides with the center of the tank 1 as the axis of symmetry, and the reverse bow slots 83 of multiple sets of second transverse baffles 843 and multiple sets of third transverse baffles 852 are staggered in the same way.

[0032] By symmetrically arranging the counter-bow slots 83 of each layer of baffles in a staggered manner, the airflow is forced to continuously change its lateral flow direction during vertical flow, forming a complex flow channel in a zigzag or spiral shape. This extends the actual flow path of the airflow, strengthens the contact and disturbance between the airflow and the baffles and hot walls, effectively disrupts the flow boundary layer, and improves the convective heat transfer coefficient, thereby enhancing the heat transfer intensity and disintegration uniformity.

[0033] The first longitudinal baffle 82, the second longitudinal baffle 842 and the third longitudinal baffle 851 are all configured such that one end has an opening between it and the inner wall of the tank 1 and the other end is close to the inner wall of the tank 1.

[0034] By designing each layer of longitudinal baffles as a structure with one end open and the other closed, the airflow is forced to either enter or exit from the open end when passing through each chamber enclosed by the transverse and longitudinal baffles. This precisely guides the longitudinal flow path of the airflow, preventing short-circuiting or the formation of ineffective vortex zones, ensuring that all space within the tank is effectively utilized, resulting in more uniform airflow distribution and a more thorough and controllable heat exchange process.

[0035] The number of the first longitudinal baffle 82, the second longitudinal baffle 842 and the third longitudinal baffle 851 are all provided in multiple sets, and the multiple sets of the first longitudinal baffle 82, the second longitudinal baffle 842 and the third longitudinal baffle 851 are arranged in a linear array in the vertical direction, with the opening directions of adjacent plates being opposite.

[0036] By setting multiple sets of longitudinal baffles and distributing them linearly in the vertical direction, with adjacent baffles having opposite opening directions, a labyrinthine three-dimensional flow channel is formed. The airflow needs to repeatedly change its longitudinal flow direction during its ascent, further increasing the flow path length and turbulence, promoting gas mixing and heat exchange, effectively preventing temperature stratification, and ensuring uniform temperature distribution across the cross-section of tank 1, thereby improving the consistency and stability of the overall decontamination effect.

[0037] The inner wall of the first transverse baffle 81 away from the anti-bow slot 83 has an arc-shaped slot 86, and the edges of the arc-shaped slot 86 are all rounded. The inner wall of the second transverse baffle 843 and the third transverse baffle 852 away from the anti-bow slot 83 has a trapezoidal slot 88, which is set in the shape of an isosceles trapezoid that is narrow at the top and wide at the bottom, and the edges of the trapezoidal slot 88 are rounded.

[0038] By incorporating a smoothly rounded arc-shaped groove 86 on the lower first transverse baffle 81, the arc surface conforms to the fluid flow trajectory, reducing local pressure drop and preventing the formation of eddy dead zones. Simultaneously, the smooth surface reduces the risk of liquid accumulation and corrosion. The upper and middle baffles feature trapezoidal grooves 88, narrower at the top and wider at the bottom with rounded edges, which guide the fluid in a contraction-expansion flow, effectively enhancing turbulence intensity and further improving heat transfer efficiency. The rounded corner design also avoids stress concentration and corrosion at sharp edges, resulting in a more durable structure and high long-term operational reliability.

[0039] The surface of the reverse bow groove 83 near the center of the tank body 1 is provided with multiple sets of guide fins 87 in a linear array. The guide fins 87 are C-shaped with their openings facing the center of the tank body 1, and the edges of the guide fins 87 are all rounded.

[0040] By adding linearly arrayed C-shaped guide fins 87 at the anti-bow slot 83, these fins can finely divide and guide the airflow passing through the slot, generating multiple fine, rotating micro-airflows, increasing the turbulence and disturbance of the airflow. The design of the C-shaped opening facing the center of the tank 1 helps guide the airflow to converge and mix fully in the central area, further enhancing heat transfer. All edges are rounded, which not only reduces flow resistance but, more importantly, eliminates the risk of corrosion, ensuring that the unit can operate stably and efficiently for a long time in a highly corrosive gaseous anhydrous hydrogen fluoride environment.

[0041] Working principle: At room temperature, gaseous anhydrous hydrogen fluoride enters the preheating device tank 1 through the inlet pipe 3 at the bottom of the tank 1. Since the outlet pipe 4 is located at the top, a natural airflow path is formed from bottom to top. The electric heater 7 is activated to uniformly heat the inner wall of the tank 1 and its internal cavity.

[0042] The airflow first enters the lower heat exchange zone, which is composed of multiple sets of first transverse baffles 81 and first longitudinal baffles 82. In this zone, the gaps between the first transverse baffles 81 are small, forcing the airflow to pass through at a higher velocity and allowing for sufficient and rapid contact and heat exchange with the inner wall of the tank 1 heated by the electric heater 7 and the surface of the baffles, achieving initial rapid heating of the airflow. When the airflow passes through the anti-bow slots 83 on the first transverse baffles 81, it is laterally deflected and its flow direction is changed. Simultaneously, the guide fins 87 on the inner side of the anti-bow slots 83 further divide and rotate the airflow, enhancing turbulence and improving heat exchange efficiency.

[0043] The initially heated airflow continues to rise, entering the middle heat exchange region composed of the second longitudinal baffle 842 and multiple sets of second transverse baffles 843. In this region, the spacing between the second transverse baffles 843 is larger than in the lower layer, resulting in a relatively slower airflow velocity and a more stable deep heat exchange stage. The second heat exchange cavity 844 provides a space for airflow expansion and deceleration, which is beneficial for achieving a more even temperature distribution and further heat absorption. Within this region, the airflow continues to be guided by staggered counter-bow slots 83, forming a complex flow path to ensure full contact with the heat exchange surface.

[0044] Subsequently, the airflow enters the upper heat exchange region composed of the third longitudinal baffle 851 and multiple sets of third transverse baffles 852. The spacing between the third transverse baffles 852 is largest in this region, causing the airflow velocity to drop to its lowest point. The third heat exchange chamber 853 forms a good heat-insulating buffer space. This low flow velocity greatly reduces heat loss caused by airflow disturbance, allowing the airflow to remain in the high-temperature region near the top of the tank 1 for a longer period, obtaining a sufficient and stable thermal environment. This ensures that gaseous anhydrous hydrogen fluoride molecules are completely disintegrated and transformed into single-molecule forms.

[0045] Throughout the flow heat exchange process, the arc-shaped groove 86 on the lower first transverse baffle 81 conforms to the streamline with its smooth arc surface, reducing flow resistance and avoiding the formation of vortex dead zones. The trapezoidal grooves 88 on the middle and upper second transverse baffle 843 and third transverse baffle 852 guide the airflow in a contraction-expansion flow, continuously generating turbulence and enhancing heat transfer. The rounded corners on all baffles and the rounded corner design of the guide fins 87 effectively avoid stress concentration and the accumulation of corrosive droplets, ensuring the long-term operational reliability of the device in highly corrosive media. Finally, the completely decomposed monomolecular gaseous anhydrous hydrogen fluoride is stably output from the top outlet pipe 4 for use in subsequent processes. The internal pressure and temperature can be monitored in real time through the pressure gauge port 5 and the thermometer port 6, achieving precise process control.

Claims

1. A preheating device for dissociation of gaseous anhydrous hydrogen fluoride, comprising a tank body (1), characterized in that: Also include: Air inlet pipe (3), through and fixedly installed in the side of the tank (1) bottom, for continuous input of gaseous anhydrous hydrogen fluoride; Gas outlet pipe (4), through and fixedly installed in the top of the tank (1) inner wall, for output of completely dissociated gaseous anhydrous hydrogen fluoride; Pressure gauge port (5), through and fixedly installed on the top of the tank (1) inner wall, for inserting a pressure gauge with sealing structure, monitoring the pressure value of the cavity in the tank (1); Temperature gauge port (6), through and fixedly installed on the top of the tank (1) inner wall, for inserting a thermometer with sealing structure, monitoring the temperature value in the cavity of the tank (1); Electric heater (7), detachably installed on the inner arc surface of the tank (1), for direct heating of the cavity in the tank (1); Baffle guide unit (8) is arranged in the tank (1), for guiding and dispersing the gaseous anhydrous hydrogen fluoride gas flow input in the air inlet pipe (3); Wherein, the baffle guide unit (8) comprises: A plurality of first transverse baffles (81) are fixedly installed on the inner wall of the tank (1) in longitudinal linear array, for transverse guiding of the anhydrous hydrogen fluoride gas flow in the tank (1); A plurality of first longitudinal baffles (82) are respectively fixedly installed between adjacent two groups of first transverse baffles (81), for longitudinal guiding of the anhydrous hydrogen fluoride gas flow in the tank (1); Reverse arch notch (83) is arranged on the outer arc surface of the first transverse baffle (81), for transverse baffle of the anhydrous hydrogen fluoride gas flow in the tank (1); The middle layer heat exchange assembly (84) is arranged at the center of the tank (1), for providing stable heat exchange space for the anhydrous hydrogen fluoride gas flow; The upper layer heat exchange assembly (85) is arranged at the top end inner wall of the tank (1), for providing heat preservation cavity to realize complete dissociation of the anhydrous hydrogen fluoride gas flow.

2. A preheating device for dissociation of gaseous anhydrous hydrogen fluoride according to claim 1, characterized in that: The bottom of the tank (1) is provided with a plurality of casters (2), and the caster (2) has a locking mechanism.

3. A preheating device for dissociation of gaseous anhydrous hydrogen fluoride according to claim 2, characterized in that: The middle layer heat exchange assembly (84) comprises: First heat exchange cavity (841) is arranged between the highest first transverse baffle (81) in the tank (1) and the bottom inner wall of the tank (1), for preliminary heat exchange of the gaseous anhydrous hydrogen fluoride gas flow just input into the tank (1); A plurality of second transverse baffles (843) are evenly distributed on the inner wall of the tank (1) in longitudinal linear array, for providing different flow rate transverse baffle guide above the first heat exchange cavity (841); Second longitudinal baffle (842) is fixedly installed on the upper surface of the highest first transverse baffle (81) in the tank (1), for supporting a plurality of second transverse baffles (843) and isolating space; Second heat exchange cavity (844) is arranged between the highest second transverse baffle (843) and the highest first transverse baffle (81) in the tank (1), for deceleration of the gaseous anhydrous hydrogen fluoride gas flow after preliminary heat exchange.

4. A preheating device for dissociation of gaseous anhydrous hydrogen fluoride according to claim 3, characterized in that: The upper layer heat exchange assembly (85) comprises: A plurality of third transverse baffle plates (852) are uniformly distributed in longitudinal linear arrays on the inner wall of the tank body (1) to provide further gaseous anhydrous hydrogen fluoride flow guidance above the second heat exchange cavity (844); A third longitudinal baffle plate (851) is fixedly installed between the second transverse baffle plate (843) at the highest position in the tank body (1) and the third transverse baffle plate (852) to support the plurality of third transverse baffle plates (852) and isolate the space; A third heat exchange cavity (853) is arranged between the inner wall at the top of the tank body (1) and the third transverse baffle plate (852) at the lowest position in the tank body (1) to provide heat preservation and exchange and complete dissociation space for gaseous anhydrous hydrogen fluoride.

5. A preheating device for dissociation of gaseous anhydrous hydrogen fluoride according to claim 4, characterized in that: The gaps between the plurality of first transverse baffle plates (81), the plurality of second transverse baffle plates (843), and the plurality of third transverse baffle plates (852) are arranged in a stepwise increasing manner.

6. A preheating device for dissociation of gaseous anhydrous hydrogen fluoride according to claim 5, characterized in that: The reverse bow notches (83) formed on the outer arc surfaces of adjacent two groups of first transverse baffle plates (81) are arranged in a staggered manner on the left and right sides of the center of the tank body (1), and the reverse bow notches (83) of the plurality of second transverse baffle plates (843) and the plurality of third transverse baffle plates (852) are arranged in the same staggered manner.

7. A preheating device for dissociation of gaseous anhydrous hydrogen fluoride according to claim 6, characterized in that: The first longitudinal baffle plate (82), the second longitudinal baffle plate (842), and the third longitudinal baffle plate (851) are arranged in a manner that one end is provided with an opening between the inner wall of the tank body (1) and the other end is tightly attached to the inner wall of the tank body (1).

8. A preheating device for dissociation of gaseous anhydrous hydrogen fluoride according to claim 7, characterized in that: The first longitudinal baffle plate (82), the second longitudinal baffle plate (842), and the third longitudinal baffle plate (851) are arranged in a linear array in the vertical direction, and the openings of adjacent plates are arranged in opposite directions.

9. A preheating device for dissociation of gaseous anhydrous hydrogen fluoride according to claim 8, characterized in that: The first transverse baffle plate (81) is provided with an arc-shaped groove (86) on the inner wall away from the reverse bow notch (83), and the edges of the arc-shaped groove (86) are rounded. The second transverse baffle plate (843) and the third transverse baffle plate (852) are provided with a trapezoidal groove (88) on the inner wall away from the reverse bow notch (83), the trapezoidal groove (88) is arranged in an isosceles trapezoidal shape with the upper part being narrow and the lower part being wide, and the edges of the trapezoidal groove (88) are rounded.

10. A preheating device for dissociation of gaseous anhydrous hydrogen fluoride according to claim 9, characterized in that: The surface of the reverse bow notch (83) on the side close to the center of the tank body (1) is provided with a plurality of flow guide fins (87) arranged in a linear array, the flow guide fins (87) are in the shape of C with the opening facing the side of the center of the tank body (1), and the edges of the flow guide fins (87) are rounded.

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