Plasma display module, display device and manufacturing method of plasma display module

Abstract

The invention relates to a plasma display module, a display device and a manufacturing method of the plasma display module. The plasma display module comprises a first substrate and a second substrate which are oppositely arranged; a first lens layer and a conductive layer are sequentially arranged on the side, facing the second substrate, of the first substrate, and a plurality of first grooves arranged at intervals are formed in the side, facing the second substrate, of the first lens layer. A second lens layer and a pixel electrode layer are sequentially arranged on the side, facing the first substrate, of the second substrate, a plurality of second grooves arranged at intervals are formed in the side, facing the first substrate, of the second lens layer, each first groove corresponds to the corresponding second groove, a display cavity is defined by the first grooves and the second grooves, and the display cavities are filled with plasma particles; the supporting pieces are arranged in the display cavity at intervals so as to support the first substrate and the second substrate and keep the distance between the first substrate and the second substrate. According to the technical scheme, the problems that an existing plasma display module is complex in manufacturing process, high in manufacturing cost, poor in optical performance, low in structural efficiency and the like are solved.

Description

Technical Field

[0001] This application relates to the field of electronic display technology, and in particular to a plasma display module, a display device, and a method for manufacturing the plasma display module. Background Technology

[0002] The plasma display module has microcavities densely distributed between the upper and lower conductive substrates, and the cavities are filled with an electrophoretic paste containing black and white charged pigment particles. When a voltage is applied, the electric field drives the particles to migrate up and down: white particles rise to the display surface to appear white, and black particles rise to appear black. After the power is turned off, the particles remain in place due to the viscosity of the paste and its bistable characteristics, so the image is always displayed and no continuous power supply is required, achieving ultra-low power consumption.

[0003] like Figure 1 As shown, the existing plasma display module uses a "column-isolation wall" structure to improve compressive strength. This structure has a complex manufacturing process (requiring two precise patterning and alignment steps), high manufacturing cost, affects optical performance (light scattering and blocking), and has low structural efficiency (the support and isolation functions are separated). Summary of the Invention

[0004] This application provides a plasma display module, a display device, and a method for manufacturing the plasma display module, in order to solve the problems of complex manufacturing process, high manufacturing cost, impact on optical performance, and low structural efficiency of existing plasma display module column-isolation wall structures.

[0005] In a first aspect, this application provides a plasma display module, including a first substrate and a second substrate disposed opposite to each other; A first lens layer and a conductive layer are sequentially provided on the side of the first substrate facing the second substrate, and a plurality of spaced first grooves are provided on the side of the first lens layer facing the second substrate. The second substrate has a second lens layer and a pixel electrode layer sequentially disposed on the side facing the first substrate. The second lens layer has a plurality of spaced second grooves on the side facing the first substrate. Each first groove is respectively disposed in relation to a second groove and together they form a display cavity, which is filled with plasma particles. A plurality of support members are provided between the first substrate and the second substrate, and each of the support members is spaced apart in the display cavity to support the first substrate and the second substrate and maintain their spacing.

[0006] Optionally, the inner walls of both the first groove and the second groove are spherical.

[0007] Optionally, the support member is a sphere, the radius of the support member is smaller than the radii of the first groove and the second groove, and the diameter of the support member is greater than the sum of the depths of the first groove and the second groove.

[0008] Optionally, the support member is made of a transparent material.

[0009] Optionally, a filter layer is provided on the side of the first substrate facing the second substrate. The filter layer is located between the first lens layer and the first substrate, and the filter layer includes a plurality of filters spaced apart between the support members.

[0010] Secondly, this application provides a display device, including the plasma display module provided in the first aspect of this application.

[0011] Thirdly, this application provides a method for manufacturing a plasma display module, used to manufacture the plasma display module provided in the first aspect of this application, comprising the following steps: A first substrate and a second substrate are provided, and a filter layer is formed on the surface of the first substrate; After the filter layer is prepared, a plurality of spaced-apart first grooves are processed on the surface of the first substrate having the filter layer, and a plurality of spaced-apart second grooves are processed on the surface of the second substrate; the first lens layer and the second lens layer are formed respectively. The inner wall of the second groove is surface-treated to form a hydrophilic region and a hydrophobic region, wherein the hydrophilic region is spaced apart in the second lens layer; The support is installed by utilizing the different forces exerted by the hydrophilic and hydrophobic regions on the support. After the support is installed, the pixel electrode layer is covered on the surface of the second lens layer; the conductive layer is covered on the surface of the first lens layer. After placing the first substrate and the second substrate opposite to each other, they are bonded together using a sealing adhesive, and plasma particles are filled into the display cavity between the first substrate and the second substrate using a vacuum potting method.

[0012] Optionally, processing a plurality of spaced-apart first grooves on the surface of the first substrate having a filter layer, and processing a plurality of spaced-apart second grooves on the surface of the second substrate, includes: The first substrate and the second substrate are made of glass or flexible transparent material, and the first lens layer and the second lens layer are processed by nanoimprinting or photolithography. Optionally, the surface energy treatment of the inner wall of the second groove to form a hydrophilic region and a hydrophobic region includes: The second lens layer is covered with a precision metal shielding plate to expose the hydrophilic area; The hydrophilic region is subjected to oxygen plasma treatment to introduce hydroxyl groups, making the surface energy of the hydrophilic region greater than or equal to 60 mN / m. The second substrate, which has been treated with oxygen plasma, is exposed to fluorinated silane vapor, so that the unexposed second lens layer forms a fluorocarbon hydrophobic region with a surface energy of less than or equal to 18 mN / m.

[0013] Optionally, the installation of the support member by utilizing the different forces exerted by the hydrophilic region and the hydrophobic region on the support member includes: The monodisperse support microspheres with hydrophilic surfaces are dispersed in a water-ethanol mixed solvent; The water-ethanol mixed solvent is applied to the second lens layer by slit coating. The capillary force and hydrophilic-hydrophobic difference during the solvent evaporation process cause the support to self-assemble and remain only in the hydrophilic region, forming a support array.

[0014] The technical solutions provided in this application have the following advantages compared with the prior art: In this embodiment, the first substrate and the second substrate (glass or polyimide film) each support a first lens layer and a second lens layer. The first and second grooves of the two lenses are mirror-aligned, and after being fastened together, they only enclose a pixel-level sealed display cavity. The insulating microsphere support (silicon dioxide or polymer microspheres) that are pre-patterned with surface energy and automatically fall into the space between the first and second grooves simultaneously abut against the conductive layer on the first substrate side and the inner wall of the second groove, precisely locking the height of the display cavity, providing overall pressure-resistant support, and maintaining the parallelism of the upper and lower substrates. Each pixel electrode layer corresponds to the area enclosed by the adjacent support and the first and second grooves. The independent electric field of the TFT drives the black and white charged plasma particles in the cavity to achieve grayscale and color switching. This integrated structure simultaneously replaces the traditional discrete isolation walls, pillars, and multiple precision photolithography alignment processes, significantly simplifying the process flow, reducing the risk of production errors, and providing a foundation for long-term static information display (such as electronic price tags and digital signage) and portable low-power reading devices (such as e-books and learning tablets). Attached Figure Description

[0015] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with this application and, together with the description, serve to explain the principles of this application.

[0016] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, for those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] One or more embodiments are illustrated by way of example with reference numerals in the accompanying drawings. These illustrations do not constitute a limitation on the embodiments. Elements with the same reference numerals in the drawings are denoted as similar elements. Unless otherwise stated, the figures in the drawings are not to be limited by scale.

[0018] Figure 1 This is a schematic diagram of the structure of a traditional plasma display module; Figure 2 A schematic diagram of the structure of the plasma display module provided in the embodiments of this application. Figure 1 ; Figure 3 This is a comparison diagram of the structure of plasma particles reflecting light according to an embodiment of this application and the structure of conventional plasma particles reflecting light. Figure 4 A flowchart illustrating the method for manufacturing a plasma display module provided in this application embodiment; Figure 5 A schematic diagram of the structure of the plasma display module provided in the embodiments of this application. Figure 2 ; Figure 6 A flowchart illustrating the manufacturing method of the plasma display module provided in this application embodiment.

[0019] Explanation of reference numerals in the attached figures: 1. First substrate; 11. First lens layer; 11a. First groove; 1a. Display cavity; 2. Second substrate; 21. Second lens layer; 22. Hydrophilic region; 23. Hydrophobic region; 21a. Second groove; 3. Conductive layer; 4. Pixel electrode layer; 5. Plasma particles; 6. Support components; 7. Filter layer; 71. Filter. Detailed Implementation

[0020] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0021] The following disclosure provides numerous different embodiments or examples for implementing various structures of this application. To simplify the disclosure, specific examples of components and arrangements are described below. These are merely examples and are not intended to limit the scope of this application. Furthermore, reference numerals and / or letters may be repeated in different examples. Such repetition is for simplification and clarity and does not in itself indicate a relationship between the various embodiments and / or arrangements discussed.

[0022] For ease of description, spatial relative terms may be used in the text to describe the relative position or movement of one element or feature relative to another element or feature, as shown in the figure. These relative terms include, for example, "inside," "outside," "middle," "outer," "below," "below," "above," "front," "back," etc. Such spatial relative terms are intended to include different orientations of the device in use or operation, other than those depicted in the figure. For example, if the device in the figure undergoes a positional flip, orientation change, or change of motion, these directional indications will change accordingly. For instance, an element described as "below other elements or features" or "below other elements or features" will subsequently be oriented "above other elements or features" or "above other elements or features." Therefore, the example term "below" can include both upper and lower orientations. The device may be otherwise oriented (rotated 90 degrees or in other directions), and the spatial relative descriptors used in the text will be interpreted accordingly.

[0023] To address the technical problems of complex manufacturing processes, high manufacturing costs, impact on optical performance, and low structural efficiency in existing plasma display module pillar-isolation wall structures, this application provides a plasma display module. A first lens layer 11 and a second lens layer 21 are disposed between a first substrate 1 and a second substrate 2. A first groove 11a and a second groove 21a on the first substrate 1 and the second substrate 2 enclose a pixel-level sealed display cavity 1a. A support member 6 ensures the thickness, pressure resistance, and parallelism of the display cavity 1a within the plasma display module through the first groove 11a and the second groove 21a. The groove array corresponds to the TFT pixel electrodes, and an independent electric field drives the black and white plasma particles 5 within the display cavity 1a to achieve grayscale. This process simplifies the manufacturing process and provides an ultra-thin, high-yield, and long-life platform for rigid or flexible electrophoretic displays.

[0024] Figures 2 to 5An embodiment of this application provides a plasma display module, including a first substrate 1 and a second substrate 2 disposed opposite to each other; a first lens layer 11 and a conductive layer 3 are sequentially disposed on the side of the first substrate 1 facing the second substrate 2, and a plurality of spaced first grooves 11a are disposed on the side of the first lens layer 11 facing the second substrate 2; a second lens layer 21 and a pixel electrode layer 4 are sequentially disposed on the side of the second substrate 2 facing the first substrate 1, and a plurality of spaced second grooves 21a are disposed on the side of the second lens layer 21 facing the first substrate 1, each first groove 11a corresponding to a second groove 21a, and forming a display cavity 1a, which is filled with plasma particles 5; a plurality of support members 6 are also disposed between the first substrate 1 and the second substrate 2, and each support member 6 is spaced apart in the display cavity 1a to support the first substrate 1 and the second substrate 2 and maintain their distance.

[0025] In this embodiment, for the first substrate 1 and the second substrate 2, if they are used for conventional long-term static information display (such as electronic price tags, digital signage) and portable low-power reading devices (such as e-books, learning tablets), glass can be selected to ensure clear image presentation; if they are for flexible display scenarios (such as foldable terminals), they can be replaced with flexible transparent polymer substrates (such as polyimide films) to meet the requirements for bending use.

[0026] The first lens layer 11 and the second lens layer 21 can be fabricated using nanoimprinting or photolithography. The shapes of the first groove 11a and the second groove 21a need to be matched, for example, both can be designed as hemispherical grooves, to ensure that after they are snapped together, they can enclose a closed and regularly shaped display cavity 1a, avoiding crosstalk of plasma particles 5. The distribution density of the grooves needs to be consistent with the pixel arrangement of the pixel electrode layer 4, to ensure that each display cavity 1a corresponds to one pixel unit, and to achieve precise pixel-level display control.

[0027] The support member 6 can be made of insulating microspheres with strong chemical stability (such as silica microspheres or polymer microspheres). Its size needs to be adapted to the height of the display cavity 1a to ensure that the support member 6 can simultaneously abut against the inner wall of the conductive layer 3 and the second groove 21a. This not only supports the first substrate 1 and the second substrate 2 and maintains the thickness of the display cavity 1a, but also avoids substrate deformation or uneven gap of the display cavity 1a due to size deviation.

[0028] The conductive layer 3 can be made of transparent conductive oxide (such as indium tin oxide or fluorine tin oxide), which is covered on the surface of the first lens layer 11 by magnetron sputtering to form a uniform conductive film to meet the requirements of electrical signal transmission; the pixel electrode layer 4 can be made based on thin film transistor (TFT) technology, so that each pixel unit can be independently controlled and grayscale and color display can be achieved in conjunction with the movement of plasma particles 5. The plasma particles 5 filled in the display cavity 1a can be black and white charged particles, and the switching of screen brightness and color can be achieved by driving the particles to move through an electric field.

[0029] The first lens layer 11 and the second lens layer 21 not only form the display cavity 1a by enclosing grooves to achieve pixel isolation, but also support the two substrates in conjunction with the support member 6. This replaces the traditional separate structure of "pillar-isolation wall," avoiding space waste caused by multiple independent structures and reducing the number of components, thus enabling thinner module designs. Eliminating the traditional pillar and isolation wall fabrication process reduces complex steps such as precision photolithography and multiple alignments, lowering process difficulty and production error risks. Simultaneously, the support member 6 can achieve automatic positioning through surface energy guidance, eliminating the need for additional precision assembly operations, which helps improve production yield and reduce manufacturing costs. The support member 6 is evenly distributed within each display cavity 1a, providing comprehensive and balanced support to the two substrates, preventing local deformation of the substrates due to external forces, and thus preventing abnormal movement of plasma particles 5 caused by changes in the gap between the display cavities 1a. This improves the module's compressive strength and lifespan, ensuring display stability during long-term use.

[0030] Please see Figure 2 and Figure 3 The inner walls of the first groove 11a and the second groove 21a are both spherical. The first lens layer 11 and the second lens layer 21 can be made of high-transmittance optical resin (such as PMMA or UV-curable acrylate resin). From the perspective of groove matching design, the spherical parameters of the first groove 11a and the second groove 21a need to correspond precisely. For example, the center of the sphere of the first groove 11a and the center of the sphere of the second groove 21a should be on the same straight line perpendicular to the substrate, and the diameters of the two spheres should be the same, so that when they are snapped together, they can form a spherical or near-spherical display cavity 1a. This shape can maximize the internal space of the display cavity 1a, providing a more sufficient range of motion for the plasma particles 5. At the same time, the inner wall of the spherical surface can increase the reflection area of ​​the plasma particles 5 on light.

[0031] The smooth spherical inner wall reduces light reflection interference on the groove wall, reduces stray light generation, and thus improves image contrast and display clarity. In terms of structural stability, the spherical shape has uniform stress distribution characteristics. When the module is subjected to external pressure, the inner wall of the spherical groove can evenly distribute the pressure to the entire lens layer, avoiding groove deformation or cracking caused by local stress concentration. At the same time, the spherical display cavity 1a has stronger containment of the support member 6, which can prevent the support member 6 from shifting when the module is subjected to external force, further enhancing the support stability between the two substrates and improving the module's resistance to pressure and deformation.

[0032] Please see Figure 5 The support member 6 is a sphere, and the radius of the support member 6 is smaller than the radius of the first groove 11a and the second groove 21a. The diameter of the support member 6 is greater than the sum of the depths of the first groove 11a and the second groove 21a, that is, H > x + y.

[0033] In one embodiment, the support member 6 is selected as a monodisperse sphere. The material is preferably an insulating material with high hardness and low expansion coefficient, such as silicon dioxide spheres (suitable for conventional display scenarios) or high-temperature resistant polymer spheres (suitable for flexible displays). Its radius needs to be precisely controlled to be smaller than the radius of the first groove 11a and the second groove 21a. For example, if the groove radius is set to 25μm, the radius of the support member 6 can be set to 20μm to ensure that the support member 6 can be partially embedded in the groove without exceeding the groove opening, thus avoiding obstruction of the display cavity 1a. Secondly, the depths of the first groove 11a and the second groove 21a need to be designed in a coordinated manner. Assuming that the diameter of the support member 6 is 40μm, the depth of both grooves can be set to 15μm, so that the sum of the depths (30μm) is less than the diameter of the support member 6. This ensures that after the support member 6 is embedded in the two grooves, the middle part can simultaneously abut against the conductive layer 3 on the side of the first substrate 1 and the inner wall of the second groove 21a, forming a stable support.

[0034] The support member 6 is partially embedded in a groove with a larger radius. The groove provides radial restraint to the support member 6, preventing it from shifting when the module is subjected to vibration or external force. Simultaneously, the diameter of the support member 6 is greater than the sum of the depths of the two grooves, ensuring it tightly abuts against the inner walls of the conductive layers 3 on both sides and the second groove 21a, forming an embedded support structure. Compared to traditional column supports, this provides a more stable support point, effectively resisting substrate deformation and improving the overall compressive strength of the module. The support member 6 is only partially embedded in the groove, not completely filling it. This preserves the effective volume of the display cavity 1a, providing ample space for the plasma particles 5 to move, while preventing the support member 6 from becoming too large and compressing the display cavity 1a, thus ensuring the plasma particles 5 can move normally to achieve image display. Furthermore, the embedded design reduces the contact area between the support member 6 and the inner wall of the display cavity 1a, minimizing interference with the movement trajectory of the plasma particles 5. The radius of the support member 6 is smaller than the radius of the groove, so that it will not exceed the opening of the groove after being embedded in the groove. This avoids the support member 6 being exposed in the light propagation path of the display cavity 1a. Compared with traditional column support (which is easy to protrude and block light), it can reduce the obstruction of the reflected light of plasma particles 5, ensure efficient light transmission, and maintain the brightness and clarity of the picture. At the same time, the spherical shape of the support member 6 can reduce light scattering and further optimize optical performance.

[0035] Please see Figure 2 A filter layer 7 is provided on the side of the first substrate 1 facing the second substrate 2. The filter layer 7 is located between the first lens layer 11 and the first substrate 1. The filter layer 7 includes a plurality of filters 71 spaced apart between the support members 6.

[0036] In this embodiment, the filter layer 7 is made of a high-transmittance color filter material (such as red, green, or blue photocurable resin or dye-doped polymer). The filter layer 7 substrate is formed on the surface of the first substrate 1 facing the second substrate 2 through a coating process, and then the substrate is patterned by a photolithography process to form an array of independent filters 71. Each filter 71 corresponds to the distribution area of ​​the first groove 11a of the first lens layer 11, ensuring that a single filter 71 can cover the light emission path of a set of display cavities 1a. The arrangement spacing of the filters 71 must match the setting spacing of the support members 6, so that the gap between adjacent filters 71 corresponds exactly to the projection position of the support member 6, that is, the filters 71 are distributed between the support members 6 at intervals, avoiding the overlap of the filters 71 and the support members 6 in the direction perpendicular to the substrate. After the filter array 71 is formed and solidified, a first lens layer 11 is prepared on the side of the filter layer 7 away from the first substrate 1 (i.e. the side facing the second substrate 2) using nanoimprinting or photolithography. This ensures that the first groove 11a of the first lens layer 11 corresponds one-to-one with the filter 71, so that the light emitted from the display cavity 1a can be filtered by the filter 71 first, and then transmitted to the outside of the first substrate 1 after the light path is optimized by the first lens layer 11.

[0037] The filter 71 of the filter layer 7 can selectively filter the light emitted from the display cavity 1a. For example, the red filter 71 only allows red light to pass through, the green filter 71 only allows green light to pass through, and the blue filter 71 only allows blue light to pass through. With the independent driving of different display cavities 1a by the pixel electrode layer 4, a full-color image can be formed by the combination of red, green and blue light. Moreover, the filters 71 are spaced between the support members 6 to avoid the support members 6 blocking the effective light transmission area of ​​the filters 71, ensuring that the filtered monochromatic light can be completely transmitted to the first lens layer 11, reducing light loss, improving color saturation and screen brightness, and meeting the needs of high-end full-color display scenarios (such as stage background screens and commercial display screens). The filter layer 7 is located between the first substrate 1 and the first lens layer 11, without occupying additional external space of the module, which meets the requirements of the module's thin design. At the same time, the spaced arrangement of the filter 71 and the support member 6 avoids structural interference between the two (e.g., the filter 71 will not be deformed by the support member 6, and the support member 6 will not obstruct the light filtering path of the filter 71), and can also reduce stray light crosstalk between adjacent display cavities 1a through the directional filtering of light by the filter 71, further improving the image clarity.

[0038] Secondly, this application provides a display device, including the plasma display module provided in the first aspect of this application. Because this display device integrates the plasma display module of this application, its display performance is superior. Relying on the unobstructed characteristics of the spherical groove transparent support 6 and the color filtering function of the filter layer 7, the display device can present higher brightness, more saturated colors, and clearer images. For example, in long-term static information display (such as electronic price tags and digital signage) and portable low-power reading devices (such as e-books and learning tablets), it can maintain a high contrast display for a long time, meeting the needs for detailed visual perception.

[0039] Thirdly, please refer to Figure 4 and Figure 6 This application provides a manufacturing method for producing the plasma display module provided in the first aspect of this application, comprising the following steps: Step S100: Provide a first substrate 1 and a second substrate 2, and prepare a filter layer 7 on the surface of the first substrate 1; In step S200, after the filter layer 7 is prepared, a plurality of spaced first grooves 11a are processed on the surface of the first substrate 1 having the filter layer 7, and a plurality of spaced second grooves 21a are processed on the surface of the second substrate 2; thus forming the first lens layer 11 and the second lens layer 21 respectively. Step S300: Surface energy treatment is performed on the inner wall of the second groove 21a to form a hydrophilic region 22 and a hydrophobic region 23. The hydrophilic region 22 is spaced apart on the second lens layer 21. In step S400, the support member 6 is installed by utilizing the different forces exerted by the hydrophilic area 22 and the hydrophobic area 23 on the support member 6. In step S500, after installing the support member 6, a pixel electrode layer 4 is covered on the surface of the second lens layer 21; and a conductive layer 3 is covered on the surface of the first lens layer 11. In step S600, after placing the first substrate 1 and the second substrate 2 opposite to each other, they are bonded together using a sealing adhesive, and plasma particles 5 are filled into the display cavity 1a between the first substrate 1 and the second substrate 2 using a vacuum potting method.

[0040] In this embodiment, when performing the plasma display module manufacturing method, each step can be combined with material characteristics and process adaptability; in step S100, a first substrate 1 of glass or flexible transparent material and a second substrate 2 of TFT backplane substrate are provided; on the surface of the first substrate 1 facing the second substrate 2, red, green and blue light-curable colored resins are coated by photolithography, and after exposure and development, a filter layer 7 is formed. The filter layer 7 includes a plurality of spaced filters 71, and the size of the filters 71 is adapted to the distribution area of ​​the subsequent first groove 11a.

[0041] In step S200, a UV-curable acrylate resin (or an optical-grade polymer such as PMMA) is coated on the surface of the filter layer 7 of the first substrate 1. A first lens layer 11 with multiple spaced first grooves 11a (opening diameter 50-80μm, depth 15-25μm) is formed on the surface of the filter layer 7 of the first substrate 1 using a nanoimprinting process or a photolithography process. The second substrate 2 is processed with the same material and process to form second grooves 21a that correspond one-to-one with the first grooves 11a, forming a second lens layer 21 with a light transmittance greater than 95%.

[0042] In step S300, the second lens layer 21 is covered with a metal shielding plate that matches the pattern of the second groove 21a, exposing the groove area. Oxygen plasma (power 100-150W, time 30-60s) is introduced to treat the groove inner wall, forming a hydrophilic region 22 (contact angle ≤30°). Subsequently, the substrate is immersed in heptadecafluorodecyltrimethoxysilane (FAS-17) vapor, forming a hydrophobic region 23 (contact angle ≥110°) in the non-groove area of ​​the second lens layer 21, with the hydrophilic regions 22 distributed at intervals.

[0043] In step S400, monodisperse silica microspheres (particle size 30-50 μm, radius smaller than the groove radius, diameter greater than the sum of the two groove depths) are selected, and after being grafted with hydrophilic groups by a silane coupling agent, they are dispersed in a mixed solvent of deionized water and ethanol (volume ratio 1:1) to form a suspension of 0.5-1 wt%. The suspension is applied to the surface of the second lens layer 21. During the solvent evaporation process, the microspheres are positioned in the hydrophilic region 22 of the second groove 21a under the action of capillary force and hydrophilic-hydrophobic effect.

[0044] In step S500, an ITO thin film is deposited on the surface of the second lens layer 21 using a magnetron sputtering process, and after photolithography etching, a pixel electrode layer 4 is formed that is precisely aligned with the second groove 21a (deviation ≤ 5 μm); an ITO thin film is deposited on the surface of the first lens layer 11 using a magnetron sputtering process to form a conductive layer 3.

[0045] In step S600, the first substrate 1 and the second substrate 2 are placed opposite each other, so that the first groove 11a and the second groove 21a surround to form a display cavity 1a. UV-curable sealant is applied along the edge of the substrate for pre-curing. The substrate assembly is placed in a vacuum chamber, and charged white particles (titanium dioxide modified acrylic resin microspheres, particle size 1-3μm) and black particles (carbon black modified polystyrene microspheres, particle size 1-3μm) are injected into the display cavity 1a through the injection port at a mixing ratio of 1:1.2. After filling, the injection port is sealed, and the module is cured under UV light for 60s to complete the module fabrication.

[0046] Both the first lens layer 11 and the second lens layer 21 are made of high-transmittance materials with a transmittance greater than 95%. Combined with the microcavity structure formed by the spherical groove, this reduces light transmission loss in the lens layer and increases the effective reflective area of ​​the plasma particles 5 by 30%-50%. This dual effect significantly improves the brightness and reflectivity of the module. The filter layer 7 precisely filters monochromatic light, and together with the high-transmittance lens layer, further reduces stray light crosstalk, improving color saturation by 25%-30% compared to traditional structures. The support member 6 is precisely positioned in the hydrophilic area 22 of the groove, forming a uniform support network. This increases the module's compressive strength by 50%-70% compared to traditional structures, allowing it to withstand external forces of 15-20 N / cm² without deformation. This prevents changes in the gap of the display cavity 1a from affecting the movement of the plasma particles 5, ensuring long-term display stability. The traditional manufacturing and alignment processes for pillars and partition walls are eliminated. The support component 6 is self-assembled without the need for precise photolithography positioning, reducing the number of process steps by more than 30%. It is readily available and has a high processing yield, reducing raw material loss by 10%-15%, increasing production yield by 15%-20%, and significantly reducing manufacturing costs. Under the coordinated action of the first lens layer 11, the second lens layer 21, and the support component 6, three major functions are simultaneously achieved: "optical brightening (increasing the reflective area), mechanical support positioning, and pixel isolation".

[0047] Please see Figure 4 and Figure 6 The first substrate 1 has a filter layer 7, and the second substrate 2 has a plurality of spaced first grooves 11a, and the second substrate 2 has a plurality of spaced second grooves 21a, including: the first substrate 1 and the second substrate 2 are glass or flexible transparent materials, and the first lens layer 11 and the second lens layer 21 are processed by nanoimprinting or photolithography.

[0048] In this embodiment, both the first substrate 1 and the second substrate 2 are made of glass or flexible transparent material. The glass material is preferably alkali-free glass with a thickness of 0.5-1.1mm, which is suitable for conventional fixed display scenarios. The flexible transparent material is a polyimide (PI) film with a thickness of 50-100μm, which is suitable for foldable and flexible display requirements. Both materials must have a light transmittance of ≥95% to avoid affecting the subsequent light path transmission. On the surface of the filter layer 7 of the first substrate 1, a high transmittance (>95%) UV-curable resin (such as acrylate resin) or an optical grade polymer (such as PMMA) is first coated. If a nanoimprinting process is used, a precision mold with a negative shape (spherical concave shape, opening diameter 50-80μm, depth 15-25μm) with the first groove 11a is attached to the resin surface. After applying a pressure of 5-10MPa, the resin is cured by irradiating with 365nm ultraviolet light (illuminance 1000mW / cm²) for 30-60s. After demolding, a first lens layer 11 with multiple spaced first grooves 11a is formed. If a photolithography process is used, a spherical groove structure is obtained after exposure and development, and the first lens layer 11 is obtained. The surface processing of the second substrate 2 is the same as that of the first lens layer 11. High-transmittance UV-curable resin or optical-grade polymer is also selected. Through nanoimprinting or photolithography, a second groove 21a is processed that corresponds one-to-one with the first groove 11a (the size and spacing are perfectly matched) to form the second lens layer 21. This ensures that when the first substrate 1 and the second substrate 2 are subsequently assembled, the first groove 11a and the second groove 21a can accurately enclose the closed display cavity 1a.

[0049] The first substrate 1 and the second substrate 2 are made of high-transmittance glass or flexible material, combined with a lens layer material with a light transmittance of more than 95%, which can minimize the transmission loss of light between the substrate and the lens layer, laying the foundation for the efficient transmission of reflected light from the plasma particles 5 in the subsequent display cavity 1a; the precise spacing and size matching of the first groove 11a and the second groove 21a can ensure that the support 6 can be accurately embedded in the groove for stable support, and also ensure that the volume of the display cavity 1a is uniform, avoiding inconsistent movement of the plasma particles 5 due to differences in cavity volume, thus ensuring uniformity of image display; at the same time, the tight fit between the lens layer and the substrate can enhance the overall structural strength of the module and reduce the risk of lens layer detachment during use.

[0050] Please see Figure 4 and Figure 6 The inner wall of the second groove 21a is surface-treated to form a hydrophilic region 22 and a hydrophobic region 23, including: The second lens layer 21 is covered with a precision metal shielding plate, exposing the hydrophilic area 22; The hydrophilic region 22 was treated with oxygen plasma to introduce hydroxyl groups, making the surface energy of the hydrophilic region 22 greater than or equal to 60 mN / m. The second substrate 2, which has been treated with oxygen plasma, is exposed to fluorinated silane vapor, so that the unexposed second lens layer 21 forms a fluorocarbon hydrophobic region 23 with a surface energy of less than or equal to 18 mN / m.

[0051] In one embodiment, a precision metal shielding plate that perfectly matches the pattern of the second groove 21a on the second lens layer 21 is selected and tightly covers the surface of the second lens layer 21. This ensures that the shielding plate only exposes the inner wall area of ​​the second groove 21a (i.e., the preset hydrophilic region 22), while the rest of the lens layer surface, which is not a groove, is completely shielded to avoid interference in subsequent processing. The second substrate 2 covered with the shielding plate is placed in a plasma processing device, and high-purity oxygen is introduced. The processing power is set to 100-150W and the processing time to 30-60s to bombard the exposed inner wall of the second groove 21a (hydrophilic region 22). Organic contaminants on the groove surface are removed by highly reactive oxygen free radicals, and hydroxyl (-OH) polar groups are introduced on the surface, increasing the surface energy of the hydrophilic region 22 to ≥60mN / m, ensuring sufficient adsorption force for the support member 6 in the subsequent process. The second substrate 2, after oxygen plasma treatment, is transferred to a sealed vapor reaction chamber. After removing the metal shielding plate, fluorinated silane (such as heptadecafluorodecyltrimethoxysilane, FAS-17) vapor (vapor concentration 5-10 g / m³) is introduced into the chamber, and the reaction temperature is controlled at 40-60℃ and the reaction time at 15-20 min. The methoxy group (-Si(OCH3)3) at one end of the fluorinated silane molecule combines with the surface groups of the non-grooved region of the second lens layer 21 (originally blocked by the shielding plate and not treated with oxygen plasma), forming a hydrophobic layer containing long-chain fluorocarbon groups (-CF2-, -CF3) in this region. Ultimately, the surface energy of the non-grooved region (hydrophobic region 23) is reduced to ≤18 mN / m, forming a significant surface energy difference with the hydrophilic region 22.

[0052] Precise exposure of the hydrophilic region 22 is achieved through a precision metal shielding plate. Combined with oxygen plasma treatment, the surface energy of the hydrophilic region 22 is increased to ≥60 mN / m, while the surface energy of the hydrophobic region 23 is reduced to ≤18 mN / m through fluorinated silane vapor treatment. The surface energy difference between the two is ≥42 mN / m. Through capillary forces and hydrophilic / hydrophobic effects, the support component 6 is efficiently guided to be positioned solely within the hydrophilic region 22 (the second groove 21a), ensuring high positioning accuracy and avoiding uneven support caused by component 6 misalignment. The hydroxyl groups introduced by the oxygen plasma treatment are firmly bonded to the groove surface (bonding strength ≥10 N / m). The fluorocarbon hydrophobic layer formed by the fluorinated silane possesses excellent chemical stability (temperature resistance range -40-80℃, no degradation at RH90%), maintaining the high adsorption of the hydrophilic region 22 and the repulsion of the hydrophobic region 23 over a long period. This prevents surface energy decay during use, which could lead to component 6 displacement and ensures the long-term operational stability of the module. The entire process does not require complex photolithography steps, the mask can be reused, and both oxygen plasma and steam treatment are automated and controllable processes. The processing parameters are easy to standardize, and 10-20 substrates can be processed in a single batch. There is no waste liquid discharge, which balances production efficiency and environmental protection requirements and reduces the difficulty of process control during large-scale mass production.

[0053] Please see Figure 4 and Figure 6 The support member 6 is installed by utilizing the different forces exerted by the hydrophilic area 22 and the hydrophobic area 23 on the support member 6, including: The hydrophilic monodisperse support 6 microspheres were dispersed in a water-ethanol mixed solvent; A water-ethanol mixed solvent is applied to the second lens layer 21 by slit coating. The capillary force and hydrophilic-hydrophobic difference during the solvent evaporation process are used to make the support 6 self-assemble and remain only in the hydrophilic region 22, forming an array of support 6.

[0054] In this embodiment, monodisperse support microspheres with hydrophilic surfaces (such as silica microspheres or modified polymer microspheres) are selected. The microsphere particle size must match the size of the second groove 21a (radius smaller than the groove radius, diameter greater than the sum of the depths of the two grooves), and the particle size deviation ≤2% to ensure support uniformity. The microspheres are dispersed in a water-ethanol mixed solvent (water to ethanol volume ratio 1:1), and after stirring evenly, a suspension with a concentration of 0.5-1wt% is formed to ensure that the microspheres do not agglomerate and have good dispersion. A slit coating device is used to uniformly apply the above suspension to the surface of the second lens layer 21, which has undergone surface energy treatment. During coating, the slit width (adapted to the substrate width), coating speed of 5-10 mm / s, and coating pressure of 0.1-0.2 MPa are controlled to ensure that the suspension forms a continuous and uniform liquid film on the lens layer surface, and the liquid film thickness covers the hydrophobic region 23 and the hydrophilic region 22, without any missed coating or local accumulation. The coated second substrate 2 is placed in a constant temperature drying oven (temperature 25-30℃, relative humidity 30%-40%) to allow the solvent to evaporate slowly. During the evaporation process, because the surface energy of the hydrophobic region 23 is ≤18mN / m (repelling water-ethanol solvent) and the surface energy of the hydrophilic region 22 is ≥60mN / m (affinity to solvent), the liquid film preferentially retracts from the hydrophobic region 23 and gathers towards the hydrophilic region 22; at the same time, capillary force "pulls" the microspheres of the support member 6 dispersed in the liquid film to the hydrophilic region 22 (inside the second groove 21a). After the solvent has completely evaporated, the microspheres are stably retained in the hydrophilic region 22, forming a uniform array of support member 6.

[0055] Leveraging the synergistic effect of hydrophilic / hydrophobic differences and capillary forces, the microspheres in the support component 6 remain only within the hydrophilic region 22 (the second groove 21a), achieving high positioning accuracy and avoiding the offset and overlap problems caused by traditional random dispersion. The resulting array of support components 6 has uniform spacing, providing balanced support for the first substrate 1 and the second substrate 2, effectively resisting substrate deformation and improving the module's compressive strength (by 50%-70% compared to traditional structures). Monodisperse microspheres and water-ethanol mixed solvents are low-cost and readily available, and slot coating eliminates excess material waste. No expensive precision alignment equipment is required, reducing equipment investment costs. Furthermore, the self-assembly process of the support component 6 eliminates the risk of mechanical damage, reducing the scrap rate of the substrate and lens layer and further controlling overall manufacturing costs.

[0056] It should be understood that the terminology used herein is for the purpose of describing particular exemplary embodiments only and is not intended to be limiting. Unless the context clearly indicates otherwise, the singular forms “a,” “an,” and “described” as used herein may also include the plural forms. The terms “comprising,” “including,” “containing,” and “having” are inclusive and therefore indicate the presence of the stated features, steps, operations, elements, and / or components, but do not exclude the presence or addition of one or more other features, steps, operations, elements, components, and / or combinations thereof. The method steps, processes, and operations described herein are not construed as requiring them to be performed in a particular order described or illustrated unless the order of performance is explicitly indicated. It should also be understood that additional or alternative steps may be used.

[0057] Although terms such as first, second, third, etc., may be used in this document to describe multiple elements, components, regions, layers, and / or segments, these elements, components, regions, layers, and / or segments should not be limited by these terms. These terms may be used only to distinguish one element, component, region, layer, or segment from another. Unless the context clearly indicates otherwise, terms such as "first," "second," and other numerical terms used herein do not imply order or sequence. Therefore, the first element, component, region, layer, or segment discussed below may be referred to as the second element, component, region, layer, or segment without departing from the teachings of the exemplary embodiments.

[0058] The above description is merely a specific embodiment of this application, enabling those skilled in the art to understand or implement this application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of this application. Therefore, this application is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features claimed herein.

Claims

1. A plasma display module, characterized by comprising: The display module comprises a first substrate (1) and a second substrate (2) arranged oppositely. The first substrate (1) is provided with a first lens layer (11) and a conductive layer (3) in sequence on the side facing the second substrate (2), and the first lens layer (11) is provided with a plurality of first grooves (11a) arranged at intervals on the side facing the second substrate (2). The second substrate (2) is provided with a second lens layer (21) and a pixel electrode layer (4) in sequence on the side facing the first substrate (1), and the second lens layer (21) is provided with a plurality of second grooves (21a) arranged at intervals on the side facing the first substrate (1), each first groove (11a) is arranged correspondingly to a second groove (21a), and a display cavity (1a) is formed by surrounding. A plurality of support members (6) are arranged between the first substrate (1) and the second substrate (2), and each support member (6) is arranged at intervals in the display cavity (1a) to support the first substrate (1) and the second substrate (2) and maintain the distance therebetween.

2. The plasma display module of claim 1, wherein The inner walls of the first grooves (11a) and the second grooves (21a) are spherical.

3. The plasma display module of claim 2, wherein the phosphor layer is formed on the surface of the phosphor layer facing the substrate. The support member (6) is a sphere, the radius of the support member (6) is smaller than the radius of the first groove (11a) and the second groove (21a), and the diameter of the support member (6) is greater than the sum of the depth of the first groove (11a) and the second groove (21a). ​ 4. The plasma display module of claim 3, wherein the phosphor layer is formed on the surface of the phosphor layer facing the substrate. The support member (6) is transparent. ​ 5. The plasma display module of any one of claims 1-3, wherein the phosphor layer is disposed on the substrate. The first substrate (1) is provided with a filter layer (7) between the first lens layer (11) and the first substrate (1), and the filter layer (7) comprises a plurality of filter pieces (71) arranged at intervals between the support members (6). ​ 6. A display device, characterized by comprising: The display module comprises a first substrate (1) and a second substrate (2) arranged oppositely.

7. A method of manufacturing a plasma display module for manufacturing a plasma display module as claimed in any one of claims 1-5, characterized in that The display module comprises a first substrate (1) and a second substrate (2) arranged oppositely. The display module comprises a first substrate (1) and a second substrate (2) arranged oppositely. The display module comprises a first substrate (1) and a second substrate (2) arranged oppositely. The display module comprises a first substrate (1) and a second substrate (2) arranged oppositely. The display module comprises a first substrate (1) and a second substrate (2) arranged oppositely. The display module comprises a first substrate (1) and a second substrate (2) arranged oppositely. The display module comprises a first substrate (1) and a second substrate (2) arranged oppositely. The display module comprises a first substrate (1) and a second substrate (2) arranged oppositely. The display module comprises a first substrate (1) and a second substrate (2) arranged oppositely. The display module comprises a first substrate (1) and a second substrate (2) arranged oppositely. After the first substrate (1) and the second substrate (2) are placed opposite to each other, the display cavity (1a) between the first substrate (1) and the second substrate (2) is filled with the electric plasma particles (5) by using a frame sealant and a vacuum filling method.

8. The method of manufacturing according to claim 7, wherein, The first substrate (1) has a plurality of first grooves (11a) arranged at intervals on the surface of the filter layer (7), and the second substrate (2) has a plurality of second grooves (21a) arranged at intervals on the surface thereof. The first substrate (1) and the second substrate (2) are made of glass or flexible transparent material, and the first lens layer (11) and the second lens layer (21) are processed by nanoimprint or photolithography.

9. The method of manufacturing according to claim 7, wherein, The inner wall of the second groove (21a) is subjected to surface energy treatment to form a hydrophilic region (22) and a hydrophobic region (23). The second lens layer (21) is covered with a precise metal mask plate, and the hydrophilic region (22) is exposed. The hydrophilic region (22) is subjected to oxygen plasma treatment to introduce hydroxyl groups, so that the surface energy of the hydrophilic region (22) is greater than or equal to 60 mN / m. The second substrate (2) subjected to the oxygen plasma treatment is exposed to fluorinated silane vapor as a whole, so that the second lens layer (21) not exposed forms a fluorocarbon hydrophobic region (23) with a surface energy less than or equal to 18 mN / m.

10. The method of manufacturing according to claim 9, wherein, The installation of the support (6) is performed by the different forces of the hydrophilic region (22) and the hydrophobic region (23) and the support (6). Monodisperse support (6) microspheres with a hydrophilic surface are dispersed in a water-ethanol mixed solvent. The water-ethanol mixed solvent is applied to the second lens layer (21) by a slit coating method, and the support (6) is self-assembled and retained only in the hydrophilic region (22) by using the capillary force and the difference between hydrophilic and hydrophobic during the solvent evaporation process, thereby forming a support (6) array.

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