Control system for detecting light attenuation and self-compensation of LED heating lamp panel

Abstract

The invention discloses a control system for detecting light attenuation and self-compensation of an LED heating lamp panel, and relates to the field of semiconductor wafer heating and cleaning, the system collects illumination data of the LED heating lamp panel through a spectrum detection unit, a main control unit compares real-time illumination data with target illumination data, and then the input power of the lamp panel is adjusted to realize self-compensation; the temperature detection unit and the current detection unit respectively monitor the temperature of the lamp panel and the current of the power supply loop, and stop the self-compensation operation in case of abnormality; after illumination collection or power adjustment is completed every time, the lamp panel enters a zero-power input stage to be cooled; after the self-compensation is completed, the main control unit transmits the adaptive power value to the equipment upper computer so as to update the process parameters; according to the system, automatic detection and accurate compensation of light attenuation of the LED heating lamp panel are achieved, manual intervention is not needed, the stability of the light power density of the LED heating lamp panel is guaranteed, the equipment loss is reduced, and the wafer cleaning quality and the production efficiency are improved.

Description

Technical Field

[0001] This invention relates to the field of semiconductor wafer heating and cleaning, and specifically to a control system for detecting and self-compensating the light attenuation of LED heating lamp panels. Background Technology

[0002] In wafer cleaning equipment, high-power LED chips are often used in the LED heating lamp panel to quickly heat the wafer surface to the vaporization temperature of the cleaning solution. Aging and wear of the chip materials lead to light decay, and the lamp panel's prolonged exposure to high temperatures, if not dissipated promptly, will also accelerate this light decay. In traditional wafer cleaning equipment, setting the heating power of the LED heating lamp panel to a fixed value results in a decrease in the lamp panel's light power density after a period of use. This causes the wafer surface temperature to fail to reach the required level within the process time, thus reducing the wafer cleaning quality. Therefore, after a period of use, it is necessary to test the light intensity of the LED heating lamp panel and increase the light intensity to a suitable value by increasing the lamp panel's power input. However, manually increasing the heating power of the LED heating lamp panel increases the workload for operators and the testing time. How to achieve automatic compensation for light attenuation of the LED heating lamp panel while ensuring the compensation system's efficiency and accuracy is a pressing technical problem that needs to be solved. Summary of the Invention

[0003] To address the shortcomings of existing technologies, this invention proposes a control system for detecting and self-compensating the light attenuation of LED heating lamp panels, thus solving the problem that traditional equipment cannot control the power of the lamp panel through light detection.

[0004] To achieve the above objectives, the present invention provides the following technical solution: a control system for detecting and self-compensating the light attenuation of an LED heating lamp panel, comprising: The spectral detection unit collects illuminance data of the LED heating lamp panel through a spectral sensor and transmits the illuminance data to the main control unit; The main control unit reads the illuminance data collected by the spectral detection unit and adjusts the input power of the LED heating lamp plate according to the comparison result between the target illuminance data and the illuminance data. The input power is the active power provided by the power supply circuit to the LED heating lamp plate to drive the lamp beads inside the lamp plate to emit light and realize the heating function. The temperature detection unit collects temperature data of the LED heating lamp panel through a temperature sensor installed inside the LED lamp panel and transmits the temperature data to the main control unit; The current detection unit detects the change in current of the LED heating lamp plate when the input power of the LED heating lamp plate is changed. The LED heating lamp panel receives power adjustment signals from the main control unit to provide heating for the cleaning of semiconductor wafers.

[0005] Preferably, the spectral sensor of the spectral detection unit is fixedly installed directly above the LED heating lamp panel, and transmits the collected illuminance data to the main control unit in real time through the communication interface. The illuminance data is the light intensity when the LED heating lamp panel emits light.

[0006] Preferably, the spectral detection unit continuously collects 10 to 20 sets of illuminance data of the LED heating lamp panel under normal operating conditions based on the illuminance acquisition frequency. After removing the maximum and minimum values ​​from the 10 to 20 sets of illuminance data, the average value is taken and set as the target illuminance data. The target illuminance data is then transmitted to the main control unit.

[0007] Preferably, the main control unit is equipped with a communication interface that matches the spectrum detection unit, temperature detection unit and current detection unit, receives and stores target illuminance data, compares the real-time received illuminance data with the target illuminance data, and outputs a power adjustment signal to the LED heating lamp panel based on the comparison result.

[0008] Preferably, the main control unit compares the real-time received illuminance data with the target illuminance data. When the real-time received illuminance data is less than the target illuminance data, a self-compensation operation is performed, as follows: The main control unit gradually increases the input power of the LED heating lamp plate in increments of 5% to 10%, generates a power adjustment signal, and transmits it to the LED heating lamp plate to adjust the input power of the LED heating lamp plate. When the illuminance data received by the main control unit in real time is consistent with the target illuminance data, the main control unit stops adjusting the input power of the LED heating lamp panel and records the current input power of the LED heating lamp panel as the adaptation power value.

[0009] Preferably, the temperature detection unit includes at least three temperature sensors, which are respectively embedded in the gaps between the LED bead array and the heat dissipation substrate of the LED heating lamp body. The temperature data collected by the temperature sensors is transmitted to the main control unit through a communication interface. When the temperature data collected by any temperature sensor exceeds the preset safe temperature threshold, the main control unit stops the self-compensation operation.

[0010] Preferably, the current detection unit is connected in series in the power supply circuit of the LED heating lamp panel, and uses a Hall current sensor to detect the real-time input current and transmit the current to the main control unit; When the input power of the LED heating lamp panel is fixed, if the deviation between the real-time input current and the theoretical constant current exceeds ±5%, or if the deviation between the current and the input power increases by 5% to 10% each time, the deviation exceeds ±3%, the main control unit will issue an abnormal warning signal and stop the self-compensation operation.

[0011] Preferably, after each completion of the illuminance data acquisition operation of the LED heating lamp panel or the input power adjustment of the LED heating lamp panel, the main control unit causes the LED heating lamp panel to enter a zero power input phase for 10 to 30 seconds.

[0012] Preferably, when comparing the real-time received illuminance data with the target illuminance data, if the real-time received illuminance data is less than the preset attenuation threshold of the target illuminance data, the main control unit issues a self-compensation calibration reminder through the audible and visual alarm module, and simultaneously transmits the reminder signal to the human-machine interface of the host computer.

[0013] Preferably, after the main control unit completes the self-compensation operation, it transmits the recorded adaptive power value to the host computer of the device. The host computer of the device updates the corresponding wafer cleaning process heating parameters, and the LED heating lamp plate operates according to the updated adaptive power value. The host computer of the device is equipped with a human-machine interactive touch screen and a human-machine interactive interface.

[0014] Compared with existing technologies, it has the following advantages: This solution proposes a control system for detecting and self-compensating the light attenuation of LED heating lamp panels. It uses a spectral detection unit to accurately collect illuminance data in real time and automatically detect and compensate for light attenuation, eliminating the need for manual power adjustment and significantly reducing operational complexity and the risk of misjudgment. Through multiple designs including a temperature detection unit, a current detection unit, and a zero-power input cooling stage, a comprehensive safety protection mechanism is constructed, effectively preventing damage from overheating and overcurrent of the lamp panel and ensuring long-term reliable operation of the equipment. The self-compensated adaptive power value can be automatically synchronized to the host computer to update process parameters, ensuring stable light power density of the LED heating lamp panel. This improves wafer cleaning quality, reduces wafer scrap due to light attenuation, and significantly increases production efficiency and product yield. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the system framework of the present invention; Figure 2 This is a schematic diagram of the installation of the spectral sensor of the present invention. Detailed Implementation

[0016] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0017] First Embodiment This application provides a control system for detecting and self-compensating the light attenuation of LED heating lamp panels; As an embodiment of this application, the system specifically includes: The spectral detection unit collects illuminance data of the LED heating lamp panel through a spectral sensor and transmits the illuminance data to the main control unit; The main control unit reads the illuminance data collected by the spectral detection unit and adjusts the input power of the LED heating lamp plate according to the comparison result between the target illuminance data and the illuminance data. The input power is the active power provided by the power supply circuit to the LED heating lamp plate to drive the lamp beads inside the lamp plate to emit light and realize the heating function. The temperature detection unit collects temperature data of the LED heating lamp panel through a temperature sensor installed inside the LED lamp panel and transmits the temperature data to the main control unit; The current detection unit detects the change in current of the LED heating lamp plate when the input power of the LED heating lamp plate is changed. The LED heating lamp panel receives power adjustment signals from the main control unit to provide heating for the cleaning of semiconductor wafers.

[0018] Second Embodiment As a second embodiment of this application, this embodiment is implemented based on the first embodiment. Please refer to [link / reference]. Figure 1 This application includes a spectral detection unit, a main control unit, a temperature detection unit, a current detection unit, and an LED heating lamp panel; Please see Figure 2 The spectral sensor of the spectral detection unit is fixedly installed directly above the LED heating lamp plate. It transmits the collected illuminance data to the main control unit in real time through the communication interface. The illuminance data is the light intensity when the LED heating lamp plate emits light. Specifically, when the spectral detection unit collects illuminance data of the LED heating lamp panel through the spectral sensor, other light sources need to be turned off or blocked to avoid interference from external stray light, ensuring that the collected illuminance data fully reflects the luminous intensity of the LED heating lamp panel itself and guaranteeing the accuracy of light attenuation detection. The spectral sensor can transmit the collected illuminance data to the main control unit in real time and stably through communication interfaces such as RS485, Ethernet or serial port, providing reliable data support for subsequent light attenuation judgment and self-compensation adjustment.

[0019] Furthermore, the spectral detection unit continuously collects 10 to 20 sets of illuminance data of the LED heating lamp panel under normal process conditions based on the illuminance acquisition frequency. After removing the maximum and minimum values ​​from the 10 to 20 sets of illuminance data, the average value is taken and set as the target illuminance data. The target illuminance data is then transmitted to the main control unit. Specifically, the illuminance acquisition frequency refers to the time interval at which the spectral sensor of the spectral detection unit acquires illuminance data from the LED heating lamp panel. It can usually be set to 1 to 5 times per second. In this example, the illuminance acquisition frequency is used to acquire illuminance data from the LED heating lamp panel under normal process conditions to determine the target illuminance data. This ensures that data acquisition is completed during the non-cooling stage of the lamp panel to avoid interference. Normal process conditions refer to the LED heating lamp panel being in the standard initial production state set by the wafer cleaning equipment. At this time, the lamp panel has not experienced light attenuation and can output stable light power. Acquiring 10 to 20 sets of data is to reduce the random error of a single acquisition by taking the average value after multiple sampling and removing the maximum and minimum values, making the data more representative. The target illuminance data is the illuminance benchmark value under normal process conditions obtained by the above average calculation. Its function is to serve as a reference standard for judging whether the lamp panel has experienced light attenuation in the subsequent production process. When the real-time acquired illuminance data is lower than the target value and reaches the preset threshold, the system will trigger the self-compensation process to ensure the stability of the lamp panel's light power density.

[0020] The main control unit is equipped with a communication interface that matches the spectrum detection unit, temperature detection unit and current detection unit. It receives and stores the target illuminance data, compares the real-time received illuminance data with the target illuminance data, and outputs a power adjustment signal to the LED heating lamp panel based on the comparison result. Specifically, the main control unit is equipped with communication interfaces that match the spectral detection unit, temperature detection unit, and current detection unit. This means that the interface type of the main control unit, such as RS485, Ethernet, or serial port, is consistent with the output interface type of each detection unit to ensure smooth data transmission. The spectral detection unit needs to transmit illuminance data, the temperature detection unit needs to transmit temperature data, and the current detection unit needs to transmit current data. The main control unit needs to receive this data to achieve multi-dimensional status judgment. Based on the comparison between the real-time illuminance data and the target illuminance data, a power adjustment signal is output to the LED heating lamp panel. This is because when the real-time illuminance data is lower than the target illuminance data, it indicates that the lamp panel has experienced light attenuation. It is necessary to increase the input power to compensate for the light attenuation, so that the light power density of the lamp panel can be restored to the level that meets the wafer heating requirements, thereby ensuring the heating requirements of wafer cleaning.

[0021] Furthermore, by comparing the real-time received illuminance data with the target illuminance data through the main control unit, a self-compensation operation is performed when the real-time received illuminance data is less than the target illuminance data, as follows: The main control unit gradually increases the input power of the LED heating lamp plate in increments of 5% to 10%, generates a power adjustment signal, and transmits it to the LED heating lamp plate to adjust the input power of the LED heating lamp plate. When the illuminance data received by the main control unit in real time is consistent with the target illuminance data, the main control unit stops adjusting the input power of the LED heating lamp panel and records the current input power of the LED heating lamp panel as the adaptation power value. Specifically, self-compensation operation refers to the process of gradually increasing the input power of the LED heating lamp panel in increments of 5% to 10% when the main control unit detects that the real-time illuminance data is less than the target illuminance data. Self-compensation is necessary because the LED heating lamp panel experiences light decay due to factors such as lamp chip aging and high-temperature losses, leading to a decrease in illuminance that fails to meet the process requirements for wafer heating. Increasing the input power compensates for this light decay, maintaining a stable light power density. Gradually increasing the power in increments of 5% to 10% avoids large, rapid increases that could cause the lamp panel to overheat or be damaged by overcurrent. Simultaneously, accurate compensation is achieved through real-time illuminance data feedback, ensuring a safe and effective adjustment process. The adaptive power value refers to the current input power of the LED heating lamp panel when the real-time illuminance data matches the target illuminance data during self-compensation. This adaptive power value serves as the adaptive operating power after light decay. The main control unit feeds this value back to the host computer to update process parameters, ensuring the lamp panel can stably output the light power required for heating after wafer cleaning during subsequent operation.

[0022] Furthermore, the temperature detection unit includes at least three temperature sensors, which are embedded in the gaps between the LED bead array and the heat dissipation substrate of the LED heating lamp body, respectively. The temperature data collected by the temperature sensors is transmitted to the main control unit through the communication interface. When the temperature data collected by any temperature sensor exceeds the preset safe temperature threshold, the main control unit stops the self-compensation operation. Specifically, the temperature detection unit is equipped with at least three temperature sensors to monitor the temperature at multiple points in different key areas of the LED heating lamp panel, such as the gaps between the LED bead arrays and the heat sink substrate. This avoids the limitations of single-point monitoring and ensures a comprehensive and accurate understanding of the temperature distribution of the lamp panel. The sensors are embedded in the gaps between the LED bead arrays and the heat sink substrate because the LED bead array is the main heat-generating area, and the heat sink substrate is the core heat dissipation component. Temperature changes at these locations directly reflect the thermal management status of the lamp panel, facilitating the timely detection of local overheating risks. When the temperature data collected by any temperature sensor exceeds the preset safe temperature threshold, the main control unit stops the self-compensation operation. This is to prevent the increase in power during the self-compensation process from further aggravating the temperature rise of the lamp panel, avoiding irreversible damage to the LED beads and heat sink substrate due to overheating, and playing a crucial role in protecting the equipment. The preset safe temperature threshold is the highest temperature limit at which the lamp panel can operate safely. It is stored in the control program of the main control unit and is determined based on factors such as the temperature resistance performance of the LED beads, the material characteristics of the heat sink substrate, and long-term reliability testing of the equipment. It is generally in the range of 80℃ to 100℃. The specific safe temperature threshold setting needs to be determined in conjunction with the specific model and material parameters of the lamp panel.

[0023] Furthermore, the current detection unit is connected in series in the power supply circuit of the LED heating lamp panel, and uses a Hall current sensor to detect the real-time input current and transmit the current to the main control unit; When the input power of the LED heating lamp panel is fixed, if the deviation between the real-time input current and the theoretical constant current exceeds ±5%, or if the deviation between the current and the input power increases by 5% to 10% each time, the deviation exceeds ±3%, the main control unit will issue an abnormal warning signal and stop the self-compensation operation. Specifically, the current detection unit uses a Hall current sensor. By connecting its current detection circuit in series with the power supply circuit of the LED heating lamp panel, all the operating current of the lamp panel flows through the sensor, thereby realizing the detection and transmission of the input current in real time. When the input power of the LED heating lamp panel is fixed, if the deviation between the real-time input current and the theoretical constant current exceeds ±5%, it means that when the input power of the lamp panel is stable, the current should remain constant. If the actual current differs from the theoretically calculated constant value by more than 5%, it indicates that the lamp panel may have abnormalities such as damaged LED beads or circuit faults. When the input power is increased by 5% to 10%, the deviation of the current change exceeds ±3%. This is because the input power and current have a linear relationship, and the current change corresponding to each power increment should be basically consistent. If the deviation exceeds 3%, it indicates that the electro-optical conversion characteristics of the lamp panel are abnormal. The deviation exceeding ±5% or ±3% is determined based on the electrical characteristics of the LED heating lamp panel, the accuracy of the sensor, and long-term testing and verification. It can effectively identify equipment abnormalities and avoid misjudgment. After exceeding the limit, the main control unit issues an abnormality warning and stops the self-compensation operation, which can prevent the equipment from burning out due to continued power adjustment when the lamp panel is faulty, thus ensuring equipment safety and production reliability.

[0024] Furthermore, after each completion of the illuminance data acquisition operation or the input power adjustment of the LED heating lamp panel, the main control unit causes the LED heating lamp panel to enter a zero power input phase for 10 to 30 seconds. Specifically, after each illuminance data acquisition or input power adjustment, the main control unit puts the LED heating lamp panel into a zero-power input phase of 10 to 30 seconds. This is to allow the lamp panel sufficient time to dissipate heat and cool down after data acquisition or power adjustment, avoiding excessively high lamp panel temperature caused by continuous operation, which could lead to accelerated aging of LED beads, equipment damage, and other problems. This ensures the reliability and lifespan of the lamp panel. The zero-power input phase means that the LED heating lamp panel stops receiving external power input and is in a power-off cooling state. The cooling time is set to 10 to 30 seconds, which is determined by comprehensively considering the lamp panel's heat dissipation efficiency, material temperature resistance characteristics, and actual production efficiency requirements. A 10-second cooling time can meet basic heat dissipation requirements, while a 30-second cooling time can cope with deep heat dissipation after continuous high load. This range achieves a balance between effective heat dissipation and production efficiency, avoiding lamp panel overheating without excessively affecting the testing process due to excessive cooling time.

[0025] It should be noted that when comparing the real-time received illuminance data with the target illuminance data, if the real-time received illuminance data is less than the preset attenuation threshold of the target illuminance data, the main control unit will issue a self-compensation calibration reminder through the audible and visual alarm module, and at the same time transmit the reminder signal to the human-machine interface of the host computer of the device. Specifically, when the illuminance data received in real time is less than the preset attenuation threshold of the target illuminance data, it indicates that light attenuation has occurred in the LED heating lamp panel, which can affect the heating quality of the wafer. At this time, the main control unit issues sound and light prompts through the built-in or external acoustic-optic alarm module, intuitively reminding the on-site operator to start self-compensation calibration. At the same time, the reminder signal is transmitted to the human-machine interaction interface of the equipment host computer, realizing dual warnings remotely and on-site. Among them, the attenuation threshold is a pre-determined illuminance difference standard used to clarify the trigger condition for self-compensation. Generally, it is preset according to the influence degree of the lamp panel light attenuation on the wafer process, long-term operation test data of the equipment, and maintenance experience. For example, the attenuation threshold is set to 85% to 95% of the target illuminance data. When the value of the illuminance data received in real time is less than 85% to 95% of the target illuminance data, it will remind to perform self-compensation. By accurately grasping the start time of self-compensation through the attenuation threshold, it can avoid wafer scrapping caused by excessive light attenuation. By issuing a reminder through the acoustic-optic alarm module, it can quickly attract the attention of the operator at the production site, ensuring the timely execution of self-compensation operations. This module can be an external device supporting the main control unit or a functional module integrated inside it. The equipment host computer refers to a computer system that centrally controls and manages data for the wafer cleaning equipment where the LED heating lamp panel is located, and has a human-machine interaction interface for receiving reminder signals, displaying the operating status and process parameters of the equipment, facilitating the monitoring and operation of management personnel.

[0026] Further, after the self-compensation operation is completed, the main control unit transmits the recorded adapted power value to the equipment host computer. The equipment host computer updates the corresponding heating parameters of the wafer cleaning process, and the LED heating lamp panel operates according to the updated adapted power value. The equipment host computer is equipped with a human-machine interaction touch screen and a human-machine interaction interface; Specifically, after the self-compensation operation is completed, the main control unit transmits the recorded adapted power value to the equipment host computer. The equipment host computer updates the corresponding heating parameters of the wafer cleaning process accordingly, so that the LED heating lamp panel operates stably according to the updated adapted power value. At the same time, the human-machine interaction touch screen and the human-machine interaction interface equipped on the equipment host computer can be used to display the adapted power value, process parameters, and equipment operating status, facilitating the monitoring and operation of the operator and ensuring the consistency and reliability of the wafer heating and cleaning process.

[0027] The above embodiments are only used to illustrate the technical method of the present invention and are not restrictive. Although the present invention has been described in detail with reference to the preferred embodiments, those of ordinary skill in the art should understand that the technical method of the present invention can be modified or equivalently replaced without departing from the spirit and scope of the technical method of the present invention.

Claims

1. A control system for detecting and self-compensating the light attenuation of LED heating lamp panels, characterized in that, include: The spectral detection unit collects illuminance data of the LED heating lamp panel through a spectral sensor and transmits the illuminance data to the main control unit; The main control unit reads the illuminance data collected by the spectral detection unit and adjusts the input power of the LED heating lamp plate according to the comparison result between the target illuminance data and the illuminance data. The input power is the active power provided by the power supply circuit to the LED heating lamp plate to drive the lamp beads inside the lamp plate to emit light and realize the heating function. The temperature detection unit collects temperature data of the LED heating lamp panel through a temperature sensor installed inside the LED lamp panel and transmits the temperature data to the main control unit; The current detection unit detects the change in current of the LED heating lamp plate when the input power of the LED heating lamp plate is changed. The LED heating lamp panel receives power adjustment signals from the main control unit to provide heating for the cleaning of semiconductor wafers.

2. The control system for detecting and self-compensating the light attenuation of an LED heating lamp panel according to claim 1, characterized in that, The spectral sensor of the spectral detection unit is fixedly installed above the LED heating lamp panel. It transmits the collected illuminance data to the main control unit in real time through the communication interface. The illuminance data is the light intensity when the LED heating lamp panel emits light.

3. The control system for detecting and self-compensating the light attenuation of an LED heating lamp panel according to claim 2, characterized in that, include: The spectral detection unit continuously collects 10 to 20 sets of illuminance data of the LED heating lamp panel under normal operating conditions based on the illuminance acquisition frequency. After removing the maximum and minimum values ​​from the 10 to 20 sets of illuminance data, the average value is taken and set as the target illuminance data. The target illuminance data is then transmitted to the main control unit.

4. The control system for detecting and self-compensating the light attenuation of an LED heating lamp panel according to claim 1, characterized in that, include: The main control unit is equipped with a communication interface that matches the spectrum detection unit, temperature detection unit and current detection unit. It receives and stores the target illuminance data, compares the real-time received illuminance data with the target illuminance data, and outputs a power adjustment signal to the LED heating lamp panel based on the comparison result.

5. A control system for detecting and self-compensating the light attenuation of an LED heating lamp panel according to claim 4, characterized in that, include: The main control unit compares the real-time received illuminance data with the target illuminance data. When the real-time received illuminance data is less than the target illuminance data, a self-compensation operation is performed, as follows: The main control unit gradually increases the input power of the LED heating lamp plate in increments of 5% to 10%, generates a power adjustment signal, and transmits it to the LED heating lamp plate to adjust the input power of the LED heating lamp plate. When the illuminance data received by the main control unit in real time is consistent with the target illuminance data, the main control unit stops adjusting the input power of the LED heating lamp panel and records the current input power of the LED heating lamp panel as the adaptation power value.

6. A control system for detecting and self-compensating the light attenuation of an LED heating lamp panel according to claim 5, characterized in that, The temperature detection unit includes at least three temperature sensors, which are embedded in the gaps between the LED beads array and the heat dissipation substrate of the LED heating lamp body. The temperature data collected by the temperature sensors is transmitted to the main control unit through the communication interface. When the temperature data collected by any temperature sensor exceeds the preset safe temperature threshold, the main control unit stops the self-compensation operation.

7. A control system for detecting and self-compensating the light attenuation of an LED heating lamp panel according to claim 6, characterized in that, include: The current detection unit is connected in series in the power supply circuit of the LED heating lamp plate. It uses a Hall current sensor to detect the real-time input current and transmits the current to the main control unit. When the input power of the LED heating lamp panel is fixed, if the deviation between the real-time input current and the theoretical constant current exceeds ±5%, or if the deviation between the current and the input power increases by 5% to 10% each time, the deviation exceeds ±3%, the main control unit will issue an abnormal warning signal and stop the self-compensation operation.

8. A control system for detecting and self-compensating the light attenuation of an LED heating lamp panel according to claim 7, characterized in that, After each completion of the illuminance data acquisition operation or the input power adjustment of the LED heating lamp panel, the main control unit causes the LED heating lamp panel to enter a zero power input phase for 10 to 30 seconds.

9. A control system for detecting and self-compensating the light attenuation of an LED heating lamp panel according to claim 5, characterized in that, include: By comparing the real-time received illuminance data with the target illuminance data, when the real-time received illuminance data is less than the preset attenuation threshold of the target illuminance data, the main control unit issues a self-compensation calibration reminder through the audible and visual alarm module, and at the same time transmits the reminder signal to the human-machine interface of the host computer.

10. A control system for detecting and self-compensating the light attenuation of an LED heating lamp panel according to claim 9, characterized in that, After the main control unit completes the self-compensation operation, it transmits the recorded adaptive power value to the equipment host computer. The equipment host computer updates the corresponding wafer cleaning process heating parameters, and the LED heating lamp panel operates according to the updated adaptive power value. The equipment host computer is equipped with a human-machine interactive touch screen and a human-machine interactive interface.

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