Multifunctional integrated vacuum coating equipment and coating process thereof

Abstract

The application discloses a multifunctional integrated vacuum coating equipment and a coating process thereof, and relates to the technical field of vacuum coating. The equipment comprises a rack, a coating tank and a heating device. The coating tank is provided with an inlet corresponding to the heating device. A flow distribution plate is fixed to the inner wall of the coating tank corresponding to the inlet. A flow distribution groove is formed in the side of the flow distribution plate facing the inlet. A group of long grooves are formed in the other side of the flow distribution plate away from the inlet. Flow distribution openings are formed between the two sides of the flow distribution plate. The flow distribution plate is provided with a lifting seat. A baffle is movably connected to one side of the lifting seat. An infrared detection belt is arranged on the inner wall of the coating tank. The application is not only suitable for conventional thin film deposition, but also can be used for functional coating treatment and wear repair on the surface of parts, so as to improve the surface hardness, corrosion resistance and service life, and realize the multifunctional integration of coating, surface treatment and repair.

Description

Technical Field

[0001] This invention relates to the field of vacuum coating technology, specifically to a multifunctional integrated vacuum coating equipment and its coating process. Background Technology

[0002] Vacuum coating is a thin film preparation technology performed in a vacuum environment. It uses physical or chemical methods to deposit materials onto a substrate surface to form a thin film with specific properties. Vacuum coating technology includes various processes, and PVD (Physical Vapor Deposition) is an important one. PVD is a technology that uses physical methods to convert a material source (usually a metal or ceramic) into a gaseous state in a vacuum environment, and then deposits it onto the surface of a workpiece to form a thin film.

[0003] The main processes of PVD coating include substrate surface pretreatment, establishing a vacuum environment, vaporizing the target material, depositing the vaporized target material onto the substrate surface, and post-treatment. The key equipment involved includes a coating container for creating the vacuum and holding the substrate, and a heater for vaporizing the target material.

[0004] For small-scale coating equipment, it is only necessary to connect the coating container to the target heating device, place the substrate in the coating container, and input the gasified target through the heating device to complete the coating. However, in actual operation, the size of the substrate varies. For small substrates, they occupy less space in the coating container, while the input gasified target occupies more space, which not only leads to waste but also affects the deposition quality. Summary of the Invention

[0005] The purpose of this invention is to provide a multifunctional integrated vacuum coating equipment and coating process to solve the problems mentioned in the background art.

[0006] To solve the above-mentioned technical problems, the present invention provides the following technical solution: a multifunctional integrated vacuum coating equipment and its coating process, including a frame, a coating tank, and a heating device. The coating tank is fixed on the frame and connected to the output end of the heating device. The coating tank is provided with an inlet corresponding to the heating device. A flow divider plate is fixed on the inner wall of the coating tank corresponding to the inlet. A flow divider groove is opened on the side of the flow divider plate facing the inlet, and a set of long grooves is opened on the other side of the flow divider plate away from the inlet. Flow divider ports are opened at intervals on both sides of the flow divider plate. A lifting seat is provided in cooperation with the flow divider plate. A threaded sleeve is connected to the lower side of the lifting seat corresponding to the long groove. A screw is connected inside the threaded sleeve. The threaded sleeve and the screw are threadedly engaged. The lower end of the screw is rotatably engaged with the bottom of the long groove. A gear one is sleeved on the lower end of the screw. Gear one is engaged with gear two. Gear two is connected to a micro driver. The micro driver is fixed to the bottom of the flow divider groove. A baffle is movably connected to one side of the lifting seat. An infrared detection strip is provided on the inner wall of the coating tank.

[0007] According to the above technical solution, a circular groove is provided on the surface of the lifting seat, and a slot 1 is provided on the upper side of the circular groove of the lifting seat. A rotating seat is rotatably connected in the circular groove, and a slot 2 is provided on the rotating seat. A block corresponding to the slot 2 is provided at one end of the baffle.

[0008] According to the above technical solution, a partition seat is connected to the other side of the lifting seat. The partition seat slides in conjunction with the diversion channel. A fine groove is opened in the middle of the partition seat. An extrusion block is slidably arranged in the fine groove. A nesting plate is connected to the lower end of the extrusion block. An embedding groove is opened inside the nesting plate. A telescopic plate is slidably connected in the embedding groove. The nesting plate and the telescopic plate are located in the diversion channel.

[0009] According to the above technical solution, a roller is movably installed at the lower end of the telescopic plate, a guide rail is installed at the bottom of the diversion trough in conjunction with the roller, a bellows cover is connected between the side of the nested plate and the diversion trough, an elastic element is connected between the nested plate and the diversion trough, and a slope groove is provided on the inner wall of the coating tank in conjunction with the extrusion block, with the depth of the slope groove gradually decreasing from top to bottom.

[0010] According to the above technical solution, a rotating platform is provided at the bottom of the coating tank, and the shaft end of the rotating platform extends out of the bottom of the coating tank and is connected to a rotating motor.

[0011] According to the above technical solution, an air extraction pipe 1 is installed inside the coating tank. An air pump is connected to the lower end of the air extraction pipe. Several compression springs are connected to the upper end of the air extraction pipe 1. The other end of the compression springs is connected to an air extraction pipe 2. The air extraction pipe 2 and the air extraction pipe 1 are in sliding fit. Several air ports are opened on the surface of both the air extraction pipe 2 and the air extraction pipe 1.

[0012] According to the above technical solution, a vent pipe is connected to the bottom of the coating tank, and a small heater is installed on the vent pipe. During the coating process, the coating tank is usually in a high vacuum state, while the vent pipe comes into contact with the outside atmosphere during the venting process.

[0013] According to the above technical solution, the heating device includes a front-end heater and a sublimation heater. The output end of the sublimation heater is connected to the inlet, and the front-end heater is connected to the input end of the sublimation heater. The front-end heater is mainly used to preheat the substrate or coating environment to ensure the stability and uniformity of the coating process. The sublimation heater is mainly used to heat the coating material to the sublimation temperature, so that it is converted into a gaseous state and deposited on the surface of the substrate.

[0014] Compared with the prior art, the beneficial effects achieved by the present invention are as follows: The present invention, by setting an infrared detection band, can monitor the height of the substrate and use a micro-driver, gear set and screw mechanism to precisely control the lifting and lowering of the baffle, so that the coating space below the baffle can be dynamically adjusted according to the volume of the substrate. This avoids the serious waste of gasified target material caused by filling the entire large coating tank cavity when coating small-sized substrates, and fundamentally reduces the consumption of high-value coating materials, resulting in significant economic benefits.

[0015] By setting up a lifting partition structure, the diversion port located above the baffle is automatically shielded, ensuring that all gasified target materials are concentrated and transported to the effective coating working area (below the baffle), avoiding the diffusion and deposition of materials in the ineffective space, and ensuring material utilization efficiency.

[0016] By incorporating nested plates and telescopic plates, along with slope grooves and elastic elements, the flow cross-sectional area of ​​the diversion groove can automatically increase as the coating space decreases. This ensures that the vaporized target material has sufficient and stable flow under different working spaces, avoiding the problems of insufficient flow due to larger space or excessive airflow due to smaller space, thus guaranteeing the uniformity of thin film deposition. Attached Figure Description

[0017] The accompanying drawings are provided to further illustrate the invention and form part of the specification. They are used in conjunction with embodiments of the invention to explain the invention and do not constitute a limitation thereof. In the drawings:

[0018] Figure 1 This is a schematic diagram of the overall structure of the coating equipment of the present invention;

[0019] Figure 2 This is a partial structural schematic diagram of the coating equipment of the present invention;

[0020] Figure 3 This is an internal perspective view of the coating tank of the present invention;

[0021] Figure 4 This is a cross-sectional view of the coating tank of the present invention;

[0022] Figure 5 This is the present invention. Figure 4 Enlarged diagram of area A;

[0023] Figure 6 This is the present invention. Figure 4 Enlarged diagram of area B;

[0024] Figure 7 This is a schematic diagram of the connection structure of the diverter plate of the present invention;

[0025] Figure 8 This is the present invention. Figure 7 Enlarged schematic diagram of area C;

[0026] Figure 9 This is a schematic diagram showing the cooperation relationship between the lifting seat, the rotating seat, and the baffle of the present invention;

[0027] Figure 10 This is a schematic diagram showing the connection status of the lifting seat, rotating seat, and baffle plate of the present invention;

[0028] Figure 11 This is a cross-sectional view of the nesting plate and telescopic plate of the present invention;

[0029] Figure 12 This is the present invention. Figure 11 Enlarged schematic diagram of area D;

[0030] Figure 13 This is the present invention. Figure 11 A magnified diagram of area E.

[0031] In the diagram: 1. Frame; 2. Coating tank; 21. Inlet; 22. Sloping groove; 23. Vent pipe; 24. Small heater; 3. Heating device; 31. Front heater; 32. Sublimation heater; 4. Diverter plate; 41. Diverter groove; 411. Guide rail; 42. Long groove; 43. Diverter port; 5. Lifting seat; 51. Threaded sleeve; 52. Screw; 53. Gear 1; 54. Gear 2; 55. Micro actuator; 56. 561. Baffle; 571. Locking block; 572. Slide groove; 573. Circular groove; 574. Locking groove one; 58. Rotating seat; 581. Locking groove two; 6. Separator seat; 61. Fine groove; 62. Extrusion block; 63. Nested plate; 631. Embedded groove; 64. Telescopic plate; 641. Roller; 65. Bellows cover; 71. Rotary table; 72. Rotary motor; 81. Air extraction pipe one; 82. Compression spring; 83. Air extraction pipe two; 84. Air port. Detailed Implementation

[0032] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0033] Please see Figures 1-13This invention provides a technical solution: a multifunctional integrated vacuum coating equipment, including a frame 1, a coating tank 2, and a heating device 3. The coating tank 2 is fixed on the frame 1 and connected to the output end of the heating device 3. The coating tank 2 is provided with an inlet 21 corresponding to the heating device 3. A flow divider plate 4 is fixed on the inner wall of the coating tank 2 corresponding to the inlet 21. A flow divider groove 41 is opened on the side of the flow divider plate 4 facing the inlet 21, and a set of long grooves 42 is opened on the other side of the flow divider plate 4 away from the inlet 21. Flow divider ports 43 are opened at intervals on both sides of the flow divider plate 4 for flow diversion. Plate 4 is equipped with a lifting seat 5. The lower side of the lifting seat 5 is connected to the long groove 42 with a threaded sleeve 51. The threaded sleeve 51 is connected to a screw 52. The threaded sleeve 51 and the screw 52 are threadedly engaged. The lower end of the screw 52 is rotatably engaged with the bottom of the long groove 42. The lower end of the screw 52 is fitted with a gear 1 53. Gear 1 53 is engaged with a gear 2 54. Gear 2 54 is connected to a micro driver 55. The micro driver 55 is fixed to the bottom of the diversion groove 41. A baffle 56 is movably connected to one side of the lifting seat 5. An infrared detection strip is provided on the inner wall of the coating tank 2.

[0034] In actual operation, the lifting seat 5, in conjunction with the diversion plate 4, has a vertically penetrating groove 571. The diversion port 43 is the main outlet for the vaporized target material. The infrared detection belt is used to detect the height of the substrate inside the coating tank 2. The gear 1 53, gear 2 54, and micro-driver 55 can be covered with a shell to prevent the vaporized target material from adhering. The surface area of ​​the baffle 56 is smaller than the cross-sectional area of ​​the coating tank 2. When the micro-driver 55 controls the gear 2 54 to rotate, the gear 2 54 synchronously drives the gear 1 53 to rotate, causing the screw 52 to rotate relative to the threaded sleeve 51. Since the threaded sleeve 51 is restricted from rotating, under the action of the thread, the threaded sleeve 51 pulls the lifting seat 5 up or down, thereby causing the baffle 56 to move up and down inside the coating tank 2, dividing the internal space. The lower side of the baffle 56 is the substrate placement space. Based on the data detected by the infrared detection belt, the height of the baffle 56 is adjusted according to the actual height of the substrate to avoid wasting resources such as the vaporized target material due to excessive coating space.

[0035] Furthermore, such as Figure 9 As shown, a circular groove 572 is provided on the surface of the lifting seat 5. A slot 573 is provided on the upper side of the circular groove 572. A rotating seat 58 is rotatably connected in the circular groove 572. A slot 581 is provided on the rotating seat 58. A block 561 corresponding to the slot 581 is provided at one end of the baffle 56.

[0036] It should be further explained that before assembling the baffle 56, the second slot 581 of the rotating seat 58 should be aligned with the first slot 573. The baffle 56 is vertically placed into the coating tank 2. The locking block 561 is then inserted into the second slot 581 along the first slot 573. The baffle 56 is then flipped to a parallel position. At this point, the locking block 561 drives the rotating seat 58 to rotate, causing the second slot 581 to shift away from the first slot 573, thus locking the baffle 56 and the lifting seat 5 together and preventing relative movement between them. When it is necessary to remove the baffle 56, it is actively flipped to a vertical position, aligning the second slot 581 with the first slot 573, and then the baffle 56 is removed.

[0037] like Figure 7 As shown, a partition seat 6 is connected to the other side of the lifting seat 5. The partition seat 6 is slidably engaged with the diversion channel 41. A fine groove 61 is opened in the middle of the partition seat 6. An extrusion block 62 is slidably arranged in the fine groove 61. A nesting plate 63 is connected to the lower end of the extrusion block 62. An embedding groove 631 is opened inside the nesting plate 63. A telescopic plate 64 is slidably connected in the embedding groove 631. The nesting plate 63 and the telescopic plate 64 are located in the diversion channel 41.

[0038] In actual operation, the bottom surface of the partition seat 6 matches the cross-section of the diversion channel 41, so that the bottom surface of the partition seat 6 and the two sides form a sealing surface, which divides the diversion channel 41 into two independent spaces, upper and lower. The inlet 21 is located on the lower side of the partition seat 6, and the movement range of the partition seat 6 is limited to the upper side of the inlet 21. When the partition seat 6 moves up and down with the lifting seat 5, and the inlet 21 inputs the gasified target material into the diversion channel 41, the gasified target material can only be output from the diversion port 43 located in the lower space of the partition seat 6 into the interior of the coating tank 2. The space where the diversion port 43 is located on the upper side of the partition seat 6 is blocked by the sealing surface, and the gasified target material cannot enter and is not used. The gasified target material is input into the space under the baffle 56 to prevent the gasified target material from flowing into unnecessary spaces. The telescopic plate 64 can be extended and retracted to match / adapt to the movement of the nested plate 63.

[0039] In one embodiment, such as Figure 6 , Figure 12 As shown, a roller 641 is movably provided at the lower end of the telescopic plate 64, and a guide rail 411 is provided at the bottom of the diversion channel 41 in conjunction with the roller 641. A bellows cover 65 is connected between the side of the nested plate 63 and the diversion channel 41, and an elastic element is connected between the nested plate 63 and the diversion channel 41. A slope groove 22 is provided on the inner wall of the coating tank 2 in conjunction with the extrusion block 62, and the depth of the slope groove 22 gradually decreases from top to bottom.

[0040] The following is a supplementary explanation based on the above structure: The elastic element is, but is not limited to, a spring. In the initial state, the separator 6 is located at the upper high position, and the extrusion block 62 is at the maximum depth of the slope groove 22. At this time, the elastic element is in a non-extrusion state, supporting the nested plate 63 and stretching the bellows cover 65. The distance between the nested plate 63 and the inner wall surface of the coating tank 2 is minimal, but the nested plate 63 is not in contact with the inner wall surface of the coating tank 2. Corresponding to the largest coating space, the demand for gasified target material is the greatest. In order to save materials and reduce flow time, the nested plate 63 and the bellows cover 65 occupy part of the space in the diversion groove 41, so that the gasified target material flows into the coating tank 2 more quickly. As the separator 6 moves downward, the coating space gradually decreases. The extrusion block 62 slides in the slope groove 22, which pushes the extrusion block 62 toward the bottom of the diversion groove 41. The extrusion block 62 drives the nesting plate 63 to extrude the elastic element. The roller 641 assists the telescopic plate 64 to move with the nesting plate 63. During this period, the space occupied by the nesting plate 63 and the bellows cover 65 in the diversion groove 41 gradually decreases, so that the gasified target material can be fully input. The internal space of the diversion groove 41 is adjusted according to the size of the coating space.

[0041] like Figure 3 As shown, a rotating platform 71 is provided at the bottom of the coating tank 2. The shaft end of the rotating platform 71 extends out of the bottom of the coating tank 2 and is connected to a rotating motor 72.

[0042] like Figure 4 As shown, a suction pipe 81 is installed inside the coating tank 2. An air pump is connected to the lower end of the suction pipe 81. Several compression springs 82 are connected to the upper end of the suction pipe 81. The other end of the compression springs 82 is connected to a second suction pipe 83. The second suction pipe 83 is in sliding fit with the first suction pipe 81. Several air ports 84 are opened on the surface of both the second suction pipe 83 and the first suction pipe 81.

[0043] In actual operation, the rotary table 71 is used to place the substrate, and the rotary motor 72 is used to drive the rotary table 71 to rotate. An air pump creates a vacuum environment inside the coating tank 2 through suction pipe 1 81 and suction pipe 2 83. A retractable structure is designed between suction pipe 2 83 and suction pipe 1 81 to facilitate the loading, unloading, and vertical movement of the baffle 56. Preferably, in the configuration, suction pipe 1 81 and the flow divider 4 are located on opposite sides of the same longitudinal plane inside the coating tank 2 to prevent the baffle 56 from flipping over.

[0044] Optional, such as Figure 2As shown, a vent pipe 23 is connected to the bottom of the coating tank 2, and a small heater 24 is installed on the vent pipe 23. During the coating process, the coating tank 2 is usually under a high vacuum, while the vent pipe 23 comes into contact with the outside atmosphere during the venting process. When the gas in the vacuum environment is discharged through the vent pipe 23, the gas temperature drops rapidly, especially when the ambient temperature is low, making it easy for condensation to form on the inner wall of the vent pipe 23. Condensation can cause water vapor or other gaseous impurities to condense into liquid or solid states on the inner wall of the vent pipe 23. These condensates may re-enter the coating tank 2, contaminating the coating environment and affecting the quality of the film. The small heater 24 is used to prevent condensation, reduce impurity contamination, protect the vacuum system, improve production efficiency, avoid temperature gradients, and reduce static electricity accumulation.

[0045] In one embodiment, such as Figure 2 As shown, the heating device 3 includes a front-end heater 31 and a sublimation heater 32. The output end of the sublimation heater 32 is connected to the inlet 21, and the front-end heater 31 is connected to the input end of the sublimation heater 32. The front-end heater 31 is mainly used to preheat the substrate or coating environment to ensure the stability and uniformity of the coating process. The sublimation heater 32 is mainly used to heat the coating material to the sublimation temperature, so that it is converted into a gaseous state and deposited on the surface of the substrate.

[0046] The specific coating process is as follows:

[0047] Step 1: Check if the equipment is operating normally. Install the baffle 56 and place the substrate. Manually flip the baffle 56 to a vertical position so that its locking block 561 aligns with the first slot 573 on the lifting seat 5. Place the vertical baffle 56 into the coating tank 2. Insert the locking block 561 into the second slot 581 of the rotating seat 58 along the first slot 573. Flip the baffle 56 from a vertical position to a horizontal position to drive the rotating seat 58 to rotate, so that the second slot 581 is misaligned with the first slot 573, thereby completing the locking and fixing of the baffle 56 and the lifting seat 5. Place the substrate to be coated on the rotating table 71 below and close the coating tank 2.

[0048] Step 2: Initialize equipment settings, start the rotary motor 72, and make the rotary table 71 drive the substrate to start rotating at a low speed to ensure uniform coating. Start the air pump and evacuate the coating tank 2 through the first air extraction pipe 81 and the second air extraction pipe 83 until the vacuum degree required by the process is reached.

[0049] Step 3: Automatic adjustment of the coating space. The infrared detection strip on the inner wall of the coating tank 2 starts working to accurately detect the surface height of the substrate. Based on the detected height data, it automatically calculates and determines the optimal position of the baffle 56. The micro driver 55 is activated, driving the lifting seat 5 and the baffle 56 fixed on it to rise and fall, and precisely adjusting the coating space to the optimal size that matches the volume of the substrate.

[0050] Step 3-1: Linkage adjustment of the airflow channel. During the descent of the lifting seat 5, the partition seat 6 connected to it also descends. The partition seat 6 gradually blocks the diversion port 43 located above it, ensuring that the gasified target material is sprayed out only from the effective diversion port 43 below, directly reaching the surface of the substrate. At the same time, the extrusion block 62 fixed on the partition seat 6 slides along the slope groove 22. As the depth of the slope groove 22 becomes shallower, the extrusion block 62 is pushed to the bottom of the diversion groove 41, driving the nesting plate 63 to compress the elastic element. The roller 641 and the guide rail 411 ensure smooth movement, so that the flow cross-sectional area at the bottom of the diversion groove 41 automatically increases to adapt to the smaller coating space and ensure sufficient and stable airflow.

[0051] Step 4: Start heating and begin coating. Start the front-end heater 31 to preheat the coating environment. Start the sublimation heater 32 to heat the coating material to the sublimation temperature and generate a vaporized target. The vaporized target enters the distribution channel 41 of the distribution plate 4 through the inlet 21. The distribution channel 41 evenly distributes the airflow to all the distribution ports 43 that are not covered by the partition seat 6 and sprays it onto the rotating substrate surface to begin uniform deposition and form a thin film.

[0052] Step 5: End the work. After the predetermined coating time is reached, turn off the sublimation heater 32 and the front heater 31 in sequence. After the temperature inside the coating tank 2 drops to a safe range, slowly fill the tank with gas through the vent pipe 23 to break the vacuum and take out the product.

[0053] For substrates with "equal height but different surface areas" (such as multiple parts of the same height), the substrate consists of multiple parts (such as a batch of brackets or chips), which are placed on the rotating stage 71. Although the top height is the same, the total surface area is much larger than the cross-sectional area of ​​the coating tank 2 due to the gaps between the parts. The baffle 56 is lowered to a position slightly above this highest point. At this time, the space formed below the baffle 56 is much smaller than the entire space of the coating tank 2, but it is sufficient to accommodate all the parts. The vaporized target material is completely confined within this space, avoiding diffusion to the large upper cavity, resulting in extremely significant savings. All target material vapor is evenly sprayed onto the group of parts from all sides. Combined with the uniform rotation of the rotating stage 71, this ensures that every part, whether in the center or at the edge, is uniformly coated.

[0054] For substrates with "protrusions or steps in the height direction" (such as components with heat sinks), where the substrate itself has a large variation in surface area in the vertical direction, for example, a component with a chip at the bottom and a tall heat sink at the top, the final height of the baffle 56 will be set based on the highest point, with a safety margin.

[0055] For substrates with "irregular shapes" (such as complex three-dimensional components). The substrate is a complex three-dimensional component with different outer diameters and surface areas at different heights. The baffle 56 descends to a preset safety height, its purpose no longer being to match a flat plane, but to shield the huge, ineffective cavity between the top of the component and the top of the tank.

[0056] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0057] Finally, it should be noted that the above descriptions are merely preferred embodiments of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A multifunction integrated vacuum coating device comprising a frame (1), a coating tank (2) and a heating device (3), characterized in that, The coating tank (2) is fixed on the frame (1) and connected to the output end of the heating device (3). The coating tank (2) is provided with an inlet (21) corresponding to the heating device (3). A diversion plate (4) is fixed on the inner wall of the coating tank (2) corresponding to the inlet (21). A diversion groove (41) is opened on the side of the diversion plate (4) facing the inlet (21). A set of long grooves (42) is opened on the other side of the diversion plate (4) away from the inlet (21). Diversion ports (43) are opened at intervals on both sides of the diversion plate (4). A lifting seat (5) is provided on the diversion plate (4). The lower side of the lifting seat (5) corresponds to The long groove (42) is connected to a threaded sleeve (51), and a screw (52) is connected inside the threaded sleeve (51). The threaded sleeve (51) and the screw (52) are threaded together. The lower end of the screw (52) is rotatably engaged with the bottom of the long groove (42). A gear one (53) is sleeved on the lower end of the screw (52). A gear two (54) is connected to the gear one (53). A micro driver (55) is connected to the gear two (54). The micro driver (55) is fixed to the bottom of the diversion groove (41). A baffle (56) is movably connected to one side of the lifting seat (5). An infrared detection strip is provided on the inner wall of the coating tank (2). The lifting seat (5) is connected to a partition seat (6) on the other side. The partition seat (6) is slidably engaged with the diversion channel (41). A fine groove (61) is opened in the middle of the partition seat (6). An extrusion block (62) is slidably arranged in the fine groove (61). A nesting plate (63) is connected to the lower end of the extrusion block (62). An embedding groove (631) is opened inside the nesting plate (63). A telescopic plate (64) is slidably connected in the embedding groove (631). The nesting plate (63) and the telescopic plate (64) are located in the diversion channel (41). The bottom surface of the partition seat (6) matches the cross-section of the diversion groove (41), so that the bottom surface of the partition seat (6) and the two sides form a sealing surface, and the sealing surface divides the diversion groove (41) into two independent spaces, upper and lower; the inlet (21) is located on the lower side of the partition seat (6), and the movement range of the partition seat (6) is limited to the upper side of the inlet (21).

2. The multifunctional integrated vacuum coating equipment according to claim 1, characterized in that, The lifting seat (5) has a circular groove (572) on its surface. The lifting seat (5) has a slot 1 (573) on its upper side corresponding to the circular groove (572). A rotating seat (58) is rotatably connected inside the circular groove (572). A slot 2 (581) is provided on the rotating seat (58). A locking block (561) corresponding to the slot 2 (581) is provided at one end of the baffle (56).

3. The multifunctional integrated vacuum coating equipment according to claim 2, characterized in that, The lower end of the telescopic plate (64) is movably provided with a roller (641), the bottom of the diversion channel (41) is provided with a guide rail (411) in cooperation with the roller (641), the side of the nested plate (63) is connected to the diversion channel (41) with a bellows cover (65), the nested plate (63) and the diversion channel (41) are connected with an elastic element, and the inner wall of the coating tank (2) is provided with a slope groove (22) in cooperation with the extrusion block (62), the depth of the slope groove (22) gradually decreases from top to bottom.

4. The multifunctional integrated vacuum coating equipment according to claim 3, characterized in that, A rotating platform (71) is provided at the bottom of the coating tank (2). The shaft end of the rotating platform (71) extends out of the bottom of the coating tank (2) and is connected to a rotating motor (72).

5. The multifunctional integrated vacuum coating equipment according to claim 4, characterized in that, The coating tank (2) is provided with a first suction pipe (81). The lower end of the first suction pipe (81) is connected to an air pump. The upper end of the first suction pipe (81) is connected to several compression springs (82). The other end of the compression springs (82) is connected to a second suction pipe (83). The second suction pipe (83) is in sliding fit with the first suction pipe (81). Both the second suction pipe (83) and the first suction pipe (81) have several air ports (84) on their surfaces.

6. The multifunctional integrated vacuum coating equipment according to claim 5, characterized in that, The bottom of the coating tank (2) is connected to a vent pipe (23), and a small heater (24) is installed on the vent pipe (23).

7. The multifunctional integrated vacuum coating equipment according to claim 6, characterized in that, The heating device (3) includes a front-end heater (31) and a sublimation heater (32). The output end of the sublimation heater (32) is connected to the inlet (21), and the front-end heater (31) is connected to the input end of the sublimation heater (32). The front-end heater (31) is used to preheat the substrate or coating environment, and the sublimation heater (32) is used to heat the coating material to the sublimation temperature, so that it is converted into a gaseous state and deposited on the surface of the substrate.

8. The multifunctional integrated vacuum coating equipment according to claim 1, characterized in that, The lifting seat (5) is provided with a vertically penetrating groove (571) in conjunction with the diversion plate (4), and the surface area of ​​the baffle (56) is smaller than the cross-sectional area of ​​the coating tank (2).

9. A coating process for a multifunctional integrated vacuum coating equipment, applicable to the multifunctional integrated vacuum coating equipment described in claim 7, characterized in that, The coating process is as follows: Step 1: Check if the equipment is running normally, install the baffle (56) and place the substrate. Manually flip the baffle (56) to a vertical position so that its locking block (561) aligns with the first slot (573) on the lifting seat (5). Place the vertical baffle (56) into the coating tank (2). Insert the locking block (561) along the first slot (573) into the second slot (581) of the rotating seat (58). Flip the baffle (56) from a vertical position to a horizontal position to drive the rotating seat (58) to rotate, so that the second slot (581) and the first slot (573) are misaligned, thereby completing the locking and fixing of the baffle (56) and the lifting seat (5). Place the substrate to be coated on the rotating table (71) below and close the coating tank (2). Step 2: Initialize equipment settings, start the rotary motor (72) to make the rotary table (71) drive the substrate to start rotating at low speed to ensure uniform coating, start the air pump, and evacuate the coating tank (2) through the first air extraction pipe (81) and the second air extraction pipe (83) until the vacuum degree required by the process is reached; Step 3: Automatically adjust the coating space. The infrared detection strip on the inner wall of the coating tank (2) starts working to accurately detect the surface height of the substrate. Based on the detected height data, it automatically calculates and determines the optimal position of the baffle (56). The micro driver (55) starts, driving the lifting seat (5) and the baffle (56) fixed on it to rise and fall, and accurately adjusts the coating space to the optimal size that matches the volume of the substrate. Step 4: Start heating and begin coating. Start the front-end heater (31) to preheat the coating environment. Start the sublimation heater (32) to heat the coating material to the sublimation temperature and generate a vaporized target. The vaporized target enters the distribution channel (41) of the distribution plate (4) through the inlet (21). The distribution channel (41) evenly distributes the airflow to all the distribution ports (43) that are not covered by the partition seat (6) and sprays it onto the rotating substrate surface to begin uniform deposition and form a thin film. Step 5: After the work is completed and the predetermined coating time is reached, turn off the sublimation heater (32) and the front heater (31) in sequence. After the temperature inside the coating tank (2) drops to a safe range, slowly fill the tank with gas through the vent pipe (23) to break the vacuum and take out the product.

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