Vacuum drying system

Abstract

The invention relates to a vacuum drying system. The vacuum drying system comprises a support, heating equipment and vacuumizing equipment. The heating equipment is movably mounted on the bracket and is provided with a heating plane which is used for placing a substrate; the vacuumizing equipment is installed on the support and located above the heating equipment, the vacuumizing equipment comprises an air outlet pipeline and an air extraction mechanism with a plurality of first air extraction openings, one end of the air outlet pipeline is constructed to be an air inlet end and communicates with all the first air extraction openings, all the first air extraction openings are formed towards the heating plane, and the air inlet end is communicated with the air outlet pipeline; the lengths of flow channels formed between the first extraction openings and the air inlet end are equal; wherein the heating plane can be jointly enclosed with the vacuumizing equipment to form a closed cavity, a substrate is arranged in the closed cavity, and the closed cavity is used for vacuumizing and heating the substrate. As the lengths of the runners formed between the first extraction openings and the air inlet end are equal, the negative pressure applied to the substrate during air extraction is equal, and the film forming uniformity of the perovskite coating on the substrate is improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of auxiliary tools, in particular to a vacuum drying system. BACKGROUND

[0002] In the process of preparing perovskite solar cells, the preparation efficiency of perovskite coating on the substrate affects the preparation efficiency of the entire solar cell. During the process of preparing perovskite coating, different parts of the coating are subjected to different air flow rates of the vacuum pumping device, so that different parts of the coating are subjected to different air pressures, resulting in uneven thickness of the finally obtained coating, and thus the coating does not meet the requirements and needs to be repeatedly prepared. SUMMARY

[0003] The present application aims at the problem that the existing vacuum pumping device causes uneven film formation of the coating when pumping gas near the coating of the substrate, and proposes a vacuum drying system, which has the technical effect of uniform air flow rate for each part of the coating and improves the uniformity of film formation of the coating.

[0004] A vacuum drying system comprises:

[0005] a support;

[0006] a heating device movably mounted on the support and having a heating plane for placing a substrate;

[0007] a vacuum pumping device mounted on the support and located above the heating device, the vacuum pumping device comprising an air outlet pipeline and an air pumping mechanism having a plurality of first air pumping ports, one end of the air outlet pipeline being configured as an air inlet end and being in communication with all the first air pumping ports, all the first air pumping ports being arranged towards the heating plane, and the length of the flow channel formed between each first air pumping port and the air inlet end being equal.

[0008] wherein the heating plane and the vacuum pumping device together enclose a sealed chamber, the sealed chamber is provided with the substrate and is used for pumping vacuum and heating the substrate.

[0009] In one embodiment, all the first air pumping ports are distributed on the same horizontal plane and are in communication with the air inlet end, wherein all the first air pumping ports are collectively configured as a honeycomb structure on the same horizontal plane, and the length of the flow channel formed between each first air pumping port and the air inlet end is equal.

[0010] In one of the embodiments, the air extraction mechanism is located below the air outlet pipe and comprises a plurality of air extraction members, all of which are stacked and each is provided with an opening penetrating through itself, and two adjacent air extraction members are in fluid communication through the corresponding openings of the two air extraction members.

[0011] The opening of the air extraction member located at the bottom layer is configured as a first air extraction port, the opening of the air extraction member located at the top layer is in communication with the air inlet end, and the number of the openings of each air extraction member is gradually increased from the air inlet end to the first air extraction port.

[0012] In one of the embodiments, all the air extraction members comprise a first air extraction member, a second air extraction member and a third air extraction member stacked from the first air extraction port to the air inlet end, the opening of the second air extraction member is configured as a second air extraction port, and the third air extraction member is in a plurality, and the opening of each third air extraction member is configured as a third air extraction port.

[0013] Each third air extraction port is in communication with an equal number of second air extraction ports to uniformly distribute the gas passing through all the second air extraction ports, and each second air extraction port is also in communication with an equal number of first air extraction ports to uniformly distribute the gas passing through all the first air extraction ports.

[0014] In one of the embodiments, all the third air extraction members are arranged in an array; and / or,

[0015] All the second air extraction ports are collectively configured as a honeycomb structure; and / or,

[0016] The first air extraction port, the second air extraction port and the third air extraction port are of the same structure and are all configured as a cone; and / or,

[0017] From the air inlet end to the first air extraction port, the opening area of the third air extraction port, the second air extraction port and the first air extraction port gradually decreases; and / or,

[0018] The air outlet pipe comprises a main pipe, a plurality of first branch pipes and a plurality of second branch pipes, all the first branch pipes are in communication between the main pipe and the second branch pipes and divide the main pipe, the end of the main pipe away from the first branch pipes is provided with the air inlet end, the end of each first branch pipe away from the main pipe is connected with an equal number of second branch pipes, and the end of the second branch pipe away from the first branch pipe is in communication with and corresponds to the third air extraction port; and / or,

[0019] The air extraction mechanism further comprises an air supplement assembly, which is installed on the first air extraction member and disposed on the same side as the first air extraction port.

[0020] In one of the embodiments, the air supplementing assembly comprises a transverse pipe and a longitudinal pipe, a plane formed by the transverse pipe and the longitudinal pipe is parallel to a horizontal plane on which the first air outlets are distributed, and the transverse pipe and the longitudinal pipe are provided with air supplementing outlets along respective extending directions.

[0021] In one of the embodiments, the air supplementing assembly further comprises a pressure regulating member installed at at least one end of the transverse pipe and the longitudinal pipe along respective extending directions; and / or,

[0022] The transverse pipe and the longitudinal pipe are arranged in the groove.

[0023] In one of the embodiments, the heating device comprises a heating assembly having the heating plane and a jacking assembly arranged below the heating assembly and movably connected with the support, and the jacking assembly is capable of pushing the heating assembly upward; and / or,

[0024] The vacuumizing device further comprises a vacuum pump assembly comprising a plurality of vacuum pumps and vacuum pipes, each of the vacuum pumps is in communication with the air outlet pipe through a corresponding vacuum pipe, and lengths of the corresponding vacuum pipes of the vacuum pumps are equal; and / or,

[0025] The air extracting mechanism is provided with a pressure sensor for detecting a pressure value in the sealed chamber.

[0026] In one of the embodiments, the heating assembly comprises a shell and a heating member, the shell is provided with a cavity in which the heating member is arranged, a top surface of the shell is configured as the heating plane, and a bottom of the shell is in contact with the jacking assembly.

[0027] In one of the embodiments, the shell is provided with a through hole, a top pin of the jacking assembly penetrates through the through hole and supports the substrate.

[0028] In use, the heating plane of the above-mentioned vacuum drying system is used to place the substrate, and can be jointly enclosed with the vacuumizing device to form a sealed chamber, and the coating surface of the substrate is arranged opposite to the first air outlets of the vacuumizing device. Because the first air outlets are arranged opposite to the perovskite coating of the substrate, the speed of vacuumizing the sealed chamber can be accelerated, and the crystal nucleation speed of the perovskite coating can be accelerated. Because lengths of flow channels formed between each first air outlet and the air inlet end are equal, air extraction rates of each first air outlet are equal, and negative pressures applied to the substrate during air extraction are equal. That is, pressures applied to each part of the substrate are as consistent as possible, and film forming uniformity of the perovskite coating on the substrate is improved. BRIEF DESCRIPTION OF DRAWINGS

[0029] Figure 1 A structural schematic diagram of a vacuum drying system provided for some embodiments of the present application.

[0030] Figure 2 A perspective view of a vacuumizing device provided for some embodiments of the present application.

[0031] Figure 3 An exploded view of a vacuumizing device provided for some embodiments of the present application.

[0032] Figure 4 A bottom view of a vacuumizing device provided for some embodiments of the present application.

[0033] Figure 5 A top view of a second air-extracting member of a vacuumizing device provided for some embodiments of the present application.

[0034] Figure 6 A bottom view of a second air-extracting member of a vacuumizing device provided for some embodiments of the present application.

[0035] Figure 7 A top view of a third air-extracting member of a vacuumizing device provided for some embodiments of the present application.

[0036] Figure 8 A bottom view of a third air-extracting member of a vacuumizing device provided for some embodiments of the present application.

[0037] Figure 9 A structural schematic diagram of a vacuum drying system provided for some embodiments of the present application.

[0038] Figure 10 An exploded view of a heating assembly provided for some embodiments of the present application.

[0039] Figure 11 A structural schematic diagram of a jacking assembly of a vacuum drying system provided for some embodiments of the present application.

[0040] BRIEF DESCRIPTION OF THE DRAWINGS

[0041] 10, support; 20, heating device; 21, heating plane; 22, heating assembly; 221, shell; 222, heating piece; 23, jacking assembly; 231, jack; 30, vacuumizing device; 31, air outlet pipeline; 311, main pipeline; 3111, air inlet end; 312, first branch pipeline; 313, second branch pipeline; 32, air extraction mechanism; 321, first air extraction piece; 3211, first air extraction port; 322, second air extraction piece; 3221, second air extraction port; 323, third air extraction piece; 3231, third air extraction port; 324, air supplement assembly; 3241, transverse pipeline; 3242, longitudinal pipeline; 3243, pressure regulating piece; 33, vacuum pump assembly; 331, vacuum pump; 332, vacuum pipeline; 40, vacuum angle valve; 50, vacuum butterfly valve; 100, vacuum drying system. DETAILED DESCRIPTION

[0042] In order to make the above objectives, features and advantages of the present application more apparent, specific embodiments of the present application are described in detail below with reference to the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application. However, the present application can be practiced in a number of different ways beyond the specific embodiments described and it is therefore contemplated to cover all such modifications as fall within the scope of the application. It is to be understood that the following description is exemplary only and is intended to provide a descriptive copy of the preferred embodiments and as such should not be used to limit the scope of the present application.

[0043] In the description of the present application, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the purpose of facilitating the description of the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0044] In addition, the terms "first", "second" are only for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined with "first", "second" can include at least one of the features explicitly or implicitly. In the description of the present application, the meaning of "a plurality of" is at least two, such as two, three, etc., unless otherwise specifically limited.

[0045] In the present application, unless specifically defined otherwise and limited, the terms "mount", "connect", "connection", "fixed", and like terms should be construed in a broad sense, for example, can be fixed connection, can also be detachable connection, or integrated; can be mechanical connection, can also be electrical connection; can be directly connected, can also be indirectly connected through an intermediate medium, can be the communication between two elements or the interaction relationship between two elements, unless otherwise specifically limited. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0046] In the present application, unless specifically defined otherwise and limited, the first feature is "on" or "under" the second feature. The first and second features can be in direct contact, or the first and second features can be indirectly in contact through an intermediate medium. Moreover, the first feature "above", "above" and "above" the second feature can be directly above or obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature "below", "below" and "below" the second feature can be directly below or obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.

[0047] It should be noted that when an element is referred to as "fixed to" or "disposed on" another element, it can be directly on another element or there can be a middle element. When an element is considered to be "connected" to another element, it can be directly connected to another element or there can be a middle element. The terms "vertical", "horizontal", "up", "down", "left", "right" and similar expressions used herein are for illustrative purposes only and are not the only implementation.

[0048] Referring to Figures 1 to 3 The embodiment of the present application provides a vacuum drying system 100, which comprises a support 10, a heating device 20 and a vacuumizing device 30. The heating device 20 is movably mounted on the support 10 and has a heating plane 21 for placing a substrate; the vacuumizing device 30 is mounted on the support 10 and located above the heating device 20, and the vacuumizing device 30 comprises an air outlet pipeline 31 and an air suction mechanism 32 with a plurality of first air suction ports 3211. One end of the air outlet pipeline 31 is configured as an air inlet end 3111 and communicates with all the first air suction ports 3211. All the first air suction ports 3211 are arranged towards the heating plane 21, and the length of the flow channel formed between each first air suction port 3211 and the air inlet end 3111 is equal.

[0049] The heating plane 21 and the vacuumizing device 30 can jointly form a closed chamber, and the closed chamber is provided with a substrate and used for vacuumizing and heating the substrate.

[0050] The support 10 is used to support the heating device 20 and the vacuum device 30. The connection between the heating device 20 and the support 10 can be, but is not limited to, a sliding connection or a snap-fit ​​connection. The heating device 20 is used in conjunction with the vacuum device 30 to dry the substrate together, thereby accelerating the drying process.

[0051] When the substrate is placed on the heating plane 21 and the heating plane 21 moves to the position to be evacuated, air is drawn out by the vacuuming device. The exhaust pipe 31 is used to collect the gas drawn out by the vacuuming mechanism 32 and discharge the drawn gas in a concentrated manner. The flow channels formed between each first suction port 3211 and the inlet end 3111 of the vacuuming mechanism 32 are independently arranged, and the length of each flow channel is equal. The gas transported therein converges at the inlet end 3111 and is then concentratedly transported through the exhaust pipe 31. The shape of the first suction port 3211 can be, but is not limited to, circular or hexagonal.

[0052] After a coating (such as perovskite) is applied to the substrate, the vacuum drying system 100 can operate on it. The substrate is first placed on the heating plane 21 of the heating device 20, with the coated surface of the substrate facing away from the heating plane 21. The heating device 20 then begins to heat the substrate. Subsequently, the heating device 20 moves along the support 10 towards the vacuum pump 30 until the heating plane 21 reaches a preset position. The heating plane 21 and the vacuum pump 30 together form a sealed chamber, with the coated surface of the substrate directly opposite the first air extraction port 3211 of the vacuum pump 30. The vacuum pump 30 begins to extract air from the sealed chamber, creating a vacuum chamber. Simultaneously heating the substrate during vacuuming accelerates the crystal nucleation rate of the perovskite coating.

[0053] Secondly, because the first evacuation port 3211 is positioned directly opposite the perovskite coating on the substrate, it can accelerate the speed at which the sealed chamber is evacuated and also accelerate the crystal nucleation rate of the titanium dioxide coating.

[0054] Furthermore, since the lengths of the flow channels formed between each first air extraction port 3211 and the air inlet end 3111 are equal, the air extraction rate of each first air extraction port 3211 is the same, and the negative pressure applied to the substrate during air extraction is equal. That is, the pressure on each part of the substrate is as consistent as possible, which improves the film uniformity of the perovskite coating on the substrate.

[0055] like Figure 3 and Figure 4 As shown, in some embodiments, all the first air extraction ports 3211 are distributed on the same horizontal plane and are all connected to the air inlet end 3111. All the first air extraction ports 3211 are constructed into a honeycomb structure on the same horizontal plane, and the length of the flow channel formed between each first air extraction port 3211 and the air inlet end 3111 is equal.

[0056] Each hole (first air outlet 3211) of the honeycomb structure can form an air isolation layer, which can maintain the stability of the vacuum environment during the vacuumizing process. Moreover, regarding each first air outlet 3211 and the corresponding flow channel as a unit, each unit can uniformly disperse external force, reduce the probability of local deformation of the air extraction mechanism 32, and improve the impact resistance of the air extraction mechanism 32. In addition, the honeycomb structure can also reduce the weight of the air extraction mechanism 32 itself.

[0057] As shown in Figure 3 In some embodiments, the air extraction mechanism 32 is located below the air outlet pipeline 31 and includes a plurality of air extraction pieces, all of which are stacked and each is provided with an opening penetrating through itself, and adjacent two air extraction pieces are in fluid communication through the corresponding openings of themselves. The opening of the air extraction piece located at the bottom layer is configured as the first air outlet 3211, and the opening of the air extraction piece located at the top layer is in communication with the air inlet end 3111. From the air inlet end 3111 to the first air outlet 3211, the number of openings corresponding to each air extraction piece gradually increases.

[0058] Exemplarily, the number of air extraction pieces is two. For ease of description, the air extraction piece located at the bottom layer is named as the bottom layer air extraction piece, and the air extraction piece located at the top layer is named as the top layer air extraction piece. The top layer air extraction piece and the bottom layer air extraction piece are in communication through the openings provided in themselves to extract the air around the substrate to the air outlet pipeline 31. The number of openings of the top layer air extraction piece is less than that of the bottom layer air extraction piece. Each opening of the top layer air extraction piece is in communication with an equal number of openings on the bottom layer air extraction piece to uniformly distribute the gas passing through the top layer air extraction piece and the bottom layer air extraction piece.

[0059] In this way, the flow rate of the fluid passing through each opening of the bottom layer is as consistent as possible, and the negative pressure formed is also as equal as possible. In addition, the number of openings provided in the bottom layer is increased as much as possible to extract the air at the same rate from as many parts of the substrate as possible, thereby improving the film uniformity of the perovskite coating on the substrate.

[0060] Please continue to refer to Figure 3 In some embodiments, all air extraction pieces include a first air extraction piece 321, a second air extraction piece 322 and a third air extraction piece 323 stacked from the first air outlet 3211 to the air inlet end 3111. The openings provided in the second air extraction piece 322 are configured as the second air outlet 3221, and the number of the third air extraction pieces 323 is multiple. The openings provided in each third air extraction piece 323 are configured as the third air outlet 3231.

[0061] Each third gas extraction port 3231 is in communication with an equal number of second gas extraction ports 3221 to uniformly distribute the gas passing through all the second gas extraction ports 3221, and each second gas extraction port 3221 is in communication with an equal number of first gas extraction ports 3211 to uniformly distribute the gas passing through all the first gas extraction ports 3211.

[0062] For example, the number of third gas extraction members 323 is eight, and each third gas extraction member 323 is provided with one third gas extraction port 3231. The second gas extraction member 322 is divided into eight regions, and each region is provided with four second gas extraction ports 3221. Each region corresponds to one third gas extraction member 323, and all the second gas extraction ports 3221 in each region are in communication with the same third gas extraction port 3231.

[0063] The first gas extraction member 321 is also divided into eight regions to correspond to the eight regions of the second gas extraction member 322. However, each region of the first gas extraction member 321 is divided into four sub-regions corresponding to a single second gas extraction port 3221 in each region of the second gas extraction member 322, and each sub-region is provided with four first gas extraction ports 3211.

[0064] When the gas passes through the first gas extraction member 321, the second gas extraction member 322, and the third gas extraction member 323, it can be sequentially distributed and decompressed. In this way, more first gas extraction ports 3211 can be provided as much as possible while ensuring that the negative pressure formed at the first gas extraction port 3211 meets the demand, so that the gas at different parts of the substrate can be extracted through different first gas extraction ports 3211, thereby improving the film uniformity of the perovskite coating on the substrate.

[0065] It should be noted that the first gas extraction member 321, the second gas extraction member 322, and the third gas extraction member 323 can be connected by screwing, clamping, or other connection methods that are easy to disassemble and assemble, so as to reduce the installation difficulty of the first gas extraction member 321, the second gas extraction member 322, and the third gas extraction member 323, and reduce the maintenance cost of the gas extraction mechanism 32.

[0066] Further, in some embodiments, all the third gas extraction members 323 are arranged in an array.

[0067] In this way, all the third gas extraction ports 3231 collectively form a structure similar to a honeycomb structure, which improves the impact resistance of the third gas extraction member 323 while allowing the single third gas extraction member 323 to be removed.

[0068] Further, as shown in Figure 5 and Figure 6 all the second gas extraction ports 3221 collectively form a honeycomb structure.

[0069] In this way, the impact resistance of the second gas extraction member 322 provided with the second gas extraction port 3221 is improved.

[0070] Please refer to Figure 7 and Figure 8 In some embodiments, the first suction port 3211, the second suction port 3221 and the third suction port 3231 have the same structure and are all configured as a cone.

[0071] For example, as shown in Figure 7 and Figure 8 , the bottom of the cone is square, the bottom is close to the substrate, the top of the cone is circular, and the angle of the inner wall of the cone is 150°. In this way, the gas inlet area of the gas inlet side of the suction port is increased, and the extracted gas can be compressed, thereby improving the suction speed.

[0072] Specifically, in some embodiments, from the gas inlet end 3111 to the first suction port 3211, the opening area of the third suction port 3231, the second suction port 3221 and the first suction port 3211 gradually decreases.

[0073] In this way, along the direction from the gas inlet end 3111 to the first suction port 3211, as many suction ports as possible are arranged on each suction member to align with different parts of the substrate, thereby uniformly extracting the gas from each part of the substrate.

[0074] More specifically, in some embodiments, the opening area decreases in proportion, and the proportion ranges from 0.6 to 0.8.

[0075] In this way, the suction effect of each suction port is not affected, and the next layer of suction ports can be uniformly distributed.

[0076] As shown in Figure 3 , in some embodiments, the gas outlet pipeline 31 includes a main pipeline 311, a plurality of first branch pipelines 312 and a plurality of second branch pipelines 313, all the first branch pipelines 312 are connected between the main pipeline 311 and the second branch pipeline 313, and the main pipeline 311 is divided, the end of the main pipeline 311 away from the first branch pipeline 312 is provided with a gas inlet end 3111, and the end of each first branch pipeline 312 away from the main pipeline 311 is connected with an equal number of second branch pipelines 313, the end of the second branch pipeline 313 away from the first branch pipeline 312 is in communication with the third suction port 3231 and one-to-one correspondence.

[0077] The first branch pipeline 312 is used to divide the gas flowing through the gas outlet pipeline 31, and the second branch pipeline 313 is used to divide the gas flowing through the first branch pipeline 312.

[0078] For example, in Figure 3In the shown example, the number of first branch pipes 312 is two, and the number of second branch pipes 313 is eight. One end of each first branch pipe 312 is in communication with the main pipe 311, and the other end is in communication with four second branch pipes 313. The four second branch pipes 313 are in communication with the third suction port 3231 of the corresponding third suction member 323.

[0079] In this way, the flow path length and route between each first suction port 3211 and the intake end 3111 are defined by the corresponding branch pipes, and the air flow passing through the second suction member 322 and the third suction member 323 is sequentially divided, so as to better perform the flow division and pressure division.

[0080] As shown in Figure 3 and Figure 4 In some embodiments, the suction mechanism 32 further comprises a gas supplement assembly 324, which is installed on the first suction member 321 and disposed on the same side as the first suction port 3211.

[0081] The gas supplement assembly 324 is used to release gas to the substrate. When the suction mechanism 32 extracts the air around the perovskite coating of the substrate, the environment around the coating is extracted into a vacuum environment. Then, the gas supplement assembly 324 is started to inject gas into the above-mentioned vacuum environment. The gas blown by the gas supplement assembly 324 can form a stable and uniform air flow area in the vacuum environment, avoiding the generation of local vortex phenomenon, thereby adjusting the pressure balance in the vacuum environment, optimizing the thin film deposition environment, and ensuring the stability of the thin film deposition process, thereby improving the quality and uniformity of the thin film crystallization.

[0082] Further, as shown in Figure 4 In some embodiments, the gas supplement assembly 324 comprises a transverse pipe 3241 and a longitudinal pipe 3242, and the plane formed by the transverse pipe 3241 and the longitudinal pipe 3242 is parallel to the horizontal plane on which the first suction port 3211 is distributed. The transverse pipe 3241 and the longitudinal pipe 3242 are each provided with a gas supplement port along the respective extension direction.

[0083] For example, in Figure 4In the shown example, the air supplement assembly 324 includes three lateral pipes 3241 and five longitudinal pipes 3242. All the lateral pipes 3241 are parallel and spaced apart, and all the longitudinal pipes 3242 are also parallel and spaced apart. The lateral pipes 3241 and longitudinal pipes 3242 arranged at the periphery of the substrate form a shape similar to the outer contour of the substrate, and the remaining lateral pipes 3241 and longitudinal pipes 3242 are arranged at the middle region of the substrate to divide the substrate into multiple regions. The air outlets on the lateral pipes 3241 and longitudinal pipes 3242 are arranged corresponding to different regions, so that the gas flowing out of the air outlets can be uniformly distributed in each region of the substrate, thereby further improving the quality and uniformity of the thin film crystallization.

[0084] Further, as shown in some embodiments, the air supplement assembly 324 further includes pressure regulating members 3243 installed at at least one end of each lateral pipe 3241 and longitudinal pipe 3242 along the respective extension direction. Figure 3

[0085] In other words, each lateral pipe 3241 and longitudinal pipe 3242 can be provided with a pressure regulating member 3243 (such as a precision pressure regulating valve) at one end, or can be provided with a pressure regulating member 3243 at both ends of the pipe, so as to more accurately regulate the internal pressure of each pipe, thereby regulating the gas pressure blown out of the air outlet, and further improving the gas flow in the vacuum environment.

[0086] In some embodiments, the first air pumping member 321 is recessed to form a recess, and the lateral pipes 3241 and longitudinal pipes 3242 are arranged in the recess.

[0087] When performing the vacuum pumping operation on the substrate, at least part of the substrate can be located in the recess, i.e. the surface of the substrate coated with the perovskite coating is located in the recess. In this way, the substrate and the groove wall of the recess together form a sealed chamber (as described above), and after the sealed chamber is pumped to vacuum, the lateral pipes 3241 and longitudinal pipes 3242 are contained in the sealed chamber, which facilitates timely air supplement of the lateral pipes 3241 and longitudinal pipes 3242 into the vacuum chamber.

[0088] In this way, by improving the structure of the first air pumping member 321 to cooperate with the substrate to form a vacuum chamber during vacuum pumping, the stability of the environment for performing the vacuum pumping operation on the substrate is improved.

[0089] Secondly, referring again to Figure 1 In some embodiments, the air outlet pipe 31 is further provided with a vacuum angle valve 40, a vacuum butterfly valve 50, and a motor. The opening angle of the vacuum butterfly valve 50 is controlled by the motor to adjust the air pumping flow. The on-off of the air outlet pipe 31 is controlled by the vacuum angle valve 40.

[0090] ​Specifically, as shown in Figure 1 , Figure 9 , Figure 10 and Figure 11 , in some embodiments, the heating device 20 comprises a heating assembly 22 having a heating plane 21 and a jacking assembly 23 located below the heating assembly 22 and movably connected with the support 10, the jacking assembly 23 being capable of pushing the heating assembly 22 to rise.

[0091] The jacking mechanism can comprise a servo motor, a ball screw and a material detection sensor. The servo motor and the ball screw are drivingly connected, and the ball screw is further connected with the heating assembly 22. The material detection sensor is installed on the heating assembly 22 and is used to detect whether the substrate is placed on the heating plane 21. When the material detection sensor detects the substrate, it sends a signal to the servo motor, and the servo motor operates according to the received signal to drive the ball screw to operate, thereby driving the heating assembly 22 to move towards the first air exhaust member 321, and further driving the substrate to move towards the first air exhaust member 321 until the heating assembly 22 moves to the preset position.

[0092] In this way, the flexibility of movement of the heating device 20 is improved, and the heating device 20 is facilitated to carry the substrate to move to the preset position.

[0093] As shown in Figure 10 , in some embodiments, the heating assembly 22 comprises a shell 221 and a heating member 222, the shell 221 has a cavity therein, the heating member 222 is arranged in the cavity, the top surface of the shell 221 is configured as the heating plane 21, and the bottom of the shell 221 is in contact with the jacking assembly 23.

[0094] For example, the heating member 222 is configured as a heating pipe, and 25 heating pipes are uniformly distributed in the shell 221. All the heating pipes can be matched with a thermocouple and a temperature controller to achieve precise temperature regulation. Among them, the heating plane 21 of the shell 221 can be made of high-strength steel, and the remaining parts can be made of high-temperature resistant materials. Because steel itself has a low thermal expansion coefficient and a high rigidity strength, when the internal temperature of the cavity rises to 150-200℃, the surface of the shell 221 will not expand due to heat or deform due to insufficient rigidity. In this way, the fit between the heating plane 21 and the substrate and the temperature consistency of each region can be ensured.

[0095] In addition, the parts of the shell 221 other than the heating plane 21 can block the temperature, which can reduce the heat loss in the cavity, speed up the drying speed of the perovskite coating on the substrate, provide a better crystallization environment for the perovskite coating, and improve the crystallization speed and quality of the coating.

[0096] Further, as shown in Figure 10 and Figure 11 , in some embodiments, the heating device 20 further comprises a second air exhaust member 322, the second air exhaust member 322 is arranged on the heating plane 21, and the second air exhaust member 322 is arranged on the heating plane 21.As shown, in some embodiments, the shell 221 is provided with a through hole, and the top pin 231 of the jacking assembly 23 penetrates through the through hole and supports the substrate.

[0097] Since the substrate is large in size and is prone to breakage, a carrying robot is generally used to support the substrate and carry the substrate. When the substrate needs to be transferred to the heating plane 21, the top pin 231 of the jacking assembly 23 penetrates through the through hole and is arranged to protrude relative to the heating plane 21, and at this time, the support surface formed by all the top pins 231 is arranged to be spaced apart from the heating plane 21, thereby forming a space for the carrying robot to insert, so as to transfer the substrate to the top pin 231.

[0098] Subsequently, when the heating element 222 in the shell 221 starts to operate, the temperature in the cavity rapidly rises, heat is transferred to the heating plane 21 and to the substrate located above the heating plane 21, so as to heat the substrate. Then, under the driving of the jacking assembly 23, the heating assembly 22 carries the substrate and moves towards the first air extraction element 321, and performs vacuum extraction on the substrate.

[0099] When the perovskite coating on the substrate is dried and transferred to the next station, the top pin 231 can be lowered and hidden in the cavity of the shell 221, so as to reduce the probability of collision between the top pin 231 and other components, thereby protecting the top pin 231 from damage.

[0100] Further, as shown in the drawings, Figure 1 In some embodiments, the vacuum extraction device 30 further comprises a vacuum pump assembly 33, and the vacuum pump assembly 33 comprises a plurality of vacuum pumps 331 and vacuum pipes 332. Each vacuum pump 331 is in communication with the air outlet pipe 31 through a corresponding vacuum pipe 332, and the lengths of the corresponding vacuum pipes 332 of the vacuum pumps 331 are equal.

[0101] For example, as shown in the drawings, Figure 1 The vacuum pump assembly 33 comprises eight high-power dry screw vacuum pumps 331. Each vacuum pump 331 is in communication with the air outlet pipe 31 through an equal-length vacuum pipe 332, so that the paths of the vacuum pumps 331 to the air outlet pipe 31 are equal, thereby ensuring the uniformity of the extraction pressure and air flow.

[0102] The number of simultaneously operated vacuum pumps 331 can be determined according to actual conditions to achieve different extraction efficiencies. For example, the pressure in the sealed cavity is extracted to 1 Pa within 3 seconds, the pressure in the sealed cavity is extracted to 5 Pa within 3 seconds, and the pressure in the sealed cavity is extracted to 20 Pa within 2 seconds.

[0103] In addition, in some embodiments, the air extraction mechanism 32 is provided with a pressure sensor for detecting the pressure value in the sealed cavity.

[0104] The state of the sealed chamber is monitored in real time by the value detected by the pressure sensor, and different vacuum extraction effects and pressure values can be obtained by adjusting the distance between the substrate and the first air outlet 3211, so as to be studied.

[0105] Of course, the air extraction mechanism 32 can also be provided with a vacuum gauge, which is used in cooperation with the pressure sensor to obtain more accurate data.

[0106] The technical features of the above-mentioned embodiments can be combined arbitrarily. In order to make the description simple, all possible combinations of the technical features in the above-mentioned embodiments are not described, but as long as the combinations of the technical features do not exist contradictory, they should be considered as the scope of the description.

[0107] The above-mentioned embodiments only express several implementation manners of the present application, and the description is more specific and detailed, but it should not be understood as a limitation on the patent scope of the application. It should be pointed out that for ordinary skilled in the art, without departing from the concept of the present application, a number of modifications and improvements can be made, which are all within the protection scope of the present application. Therefore, the patent protection scope of the present application should be subject to the appended claims.

Claims

1. A vacuum drying system, characterized by, The utility model relates to a substrate heating and vacuumizing device, comprising: a support; a heating device movably mounted on the support and having a heating plane for placing a substrate; a vacuumizing device mounted on the support and above the heating device, the vacuumizing device comprising an exhaust pipe and an exhaust mechanism having a plurality of first exhaust ports, one end of the exhaust pipe being configured as an air inlet end and communicating with all the first exhaust ports, all the first exhaust ports being arranged towards the heating plane, and the length of the flow channel formed between each first exhaust port and the air inlet end being equal; wherein the heating plane and the vacuumizing device together enclose a closed chamber, the closed chamber being provided with the substrate and being used for vacuumizing and heating the substrate.

2. The vacuum drying system of claim 1, wherein, All the first exhaust ports are distributed on the same horizontal plane and communicate with the air inlet end, wherein all the first exhaust ports together form a honeycomb structure on the same horizontal plane, and the length of the flow channel formed between each first exhaust port and the air inlet end is equal.

3. The vacuum drying system of claim 1, wherein, The exhaust mechanism is located below the exhaust pipe and comprises a plurality of exhaust members, all the exhaust members being stacked and each having an opening penetrating through itself, and two adjacent exhaust members being in fluid communication through the corresponding openings thereof; wherein the opening of the exhaust member at the bottom layer is configured as a first exhaust port, the opening of the exhaust member at the top layer communicates with the air inlet end, and the number of the openings corresponding to each exhaust member gradually increases from the air inlet end to the first exhaust port.

4. The vacuum drying system of claim 3, wherein, All the exhaust members comprise a first exhaust member, a second exhaust member and a third exhaust member stacked from the first exhaust port to the air inlet end, the openings of the second exhaust member are configured as second exhaust ports, and the third exhaust member has a plurality of third exhaust ports; wherein each third exhaust port communicates with an equal number of second exhaust ports to uniformly distribute the gas passing through all the second exhaust ports, and each second exhaust port also communicates with an equal number of first exhaust ports to uniformly distribute the gas passing through all the first exhaust ports.

5. The vacuum drying system of claim 4, wherein, All the third exhaust members are distributed in an array; and / or, all the second exhaust ports together form a honeycomb structure; and / or, the first exhaust port, the second exhaust port and the third exhaust port have the same structure and are all configured as cones; and / or, from the air inlet end to the first exhaust port, the opening area of the third exhaust port, the second exhaust port and the first exhaust port gradually decreases; and / or, the exhaust pipe comprises a main pipe, a plurality of first branch pipes and a plurality of second branch pipes, all the first branch pipes being connected between the main pipe and the second branch pipes and shunting the main pipe, the end of the main pipe away from the first branch pipes being provided with the air inlet end, the end of each first branch pipe away from the main pipe being connected with an equal number of second branch pipes, and the end of the second branch pipe away from the first branch pipe communicating with and corresponding to the third exhaust port; and / or, The air extraction mechanism further comprises a gas supplement assembly, which is installed on the first air extraction member and arranged on the same side of the first air extraction port.

6. The vacuum drying system of claim 5, wherein, The gas supplement assembly comprises a transverse pipeline and a longitudinal pipeline, and a plane formed by the transverse pipeline and the longitudinal pipeline is parallel to a horizontal plane on which the first air extraction port is distributed.

7. The vacuum drying system of claim 6, wherein, The gas supplement assembly further comprises a pressure regulating member, which is installed on at least one end of the transverse pipeline and the longitudinal pipeline along their respective extending directions; and / or the first air extraction member is recessed to form a groove, and the transverse pipeline and the longitudinal pipeline are arranged in the groove.

8. The vacuum drying system according to any one of claims 1 to 7, characterized in that, The heating device comprises a heating assembly and a jacking assembly, the heating assembly has the heating plane, the jacking assembly is arranged below the heating assembly and movably connected with the support, and the jacking assembly can push the heating assembly to rise; and / or The vacuum extraction device further comprises a vacuum pump assembly, which comprises a plurality of vacuum pumps and vacuum pipelines, each of the vacuum pumps is communicated with the air outlet pipeline through a corresponding vacuum pipeline, and the lengths of the corresponding vacuum pipelines of the vacuum pumps are equal; and / or A pressure sensor is arranged on the air extraction mechanism, and the pressure sensor is used to detect the pressure value in the closed chamber.

9. The vacuum drying system of claim 8, wherein, The heating assembly comprises a shell and a heating member, the shell is internally provided with a cavity, the heating member is arranged in the cavity, the top surface of the shell is configured as the heating plane, and the bottom of the shell is in contact with the jacking assembly.

10. The vacuum drying system of claim 9, wherein, A through hole is arranged on the shell, and a top pin of the jacking assembly penetrates through the through hole and supports the substrate.

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