Intermittent optical ion detection framework for line edge

Abstract

The intermittent optical ion detection framework comprises a peristaltic pump, the peristaltic pump is communicated with a three-way electromagnetic valve I through an input pipe I, the three-way electromagnetic valve I is provided with a left port I, a middle port I and a right port I, the left port I is communicated with a liquid medicine tank I, and the right port I is communicated with a correction pipe; the peristaltic pump is communicated with a first quartz flow cell through a second input pipe, the first quartz flow cell is communicated with an ion detection sensor through a third input pipe, the ion detection sensor is communicated with a second quartz flow cell through a fourth input pipe, and the second quartz flow cell is communicated with a second three-way electromagnetic valve through a fifth input pipe. The second three-way electromagnetic valve is provided with a second left port, a second middle port and a second right port, the second left port is communicated with the second liquid medicine tank, the second right port is communicated with a third middle port of the third three-way electromagnetic valve, and the third three-way electromagnetic valve is provided with a third left port and a third right port. And the detection cost is reduced.

Description

Technical Field

[0001] This invention belongs to the field of ion analysis technology, and specifically relates to an intermittent optical ion detection architecture for line edges. Background Technology

[0002] The "line edge" typically refers to the material storage area next to the production line. Ionic contamination can lead to problems such as electrochemical migration, short circuits, and poor solder joints in materials near the production line, directly affecting product reliability and lifespan. Regular testing can promptly identify and resolve ion residue issues, preventing defective products from entering the market. Test results can guide production process improvements, such as adjusting welding process parameters and optimizing cleaning procedures, thereby reducing the risk of ion contamination and improving production efficiency.

[0003] Currently available ion analysis devices rely on a main equipment-side reagent pump to provide pressure for sampling and analysis (such as nickel and copper ion monitoring devices). If an anomaly causes sampling failure, the device cannot detect it and will send incorrect analysis results. If there is a linked concentration control device, it can lead to serious reagent abnormalities, increasing the testing cost. Summary of the Invention

[0004] Purpose of the invention: The purpose of this invention is to address the shortcomings of the prior art and provide an intermittent optical ion detection architecture for line edges.

[0005] An intermittent optical ion detection architecture for line edge includes a peristaltic pump. The peristaltic pump is connected to a three-way solenoid valve 1 via an input pipe 1. The three-way solenoid valve 1 has a left port 1, a middle port 1, and a right port 1. The left port 1 is connected to a chemical tank 1, and the right port 1 is connected to a calibration pipe. The peristaltic pump is connected to a quartz flow cell 1 via an input pipe 2. The quartz flow cell 1 is connected to an ion detection sensor via an input pipe 3. The ion detection sensor is connected to a quartz flow cell 2 via an input pipe 4. The quartz flow cell 2 is connected to a three-way solenoid valve 2 via an input pipe 5. The three-way solenoid valve 2 has a left port 2, a middle port 2, and a right port 2. The left port 2 is connected to the chemical tank 2, and the right port 2 is connected to the middle port 3 of the three-way solenoid valve 3. The three-way solenoid valve 3 has a left port 3 and a right port 3. The right port 3 is connected to a waste discharge pipe via a normally closed solenoid valve, and the left port 3 is connected to an air pipe.

[0006] A further improvement of the present invention is that a first quartz flow cell is equipped with a first sensor, and a second quartz flow cell is equipped with a second sensor.

[0007] A further improvement of the present invention is that sensor one is an optical sensor or a capacitive sensor, and sensor two is an optical sensor or a capacitive sensor.

[0008] A further improvement of the present invention is that a first medicine pipe is provided between the first left port and the first medicine tank, and a second medicine pipe is provided between the second left port and the second medicine tank.

[0009] A further improvement of the present invention is that a pipe joint is provided between the peristaltic pump and the input pipe.

[0010] A further improvement of the present invention is that a pipe joint two is provided between the peristaltic pump and the input pipe two.

[0011] A further improvement of the present invention is that the right port 2 is connected to the middle port 3 through the middle tube 1, and the middle tube 2 is provided between the right port 3 and the normally closed solenoid valve.

[0012] A further improvement of the present invention is that, when the three-way solenoid valve 1 is de-energized, the left port 1 is connected to the middle port 1, and the right port 1 is disconnected from the middle port 1; when the three-way solenoid valve 1 is energized, the left port 1 is disconnected from the middle port 1, and the right port 1 is connected to the middle port 1. When the three-way solenoid valve 2 is de-energized, the left port 2 is connected to the middle port 2, and the right port 2 is disconnected from the middle port 2; when the three-way solenoid valve 2 is energized, the left port 2 is disconnected from the middle port 2, and the right port 2 is connected to the middle port 2. When the three-way solenoid valve 3 is de-energized, the left port 3 is connected to the middle port 3, and the right port 3 is disconnected from the middle port 3; when the three-way solenoid valve 3 is energized, the left port 3 is disconnected from the middle port 3, and the right port 3 is connected to the middle port 3.

[0013] Compared with the prior art, the intermittent optical ion detection architecture for line edges provided by the present invention achieves at least the following beneficial effects: This invention can sample automatically without relying on external pressure; through basic pipeline layout and sensors, it can determine whether sampling is successful, reducing the probability of system misjudgment; in terms of inspection and maintenance, it can visually determine whether the solution is flowing normally through quartz flow cell one and quartz flow cell two; by sensing the time difference through sensor one and sensor two, it can determine whether the performance of the drug pump has deteriorated; it can perform sampling detection and has the function of external standard solution calibration; the analysis cycle is short and the architecture is compact, which reduces the detection cost and facilitates maintenance. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the overall structure of the present invention.

[0015] Figure 2 This is a state diagram of a three-way solenoid valve when it is de-energized and energized. Figure 2A shows the connection between the left port and the middle port of the three-way solenoid valve when it is de-energized, and Figure 2B shows the connection between the middle port and the right port of the three-way solenoid valve when it is energized.

[0016] Figure 3 This is a state diagram of the three-way solenoid valve 2 when it is de-energized and energized; Figure 3A shows the connection between the left port 2 and the middle port 2 of the three-way solenoid valve 2 when it is de-energized, and Figure 3B shows the connection between the middle port 2 and the right port 2 of the three-way solenoid valve 2 when it is energized.

[0017] Figure 4 This is a state diagram of a three-way solenoid valve when it is de-energized and energized. Figure 4A shows the connection between the left port 3 and the middle port 3 of the three-way solenoid valve 3 when it is de-energized, and Figure 4B shows the connection between the middle port 3 and the right port 3 of the three-way solenoid valve 3 when it is energized.

[0018] In the diagram: 1-Peristaltic pump; 2-Pipe connector one; 3-Pipe connector two; 4-Input pipe one; 5-Input pipe two; 6-Three-way solenoid valve one; 7-Left port one; 8-Chemical solution pipe one; 9-Chemical solution tank one; 10-Middle port one; 11-Calibration pipe; 12-Right port one; 13-Quartz flow cell one; 14-Sensor one; 15-Input pipe three; 16-Ion detection sensor; 17-Input pipe four; 18-Quartz flow cell 2; 19-Sensor 2; 20-Input Pipe 5; 21-Three-way Solenoid Valve 2; 22-Intermediate Port 2; 23-Left Port 2; 24-Right Port 2; 25-Intermediate Pipe 1; 26-Three-way Solenoid Valve 3; 27-Right Port 3; 28-Intermediate Pipe 2; 29-Intermediate Port 3; 30-Left Port 3; 31-Air Pipe; 32-Medicine Tank 2; 33-Normally Closed Solenoid Valve; 34-Waste Discharge Pipe; 35-Medicine Pipe 2. Detailed Implementation

[0019] Various exemplary embodiments of the present invention will now be described in detail. It should be noted that, unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps set forth in these embodiments do not limit the scope of the invention. The following description of at least one exemplary embodiment is merely illustrative and is in no way intended to limit the invention or its application or use.

[0020] Techniques, methods, and apparatus known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and apparatus should be considered part of the specification. In all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values.

[0021] See the attached instruction manual. Figure 1-4An intermittent optical ion detection architecture for line edge includes a peristaltic pump 1, which is connected to a three-way solenoid valve 6 via an input pipe 4. The three-way solenoid valve 6 has a left port 7, a middle port 10, and a right port 12. The left port 7 is connected to a chemical tank 9, and the right port 12 is connected to a calibration pipe 11. The peristaltic pump 1 is connected to a quartz flow cell 13 via an input pipe 25. The quartz flow cell 13 is connected to an ion detection sensor 16 via an input pipe 35. The ion detection sensor 16 is connected to the quartz flow cell 28 via an input pipe 47. Quartz flow cell 2 18 is connected to three-way solenoid valve 2 21 through input pipe 5 20. Three-way solenoid valve 2 21 has a left port 2 23, a middle port 2 22 and a right port 2 24. Left port 2 23 is connected to medicine tank 2 32. Right port 2 24 is connected to the middle port 3 29 of three-way solenoid valve 3 26. Three-way solenoid valve 3 26 has a left port 3 30 and a right port 3 27. Right port 3 27 is connected to waste discharge pipe 34 through normally closed solenoid valve 33. Left port 3 30 is connected to air pipe 31. Quartz flow cell 1 13 and quartz flow cell 2 18 are arranged vertically.

[0022] Quartz flow cell 13 is equipped with sensor 14, and quartz flow cell 28 is equipped with sensor 29. Sensor 14 is an optical sensor or a capacitive sensor, and sensor 29 is an optical sensor or a capacitive sensor, both of which can perform non-contact measurement. A medicine pipe 8 is provided between left port 17 and medicine tank 19, and a medicine pipe 25 is provided between left port 23 and medicine tank 22. A pipe connector 2 is provided between peristaltic pump 1 and input pipe 14. A pipe connector 23 is provided between peristaltic pump 1 and input pipe 25. Right port 24 is connected to intermediate port 39 through intermediate pipe 125. An intermediate pipe 28 is provided between right port 37 and normally closed solenoid valve 33. The normally closed solenoid valve 33 remains closed when de-energized, which can effectively block fluid flow and avoid the risk of media leakage.

[0023] When the three-way solenoid valve 16 is de-energized, the left port 17 is connected to the middle port 10, and the right port 12 is disconnected from the middle port 10. When the three-way solenoid valve 16 is energized, the left port 17 is disconnected from the middle port 10, and the right port 12 is connected to the middle port 10. When the three-way solenoid valve 21 is de-energized, the left port 23 is connected to the middle port 22, and the right port 24 is disconnected from the middle port 22. When the three-way solenoid valve 21 is energized, the left port 23 is disconnected from the middle port 22, and the right port 24 is connected to the middle port 22. When the three-way solenoid valve 26 is de-energized, the left port 30 is connected to the middle port 29, and the right port 27 is disconnected from the middle port 29. When the three-way solenoid valve 26 is energized, the left port 30 is disconnected from the middle port 29, and the right port 27 is connected to the middle port 29.

[0024] The steps for ion detection are as follows: Step 11: The three-way solenoid valve 21 is energized to cut off the air, the peristaltic pump 1 reverses, and after the sensor 14 and sensor 29 detect no liquid, the peristaltic pump 1 stops after a delay of T1 seconds (the user sets the time T1 to empty the detection pipeline), and the three-way solenoid valve 21 is de-energized. Step 12: Peristaltic pump 1 rotates forward to draw out the medicine. After sensor 14 and sensor 29 detect the presence of liquid, the peristaltic pump 1 stops pumping after a delay of T2 seconds (the user sets the time T2 to ensure successful sampling and fresh medicine). Step 13: Ion detection sensor 16 measures ion concentration; Step 14: End analysis.

[0025] If sensor 14 or sensor 29 in step 11 continuously detects the presence of liquid, check whether peristaltic pump 1 or three-way solenoid valve 21, three-way solenoid valve 26, or normally closed solenoid valve 33 has failed.

[0026] If sensor 14 or sensor 29 in step 12 continues to detect the absence of liquid, check whether peristaltic pump 1 or three-way solenoid valve 6 has failed.

[0027] The calibration steps are as follows: Step 21: Wipe the calibration tube 11 clean and insert it into the standard concentration solution; Step 22: Continuing from the previous state, keep the three-way solenoid valve 1 6 and the three-way solenoid valve 21 energized, and energize the three-way solenoid valve 26 and the normally closed solenoid valve 33 to cut off waste discharge. The peristaltic pump 1 rotates forward to draw out the medicine. After the sensor 1 14 or the sensor 2 19 detects the presence of liquid, delay for T2 seconds and stop the P1 pump (the user sets the time T2 to ensure successful sampling and fresh medicine). De-energize the three-way solenoid valve 26 and the normally closed solenoid valve 33. Step 23: Ion detection sensor 16 measures ion concentration, and the system records the sensor value for calibration. Step 24: Peristaltic pump 1 reverses, sensor 14 or sensor 219 detects no liquid draining from the detection line and peristaltic pump P1 stops, three-way solenoid valve 6 and three-way solenoid valve 21 are de-energized and the standard solution is removed.

[0028] If sensor 14 or sensor 29 in step 22 continuously detects the presence of liquid, check whether peristaltic pump 1 or three-way solenoid valve 21, solenoid valve 26, or normally closed solenoid valve 33 has failed.

[0029] If sensor 14 or sensor 29 in step 24 continuously detects the absence of liquid, check whether peristaltic pump 1 or three-way solenoid valve 21, solenoid valve 26, or normally closed solenoid valve 33 has failed.

[0030] The specific embodiments described herein are merely illustrative of the spirit of the invention. Those skilled in the art to which this invention pertains may make various modifications or additions to the described specific embodiments or use similar methods to substitute them, without departing from the spirit of the invention or exceeding the scope defined by the appended claims.

Claims

1. An intermittent optical ion detection architecture for line edges, characterized in that, The system includes a peristaltic pump (1), which is connected to a three-way solenoid valve (6) via an input pipe (4). The three-way solenoid valve (6) is provided with a left port (7), a middle port (10), and a right port (12). The left port (7) is connected to a medicine tank (9), and the right port (12) is connected to a calibration pipe (11). The peristaltic pump (1) is connected to a quartz flow cell (13) via an input pipe (2) (5). The quartz flow cell (13) is connected to an ion detection sensor (16) via an input pipe (3) (15). The ion detection sensor (16) is connected to a quartz flow cell (14) via an input pipe (4) (17). 8) The quartz flow cell 2 (18) is connected to the three-way solenoid valve 2 (21) through the input pipe 5 (20). The three-way solenoid valve 2 (21) is provided with a left port 2 (23), a middle port 2 (22) and a right port 2 (24). The left port 2 (23) is connected to the medicine tank 2 (32). The right port 2 (24) is connected to the middle port 3 (29) of the three-way solenoid valve 3 (26). The three-way solenoid valve 3 (26) is provided with a left port 3 (30) and a right port 3 (27). The right port 3 (27) is connected to the waste discharge pipe (34) through the normally closed solenoid valve (33). The left port 3 (30) is connected to the air pipe (31).

2. The intermittent optical ion detection architecture for line edges according to claim 1, characterized in that, The first quartz flow cell (13) is equipped with a sensor (14), and the second quartz flow cell (18) is equipped with a sensor (19).

3. The intermittent optical ion detection architecture for line edges according to claim 1, characterized in that, The first sensor (14) is an optical sensor or a capacitive sensor, and the second sensor (19) is an optical sensor or a capacitive sensor.

4. The intermittent optical ion detection architecture for line edges according to claim 1, characterized in that, A medicine pipe 1 (8) is provided between the left port 1 (7) and the medicine tank 1 (9), and a medicine pipe 2 (35) is provided between the left port 2 (23) and the medicine tank 2 (32).

5. The intermittent optical ion detection architecture for line edges according to claim 1, characterized in that, A pipe joint (2) is provided between the peristaltic pump (1) and the input pipe (4).

6. The intermittent optical ion detection architecture for line edges according to claim 1, characterized in that, A pipe joint 2 (3) is provided between the peristaltic pump (1) and the input pipe 2 (5).

7. The intermittent optical ion detection architecture for line edges according to claim 1, characterized in that, The right port 2 (24) is connected to the middle port 3 (29) through the middle pipe 1 (25), and the middle pipe 2 (28) is provided between the right port 3 (27) and the normally closed solenoid valve (33).

8. A line-edge intermittent optical ion detection architecture according to any one of claims 1-7, characterized in that, When the three-way solenoid valve 1 (6) is de-energized, the left port 1 (7) is connected to the middle port 1 (10), and the right port 1 (12) is disconnected from the middle port 1 (10). When the three-way solenoid valve 1 (6) is energized, the left port 1 (7) is disconnected from the middle port 1 (10), and the right port 1 (12) is connected to the middle port 1 (10). When the three-way solenoid valve 2 (21) is de-energized, the left port 2 (23) is connected to the middle port 2 (22), and the right port 2 (24) is disconnected from the middle port 2 (22). When the three-way solenoid valve 2 (21) is energized, the left port 2 (23) is disconnected from the middle port 2 (22), and the right port 2 (24) is connected to the middle port 2 (22); when the three-way solenoid valve 3 (26) is de-energized, the left port 3 (30) is connected to the middle port 3 (29), and the right port 3 (27) is disconnected from the middle port 3 (29); when the three-way solenoid valve 3 (26) is energized, the left port 3 (30) is disconnected from the middle port 3 (29), and the right port 3 (27) is connected to the middle port 3 (29).

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