Adjustable capacitor calibration method and calibration device
By using a piecewise curve fitting model and an intelligent calibration board, the accuracy problem caused by wear in traditional adjustable capacitors is solved, achieving high-precision error compensation and equipment consistency, and reducing system failure risk and maintenance costs.
Patent Information
- Application Number
- CN202511721287.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-11-21
- Publication Date
- 2026-03-06
Smart Images

Figure CN121613375A_ABST
Abstract
Description
Technical Field
[0001] This invention belongs to the field of capacitor control technology, specifically relating to an adjustable capacitor calibration method and calibration device. Background Technology
[0002] An adjustable capacitor is a type of capacitor whose capacitance can be dynamically adjusted mechanically or electronically. Its core characteristic is that by changing parameters such as plate area, plate spacing, or dielectric constant, the capacitance can be continuously or incrementally varied within a specific range. It is mainly used in circuits where flexible capacitance values need to be adjusted to optimize performance, and is a key component for achieving dynamic circuit parameter control.
[0003] One of the main functions of an adjustable capacitor is to achieve impedance matching between the characteristic impedance of the RF power supply and the load impedance by adjusting the capacitance value. A stepper motor is used as the actuator, and the capacitor position command is received through the communication interface to drive the capacitor to adjust to the specified position, thereby completing the impedance matching.
[0004] However, in traditional capacitor regulation control, there is a fixed relationship between the physical position of the capacitor and its capacitance value. Once this positional relationship changes due to component replacement, mechanical wear, or other reasons, even micron-level wear or offset on any mechanical transmission component will be converted into capacitor regulation error, causing the control regulation accuracy to be unsustainable. Summary of the Invention
[0005] To address the shortcomings of existing technologies, an adjustable capacitor calibration method and device are provided to solve the problem that the accuracy cannot be maintained due to the inability to effectively compensate for errors such as capacitor mechanical wear.
[0006] On the one hand, the technical solution of the present invention to solve the above-mentioned technical problems is as follows: an adjustable capacitance calibration method, which includes the following steps: S1. Divide the total travel of the capacitor into several intervals, power on and control the capacitor to rotate to point 0. S2. Measure the capacitance value at the current point; S3. Compare the input capacitance value with the target capacitance table to calculate the deviation value; S4. Determine whether the deviation value is less than the target error value. If yes, proceed to step S6; otherwise, proceed to step S5. S5. Calculate the capacitor output value by combining the deviation value with the target capacitor value, and then send the adjusted capacitor output value back into step S3. S6. Write the current capacitor output value into the memory for temporary storage; S7. Determine if the current number of points is the maximum number of points in the interval. If not, increment the number of points in the interval and re-enter step S2. If yes, save all capacitor output values to the output sequence.
[0007] In one embodiment, the formula for calculating the capacitor output value in the process of adjusting and calculating the capacitor output value using the deviation value combined with the target capacitor value is as follows: ; in, Y pos This is the capacitor output value. X pos For the target capacitance value, C min C is the minimum capacitance. max This is the maximum value of the capacitance. For the first point One deviation value, point denoted as the number of points, and m as the number of intervals to be divided.
[0008] In one embodiment, the value of the number of points is calculated using the following formula: .
[0009] In one embodiment, before determining whether the deviation value is less than the target error value, the method further includes: controlling the capacitor to rotate away from the current interval point, and then controlling the capacitor to rotate back to the point position.
[0010] In one embodiment, the method further includes step S8: sequentially sending the capacitor output value corresponding to each point in the capacitor output value sequence to step S3, and marking the capacitor output sequence as a parameter group.
[0011] This invention also discloses a calibration device for implementing the above-described calibration method; The calibration device includes a first communication connection module, a control chip, and a second communication connection module connected in sequence. The first communication module is used to communicate with the control chip and a host computer, and the second communication module is used to connect the control chip and a capacitor adjustment system.
[0012] In one embodiment, the capacitor adjustment system includes: a control board, a motor, and an adjustable capacitor connected in sequence, wherein the control board is communicatively connected to the second communication connection module.
[0013] One or more technical solutions provided in the embodiments of this application have at least the following technical effects or advantages: 1. By introducing an independent intelligent calibration board, the traditional rigid "command-position" control system is upgraded to a flexible intelligent system of "target-model-command", realizing the definition and compensation of non-ideal characteristics of hardware by software.
[0014] 2. By adopting a high-precision piecewise curve fitting model to replace the traditional linear or single-point offset compensation, complex nonlinear errors can be compensated more accurately, raising the control precision to a new level.
[0015] 3. Improve system robustness and reduce lifecycle costs. This solution significantly reduces the risk of system failure due to performance drift of a single component, greatly reduces maintenance time and costs, and ensures high consistency of performance between different devices and the same device at different lifecycles. Attached Figure Description
[0016] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.
[0017] Figure 1 This is a schematic diagram of the process of the present invention.
[0018] Figure 2 This is a schematic diagram of the device in Embodiment 2 of the present invention.
[0019] Figure 3 This is a schematic diagram of the communication connection of the device in Embodiment 2 of the present invention. Detailed Implementation
[0020] The embodiments of the technical solution of the present invention will now be described in detail with reference to the accompanying drawings. These embodiments are merely illustrative of the technical solution of the present invention and are therefore intended to limit the scope of protection of the present invention. It should be noted that, unless otherwise stated, the technical or scientific terms used in this application should have the ordinary meaning as understood by one of ordinary skill in the art to which this invention pertains.
[0021] In the description of this application, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting the present invention.
[0022] Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. In the description of this invention, "a plurality of" means two or more, unless otherwise explicitly defined.
[0023] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.
[0024] Example 1 like Figure 1 As shown, the adjustable capacitance calibration method provided by the present invention includes the following steps: S1. Divide the total travel of the capacitor into several interval points. The number of interval points can be determined according to the range of the adjustable capacitor. In this embodiment, the number of points is divided into 20, starting from point 0 and continuing to point 19. After dividing the interval points, first power on and control the capacitor to rotate to point 0, and then start adjusting from point 0.
[0025] S2. Measure the capacitance value of the current point. Specifically, the actual capacitance value of the current point is obtained by measuring the capacitance value of the 0th point. The specific measurement can be performed using a bridge measuring instrument.
[0026] S3. Compare the input capacitance value with the target capacitance table to calculate the deviation value. The target capacitance table consists of the target capacitance values required at different points. By comparing the target capacitance value with the actual capacitance value one by one, determine the capacitance deviation value at the current point 0 and determine whether there is a deviation.
[0027] S4. Determine whether the deviation value is less than the target error value, where the target error value is the deviation between the target capacitance value and the actual measured value at that point within an acceptable range. In this embodiment, the target error value is 0.1pF. When the deviation value is less than 0.1pF, proceed to step S6. At this time, it is determined that the error value at that point is within a suitable range, indicating that the debugging of point 0 is complete. If not, that is, when the deviation value is greater than 0.1pF, proceed to step S5 for debugging.
[0028] S5. Calculate the capacitor output value by combining the deviation value with the target capacitor value, and then send the adjusted capacitor output value back into step S3. Specifically, the formula for calculating the capacitor output value in the process of adjusting and calculating the capacitor output value using the deviation value combined with the target capacitor value is as follows: ; in, Y pos This is the capacitor output value. Xpos For the target capacitance value, C min C is the minimum capacitance. max The value represents the maximum capacitance. Taking this embodiment as an example, the adjustable range of the capacitance is 25-250pF, so the minimum capacitance is 25pF and the maximum capacitance is 250pF. For the first point One deviation value, This is a sequence of deviation values for all 20 points from point 0 to point 19. point Where m is the number of points and m is the number of intervals to be divided. In this embodiment, 20 points are divided, so m is 20.
[0029] To determine the current position value based on the measured capacitance value, the number of positions is calculated using the following formula: This formula is a rounding formula. For example, if the measured capacitance value is 26, the calculated value is 0.08, which is rounded to 0, indicating the 0th point. If the measured capacitance value is 246, the calculated value is 19.64, which is rounded to 19, indicating the 19th point.
[0030] To achieve the output value of the capacitor, before determining whether the deviation value is less than the target error value, the capacitor is controlled to rotate to a position away from the current interval. Then, the capacitor is controlled to rotate back to the current position. When the capacitor moves away from the current position, it serves as a restart. The angle of rotation of the capacitor can be one full circle, as long as it moves a certain distance away from the current position.
[0031] S6. Write the current capacitor output value into the memory for temporary storage. At this time, the memory stores the capacitor output value of the 0th point. This capacitor output value will be output after the capacitor restarts. Then, the capacitor output value of the 1st point is stored in sequence, and so on until the capacitor output value of the 19th point.
[0032] S7. Determine whether the current number of points is the maximum number of points in the interval, that is, determine whether the current point has reached the 19th point. If not, that is, the last point has been reached, then the number of points in the interval is incremented by one. The current point is the 0th point. After incrementing by one, proceed to the 1st point and re-enter step S2 to measure the capacitance value of the next point and determine the deviation value, etc. If so, that is, when the 19th point is reached and the capacitor output value of all points has been determined, then all capacitor output values are saved to the output sequence.
[0033] To re-verify the accuracy of all capacitor output values, step S8 is also included: sequentially sending the capacitor output value corresponding to each point in the capacitor output value sequence to step S3, and marking the capacitor output sequence as a parameter group. Multiple parameter groups can be set, such as parameter group one, parameter group two, etc., for different processes to call.
[0034] Example 2 like Figure 2 , 3 As shown, this embodiment of the invention also discloses a calibration device, which is used to implement the calibration method in Embodiment 1 above.
[0035] The calibration device includes a first communication connection module, a control chip, and a second communication connection module connected in sequence. The control chip can be implemented using an STM32 series chip, while the first and second communication connection modules can be implemented using an ADM3202ARNZ chip. The two communication connection modules enable bidirectional communication. The first communication module connects the control chip to a host computer, transmitting input signals from the host computer to the control chip. The second communication module connects the control chip to a capacitance adjustment system, transmitting downlink commands and converting the target capacitance value into the position command required by the driver board in real time. It also receives uplink feedback, converting the actual position returned by the driver board back into the calibrated capacitance value, ensuring the host computer always obtains a true and reliable system status.
[0036] The capacitor adjustment system includes a control board, a motor, and an adjustable capacitor connected in sequence. The control board is communicatively connected to the second communication module and is used to receive signals and change the interval point position according to the rotation of the control motor.
[0037] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.
Claims
1. A tunable capacitance calibration method, characterized by, The method comprises the following steps: S1, dividing the total stroke of the capacitor into several interval points, powering on and controlling the capacitor to rotate to the 0th point; S2, measuring the capacitor value of the current point; S3, comparing the input capacitor value with the target capacitor table to calculate the deviation value; S4, judging whether the deviation value is less than the target error value, if yes, entering step S6, if no, entering step S5; S5, using the deviation value to combine the target capacitor value to debug and calculate the capacitor output value, and sending the capacitor output value after debugging into step S3 again; S6, writing the current capacitor output value into the storage for temporary storage; S7, judging whether the current point number is the maximum point number of the interval division, if no, adding one to the interval point number and re-entering step S2, if yes, saving all capacitor output values to the output sequence.
2. The tunable capacitance calibration method of claim 1, wherein, The capacitor output value calculation formula in the step of using the deviation value to combine the target capacitor value to debug and calculate the capacitor output value is as follows: ; Wherein, Y pos Capacitance minimum value, X pos Target capacitance value, min Capacitance minimum value, max Capacitance maximum value, First bias value, point Second bias value, point Point number, m is the number of division intervals.
3. The tunable capacitance calibration method of claim 1, wherein, The value of the point number is calculated by the following formula: .
4. The tunable capacitance calibration method of claim 1, wherein, Before the step of judging whether the deviation value is less than the target error value, it further comprises: controlling the capacitor to rotate away from the current interval point, and then controlling the capacitor to rotate back to the point position.
5. The tunable capacitance calibration method of claim 1, wherein, It further comprises step S8: sending the capacitor output value corresponding to each point in the capacitor output value sequence into step S3 in turn, and marking the capacitor output value sequence as a parameter group.
6. A calibration device, characterized by The calibration device is used to realize the calibration method as claimed in any one of claims 1-5. The calibration device comprises a first communication connection module, a control chip and a second communication connection module connected in sequence, the first communication module is used to communicate and connect the control chip and the upper computer, and the second communication module is used to connect the control chip and the capacitor adjustment system.
7. The calibration device of claim 6, wherein, The capacitor adjustment system comprises a control board, a motor and an adjustable capacitor connected in sequence, and the control board is in communication connection with the second communication connection module.