Ultrafast laser welding method and system

Abstract

The invention relates to the technical field of laser welding, in particular to an ultrafast laser welding method and system.The method comprises the steps that a first transparent inorganic material piece and a second inorganic material piece are stacked to form a to-be-welded interface; gas with specific pressure is blown to the to-be-welded area through a nozzle, so that the first transparent inorganic material piece and the second transparent inorganic material piece are locally attached to the corresponding area; and meanwhile, an ultrafast laser beam is focused on the to-be-welded area, the material is driven to move along a preset track relative to the laser beam, and welding in the local attaching state is achieved. The method does not need to depend on a complex mechanical jig or overall pressing, the gap between the materials is locally and dynamically reduced at the laser action point only through air pressure, the defect that the interface gap requirement is difficult to meet the limitation on ultrafast laser welding is effectively overcome, and high-quality welding with high strength and low heat influence can be conveniently achieved.

Description

Technical Field

[0001] This application relates to the field of laser welding technology, and in particular to an ultrafast laser welding method and system. Background Technology

[0002] Transparent inorganic materials (such as glass, quartz, sapphire, transparent ceramics, etc.) are widely used in optoelectronics, semiconductor packaging, biomedicine, precision instruments and consumer electronics due to their excellent optical transmittance, chemical stability and mechanical strength. Reliable and clean connection technology is crucial for them.

[0003] Currently, the joining of transparent inorganic materials mainly employs adhesive bonding or laser welding. While adhesive bonding is simple to operate, it suffers from inherent drawbacks such as low joint strength, poor high-temperature resistance, and organic residue contamination, making it difficult to meet the demands of high-reliability applications. Traditional continuous wave or long-pulse laser welding, due to its large heat input, easily generates thermal stress within the material, leading to cracking, deformation, or degradation of optical properties.

[0004] Ultrafast laser welding utilizes a nonlinear absorption mechanism to achieve localized energy deposition within materials, significantly reducing the heat-affected zone and enabling high-precision, glue-free, and high-strength direct bonding, making it particularly suitable for welding dissimilar transparent inorganic materials. However, this technology is extremely sensitive to the initial gap at the welding interface—typically requiring the gap to be controlled at the micrometer level or even to achieve optical contact (<λ / 4, where λ is the laser wavelength); otherwise, it is difficult to trigger effective nonlinear absorption and fusion bonding.

[0005] To meet these stringent bonding requirements, existing processes generally rely on high-flatness substrates combined with complex mechanical fixtures to apply overall clamping force. This approach is not only costly and cumbersome in terms of equipment and clamping, but also lacks versatility, making it difficult to achieve adequate interface bonding in welding large-area, curved, or irregularly shaped transparent inorganic materials. Furthermore, while alternative solutions such as liquid filling, pre-melting assistance, or two-step welding can alleviate gap problems, they easily introduce impurities, causing surface contamination or damage, severely affecting the optical quality, airtightness, and long-term reliability of the weld.

[0006] Therefore, in the ultrafast laser welding process, how to effectively reduce the local gap at the welding interface and improve the welding quality without relying on complex mechanical fixtures is a technical problem that urgently needs to be solved in this field. Summary of the Invention

[0007] The main objective of this application is to provide an ultrafast laser welding method and system, which aims to solve the technical problem of how to reduce the gap between the welding interface and improve the welding quality in real time and effectively without relying on complex mechanical fixtures during the ultrafast laser welding process.

[0008] To achieve the aforementioned objectives, the first aspect of this application proposes an ultrafast laser welding method, comprising: The first transparent inorganic material component to be welded and the second inorganic material component are stacked to form the interface to be welded. Gas with sufficient pressure to cause the first transparent inorganic material component and the second inorganic material component to be locally bonded together in the area to be welded is blown through a nozzle onto the area to be welded in the interface to be welded. An ultrafast laser beam is focused on the area to be welded, while the first transparent inorganic material component and the second inorganic material component are driven to move relative to the ultrafast laser beam along a preset trajectory, so that the ultrafast laser beam welds the area to be welded in a partially fitted state.

[0009] Furthermore, the pressure of the gas is 0.2 MPa to 3 MPa.

[0010] Furthermore, the gas is filtered and dried compressed air or nitrogen.

[0011] Furthermore, the nozzle is arranged coaxially or off-axis with the ultrafast laser beam.

[0012] Furthermore, before stacking the first transparent inorganic material component and the second inorganic material component, the surfaces of the first transparent inorganic material component and the second inorganic material component are cleaned and dried.

[0013] A second aspect of this application provides an ultrafast laser welding system for implementing the method described in any of the foregoing claims, comprising: Ultrafast lasers are used to output ultrafast laser beams. An optical transmission and focusing unit is disposed on the light output path of the ultrafast laser and is used to transmit and focus the ultrafast laser beam to the area to be welded. The nozzle is configured to blow gas toward the area to be welded at a pressure sufficient to cause the stacked first transparent inorganic material piece and the second inorganic material piece to be locally bonded together in the area to be welded; A motion platform is used to carry the first transparent inorganic material component and the second inorganic material component, and drive them to move relative to the ultrafast laser beam along a preset trajectory to weld the area to be welded in the partially bonded state.

[0014] Furthermore, the optical transmission and focusing unit includes an optical transmission unit and an optical focusing unit arranged sequentially along the optical path propagation direction.

[0015] Furthermore, the nozzle is coaxially arranged with the optical focusing unit, so that the ultrafast laser beam passes through the central channel of the nozzle and is focused on the area to be welded.

[0016] Furthermore, the nozzle may be arranged in a paraxial manner on the side of the optical focusing unit, with its exhaust direction facing the focusing area of ​​the ultrafast laser beam.

[0017] Furthermore, the optical transmission unit includes a beam expander and a reflector arranged sequentially along the optical path propagation direction, and the optical focusing unit includes a focusing lens.

[0018] Furthermore, the nozzle is connected to a pressure-adjustable gas source to adjust the gas output pressure to a value sufficient to allow the first transparent inorganic material component and the second inorganic material component to be locally bonded in the area to be welded.

[0019] Beneficial effects This method solves the problem of achieving sufficient interface adhesion in existing ultrafast laser welding by simultaneously blowing gas with sufficient pressure to locally bond the inorganic materials to be welded into the welding area during ultrafast laser welding. Laser welding is then performed under this locally bonded state. This method eliminates the need for complex mechanical fixtures to apply overall clamping force, achieving dynamic interface adhesion at the laser's point of application, thus ensuring effective triggering of nonlinear absorption and the formation of fusion bonding. Furthermore, since the bonding effect is limited to the welding area, it avoids the risk of stress concentration or deformation caused by applying external force to the entire workpiece, making it particularly suitable for welding large-area or highly brittle transparent inorganic materials. This method significantly simplifies the clamping process, improves the adaptability and reliability of the welding process, and achieves high-quality, pollution-free direct bonding. Attached Figure Description

[0020] Figure 1 This is a schematic flowchart of an ultrafast laser welding method according to an embodiment of this application; Figure 2 This is a schematic block diagram of an ultrafast laser welding system according to an embodiment of this application; Figure 3 This is a schematic diagram of the interference fringe effect under a specified blowing pressure according to an embodiment of this application. Among them, 1. Ultrafast laser; 2. Ultrafast laser beam; 3. Beam expander; 4. Reflector; 5. Focusing lens; 6. Nozzle; 7. First transparent inorganic material component; 8. Second inorganic material component; The realization of the purpose, functional features and advantages of this application will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation

[0021] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the scope of this application.

[0022] Those skilled in the art will understand that, unless specifically stated otherwise, the singular forms “a,” “an,” “the,” and “the” used herein may also include the plural forms. It should be further understood that the term “comprising” as used in this specification means the presence of features, integers, steps, operations, elements, modules, and / or components, but does not exclude the presence or addition of one or more other features, integers, steps, operations, elements, modules, components, and / or groups thereof. It should be understood that when an element is referred to as “connected” or “coupled” to another element, it may be directly connected or coupled to the other element, or there may be intermediate elements. Furthermore, “connected” or “coupled” as used herein may include wireless connection or wireless coupling. The term “and / or” as used herein includes all or any modules and all combinations of one or more associated listed items.

[0023] It will be understood by those skilled in the art that, unless otherwise defined, all terms used herein (including technical and scientific terms) have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. It should also be understood that terms such as those defined in general dictionaries should be understood to have the same meaning as in the context of the prior art, and should not be interpreted in an idealized or overly formal sense unless specifically defined as herein.

[0024] Reference Figure 1 This invention provides an ultrafast laser welding method, comprising steps S1-S3: S1. Stack the first transparent inorganic material component 7 and the second inorganic material component 8 to be welded to form the interface to be welded. S2. Gas with sufficient pressure to cause the first transparent inorganic material component 7 and the second inorganic material component 8 to partially adhere to the welding area in the interface to be welded is blown through nozzle 6. S3. Focus the ultrafast laser beam 2 on the area to be welded, and simultaneously drive the first transparent inorganic material component 7 and the second inorganic material component 8 to move relative to the ultrafast laser beam 2 along a preset trajectory, so that the ultrafast laser beam 2 welds the area to be welded in a partially fitted state.

[0025] As described in step S1, the first transparent inorganic material component 7 and the second inorganic material component 8 to be welded are stacked to form the interface to be welded. The first transparent inorganic material component 7 and the second inorganic material component 8 can be selected from materials transparent to the laser wavelength used, such as glass, quartz, sapphire, or transparent microcrystalline ceramics. The second inorganic material component 8 can also be a material opaque to the laser wavelength used, such as metal or semiconductor. When the second inorganic material component 8 is transparent to the laser wavelength used, the ultrafast laser beam 2 can be focused onto the interface to be welded through either the first transparent inorganic material component 7 or the second inorganic material component 8. When the second inorganic material component 8 is opaque to the laser wavelength used, the ultrafast laser beam 2 is focused onto the interface to be welded through the first transparent inorganic material component 7. The specific material selection depends on the application scenario's requirements for mechanical, optical, or chemical properties; correspondingly, the material thickness and mechanical, optical, or chemical properties will vary depending on the material and processing technology, typically ranging from 0.1 mm to 5 mm in thickness. For example, optical-grade borosilicate glass sheets with a thickness of 1.0 mm are selected as the first transparent inorganic material component 7 and the second inorganic material component 8. After cleaning and drying, they are naturally stacked in a planar-planar manner and simply fixed on the platform of the motion platform to avoid relative displacement between the first and second materials during platform movement. However, no external mechanical clamping force is applied, allowing for local micron-level gaps at the interface due to surface roughness or slight warping. This stacking method simulates the non-ideal contact state in actual industrial assembly. This step provides the initial physical conditions for subsequent local bonding and laser welding. Its advantage lies in the elimination of high-flatness substrates or complex fixtures, significantly reducing the cost of pre-processing, and truly reflecting the technical bottleneck to be solved—that is, how to achieve effective welding under non-ideal initial interfaces.

[0026] As described in step S2, a gas with sufficient pressure to partially bond the first transparent inorganic material component 7 and the second inorganic material component 8 to the area to be welded is blown through the nozzle 6 into the area to be welded. The gas type can be compressed air, nitrogen, or an inert gas. The inner diameter and outlet direction of the nozzle 6 can be adjusted according to the material stiffness, thickness, and expected bonding area size; for example, the inner diameter can range from 0.1 mm to 3.0 mm. The gas pressure needs to be dynamically set according to the material's elastic modulus, thickness, and initial interface gap, for example, from 0.2 MPa to 3 MPa. In this embodiment, for example, a copper conical nozzle 6 with an inner diameter of 1.0 mm (the material can be selected according to the actual situation) is used and installed next to the optical focusing unit, with the air outlet facing the area to be welded; the gas used is compressed air treated by a 0.3 μm filter and a drying device; when the gas pressure is set to 1.5 MPa, the airflow forms a local positive pressure in the area to be welded, overcoming the material's own weight and insufficient interfacial van der Waals forces, causing the upper and lower materials to undergo elastic deformation and fit tightly together in an area with a diameter of about 200 μm, reducing the gap to the submicron level. This step achieves "on-demand bonding" through pneumatic action, dynamically establishing the interface conditions required for welding only at the location where the laser is about to act, avoiding uneven gaps or workpiece damage caused by overall pressing, and providing the necessary physical prerequisites for ultrafast laser-triggered nonlinear absorption and interfacial fusion.

[0027] As described in step S3, the ultrafast laser beam 2 is focused on the area to be welded, while the first transparent inorganic material component 7 and the second inorganic material component 8 are driven to move relative to the ultrafast laser beam 2 along a preset trajectory, so that the ultrafast laser beam 2 welds the area to be welded in a partially contacted state. The laser parameters (including wavelength, pulse width, repetition frequency, and number of sub-pulses) and processing speed need to be matched and adjusted according to the material type, thickness, and required weld width and depth; for example, the pulse width range is 100 fs to 10 ps, ​​the wavelength is 355 nm to 1550 nm, and the scanning speed is 0.1 mm / s to 500 mm / s. In this embodiment, a solid-state ultrafast laser 1 with a center wavelength of 1030 nm, a pulse width of 700 fs, and a repetition frequency of 200 kHz is used. After the laser beam passes through an optical transmission and focusing unit composed of a beam expander 3, a reflector 4, and a focusing lens 5, the focused spot diameter is approximately 3 μm, with the focal point located near the interface between the two materials. The motion platform moves the stacked materials synchronously at a speed of 30 mm / s according to a preset straight or curved trajectory, ensuring that the laser focus always acts on the locally bonded area after gas compression. In this state, the laser energy causes localized melting of the materials on both sides of the interface to be welded, forming a continuous, pore-free weld after cooling. This step achieves spatiotemporal synchronization of gas pressure bonding and laser welding, ensuring that effective connection occurs only in areas that meet the bonding conditions, thereby obtaining a highly reliable welding result with low thermal impact without relying on contact fixture compression.

[0028] In one embodiment, the pressure of the gas is 0.2 MPa to 3 MPa.

[0029] In the ultrafast laser welding of transparent inorganic materials, gas pressure is a key process parameter determining whether effective local bonding of the interface can be achieved. If the pressure is too low, it is insufficient to overcome the micron-level gaps caused by the rigid surface roughness and insufficient van der Waals forces of the material, preventing the materials on both sides of the interface from melting and forming a high-strength weld joint after solidification. If the pressure is too high, it may cause material slippage, vibration, edge warping, or even brittle cracking. Furthermore, the strong gas flow may disturb the optical path or cause surface contamination. Therefore, it is necessary to determine a pressure window that ensures bonding effectiveness while avoiding negative effects.

[0030] Preferably, the gas pressure is between 0.2 MPa and 3 MPa. This range is suitable for various transparent inorganic materials (such as glass, quartz, sapphire, transparent ceramics, etc.). This range ensures that, without relying on external fixtures, the gap can be reduced to the micrometer or even sub-micrometer level by dynamically inducing local interface bonding through airflow, thus meeting the stringent requirements of ultrafast laser welding for interface gaps. Figure 3 This is a schematic diagram of the interference fringe changes. It shows that under air pressure ranging from 0.2 MPa to 3 MPa, the interference fringes in the central area covered by nozzle 6 disappear, indicating that the interface has achieved tight adhesion and the surface of the material to be welded is smooth, without any negative effects on weld integrity such as surface impact marks or microcracks. (Refer to...) Figure 3 This illustrates that within this range, the gas can effectively overcome the initial gaps between transparent inorganic materials, allowing them to form a localized bond in the area to be welded. Combined with real-time welding, this can effectively overcome the limitations of ultrafast laser welding caused by the difficulty in meeting interface gap requirements.

[0031] In one embodiment, the gas is filtered and dried compressed air or nitrogen.

[0032] To prevent the introduction of particulate contaminants, water vapor, or oil vapors during welding, which could contaminate the welding materials or the surface of focusing optics and cause laser absorption or scattering, the gas used must be purified and dried. After purification, the gas is delivered to nozzle 6 via a gas storage tank and pipeline. Gas pressure and flow rate control further prevents fluctuations in blowing pressure and flow rate from affecting bonding stability. (Refer to...) Figure 2 The display shows that the gas path system is integrated beside the laser head. This gas purification and application strategy effectively ensures the cleanliness and stability of the gas, while being compatible with auxiliary gas solutions commonly used in industrial laser cutting equipment, demonstrating good practicality.

[0033] In one embodiment, the nozzle 6 is arranged coaxially or off-axis with the ultrafast laser beam 2.

[0034] The coaxial arrangement means that the central channel of nozzle 6 coincides with the propagation axis of the ultrafast laser beam 2, causing the gas to be blown towards the focal point in the forward direction of laser propagation. Structurally, nozzle 6 is designed as a hollow rotating body with polished inner walls to reduce turbulence; the ultrafast laser beam 2 passes through focusing lens 5, through the internal cavity of nozzle 6, through the first transparent inorganic material component 7, and finally focuses near the interface of the materials to be welded. This arrangement ensures that the center of the airflow is completely aligned with the laser propagation axis, and the bonding effect is precisely applied to the energy deposition area without offset or delay. (Refer to...) Figure 2 The coaxial integrated structure is clearly demonstrated: the laser beam enters from above, passes through the beam expander 3 and the reflector 4, and then enters the inner cavity of the nozzle 6, finally being focused by the bottom focusing mirror 5; compressed gas enters the annular cavity from the side wall inlet of the nozzle 6, and then is ejected vertically downward from the central channel. This design not only simplifies the optical path and nozzle 6 alignment, but also avoids the refraction disturbance of the beam caused by the off-axis airflow, making it particularly suitable for high-precision micro-welding scenarios. The coaxial configuration enables the gas pressure action and laser action to be highly synchronized in space and time, maximizing local bonding efficiency, and is one of the core structures for achieving stable welding. In the off-axis setting, the optical focusing unit is independently mounted on the laser head support, while the nozzle 6 is fixed to its side by an adjustable angle clamp.

[0035] In one embodiment, before stacking the first transparent inorganic material component 7 and the second inorganic material component 8, the surfaces of the first transparent inorganic material component 7 and the second inorganic material component 8 are cleaned and dried.

[0036] Surface cleaning is a prerequisite for ensuring effective local bonding. The cleaning process may include: first, ultrasonic cleaning with deionized water for 5 minutes to remove large particles, followed by secondary ultrasonic cleaning with isopropanol or acetone to dissolve organic residues, and finally drying with high-purity nitrogen or placing in a vacuum drying oven at 60°C for 10 minutes. This treatment can control surface particulate contaminants to below 1μm, preventing particles from becoming support points under air pressure and hindering interface bonding. If particles >5μm are present, even with 3MPa air pressure, local "bridging" gaps will still form, leading to laser plasma ablation at the interface gaps, preventing effective fusion of materials on both sides of the interface. After cleaning, the materials should be bonded immediately or placed in a cleanroom environment to prevent recontamination by environmental dust. Although this step is a pretreatment, it synergizes with subsequent air pressure bonding: a clean surface makes the interface gaps more uniform, and air pressure is more likely to induce overall elastic deformation rather than local point contact. Therefore, this cleaning and drying process is a fundamental condition for ensuring the repeatability of "local bonding," especially indispensable in high-cleanliness scenarios such as semiconductor packaging or optical device manufacturing.

[0037] Reference Figure 2In one embodiment, this application also proposes an ultrafast laser welding system, comprising: an ultrafast laser 1 for outputting an ultrafast laser beam 2; an optical transmission and focusing unit disposed on the output path of the ultrafast laser 1 for transmitting and focusing the ultrafast laser beam 2 onto a region to be welded; a nozzle 6 configured to blow gas with a pressure sufficient to partially bond stacked first transparent inorganic material component 7 and second inorganic material component 8 to the region to be welded; and a motion platform for carrying the first transparent inorganic material component 7 and the second inorganic material component 8 and driving them to move relative to the ultrafast laser beam 2 along a preset trajectory to weld the region to be welded in the partially bonded state.

[0038] In this embodiment, the system achieves dynamic local bonding welding through the collaborative work of four core modules. An ultrafast laser 1 (such as a solid-state or fiber femtosecond laser) outputs pulsed laser light, which is transmitted to an optical focusing unit via a spatial optical path containing an optical transmission unit. The optical focusing unit focuses the laser beam onto the area to be welded at the interface of the two materials, forming a micron-level high-energy-density focus. A nozzle 6 is connected to a pressure-adjustable gas source via a gas pipe, with its outlet facing the area to be welded. Clean gas can be blown before or simultaneously with the laser action, creating a positive pressure zone at the interface, inducing elastic deformation and bonding of the materials. The motion platform uses a high-precision XY displacement stage (optionally equipped with Z-axis focusing), equipped with a vacuum adsorption carrier to fix the material and move the workpiece relative to the stationary laser focus along a preset trajectory (programmed and controlled by a host computer). All four modules are synchronized via a timing controller: when the motion platform reaches a welding point, the nozzle 6 starts supplying gas 1-100 ms in advance to establish local bonding, followed by laser triggering to complete the fusion at that point; this process is repeated continuously as the platform moves, forming a weld seam. This architecture achieves precise spatiotemporal coupling of "pneumatic bonding - laser action - trajectory scanning", enabling high-quality welding without the need for external fixtures.

[0039] In one embodiment, the optical transmission and focusing unit includes an optical transmission unit and an optical focusing unit arranged sequentially along the optical path propagation direction. The optical transmission unit includes a beam expander 3 and a reflector 4 arranged sequentially along the optical path propagation direction, and the optical focusing unit includes a focusing lens 5.

[0040] An optical transmission and focusing unit is used to increase the energy and power density of the laser beam so that the laser can be fully absorbed near the interface of the materials to be welded. The optical transmission and focusing unit includes a beam expander 3, a reflector 4, and a focusing lens 5 arranged sequentially along the optical path. The beam expander 3 expands the original laser beam emitted by the ultrafast laser 1 to 5-15 mm, which then enters the focusing lens 5 after passing through the reflector 4. The focusing lens 5 can be a multi-element achromatic focusing objective or a single-element aspherical focusing objective, and the numerical aperture NA of the focusing lens 5 is ≥0.1. Preferably, a multi-element achromatic focusing objective can be used, which allows for visual observation of the welding interface while focusing the laser beam.

[0041] In one embodiment, the nozzle 6 is arranged coaxially with the optical focusing unit, such that the ultrafast laser beam 2 passes through the central channel of the nozzle 6 and is focused on the area to be welded.

[0042] In this embodiment, the nozzle 6 is coaxially arranged with the optical focusing unit, meaning that the position of the nozzle 6 is set according to the final optical output axis position of the optical focusing unit, so that the gas ejected from the nozzle 6 and the fast laser beam 2 finally output by the optical focusing unit are coaxial. Specifically, the nozzle 6 is designed as a hollow rotating metal component, with its inner hole forming a laser transmission channel and its outer wall integrating a gas inlet. The ultrafast laser beam 2 enters from above, passes through the beam expander 3, reflector 4, focusing lens 5 and nozzle 6 in sequence, and then passes through the first transparent inorganic material component 7, finally focusing near the interface of the materials to be welded. Compressed gas enters from the air inlet on the side wall of the nozzle 6, and is ejected axially downward along the central channel under the guidance of the inner wall guide groove, with the airflow direction completely coinciding with the laser propagation direction. This coaxial structure ensures that the center of gas bonding action and the laser focus are strictly coincident in space, and the bonding area and the energy deposition area are highly consistent, avoiding welding failure caused by misalignment. At the same time, the laser propagation in the inner cavity of the nozzle 6 is not disturbed by asymmetric airflow, ensuring beam quality. This arrangement is particularly suitable for high-precision straight or microstructure welds and is the core mechanical integration solution for achieving stable local bonding.

[0043] In one embodiment, the nozzle 6 is arranged in a paraxial manner to the side of the optical focusing unit, with its exhaust direction facing the focusing area of ​​the ultrafast laser beam 2.

[0044] In this configuration, the optical focusing unit is independently mounted on the laser head support, while nozzle 6 is fixed to its side by an adjustable angle clamp, horizontally offset from the focal point by 5–20 mm. The nozzle 6 outlet is tilted towards the laser focusing area, with an outlet angle of 30°–60° to avoid directly obstructing the optical path. Gas is drawn from the gas source through a flexible pressure-resistant tube, controlled by a miniature solenoid valve, and sprayed at high speed onto the interface by nozzle 6. Although non-coaxial, by precisely calibrating the position of nozzle 6 and the airflow diffusion angle, the center of the airflow coverage area can overlap with the laser focal point. This layout eliminates the need for direct structural integration of focusing lens 5 and nozzle 6, and the compressed gas does not directly act on focusing lens 5. The control system dynamically compensates for the airflow arrival time and laser triggering sequence during platform movement, ensuring synchronization of bonding and welding. Although the off-axis solution requires high airflow guidance accuracy, it eliminates the need for direct integration of focusing lens 5 and nozzle 6, thus allowing for greater flexibility in nozzle 6 design.

[0045] In one embodiment, the nozzle 6 is connected to a pressure-adjustable gas source to adjust the gas output pressure to a value sufficient to allow the first transparent inorganic material component 7 and the second inorganic material component 8 to be partially bonded in the area to be welded.

[0046] In this embodiment, nozzle 6 is connected to an adjustable-pressure gas source via a gas pipeline. The gas source can be a compressed air source or a gas storage tank, and its output end is equipped with a pressure sensor and a pressure regulating device for setting the required gas pressure. Depending on the type, thickness, and initial interface state of the material to be welded, the operator can manually or through an external control unit adjust the pressure regulating device to ensure that the output pressure is within an effective range that allows for localized bonding (e.g., 0.2 MPa to 3 MPa).

[0047] In some embodiments, the gas is pressurized and delivered to nozzle 6, acting on the area to be welded before or simultaneously with laser welding to create localized positive pressure, promoting the adhesion of the upper and lower materials. This pressure-adjustable design allows the system to adapt to the bonding requirements of different combinations of transparent inorganic materials, and process parameters can be adjusted without changing hardware, improving the applicability and operational flexibility of the equipment. It should be noted that, in this document, the terms "comprising," "including," or any other variations thereof are intended to cover a non-exclusive inclusion, such that a process, apparatus, article, or method that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, apparatus, article, or method. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, apparatus, article, or method that includes that element.

[0048] The above description is only a preferred embodiment of this application and does not limit the patent scope of this application. Any equivalent structural or procedural changes made based on the content of this application's specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this application.

Claims

1. An ultrafast laser welding method, characterized in that, include: The first transparent inorganic material component to be welded and the second inorganic material component are stacked to form the interface to be welded. Gas with sufficient pressure to cause the first transparent inorganic material component and the second inorganic material component to be locally bonded together in the area to be welded is blown through a nozzle onto the area to be welded in the interface to be welded. An ultrafast laser beam is focused on the area to be welded, while the first transparent inorganic material component and the second inorganic material component are driven to move relative to the ultrafast laser beam along a preset trajectory, so that the ultrafast laser beam welds the area to be welded in a partially fitted state.

2. The ultrafast laser welding method according to claim 1, characterized in that, The pressure of the gas is 0.2 MPa to 3 MPa.

3. The ultrafast laser welding method according to claim 1, characterized in that, The gas is filtered and dried compressed air or nitrogen.

4. The ultrafast laser welding method according to claim 1, characterized in that, The nozzle is arranged coaxially or off-axis with the ultrafast laser beam.

5. The ultrafast laser welding method according to claim 1, characterized in that, Before stacking the first transparent inorganic material component and the second inorganic material component, the surface of the first transparent inorganic material component and the second inorganic material component is cleaned and dried.

6. An ultrafast laser welding system for implementing the method as described in any one of claims 1–5, characterized in that, include: Ultrafast lasers are used to output ultrafast laser beams. An optical transmission and focusing unit is disposed on the light output path of the ultrafast laser and is used to transmit and focus the ultrafast laser beam to the area to be welded. The nozzle is configured to blow gas toward the area to be welded at a pressure sufficient to cause the stacked first transparent inorganic material piece and the second inorganic material piece to be locally bonded together in the area to be welded; A motion platform is used to carry the first transparent inorganic material component and the second inorganic material component, and drive them to move relative to the ultrafast laser beam along a preset trajectory to weld the area to be welded in the partially bonded state.

7. The ultrafast laser welding system according to claim 6, characterized in that, The optical transmission and focusing unit includes an optical transmission unit and an optical focusing unit arranged sequentially along the optical path propagation direction.

8. The ultrafast laser welding system according to claim 7, characterized in that, The nozzle is arranged coaxially with the optical focusing unit, so that the ultrafast laser beam passes through the central channel of the nozzle and is focused on the area to be welded.

9. The ultrafast laser welding system according to claim 7, characterized in that, The nozzle is arranged in a paraxial manner on the side of the optical focusing unit, with its exhaust direction facing the focusing area of ​​the ultrafast laser beam.

10. The ultrafast laser welding system according to claim 6, characterized in that, The nozzle is connected to an adjustable gas source to adjust the gas output pressure to a value sufficient to allow the first transparent inorganic material component and the second inorganic material component to be locally bonded in the area to be welded.

Images