A black quartz rotor cover positioning and carrying device and method

Abstract

The application discloses a black quartz rotor cover plate positioning and carrying device and method, and belongs to the technical field of semiconductor equipment. The black quartz rotor cover plate positioning and carrying device comprises a cross-shaped support. First positioning components are arranged below each end of the support. The first positioning components are used for being inserted between the black quartz rotor cover plate and a chamber. Two or more second positioning components are arranged below the support. The second positioning components are used for being inserted into black quartz rotor cover plate positioning holes. Locking components are arranged at each end of the support. The locking components are used for cooperating with the first positioning components to clamp and release the black quartz rotor cover plate. The cross-shaped support, the first positioning components, the second positioning components and the locking components are cooperated to realize accurate positioning in the radial direction, the angular direction and the axial direction at one time, so that the cover plate is coaxial with the chamber, the airflow field and the temperature field of the chamber are uniform, and process repeatability and film uniformity are significantly improved.

Description

Technical Field

[0001] This invention belongs to the field of semiconductor equipment technology, and particularly relates to a positioning and handling device and method for a black quartz rotor cover. Background Technology

[0002] With the development of semiconductor technology, the size of semiconductor structures is constantly shrinking and the integration density is continuously increasing. In the semiconductor manufacturing process, Rapid Thermal Processing (RTP) is used to rapidly and uniformly heat the substrate (e.g., a wafer). In the cross-flow RTP chamber, process gases are laterally transported to the reaction chamber and guided across the surface of the rotating substrate to be processed. A ring of black quartz rotor cover is usually placed between the gas inlet and the substrate to be processed to shield the rotor, reduce the deposition of reaction products on the rotor, ensure the stability and lifespan of the rotor, thereby improving the heating uniformity of the substrate and the final process performance, as well as production continuity and efficiency.

[0003] Inevitably, the black quartz rotor needs to be removed for cleaning during equipment maintenance. However, the black quartz rotor itself is fragile and prone to collisions with the stainless steel chamber wall during removal. Furthermore, misalignment after replacement can affect the temperature field distribution at the substrate edge, impacting film uniformity. Existing methods for cleaning the black quartz rotor include... Figure 1-2 The auxiliary tool ball-head positioning pin 2 is shown. Press and hold the tail button 21 to retract the ball head 23 into the pin 22 and insert it into the two positioning holes 171 reserved in the cover of the black quartz rotor 17. Release the tail button 21 to make the ball head 23 pop out of the pin 22 and pull it upward to remove the black quartz rotor cover plate 171.

[0004] The existing solution involves interaction between the ball-head locating pin and the quartz rotor cover during use. Prolonged use of this tool can cause wear on the locating holes of the quartz rotor cover, rendering the ball-head locating pin unusable. During loading and unloading, the quartz rotor cover is prone to detachment, leading to breakage. The two fixed-point loading and unloading tools can cause the quartz rotor cover to deflect along its axis during upward lifting, colliding with the inner wall of the chamber and causing breakage. During placement, the quartz rotor cover may not be centered within the chamber, resulting in uneven airflow and temperature distribution during the process, affecting the final product's process outcome. Summary of the Invention

[0005] Based on the technical problems existing in the prior art, the present invention provides a black quartz rotor cover plate positioning and handling device and method.

[0006] According to a first aspect of the technical solution of the present invention, a positioning and transporting device for a black quartz rotor cover is provided, comprising a bracket arranged in a cross shape, wherein a first positioning component is provided at the lower end of each end of the bracket, the first positioning component being used to insert between the black quartz rotor cover and the chamber, and two or more second positioning components are provided at the lower end of the bracket, the second positioning components being used to insert into the positioning holes of the black quartz rotor cover, and a locking component is provided at each end of the bracket, the locking component being used to cooperate with the first positioning component to clamp / release the black quartz rotor cover.

[0007] A further improvement of the present invention is that: the first positioning component includes a fixing block and a positioning piece, a fixing block is fixedly provided at the top of the far end of each end of the bracket, and a positioning piece is fixedly provided on the outer side wall of each fixing block.

[0008] A further improvement of the present invention is that: the second positioning component includes a positioning post, the positioning post is fixedly connected to the bracket, and the distance between the second positioning component and the center of the bracket is less than the distance between the first positioning component and the center of the bracket.

[0009] A further improvement of the present invention is that each locking assembly includes a connecting rod, a limiting block, a locking screw, and a connecting block. The connecting block is disposed above the bracket. A connecting rod is fixedly disposed below one end of the connecting block. A locking screw is disposed at the other end of the connecting block. A limiting block parallel to the connecting block is disposed at the lower end of the connecting rod. The connecting block, connecting rod, and limiting block are C-shaped.

[0010] A further improvement of the present invention is that a handle is provided on the top of the bracket.

[0011] A further improvement of the present invention is that the bracket includes a first bracket and a second bracket, the first bracket and the second bracket have the same length and shape, the center of the first bracket and the center of the second bracket are fixedly connected, and the first bracket and the second bracket are perpendicular to each other.

[0012] A further improvement of the present invention is that a wedge-shaped inclined surface is provided between the positioning piece and the fixing block, and the thickness of the wedge-shaped inclined surface gradually decreases from top to bottom.

[0013] A further improvement of the present invention is that both the inner and outer walls of the positioning piece are arc surfaces.

[0014] A further improvement of the present invention is that: each end of the bracket is provided with a vertical first sliding through hole, the first sliding through hole is located on the diameter of the black quartz rotor cover plate, a first locking hole is provided on the outer side of the diameter of the first sliding through hole, and a first loosening hole is provided on both sides of the first sliding through hole with the distance between the first sliding through hole and the first locking hole as the radius. The first sliding through hole is used to set the connecting rod, the first locking hole is used to cooperate with the locking screw when locked, and the first loosening hole is used to cooperate with the locking screw when loosened.

[0015] According to a second aspect of the technical solution of the present invention, the present invention provides a method for positioning and transporting a black quartz rotor cover plate, which is based on the above-mentioned method for positioning and transporting a black quartz rotor cover plate, and includes the following steps: Step S1: Place the bracket above the black quartz rotor cover plate to be transported, and insert the first positioning component between the black quartz rotor cover plate and the chamber; Step S2: Insert the second positioning component into the positioning hole of the black quartz rotor cover plate; Step S3: The black quartz rotor cover plate is clamped by the locking component cooperating with the first positioning component; Step S4: Move the bracket to the transport destination and then release the locking assembly.

[0016] Compared with the prior art, the above-mentioned technical solution of the present invention has the following beneficial technical effects: This invention uses a cross-shaped bracket, a first positioning component, a second positioning component, and a locking component to form a composite centering system of "two-point positioning + four-claw constraint + four-point assistance"; it can complete precise radial, angular and axial positioning in one go, ensuring that the cover plate is coaxial with the chamber, the airflow field and temperature field of the chamber are uniform, and the process repeatability and film uniformity are significantly improved. Attached Figure Description

[0017] The accompanying drawings are provided to better understand the invention and are not intended to unduly limit the scope of the invention. Wherein: Figure 1 This is a structural schematic diagram of an existing black quartz rotor cover positioning assembly; Figure 2 This is a schematic diagram of the positioning of the existing black quartz rotor cover plate; Figure 3 This is a schematic diagram of the structure of a black quartz rotor cover plate positioning and handling device according to the present invention; Figure 4 This is a schematic diagram of the application configuration of a black quartz rotor cover plate positioning and handling device according to the present invention. Figure 5 This is a schematic diagram of the application chamber of a black quartz rotor cover plate positioning and handling device according to the present invention; Figure 6This is a schematic diagram of the structure of the black quartz rotor cover plate positioning and handling device of the present invention in the storage ring; Figure 7 This is a schematic diagram of the hole positions in a black quartz rotor cover plate positioning and handling device of the present invention; Figure 8 This is a schematic diagram of the structure of the first positioning component in a black quartz rotor cover positioning and handling device of the present invention; Figure 9 This is a side view of the second positioning component in a black quartz rotor cover positioning and transporting device of the present invention. Figure 10 This is a schematic diagram of the structure of the second positioning component in a black quartz rotor cover positioning and handling device of the present invention; Figure 11 This is a top view of a black quartz rotor cover positioning and handling device according to the present invention; Figure 12 This is a partial sectional view of the positioning and transporting device for a black quartz rotor cover plate according to the present invention.

[0018] In the diagram: 10. Chamber; 11. Honeycomb lamp chamber; 12. Reflector tube; 13. Halogen lamp; 14. Edge support ring; 15. Support cylinder; 16. Magnetic levitation rotor; 17. Black quartz rotor cover plate; 18. Reflector plate; 19. Quartz window; 2. Ball head positioning pin chamber; 21. Tail end button; 22. Pin rod; 23. Ball head; 3. Bracket; 31. First bracket; 311. First sliding through hole; 312. First locking hole; 313. First loosening hole; 32. Second bracket; 34. First positioning component; 341. Fixing block; 342. Wedge-shaped inclined surface; 343. Positioning piece; 35. Second positioning component; 351. Positioning post; 36. Locking component; 361. Connecting rod; 362. Limiting block; 363. Screw; 364. Locking screw; 365. Connecting block; 37. Storage ring. Detailed Implementation

[0019] The following description, in conjunction with the accompanying drawings, illustrates exemplary embodiments of the present invention, including various details to aid understanding. These details should be considered merely exemplary. Therefore, those skilled in the art will recognize that various changes and modifications can be made to the embodiments described herein without departing from the scope and spirit of the invention. Similarly, for clarity and brevity, descriptions of well-known functions and structures are omitted in the following description.

[0020] Example 1 like Figure 3 and 7 As shown, a black quartz rotor cover plate positioning and handling device is provided, which is used for... Figure 4-5The device shown includes a cross-shaped support 3. Each end of the support 3 has a first positioning component 34 for insertion between the black quartz rotor cover 17 and the chamber 10. Two or more second positioning components 35 are located below the support 3, for insertion into the positioning holes 171 of the black quartz rotor cover. Each end of the support 3 has a locking component 36 for cooperating with the first positioning components 34 to clamp / release the black quartz rotor cover 17. The support 3 provides a cross-shaped rigid frame to achieve four-way synchronous positioning and force balance. The first positioning component 34 is inserted into the annular gap between the black quartz rotor cover 17 and the chamber 10 to achieve radial alignment and prevent eccentricity. The second positioning components 35 are inserted into the positioning holes 171 of the black quartz rotor cover to achieve unique angular fixation and prevent circumferential slippage. The locking components 36 are used in conjunction with the first positioning components 34 to clamp or release the black quartz rotor cover 17, enabling non-destructive loading and unloading and rapid switching. By using a cross-shaped bracket 3, a first positioning component 34, and a second positioning component, at least two-point positioning, four-jaw constraint, and four-point auxiliary positioning are achieved. This solves the problem that existing ball-head positioning pins interact with the black quartz rotor cover, causing wear on the positioning holes of the black quartz rotor cover after prolonged use, resulting in the failure of the ball-head positioning pins and the easy detachment and breakage of the black quartz rotor cover during loading and unloading. Furthermore, a centering method is proposed to ensure the center position of the black quartz rotor cover, ensuring a uniform distribution of the airflow and temperature fields in the chamber, thereby improving the uniformity of the process and thus improving the process quality.

[0021] Specifically, in this embodiment, a black quartz rotor cover positioning and conveying device is used for, for example... Figure 4-6 The semiconductor RTP device shown includes a chamber 10, a honeycomb lamp chamber 11, a reflector 12, a halogen lamp 13, an edge support ring 14, a support cylinder 15, a magnetically levitated rotor 16, a black quartz rotor cover 17, a reflector 18, a quartz window 19, and a storage ring 37. The storage ring 37 is used to store the black quartz rotor cover 17, which has an annular structure.

[0022] Specifically, the bracket 3 includes a first bracket 31 and a second bracket 32. The first bracket 31 and the second bracket 32 ​​are identical in length and shape. The center of the first bracket 31 and the center of the second bracket 32 ​​are fixedly connected, and the first bracket 31 and the second bracket 32 ​​are perpendicular to each other. The length of the first bracket 31 and the second bracket 32 ​​is less than or equal to the diameter of the black quartz rotor cover plate 17. The portion smaller than the diameter of the black quartz rotor cover plate 17 is compensated by the width of the first positioning component 34. The center of the bracket 3 coincides with the center of the black quartz rotor cover plate 17, thereby providing stable clamping. A plurality of bracket fixing holes 314 are provided at the intersection of the first bracket 31 and the second bracket 32. The plurality of bracket fixing holes 314 are used to cooperate with screws to fix the first bracket 31 and the second bracket 32.

[0023] Specifically, such as Figure 8 As shown, the first positioning component 34 includes a fixing block 341 and a positioning piece 343. A fixing block 341 is fixedly provided at the top of the far end of each end of the bracket 3, and a positioning piece 343 is fixedly provided on the outer wall of each fixing block 341. A wedge-shaped inclined surface 342 is provided between the positioning piece 343 and the fixing block 341, and the thickness of the wedge-shaped inclined surface 342 gradually decreases from top to bottom. The inner and outer walls of the positioning piece 343 are both arc surfaces. The fixing block 341 is used to rigidly connect the positioning piece 343 to the far end of the bracket 3 to achieve the shortest force transmission path. The positioning piece 343 is used to simultaneously conform to the outer periphery of the black quartz rotor cover plate 17 and the inner wall of the cavity to achieve radial centering and uniform gap. The wedge-shaped inclined surface 342 is used to gradually open the micro-gap between the positioning piece 343 and the cavity wall during the insertion process to achieve zero-impact introduction and enhance the bending stiffness of the piece. The arc-shaped double wall surface is used to form line contact with the curved cavity wall and the edge of the cover plate to achieve stress dispersion and avoid point load breakage.

[0024] Specifically, the positioning piece 343 is made of Teflon material, and the thickness of the positioning piece is 0.6mm~0.9mm.

[0025] Specifically, a handle 33 is provided on the top of the bracket 3. The handle 33 is U-shaped, and both ends of the handle 33 are fixedly set in the middle of the bracket 3. The surface of the handle 33 is knurled to prevent slipping and reduce the risk of slipping out of the hand when lifted. The surface of the handle 33 is provided with annular grooves to guide finger positioning and reduce operating fatigue. The rounded corners of the surface of the handle 33 are polished to eliminate sharp edges and avoid scratching gloves and quartz parts.

[0026] Specifically, the second positioning component 35 includes a positioning post 351, which is fixedly connected to the bracket 3. The distance between the second positioning component 35 and the center of the bracket 3 is less than the distance between the first positioning component 34 and the center of the bracket 3. The positioning post 351 and the bracket 3 are connected by threads. The outer side of the positioning post 351 near the bracket 3 is threaded, and the bracket 3 and the positioning post 351 have threaded holes at their mating points, thereby achieving threaded fixation. The end of the positioning post 351 away from the bracket 3 has a rounded head, which facilitates mating with the positioning hole 171 of the black quartz rotor cover. The number of positioning posts 351 is at least two, and the specific number is set according to the positioning hole 171 of the black quartz rotor cover.

[0027] Specifically, such as Figure 9-10 Each locking assembly 36 includes a connecting rod 361, a limiting block 362, a locking screw 364, and a connecting block 365. The connecting block 365 is disposed above the bracket 3. The connecting rod 361 is fixedly disposed below one end of the connecting block 365, and the locking screw 364 is disposed at the other end of the connecting block 365. The lower end of the connecting rod 361 is provided with a limiting block 362 parallel to the connecting block 365. The connecting block 365, the connecting rod 361, and the limiting block 362 are C-shaped. The connecting block 365 is used to bridge the bracket 3 and form a C-shaped upper fulcrum to achieve rigid transmission of locking torque; the connecting rod 361 is used to convert the rotational locking force into axial lifting and lowering to achieve precise up and down movement of the limiting block 362; the limiting block 362 is used to support the lower surface of the black quartz rotor cover 17 in the locking position to achieve non-destructive bearing and anti-fall-off; the locking screw 364 is used to fix the connecting block 365 to the bracket 3 to achieve quick clamping or release of the C-shaped jaws; the bottom of the connecting rod 361 is fixedly connected to the limiting block 362 by screw 363.

[0028] Specifically, such as Figure 11 , Figure 12 and Figure 7As shown, each end of the bracket 3 is provided with a vertical first sliding through hole 311. The first sliding through hole 311 is located on the diameter of the black quartz rotor cover plate 17. A first locking hole 312 is provided on the outer side of the diameter of the first sliding through hole 311. With the distance between the first sliding through hole 311 and the first locking hole 312 as the radius, a first loosening hole 313 is provided on both sides of the first sliding through hole 311. The first sliding through hole 311 is used to set the connecting rod 361. The first locking hole 312 is used to cooperate with the locking screw 364 when locked. The first loosening hole 313 is used to cooperate with the locking screw 364 when loosened. The first sliding through hole 311 is used to accommodate the connecting rod 361, allowing the connecting rod 361 to move up and down within the first sliding hole 311, and also to rotate axially with the connecting block 365. The first locking hole 312 is used to cooperate with the locking screw 364 in the locking position to rigidly connect the connecting block 365 to the bracket 3, achieving reliable clamping of the black quartz rotor cover 17 by the C-shaped jaws. The first loosening hole 313 is used to cooperate with the locking screw 364 in the loosening position. By rotating from the first locking hole 312 to the first loosening hole 313, the limiting block 362 is driven to rotate, thereby loosening the black quartz rotor cover 17. The first sliding through hole 311 provides the connecting rod 361 with the freedom to move up and down, while allowing it to rotate around the rod axis with the connecting block 365. This rotation allows the limiting block 362 to switch 90° in the horizontal plane: when the locking screw 364 is screwed out from the first locking hole 312 and rotates with the connecting block 365 to the first releasing hole 313, the limiting block 362 rotates from the support position under the cover plate to the clearance position, immediately disengaging from the lower surface of the black quartz rotor cover plate 17, achieving zero-contact release; when rotating back in the opposite direction, the limiting block 362 rotates back to the bottom surface of the cover plate and completes the bearing. No additional tools are required throughout the process, the rotation stroke is short, the positioning repeatability is high, and the lateral scratches and impacts on the fragile quartz are avoided.

[0029] Example 2 This invention provides a method for positioning and transporting a black quartz rotor cover plate, which is based on a method for positioning and transporting a black quartz rotor cover plate in Embodiment 1, and includes the following steps: Step S1: Place the bracket 3 above the black quartz rotor cover plate 17 to be transported, and insert the first positioning component 34 between the black quartz rotor cover plate 17 and the chamber 10. Step S2: Insert the second positioning component 35 into the positioning hole 171 of the black quartz rotor cover plate; Step S3: The black quartz rotor cover plate 17 is clamped by the locking component 36 cooperating with the first positioning component 34; Step S4: Move the bracket 3 to the transport destination, and then release the locking assembly 36.

[0030] Specifically, when removing the black quartz rotor cover 17, a black quartz rotor cover positioning and transporting device is placed on top, and the locking screw 364 of the locking assembly 36 is fixed in the first loosening hole 313, so that the four positioning pieces 343 of the first positioning assembly 34 are inserted into the inner wall of the black quartz rotor cover 17 and the chamber 10, and at the same time, the positioning post 351 of the second positioning assembly 35 is inserted into the positioning hole 171 of the black quartz rotor cover; the locking screw 364 is fixed in the first locking hole 312, so that the locking assembly 36 rotates 90° axially, and the limiting block 362 rotates to the lower surface of the black quartz rotor cover 17. The black quartz rotor cover 17 can be removed and placed in the storage ring 37 by pulling the handle 33 upward. Those skilled in the art will clearly understand that, for the sake of convenience and brevity, the above-described division of functional units and modules is merely an example. In practical applications, the above functions can be assigned to different functional units and modules as needed, that is, the internal structure of the device can be divided into different functional units or modules to complete all or part of the functions described above. The functional units and modules in the embodiments can be integrated into one processing unit, or each unit can exist physically separately, or two or more units can be integrated into one unit. The integrated unit can be implemented in hardware or as a software functional unit. Furthermore, the specific names of the functional units and modules are only for easy differentiation and are not intended to limit the scope of protection of this application. The specific working process of the units and modules in the above system can be referred to the corresponding process in the foregoing method embodiments, and will not be repeated here.

[0031] The specific embodiments described above do not constitute a limitation on the scope of protection of this invention. Those skilled in the art should understand that various modifications, combinations, sub-combinations, and substitutions can occur depending on design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this invention should be included within the scope of protection of this invention.

Claims

1. A positioning and conveying device for a black quartz rotor cover plate, characterized in that, The bracket (3) is arranged in a cross shape. Each end of the bracket (3) is provided with a first positioning component (34) for insertion between the black quartz rotor cover plate (17) and the chamber (10). Two or more second positioning components (35) are provided below the bracket (3) for insertion into the positioning hole (171) of the black quartz rotor cover plate. Each end of the bracket (3) is provided with a locking component (36) for clamping / releasing the black quartz rotor cover plate (17) in cooperation with the first positioning component (34). The first positioning component (34) includes a fixing block (341) and a positioning piece (343). A fixing block (341) is fixedly provided above the far end of each end of the bracket (3), and a positioning piece (343) is fixedly provided on the outer side wall of each fixing block (341). The second positioning component (35) includes a positioning post (351), which is fixedly connected to the bracket (3). The distance between the second positioning component (35) and the center of the bracket (3) is less than the distance between the first positioning component (34) and the center of the bracket (3). Each locking assembly (36) includes a connecting rod (361), a limiting block (362), a locking screw (364), and a connecting block (365). The connecting block (365) is located above the bracket (3). The connecting rod (361) is fixedly provided below one end of the connecting block (365), and the locking screw (364) is provided at the other end of the connecting block (365). The lower end of the connecting rod (361) is provided with a limiting block (362) parallel to the connecting block (365). The connecting block (365), the connecting rod (361), and the limiting block (362) are C-shaped. Each end of the bracket (3) is provided with a vertical first sliding through hole (311). The first sliding through hole (311) is located on the diameter of the black quartz rotor cover plate (17). A first locking hole (312) is provided on the outer side of the diameter of the first sliding through hole (311). With the distance between the first sliding through hole (311) and the first locking hole (312) as the radius, a first loosening hole (313) is provided on both sides of the first sliding through hole (311). The first sliding through hole (311) is used to set the connecting rod (361). The first locking hole (312) is used to cooperate with the locking screw (364) when locked. The first loosening hole (313) is used to cooperate with the locking screw (364) when loosened.

2. The black quartz rotor cover plate positioning and conveying device according to claim 1, characterized in that, The bracket (3) is provided with a handle (33) on its upper part.

3. The black quartz rotor cover plate positioning and conveying device according to claim 1, characterized in that, The bracket (3) includes a first bracket (31) and a second bracket (32). The first bracket (31) and the second bracket (32) have the same length and shape. The center of the first bracket (31) and the center of the second bracket (32) are fixedly connected. The first bracket (31) and the second bracket (32) are perpendicular to each other.

4. The black quartz rotor cover plate positioning and conveying device according to claim 1, characterized in that, A wedge-shaped inclined surface (342) is provided between the positioning piece (343) and the fixing block (341), and the thickness of the wedge-shaped inclined surface (342) gradually decreases from top to bottom.

5. The black quartz rotor cover plate positioning and conveying device according to claim 1, characterized in that, The inner and outer walls of the positioning piece (343) are both arc surfaces.

6. A method for positioning and transporting a black quartz rotor cover plate, based on any one of claims 1-5, characterized in that, Includes the following steps: Step S1: Place the bracket (3) above the black quartz rotor cover plate (17) to be transported, and insert the first positioning component (34) between the black quartz rotor cover plate (17) and the chamber (10); Step S2: Insert the second positioning component (35) into the positioning hole (171) of the black quartz rotor cover plate. Step S3: The black quartz rotor cover plate (17) is clamped by the locking component (36) cooperating with the first positioning component (34). Step S4: Move the bracket (3) to the transport destination and then release the locking assembly (36).

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