Three-axis rotation rate sensor with sensor substrate, dual rotor, first spring structure and second spring structure

Abstract

The invention relates to a three-axis rotation rate sensor, comprising a sensor substrate having a main extension plane which spreads through an X-axis and a Y-axis which is perpendicular to the X-axis, a Z-axis which is oriented perpendicular to the main extension plane, a dual-rotation body having a first rotation body and a second rotation body, and a first spring structure and a second spring structure, the first rotating body is provided with a first vibration mass block and a second vibration mass block, the second rotating body is provided with a third vibration mass block and a fourth vibration mass block, the first rotating body is connected with the sensor substrate through a first substrate connecting part, and the second rotating body is connected with the sensor substrate through a second substrate connecting part. The first rotating body is connected with the second rotating body through a first spring structure, so that first mechanical coupling is formed between the first rotating body and the second rotating body, and the vibration mass blocks of the first rotating body and the second rotating body are connected with each other through a second spring structure; and second mechanical coupling is formed between the vibration mass blocks of the first rotating body and the second rotating body and the first rotating body and the second rotating body.

Description

Technical Field

[0001] The present invention relates to a rotation rate sensor having a first rotating body, a second rotating body and a sensor substrate. Background Technology

[0002] Modern micromechanical rotational rate sensor assemblies (see DE 10 2020 205 372 A1 and DE 102021 200483A1) have two rotating mass blocks arranged in a plane, which are mechanically coupled by a bridging section. Summary of the Invention

[0003] The objective of this invention is to provide a triaxial rotational rate sensor comprising a sensor substrate, a dual rotating body, a first spring structure, and a second spring structure. This triaxial rotational rate sensor has the following advantages: The triaxial rotational rate sensor according to the invention (hereinafter also referred to as a rotational rate sensor) includes a sensor substrate, a dual rotating body having a first rotating body and a second rotating body, and a first spring structure and a second spring structure. Compared with the prior art, this sensor has the following advantages: it is robust and insensitive to rotational acceleration about all three spatial axes, and simultaneously accommodates a significantly thicker and thus stronger and more fracture-resistant spring structure for mechanical coupling, resulting in a lower failure rate.

[0004] The measurement of rotational speeds about three spatial axes (X-axis, Y-axis, and Z-axis) is achieved by measuring the shift in the detection mode of the rotational speed sensor. The detection mode excited by rotation about the X-axis is hereinafter referred to as the "X-detection mode." The detection mode excited by rotation about the Y-axis is hereinafter referred to as the "Y-detection mode." The detection mode excited by rotation about the Z-axis is hereinafter referred to as the "Z-detection mode." The resulting measurement channels for rotational speeds about the three spatial axes are hereinafter referred to as the "X-channel," "Y-channel," and "Z-channel."

[0005] Advantageous configurations and extensions of the invention are given below.

[0006] According to an advantageous configuration of the invention, the rotational rate sensor has a first spring structure and / or a second spring structure, the spring structure being made of and / or disposed in a polycrystalline silicon layer produced by epitaxial growth, wherein the polycrystalline silicon layer has a thickness between 10 μm and 100 μm.

[0007] According to another advantageous configuration of the invention, the first spring structure and the second spring structure are arranged in such a way that, when viewed from a direction axis oriented perpendicular to the main extension plane of the sensor substrate, the first spring structure and the second spring structure do not intersect at any position.

[0008] According to another advantageous configuration of the invention, the first spring structure and the second spring structure are arranged in such a way that, when viewed from a direction axis oriented perpendicular to the main extension plane of the sensor substrate, the first spring structure and the second spring structure do not obstruct each other at any position.

[0009] According to another advantageous configuration of the invention, the first spring structure is arranged in such a way that it extends outside the rotational rate sensor.

[0010] According to another advantageous configuration of the invention, the mechanical coupling of the Z-detection mode is achieved internally through the center of the sensor.

[0011] According to another advantageous configuration of the invention, the base connection of the rotation rate sensor, particularly the base connection of the second spring structure, is arranged at the center of the sensor. This causes a smaller change in differential length when the sensor base on which it is based deforms or expands, thereby resulting in a smaller change in sensitivity and offset when external environmental conditions change.

[0012] According to another advantageous configuration of the invention, the first spring structure couples the drive motion and the X-detection motion by means of a U-shaped spring element, thereby forming an antiparallel drive mode and an antiparallel detection mode for the X-channel.

[0013] According to another advantageous configuration of the invention, mechanical coupling of the Y-detection mode is achieved by a second spring structure implemented as a torsion pendulum structure.

[0014] According to another advantageous configuration of the invention, the rotating body can be moved out of the plane by means of a base connection arranged on the axis of symmetry of the rotation rate sensor.

[0015] According to another advantageous configuration of the invention, mechanical coupling of the Z-detection mode is formed by a second spring structure.

[0016] According to another advantageous configuration of the invention, the second spring structure has at least one first spring element, preferably four spring elements, which are implemented as S-shaped springs, thereby enabling motion in the drive mode and transmitting the radial motion of the vibrating mass block in the rotating body to the second spring structure, especially the torsion structure.

[0017] According to another advantageous configuration of the invention, when viewed from a direction axis perpendicular to the main extending plane orientation of the sensor base, a vibrating mass block located in one half of the rotation rate sensor is coupled to a vibrating mass block located in the other half of the rotation rate sensor via at least one second spring element implemented as an H-shaped spring. Here, the boundary line between the half and the other half extends along an axis extending through the center point of the first base connection and the second base connection of the rotating body.

[0018] According to another advantageous configuration of the invention, the sensor substrate is a microelectromechanical system (MEMS) substrate. Attached Figure Description

[0019] Embodiments of the invention are shown in the accompanying drawings and described in detail in the following description.

[0020] Figure 1 A schematic top view of a triaxial rotational rate sensor according to a first embodiment of the present invention, and three detailed views of the spring element of the first embodiment.

[0021] Figure 2 : A schematic top view of the driving mode of a three-axis rotational rate sensor according to a first embodiment of the present invention.

[0022] Figure 3a : A schematic diagram of the detection mode of a triaxial rotational rate sensor according to the first embodiment of the present invention, which is excited by rotation about the X-axis.

[0023] Figure 3b : A schematic diagram of the detection mode of a triaxial rotational rate sensor according to the first embodiment of the present invention, which is excited by rotation about the Y-axis.

[0024] Figure 3c : A schematic diagram of the detection mode of a triaxial rotational rate sensor according to the first embodiment of the present invention, which is excited by rotation about the Z-axis.

[0025] In different accompanying drawings, the same parts are always given the same reference numerals, so they are usually described or mentioned only once. Detailed Implementation

[0026] Figure 1A schematic diagram of a triaxial rotational rate sensor 10 according to a first embodiment of the present invention is shown. The illustrated triaxial rotational rate sensor 10 allows for the simultaneous determination of rotational rates, i.e., angular velocities, about three orthogonal spatial axes (X-axis, Y-axis, and Z-axis). The illustrated rotational rate sensor 10 can be fabricated, for example, from silicon or silicon oxide or other semiconductor materials, or oxide or oxide ceramics, using physical vapor deposition, chemical vapor deposition, and various etching processes. A dual rotating body 1 is shown, comprising a first rotating body 1.1 and a second rotating body 1.2. The first rotating body 1.1 is connected to a substrate via a first substrate connection portion 2.1, and the second rotating body 1.2 is connected to the substrate via a second substrate connection portion 2.2 (in the top view, the silicon substrate is located below the dual rotating bodies), thereby providing the required spacing from the silicon substrate for both the drive mode and the probe mode. The silicon substrate has a main extending plane 11, which is oriented parallel to the observation plane shown. The connections between the rotating bodies 1.1 and 1.2 and the base connecting portions 2.1 and 2.2 are formed by two bridging portions, which are configured in such a way that they enable the detection mode of the rotation rate sensor 10 (see...). Figure 3a , Figure 3b and Figure 3c The rotational vibration of the rotational body 10 is also shown. Furthermore, four empty areas 9 are shown in the first rotating body 1.1 and the second rotating body 1.2, these empty areas being configured to house the drive comb teeth of the rotational rate sensor 10. The structural configuration and arrangement of the drive comb teeth enable the two rotating bodies 1.1 and 1.2 to generate rotational vibrations, wherein the axes of rotation of these rotational vibrations are perpendicular to the observation plane. The first vibrating mass block 6.1 and the second vibrating mass block 6.2 of the first rotating body 1.1, and the third vibrating mass block 6.3 and the fourth vibrating mass block 6.4 of the second rotating body 1.2 are also shown. The vibrating mass blocks 6.1, 6.2, 6.3, and 6.4 are mechanically connected to the first rotating body 1.1 or the second rotating body 1.2 via two U-shaped spring elements and are used to enable the detection of the rotational rate about the Z-axis. A first spring structure 3 including U-shaped spring elements is also shown. The first spring structure 3 extends at the outer edge of the dual rotating bodies 1 and couples the driving mode of the rotation rate sensor 10 with the detection mode about the X-axis in such a way that the driving excitation of the rotating bodies 1.1 and 1.2 produces anti-phase rotational vibrations (also known as anti-parallel driving modes), wherein the axes of rotation of these rotational vibrations are perpendicular to the orientation of the observation plane. Furthermore, this coupling also causes the detection mode, excited by rotation about the X-axis, to have anti-phase rotational vibrations of the rotating bodies 1.1 and 1.2 about two rotational axes (also known as anti-parallel detection modes of the X-axis), which are parallel to the Y-axis and extend through the first base connection 2.1 and the second base connection 2.2 (see...). Figure 3aThe second spring structure 4 is also shown. This second spring structure is configured as a torsion pendulum structure and is connected to the underlying silicon substrate on the axis of symmetry of the rotation rate sensor 10 via a third base connection 5.1 and a fourth base connection 5.2. This connection structure is configured in such a way that the rotating body can move out of the plane. The second spring structure 4 is used on the one hand to couple the detection mode rotating about the Y-axis with the drive mode, and on the other hand, it serves as a pendulum structure to couple the detection mode excited by rotation about the Z-axis with the drive mode (see [link]). Figure 3c For this purpose, the second spring structure 4 has a first spring element 8, which is implemented as an S-shaped spring. The first spring element 8 enables mechanical connection with the vibrating masses 6.1, 6.2, 6.3, and 6.4. This mechanical connection allows the vibrating masses 6.1, 6.2, 6.3, and 6.4 to deflect during driven motion and transmits their radial motion to the second spring structure 4. A second spring element 7, implemented as an H-shaped spring, is also shown and is used to mechanically couple the first vibrating mass 6.1, the third vibrating mass 6.3 with the second vibrating mass 6.2, and the fourth vibrating mass 6.4. This mechanical coupling allows for torsional motion of the dual rotating bodies 1 and simultaneously enables lateral motion for detecting the rotational rate about the Z-axis.

[0027] Figure 2 A schematic top view showing the driving mode of the rotation rate sensor 10 according to a first embodiment of the present invention. Two rotating bodies 1.1 and 1.2 (see...) Figure 1 The components are excited to produce rotational vibrations, wherein the axes of rotation of these rotational vibrations are perpendicular to the plane of observation and extend through the center point of the first base connection 2.1 and the second base connection 2.2 (see [reference]). Figure 1 In the rotational motion shown, the U-shaped spring element of the first spring structure 3 (see...) Figure 1 It is elastic and is designed such that the driving mode shown has two counter-rotating vibrations of rotating bodies 1.1 and 1.2.

[0028] Figure 3a A schematic diagram showing the detection mode of a triaxial rotational rate sensor 10 according to a first embodiment of the present invention, excited by rotation about the X-axis. A first spring structure 3 extending from the outer edge of the dual rotating bodies 1 (see...) Figure 1 This forms a mechanical coupling, through which rotation about the X-axis (see...) Figure 1 The excitation detection mode has anti-phase rotational vibrations of rotating bodies 1.1 and 1.2 about two rotational axes (also known as the anti-parallel detection mode of the X-axis), where these two rotational axes are parallel to the Y-axis (see...). Figure 1It extends through the first base connection 2.1 and the second base connection 2.2. In this detection mode, the rotational acceleration about the Y-axis caused by the mechanical coupling of the first spring structure 3 does not affect the measurement of the rotational rate about the X-axis.

[0029] Figure 3b This illustrates a triaxial rotational rate sensor 10 according to a first embodiment of the present invention, passing around the Y-axis (see [reference]). Figure 1 A schematic diagram of the detection mode of rotational excitation. This is achieved through a second spring structure 3 extending via the center of the sensor (see...). Figure 1 A mechanical coupling is formed, through which the force is generated around the Y-axis (see...). Figure 1 The rotational excitation detection mode has rotating bodies 1.1 and 1.2 extending about an X-axis passing through the first base connection 2.1 and the second base connection 2.2 (see...). Figure 1 The reverse rotational vibration generated by the second spring structure 4. In this detection mode, the rotational acceleration about the X-axis caused by the mechanical coupling of the second spring structure 4 (which causes the rotating body to shift out of phase) does not affect the measurement of the rotational rate about the Y-axis.

[0030] Figure 3c This illustrates a triaxial rotational rate sensor 10 according to a first embodiment of the present invention, passing around the Z-axis (see...). Figure 1 A schematic diagram of the detection mode of rotational excitation. This is achieved through a second spring structure 4 extending via the center of the sensor (see...). Figure 1 This forms a mechanical coupling, through which the force is generated around the Z-axis (see...). Figure 1 The detection mode of the rotational excitation has lateral motion of vibrating masses 6.1, 6.2, 6.3, and 6.4. Two vibrating masses 6.1 and 6.4 are in the motion phase shown and under the assumption that... Figure 1 In the case of the coordinate system introduced in the diagram, the Z-coordinate is negative, while the vibrating mass blocks 6.2 and 6.3 are in the positive Z-coordinate. The rotational rate around the Z-axis can be derived from the lateral displacement of the vibrating mass blocks 6.1, 6.2, 6.3, and 6.4 due to motion, for example, using a capacitance measurement method or a differential capacitance measurement method.

[0031] This invention is not limited to the embodiments described above, but can be used in various application scenarios such as navigation, orientation, and stabilization based on inertial sensors. The computing unit within the sensor can control the operation of the inertial sensor (e.g., energy-saving mode, measurement range, etc.), verify the rationality of sensor signals, and perform functions such as tolerance checks (e.g., for internal sensor monitoring), signal processing (e.g., calculating orientation or direction, filtering data), and selection of communication protocols. Various algorithms (including self-learning artificial intelligence algorithms) can be used in the computing unit to analyze, evaluate, and process data from inertial sensors, temperature sensors, and external data (e.g., Global Positioning System (GPS) data, odometer data). The following are exemplary application areas:

[0032] - Automotive applications (e.g., Electronic Stability Program (ESP), rollover sensing, airbags, road noise suppression, anti-theft alarm systems, parking collision warning, road condition monitoring);

[0033] - Applications in two-wheeled vehicles such as motorcycles, bicycles, and scooters (e.g., Electronic Stability Program (ESP) / airbags, tilt detection, dynamic balance adjustment);

[0034] - Applications of three-wheeled vehicles, such as tuk-tuks;

[0035] - In the field of avionics (e.g., in flight stability and flight control);

[0036] - Industrial robot applications (e.g., excavator bucket position control, drilling operations, image stabilization, flight control, satellite antenna orientation, and fine motion control during robot grasping);

[0037] - Applications for home and gardening (e.g., lawnmower navigation, door position monitoring);

[0038] - Medical applications (e.g., fall detection, motion and posture detection);

[0039] - Sports and leisure applications (e.g., motion recognition, posture recognition (in the case of golf clubs, tennis rackets, skis); and

[0040] - Numerous consumer electronics applications (such as in smartphones, tablets, wearable devices, audio devices, drones, game toys, augmented reality (AR) or virtual reality (VR) devices).

[0041] Furthermore, various configurations, modifications, adjustments, variations, and implementation methods can be achieved, all of which fall within the scope of this invention.

Claims

1. A triaxial rotation rate sensor (10) comprising a sensor substrate, a double rotor (1) and a first spring structure (3) and a second spring structure (4), wherein, The sensor base has a main extension plane (11), wherein the main extension plane (11) is developed by an X-axis and a Y-axis oriented perpendicular to the X-axis, wherein a Z-axis is oriented perpendicular to the main extension plane, wherein the double rotor has a first rotor (1.1) and a second rotor (1.2), wherein the first rotor (1.1) has a first vibration mass (6.1) and a second vibration mass (6.2), wherein the second rotor (1.2) has a third vibration mass (6.3) and a fourth vibration mass (6.4), wherein the first rotor is connected with the sensor base by a first base connection (2.1), wherein the second rotor is connected with the sensor base by a second base connection (2.2), wherein the first rotor (1.1) is connected with the second rotor (1.2) by the first spring structure (3) such that a first mechanical coupling between the first rotor (1.1) and the second rotor (1.2) is formed, wherein the vibration masses (6.1, 6.2, 6.3, 6.4) of the first and second rotor are connected with each other by the second spring structure (4) such that a second mechanical coupling between the vibration masses (6.1, 6.2, 6.3, 6.4) of the first and second rotor and the first rotor (1.1) and the second rotor (1.2) is formed, characterized in that the first spring structure (3) is arranged offset with respect to the second spring structure (4) such that a first projection plane formed by a perpendicular projection of the first spring structure (3) onto the main extension plane (11) has no common point with a second projection plane formed by a perpendicular projection of the second spring structure (4) onto the main extension plane (11).

2. The triaxial rate-of-rotation sensor (10) according to claim 1, characterized in that The first mechanical coupling is a mechanical coupling between a drive mode of the double rotor (1) and a first detection mode of the three-axis rotation rate sensor (10), wherein in the drive mode the rotors (1.1, 1.2) perform anti-phase rotational vibrations, wherein the rotational axes of the anti-phase rotational vibrations are oriented parallel to the second axis, in particular the Z-axis, wherein the first detection mode can be excited by a rotation about the first axis, in particular the X-axis.

3. The triaxial rate of rotation sensor (10) according to any one of the preceding claims, characterized in that The second mechanical coupling is a mechanical coupling of a second detection mode and / or a third detection mode, wherein the second detection mode can be excited by a rotation about the second axis, in particular the Z-axis, and / or the third detection mode can be excited by a rotation about the third axis, in particular the Y-axis.

4. The triaxial rate of rotation sensor (10) according to any one of the preceding claims, characterized in that The second spring structure (4) has at least one first spring element (8), in particular an S-shaped spring element, by means of which at least one of the oscillation masses (6.1, 6.2, 6.3, 6.4) is connected to the second spring structure, wherein the at least one first spring element (8) allows the movement of the drive mode and transmits the radial movement of the at least one oscillation mass (6.1, 6.2, 6.3, 6.4) to the second spring structure (4).

5. The triaxial rate of rotation sensor (10) according to any one of the preceding claims, characterized in that The second spring structure (4) has at least one second spring element (7), in particular an H-shaped spring element, by means of which the first oscillation mass (6.1) or the third oscillation mass (6.3) is coupled to the second oscillation mass (6.2) or the fourth oscillation mass (6.4), wherein a torsional movement and a lateral movement, in particular a lateral movement of the probe mode, which can be excited by a rotation about the Z axis, can be realized by means of the at least one second spring element (7).

6. The triaxial rate of rotation sensor (10) according to any one of the preceding claims, characterized in that The first spring structure (3) is arranged substantially at the outer edge of the double rotor (1).

7. The triaxial rate of rotation sensor (10) according to any one of the preceding claims, characterized in that The second spring structure (4) is arranged substantially in the center of the double rotor (1).

8. The triaxial rate of rotation sensor (10) according to any one of the preceding claims, characterized in that The second spring structure (4) comprises a torsional pendulum structure.

9. The triaxial rate of rotation sensor (10) according to any one of the preceding claims, characterized in that The first spring structure (3) and / or the second spring structure (4) are made of an epitaxially grown polycrystalline semiconductor layer, preferably a silicon layer, and / or preferably have a layer thickness of at least 1.8 pm, preferably 30 pm.

10. The triaxial rate of rotation sensor (10) according to any one of the preceding claims, characterized in that The first spring structure (3) has a U-shaped spring element.

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