Quartz vacuum packaging equipment and method

Abstract

The invention relates to quartz vacuum packaging equipment and method, and the equipment comprises a housing which comprises a plurality of groups of station chambers which are arranged side by side; the vacuum generation system comprises a mechanical pump, a high-vacuum molecular pump and a valve group pipeline; the valve group pipeline comprises a pre-pumping pipeline which is independently arranged for each station cavity, and a slow pumping branch and a quick pumping branch are arranged on each pre-pumping pipeline in parallel; the work processing module comprises a plurality of stations, each station is provided with an equipment cavity, a rotating main shaft, a manual rotating mechanism and a journal sticking sealing piece, and a main shaft through hole is formed in each equipment cavity; the rotating main shaft is clamped and connected to the quartz tube, and the rotating main shaft penetrates through the main shaft through hole; the manual rotating mechanism is fixedly connected to the end of the outer side of the rotating main shaft, and the journal sticking sealing piece is fixedly arranged at the position of the main shaft through hole. By the adoption of the structure, pressure difference can be gently established in the vacuumizing process, airflow impact and vibration on a pipeline are reduced, a vacuum pump and a valve are effectively protected, and all stations can work independently and do not interfere with one another.

Description

Technical Field

[0001] This invention relates to the field of vacuum packaging technology, specifically to a quartz vacuum packaging device and method. Background Technology

[0002] Quartz tubes are widely used in semiconductors, photovoltaics, optical fibers, and high-end lighting due to their excellent high-temperature resistance, light transmittance, and chemical stability. In these applications, it is often necessary to encapsulate specific materials (such as metals or specific gases) inside the quartz tube while maintaining a high vacuum inside the tube. This places extremely high demands on the vacuum level, sealing performance, and ease of operation of the encapsulation equipment.

[0003] Traditional vacuum sealing of quartz tubes typically employs a single-station, step-by-step operation. First, the quartz tube is inserted into a large vacuum chamber for overall evacuation, then rotated and flame-sealed using external clamps. This method has drawbacks: low efficiency, processing only one quartz tube at a time, resulting in low production capacity; complex sealing at the connection points between the quartz tube and the shared vacuum chamber and piping, prone to wear and leakage due to repeated disassembly and reassembly, affecting the vacuum level during sealing; and the unidirectional evacuation process makes it impossible to optimize pumping speed control for different stages of the quartz tube's transition from atmospheric pressure to high vacuum, potentially leading to particles or volatile substances inside the tube being carried into the pump unit by excessively fast airflow.

[0004] Therefore, there is an urgent need to provide a quartz vacuum packaging device and method to solve the above problems. Summary of the Invention

[0005] The purpose of this invention is to overcome the shortcomings and defects of the prior art and provide a quartz vacuum packaging device and method that enables the vacuuming process to build up pressure difference smoothly, reduces the impact and vibration of airflow on pipelines, effectively protects vacuum pumps and valves, and allows each station to work independently without interfering with each other.

[0006] The objective of this invention is achieved through the following technical solution: A quartz vacuum packaging device, comprising: The housing includes multiple sets of side-by-side work chambers for accommodating the quartz tubes to be processed. A vacuum generating system, connected to the work station chamber, includes a mechanical pump, a high-vacuum molecular pump, and a valve assembly pipeline. The outlet of the high-vacuum molecular pump is connected to the mechanical pump, and the high-vacuum molecular pump is connected to the work station chamber through the valve assembly pipeline. The valve assembly pipeline includes a pre-evacuation pipeline independently configured for each work station chamber. One end of the pre-evacuation pipeline is connected to the work station chamber, and the other end is connected to the inlet of the mechanical pump. Each pre-evacuation pipeline has a slow evacuation branch and a fast evacuation branch connected in parallel. The work processing module includes multiple workstations corresponding to the workstation chambers. Each workstation is provided with a device cavity, a rotating spindle, a manual rotation mechanism, and a shaft-holding seal. The device cavity is fixedly installed and has a spindle through hole inside. The rotating spindle is clamped and connected to a quartz tube and passes through the spindle through hole. The manual rotation mechanism is fixedly connected to the outer end of the rotating spindle, and the shaft-holding seal is fixedly installed at the spindle through hole and tightly fitted around the outer circumference of the rotating spindle.

[0007] Optionally, the workstation is also provided with a magnetic fluid rotary sealing device, one end of which is fixedly connected to the equipment cavity, and the other end is sleeved on the outside of the rotating spindle.

[0008] Optionally, the magnetohydrodynamic rotary sealing device includes a fixed section and a rotating section. The fixed section is connected to the equipment cavity and located outside the shaft seal. The rotating section is fixedly sleeved on the rotating main shaft to achieve dynamic sealing in the rotating state.

[0009] Optionally, the valve assembly pipeline further includes a main extraction valve for connecting the inlet of the high vacuum molecular pump to each of the working chambers, a first valve is provided on the slow extraction branch, and a second valve is provided on the fast extraction branch.

[0010] Optionally, the system also includes a vacuum measurement system comprising a Pirani gauge and a full-range high vacuum gauge, the Pirani gauge being connected to the pre-evacuation line and the full-range high vacuum gauge being connected to the inlet line of the high vacuum molecular pump.

[0011] Optionally, the vacuum generating system further includes a fore-stage valve, which is located on the pipeline between the mechanical pump and the high vacuum molecular pump and is configured to open when the vacuum level in the quartz tube reaches the preset start-up conditions of the high vacuum molecular pump, so that the high vacuum molecular pump starts up and enters the high vacuum pumping state.

[0012] Optionally, the device further includes a control module, which includes a controller and an operation panel; the operation panel is located on the surface of the housing and is connected to the built-in controller, and the operation panel is provided with buttons with status indicator lights for sending manual electric control commands or one-button automatic vacuuming program start commands to the controller.

[0013] The present invention also includes a method for quartz vacuum packaging, comprising the following steps: S1: Workpiece clamping, the quartz tube to be sealed is inserted into the selected station, and the chamber is sealed by the shaft seal and the magnetic fluid rotary sealing device; S2: Pre-vacuuming, start the mechanical pump, and perform low-speed vacuuming of the quartz tube through the slow-vacuuming branch; when the vacuum level reaches the first preset value, activate the fast-vacuuming branch to perform high-speed vacuuming. S3: High vacuum extraction. When the vacuum level reaches the second preset value suitable for starting the high vacuum molecular pump, start the high vacuum molecular pump and open the corresponding main pumping valve, while keeping the mechanical pump running until the vacuum level meets the requirements of the sealing process. S4: Tube sealing operation. Under high vacuum, the quartz tube is rotated by the manual rotating mechanism to make it heat evenly and then flame-melted to seal it.

[0014] Compared with the prior art, the present invention has the following beneficial effects: In this invention, the quartz vacuum packaging equipment includes a housing, a vacuum generating system, and a working module. Multiple workstation chambers are arranged side-by-side within the housing, allowing the insertion or removal of quartz tubes. The vacuum generating system, integrated within the housing, includes a mechanical pump, a high-vacuum molecular pump, and valve piping. The mechanical pump is used to evacuate the quartz tubes in the working chambers to a low vacuum, while the high-vacuum molecular pump performs high-vacuum treatment. The valve piping connects each chamber to the pump group. Each workstation chamber is equipped with an independent pre-evacuation pipeline, with a slow evacuation branch and a fast evacuation branch connected in parallel on each pre-evacuation pipeline. The working module includes multiple workstations, each comprising a device cavity, a rotating spindle, a manual rotation mechanism, and a shaft-holding seal. A precision spindle through-hole is machined at the center of the device cavity, through which the rotating spindle passes. A shaft-holding seal is installed at the main shaft through hole of the equipment cavity. The above components reduce equipment costs and improve equipment utilization. The parallel slow and fast pumping branches allow the vacuuming process to build up pressure difference smoothly, reducing airflow impact and vibration on the pipeline, effectively protecting the vacuum pump and valves. Each station can work independently without interfering with each other. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the structure of the present invention.

[0016] Figure 2 This is a schematic diagram of the shell-removing structure in this invention.

[0017] Figure 3 This is another schematic diagram of the shell-removing structure in this invention.

[0018] Figure 4 This is a schematic diagram of the working processing module in this invention.

[0019] Figure 5 This is a schematic diagram of the structural principle of the present invention.

[0020] The above figures include the following reference numerals: 1. Housing; 11. Working chamber; 21. Mechanical pump; 22. High vacuum molecular pump; 23. Valve assembly pipeline; 231. Slow extraction branch; 232. First valve; 233. Fast extraction branch; 234. Second valve; 24. Main extraction valve; 25. Fore-stage valve; 31. Equipment cavity; 32. Rotary spindle; 33. Manual rotation mechanism; 34. Shaft-holding seal; 35. Magnetohydrodynamic rotary sealing device; 41. Pirani gauge tube; 42. Full-range vacuum gauge; 51. Controller; 52. Operation panel. Detailed Implementation

[0021] The present invention will be further described in detail below with reference to the embodiments and accompanying drawings, but the embodiments of the present invention are not limited thereto.

[0022] The present invention provides a quartz vacuum packaging device and method.

[0023] Reference Figures 1 to 5 In this embodiment, it includes: The housing 1 includes multiple sets of parallel working chambers 11, which are used to respectively accommodate the quartz tubes to be processed; The vacuum generating system, connected to the work station chamber 11, includes a mechanical pump 21, a high vacuum molecular pump 22, and a valve group pipeline 23. The outlet of the high vacuum molecular pump 22 is connected to the mechanical pump 21, and the high vacuum molecular pump 22 is connected to the work station chamber 11 through the valve group pipeline 23. The valve group pipeline 23 includes a pre-evacuation pipeline independently set for each work station chamber 11. One end of the pre-evacuation pipeline is connected to the work station chamber 11, and the other end is connected to the inlet of the mechanical pump 21. Each pre-evacuation pipeline is provided with a slow evacuation branch 231 and a fast evacuation branch 233 in parallel. The work processing module includes multiple workstations corresponding to the workstation chamber 11. Each workstation is equipped with an equipment cavity 31, a rotating spindle 32, a manual rotation mechanism 33, and a shaft-holding seal 34. The equipment cavity 31 is fixedly installed and has a spindle through hole inside. The rotating spindle 32 is clamped and connected to a quartz tube and passes through the spindle through hole. The manual rotation mechanism 33 is fixedly connected to the outer end of the rotating spindle 32. The shaft-holding seal 34 is fixedly installed at the spindle through hole and tightly fitted around the outer periphery of the rotating spindle 32.

[0024] Optionally, in this embodiment, the quartz vacuum packaging equipment includes a housing 1, a vacuum generating system, and a working processing module. Multiple workstation chambers 11 are arranged side-by-side within the housing 1, each capable of housing or removing a quartz tube. The vacuum generating system, integrated within the housing 1, includes a mechanical pump 21, a high-vacuum molecular pump 22, and a valve group pipeline 23. The mechanical pump 21 is used to evacuate the quartz tube within the working chamber to a low vacuum, while the high-vacuum molecular pump 22 performs high-vacuum treatment. The valve group pipeline 23 connects each chamber to the pump group. Each workstation chamber 11 is equipped with an independent pre-evacuation pipeline. One end of the pre-evacuation pipeline connects to the workstation chamber 11, and the other end connects to the inlet of the mechanical pump 21. Each pre-evacuation pipeline has a slow evacuation branch 231 and a fast evacuation branch 233 connected in parallel, with the slow evacuation branch 231 having a low flow conductivity and the fast evacuation branch 233 having a high flow conductivity. The working processing module includes multiple workstations. Each workstation includes an equipment cavity 31, a rotating spindle 32, a manual rotation mechanism 33, and a shaft-holding seal 34. The equipment cavity 31 has a precision-machined spindle through-hole through which the rotating spindle 32 passes. An adjustable chuck is installed on its inner end to hold the quartz tube, and the manual rotation mechanism 33 is fixedly connected to its outer end. A shaft-holding seal 34 is installed at the spindle through-hole of the equipment cavity 31. The shaft-holding seal 34 is an annular seal, which can be a circular rubber ring. The shaft-holding seal 34 is pressed against the rotating spindle 32, forming a reliable static seal. The combination of a high-vacuum molecular pump 22 and a mechanical pump 21 serves multiple independent workstations, reducing equipment costs and improving equipment utilization. The parallel slow and fast pumping branches 233 allow for a smooth establishment of pressure differential during the vacuuming process, reducing airflow impact and vibration on pipelines (especially bellows), effectively protecting the vacuum pump and valves. Each workstation can operate independently without interference.

[0025] Optionally, in this embodiment, the workstation is further provided with a magnetic fluid rotary sealing device 35. One end of the magnetic fluid rotary sealing device 35 is fixedly connected to the equipment cavity 31, and the other end is sleeved on the outside of the rotating spindle 32. When the quartz tube is melt-sealed, the manual rotation mechanism 33 drives the rotating spindle 32 to rotate, thereby rotating the quartz tube. The magnetic fluid rotary sealing device 35 ensures that the quartz tube and the rotating spindle 32 can maintain a dynamic seal during rotation, preventing external air from entering and disrupting the vacuum environment. Further, in this embodiment, the magnetic fluid rotary sealing device 35 includes a fixed section and a rotating section. The fixed section is connected to the equipment cavity 31 and located outside the shaft seal 34, and the rotating section is fixedly sleeved on the rotating spindle 32. On the outside of the shaft-holding seal 34, a stator housing (i.e., the fixed section) of a magnetic fluid rotary sealing device 35 is fixedly installed by bolts. The stator housing is filled with magnetic fluid and encapsulates bearings. A magnetic sleeve is tightly fitted on the corresponding position of the rotating main shaft 32 as the rotor (rotating section) of the magnetic fluid seal. The rotor rotates together with the rotating main shaft 32, forming a dynamic seal together with the magnetic fluid in the stator section. This achieves a reliable seal during manual rotation in a vacuum environment. The shaft-holding seal 34 serves as the first static seal, bearing the main pressure difference. The magnetic fluid rotary sealing device 35 serves as the second dynamic seal, achieving a dynamic seal when the main shaft rotates. The two seals work together to solve the problem of easy wear and leakage of a single seal type under manual rotation conditions.

[0026] Optionally, in this embodiment, the valve pipeline further includes a main extraction valve 24 for connecting the inlet of the high vacuum molecular pump 22 to each workstation chamber 11. A first valve 232 is provided on the slow extraction branch 231, and a second valve 234 is provided on the fast extraction branch 233. The main extraction valve 24 can control the opening and closing of the first valve 232 and the second valve 234 in sequence through a program or manual control, so as to realize a pre-extraction process of slow first and then fast. First, the slow extraction branch 231 is used for slow vacuum extraction, and then the fast extraction branch 233 is opened for fast vacuum extraction, so as to prevent the device from being damaged by excessive pressure change at the beginning. When the pre-extraction reaches a certain vacuum level, the valve of the pre-extraction pipeline is closed and the main extraction valve 24 of the corresponding workstation is opened, so that the high vacuum molecular pump 22 can pump the vacuum level in the chamber to a higher process requirement level.

[0027] Optionally, in this embodiment, the quartz vacuum sealing equipment further includes a vacuum measurement system, which includes a Pirani gauge tube 41 and a full-range high vacuum gauge. A Pirani gauge tube 41 (low vacuum gauge) is installed on the pre-evacuation pipeline of each station chamber 11 to measure low vacuum and provide a basis for judging slow and fast evacuation in the pre-evacuation stage. A full-range high vacuum gauge is installed on the inlet main pipeline of the high vacuum molecular pump 22 to measure high vacuum and vacuum levels exceeding it, monitor the high vacuum evacuation progress and determine whether the quartz tube has reached the sealing conditions. The two sets of vacuum gauges have clear division of labor, realizing vacuum monitoring throughout the evacuation process. The readings of the vacuum measurement system can be connected to the control module to realize automatic threshold judgment and automatic valve switching during the evacuation process, thereby realizing a fully automatic vacuum evacuation procedure.

[0028] Optionally, in this embodiment, the vacuum generating system further includes a pre-vacuum valve 25, which is located on the pipeline between the mechanical pump 21 and the high-vacuum molecular pump 22. Its working logic is as follows: during the pre-evacuation stage, the pre-vacuum valve 25 is closed, and the mechanical pump 21 evacuates the working chamber 11 only through the pre-evacuation pipeline. When the vacuum level of the chamber reaches the preset value for safe start-up of the high-vacuum molecular pump 22, the control module or manual operation issues a command to open the pre-vacuum valve 25. At this time, the mechanical pump 21 becomes the pre-vacuum pump of the high-vacuum molecular pump 22, and the high-vacuum molecular pump 22 starts up, performing high-vacuum evacuation of the working chamber through the opened main evacuation valve 24. The setting of the pre-vacuum valve 25 protects the high-vacuum molecular pump 22, preventing it from being damaged by starting under excessively low or high pressure.

[0029] Optionally, in this embodiment, the quartz vacuum packaging equipment further includes a control module, which includes a controller 51 (e.g., a PLC) and an operation panel 52. The operation panel 52 is located on the surface of the housing 1 and connected to the built-in controller 51. The operation panel 52 is located on the surface of the equipment housing 1 to facilitate operation by personnel. The buttons on the operation panel 52 can send manual or electric control commands to the controller 51 for mode switching, such as manually opening a valve or starting a one-button automatic vacuuming program. The operation panel 52 can also be equipped with status indicator lights to display the operating status of the equipment in real time, such as whether the mechanical pump 21 is running, whether the high vacuum molecular pump 22 is moving, or whether the vacuum level meets the standard. The control logic is configured as follows: In manual mode, the operator can jog the valves and pumps; in one-button automatic mode, the controller 51 executes a preset program: opening the first valve 232 of the slow evacuation branch 231 to evacuate; when the Pirani gauge detects that the vacuum level reaches the first preset value, the controller 51 automatically opens the second valve 234 of the fast evacuation branch 233 to accelerate evacuation; when the full-range high vacuum gauge detects that the vacuum level reaches the molecular pump start preset value, the controller 51 opens the fore-stage valve 25, then starts the high vacuum molecular pump 22 and opens the corresponding main evacuation valve 24, while the mechanical pump 21 continues to work. The controller 51's configuration improves the automation and ease of operation of the equipment and reduces the risk of human error. The pipeline where the main evacuation valve 24 is located is equipped with automatic and manual inflation interfaces. After the quartz tube is encapsulated, inflation can be carried out in the pipeline manually or automatically controlled by the controller 51 to break the vacuum.

[0030] A method for quartz vacuum packaging based on the above-mentioned device specifically includes: S1: Workpiece clamping, select the work station, and fasten the quartz tube containing the sample to the rotating spindle 32 with a clamp. At this time, the shaft seal 34 and the magnetic fluid sealing device work together to ensure the chamber is sealed.

[0031] S2: Pre-vacuuming. Press the automatic start button on the operation panel 52. The controller 51 starts the mechanical pump 21 and only opens the first valve 232 of the slow pumping branch 231 of this station. The airflow is slowly discharged at a small flow rate, and the system smoothly enters the low vacuum state. When the reading of the Pirani gauge tube 41 reaches the first preset value, the controller 51 automatically opens the second valve 234 of the fast pumping branch 233, and the pumping speed is greatly increased, quickly evacuating the chamber.

[0032] S3: High vacuum extraction. When the Pirani gauge 41 detects that the vacuum level has reached the second preset value, the controller 51 automatically executes the following sequence: opening the pre-valve 25, starting the high vacuum molecular pump 22, and opening the main extraction valve 24 of this station. At this time, the high vacuum molecular pump 22 and the mechanical pump 21 work together to quickly extract the vacuum level in the cavity to the vacuum level required for packaging. This process is monitored by a full-range high vacuum gauge.

[0033] S4: Sealing Operation. After the operator observes the vacuum level stabilized using a full-range high-vacuum gauge, the quartz tube is heated with a high-temperature flame torch. Simultaneously, the handwheel is slowly and evenly rotated by hand to rotate the quartz tube, ensuring even heating. Once the glass softens, it is broken off with clamps and melted to seal, completing the encapsulation process.

[0034] The slow-then-fast evacuation process suppressed vibrations, ensuring the safety of the sample and the stability of the system before sealing; the phased and conditional activation of the high-vacuum molecular pump 22 protected the core equipment; and the combination of manual rotation and high-vacuum sealing ensured the quality of the fusion seal.

[0035] The embodiments described above merely illustrate implementation methods of the present invention, and while the descriptions are specific and detailed, they should not be construed as limiting the scope of the present invention. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of the present invention, and these all fall within the protection scope of the present invention. Therefore, the protection scope of this patent should be determined by the appended claims.

Claims

1. A quartz vacuum packaging device, characterized in that, include: The housing includes multiple sets of side-by-side work chambers for accommodating the quartz tubes to be processed. A vacuum generating system, connected to the work station chamber, includes a mechanical pump, a high-vacuum molecular pump, and a valve assembly pipeline. The outlet of the high-vacuum molecular pump is connected to the mechanical pump, and the high-vacuum molecular pump is connected to the work station chamber through the valve assembly pipeline. The valve assembly pipeline includes a pre-evacuation pipeline independently configured for each work station chamber. One end of the pre-evacuation pipeline is connected to the work station chamber, and the other end is connected to the inlet of the mechanical pump. Each pre-evacuation pipeline has a slow evacuation branch and a fast evacuation branch connected in parallel. The work processing module includes multiple workstations corresponding to the workstation chambers. Each workstation is provided with a device cavity, a rotating spindle, a manual rotation mechanism, and a shaft-holding seal. The device cavity is fixedly installed and has a spindle through hole inside. The rotating spindle is clamped and connected to a quartz tube and passes through the spindle through hole. The manual rotation mechanism is fixedly connected to the outer end of the rotating spindle, and the shaft-holding seal is fixedly installed at the spindle through hole and tightly fitted around the outer circumference of the rotating spindle.

2. The quartz vacuum packaging equipment according to claim 1, characterized in that, The workstation is also equipped with a magnetic fluid rotary sealing device, one end of which is fixedly connected to the equipment cavity, and the other end is sleeved on the outside of the rotating spindle.

3. The quartz vacuum packaging equipment according to claim 2, characterized in that, The magnetic fluid rotary sealing device includes a fixed section and a rotating section. The fixed section is connected to the equipment cavity and located outside the shaft seal. The rotating section is fixedly sleeved on the rotating main shaft to achieve dynamic sealing in the rotating state.

4. The quartz vacuum packaging equipment according to claim 1, characterized in that, The valve assembly pipeline also includes a main extraction valve for connecting the inlet of the high vacuum molecular pump to each of the working chambers. A first valve is provided on the slow extraction branch and a second valve is provided on the fast extraction branch.

5. A quartz vacuum packaging device according to claim 4, characterized in that, It also includes a vacuum measurement system, which includes a Pirani gauge tube and a full-range high vacuum gauge. The Pirani gauge tube is connected to the pre-evacuation line, and the full-range high vacuum gauge is connected to the inlet line of the high vacuum molecular pump.

6. The quartz vacuum packaging device according to claim 1, characterized in that, The vacuum generating system also includes a pre-stage valve, which is located on the pipeline between the mechanical pump and the high vacuum molecular pump and is configured to open when the vacuum level in the quartz tube reaches the preset start-up conditions of the high vacuum molecular pump, so that the high vacuum molecular pump starts up and enters the high vacuum pumping state.

7. A quartz vacuum packaging device according to claim 6, characterized in that, The device also includes a control module, which includes a controller and an operation panel. The operation panel is located on the surface of the housing and is connected to the built-in controller. The operation panel is equipped with buttons with status indicator lights, which are used to send manual electric control commands or one-button automatic vacuuming program start commands to the controller.

8. A quartz vacuum packaging method, using the quartz vacuum packaging equipment according to any one of claims 1-7, characterized in that, Includes the following steps: S1: Workpiece clamping, the quartz tube to be sealed is inserted into the selected station, and the chamber is sealed by the shaft seal and the magnetic fluid rotary sealing device; S2: Pre-vacuuming, start the mechanical pump, and perform low-speed vacuuming of the quartz tube through the slow-vacuuming branch; when the vacuum level reaches the first preset value, activate the fast-vacuuming branch to perform high-speed vacuuming. S3: High vacuum extraction. When the vacuum level reaches the second preset value suitable for starting the high vacuum molecular pump, start the high vacuum molecular pump and open the corresponding main pumping valve, while keeping the mechanical pump running until the vacuum level meets the requirements of the sealing process. S4: Tube sealing operation. Under high vacuum, the quartz tube is rotated by the manual rotating mechanism to make it heat evenly and then flame-melted to seal it.

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