Air seal isolation proximity induction switch protection device

Abstract

The invention belongs to the field of inductor protection, and particularly relates to an air seal isolation proximity induction switch protection device which comprises a protector body, a mounting support is arranged on the surface of the protector body, the protector body comprises a sleeve, an auxiliary bolt hole is formed in the surface of the sleeve, the inner wall of the sleeve is connected with the surface of an air cavity in a sleeved mode, and the inner wall of the sleeve is connected with the surface of the air cavity in a sleeved mode. The upper surface of the air cavity is detachably connected with the cover plate through fixing bolts, and a sealing gasket is arranged on the inner wall of the air cavity. According to the gas seal isolation proximity inductive switch protection device, through the arrangement of the gas hole, when high-pressure gas enters the gas cavity through the switching gas pipe, the gas cavity is divided into an upper chamber and a lower chamber, gas in the upper chamber is sprayed out through the gas hole, and due to the fact that the position of the gas hole is tightly attached to the surface of the inductive switch, the sprayed gas is not prone to falling off due to the adhesion of the gas; air flow attached to the surface of the inductive switch forms a stable air film, and pollutant attachment in the follow-up environment can be isolated.

Description

Technical Field

[0001] This invention relates to the field of sensor protection technology, specifically to a gas-sealed isolation proximity sensor switch protection device. Background Technology

[0002] In the semiconductor wafer polishing process, four proximity sensors need to be installed at certain workstations to monitor and control the equipment's operating status. However, their installation locations are directly exposed to a humid and alkaline complex working environment, which causes the proximity sensors to frequently malfunction and trigger false alarms. This leads to unstable equipment operation, frequent alarm failures, and seriously affects production efficiency and processing continuity.

[0003] Analysis revealed that the core causes of false triggering of proximity switches stemmed from environmental interference in three types of work scenarios: First, the alkaline polishing liquid added to the polishing table during polishing operations is prone to splashing, adhering to the surface of the proximity switch and gradually forming crystals. Long-term accumulation can lead to a decrease in the detection accuracy of the proximity switch or false triggering. Second, during the process of rinsing the ceramic disc with clean water after polishing, the rinsing water flow can easily splash onto the surface of the proximity switch, causing the proximity switch to remain in a water droplet state for a long time, affecting its signal transmission stability. Third, when the table is rinsed with high-pressure water after polishing, the splashing effect of the high-pressure water flow can cause water droplets to adhere to the surface of the proximity switch, and scale is also easily formed in the alkaline environment, further increasing the risk of false triggering.

[0004] To alleviate the above problems, existing methods require manual scraping of the crystallized surface of the proximity switch with a blade at irregular intervals, followed by rinsing and cleaning. This operation is not only cumbersome and time-consuming, affecting production progress, but also cannot fundamentally prevent the recurrence of crystallization, beads, and scale, making it difficult to completely solve the core problem of false triggering of proximity switches. In view of this, we propose an air-sealed isolation proximity switch protection device. Summary of the Invention

[0005] The main objective of this invention is to provide a gas-sealed isolation proximity sensor switch protection device that can solve the problems mentioned in the background art.

[0006] To achieve the above objectives, the present invention provides a gas-sealed isolation proximity sensor switch protection device, comprising a protector body, wherein a mounting bracket is provided on the surface of the protector body, and the protector body includes:

[0007] The sleeve and the air chamber disposed inside the sleeve, the side wall of the sleeve is provided with auxiliary bolt holes; the top opening end of the air chamber is sealed to the cover plate by a fastener, and the cover plate is provided with a mounting hole for the induction switch to pass through and an interface for connecting the air pipe.

[0008] The air chamber is equipped with a partition, and the outer peripheral wall of the partition is provided with a sealing ring groove. A sealing ring that seals with the inner wall of the air chamber is embedded in the sealing ring groove. A sealing thread is provided in the middle of the partition, and the inductive switch is threadedly connected to the partition through the sealing thread.

[0009] The partition plate has a through-hole for air intake. The lower end of the inner wall of the air intake is provided with an anti-detachment inward angle to prevent the hole from shrinking. A magnetic bead is movably installed inside the air intake. The magnetic bead is confined within the air intake and located above the anti-detachment inward angle. Due to the magnetism of the magnetic bead, it is tightly attracted to the inner wall of the air intake by its own magnetism when working. When it is necessary to adjust the jet angle, it can be easily adjusted by inserting an adjusting rod.

[0010] Preferably, the air guide holes are provided in multiple forms and arranged in an equidistant circular array on the partition plate.

[0011] Preferably, the magnetic bead has a vent hole along its central axis.

[0012] Preferably, the air cavity includes a cavity body, the bottom of the cavity body is provided with an exhaust port, and the inner wall of the cavity body is provided with a limiting ring for supporting the partition.

[0013] Preferably, the inner wall of the exhaust port has an inclined angle, and the detection end of the inductive switch is suspended above the exhaust port and does not contact the surface of the exhaust port.

[0014] Preferably, the mounting bracket includes a guide rail, a threaded rod is rotatably connected inside the guide rail, a sliding block is threadedly connected to the threaded rod, the sliding block is slidably disposed inside the guide rail and fixedly connected to the sleeve; a fastener is also connected to the sliding block, and the fastener is slidably engaged with the guide rail.

[0015] This invention provides a gas-sealed proximity sensor switch protection device. It has the following advantages:

[0016] (1) The gas-sealed proximity switch protection device can adjust the position of the magnetic bead's vent by inserting an adjusting rod, so that the gas is sprayed at an angle onto the surface of the columnar induction switch. When the airflow hits or approaches its surface, a cylindrical flow will occur. On the windward side, the airflow is blocked by the column and will be split along the column surface to the upper and lower sides, forming a boundary layer airflow that is close to the surface. On the leeward side, a weak backflow zone is formed, but the attached flow on the windward side can still cover most of the column surface. Finally, the continuous airflow layer flowing along the column surface will cover the column like a film, preventing other substances from directly penetrating the layer and contacting the column surface, thus forming a more effective rotating wind barrier, further improving the device's ability to block liquid splashing and avoiding crystallization or adhesion.

[0017] (2) The gas seal isolation proximity induction switch protection device, through the set exhaust port, the inclined exhaust port can guide the buffer gas in the lower chamber to be discharged quickly along the inclined direction, avoid the gas to stagnate at the exhaust port and form back pressure, thereby ensuring the stability of the jet pressure in the upper chamber and not affecting the adhesion and entrainment effect brought about by the gas adhesion; at the same time, the inclined design reduces exhaust resistance and avoids the backflow of airflow from interfering with the pressure balance inside the air chamber.

[0018] (3) The air-sealed proximity switch protection device uses a connecting air pipe as a communication channel between the external air source and the upper chamber of the air chamber. Its cross-sectional area is much larger than the vent holes on the magnetic beads. Based on the principle that the pressure of gas flow is related to the cross-sectional area, when the airflow rate of the air source is stable, the gas enters the upper chamber of the air chamber separated by the partition through the large cross-sectional area connecting air pipe. Due to the significant reduction in the cross-sectional area of ​​the vent holes of the subsequent magnetic beads, a flow obstruction effect is formed. This effect prevents the gas from diffusing into the lower chamber through the vent holes in a timely and rapid manner, thereby forming a stable and larger air pressure in the upper chamber of the air chamber. The larger jet air pressure can improve the jet efficiency of the airflow and ensure the quality of the rotating wind barrier. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.

[0020] Figure 1 This is a schematic diagram of the overall three-dimensional structure of the present invention;

[0021] Figure 2 This is a schematic diagram of the main structure of the protector of the present invention;

[0022] Figure 3 This is a schematic cross-sectional view of the main body of the protector of the present invention;

[0023] Figure 4 This is a schematic diagram of the partition structure of the present invention;

[0024] Figure 5 This is a schematic diagram of the cross-sectional structure of the present invention;

[0025] Figure 6 This is a schematic diagram of the mounting bracket part of the present invention.

[0026] Explanation of reference numerals in the attached diagram: 1. Protector body; 2. Mounting bracket; 101. Sleeve; 102. Auxiliary bolt hole; 103. Air chamber; 104. Cover plate; 105. Fixing bolt; 106. Sealing gasket; 107. Adapter air pipe; 108. Inductive switch; 1091. Partition plate; 1092. Sealing ring groove; 1093. Sealing thread; 1094. Air guide hole; 1095. Anti-detachment inner corner; 1096. Magnetic bead; 201. Guide rail; 202. Threaded rod; 203. Sliding block; 204. Fastening block.

[0027] The realization of the objective, functional features and advantages of the present invention will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation

[0028] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0029] Please see Figures 1-6 This invention proposes a gas-sealed proximity sensor switch protection device, comprising a protector body 1, a mounting bracket 2 disposed on the surface of the protector body 1, the mounting bracket 2 including a guide rail 201, a threaded rod 202 rotatably connected inside the guide rail 201, a sliding block 203 threadedly connected to the threaded rod 202, the sliding block 203 slidably disposed inside the guide rail 201 and fixedly connected to a sleeve 101; a fastener 204 is also connected to the sliding block 203, the fastener 204 slidingly engaging with the guide rail 201. The protector body 1 includes:

[0030] The sleeve 101 and the air chamber 103 disposed inside the sleeve 101 are included. The air chamber 103 includes a cavity body 1031. An exhaust port 1032 is provided at the bottom of the cavity body 1031. A limiting ring 1033 for supporting the partition 1095 is provided on the inner wall of the cavity body 1031. The inner wall of the exhaust port 1032 has an inclined angle. The detection end of the inductive switch 108 is suspended above the exhaust port 1032 and does not contact the surface of the exhaust port 1032. An auxiliary bolt hole 102 is provided on the side wall of the sleeve 101. The top opening end of the air chamber 103 is sealed to the cover plate 104 through a fastener. The cover plate 104 is provided with a mounting hole for the inductive switch 108 to pass through and an interface for connecting the adapter air pipe 107.

[0031] The air chamber 103 is equipped with a partition 1091. The outer peripheral wall of the partition 1091 is provided with a sealing ring groove 1092. A sealing ring 110 is embedded in the sealing ring groove 1092 to seal against the inner wall of the air chamber 103. A sealing thread 1093 is provided in the middle of the partition 1091. The inductive switch 108 is threadedly connected to the partition 1091 through the sealing thread 1093. A through air guide hole 1094 is provided on the partition 1091. The lower end of the inner wall of the air guide hole 1094 is provided with an anti-detachment inner angle 1095 with a reduced aperture. A magnetic bead 1096 is movably arranged inside the air guide hole 1094. The magnetic bead 1096 is a permanent magnet. The magnetic bead 1096 is confined in the air guide hole 1094 and located above the anti-detachment inner angle 1095.

[0032] In an embodiment of the present invention, in order to ensure the stability of the magnetic bead 1096 during operation, its anti-detachment concave angle 1095 is arc-shaped and concave. This allows the surface of the magnetic bead 1096 to have a large contact area with the surface of the anti-detachment concave angle 1095 during operation. Therefore, when the magnetic bead 1096 is adsorbed onto the inner wall of the air guide hole 1094, the magnetic properties of the magnetic bead 1096 interact with the air guide hole 1094, causing the magnetic bead 1096 to be subjected to a downward force. Combined with the arc-shaped and concave shape of the anti-detachment concave angle 1095, this further enhances the stability of the magnetic bead 1096. The larger contact area generated produces greater friction, which further increases the stability of the magnetic bead 1096 in the air guide hole 1094. The connecting air tube 107 serves as the air source input channel, and its inner diameter is set to be no less than 4 times the inner diameter of the air vent of a single magnetic bead 1096. This ensures that when the air source gas enters the upper chamber of the air cavity 103 quickly through the large-diameter connecting air tube 107, the gas flow rate is limited due to the significantly reduced inner diameter of the air vent of the magnetic bead 1096, thus accumulating and forming a stable high-pressure environment in the upper chamber.

[0033] In this invention, during use, an adjusting rod with a diameter smaller than the vent hole diameter of the magnetic bead 1096 is inserted into the vent hole of the magnetic bead 1096. The adjusting rod is made of non-magnetic material. After insertion, the direction of the vent hole can be turned by overcoming the magnetism of the magnetic bead 1096. After adjustment, the magnetic bead 1096 is fixed by its own magnetism, thereby adjusting the position of the vent hole of the magnetic bead 1096. This causes the gas to be sprayed obliquely onto the surface of the columnar inductive switch 108. When the airflow hits or approaches its surface, a cylindrical flow occurs. On the windward side, after the airflow is blocked by the column, it will split along the surface of the column to the upper and lower sides, forming a boundary layer airflow that adheres closely to the surface. On the leeward side, a weak backflow zone is formed, but the adhering flow on the windward side can still cover most of the surface of the column. Finally, the continuous airflow layer flowing along the surface of the column will resemble... The thin film covers the column, preventing other substances from directly penetrating the layer and contacting the column surface, thus forming a more effective rotating wind barrier. This further enhances the device's ability to block liquid splashing and prevents crystallization or adhesion. The magnetic bead 1096 can be adjusted using a synchronous adjustment device, which is existing technology and will not be elaborated further here. When the spray angle of the magnetic bead 1096's vent is tilted at a small angle of 30-40 degrees, it is a near-radial direct jet, with the radial momentum of the jet dominating. The high-speed airflow directly impacts the side of the central column. After the impact, the airflow splits to both sides along the surface of the column. At the same time, due to the viscous diffusion of the jet, a boundary layer superposition zone is formed on the surface of the column. The speed of this airflow is much higher than that of the surrounding fluid, and its direction extends along the surface, forming a close-fitting wind barrier. However, due to the excessive radial momentum, some airflow will undergo boundary layer separation at the impact point, forming a small-scale vortex on the side of the column facing away from the jet orifice. The circulating flow of the vortex will further enhance the obstruction effect of the wind barrier. Meanwhile, the jet angle of the 1096 magnetic bead's vent is a medium-angle inclination. At 40-50 degrees, the radial and axial momentum of the jet are balanced, and the airflow will not directly impact the column but will approach the surface at an oblique angle. The obliquely approaching airflow has a stronger adhesion effect on the column surface, causing the airflow to spiral around the column surface or extend axially, forming a spiral wind barrier or a long... In a strip-shaped wind barrier, if the jet angle of the 1096 magnetic bead's vent is a large angle (50-60 degrees), the axial momentum of the jet is absolutely dominant, while the radial momentum is extremely weak. The airflow hardly acts directly on the columnar body, but flows along the container wall or axially. With a near-tangential tilt, the airflow makes circular motion along the container wall, forming a rotating flow on the wall. The wind barrier on the surface of the central columnar body is a passive adhesion layer of the rotating flow. Due to insufficient radial momentum, the wind barrier is extremely thin, but it has a wide coverage area and extremely strong stability. The rotating flow is constrained by the semi-enclosed container and is not easy to leak out, making it suitable for large-diameter inductive switches.

[0034] The above description is merely a preferred embodiment of the present invention and does not limit the patent scope of the present invention. Any equivalent structural transformations made using the contents of the present invention's specification and drawings under the inventive concept of the present invention, or direct / indirect applications in other related technical fields, are included within the patent protection scope of the present invention.

Claims

1. A gas-sealed proximity sensor protection device, comprising a protector body (1), characterized in that: The surface of the protector body (1) is provided with a mounting bracket (2), and the protector body (1) includes: A sleeve (101) and an air chamber (103) disposed inside the sleeve (101). The side wall of the sleeve (101) is provided with auxiliary bolt holes (102). The top opening end of the air chamber (103) is sealed to the cover plate (104) by a fastener. The cover plate (104) is provided with a mounting hole for the induction switch (108) to pass through and an interface for connecting the adapter air pipe (107). The air chamber (103) is provided with a partition (1091). A sealing ring groove (1092) is provided on the outer peripheral wall of the partition (1091). A sealing ring (110) that seals with the inner wall of the air chamber (103) is embedded in the sealing ring groove (1092). A sealing thread (1093) is provided in the middle of the partition (1091). The inductive switch (108) is threadedly connected to the partition (1091) through the sealing thread (1093). The partition (1091) has a through air vent (1094). The lower end of the inner wall of the air vent (1094) is provided with an anti-detachment inward angle (1095) with a narrowed aperture. A magnetic bead (1096) is movably arranged inside the air vent (1094). The magnetic bead (1096) is confined within the air vent (1094) and located above the anti-detachment inward angle (1095).

2. The gas-sealed isolation proximity sensor protection device according to claim 1, characterized in that: The air guide holes (1094) are provided in multiple ways and are arranged in an equidistant circular array on the partition plate (1091).

3. The gas-sealed isolation proximity sensor protection device according to claim 1, characterized in that: The magnetic bead (1096) has a vent hole in its central axis.

4. The gas-sealed isolation proximity sensor protection device according to claim 1, characterized in that: The air chamber (103) includes a chamber body (1031), an exhaust port (1032) is provided at the bottom of the chamber body (1031), and a limiting ring (1033) for supporting the partition (1095) is provided on the inner wall of the chamber body (1031).

5. The gas-sealed isolation proximity sensor protection device according to claim 1, characterized in that: The inner wall of the exhaust port (1032) has an inclined angle, and the detection end of the inductive switch (108) is suspended above the exhaust port (1032) and does not contact the surface of the exhaust port (1032).

6. The gas-sealed isolation proximity sensor protection device according to claim 1, characterized in that: The mounting bracket (2) includes a guide rail (201), a threaded rod (202) is rotatably connected inside the guide rail (201), a sliding block (203) is threadedly connected to the threaded rod (202), the sliding block (203) is slidably disposed inside the guide rail (201) and fixedly connected to the sleeve (101); a fastener (204) is also connected to the sliding block (203), the fastener (204) is slidably engaged with the guide rail (201).

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